CN110177942A - Liquid-supplying system - Google Patents
Liquid-supplying system Download PDFInfo
- Publication number
- CN110177942A CN110177942A CN201880006961.XA CN201880006961A CN110177942A CN 110177942 A CN110177942 A CN 110177942A CN 201880006961 A CN201880006961 A CN 201880006961A CN 110177942 A CN110177942 A CN 110177942A
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- CN
- China
- Prior art keywords
- liquid
- pump chamber
- bellows
- supplying system
- pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B15/00—Pumps adapted to handle specific fluids, e.g. by selection of specific materials for pumps or pump parts
- F04B15/06—Pumps adapted to handle specific fluids, e.g. by selection of specific materials for pumps or pump parts for liquids near their boiling point, e.g. under subnormal pressure
- F04B15/08—Pumps adapted to handle specific fluids, e.g. by selection of specific materials for pumps or pump parts for liquids near their boiling point, e.g. under subnormal pressure the liquids having low boiling points
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
- F04B45/02—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having bellows
- F04B45/022—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having bellows with two or more bellows in parallel
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/08—Machines, pumps, or pumping installations having flexible working members having tubular flexible members
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B15/00—Pumps adapted to handle specific fluids, e.g. by selection of specific materials for pumps or pump parts
- F04B15/06—Pumps adapted to handle specific fluids, e.g. by selection of specific materials for pumps or pump parts for liquids near their boiling point, e.g. under subnormal pressure
- F04B15/08—Pumps adapted to handle specific fluids, e.g. by selection of specific materials for pumps or pump parts for liquids near their boiling point, e.g. under subnormal pressure the liquids having low boiling points
- F04B2015/081—Liquefied gases
- F04B2015/082—Helium
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B15/00—Pumps adapted to handle specific fluids, e.g. by selection of specific materials for pumps or pump parts
- F04B15/06—Pumps adapted to handle specific fluids, e.g. by selection of specific materials for pumps or pump parts for liquids near their boiling point, e.g. under subnormal pressure
- F04B15/08—Pumps adapted to handle specific fluids, e.g. by selection of specific materials for pumps or pump parts for liquids near their boiling point, e.g. under subnormal pressure the liquids having low boiling points
- F04B2015/081—Liquefied gases
- F04B2015/0824—Nitrogen
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
- F05B2210/00—Working fluid
- F05B2210/10—Kind or type
- F05B2210/11—Kind or type liquid, i.e. incompressible
Abstract
The present invention provides a kind of liquid-supplying system that can efficiently cool down.The liquid-supplying system (10) has container, and internal includes pump chamber (P1, P2), and is equipped with the suction inlet (131b) of liquid and sends out mouth (131c);Feed path (131e, 131Xc) supplies the liquid flowed into from the suction inlet (131b) to the pump chamber (P1, P2);And passing away (190), it will be guided from the liquid that the pump chamber (P1, P2) is discharged to the submitting mouth (131c), wherein, the position (180,181) contacted on the inner wall of the liquid-supplying system (10) with the liquid has shape along the liquid flow direction (L1, L2) and increases the increased surface area of liquid contact surface product by structure (400).
Description
Technical field
The present invention relates to a kind of liquid-supplying systems for supplying liquid.
Background technique
It is well known to have with being formed by bellows as a kind of liquid-supplying system for circulating liquid to circulation stream
The bellowspump (referring to patent document 1) of pump chamber.The system is that there are two pump chambers for tool in vertically upward and downward directions, is constituted each
The bellows of pump chamber is fixed on the axis for carrying out up and down direction driving by driver, and links to carry out up and down with the movement of axis
It stretches in direction.
In order to heat-insulated, pump installation is integrally accommodated in vacuum tank, and the top of vacuum tank is equipped with driver.In order to every
Heat, it is preferable that submitting of the liquid of suction line and self-pumping apparatus in future externally to pump installation supply liquid to outside discharge
Pipe is connect in the position for being away as far as possible extraneous gas with pump installation.Suction line and submitting top of the pipe from vacuum tank as a result,
Into in vacuum tank, position more lower than pump installation is extended to, with the opening of U-shaped connection pump installation bottom.By will be with
The piping of pump installation connection is arranged to such shape, realizes for the high heat-proof quality from external heat.Such structure
Bellowspump be suitable for supplying the super-low liquids such as liquid nitrogen, liquid helium to the cooled device such as superconducting apparatus use on the way.
