CN110176405A - A kind of spring needle test connector suitable for semiconductor crystal wafer manufacture - Google Patents

A kind of spring needle test connector suitable for semiconductor crystal wafer manufacture Download PDF

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Publication number
CN110176405A
CN110176405A CN201910308603.0A CN201910308603A CN110176405A CN 110176405 A CN110176405 A CN 110176405A CN 201910308603 A CN201910308603 A CN 201910308603A CN 110176405 A CN110176405 A CN 110176405A
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CN
China
Prior art keywords
spring needle
suction
spring
layer
item
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Granted
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CN201910308603.0A
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CN110176405B (en
Inventor
彭鸿琦
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Dongguan Jingduan Precision Hardware Products Co ltd
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Individual
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Priority to CN202110071338.6A priority Critical patent/CN113035731A/en
Priority to CN201910308603.0A priority patent/CN110176405B/en
Publication of CN110176405A publication Critical patent/CN110176405A/en
Application granted granted Critical
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/30—Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/04—Housings; Supporting members; Arrangements of terminals
    • G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
    • G01R1/0416—Connectors, terminals

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

The invention discloses a kind of spring needle test connectors suitable for semiconductor crystal wafer manufacture, its structure includes spring top, connector, anti-slip spring needle, spring top is integrated with anti-slip spring needle, anti-slip spring needle includes test round end, interior suction item, card layer, interlayer, round end is tested between suction tray, when connector will test wafer, it is absorbed by water mist of the main water absorption layer to periphery, inside through sucking internal layer, slimeball will first touch object, angle of stability will support on the surface, its inner core is pushed inside, its power transmission arc squeezes stress inside, air bag above power transmission arc will stress, power assisted brace gas spring positioned at suction pressure capsule surface will stress together, it is unfolded toward two sides, its slimeball is set to trail inside expansion slot, allow suction tray is more firm to adhere to, it can allow spring needle more fixed Accurately it is tested, it will not be allowed to be slided, or even dislocation, prevents from influencing test effect.

