CN110160993A - A kind of local surface plasmon resonance sensor and its preparation method and application - Google Patents

A kind of local surface plasmon resonance sensor and its preparation method and application Download PDF

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CN110160993A
CN110160993A CN201910427814.6A CN201910427814A CN110160993A CN 110160993 A CN110160993 A CN 110160993A CN 201910427814 A CN201910427814 A CN 201910427814A CN 110160993 A CN110160993 A CN 110160993A
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surface plasmon
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余得胜
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Guangzhou Star Altar Electronic Products Co Ltd
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Guangzhou Star Altar Electronic Products Co Ltd
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y15/00Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00Manufacture or treatment of nanostructures
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/55Specular reflectivity
    • G01N21/552Attenuated total reflection
    • G01N21/553Attenuated total reflection and using surface plasmons
    • G01N21/554Attenuated total reflection and using surface plasmons detecting the surface plasmon resonance of nanostructured metals, e.g. localised surface plasmon resonance

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Abstract

The invention discloses a kind of local surface plasmon resonance sensors and its preparation method and application.The sensor includes transparent dielectric layer and silverskin;The transparent dielectric layer is prepared by makrolon material, nano column array including substrate and distribution over the substrate, the top of each nano-pillar and the shape of its bottom and cross section in the nano column array is all the same, and the cross-sectional area at the top of nano-pillar is greater than the cross-sectional area in the middle part of it, the bottom of nano-pillar is connect with the substrate;Silverskin is all covered on the top of nano-pillar and the substrate, wherein has gap between the silverskin covered on the substrate and nano-pillar;There are also SiO for the surface coating of nano-pillar2/TiO2Composite coating.Sensor of the invention sensitivity and accuracy are high, and long service life has a good application prospect in biochemistry detection field.

Description

A kind of local surface plasmon resonance sensor and its preparation method and application
Technical field
The present invention relates to sensor material technical fields, and in particular to a kind of local surface plasmon resonance sensor and its Preparation method and application.
Background technique
With the fast development of nanofabrication technique, metal nanoparticle or nano array structure local surface plasma Harmonic technology is got the attention.Incident light and metal nanoparticle or nano array structure surface free charge density Oscillatory Coupling generates local surface plasma resonant vibration, very strong resonant absorption optical spectrum occurs.Resonance absorbing wavelength and nano particle Or the structure of nano array structure, shape, size, the dielectric coefficient of distribution and ambient enviroment are related.
Local surface plasmon resonance sensor can be divided into reflection-type and transmission-type, wherein transmission-type local surface etc. from Sub- resonant transducer is needed using transparent material as substrate.Polycarbonate can be used as because it is with the transparency outstanding The substrate material of emitting local surface plasmon resonance sensor, but the solvent resistance of makrolon material is poor, molten Stress relaxation and crack initiation are easy to produce under agent effect;In addition, the anti-ultraviolet ageing performance of makrolon material is poor, in purple It reacts and turns yellow under the irradiation of outer light, cause light transmission to decline, be unable to satisfy the detection of local surface plasmon resonance sensor Application requirement.
Summary of the invention
It is an object of the invention to a kind of local surface plasma resonant vibration biography is provided in place of overcome the deficiencies in the prior art Sensor and its preparation method and application.
To achieve the above object, the technical solution adopted by the present invention is as follows:
A kind of local surface plasmon resonance sensor, the sensor include transparent dielectric layer and silverskin;It is described transparent Dielectric layer is prepared by makrolon material, the nano column array including substrate and distribution over the substrate, the nanometer The top of each nano-pillar and the shape of its bottom and cross section in column array is all the same, and the cross section at the top of nano-pillar Product is greater than the cross-sectional area in the middle part of it, and the bottom of nano-pillar is connect with the substrate;On the top of nano-pillar and the substrate It is covered with silverskin, wherein have gap between the silverskin covered on the substrate and nano-pillar;The surface coating of nano-pillar is also SiO2/TiO2Composite coating.
The nano column array of sensor of the invention excites local surface plasma resonance, using big at both ends and small in middle Structure design has relatively high quality factor, and by coating SiO on the surface of nano-pillar2/TiO2Composite coating, this is compound Coating has good adhesive force, wherein SiO2Coating helps to improve the homogeneity of coating, improves TiO2Coating and poly- carbonic acid The combination of ester material, further promotes TiO2The growth of particle, prevents TiO2Photocatalytic degradation;TiO2Coating can absorb, instead It penetrates, scatter ultraviolet light, prevent polycarbonate from degrading under the action of uv light and generate coloured groups, improve makrolon material Anti-ultraviolet ageing performance.The SiO simultaneously2/TiO2Composite coating translucency with higher, and also there is certain resistance to solvent Every effect, prevents solvent from penetrating into inside makrolon material, can effectively extend the service life of the sensor.