But when making the bellowspump operation for assembling maintenance under normal temperature environment for the supply for cryogenic liquid,
The step of firstly the need of temperature by the structure member of pump installation from room temperature cooling to cryogenic liquid.This is because if structural portion
The temperature of part is high, and cryogenic liquid evaporates in bellows chamber becomes gas-liquid mixture phase, and pump can not work normally.As cooling pump
The method of device, there are following methods, that is, make cryogenic liquid flow into pump installation, between structure member and cryogenic liquid into
Row heat exchange gradually reduces the temperature of structure member.In the method, from the bottom of pump installation flow into cryogenic liquid before this under
The bellows pump chamber in portion, the bellows pump chamber followed by top is gradually full of inside pump installation in this way, on the water level of cryogenic liquid
It rises.But in the cooling means, there are the following problems, that is, needs to grow very much in order to which bellowspump is cooled to operational temperature
Time.
The reason for this is that in the state that the water level of the cryogenic liquid in pump installation is low, pump configuration component and cryogenic liquid
Liquid contact surface product is small, therefore, low in the initial stage cooling efficiency of cooling step.In addition, the temperature in pump configuration component is high
Under state, cryogenic liquid evaporation, gas is trapped in pump chamber, interferes the inflow of cryogenic liquid.Further, since being two bellowss
The structure that pump chamber is arranged above and below, if using the pump chamber of top as the first pump chamber, the pump chamber of lower section flows into pump dress as the second pump chamber
The liquid set is flowed out from the outlet of the second pump chamber, and water level is difficult on the height for rising to the outlet of the second pump chamber.Therefore,
It is very time-consuming for the cooling of the first pump chamber there are when the first pump chamber on the outlet of the second pump chamber.In addition, high in order to obtain
Discharge pressure, pump component parts uses the metal material of high rigidity, if the metallic surface that cryogenic liquid contact heat conductien rate is high, low
The gas covering metallic surface of geothermal liquid gasification and generation.The phenomenon is known as film boiling.In the gas that the metal surface is formed
Layer plays a role as thermal insulation layer, interferes the heat transfer of cryogenic liquid and pump configuration component.
Patent document 1: International Publication No. 2016/006648
Summary of the invention
The purpose of the present invention is to provide the liquid-supplying systems that one kind can be cooled down efficiently.
The present invention uses following scheme in order to solve the above problems.
That is, liquid-supplying system of the invention includes:
Container, inside include pump chamber, and are equipped with the suction inlet of liquid and send out mouth;
Feed path supplies the liquid flowed into from the suction inlet to the pump chamber;And
Passing away send the liquid being discharged from the pump chamber to outlets direct to described, wherein
The position connecting on the inner wall of the liquid-supplying system with the liquid has shape along the liquid flow
It moves direction and increases the increased surface area of liquid contact surface product by structure
According to the present invention, compared with not set surface area increases the inner wall of structure, increase structure provided with surface area
The contact area of inner wall and liquid is bigger.The surface area increase structure setting on the inner wall of liquid-supplying system with liquid
The position of contact.If cryogenic liquid flows into liquid-supplying system of the invention as a result, increase showing for structure with not having surface area
There is liquid-supplying system to compare, the heat exchange of the structure member of cryogenic liquid and liquid-supplying system more efficiently carries out.Moreover,
It can be by flowing into cryogenic liquid high efficiency coolant body feed system.In accordance with the invention it is possible to shorten under cooling normal temperature environment
Therefore the step of liquid-supplying system required time is able to suppress system setting operation, the working hour of upkeep operation increases.
Furthermore it is possible to inhibit the consumption of cryogenic liquid in cooling step.
Preferably, the surface area increases structure setting into concaveconvex shape.
Thereby, it is possible to realize that surface area increases structure with simple shape.
Preferably, the surface area increases structure setting in the pump chamber.
As a result, compared with not set surface area increases the inner wall of structure, increase the pump chamber of structure provided with surface area
The area that inner wall is contacted with the indoor liquid of inflow pump is bigger.If cryogenic liquid flows into pump chamber of the invention as a result, and do not have
The existing liquid-supplying system for having surface area to increase structure is compared, and the heat exchange of the structure member of cryogenic liquid and pump chamber is more
Efficiently carry out.Moreover, pump chamber can efficiently be cooled down by flowing into cryogenic liquid.In accordance with the invention it is possible to efficiently cooling pump
Therefore room can release the case where gas of cryogenic liquid is trapped in pump chamber as early as possible, can shorten the operation of liquid-supplying system
Cooling step required for the time.