Description

A kind of spring needle test connector suitable for semiconductor crystal wafer manufacture
Technical field
The invention belongs to semiconductor fields, more specifically, are suitable for semiconductor crystal wafer particularly with regard to one kind and manufacture Spring needle test connector.
Background technique
When semiconductor crystal wafer south wind day manufacture when, have a little fog and be adhered on surface, wafer manufacture complete need It is detected by pogo pin connectors, prevent batch production from subproblem occur, delay follow-up work.
It is found based on aforementioned present invention people, existing semiconductor crystal wafer manufacture spring needle test connector is primarily present following It is some insufficient, such as:
Spring needle is round end shape, more round and smooth, when it, which is located at, is tested on the wafer for having a little water mist, fixed position When have a little sliding, to be easier to lead to its dislocation, influence test result.
Therefore need to propose a kind of spring needle test connector suitable for semiconductor crystal wafer manufacture.
Summary of the invention
It is round end shape to solve above-mentioned technology spring needle, it is more round and smooth, there is the wafer of a little water mist enterprising when it is located at When row test, a little sliding is had when fixing position, to be easier to the problem of leading to its dislocation, influencing test result.
The present invention a kind of purpose and effect of the spring needle test connector suitable for semiconductor crystal wafer manufacture, by following tool Body technique means are reached:
Its structure includes spring top, connector, anti-slip spring needle.
The spring top is integrated with anti-slip spring needle, and the anti-slip spring needle is through inside connector, institute Spring top is stated to be embedded in inside connector.
The anti-slip spring needle includes test round end, suction tray, interior suction item, card layer, interlayer, and the test round end, which is located at, to be inhaled Between attached disk, the interior suction item is installed between card layer and test round end, and the card layer is embedded in inside interlayer, the test circle Head is set between interlayer.
As a further improvement of the present invention, the interior suction item includes main water absorption layer, water-retention sac, pressure pin, the water-retention sac It is connected with main water absorption layer, the water-retention sac is installed on inside pressure pin, and the water-retention sac is in calabash shaped structure, and the pressure pin is arc Shape structure.
As a further improvement of the present invention, the water-retention sac includes middle suction item, internal layer, spreads and inhale item, interior suction, described Middle suction item through inside interior suction, inhale item and be installed on inside internal layer by the diffusion, the diffusion suction item and middle suction bottom end phase Connection, the diffusion inhale item set there are four and it is rounded be uniformly distributed, the interior suction is equipped with three.
As a further improvement of the present invention, the suction tray includes main viscous flexible wall, expands slot, slimeball, the expansion slot insertion Inside main viscous flexible wall, the slimeball, which is uniformly distributed in, to be expanded inside slot, and the slimeball is connected by expanding slot with main viscous flexible wall, institute It states there are three slimeball sets.
As a further improvement of the present invention, the slimeball include exhibition angle, rubber pad, power assisted brace gas spring, suction pressure capsule, air bag, Compression arc, the exhibition angle are installed on compression arc outer surface, and the rubber pad is set to below power assisted brace gas spring, the suction pressure capsule and air bag It is mutually communicated, the power assisted brace gas spring is in drops structure, there are two the suction pressure capsule is set.
As a further improvement of the present invention, the compression arc includes power transmission arc, angle of stability, uniform ball, inner core, the biography Inner core is installed, the angle of stability is uniformly distributed between uniform ball, and the inner core is semicircular structure, described equal inside power arc Even ball is in sphere structure.
As a further improvement of the present invention, the exhibition angle includes side button, exhibition layer, elastic edge, and the elastic edge fits in Open up layer outer surface, side button is connected with layer is opened up, there are four the exhibition layer is set, the elastic edge as made by rubber material, With certain elasticity.
Compared with prior art, the invention has the following beneficial effects:
When connector will test wafer, test round end needs to withstand on wafer, by main water absorption layer to periphery Water mist absorbed, so that for test round end while put down, slimeball will first touch object inside by sucking internal layer Body, angle of stability will be supported on the surface, its inner core be pushed inside, power transmission arc squeezes stress inside, above power transmission arc Air bag will stress, positioned at suction pressure capsule surface power assisted brace gas spring will stress together, be unfolded toward two sides, its slimeball be made to expand in slot Portion trails, and allows suction tray is more firm to adhere to, and can allow spring needle is more fixed accurately to test it, no It can be allowed to be slided, or even dislocation, prevent from influencing test effect.
Detailed description of the invention
Fig. 1 is a kind of structural schematic diagram of the spring needle test connector suitable for semiconductor crystal wafer manufacture of the present invention.
Fig. 2 is a kind of left view schematic diagram of internal structure of anti-slip spring needle of the present invention.
Fig. 3 faces schematic diagram of internal structure for a kind of interior suction item of the present invention.
Fig. 4 faces schematic diagram of internal structure for a kind of water-retention sac of the present invention.
Fig. 5 faces schematic diagram of internal structure for a kind of suction tray of the present invention.
Fig. 6 faces schematic diagram of internal structure for a kind of slimeball of the present invention.
Fig. 7 faces schematic diagram of internal structure for a kind of compression arc of the present invention.
Fig. 8 faces schematic diagram of internal structure for a kind of exhibition angle of the present invention.