Preferably, the cross section of the nano-pillar is regular hexagon.The experimental results showed that compared with other shapes, it will The cross section of nano-pillar of the invention is designed as regular hexagon, excites local surface plasma resonance, is conducive to effectively eliminate Influence of the environmental factor to biochemistry detection helps to improve the accuracy and precision of detection.
Preferably, the nano column array is tetragonal lattice, triangular crystal lattice or hexagonal lattice periodic arrangement.
Preferably, the thickness of the silverskin is 15~20nm.
Preferably, the distance of the nano-pillar is 20~1000nm.
The present invention also provides the preparation methods of above-mentioned local surface plasmon resonance sensor, comprising the following steps:
(1) nano column array is prepared on substrate material made of polycarbonate using nanofabrication technique, form transparent dielectric layer;
(2) SiO is prepared2Colloidal sol, by SiO2Colloidal sol is coated on the nano-pillar in transparent dielectric layer, is placed in 60~70 DEG C of baking Solidify 12~16h in case;
(3) TiO is prepared2Colloidal sol, by TiO2Colloidal sol is coated on the nano-pillar in the transparent dielectric layer that step (2) obtain, and is placed in Solidify 8~12h in 70~80 DEG C of baking oven;
(4) one layer of silverskin is deposited on the top of nano-pillar and the substrate, is dried using nitrogen, obtains the office Field surface plasmon resonance sensor.
Preferably, the SiO2Colloidal sol the preparation method comprises the following steps: 0.1~0.2:1 is dissolved in by volume by ethyl orthosilicate After dehydrated alcohol, deionized water is added, is stirring evenly and then adding into hydrochloric acid solution and adjusts pH to 1~2, obtain the SiO2Colloidal sol.
Preferably, the TiO2Colloidal sol the preparation method comprises the following steps: positive four butyl ester of metatitanic acid and triethanolamine to be pressed to the body of 2~3:1 Product is dissolved in dehydrated alcohol than mixing, obtains solution A after mixing evenly;Dehydrated alcohol and deionized water are mixed, solution is obtained B;Solution B is added drop-wise in solution A, KH-570 is then added, obtains transparent nano TiO2Colloidal sol.
Positive four butyl ester of metatitanic acid and triethanolamine are pressed the body of 2~3:1 compared with other mixed proportions by pre-stage test discovery Product is than mixing, the nano-TiO being prepared2Colloidal sol is coated in nano-pillar, still has higher light transmittance, does not influence to influence sensing The accuracy of the testing result of device.
The present invention also provides application of the above-mentioned local surface plasmon resonance sensor in biochemistry detection.The present invention Transducer sensitivity and accuracy it is high, long service life has a good application prospect in biochemistry detection field.
Compared with prior art, the invention has the benefit that
The nano column array of sensor of the invention is designed using the structure of big at both ends and small in middle, has relatively high quality Factor, and by coating SiO on the surface of nano-pillar2/TiO2Composite coating, wherein SiO2Coating helps to improve the equal of coating One property improves TiO2The combination of coating and makrolon material, is conducive to TiO2The growth of particle, prevents TiO2Photocatalysis occurs Degradation;And TiO2Coating can absorb, reflect, scatter ultraviolet light, and polycarbonate is prevented to degrade under the action of uv light generation Coloured groups improve the anti-ultraviolet ageing performance of makrolon material.The SiO2/TiO2Composite coating translucency with higher, And also there is certain barrier action to solvent, prevent solvent from penetrating into inside makrolon material.
Detailed description of the invention
Fig. 1 is local surface plasmon resonance sensor structural schematic diagram of the present invention, and in figure, 1- substrate, 2- is received Meter Zhu, 3- silverskin, 4-SiO2/TiO2Composite coating.
Specific embodiment
Purposes, technical schemes and advantages in order to better illustrate the present invention, below in conjunction with specific embodiment to the present invention It further illustrates.It will be appreciated by those skilled in the art that described herein, specific examples are only used to explain the present invention, not For limiting the present invention.
In embodiment, used experimental method is conventional method unless otherwise specified, material used, reagent etc., It is commercially available unless otherwise specified.