It preferably, is axisymmetric shape in the pump chamber,
The pump intake for connecting the feed path is set to the side of the pump chamber axial direction, and connects the passing away
Pump discharge be set to the other side of the pump chamber axial direction,
The surface area increases structure and is uniformly arranged along the indoor axial direction of pump.
In this configuration, pump chamber is flowed into from pump intake, flow through in pump chamber from the liquid that pump discharge is discharged along substantially axial.?
In pump chamber, surface area increases structure and is uniformly arranged along axial direction, and therefore, the presence that surface area increases structure will not interfere to pump indoor
The flowing of liquid.
Preferably, the surface area increases structure setting on the feed path and the passing away.
Thereby, it is possible to the more cooling components for constituting liquid-supplying system.
The present invention can be suitable for the liquid-supplying system including bellowspump.That is, be preferably provided to such as flowering structure,
Include: in the container
Shaft member vertically moves back and forth;And
First bellows and the second bellows, are vertically arranged, and with the round-trip shifting of the shaft member
It moves and stretches,
The pump chamber includes:
Space around the outer peripheral surface of first bellows is formed by the first pump chamber;With
Space around the outer peripheral surface of second bellows is formed by the second pump chamber,
The surface area increases structure
Be arranged on the inner wall in the space of the indoor outer peripheral surface around first bellows of first pump with institute
State the parallel concaveconvex shape of the telescopic direction of the first bellows;And
Be arranged on the inner wall in the space of the indoor outer peripheral surface around second bellows of second pump with institute
State the parallel concaveconvex shape of the telescopic direction of the second bellows.
In the liquid-supplying system of such structure, the flowing of the first pump chamber and the liquid in the second pump chamber is respectively along
The telescopic direction of the telescopic direction of one bellows and the second bellows.Surface area increases structure setting in the first pump chamber and second
It in pump chamber, is constituted respectively with the concaveconvex shape substantially parallel with the telescopic direction of the first bellows and the second bellows, therefore, no
It can interfere the flowing of the first pump chamber and the liquid of the respective inside of the second pump chamber.It, can be by making according to the liquid-supplying system
Cryogenic liquid flows into the first pump chamber and the second pump chamber and efficiently cools down each pump chamber.
In addition, above-mentioned each structure can combine use in feasible range.
As described above, liquid-supplying system of the invention can be cooled down efficiently.
Detailed description of the invention
Fig. 1 is the sketch structure figure of the liquid-supplying system of the embodiment of the present invention.
Fig. 2 is to indicate that the surface area of the embodiment of the present invention increases the schematic cross sectional views of an example of structure.
Symbol description
10 liquid-supplying systems
100 system ontologies
110 linear actuators
120 shaft members
121 shaft body portions
122 cylindrical portions
122a upper end side extroversion flange portion
122b lower end side extroversion flange portion
123 interconnecting pieces
130 containers
131 chest portions
The opening portion 131a
131b suction inlet
131c sends out mouth
131d flow path
131e flow path
131X body part
To flange portion in 131Xa first
To flange portion in 131Xb second
131Xc first flow path
131Xd second flow path
131Xe inner wall
131Xf inner wall
131Y base plate
141 first bellowss
142 second bellowss
151 third bellowss
152 the 4th bellowss
160 check-valves
160A first check-valve
160B second check-valve
160C third check-valves
The 4th check-valves of 160D
180 inner walls
181 inner walls
190 inner walls
200 vacuum tanks
310 suction lines
320 send out pipe
400 surface areas increase structure
401 first pump chamber entrances
The outlet of 402 first pump chambers
403 second pump chamber entrances
The outlet of 404 second pump chambers
The liquid of the first pump chamber of L1 flows
The liquid of the second pump chamber of L2 flows
The first pump chamber of P1
The second pump chamber of P2
Specific embodiment
Next, mode for carrying out the present invention is illustratively described in detail based on embodiment referring to attached drawing.Wherein,
Size, material, shape, its relative configuration of the structure member recorded in the embodiment etc. are recorded, not table as long as no specific
Show that the scope of the present invention is only limitted to this.
(embodiment)
Illustrate the liquid-supplying system of the embodiment of the present invention referring to FIG. 1 and FIG. 2.The liquid-supplying system example of the present embodiment
Such as can suitably it be used to make superconducting apparatus maintain ultra low temperature state.That is, needing to make superconducting coil etc. in superconducting apparatus
It is often cooling.Therefore, by often supplying liquid (liquid nitrogen, liquid of ultralow temperature to the cooled device including superconducting coil etc.
