CN110155938A - A kind of microsphere probe preparation method based on micro-cantilever transfer - Google Patents
A kind of microsphere probe preparation method based on micro-cantilever transfer Download PDFInfo
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- CN110155938A CN110155938A CN201910501377.8A CN201910501377A CN110155938A CN 110155938 A CN110155938 A CN 110155938A CN 201910501377 A CN201910501377 A CN 201910501377A CN 110155938 A CN110155938 A CN 110155938A
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- cantilever
- probe
- micro
- microballoon
- sample stage
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- 239000000523 sample Substances 0.000 title claims abstract description 135
- 239000004005 microsphere Substances 0.000 title claims abstract description 27
- 238000002360 preparation method Methods 0.000 title claims abstract description 26
- 238000012546 transfer Methods 0.000 title claims abstract description 18
- 239000000853 adhesive Substances 0.000 claims description 21
- 230000001070 adhesive effect Effects 0.000 claims description 21
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 14
- 229910052710 silicon Inorganic materials 0.000 claims description 14
- 239000010703 silicon Substances 0.000 claims description 14
- 230000001476 alcoholic effect Effects 0.000 claims description 3
- 239000008367 deionised water Substances 0.000 claims description 3
- 229910021641 deionized water Inorganic materials 0.000 claims description 3
- 238000000926 separation method Methods 0.000 claims description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 3
- 238000004140 cleaning Methods 0.000 claims description 2
- 238000000034 method Methods 0.000 abstract description 12
- 239000003292 glue Substances 0.000 abstract description 11
- 230000008569 process Effects 0.000 abstract description 5
- 239000008187 granular material Substances 0.000 abstract description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 3
- 238000000879 optical micrograph Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- PBZHKWVYRQRZQC-UHFFFAOYSA-N [Si+4].[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O Chemical compound [Si+4].[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O PBZHKWVYRQRZQC-UHFFFAOYSA-N 0.000 description 3
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 229910003460 diamond Inorganic materials 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000003672 processing method Methods 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 241000160563 Dumetella carolinensis Species 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 238000004630 atomic force microscopy Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- VDGJOQCBCPGFFD-UHFFFAOYSA-N oxygen(2-) silicon(4+) titanium(4+) Chemical compound [Si+4].[O-2].[O-2].[Ti+4] VDGJOQCBCPGFFD-UHFFFAOYSA-N 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000007480 spreading Effects 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C3/00—Assembling of devices or systems from individually processed components
- B81C3/001—Bonding of two components
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Micromachines (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Abstract
The present invention provides a kind of microsphere probe preparation methods based on micro-cantilever transfer, belong to micro-nano manufacturing technology field.Present invention process is simple, low in cost, can be used for the preparation of the microsphere probe of the tests such as micro-nano technology or impression mechanical characteristic；The flexible bonding of any granular materials may be implemented in the present invention, and arbitrarily matches with any receptor platform；Cantilever potentially acts as transfer layer while shifting microballoon, increases the contact area of microballoon and receptor platform, and then reduces contact pressure to reduce the deformation of receptor platform；Microballoon in probe preparation process may be implemented in the accurate positionin at receptor tip by micro-cantilever, and glue can be completely immersed in bonding to avoid the lesser microballoon of size, pollute microsphere probe surface.
Description
Technical field
The invention belongs to micro-nano manufacturing technology field, in particular to a kind of microsphere probe preparation based on micro-cantilever transfer
Method.
Background technique
Extensive use with micro-nano size component in each field such as MEMS, IC, optical device, micro-nano processing method technology
Also faces enormous challenge while obtaining tremendous development.The research for carrying out micro/nano-scale processing method, no matter for advanced
The development of manufacturing technology, or catbird seat is kept in new round science and technology competition for China, all there is highly important meaning
Justice.In recent years, due to having many advantages, such as that flexibility is big, precision is higher, probe technique is gradually widely used in micro-nano technology neck
Domain.Probe technique is to be realized by the mechanism of probe and sample room, tribochemistry effect, electrochemical action etc. to sample table
The techniques such as the material removal in face, oxide layer growth, texture processing.