Embodiment 1
A kind of local surface plasmon resonance sensor, the sensor include transparent dielectric layer and silverskin;It is described transparent Dielectric layer is prepared by makrolon material, the nano column array including substrate and distribution over the substrate, the nanometer Column array is hexagonal lattice periodic arrangement, the top of each nano-pillar and the shape of its bottom and cross in the nano column array Section is all the same, and the cross section of the nano-pillar is regular hexagon, and the cross-sectional area at the top of nano-pillar is greater than its middle part Cross-sectional area, the bottom of nano-pillar is connect with the substrate;It is all covered with silverskin on the top of nano-pillar and the substrate, institute The thickness for stating silverskin is 16nm, wherein has gap between the silverskin covered on the substrate and nano-pillar;The nano-pillar Distance be 200nm, the surface coating of nano-pillar is there are also SiO2/TiO2Composite coating.
The preparation method of local surface plasmon resonance sensor described in the present embodiment, comprising the following steps:
(1) nano column array is prepared on substrate material made of polycarbonate using nanofabrication technique, form transparent dielectric layer;
(2) SiO is prepared2Colloidal sol: after 2mL ethyl orthosilicate is dissolved in 10mL dehydrated alcohol, deionized water, magnetic force is added The hydrochloric acid solution for being stirring evenly and then adding into 1mol/L adjusts pH to 1.2, continues to stir 12h, obtains SiO after standing2Colloidal sol;It will SiO2Colloidal sol is coated on the nano-pillar in transparent dielectric layer, and pull rate 0.3mm/s is placed in 60 DEG C of baking oven and solidifies 12h;
(3) TiO is prepared2Colloidal sol: positive four butyl ester of 2.4mL metatitanic acid and 1mL triethanolamine are mixed, 5mL dehydrated alcohol is dissolved in In, solution A is obtained after magnetic agitation 20min;2.5mL dehydrated alcohol and 1mL deionized water are mixed, solution B is obtained;By solution B is added drop-wise in solution A dropwise, and KH-570 is then added, and obtains transparent nano TiO2Colloidal sol;By TiO2Colloidal sol is coated on step (2) The obtained nano-pillar in transparent dielectric layer, pull rate 0.2mm/s are placed in 70 DEG C of baking oven and solidify 12h;
(4) one layer of silverskin is deposited on the top of nano-pillar and the substrate, is dried using nitrogen, obtains the office Field surface plasmon resonance sensor.
Embodiment 2
A kind of local surface plasmon resonance sensor, the sensor include transparent dielectric layer and silverskin;It is described transparent Dielectric layer is prepared by makrolon material, the nano column array including substrate and distribution over the substrate, the nanometer Column array is hexagonal lattice periodic arrangement, the top of each nano-pillar and the shape of its bottom and cross in the nano column array Section is all the same, and the cross section of the nano-pillar is quadrangle, and the cross-sectional area at the top of nano-pillar is greater than in the middle part of it Cross-sectional area, the bottom of nano-pillar are connect with the substrate;It is all covered with silverskin on the top of nano-pillar and the substrate, it is described The thickness of silverskin is 16nm, wherein has gap between the silverskin covered on the substrate and nano-pillar;The nano-pillar Distance is 200nm, and there are also SiO for the surface coating of nano-pillar2/TiO2Composite coating.
The preparation method of local surface plasmon resonance sensor described in the present embodiment, comprising the following steps:
(1) nano column array is prepared on substrate material made of polycarbonate using nanofabrication technique, form transparent dielectric layer;
(2) SiO is prepared2Colloidal sol: after 2mL ethyl orthosilicate is dissolved in 10mL dehydrated alcohol, deionized water, magnetic force is added The hydrochloric acid solution for being stirring evenly and then adding into 1mol/L adjusts pH to 1.2, continues to stir 12h, obtains SiO after standing2Colloidal sol;It will SiO2Colloidal sol is coated on the nano-pillar in transparent dielectric layer, and pull rate 0.3mm/s is placed in 60 DEG C of baking oven and solidifies 12h;
(3) TiO is prepared2Colloidal sol: positive four butyl ester of 2.4mL metatitanic acid and 1mL triethanolamine are mixed, 5mL dehydrated alcohol is dissolved in In, solution A is obtained after magnetic agitation 20min;2.5mL dehydrated alcohol and 1mL deionized water are mixed, solution B is obtained;By solution B is added drop-wise in solution A dropwise, and KH-570 is then added, and obtains transparent nano TiO2Colloidal sol;By TiO2Colloidal sol is coated on step (2) The obtained nano-pillar in transparent dielectric layer, pull rate 0.2mm/s are placed in 70 DEG C of baking oven and solidify 12h;
(4) one layer of silverskin is deposited on the top of nano-pillar and the substrate, is dried using nitrogen, obtains the office Field surface plasmon resonance sensor.