Helium), cooled device is often cooled down.More specifically, circulation stream of the setting by the device that is cooled, also, in the circulation
The liquid-supplying system that the present embodiment is installed in flow path keeps cooled device frequent thereby, it is possible to make the liquid circulation of ultralow temperature
It is cooling.
<overall structure of liquid-supplying system>
Fig. 1 is the sketch structure figure of the liquid-supplying system entirety of the embodiment of the present invention, is to represent liquid from section
The figure of feed system entirety Sketch.The liquid-supplying system 10 of the present embodiment include liquid-supplying system ontology (hereinafter referred to as
For system ontology 100), in the vacuum tank 200 that is internally provided with system ontology 100 and piping (suction line 310 and send out pipe
320).Suction line 310 and submitting pipe 320 enter the inside of vacuum tank 200 from the outside of vacuum tank 200, with system sheet
Body 100 connects.The inside of vacuum tank 200 is closed, and in the inside of vacuum tank 200, system ontology 100, suction line 310 and is sent
The space in 320 outside of outlet pipe maintains vacuum state.The space has heat insulating function as a result,.Liquid-supplying system 10 is usually arranged
In the horizontal plane.In the state of being provided with liquid-supplying system 10, top is above vertical direction in Fig. 1, and lower section is in Fig. 1
Below vertical direction.
System ontology 100 includes as the linear actuator 110 of driving source, by linear actuator 110 in vertical direction
The shaft member 120 and container 130 of upper round-trip.In addition, linear actuator 110 is fixed on any position, fixed position can be with
It is container 130, it can also be with other positions (not shown).Container 130 includes chest portion 131.Shaft member 120 is set in such a way
It sets: from the outside of container 130, entering inside container through the opening portion 131a being arranged upper at the top of chest portion 131.In addition, chest portion
131 bottom is equipped with the suction inlet 131b of liquid and sends out mouth 131c.The above-mentioned connection of suction line 310 is provided with suction inlet 131b
Position, send out pipe 320 connection be provided with send out mouth 131c position.
The inside of chest portion 131 includes multiple components, is formed by multiple spaces that these multiple components are divided multiple
The flow path and heat-insulated vacuum chamber of pump chamber, liquid.Hereinafter, the internal structure of the chest portion 131 is described in more detail.
Shaft member 120 has shaft body portion 121, internal to have hollow portion;Cylindrical portion 122, to surround shaft body portion
The mode of 121 periphery surface side is arranged;And interconnecting piece 123, connecting shaft body part 121 and cylindrical portion 122.In addition, cylinder
The upper end in portion 122 is equipped with upper end side extroversion flange portion 122a, and the lower end of cylindrical portion 122 is equipped with lower end side extroversion flange portion 122b.
Chest portion 131 includes the body part 131X and base plate 131Y of substantially tubular.In addition, body part 131X is set
It is placed in first near the centre of short transverse into flange portion 131Xa and be set to top second to flange portion 131Xb.
The inside of body part 131X, to below flange portion 131Xa in first, in the circumferential interval and formed multiple
The first flow path 131Xc axially extended.In addition, in the inside of body part 131X, in the area than being provided with first flow path 131Xc
Domain is additionally provided with the second flow path 131Xd by constituting in axially extending cylindrical space closer to the position of radial outside.This
Outside, in the bottom of chest portion 131, extend to radial outside and the flow path 131d connecting with first flow path 131Xc is circle-shaped uniformly
It is formed.Further, on the base plate 131Y of chest portion 131, to the circle-shaped uniform shape of flow path 131e of radial outside extension
At.That is, these flow paths 131d and flow path 131e, with liquid from the lateral radial outside of central axis in 360 ° of omnidirections in radiation
The mode flowed to shape is constituted.
In addition, the inside of container 130 be equipped with the round-trip with shaft member 120 and flexible the first bellows 141 and
Second bellows 142.These first bellowss 141 and the second bellows 142 are vertically arranged.First bellows
141 upper end side is fixed on the upper end side extroversion flange portion 122a of the cylindrical portion 122 of shaft member 120, the first bellows 141
Lower end side is fixed in the first of chest portion 131 on flange portion 131Xa.In addition, the upper end side of the second bellows 142 is fixed on
In the first of chest portion 131 on flange portion 131Xa, the lower end side of the second bellows 142 is fixed on the cylindrical portion of shaft member 120
On 122 lower end side extroversion flange portion 122b.Then, the first pump chamber is formed around the space of the outer peripheral surface of the first bellows 141
P1, the space around the outer peripheral surface of the second bellows 142 form the second pump chamber P2.
