CN110186379A - A kind of high-precision efficient film thickness measuring instrument - Google Patents
A kind of high-precision efficient film thickness measuring instrument Download PDFInfo
- Publication number
- CN110186379A CN110186379A CN201910659325.3A CN201910659325A CN110186379A CN 110186379 A CN110186379 A CN 110186379A CN 201910659325 A CN201910659325 A CN 201910659325A CN 110186379 A CN110186379 A CN 110186379A
- Authority
- CN
- China
- Prior art keywords
- light source
- led light
- workbench
- film thickness
- optical sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
A kind of high-precision efficient film thickness measuring instrument, it is related to measured thin film technical field.It includes bracket, the upper end of the bracket is provided with workbench, several columns are vertically arranged on the workbench, the top of the column is provided with top plate, sliding panel is slidably connected on column, LED light source is provided on the lower end surface of the sliding panel, optical sensor is provided on workbench below the LED light source, the top plate is internally provided with control circuit board and power module, liquid crystal display is provided on the front end face of top plate, the side of the liquid crystal display is provided with control button, the control circuit board respectively with LED light source, optical sensor, power module, liquid crystal display and control button are electrically connected.Its structure is simple, and design rationally, can carry out the adjustment of the distance between LED light source and optical sensor, and can carry out non-contact detecting to film according to the different type of film to be measured, effectively improve measurement efficiency and measurement accuracy.
Description
Technical field
The present invention relates to measured thin film technical fields, and in particular to a kind of high-precision efficient film thickness measuring instrument.
Background technique
In recent years, with the development of science and technology huge variation occurs for the development of film industry, film product
Using becoming very extensive, application range covers the fields such as industry, agricultural, electronic product industry and aerospace, the whole world for
The demand of film shows the trend gradually increased.The country has thousands of membrane production equipment lines at present, however most of
Conventional contact is still all used without effective film thickness detection device, such as the coating layer thickness of thermo-sensitive material in film production
Measurement method-micrometer, this may can generate biggish error for thickness very thin film, cause measurement accuracy inclined
It is low, so that the quality of device is influenced, so can not just apply this measurement side for the industry more demanding for membrane quality
Formula.Therefore need to carry out membrane quality necessary detection, thickness measure is one of the important content of membrane quality detection.
Current film thickness measuring instrument mostly uses contact type measurement, and the precision of measurement is lower, while contactless film thickness is surveyed
Amount instrument can not effectively be measured according to different film thickness.
Summary of the invention
In view of the defects and deficiencies of the prior art, the present invention intends to provide a kind of high-precision efficient film thickness measuringes
Instrument, it can solve film thickness measuring instrument traditional at present and mostly uses contact type measurement, and the precision of measurement is lower while contactless
The defect that film thickness measuring instrument can not effectively be measured according to different film thickness.
To achieve the above object, the present invention is using following technical scheme: it include bracket, workbench, column, top plate,
Sliding panel, LED light source, optical sensor, control circuit board, power module, liquid crystal display, control button, the bracket
Upper end is provided with workbench, several columns are vertically arranged on the workbench, and the top of the column is provided with top plate, stands
Sliding panel is slidably connected on column, and LED light source, the work below the LED light source are provided on the lower end surface of the sliding panel
It is provided with optical sensor on platform, the top plate is internally provided with control circuit board and power module, on the front end face of top plate
Be provided with liquid crystal display, the side of the liquid crystal display is provided with control button, the control circuit board respectively with LED light
Source, optical sensor, power module, liquid crystal display and control button are electrically connected.
Further, there are four the column settings, sliding rail is provided on four columns, the sliding panel connects with column
One end of touching is provided with sliding block, and the sliding block is slidably connected with sliding rail cooperation, and linear motor, institute are provided on the sliding rail
The output end for stating linear motor is fixedly connected with a slide block.
Further, the linear motor and linear motor control switch are electrically connected, the linear motor control switch
It is arranged on the front end face of top plate.
Further, the lower end surface of the sliding panel is provided with the first translucent cover, and first translucent cover is by LED light source packet
It wraps up in inside it.
Further, the upper surface of the workbench is provided with the second translucent cover, and second translucent cover senses illumination
Device wraps up inside it.