Embodiment 3
A kind of local surface plasmon resonance sensor, the sensor include transparent dielectric layer and silverskin;It is described transparent Dielectric layer is prepared by makrolon material, the nano column array including substrate and distribution over the substrate, the nanometer Column array is hexagonal lattice periodic arrangement, the top of each nano-pillar and the shape of its bottom and cross in the nano column array Section is all the same, and the cross section of the nano-pillar is circle, and the cross-sectional area at the top of nano-pillar is greater than the cross in the middle part of it Sectional area, the bottom of nano-pillar are connect with the substrate;Silverskin, the silver are all covered on the top of nano-pillar and the substrate The thickness of film is 16nm, wherein has gap between the silverskin covered on the substrate and nano-pillar;The nano-pillar that This spacing is 200nm, and there are also SiO for the surface coating of nano-pillar2/TiO2Composite coating.
The preparation method of local surface plasmon resonance sensor described in the present embodiment, comprising the following steps:
(1) nano column array is prepared on substrate material made of polycarbonate using nanofabrication technique, form transparent dielectric layer;
(2) SiO is prepared2Colloidal sol: after 2mL ethyl orthosilicate is dissolved in 10mL dehydrated alcohol, deionized water, magnetic force is added The hydrochloric acid solution for being stirring evenly and then adding into 1mol/L adjusts pH to 1.2, continues to stir 12h, obtains SiO after standing2Colloidal sol;It will SiO2Colloidal sol is coated on the nano-pillar in transparent dielectric layer, and pull rate 0.3mm/s is placed in 60 DEG C of baking oven and solidifies 12h;
(3) TiO is prepared2Colloidal sol: positive four butyl ester of 2.4mL metatitanic acid and 1mL triethanolamine are mixed, 5mL dehydrated alcohol is dissolved in In, solution A is obtained after magnetic agitation 20min;2.5mL dehydrated alcohol and 1mL deionized water are mixed, solution B is obtained;By solution B is added drop-wise in solution A dropwise, and KH-570 is then added, and obtains transparent nano TiO2Colloidal sol;By TiO2Colloidal sol is coated on step (2) The obtained nano-pillar in transparent dielectric layer, pull rate 0.2mm/s are placed in 70 DEG C of baking oven and solidify 12h;
(4) one layer of silverskin is deposited on the top of nano-pillar and the substrate, is dried using nitrogen, obtains the office Field surface plasmon resonance sensor.
Comparative example 1
A kind of local surface plasmon resonance sensor, the sensor include transparent dielectric layer and silverskin;It is described transparent Dielectric layer is prepared by makrolon material, the nano column array including substrate and distribution over the substrate, the nanometer Column array is hexagonal lattice periodic arrangement, the top of each nano-pillar and the shape of its bottom and cross in the nano column array Section is all the same, and the cross section of the nano-pillar is regular hexagon, and the cross-sectional area at the top of nano-pillar is greater than its middle part Cross-sectional area, the bottom of nano-pillar is connect with the substrate;It is all covered with silverskin on the top of nano-pillar and the substrate, institute The thickness for stating silverskin is 16nm, wherein has gap between the silverskin covered on the substrate and nano-pillar;The nano-pillar Distance be 200nm.
The preparation method of local surface plasmon resonance sensor described in this comparative example, comprising the following steps:
(1) nano column array is prepared on substrate material made of polycarbonate using nanofabrication technique, form transparent dielectric layer;
(2) one layer of silverskin is deposited on the top of nano-pillar and the substrate, is dried using nitrogen, obtains the office Field surface plasmon resonance sensor.
Comparative example 2
A kind of local surface plasmon resonance sensor, the sensor include transparent dielectric layer and silverskin;It is described transparent Dielectric layer is prepared by makrolon material, the nano column array including substrate and distribution over the substrate, the nanometer Column array is hexagonal lattice periodic arrangement, the top of each nano-pillar and the shape of its bottom and cross in the nano column array Section is all the same, and the cross section of the nano-pillar is regular hexagon, and the cross-sectional area at the top of nano-pillar is greater than its middle part Cross-sectional area, the bottom of nano-pillar is connect with the substrate;It is all covered with silverskin on the top of nano-pillar and the substrate, institute The thickness for stating silverskin is 16nm, wherein has gap between the silverskin covered on the substrate and nano-pillar;The nano-pillar Distance be 200nm, the surface coating of nano-pillar is there are also TiO2Composite coating.