In addition, the inside of container 130 is additionally provided with third bellows 151 with the round-trip of shaft member 120 and flexible
And the 4th bellows 152.The upper end side of third bellows 151 is fixed on the top of chest portion 131, under third bellows 151
End side is fixed in shaft member 120.The opening portion 131a being arranged in chest portion 131 is occluded as a result,.4th bellows 152
Upper end side is fixed in second be arranged in chest portion 131 on flange portion 131Xb, and the lower end side of the 4th bellows 152 is fixed
In on the interconnecting piece 123 of shaft member 120.Then, the hollow portion inside the shaft body portion 121 of shaft member 120 is formed by first
Space K1, the periphery surface side of third bellows 151 and inner peripheral surface side of the 4th bellows 152 etc. be formed by second space K2,
The periphery surface side of the inner peripheral surface side of first bellows 141 and the second bellows 142 and cylindrical portion 122 is formed by third space K3
Connection.These first spaces K1, second space K2 and the formed space-closed of third space K3.In the present embodiment, by them
It is formed by enclosure space and maintains vacuum state, have heat insulating function.
Further, 4 check-valves 160 are equipped in the inside of container 130 (according to installation site, to be suitably referred to as first and stop
Return valve 160A, second check-valve 160B, third check-valves 160C and the 4th check-valves 160D).In addition, first check-valve 160A and
Second check-valve 160B is set to the opposite side (downside) of linear actuator 110 across the first pump chamber P1 and the second pump chamber P2.
Then, third check-valves 160C and the 4th check-valves 160D are configured at the upper of first check-valve 160A and second check-valve 160B
Side.
In addition, first check-valve 160A and third check-valves 160C are set on the flow path by the first pump chamber P1.This
One check-valves 160A and third check-valves 160C undertakes the liquid countercurrent for preventing flowing by the pump function of the first pump chamber P1
Effect.More specifically, first check-valve 160A is arranged in the upstream side of the first pump chamber P1, third check-valves is set in downstream side
160C.More specifically, first check-valve 160A is set on the flow path 131d formed on the bottom of chest portion 131.In addition, third
Check-valves 160C is set in second be arranged in chest portion 131 on the flow path formed near flange portion 131Xb.
Then, second check-valve 160B and the 4th check-valves 160D is set on the flow path by the second pump chamber P2.This
Two check-valves 160B and the 4th check-valves 160D undertake the liquid countercurrent for preventing flowing by the pump function of the second pump chamber P2
Effect.More specifically, second check-valve 160B is arranged in the upstream side of the second pump chamber P2, the 4th check-valves is set in downstream side
160D.More specifically, second check-valve 160B is set on the flow path 131e formed on the base plate 131Y of chest portion 131.This
Outside, the 4th check-valves 160D is set in the first of chest portion 131 on the flow path formed near flange portion 131Xa.
<action specification of liquid-supplying system entirety>
The movement of liquid-supplying system entirety is illustrated.According to linear actuator 110, when shaft member 120 declines, the
One bellows 141 is shunk, and the second bellows 142 extends.At this point, the fluid pressure due to the first pump chamber P1 reduces, the first non-return
Valve 160A is opened, and third check-valves 160C is closed.It is transported as a result, by suction line 310 from the outside of liquid-supplying system 10
Liquid (reference arrow S10) passes through first check-valve 160A (reference arrow S11) out of suction inlet 131b sucking container 130.So
Afterwards, the first flow path 131Xc inside body part 131X that the liquid for having passed through first check-valve 160A passes through chest portion 131, to
First pump chamber P1 is transported.Further, since the fluid pressure of the second pump chamber P2 increases, second check-valve 160B is closed, the 4th non-return
Valve 160D is opened.The liquid in the second pump chamber P2 passes through the 4th check-valves 160D, the second to the inside of body part 131X as a result,
Road 131Xd transports (reference arrow T12).Later, liquid is sent out pipe 320 to liquid-supplying system 10 by sending out mouth 131c
External send out.