Further, the bottom end of the bracket is provided with universal wheel, is provided with brake gear on the universal wheel.
The working principle of the invention: in use, by film to be measured be put on workbench LED light source and optical sensor it
Between, the movement of linear motor is controlled by linear motor control switch, move up and down being capable of root so that sliding panel drives LED light source
The adjustment that LED light source and optical sensor relative position are carried out according to the type of different films, when measurement, LED light source illumination transmitted through
Film to be detected, the photodiode being irradiated on optical sensor 7, according to incident luminous intensity difference photodiode two
The photoelectric current size at end changes, then photoelectric current is converted into voltage through operational amplifier, completes optical signal to electric signal
Conversion, voltage signal are converted into digital quantity through ADC, then carry out the calculating of intensity of illumination and done by I2C write-in single-chip microcontroller subsequent
Data processing, final process of measurement implementing result shown by liquid crystal display, and liquid crystal display is also used to show just
Beginning illuminance transmits illuminance, attenuation, the information such as thickness value.
After adopting the above technical scheme, design rationally, can be according to be measured the invention has the following beneficial effects: its structure is simple
The different type for measuring film carries out the adjustment of the distance between LED light source and optical sensor, and can carry out to film non-contact
Detection, effectively improves measurement efficiency and measurement accuracy.
Detailed description of the invention
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below
There is attached drawing needed in technical description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this
Some embodiments of invention without any creative labor, may be used also for those of ordinary skill in the art
To obtain other drawings based on these drawings.
Fig. 1 is main view of the invention；
Fig. 2 is the right view of corresponding diagram 1；
Fig. 3 is the principle of the present invention connection block diagram.
Description of symbols: bracket 1, workbench 2, column 3, top plate 4, sliding panel 5, LED light source 6, optical sensor 7,
Control circuit board 8, power module 9, liquid crystal display 10, control button 11, sliding rail 12, sliding block 13, linear motor 14, straight-line electric
Machine control switch 15, the first translucent cover 16, the second translucent cover 17, universal wheel 18.
Specific embodiment
Referring to shown in Fig. 1-Fig. 3, present embodiment the technical solution adopted is that: it includes bracket 1, workbench 2, vertical
Column 3, top plate 4, sliding panel 5, LED light source 6, optical sensor 7, control circuit board 8, power module 9, liquid crystal display 10, control
Key 11 processed, the bottom end of the bracket 1 are provided with universal wheel 18, brake gear are provided on the universal wheel 18, by universal
Wheel 18 is convenient for the movement of device；The upper end of the bracket 1 is provided with workbench 2, is vertically arranged with several on the workbench 2
Column 3, the top of the column 3 are provided with top plate 4, and sliding panel 5, the lower end surface of the sliding panel 5 are slidably connected on column 3
On be provided with LED light source 6, be provided with optical sensor 7 on the workbench of 6 lower section of LED light source, optical sensor 7 uses
GY-30 number optical sensor, the top plate 4 are internally provided with control circuit board 8 and power module 9, and control circuit board 8 is adopted
It uses STC89C51 as data processing chip, liquid crystal display 10 is provided on the front end face of top plate 4,10 screen of liquid crystal display uses
LCD1602 liquid crystal display, the side of the liquid crystal display 10 are provided with control button 11, and the control circuit board 8 is distinguished
It is electrically connected with LED light source 6, optical sensor 7, power module 9, liquid crystal display 10 and control button 11.
There are four the settings of column 3, sliding rail 12 is provided on four columns 3, the sliding panel 5 is contacted with column 3
One end be provided with sliding block 13, the sliding block 13 is slidably connected with the sliding rail 12 cooperation, is provided with straight line on the sliding rail 12
The output end of motor 14, the linear motor 14 is fixedly connected with sliding block 13；The linear motor 14 is opened with linear motor control
It closes 15 to be electrically connected, the linear motor control switch 15 is arranged on the front end face of top plate 4；Pass through linear motor control switch
The movement of 15 control linear motors 14 so that sliding panel 5 drive LED light source 6 move up and down can according to the types of different films into
The adjustment of row LED light source 6 and 7 relative position of optical sensor.