The preparation method of probe is concerned as the premise that probe technique is applied, but (hundred microns of large scale at present
Grade) preparation of microsphere probe not yet studied extensively.Large scale (hundred micron orders) microsphere probe, which can be used to be situated between, sees ruler
The micro-nano technology of degree, the used probe material of this scale processing at present is more single, mostly diamond, and prepares
It is difficult, at high price；And the high brittleness of diamond, in process, needle point easily bifurcated seriously constrains meso-scale
Micro-nano technology.Therefore, a kind of a kind of preparation method for proposing new microsphere probe for meso-scale micro-nano technology is needed.
Summary of the invention
The purpose of the present invention is to solve the above problem, proposes a kind of microsphere probe preparation side based on micro-cantilever transfer
Method, present invention process is simple, low in cost, can be used for the preparation of the microsphere probe of micro-nano technology；The present invention may be implemented to appoint
The flexible bonding of meaning granular materials, arbitrarily matches with any receptor platform；Cantilever potentially acts as transmitting while shifting microballoon
Layer increases the contact area of microballoon and receptor platform, and then reduces contact pressure to reduce the deformation of receptor platform；By micro- outstanding
Microballoon in probe preparation process may be implemented in the accurate positionin at receptor tip in arm, and can be to avoid the lesser microballoon of size viscous
It is completely immersed in glue when connecing, pollutes microsphere probe surface.
A kind of microsphere probe preparation method based on micro-cantilever transfer, comprising the following steps:
S1, the first predeterminable area and the second predeterminable area that microballoon and adhesive are respectively placed in silicon wafer, the silicon wafer
It is placed on sample stage；
S2, cantilever probe is installed on clamping device, the mobile sample stage makes described adhesive be located at cantilever spy
Immediately below needle, the sample stage is moved up, after the cantilever probe contacts with adhesive the first preset time, is moved down
The sample stage separates the cantilever probe with adhesive；
S3, the mobile sample stage, are located at the microballoon immediately below the cantilever probe, move up the sample
Platform, after the cantilever probe and the second preset time of micro-sphere contacts, move down the sample stage make the cantilever probe with
Sample stage separation, the microballoon and cantilever probe bonding connection；
S4, the cantilever probe is spun upside down, is connected with the cantilever probe bonding on one direction of microballoon, and will
The cantilever probe after overturning is mounted on the clamping device；
S5, adhesive is smeared in the top of receptor platform, and the receptor platform is fixed on the sample stage, it is mobile
The sample stage is located at the receptor platform immediately below the cantilever probe, the sample stage is moved up, in the cantilever
After probe and receptor contact with platform third preset time, the clamping device is disconnected with cantilever probe, is moved down described
Sample stage bonds the cantilever probe and receptor platform and connects.
Further, the radius of curvature of the microballoon is 50-500 μm.
Further, in the step S1, before placing the microballoon and adhesive, the cleaning step of the silicon wafer includes:
After the silicon wafer is cleaned by ultrasonic 3-5min in alcoholic solution, it is cleaned by ultrasonic 1-3min in deionized water.
Further, first preset time is 5-10s.
Further, second preset time is 5-10min.
Further, the third preset time is 5-10min.
Further, the clamping device is the clamping device of atomic force microscope.
Beneficial effects of the present invention: the present invention provides a kind of microsphere probe preparation methods based on micro-cantilever transfer, originally
The flexible bonding of any granular materials may be implemented in invention, and arbitrarily matches with any receptor platform；Cantilever is in transfer microballoon
While potentially act as transfer layer, increase the contact area of microballoon and receptor platform, reduction contact pressure is to reduce receptor platform
Deformation, and then increase loading range and reduce loading error；The accurate positionin of microballoon may be implemented by micro-cantilever, and can
Glue is immersed during the bonding process to avoid the lesser microballoon of size, pollutes microsphere probe surface.
Detailed description of the invention
Fig. 1 is the flow chart of the embodiment of the present invention.
Fig. 2 is the preparation flow figure of the embodiment of the present invention.
Fig. 3 is the light microscopy image of 100 μm of radius of curvature probes of the embodiment of the present invention.
