CN110186613A - A kind of thermal radiation vacuum gauge based on fluorescence method - Google Patents
A kind of thermal radiation vacuum gauge based on fluorescence method Download PDFInfo
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- CN110186613A CN110186613A CN201910483212.2A CN201910483212A CN110186613A CN 110186613 A CN110186613 A CN 110186613A CN 201910483212 A CN201910483212 A CN 201910483212A CN 110186613 A CN110186613 A CN 110186613A
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- fluorescent material
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- thermal radiation
- fluorescence
- optic probe
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- 230000005855 radiation Effects 0.000 title claims abstract description 26
- 238000002795 fluorescence method Methods 0.000 title claims abstract description 13
- 239000000463 material Substances 0.000 claims abstract description 60
- 239000000523 sample Substances 0.000 claims abstract description 36
- 239000013307 optical fiber Substances 0.000 claims abstract description 10
- 238000010438 heat treatment Methods 0.000 claims description 20
- 239000000758 substrate Substances 0.000 claims description 20
- 238000012545 processing Methods 0.000 claims description 11
- 230000003287 optical effect Effects 0.000 claims description 4
- 229910052573 porcelain Inorganic materials 0.000 claims 1
- 238000005259 measurement Methods 0.000 abstract description 7
- 230000004043 responsiveness Effects 0.000 abstract description 3
- 239000011257 shell material Substances 0.000 description 12
- 238000012546 transfer Methods 0.000 description 9
- 238000010586 diagram Methods 0.000 description 5
- 230000032683 aging Effects 0.000 description 4
- 230000000875 corresponding effect Effects 0.000 description 4
- 239000000919 ceramic Substances 0.000 description 3
- 238000004891 communication Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- 230000002596 correlated effect Effects 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000002360 explosive Substances 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
- 230000032258 transport Effects 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L21/00—Vacuum gauges
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
Abstract
The present invention provides a kind of thermal radiation vacuum gauges based on fluorescence method, it is used to measure the indoor air pressure of vacuum chamber and vacuum degree, including vacuum meter shell (1), the fluorescent material (2) being arranged in vacuum meter shell, optic probe (3), the optic probe (3) is spaced fluorescent material (2) setting, wherein, in the operating condition, the fluorescent material (2), which is excited, issues fluorescence, the optic probe (3) receives the fluorescence and is transferred to transmitter (5) by optical fiber (4), the transmitter (5) calculates vacuum degree.The geometric dimension of optic probe and fluorescent material of the present invention can be very small, corresponding thermal capacitance also very little, and measurement responsiveness is high, is conducive to miniaturization and integrated.The configuration of the present invention is simple, easy to use, measurement is accurate, has high commercial value.
Description
Technical field
The invention belongs to vacuum measurement field and technical field of optical fiber sensing, are related to a kind of vacuum meter, in particular to a kind of
Thermal radiation vacuum gauge based on fluorescence method.
Background technique
Thermal radiation vacuum gauge is according at low pressure in the prior art, and gas molecule heat transfer is directly proportional to gas pressure
Principle made of, representative thermal radiation vacuum gauge includes resistance vacuum gauge (Pirani) and thermocouple vacuum ga(u)ge.Heat transfer
Vacuum meter is to support a heating wire by side rod in a glass shell, and heated filament passes to electric current heating, keeps its temperature projecting
The temperature of gas and shell, the heat of sending pass through the heat transfer of ambient gas molecule or the solid thermal conduction of filament itself, or
Heat radiation is released.When the gas molecule collision of low temperature is to high temperature heated filament, heat can be captured from heated filament, size is proportional to gas
Pressure.The relationship of amount of thermal conduction Q and pressure p can be written as Q=K1+K2p, and wherein K1 and K2 is constant.When reaching thermal balance, heat
The temperature of silk is decided by gas heat transfer, thus is also just decided by gas pressure.Heated filament can be used if being calibrated in advance
Temperature or resistance value or its correlative indicate the pressure or vacuum degree of gas.