The lower end surface of the sliding panel 5 is provided with the first translucent cover 16, and first translucent cover 16 wraps up LED light source 6
Inside it；The upper surface of the workbench 2 is provided with the second translucent cover 17, and second translucent cover 17 is by optical sensor 7
Package is inside it；It can be improved the precision of measurement by the setting of the first translucent cover 16 and the second translucent cover 17.
When it is implemented, film to be measured is put on workbench 2 between LED light source 6 and optical sensor 7, by straight
Line motor control switch 15 controls the movement of linear motor 14, so that sliding panel 5 drives LED light source 6, move up and down being capable of basis
The types of different films carries out the adjustment of LED light source 6 and 7 relative position of optical sensor, when measurement, 6 illumination of LED light source transmitted through
Film to be detected, the photodiode being irradiated on optical sensor 7, according to incident luminous intensity difference photodiode two
The photoelectric current size at end changes, then photoelectric current is converted into voltage through operational amplifier, completes optical signal to electric signal
Conversion, voltage signal are converted into digital quantity through ADC, then carry out the calculating of intensity of illumination and done by I2C write-in single-chip microcontroller subsequent
Data processing, final process of measurement implementing result shown that liquid crystal display 10 is also used to show by liquid crystal display 10
Show initial illuminance, transmits illuminance, attenuation, the information such as thickness value.
The above is only used to illustrate the technical scheme of the present invention and not to limit it, and those of ordinary skill in the art are to this hair
The other modifications or equivalent replacement that bright technical solution is made, as long as it does not depart from the spirit and scope of the technical scheme of the present invention,
It is intended to be within the scope of the claims of the invention.
Claims (6)
1. a kind of high-precision efficient film thickness measuring instrument, it is characterised in that: it includes bracket, workbench, column, top plate, sliding
Plate, LED light source, optical sensor, control circuit board, power module, liquid crystal display, control button, the upper end of the bracket
It is provided with workbench, is vertically arranged with several columns on the workbench, the top of the column is provided with top plate, on column
Sliding panel is slidably connected, is provided with LED light source on the lower end surface of the sliding panel, on the workbench below the LED light source
It is provided with optical sensor, the top plate is internally provided with control circuit board and power module, is arranged on the front end face of top plate
Have a liquid crystal display, the side of the liquid crystal display is provided with control button, the control circuit board respectively with LED light source,
Optical sensor, power module, liquid crystal display and control button are electrically connected.
2. the high-precision efficient film thickness measuring instrument of one kind according to claim 1, it is characterised in that: the column is provided with
Four, sliding rail is provided on four columns, one end that the sliding panel is contacted with column is provided with sliding block, the sliding block and institute
It states sliding rail cooperation to be slidably connected, linear motor is provided on the sliding rail, the output end and sliding block of the linear motor are fixed to be connected
It connects.
3. the high-precision efficient film thickness measuring instrument of one kind according to claim 2, it is characterised in that: the linear motor with
Linear motor control switch is electrically connected, and the linear motor control switch is arranged on the front end face of top plate.
4. the high-precision efficient film thickness measuring instrument of one kind according to claim 1, it is characterised in that: under the sliding panel
End face is provided with the first translucent cover, and first translucent cover wraps up LED light source inside it.
5. the high-precision efficient film thickness measuring instrument of one kind according to claim 1, it is characterised in that: the workbench it is upper
End face is provided with the second translucent cover, and second translucent cover wraps up optical sensor inside it.