Fig. 4 is the receptor platform image of the embodiment of the present invention.
Fig. 5 is the vertical view light microscopy image of 100 μm of radius of curvature probes of the embodiment of the present invention.
Fig. 6 is the side view light microscopy image of 100 μm of radius of curvature probes of the embodiment of the present invention.
Specific embodiment
The embodiment of the present invention is described further with reference to the accompanying drawing.
Referring to Fig. 1, a kind of microsphere probe preparation method based on micro-cantilever transfer, is realized by following steps:
S1, the first predeterminable area and the second predeterminable area that microballoon and adhesive are respectively placed in silicon wafer, silicon wafer are placed
In on sample stage.
In the present embodiment, the microballoon of suitable material and size is selected according to demand, preset microballoon on silicon wafer is placed in and puts
Region is set, adhesive is placed in another predeterminable area on silicon wafer.
In the present embodiment, without specifically limited, size can become micro-sphere material in nanometer to the big gradient scope of millimeter magnitude
Change, especially radius of curvature effect in 50-500 μm of section is best.Preferably, select radius of curvature for 100 μm of titanium dioxide
Silicon microballoon.
In the present embodiment, adhesive can have the arbitrary substance of adhesive function for glue, AB glue etc., there is no limit.It is preferred that
Ground, the present embodiment select glue as adhesive.
In the present embodiment, silicon wafer is before placing microballoon and glue, after silicon wafer is cleaned by ultrasonic 3-5min in alcoholic solution,
It is cleaned by ultrasonic 1-3min in deionized water.
S2, cantilever probe is installed on clamping device, mobile example platform is located at adhesive immediately below cantilever probe, to
Upper mobile sample stage, after cantilever probe contacts with adhesive the first preset time, move down sample stage make cantilever probe with
Adhesive separation.
In the present embodiment, clamping device is the clamping device of atomic force microscope.Elasticity is installed in atomic force microscope
Coefficient is the rectangular cantilever silicon nitrate probes of 0.1N/m, and mobile example platform is in glue immediately below probe, and inserting needle load is arranged
For 20nN, inserting needle speed is 10 μm/s, moves up sample stage, and the withdraw of the needle after probe cantilever and glue-contact 10s makes silicon nitride
Probe is far from sample stage.Process is as shown in a in Fig. 2.
S3, mobile example platform are located at microballoon immediately below cantilever probe, move up sample stage, cantilever probe with it is micro-
After ball contacts the second preset time, moving down sample stage separates cantilever probe with sample stage, microballoon and cantilever probe bonding
Connection.
In the present embodiment, mobile example platform is in microballoon immediately below probe, and setting inserting needle load is 20nN, inserting needle speed
For 10 μm/s, sample stage is moved up, to probe cantilever and micro-sphere contacts 5min, the i.e. withdraw of the needle after glue curing, visits silicon nitride
Needle is far from sample stage, and microballoon and probes, preparation process obtain the light microscopic of the probe with microballoon as shown in b in Fig. 2 at this time
Image is as shown in Figure 3.
S4, cantilever probe is spun upside down, is connected with cantilever probe bonding on one direction of microballoon, and will be after overturning
Cantilever probe is mounted on clamping device.
In the present embodiment, the probe with microballoon is spun upside down, the one end for making probes have microballoon is upward, after overturning
Again probe is mounted on the clamping device of atomic force microscope, preparation process is as shown in c in Fig. 2.
S5, adhesive is smeared in the top of receptor platform, and receptor platform is fixed on sample stage, mobile example platform makes
Receptor platform is located at immediately below cantilever probe, moves up sample stage, in cantilever probe and default receptor contact with platform third
Between after, clamping device is disconnected with cantilever probe, moves down sample stage, is bonded cantilever probe and receptor platform and is connected.
In the present embodiment, in receptor platform top spreading glue, and it is fixed on sample stage, mobile example platform makes
Receptor Platform center is in immediately below silicon nitrate probes, and setting inserting needle load is 20nN, and inserting needle speed is 10 μm/s, is moved up
Sample stage, inserting needle to receptor platform top, to atomic force microscope (Atomic Force Microscopy, AFM) probe cantilever
With receptor contact with platform 5-10min, the i.e. withdraw of the needle after glue curing, hundred micron order microballoons and silicon nitrate probes cantilever are stayed in jointly
On receptor platform, for preparation process as shown in d in Fig. 2, the obtained receptor platform with microballoon and probe is as shown in Figure 4.