The heated filament of thermal radiation vacuum gauge had not only been used as heating source but also had been used as thermometric source, by heated filament itself solid thermal conduction and
Heat radiation is exothermic to be affected, and the influence vulnerable to outside electromagnetic interference and temperature, therefore precision is not high.The aging of heated filament
Phenomenon is than more serious, it is necessary to periodic calibration.For in severe small space (such as toxic, inflammable, explosive, high temperature and pressure, forceful electric power
The occasions such as magnetic disturbance) it can not be applicable in.
And in currently available technology, it can be effectively solved heated filament problem of aging in vacuum meter there is no one kind, that is, pass through
Other modes substitute its heated filament, so that the technical solution to solve the above problems, true without a kind of heat transfer based on fluorescence method
Sky meter.
Summary of the invention
For the defects in the prior art, the object of the present invention is to provide a kind of thermal radiation vacuum gauge based on fluorescence method,
It is used to measure the indoor air pressure of vacuum chamber and vacuum degree, including vacuum meter shell, the fluorescence being arranged in vacuum meter shell
Material, optic probe, the setting of fluorescent material described in the optic probe interval,
In the operating condition, the fluorescent material, which is excited, issues fluorescence, and the optic probe receives the fluorescence and leads to
It crosses optical fiber and is transferred to transmitter, the transmitter calculates vacuum degree.
Preferably, the transmitter includes optical-electric module and data processing module, and the optical-electric module will be for that will receive
Fluorescence be converted to electric signal, and be transmitted to the data processing module, the data processing module is for will be received
Electric signal is converted to temperature signal, and calculates vacuum degree based on temperature signal.
Preferably, the optical-electric module issues light beam by fiber-optic illuminated on fluorescent material, to the fluorescent material into
Row heating and excitation.
Preferably, the fluorescent material is set on a substrate, and plane is in the optic probe where the substrate
It is vertically arranged.
Preferably, the substrate is built-in with a heating device, and the heating device is used to heat to the fluorescent material.
Preferably, the substrate is aeroge or porous ceramics.
Preferably, the optic probe includes an optical lens, is used to accelerate heating process.
It preferably, further include a host computer, the host computer is for receiving the vacuum degree information from transmitter.
The present invention in order to measure the indoor air pressure of vacuum chamber or vacuum degree, by be arranged in be arranged in vacuum meter shell it is glimmering
Luminescent material, optic probe, the setting of fluorescent material described in the optic probe interval, in the operating condition, the fluorescent material quilt
Excitation issues fluorescence, and the optic probe receives the fluorescence and is transferred to transmitter by optical fiber, to measure vacuum chamber
Interior air pressure or vacuum degree, the working principle of apparatus of the present invention are to be utilized twilight sunset service life of fluorescence to be only monotonically correlated with temperature,
The twilight sunset service life by detecting fluorescence can be obtained by the temperature of fluorescent material position, then pass through the change curve of temperature
The gas pyroconductivity of environment, acquires vacuum degree using the gentle relationship for being pressed into direct ratio of amount of thermal conduction where acquiring fluorescent material,
Compared with existing thermal radiation vacuum gauge, the present invention separates heating element and temperature element, can between each other without heat transfer
More accurately to measure the corresponding vacuum degree of gas heat transfer.Probe segment is all-optical system, no current, non-electromagnetic noise,
Thermal stability is high, does not have the aging phenomenon of heated filament, will not be by the interference of external electromagnetic noise, high pressure resistant, anticorrosive, energy
It works under strong electromagnetic and severe chemical environment.The geometric dimension of used optic probe and fluorescent material can be non-
Often small, corresponding thermal capacitance also very little, measurement responsiveness is high, is conducive to miniaturization and integrated.The configuration of the present invention is simple, user
Just, measurement is accurate, has high commercial value.
Detailed description of the invention
Upon reading the detailed description of non-limiting embodiments with reference to the following drawings, other feature of the invention,
Objects and advantages will become more apparent upon:
Fig. 1 shows specific embodiment according to the present invention, a kind of structure of the thermal radiation vacuum gauge based on fluorescence method
Schematic diagram；And
Fig. 2 shows first embodiment according to the present invention, the structure of another thermal radiation vacuum gauge based on fluorescence method
Schematic diagram.
Specific embodiment
In order to preferably technical solution of the present invention be made clearly to show, the present invention is made into one with reference to the accompanying drawing
Walk explanation.
