CN110185737A - A kind of miniature active vibration isolation arrangement - Google Patents
A kind of miniature active vibration isolation arrangement Download PDFInfo
- Publication number
- CN110185737A CN110185737A CN201910258061.0A CN201910258061A CN110185737A CN 110185737 A CN110185737 A CN 110185737A CN 201910258061 A CN201910258061 A CN 201910258061A CN 110185737 A CN110185737 A CN 110185737A
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- China
- Prior art keywords
- control circuit
- piezoelectric actuator
- feedback control
- signal
- circuit
- Prior art date
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B60—VEHICLES IN GENERAL
- B60R—VEHICLES, VEHICLE FITTINGS, OR VEHICLE PARTS, NOT OTHERWISE PROVIDED FOR
- B60R11/00—Arrangements for holding or mounting articles, not otherwise provided for
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B64—AIRCRAFT; AVIATION; COSMONAUTICS
- B64D—EQUIPMENT FOR FITTING IN OR TO AIRCRAFT; FLIGHT SUITS; PARACHUTES; ARRANGEMENTS OR MOUNTING OF POWER PLANTS OR PROPULSION TRANSMISSIONS IN AIRCRAFT
- B64D47/00—Equipment not otherwise provided for
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/002—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion characterised by the control method or circuitry
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/005—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion using electro- or magnetostrictive actuation means
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F2230/00—Purpose; Design features
- F16F2230/08—Sensor arrangement
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F2230/00—Purpose; Design features
- F16F2230/18—Control arrangements
Abstract
The present invention provides a kind of miniature active vibration isolation arrangements, including vibrating sensor, piezoelectric actuator, driving circuit, feedback control circuit；The vibrating sensor induction external vibration signal generates current signal, current signal is sent to feedback control circuit, feedback control circuit is sent to driving circuit according to the driving signal that current signal generates reverse phase, and driving circuit drives piezoelectric actuator to generate vibration identical as external vibration signal amplitude, opposite in phase.The present invention is based on sensor, controller and piezoelectric actuator integrated designs, compare existing piezoelectricity isolation mounting, being not required to external control equipment can work independently；Vibration measurement data can be exported, Systematic Error Correction is used for, meets high-accuracy detecting devices required precision；It occupies little space, can be applied to micro element vibration isolation.
Description
Technical field
The present invention relates to a kind of miniature active vibration isolation arrangements.
Background technique
It is mounted on carry-on photoelectric detection equipment, high to the stability requirement of optical axis, the vibration of carrier aircraft will cause light
System, which is generated as moving, detection accuracy reduces even can not detect target, want to ensure that photoelectric detection equipment meets detection accuracy
It asks, need to usually take vibration isolation measure.Common isolation mounting for photoelectric detection equipment has rubber shock absorber, piezoelectric actuator
Deng.
Such as document " design and application of airborne photoelectric gondola rubber shock absorber " (" China Mechanical Engineering " the 10th phase of volume 25
Page 1310) in describe rubber shock absorber, be fixed by screws on vibrating body by vibration isolator (Electro-Optical Sensor Set), in spiral shell
It follows closely and is placed rubber shock absorber between vibration isolator, vibrating body, controlled between screw and rubber damper using mounting and adjusting pad
Screw height makes rubber shock absorber be in optimum Working.
The defect of this mode is:
1, vibration isolation has lag, bad for high-frequency vibration isolation effect；
2, by vibration isolator have displacement and can not real time correction, influence photoelectric detection equipment precision, be not used to high-precision
Secret agent's measurement equipment；
3, volume is big, is not used to the vibration isolation of micro-optical component.