Then, according to linear actuator 110, when shaft member 120 rises, the first bellows 141 extends, the second bellows
142 shrink.At this point, the fluid pressure due to the first pump chamber P1 increases, first check-valve 160A is closed, and third check-valves 160C is beaten
It opens.The liquid in the first pump chamber P1 passes through third check-valves 160C (reference arrow T11) as a result, to the inside of body part 131X
Second flow path 131Xd is transported.Later, liquid is sent out pipe 320 and is sent to the outside of liquid-supplying system 10 by sending out mouth 131c
Out.Further, since the fluid pressure of the second pump chamber P2 reduces, second check-valve 160B is opened, and the 4th check-valves 160D is closed.By
This, is sucked from the external liquid (reference arrow S10) transported of liquid-supplying system 10 from suction inlet 131b by suction line 310
In container 130, second check-valve 160B (reference arrow S12) is passed through.It then passes through the liquid of second check-valve 160B is to
Two pump chamber P2 transmission.
As described above, can when shaft member 120 declines and when rising in the liquid-supplying system 10 of the present embodiment
Make liquid from 310 effluent of suction line to send out 320 side of pipe.Moreover, being able to suppress so-called pulsation.
<cooling of liquid-supplying system entirety>
When the liquid-supplying system 10 of the present embodiment is used in the circulation of the super-low liquids such as liquid nitrogen, liquid helium, need by
Liquid-supplying system 10 under normal temperature environment is cooled to the temperature with working fluid i.e. cryogenic liquid with degree before operation.At this
In embodiment, it is cooling that the identical liquid of the cryogenic liquid to circulate when running with system is used for system.Alternatively, it is also possible to being to be
The liquid that the liquid for uniting cooling circulates when running from system is different.
System is cooling by flowing into cryogenic liquid from suction line 310, in structure member, that is, cabinet of liquid-supplying system 10
Heat exchange is carried out between portion 131 etc. and cryogenic liquid, the temperature of structure member is gradually reduced and carries out.In the present embodiment, by
Suction inlet 131b is equipped in the bottom of container 100 and sends out mouth 131c, and the cryogenic liquid flowed into cooling step is according to first
Second pump chamber P2, then the sequence of the first pump chamber P1 is gradually full of in system, and the water level of cryogenic liquid rises.It is upper with water level
It rises, the structure member for carrying out heat exchange with cooling cryogenic liquid increases, cooling to carry out from the lower to upper part of system.
<surface area increase structure>
Illustrate that the surface area of the present embodiment increases structure referring to FIG. 1 and FIG. 2.Fig. 2 is the section AA for schematically showing Fig. 1
Figure.In addition, Fig. 2 is to put it more simply, only represent the section of the first bellows 141 and the inner wall 131Xe of the first pump chamber P1, omission is former
Be present in the 4th bellows 152 of internal diameter direction, cylindrical portion 122, shaft body portion 121 section.
First pump chamber P1 is by the opposite inner wall 131Xe of the outer peripheral surface of the first bellows 141 and the first bellows 141
The space that wall surface 180 is surrounded.Inner wall 131Xe is contacted with the first pump chamber P1 liquid flowed, also, one with chest portion 131
Part, that is, the component for constituting system ontology 100 carries out heat exchange.
On the inner wall 180 of inner wall 131Xe, surface area is equipped with along the direction (arrow L1) that liquid flows through the first pump chamber P1
Increase structure 400.In the present embodiment, it is the concave-convex being uniformly arranged along the axial direction of inner wall 180 that surface area, which increases structure 400,
Shape.In the present embodiment, the first pump chamber P1 is the shape substantially symmetric relative to the central axis of shaft member 120, to the first pump chamber
The pump chamber entrance 401 of P1 influent is set to the side (downside) of the first pump chamber P1 axial direction, from the first pump chamber P1 trickle
The other sides (upside) that are set to the first pump chamber P1 axial direction of pump chamber outlet 402.In the present embodiment, due to the first bellows
141 is flexible in axial (i.e. up and down direction) due to shaft member 120, and constituting surface area to increase the concaveconvex shape of structure 400 is setting
In the straight line of the telescopic direction substantially parallel (i.e. up and down direction) on the inner wall 180 of inner wall 131Xe, with the first bellows 141
Slot.
It is again provided with surface area on the second pump chamber P2 and increases structure.That is, on the second pump chamber P2, the second bellows 142
On the inner wall 181 of opposite inner wall 131Xf, it is equipped with along the direction (arrow L2) that liquid flows through the second pump chamber P2 by the straight of axial direction
The surface area that wire casing is constituted increases structure.