6. the high-precision efficient film thickness measuring instrument of one kind according to claim 1, it is characterised in that: the bottom end of the bracket
It is provided with universal wheel, is provided with brake gear on the universal wheel.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910659325.3A CN110186379A (en) | 2019-07-22 | 2019-07-22 | A kind of high-precision efficient film thickness measuring instrument |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910659325.3A CN110186379A (en) | 2019-07-22 | 2019-07-22 | A kind of high-precision efficient film thickness measuring instrument |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110186379A true CN110186379A (en) | 2019-08-30 |
Family
ID=67725869
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910659325.3A Pending CN110186379A (en) | 2019-07-22 | 2019-07-22 | A kind of high-precision efficient film thickness measuring instrument |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110186379A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112461179A (en) * | 2020-11-11 | 2021-03-09 | 深圳市鑫达辉软性电路科技有限公司 | Thickness automatic check tool is used in flexible circuit board production |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008246435A (en) * | 2007-03-30 | 2008-10-16 | Shibaura Mechatronics Corp | Method and apparatus for applying solution |
| CN102661713A (en) * | 2012-05-09 | 2012-09-12 | 南京乐金熊猫电器有限公司 | Quality inspection device of paint |
| CN102735176A (en) * | 2012-06-25 | 2012-10-17 | 浙江大学 | Device and method for detecting optical film thickness based on optical fiber spectrometer |
| CN207215036U (en) * | 2017-10-11 | 2018-04-10 | 福建安琪儿卫生用品有限公司 | A kind of plasma paper diaper production thickness detection apparatus |
| CN208833185U (en) * | 2018-10-12 | 2019-05-07 | 福建农林大学 | A kind of non-contact type thin film thickness measurement equipment |
-
2019
- 2019-07-22 CN CN201910659325.3A patent/CN110186379A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008246435A (en) * | 2007-03-30 | 2008-10-16 | Shibaura Mechatronics Corp | Method and apparatus for applying solution |
| CN102661713A (en) * | 2012-05-09 | 2012-09-12 | 南京乐金熊猫电器有限公司 | Quality inspection device of paint |
| CN102735176A (en) * | 2012-06-25 | 2012-10-17 | 浙江大学 | Device and method for detecting optical film thickness based on optical fiber spectrometer |
| CN207215036U (en) * | 2017-10-11 | 2018-04-10 | 福建安琪儿卫生用品有限公司 | A kind of plasma paper diaper production thickness detection apparatus |
| CN208833185U (en) * | 2018-10-12 | 2019-05-07 | 福建农林大学 | A kind of non-contact type thin film thickness measurement equipment |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112461179A (en) * | 2020-11-11 | 2021-03-09 | 深圳市鑫达辉软性电路科技有限公司 | Thickness automatic check tool is used in flexible circuit board production |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN201081695Y (en) | Contact roller type plate thickness distribution measuring device | |
| CN102735176A (en) | Device and method for detecting optical film thickness based on optical fiber spectrometer | |
| CN109373964A (en) | A kind of smoothness intelligent detection device | |
| CN206431038U (en) | Fabric Online color-difference measurement device based on fiber spectrometer | |
| CN205352899U (en) | Erythrocyte sedimentation rate automatic measure appearance | |
| CN110186379A (en) | A kind of high-precision efficient film thickness measuring instrument | |
| CN105865686B (en) | A kind of Newton's ring stress measurement device | |
| CN201740727U (en) | Aurosol test paper card analyzer | |
| CN201731916U (en) | Liquid level detection device | |
| CN108801463A (en) | A kind of radium-shine cigarette-brand color difference measuring device | |
| CN209055098U (en) | A kind of smoothness intelligent detection device | |
| CN102997834A (en) | Non-conducting medium film thickness online detecting device of coplane capacitive sensor | |
| CN202709996U (en) | Device capable of measuring film thickness accurately | |
| CN207907825U (en) | A kind of detection device | |
| CN203072041U (en) | Contact image sensor | |
| CN101726267A (en) | Living leaf area tester and leaf area testing method | |
| CN202853573U (en) | Fiber optic spectrometer based optical thin film thickness detection device | |
| CN205826533U (en) | Non-contact vancometer | |
| CN201697877U (en) | Albedometer | |
| CN204788310U (en) | Glass thickness check equipment with adjustable | |
| CN203732442U (en) | Turbidity measuring instrument based on microprocessor STM32F103 | |
| CN208833185U (en) | A kind of non-contact type thin film thickness measurement equipment | |
| CN209470684U (en) | Power battery measuring thickness device | |
| CN209166338U (en) | It is a kind of based on contact with the contactless measurer for thickness combined | |
| CN208968990U (en) | A kind of optical fiber solutions enter the photochromic detector of online spectrum of light |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20190830 |
|
| RJ01 | Rejection of invention patent application after publication |