For another example document " research of intelligent micro-displacement Control System for Active Isolation " (" vibration and impact " 2015 volume 34
Page 212) in describe piezoelectric actuator, multi-disc piezoelectric material, which stacks, to be placed, by the electrode arranged between piece to per a piece of pressure
Electric material applies identical control voltage, realizes the isolation to different vibrations by adjusting voltage.Piezoelectric actuator is mounted on
By between vibration isolator and vibrating body, vibrating sensor is directly connect with vibrating body, measurement vibrating body vibration, vibrating sensor and quilt
Vibration isolator connection, measurement are vibrated by vibration isolator, and controller controls voltage according to the data point reuse of two vibrating sensors, make piezoelectricity
Actuator, which is generated, vibrates opposite vibration with vibrating body, vibrational energy is balanced out, to reach vibration isolation purpose.
The defect of this mode is:
1, vibration isolation can not be individually completed, external controller, vibrating sensor are needed, peripheral equipment is more, inconvenient for use；
2, external vibrating sensor is because of factors such as installation sites, there are alignment error and correction difficulty it is big；
3, volume is big, is not used to the vibration isolation of micro-optical component.
Summary of the invention
In order to solve the above technical problems, the present invention provides a kind of miniature active vibration isolation arrangement, the miniature active vibration isolation dress
It sets using vibrating sensor, controller and piezoelectric actuator integrated design, realizes the vibration isolation to micro component, and can be external
Export vibration data.
The present invention is achieved by the following technical programs.
A kind of miniature active vibration isolation arrangement provided by the invention, including vibrating sensor, piezoelectric actuator, driving circuit,
Feedback control circuit；The vibrating sensor induction external vibration signal generates current signal, and current signal is sent to feedback control
Circuit processed, feedback control circuit are sent to driving circuit, driving circuit driving according to the driving signal that current signal generates reverse phase
Piezoelectric actuator generates vibration identical as external vibration signal amplitude, opposite in phase；The piezoelectric actuator is multiple distributions
Installation, piezoelectric actuator are mounted on above driving circuit, and multiple vibrating sensors are mounted on the gap location of piezoelectric actuator, are fed back
Control circuit is mounted between piezoelectric actuator and driving circuit；Driving circuit is fixed on substrate, and substrate is fixed on vibrated
On the platform of influence.
There are also signal conditioning circuit, the current signal that the vibrating sensor generates first is sent to signal conditioning circuit and puts
Greatly, then by signal conditioning circuit by the signal of amplification it is sent to feedback control circuit.
The signal conditioning circuit is close to feedback control circuit installation.
In upright projection, feedback control circuit is mounted on the distribution center position of piezoelectric actuator.
The piezoelectric actuator rectangular array is uniformly distributed.
The quantity of the signal conditioning circuit and the quantity of vibrating sensor are consistent.
The vibrating sensor, piezoelectric actuator, driving circuit, feedback control circuit power supply line by spool lead into,
Spool passes through substrate and driving circuit and draws branch from feedback control circuit bottom.
The substrate is fixed by mounting hole.
The beneficial effects of the present invention are: it is based on sensor, controller and piezoelectric actuator integrated design, compared to existing
Piezoelectricity isolation mounting, being not required to external control equipment can work independently；Vibration measurement data can be exported, systematic error school is used for
Just, meet high-accuracy detecting devices required precision；It occupies little space, can be applied to micro element vibration isolation.
Detailed description of the invention
Fig. 1 is structural schematic diagram of the invention；
Fig. 2 is the top view of Fig. 1；
Fig. 3 is catenation principle figure of the invention；
Fig. 4 is the exemplary circuit figure of present invention driver circuit；
Fig. 5 is the exemplary circuit figure of feedback control circuit of the present invention；
Fig. 6 is the exemplary circuit figure of signal conditioning circuit of the present invention；
Fig. 7 is the exemplary circuit figure of active isolation control circuit of the present invention；
Fig. 8 is the schematic diagram that the present invention applies in optical system；
In figure: 1- vibrating sensor, 2- piezoelectric actuator, 3- driving circuit, 4- signal conditioning circuit, 5- feedback control electricity
Road, 6- substrate, 7- shell, 8- spool, 9- mounting hole, 21- focusing convex lens, 22- reflecting mirror, the miniature active vibration isolation arrangement of 23-,
24- corrects convex lens, and 25- corrects concavees lens, 26- photoelectric conversion device.