<the advantages of liquid-supplying system of the present embodiment>
According to the liquid-supplying system 10 of the present embodiment, structure 400, the inner wall of inner wall 131Xe are increased by surface area
180 liquid contact surface product becomes larger.Inner wall 180 and constitute the first pump chamber P1 component, constitute system ontology 100 component into
Row heat exchange.If cryogenic liquid flows into the first pump chamber P1 as a result, with the existing structure phase for not having surface area increase structure 400
Than the heat exchange of cryogenic liquid and system building blocks more efficiently carries out.Moreover, can more efficiently carry out low based on flowing into
The system of geothermal liquid is cooling.Cooling step is carried out thereby, it is possible to shorten to run the liquid-supplying system under normal temperature environment
Time required for rapid is able to suppress system setting operation, the working hour of upkeep operation increases.Furthermore it is possible to inhibit cooling step
The consumption of middle cryogenic liquid.Surface area increases the straight-line groove that structure 400 is the liquid flow direction in the first pump chamber P1 and exists
The structure being uniformly arranged on inner wall, therefore, the Flowing Hard of the liquid in the first pump chamber P1 is to increase structure 400 by surface area
In the presence of being interfered.In the second pump chamber P2, it is equipped with surface area identical with the first pump chamber P1 and increases structure, thereby, it is possible to there is no harm in
Hinder the flowing of the liquid in the second pump chamber P2 and efficiently carries out the heat exchange of cryogenic liquid Yu system structure component.
(other)
In the present embodiment, it is set to surface area increase structure 400 and respectively constitutes the first pump chamber P1 and the second pump chamber P2
Inner wall 131Xe and the respective inner wall 180 and 181 of inner wall 131Xf on example be illustrated, but surface area increase structure
If it is the position for carrying out heat exchange with the structure member of system ontology 100 and contacting with cryogenic liquid, Yu Yuqi may also set up
Its any part.Also can be set for example, surface area increases structure in following position: the entrance 401 of the first pump chamber P1 is connected
The inner wall of the passing away that is connected of outlet 402 of inner wall, the first pump chamber P1 of feed path, the second pump chamber P2 enters
The inner wall for the passing away that the outlet 404 of the inner wall, the second pump chamber P2 of the feed paths that mouth 403 is connected is connected.This
Outside, increase structure as surface area, be illustrated for axial straight-line groove by being arranged on inner wall, but surface area increases
Add the concrete shape of structure, as long as liquid contact surface product can be made to increase compared with the case where not set surface area increases structure
Shape, be not limited to straight-line groove.For example, it can be spiral-shaped slot and the substantially coaxial annular grooves of shaft member 120.
In the present embodiment, by the present invention be suitable for around bellows outer peripheral surface pump chamber vertically on
Under (bellows telescopic direction) arranged in series two bellowspump liquid-supplying system for be illustrated, but the present invention
Liquid-supplying system applicatory is without being limited thereto.The present invention usually can be applicable in the pump that liquid is sent out in sucking, in pump chamber with liquid
Among the inner wall of contact, by being set at the position for carrying out heat exchange with the structure member of pump chamber (or liquid-supplying system ontology)
The surface area increase structure for increasing liquid contact surface product is set, effect identical with the above embodiments can be obtained.
In the present embodiment, among the inside of vacuum tank 200, using make system ontology 100, suction line 310 and send out
The outside of pipe 320 has the structure of heat insulating function as vacuum state.In addition, in the present embodiment, using making the first space
K1, second space K2 and third space K3 are formed by the structure that enclosure space has heat insulating function as vacuum state.And
And these spaces can also be made and flowing through super-low liquid the liquid flowed in circulation stream temperature maintain it is low
Temperature.
Claims (6)
1. a kind of liquid-supplying system characterized by comprising
Container, inside include pump chamber, and are equipped with the suction inlet of liquid and send out mouth;
Feed path supplies the liquid flowed into from the suction inlet to the pump chamber;And
Passing away send the liquid being discharged from the pump chamber to outlets direct to described,
Wherein, the position contacted on the inner wall of the liquid-supplying system with the liquid has shape along the liquid flow
It moves direction and increases the increased surface area of liquid contact surface product by structure.
2. liquid-supplying system according to claim 1, which is characterized in that
It is concaveconvex shape that the surface area, which increases structure,.
3. liquid-supplying system according to claim 1 or 2, which is characterized in that
The surface area increases structure setting in the pump chamber.
4. liquid-supplying system according to claim 3, which is characterized in that
It is axisymmetric shape in the pump chamber,
The pump intake for connecting the feed path is set to the side of the pump chamber axial direction, and connects the pump of the passing away
Outlet is set to the other side of the pump chamber axial direction,
The surface area increases structure and is axially uniformly arranged along the pump chamber.