In figure: spring top -1, connector -2, anti-slip spring needle -3, test round end -31, suction tray -32, interior suction It is item -33, card layer -34, interlayer -35, main water absorption layer -331, water-retention sac -332, pressure pin -333, middle suction item -3321, interior Layer -3322, diffusion inhale item -3323, interior suction -3324, main viscous flexible wall -321, expand slot -322, slimeball -323, exhibition angle - 3231, rubber pad -3232, power assisted brace gas spring -3233, suction pressure capsule -3234, air bag -3235, compression arc -3236, power transmission - 32311, exhibition layer -32312, bullet are buckled in arc -32361, angle of stability -32362, uniform ball -32363, inner core -32364, side Property side -32313.
Specific embodiment
The present invention is described further below in conjunction with attached drawing:
Embodiment:
As shown in attached drawing 1 to attached drawing 8:
The present invention provides a kind of spring needle test connector suitable for semiconductor crystal wafer manufacture, and structure includes spring top 1, connector 2, anti-slip spring needle 3.
The spring top 1 is integrated with anti-slip spring needle 3, and the anti-slip spring needle 3 is through in connector 2 Portion, the spring top 1 are embedded in inside connector 2.
The anti-slip spring needle 3 includes test round end 31, suction tray 32, interior suction item 33, card layer 34, interlayer 35, the survey Round end 31 is tried between suction tray 32, the interior suction item 33 is installed between card layer 34 and test round end 31, the card layer 34 It is embedded in inside interlayer 35, the test round end 31 is set between interlayer 35.
Wherein, the interior suction item 33 includes main water absorption layer 331, water-retention sac 332, pressure pin 333, the water-retention sac 332 and master Water absorption layer 331 is connected, and the water-retention sac 332 is installed on inside pressure pin 333, and the water-retention sac 332 is in calabash shaped structure, described Pressure pin 333 is arcuate structure, and main water absorption layer 331 can be adsorbed the water come in and quickly absorb by the water-retention sac 332, allows it Main water absorption layer 331 is quickly released.
Wherein, the water-retention sac 332 includes middle suction item 3321, internal layer 3322, diffusion suction item 3323, interior suction 3324, institute It states and inhales item 3321 through inside interior suction 3324, the diffusion suction item 3323 is installed on inside internal layer 3322, the diffusion Item 3323 is inhaled to be connected with middle 3321 bottom end of suctions item, there are four diffusion suction item 3323 is set and it is rounded be uniformly distributed, it is described There are three interior suction 3324 is set, the moisture content on periphery is fallen in the dilution that the distributing position that item 3323 is inhaled in the diffusion can allow its comprehensive It up conveys, middle item 3321 of inhaling quickly can up convey the moisture content that bottom absorbs, and interior suction 3324 can expand internal Water absorption.
Wherein, the suction tray 32 includes main viscous flexible wall 321, expands slot 322, slimeball 323, and the expansion slot 322 is embedded in master Inside viscous flexible wall 321, the slimeball 323, which is uniformly distributed in, to be expanded inside slot 322, and the slimeball 323 is glued by expansion slot 322 with master soft Wall 321 is connected, and there are three the slimeball 323 is set, what the slimeball 323 can be stable is adhered to the external object contacted, Expand the space that slot 322 expands 323 Compressive activities of slimeball.
Wherein, the slimeball 323 includes exhibition angle 3231, rubber pad 3232, power assisted brace gas spring 3233, suction pressure capsule 3234, air bag 3235, compression arc 3236, the exhibition angle 3231 are installed on 3236 outer surface of compression arc, and the rubber pad 3232 is set to power assisted brace gas spring 3233 lower sections, the suction pressure capsule 3234 are mutually communicated with air bag 3235, and the power assisted brace gas spring 3233 is in drops structure, the suction There are two pressure capsule 3234 is set, the power assisted brace gas spring 3233 controls whole tension, what suction pressure capsule 3234 can assist being contacted Stress, exhibition angle 3231 can expand the degree even between object, also limit its range object together.
Wherein, the compression arc 3236 includes power transmission arc 32361, angle of stability 32362, uniform ball 32363, inner core 32364, Inner core 32364 is installed inside the power transmission arc 32361, the angle of stability 32362 is uniformly distributed between uniform ball 32363, The inner core 32364 is semicircular structure, and the uniform ball 32363 is in sphere structure, and the angle of stability 32362 can allow object More firm adherency, uniform ball 32363 make it more smoothly when moving and do not fall out.
Wherein, the exhibition angle 3231 includes side button 32311, exhibition layer 32312, elastic edge 32313, the elastic edge 32313 Exhibition 32312 outer surface of layer is fitted in, side button 32311 is connected with layer 32312 is opened up, there are four the exhibition layer 32312 is set, institute Elastic edge 32313 is stated as made by rubber material, there is certain elasticity, the exhibition layer 32312 can expand the degree of stretching, extension, bullet Property side 32313 drives its return when can lose resistance on the object contacted.
The specifically used mode and effect of the present embodiment:
In the present invention, when connector will test wafer, test round end 31 needs to withstand on wafer, by main suction Water layer 331 absorbs the water mist on periphery, to inhale item 3323 inside by sucking internal layer 3322 by diffusion and carry out to it Comprehensive collection is imported inside interior suction 3324 by middle suction item 3321, while test round end 31 is put down, slimeball 323 Object will be first touched, angle of stability 32362 will be supported on the surface, be spaced it apart by uniform ball 32363, uniform ball 32363 with the stress together of angle of stability 32362, its inner core 32364 is pushed inside, power transmission arc 32361 squeezes stress inside, Air bag 3235 above power transmission arc 32361 will stress, internal gas is pushed in suction pressure capsule 3234, makes its suction pressure capsule 3234 expansions, the power assisted brace gas spring 3233 positioned at 3234 surface of suction pressure capsule will be unfolded in stress, past two sides together, be stuck in internal side Button 32311 will pull open exhibition layer 32312 and stretch to it, so that its slimeball 323 is trailed expanding inside slot 322, allow suction tray 32 it is more firm adhere to, can allow spring needle is more fixed accurately to test it, it will not be allowed to be slided, It even misplaces, prevents from influencing test effect.
Using technical solution of the present invention or those skilled in the art under the inspiration of technical solution of the present invention, if Similar technical solution is counted out, and reaches above-mentioned technical effect, is to fall into protection scope of the present invention.