Fig. 1 shows specific embodiment according to the present invention, a kind of structure of the thermal radiation vacuum gauge based on fluorescence method
Schematic diagram, and as a preferred embodiment of the invention, Fig. 2 shows another thermal radiation vacuum gauges based on fluorescence method
Structural schematic diagram, the present invention will be further described through specific embodiments of the present invention in conjunction with Fig. 1 and Fig. 2.
The object of the present invention is to provide a kind of thermal radiation vacuum gauges based on fluorescence method, are used to measure vacuum chamber indoor
Air pressure and vacuum degree, cardinal principle are to be utilized twilight sunset service life of fluorescence to be monotonically correlated with temperature, pass through detection fluorescence
The twilight sunset service life can be obtained by the temperature of fluorescent material position, then acquire fluorescent material institute by the change curve of temperature
In the gas pyroconductivity of environment, vacuum degree is acquired using the gentle relationship for being pressed into direct ratio of amount of thermal conduction, and in the present invention, only
It needs to detect the twilight sunset service life of fluorescence, further, the thermal radiation vacuum gauge based on fluorescence method includes true
Sky meter shell, the fluorescent material being arranged in vacuum meter shell, optic probe, it will be appreciated by those skilled in the art that the vacuum meter
Shell is for protecting the fluorescent material and the optic probe, while the vacuum meter shell provides a kind of vacuum of realizing
Environment, the vacuum meter shell can be preferably disposed at for materials, the fluorescent materials such as glass, high temperature resistant PVC, ceramics
In the vacuum meter shell, the fluorescent material for issuing fluorescence, the optic probe for excite the fluorescent material with
And receive the fluorescence from the fluorescent material.
Further, fluorescent material described in the optic probe interval is arranged, and the optic probe can be with the fluorescence
Material is vertical setting, and can also be arranged at an angle, and the optic probe is mainly used for receiving to be issued from fluorescent material
Fluorescence light wave wavelength, and the fluorescence light wave is calculated based on certain medium.
It will be appreciated by those skilled in the art that in the operating condition, the fluorescent material, which is excited, issues fluorescence, the optics is visited
Head receives the fluorescence and is transferred to transmitter by optical fiber, and the transmitter calculates vacuum degree, in such embodiments,
The present invention makes the fluorescent material issue fluorescence by certain way, and is based on visiting with the spaced optics of the fluorescent material
Head receives the fluorescence, and the optic probe connects at least one optical fiber, and the optical fiber connects a transmitter, and the fluorescence is passed
It transports in the transmitter.
Further, the transmitter includes optical-electric module and data processing module, and the optical-electric module will be for that will connect
The fluorescence of receipts is converted to electric signal, and is transmitted to the data processing module, and the data processing module will be for that will receive
Electric signal be converted to temperature signal, and vacuum degree is calculated based on temperature signal, it is in such embodiments, glimmering by detecting
The twilight sunset service life of light can be obtained by the temperature of fluorescent material position, then acquire phosphor by the change curve of temperature
The gas pyroconductivity of environment, acquires vacuum degree using the gentle relationship for being pressed into direct ratio of amount of thermal conduction where material.
Further, the optical-electric module issues light beam by fiber-optic illuminated on fluorescent material, to the fluorescent material
It is heated and is excited, as a preferred embodiment of the invention, the optical-electric module can issue light beam, and described glimmering
After luminescent material is irradiated by the light beam, it is heated and excites, to issue fluorescence.
Further, the fluorescent material is set on a substrate, plane and the optic probe where the substrate
It is vertical setting, as another preferred embodiment of the invention, the optical-electric module is not used to issue heating beam, and
The both ends of the fluorescent material are provided with a substrate, the substrate is powered, and as a kind of heat medium to fluorescent material into
Row heating, specifically, the substrate are built-in with a heating device, and the heating device is used to heat to the fluorescent material, institute
Stating substrate is aeroge, and in other examples, the substrate can also be porous ceramics or other fenestral fabrics
Substrate, the fluorescent material are placed in a lower thermal conductivity, on porous substrate, and the substrate is beneficial to reduce fluorescent material and base
Solid thermal conduction between plate increases the contact area with gas molecule.