5. liquid-supplying system according to any one of claims 1 to 4, which is characterized in that
The surface area increases structure setting on the feed path and the passing away.
6. described in any item liquid-supplying systems according to claim 1~5, which is characterized in that
Include:
Shaft member vertically moves back and forth in the container;And
First bellows and the second bellows, are vertically arranged, and with the round-trip of the shaft member and
It is flexible,
The pump chamber includes:
Space around the outer peripheral surface of first bellows is formed by the first pump chamber;With
Space around the outer circumference end of second bellows is formed by the second pump chamber,
The surface area increases structure
Be arranged on the inner wall in the space of the indoor outer peripheral surface around first bellows of first pump with described the
The parallel concaveconvex shape of the telescopic direction of one bellows;And
Be arranged on the inner wall in the space of the indoor outer peripheral surface around second bellows of second pump with described the
The parallel concaveconvex shape of the telescopic direction of two bellowss.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017019047 | 2017-02-03 | ||
JP2017-019047 | 2017-02-03 | ||
PCT/JP2018/003624 WO2018143417A1 (en) | 2017-02-03 | 2018-02-02 | Liquid supply system |
Publications (1)
Publication Number | Publication Date |
---|---|
CN110177942A true CN110177942A (en) | 2019-08-27 |
Family
ID=63039833
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201880006961.XA Pending CN110177942A (en) | 2017-02-03 | 2018-02-02 | Liquid-supplying system |
Country Status (6)
Country | Link |
---|---|
US (1) | US20200011323A1 (en) |
EP (1) | EP3578813A1 (en) |
JP (1) | JPWO2018143417A1 (en) |
KR (1) | KR20190098227A (en) |
CN (1) | CN110177942A (en) |
WO (1) | WO2018143417A1 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20220403509A1 (en) * | 2021-06-17 | 2022-12-22 | Tokyo Electron Limited | Vacuum processing apparatus and oxidizing gas removal method |
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JP2012211512A (en) * | 2011-03-30 | 2012-11-01 | Iwaki Co Ltd | Bellows pump |
JP2014001663A (en) * | 2012-06-18 | 2014-01-09 | Koganei Corp | Liquid supply device |
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WO2016006648A1 (en) * | 2014-07-10 | 2016-01-14 | イーグル工業株式会社 | Liquid supply system |
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US6659730B2 (en) * | 1997-11-07 | 2003-12-09 | Westport Research Inc. | High pressure pump system for supplying a cryogenic fluid from a storage tank |
JP5107389B2 (en) * | 2005-01-07 | 2012-12-26 | 三菱重工業株式会社 | Booster for cryogenic fluid |
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2018
- 2018-02-02 US US16/482,676 patent/US20200011323A1/en not_active Abandoned
- 2018-02-02 WO PCT/JP2018/003624 patent/WO2018143417A1/en unknown
- 2018-02-02 EP EP18747736.9A patent/EP3578813A1/en not_active Withdrawn
- 2018-02-02 KR KR1020197021571A patent/KR20190098227A/en not_active Application Discontinuation
- 2018-02-02 JP JP2018566130A patent/JPWO2018143417A1/en active Pending
- 2018-02-02 CN CN201880006961.XA patent/CN110177942A/en active Pending
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US5383334A (en) * | 1992-06-22 | 1995-01-24 | Aisin Seiki Kabushiki Kaisha | Compressor integral with stirling engine |
CN1955629A (en) * | 2005-10-25 | 2007-05-02 | 日立电线株式会社 | Heat transfer pipe with grooved inner surface |
CN102325999A (en) * | 2009-02-24 | 2012-01-18 | 日本皮拉工业株式会社 | Bellows pump |
JP2012211512A (en) * | 2011-03-30 | 2012-11-01 | Iwaki Co Ltd | Bellows pump |
CN202204346U (en) * | 2011-07-21 | 2012-04-25 | 苏州唐峰金属制品有限公司 | Novel heat exchanger |
JP2014001663A (en) * | 2012-06-18 | 2014-01-09 | Koganei Corp | Liquid supply device |
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WO2016006648A1 (en) * | 2014-07-10 | 2016-01-14 | イーグル工業株式会社 | Liquid supply system |
Also Published As
Publication number | Publication date |
---|---|
KR20190098227A (en) | 2019-08-21 |
WO2018143417A1 (en) | 2018-08-09 |
EP3578813A1 (en) | 2019-12-11 |
JPWO2018143417A1 (en) | 2019-12-12 |
US20200011323A1 (en) | 2020-01-09 |
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Application publication date: 20190827 |