Specific embodiment
Be described further below technical solution of the present invention, but claimed range be not limited to it is described.
A kind of miniature active vibration isolation arrangement as shown in Figure 1, Figure 2, Figure 3 shows, including vibrating sensor 1, piezoelectric actuator 2,
Driving circuit 3, feedback control circuit 5；The vibrating sensor 1 incudes external vibration signal and generates current signal, current signal
It is sent to feedback control circuit 5, as shown in figure 5, feedback control circuit 5 is sent according to the driving signal that current signal generates reverse phase
To driving circuit 3, as shown in figure 4, driving circuit 3 drives piezoelectric actuator 2 to generate, phase identical as external vibration signal amplitude
Opposite vibration；The piezoelectric actuator 2 is multiple distributing installations, and piezoelectric actuator 2 is mounted on 3 top of driving circuit, multiple
Vibrating sensor 1 is mounted on the gap location of piezoelectric actuator 2, and feedback control circuit 5 is mounted on piezoelectric actuator 2 and driving circuit
Between 3；Driving circuit 3 is fixed on substrate 6, and substrate 6 is fixed on platform affected by vibration.
The input terminal 31 of the driving circuit 3 receives the control signal that feedback control circuit 5 exports, and puts through triode Q31
After big, driving FET Q32 conducting provides work energy for piezoelectric actuator, output end 32 and output end 33 connect respectively
2 both ends of piezoelectric actuator, positive pole and ground are led by pipeline 8 into resistance R31 is used for current-limiting protection, and capacitor C31 is for going respectively
Coupling noise reduction, pull down resistor R32 make triode Q31 keep off state when no external control signal inputs, and diode D31 is used for
The protection of reverse current aerial drainage.
The input terminal 51 of the feedback control circuit 5 is connect with 4 output end 43 of signal conditioning circuit, inputs enlarged vibration
Dynamic detection signal after reversely being amplified by operational amplifier OP51, is connected by the input terminal 31 of output end 52 and driving circuit 3
It connects.
There are also signal conditioning circuit 4, the current signal that the vibrating sensor 1 generates first is sent to signal conditioning circuit 4
Amplification, as shown in fig. 6, the signal of amplification is sent to feedback control circuit 5 by signal conditioning circuit 4 again.
The input anode 41 and input cathode 42 of the signal conditioning circuit 4 receive the electricity that vibrating sensor 1 exports
Signal is flowed, resistance R42 is used to convert voltage signal using the input as operational amplifier OP41, capacitor C43 for current signal
For selecting the current signal frequency of vibrating sensor output to respond the vibration of specific frequency, put by operational amplifier OP41
Vibration detection signal after big, is connected to feedback control circuit 5 by output end 43
The signal conditioning circuit 4 is close to feedback control circuit 5 and is installed.
In upright projection, feedback control circuit 5 is mounted on the distribution center position of piezoelectric actuator 2.
2 rectangular array of piezoelectric actuator is uniformly distributed.
The quantity of the signal conditioning circuit 4 is consistent with the quantity of vibrating sensor 1.
The vibrating sensor 1, piezoelectric actuator 2, driving circuit 3, feedback control circuit 5 power supply line by spool 8
It leads into spool 8 passes through substrate 6 and driving circuit 3 and draws branch from 5 bottom of feedback control circuit.
The substrate 6 is fixed by mounting hole 9.
As a result, in the use of the present invention, vibration measurement, vibration isolation and active isolation control circuit are encapsulated jointly
On substrate, after being mounted in equipment, it is only necessary to external power supply, so that it may complete independently vibration isolation.The course of work are as follows: when is produced from outside
When raw vibration signal, vibration measurement component can generate the electric signal with the matched variation of vibration signal, active isolation control circuit
According to the electric signal, the driving signal of reverse phase is generated, vibration isolation component is made to generate, opposite in phase identical as vibration signal amplitude
Vibration signal, two amplitudes are identical, opposite in phase vibration is combined, and become the signal that Oscillation Amplitude is zero, that is, vibrate
It disappears, to realize vibration isolation, as shown in Figure 7.