Claims (7)

1. a kind of spring needle test connector suitable for semiconductor crystal wafer manufacture, structure includes spring top (1), connector (2), anti-slip spring needle (3), it is characterised in that:
The spring top (1) is integrated with anti-slip spring needle (3), and the anti-slip spring needle (3) is through connector (2) Inside, it is internal that the spring top (1) is embedded in connector (2)；
The anti-slip spring needle (3) includes test round end (31), suction tray (32), interior suction item (33), card layer (34), interlayer (35), the test round end (31) is located between suction tray (32), and the interior suction item (33) is installed on card layer (34) and test is justified Between head (31), the card layer (34) is embedded in interlayer (35) inside, and the test round end (31) is set between interlayer (35).
2. a kind of spring needle test connector suitable for semiconductor crystal wafer manufacture according to claim 1, feature exist In: the interior suction item (33) include main water absorption layer (331), water-retention sac (332), pressure pin (333), the water-retention sac (332) and main Water absorption layer (331) is connected, and it is internal that the water-retention sac (332) is installed on pressure pin (333).
3. a kind of spring needle test connector suitable for semiconductor crystal wafer manufacture according to claim 2, feature exist In: the water-retention sac (332) includes middle suction item (3321), internal layer (3322), diffusion suction item (3323), interior suction (3324), institute It is internal through interior suction (3324) to state middle suction item (3321), the diffusion inhales item (3323) and is installed on internal layer (3322) inside, The diffusion inhales item (3323) and is connected with middle suction item (3321) bottom end.
4. a kind of spring needle test connector suitable for semiconductor crystal wafer manufacture according to claim 1, feature exist In: the suction tray (32) includes main viscous flexible wall (321), expands slot (322), slimeball (323), and the expansion slot (322) is embedded in master Viscous flexible wall (321) are internal, and the slimeball (323), which is uniformly distributed in, expands slot (322) inside, and the slimeball (323) is by expanding slot (322) it is connected with main viscous flexible wall (321).
5. a kind of spring needle test connector suitable for semiconductor crystal wafer manufacture according to claim 4, feature exist In: the slimeball (323) includes exhibition angle (3231), rubber pad (3232), power assisted brace gas spring (3233), suction pressure capsule (3234), air bag (3235), compression arc (3236), the exhibition angle (3231) are installed on compression arc (3236) outer surface, and the rubber pad (3232) sets Below power assisted brace gas spring (3233), the suction pressure capsule (3234) is mutually communicated with air bag (3235).
6. a kind of spring needle test connector suitable for semiconductor crystal wafer manufacture according to claim 5, feature exist In: the compression arc (3236) include power transmission arc (32361), angle of stability (32362), uniform ball (32363), inner core (32364), It is equipped with inner core (32364) inside the power transmission arc (32361), the angle of stability (32362) is uniformly distributed in uniform ball (32363) between.
7. a kind of spring needle test connector suitable for semiconductor crystal wafer manufacture according to claim 5, feature exist In: the exhibition angle (3231) includes side button (32311), exhibition layer (32312), elastic edge (32313), the elastic edge (32313) Exhibition layer (32312) outer surface is fitted in, the side button (32311) is connected with exhibition layer (32312).
CN201910308603.0A 2019-04-17 2019-04-17 Spring pin test connector suitable for semiconductor wafer manufacturing Active CN110176405B (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CN202110071338.6A CN113035731A (en) 2019-04-17 2019-04-17 Spring pin test connector and use method
CN201910308603.0A CN110176405B (en) 2019-04-17 2019-04-17 Spring pin test connector suitable for semiconductor wafer manufacturing