Further, the optic probe includes an optical lens, is used to accelerate heating process, those skilled in the art
Understand, the optic probe includes an optical lens the light energy for heating fluorescent material is preferably converged in fluorescent material
On, heating process can be completed more quickly, can also be improved the efficiency that the fluorescence that fluorescent material is launched is coupled into optical fiber, improved
The signal-to-noise ratio of optical-electric module detection signal.
It further, further include a host computer, the host computer is for receiving the vacuum degree information from transmitter.Ability
Field technique personnel understand that the host computer is used to calculate the vacuum degree according to the light-wave information that receives, and upper
The mode of wire cable or the mode of wireless communication can be used in the connection of machine, wherein the communication mode of wire cable can be selected
Bluetooth, WiFi etc. can be selected in the mode of RS232, RS485, USB etc., wireless communication.
Further, compared with existing thermal radiation vacuum gauge, the present invention separates heating element and temperature element, mutually
Between there is no heat transfer, can more accurately measure the corresponding vacuum degree of gas heat transfer.Probe segment is all-optical system, nothing
Electric current, non-electromagnetic noise, thermal stability are high, do not have the aging phenomenon of heated filament, will not by the interference of external electromagnetic noise,
It is high pressure resistant, anticorrosive, it can work under strong electromagnetic and severe chemical environment.Used optic probe and fluorescent material
Geometric dimension can be very small, corresponding thermal capacitance also very little, measurement responsiveness is high, is conducive to miniaturization and integrated, measurement is true
Reciprocal of duty cycle first heats fluorescent material, and a kind of mode is that light source built in optical-electric module issues the light beam of high-energy and passes through light
Fine and optic probe is irradiated on fluorescent material, is heated to it.Laser or infrared light can be selected in light source.Another heating side
Method is having heaters built in substrate, is heated by it to fluorescent material, then optical-electric module issues pulsed short wavelength purple light, swashs
Fluoresced material issues long wavelength's red fluorescence, and fluorescence is received by optical-electric module by optic probe, optical fiber and is converted into telecommunications
Number it is transferred to data processing module, received electric signal is converted to temperature signal by data processing module, and obtains temperature at any time
Between change curve, gas thermal conduction rate is calculated, and then extrapolate the vacuum degree of local environment, and vacuum degree information is passed
It is defeated by host computer.
It will be appreciated by those skilled in the art that Fig. 1 and Fig. 2 respectively illustrate two kinds of fluorescent materials and optic probe in vacuum meter
The structural schematic diagram of different location in shell, further, the position of the fluorescent material and the optic probe is not merely
It is confined to above two implementation, there can also be other set-up modes, for example, the substrate and the optic probe are in certain
Angle is obliquely installed, at this point, the fluorescent material on the substrate can also change with the optic probe, but this not shadow
A specific embodiment of the invention is rung, it will not be described here.
Specific embodiments of the present invention are described above.It is to be appreciated that the invention is not limited to above-mentioned
Particular implementation, those skilled in the art can make various deformations or amendments within the scope of the claims, this not shadow
Ring substantive content of the invention.
Claims (8)
1. a kind of thermal radiation vacuum gauge based on fluorescence method is used to measure the indoor air pressure of vacuum chamber and vacuum degree, special
Sign is, including vacuum meter shell (1), the fluorescent material (2) being arranged in vacuum meter shell, optic probe (3), the optics
(3) interval fluorescent material (2) of popping one's head in is arranged, wherein
In the operating condition, the fluorescent material (2), which is excited, issues fluorescence, and the optic probe (3) receives the fluorescence simultaneously
It is transferred to transmitter (5) by optical fiber (4), the transmitter (5) calculates vacuum degree.
2. thermal radiation vacuum gauge according to claim 1, which is characterized in that the transmitter (5) includes optical-electric module
(51) and data processing module (52), the optical-electric module (51) is used to be converted to received fluorescence electric signal, and by its
It is transferred to the data processing module (52), the data processing module (52) is used to being converted to received electric signal into temperature letter
Number, and vacuum degree is calculated based on temperature signal.
3. thermal radiation vacuum gauge according to claim 2, which is characterized in that the optical-electric module (51) issues light beam and passes through
It is fiber-optic illuminated on fluorescent material (2), the fluorescent material (2) is heated and is excited.