The active isolation control circuit is collectively constituted by signal conditioning circuit 4, feedback control circuit 5 and driving circuit 3,
Signal conditioning circuit 4 is connect by input anode 41 and input cathode 42 with vibrating sensor 1, output end 43 and feedback
The input terminal 51 of control circuit 5 connects, and the output end 52 of feedback control circuit 5 is connect with the input terminal 31 of driving circuit 3, drives
The output end 32 and output end 33 of circuit 3 are connected to 2 both ends of piezoelectric actuator.
Vibrating sensor 1 incudes external vibration signal, generates faint AC signal, signal conditioning circuit 4 is to this
Small-signal amplifies, and is transferred to feedback control circuit 5, and feedback control circuit generates specific according to oscillating current signal
Amplitude, opposite in phase control signal to driving circuit 3, so that piezoelectric actuator 2 be driven to generate and external vibration signal amplitude
Vibration isolation is realized in identical, opposite in phase vibration；Above-mentioned parts and circuit are mutually encapsulated on substrate 6, while using shell
Driving circuit 3, signal conditioning circuit 4 and feedback control circuit 5 are fixed together by body 7, play fixed support jointly with substrate 6
Effect；Spool 8 is for placing signal wire and power supply line, and for device power supply and signal transmission, mounting hole 9 is used for damping device
It is fixed on platform affected by vibration.
The present invention in optical system application scenarios as shown in figure 8, extraneous light through over-focusing convex lens 21 convergence after pass through
Reflecting mirror 22 reflects, and after carrying out distortion correction by correction convex lens 24 and correction concavees lens 25, is imaged onto photoelectric conversion device 26
On photosurface, it is mounted on photoelectric detection equipment optical system on the motion platforms such as aircraft, unmanned vehicle, vehicle, due to flat
The vibration of platform, the picture on photosurface can generate shake, cause measurement error to increase, using miniature active vibration isolation provided by the invention
After device 23 carries out vibration isolation processing to reflecting mirror 22, the vibration influence of platform can be eliminated substantially, and to requirements of installation space
It is not high, it is particularly suitable for applications in microminiature photoelectric detecting devices, the connection side of miniature active vibration isolation arrangement 23 and reflecting mirror 22
Formula is optics glue sticking.
Claims (8)
1. a kind of miniature active vibration isolation arrangement, including vibrating sensor (1), piezoelectric actuator (2), driving circuit (3), feedback control
Circuit (5) processed, it is characterised in that: vibrating sensor (1) the induction external vibration signal generates current signal, current signal hair
It send to feedback control circuit (5), feedback control circuit (5) is sent to driving electricity according to the driving signal that current signal generates reverse phase
Road (3), driving circuit (3) drive piezoelectric actuator (2) to generate vibration identical as external vibration signal amplitude, opposite in phase；
The piezoelectric actuator (2) is multiple distributing installations, and piezoelectric actuator (2) is mounted on above driving circuit (3), and multiple vibrations pass
Sensor (1) is mounted on the gap location of piezoelectric actuator (2), and feedback control circuit (5) is mounted on piezoelectric actuator (2) and driving electricity
Between road (3)；Driving circuit (3) is fixed on substrate (6), and substrate (6) is fixed on platform affected by vibration.
2. miniature active vibration isolation arrangement as described in claim 1, it is characterised in that: there are also signal conditioning circuit (4), the vibrations
The current signal that dynamic sensor (1) generates first is sent to signal conditioning circuit (4) amplification, then will be put by signal conditioning circuit (4)
Big signal is sent to feedback control circuit (5).