The preparation method of local surface plasmon resonance sensor described in this comparative example, comprising the following steps:
(1) nano column array is prepared on substrate material made of polycarbonate using nanofabrication technique, form transparent dielectric layer;
(2) TiO is prepared2Colloidal sol: positive four butyl ester of 2.4mL metatitanic acid and 1mL triethanolamine are mixed, 5mL dehydrated alcohol is dissolved in In, solution A is obtained after magnetic agitation 20min;2.5mL dehydrated alcohol and 1mL deionized water are mixed, solution B is obtained;By solution B is added drop-wise in solution A dropwise, and KH-570 is then added, and obtains transparent nano TiO2Colloidal sol;By TiO2Colloidal sol is coated on transparent Jie Nano-pillar in matter layer, pull rate 0.2mm/s are placed in 70 DEG C of baking oven and solidify 12h;
(3) one layer of silverskin is deposited on the top of nano-pillar and the substrate, is dried using nitrogen, obtains the office Field surface plasmon resonance sensor.
Coating is coated on polycarbonate substrate according to the method for Examples 1 to 3 and comparative example 1~2 respectively and is applied Layer adhesive force, light transmittance and anti-ultraviolet ageing performance test.
Coating adhesion
The adhesive force of film instrument testing coating is drawn using QFH paint film according to the standard of ISO2409, the results are shown in Table 1.
Table 1
Group Embodiment 1 Embodiment 2 Embodiment 3 Comparative example 1 Comparative example 2
Adhesive force grade 1 1 1 - 3
SiO of the invention2/TiO2Composite coating has good adhesive force, and SiO2Coating helps to improve TiO2Coating And the combination of makrolon material.
Light transmittance
Light transmittance (600nm) is tested using UV3600 type UV, visible light near infrared spectrometer, the results are shown in Table 2.
Table 2
Group Embodiment 1 Embodiment 2 Embodiment 3 Comparative example 1 Comparative example 2
Light transmittance (%) 95.4 95.3 95.2 95.2 95.0
Table 2 the result shows that, SiO of the invention2/TiO2Composite coating will not be because reducing the light transmittance of polycarbonate to shadow Ring the testing result of sensor.
Anti-ultraviolet ageing performance
The test of artificial acceleration ultraviolet ageing is carried out using ZN-P type ultraviolet light weather resistance test chamber, after aging 200h, test Light transmittance and the yellow colour index that polycarbonate is calculated according to standard ASTMD1925-70, the results are shown in Table 3.
Table 3
Group Embodiment 1 Embodiment 2 Embodiment 3 Comparative example 1 Comparative example 2
Light transmittance (%) 92.8 92.3 93.1 80.5 89.7
Yellow colour index 5 6 5 12 7
Polycarbonate is degraded under ultraviolet light, and polycarbonate molecule occurs light and hits rearrangement reaction, makes its color Turn yellow, the light transmittance of polycarbonate is caused to decline.SiO2Coating helps to improve the homogeneity of coating, is conducive to TiO2Particle Growth, prevents TiO2Photocatalytic degradation, and TiO2Coating can be absorbed, be reflected, scattering ultraviolet light, prevent polycarbonate ultraviolet Degradation generates coloured groups under the action of light, and then improves the anti-ultraviolet ageing performance of makrolon material, extends the sensor Service life.
Using the sensor of Examples 1 to 3 and comparative example 1~2 carry out BSA solution concentration detection, by sample to be tested with The spectral signature peak shift of standard solution constructs standard curve using ultrapure water as reference, calculates sample to be tested concentration, test 3 Secondary calculating average value.
BSA concentration of standard solution be 0,25mg/L, 50mg/L, 100mg/L, 200mg/L, 500mg/L, 1000mg/L and 2000mg/L。
Testing result is as shown in table 4 with actual result.
Table 4
1#: artificial acceleration ultraviolet ageing test is not carried out;
2#: sensor is tested after carrying out artificial acceleration ultraviolet ageing test 200h;
3#: it using n-butanol as model solvent, is tested after sensor is soaked in n-butanol solvent 30d.