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Application Number Priority Date Filing Date Title
CN201910308603.0A CN110176405B (en) 2019-04-17 2019-04-17 Spring pin test connector suitable for semiconductor wafer manufacturing

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CN110176405B CN110176405B (en) 2021-03-26

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110975990A (en) * 2019-11-22 2020-04-10 林国盛 Rotary drum material crusher who contains singlechip optic fibre laser lamp

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002022768A (en) * 2000-07-10 2002-01-23 Nec Eng Ltd Pogo pin for inspecting integrated circuit package
US6655983B1 (en) * 1999-05-28 2003-12-02 Nhk Spring Co., Ltd. Electrical test probe provided with a signal transmitting wire having an enlarged portion for preventing the wire from coming out of the probe
CN1521895A (en) * 2003-02-13 2004-08-18 Smk株式会社 Press fitting type spring connector
CN200953030Y (en) * 2006-08-04 2007-09-26 宏亿国际股份有限公司 Wafer test card
CN101261296A (en) * 2006-11-22 2008-09-10 台湾积体电路制造股份有限公司 Semiconductor element test structure
CN109283367A (en) * 2018-10-22 2019-01-29 苏州创测半导体设备有限公司 A kind of spring needle test connector suitable for semiconductor crystal wafer manufacture

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6655983B1 (en) * 1999-05-28 2003-12-02 Nhk Spring Co., Ltd. Electrical test probe provided with a signal transmitting wire having an enlarged portion for preventing the wire from coming out of the probe
JP2002022768A (en) * 2000-07-10 2002-01-23 Nec Eng Ltd Pogo pin for inspecting integrated circuit package
CN1521895A (en) * 2003-02-13 2004-08-18 Smk株式会社 Press fitting type spring connector
CN200953030Y (en) * 2006-08-04 2007-09-26 宏亿国际股份有限公司 Wafer test card
CN101261296A (en) * 2006-11-22 2008-09-10 台湾积体电路制造股份有限公司 Semiconductor element test structure
CN109283367A (en) * 2018-10-22 2019-01-29 苏州创测半导体设备有限公司 A kind of spring needle test connector suitable for semiconductor crystal wafer manufacture

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110975990A (en) * 2019-11-22 2020-04-10 林国盛 Rotary drum material crusher who contains singlechip optic fibre laser lamp

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Publication number Publication date
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CN113035731A (en) 2021-06-25

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Inventor after: Xie Jijiao

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