3. miniature active vibration isolation arrangement as claimed in claim 2, it is characterised in that: the signal conditioning circuit (4) is close to anti-
Present control circuit (5) installation.
4. miniature active vibration isolation arrangement as described in claim 1, it is characterised in that: in upright projection, feedback control circuit
(5) it is mounted on the distribution center position of piezoelectric actuator (2).
5. miniature active vibration isolation arrangement as described in claim 1, it is characterised in that: the piezoelectric actuator (2) is in rectangle battle array
Column are uniformly distributed.
6. miniature active vibration isolation arrangement as claimed in claim 2, it is characterised in that: the quantity of the signal conditioning circuit (4)
It is consistent with the quantity of vibrating sensor (1).
7. miniature active vibration isolation arrangement as described in claim 1, it is characterised in that: the vibrating sensor (1), piezoelectric actuating
Device (2), driving circuit (3), feedback control circuit (5) power supply line by spool (8) lead into, spool (8) pass through substrate (6) and
Driving circuit (3) draws branch from feedback control circuit (5) bottom.
8. miniature active vibration isolation arrangement as described in claim 1, it is characterised in that: the substrate (6) is solid by mounting hole (9)
It is fixed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910258061.0A CN110185737A (en) | 2019-04-01 | 2019-04-01 | A kind of miniature active vibration isolation arrangement |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910258061.0A CN110185737A (en) | 2019-04-01 | 2019-04-01 | A kind of miniature active vibration isolation arrangement |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110185737A true CN110185737A (en) | 2019-08-30 |
Family
ID=67713809
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| Application Number | Title | Priority Date | Filing Date |
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| CN201910258061.0A Pending CN110185737A (en) | 2019-04-01 | 2019-04-01 | A kind of miniature active vibration isolation arrangement |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111958772A (en) * | 2020-08-13 | 2020-11-20 | 四川省劲腾环保建材有限公司 | Method for controlling vibration frequency of automatic wallboard forming extruder |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101446834A (en) * | 2008-12-04 | 2009-06-03 | 北京航空航天大学 | Real-time controlling system of intelligent active vibration isolation unit |
| EP2261530A1 (en) * | 2009-06-12 | 2010-12-15 | Nederlandse Organisatie voor toegepast -natuurwetenschappelijk onderzoek TNO | An active vibration isolation and damping system |
| CN204480069U (en) * | 2015-04-15 | 2015-07-15 | 重庆工商职业学院 | Vehicle electronic device vibration control apparatus |
| CN107831801A (en) * | 2017-12-08 | 2018-03-23 | 北京海月星科技有限公司 | A kind of vibration absorber |
| CN108195571A (en) * | 2016-12-08 | 2018-06-22 | 中国船舶工业系统工程研究院 | A kind of actuator testboard active vibration isolation system based on piezoelectric ceramics |
-
2019
- 2019-04-01 CN CN201910258061.0A patent/CN110185737A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101446834A (en) * | 2008-12-04 | 2009-06-03 | 北京航空航天大学 | Real-time controlling system of intelligent active vibration isolation unit |
| EP2261530A1 (en) * | 2009-06-12 | 2010-12-15 | Nederlandse Organisatie voor toegepast -natuurwetenschappelijk onderzoek TNO | An active vibration isolation and damping system |
| CN204480069U (en) * | 2015-04-15 | 2015-07-15 | 重庆工商职业学院 | Vehicle electronic device vibration control apparatus |
| CN108195571A (en) * | 2016-12-08 | 2018-06-22 | 中国船舶工业系统工程研究院 | A kind of actuator testboard active vibration isolation system based on piezoelectric ceramics |
| CN107831801A (en) * | 2017-12-08 | 2018-03-23 | 北京海月星科技有限公司 | A kind of vibration absorber |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111958772A (en) * | 2020-08-13 | 2020-11-20 | 四川省劲腾环保建材有限公司 | Method for controlling vibration frequency of automatic wallboard forming extruder |
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Application publication date: 20190830 |
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