4. thermal radiation vacuum gauge according to claim 1, which is characterized in that the fluorescent material (2) is arranged on a base
On plate (6), plane where the substrate (6) is vertical setting with the optic probe (3).
5. thermal radiation vacuum gauge according to claim 4, which is characterized in that (6) have a heating device built in the substrate,
The heating device is used to heat to the fluorescent material (2).
6. thermal radiation vacuum gauge according to claim 4, which is characterized in that the substrate (6) is aeroge or porous pottery
Porcelain.
7. thermal radiation vacuum gauge according to claim 1, which is characterized in that the optic probe (3) includes an optical lens
Mirror is used to accelerate heating process.
8. thermal radiation vacuum gauge according to claim 1 further includes a host computer (7), the host computer (7) is for receiving
Vacuum degree information from transmitter (5).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910483212.2A CN110186613A (en) | 2019-06-04 | 2019-06-04 | A kind of thermal radiation vacuum gauge based on fluorescence method |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201910483212.2A CN110186613A (en) | 2019-06-04 | 2019-06-04 | A kind of thermal radiation vacuum gauge based on fluorescence method |
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| CN110186613A true CN110186613A (en) | 2019-08-30 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111486913A (en) * | 2020-04-26 | 2020-08-04 | 上海集迦电子科技有限公司 | Optical fiber flowmeter with fluorescent material and control method |
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|---|---|---|---|---|
| JPH0521037A (en) * | 1991-07-12 | 1993-01-29 | Tokai Univ | Electric field emission type vacuum gauge |
| KR20060094204A (en) * | 2005-02-23 | 2006-08-29 | 삼성전자주식회사 | Apparatus for measuring the pressure in a process chamber |
| CN1969175A (en) * | 2004-11-24 | 2007-05-23 | 株式会社爱发科 | Pirani gauge |
| KR100806960B1 (en) * | 2006-08-31 | 2008-02-22 | 한국표준과학연구원 | Vacuum gauge using hot plate and cantilever |
| JP2012211848A (en) * | 2011-03-31 | 2012-11-01 | Sumitekku:Kk | Fluorescence thermometer and temperature measuring method |
| CN103134833A (en) * | 2013-01-30 | 2013-06-05 | 南京五石金传感技术有限公司 | Material heat conduction analysis device based on fluorescence method |
| CN103674916A (en) * | 2013-12-11 | 2014-03-26 | 王兵 | Novel fluorescence signal demodulating device and method |
| CN210128790U (en) * | 2019-06-04 | 2020-03-06 | 上海集迦电子科技有限公司 | Heat conduction vacuum gauge based on fluorescence method |
-
2019
- 2019-06-04 CN CN201910483212.2A patent/CN110186613A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0521037A (en) * | 1991-07-12 | 1993-01-29 | Tokai Univ | Electric field emission type vacuum gauge |
| CN1969175A (en) * | 2004-11-24 | 2007-05-23 | 株式会社爱发科 | Pirani gauge |
| KR20060094204A (en) * | 2005-02-23 | 2006-08-29 | 삼성전자주식회사 | Apparatus for measuring the pressure in a process chamber |
| KR100806960B1 (en) * | 2006-08-31 | 2008-02-22 | 한국표준과학연구원 | Vacuum gauge using hot plate and cantilever |
| JP2012211848A (en) * | 2011-03-31 | 2012-11-01 | Sumitekku:Kk | Fluorescence thermometer and temperature measuring method |
| CN103134833A (en) * | 2013-01-30 | 2013-06-05 | 南京五石金传感技术有限公司 | Material heat conduction analysis device based on fluorescence method |
| CN103674916A (en) * | 2013-12-11 | 2014-03-26 | 王兵 | Novel fluorescence signal demodulating device and method |
| CN210128790U (en) * | 2019-06-04 | 2020-03-06 | 上海集迦电子科技有限公司 | Heat conduction vacuum gauge based on fluorescence method |
Non-Patent Citations (1)
| Title |
|---|
| 王欲知等: "热传导真空计解说(一)", 真空, 15 March 1981 (1981-03-15), pages 41 - 45 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111486913A (en) * | 2020-04-26 | 2020-08-04 | 上海集迦电子科技有限公司 | Optical fiber flowmeter with fluorescent material and control method |
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