Table 4 the result shows that, compared with round and quadrangular cross-section shape, the cross section of nano-pillar of the invention is designed as Regular hexagon is more advantageous to the accuracy for improving detection, this may be since regular hexagon is conducive to effectively eliminate environment temperature Or the influence of the factors to biochemistry detection such as the variation of sample solution bulk refractive index and sample volatilization, the physical absorption of surface molecular; And coating SiO2/TiO2The nano-pillar of composite coating can prevent polycarbonate ultraviolet ageing, and degradation generates coloured groups, transparent The light transmittance of dielectric layer reduces, to influence the accuracy of BSA Concentration Testing;SiO simultaneously2/TiO2Composite coating also has solvent There is certain barrier action, prevents solvent from penetrating into inside makrolon material, polycarbonate is caused to crack.
Finally, it should be noted that the above embodiments are merely illustrative of the technical solutions of the present invention rather than protects to the present invention The limitation of range is protected, although the invention is described in detail with reference to the preferred embodiments, those skilled in the art should Understand, it can be with modification or equivalent replacement of the technical solution of the present invention are made, without departing from the essence of technical solution of the present invention And range.

Claims (9)

1. a kind of local surface plasmon resonance sensor, which is characterized in that the sensor includes transparent dielectric layer and silverskin; The transparent dielectric layer is prepared by makrolon material, the nano column array including substrate and distribution over the substrate, The top of each nano-pillar and the shape of its bottom and cross section in the nano column array is all the same, and the top of nano-pillar Cross-sectional area be greater than its in the middle part of cross-sectional area, the bottom of nano-pillar is connect with the substrate;The top of nano-pillar and described Silverskin is all covered on substrate, wherein have gap between the silverskin covered on the substrate and nano-pillar;The surface of nano-pillar There are also SiO for coating2/TiO2Composite coating.
2. local surface plasmon resonance sensor according to claim 1, which is characterized in that the nano-pillar it is transversal Face is regular hexagon.
3. local surface plasmon resonance sensor according to claim 1, which is characterized in that the nano column array is Tetragonal lattice, triangular crystal lattice or hexagonal lattice periodic arrangement.
4. local surface plasmon resonance sensor according to claim 1, which is characterized in that the thickness of the silverskin is equal For 15~20nm.
5. local surface plasmon resonance sensor according to claim 1 or 4, which is characterized in that the nano-pillar Distance is 20~1000nm.
6. the preparation method of described in any item local surface plasmon resonance sensors, feature exist according to claim 1~5 In, comprising the following steps:
(1) nano column array is prepared on substrate material made of polycarbonate using nanofabrication technique, form transparent dielectric layer;
(2) SiO is prepared2Colloidal sol, by SiO2Colloidal sol is coated on the nano-pillar in transparent dielectric layer, is placed in 60~70 DEG C of baking oven Solidify 12~16h;
(3) TiO is prepared2Colloidal sol, by TiO2Colloidal sol is coated on the nano-pillar in step (2) obtained transparent dielectric layer, it is placed in 70~ Solidify 8~12h in 80 DEG C of baking oven;
(4) one layer of silverskin is deposited on the top of nano-pillar and the substrate, is dried using nitrogen, obtains the local table Face plasmon resonance sensor.
7. the preparation method of local surface plasmon resonance sensor according to claim 6, which is characterized in that described SiO2Colloidal sol the preparation method comprises the following steps: by ethyl orthosilicate after 0.1~0.2:1 is dissolved in dehydrated alcohol by volume, addition go from Sub- water is stirring evenly and then adding into hydrochloric acid solution and adjusts pH to 1~2, obtains the SiO2Colloidal sol.
8. the preparation method of local surface plasmon resonance sensor according to claim 6, which is characterized in that described TiO2Colloidal sol the preparation method comprises the following steps: positive four butyl ester of metatitanic acid and triethanolamine are mixed by the volume ratio of 2~3:1, be dissolved in anhydrous second In alcohol, solution A is obtained after mixing evenly;Dehydrated alcohol and deionized water are mixed, solution B is obtained;Solution B is added drop-wise to solution In A, KH-570 is then added, obtains transparent nano TiO2Colloidal sol.
9. application of described in any item local surface plasmon resonance sensors in biochemistry detection according to claim 1~5.
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WO2023097487A1 (en) * 2021-11-30 2023-06-08 深圳华大生命科学研究院 Detection chip and preparation method therefor

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