In the present embodiment, the vertical view light microscopy image and side view light microscopy image such as Fig. 5 of 100 μm of obtained radius of curvature probes and
Shown in Fig. 6.
Those of ordinary skill in the art will understand that embodiment here be to help reader understand it is of the invention
Principle, it should be understood that protection scope of the present invention is not limited to such specific embodiments and embodiments.This field it is common
Technical staff disclosed the technical disclosures can make the various various other tools for not departing from essence of the invention according to the present invention
Body variations and combinations, these variations and combinations are still within the scope of the present invention.
Claims (7)
1. a kind of microsphere probe preparation method based on micro-cantilever transfer, which comprises the following steps:
S1, the first predeterminable area and the second predeterminable area that microballoon and adhesive are respectively placed in silicon wafer, the silicon wafer are placed
In on sample stage；
S2, cantilever probe is installed on clamping device, the mobile sample stage makes described adhesive be located at the cantilever probe just
Lower section moves up the sample stage, after the cantilever probe contacts with adhesive the first preset time, moves down described
Sample stage separates the cantilever probe with adhesive；
S3, the mobile sample stage, are located at the microballoon immediately below the cantilever probe, move up the sample stage,
After the cantilever probe and the second preset time of micro-sphere contacts, moving down the sample stage makes the cantilever probe and sample stage
Separation, the microballoon and cantilever probe bonding connection；
S4, the cantilever probe is spun upside down, is connected with the cantilever probe bonding on one direction of microballoon, and will overturning
The cantilever probe afterwards is mounted on the clamping device；
S5, adhesive is smeared in the top of receptor platform, and the receptor platform is fixed on the sample stage, described in movement
Sample stage is located at the receptor platform immediately below the cantilever probe, the sample stage is moved up, in the cantilever probe
After receptor contact with platform third preset time, the clamping device is disconnected with cantilever probe, moves down the sample
Platform bonds the cantilever probe and receptor platform and connects.
2. the microsphere probe preparation method as described in claim 1 based on micro-cantilever transfer, which is characterized in that the microballoon
Radius of curvature is 50-500 μm.
3. the microsphere probe preparation method as described in claim 1 based on micro-cantilever transfer, which is characterized in that the step S1
In, before placing the microballoon and adhesive, the cleaning step of the silicon wafer includes:
After the silicon wafer is cleaned by ultrasonic 3-5min in alcoholic solution, it is cleaned by ultrasonic 1-3min in deionized water.
4. the microsphere probe preparation method as described in claim 1 based on micro-cantilever transfer, which is characterized in that described first is pre-
If the time is 5-10s.
5. the microsphere probe preparation method as described in claim 1 based on micro-cantilever transfer, which is characterized in that described second is pre-
If the time is 5-10min.
6. the microsphere probe preparation method as described in claim 1 based on micro-cantilever transfer, which is characterized in that the third is pre-
If the time is 5-10min.
7. the microsphere probe preparation method as described in claim 1 based on micro-cantilever transfer, which is characterized in that the clamping dress
It is set to the clamping device of atomic force microscope.
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| CN201910501377.8A CN110155938B (en) | 2019-06-11 | 2019-06-11 | Method for preparing microsphere probe based on micro-cantilever transfer |
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| CN110155938B CN110155938B (en) | 2022-01-28 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110658361A (en) * | 2019-09-27 | 2020-01-07 | 北京航空航天大学 | Mechanical response measuring tool based on Atomic Force Microscope (AFM) scanning probe |
| CN110749752A (en) * | 2019-10-12 | 2020-02-04 | 清华大学 | Two-dimensional material probe for atomic force microscope and preparation method and application thereof |
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| JP2003166928A (en) * | 2001-12-03 | 2003-06-13 | Seiko Instruments Inc | Scanning probe microscope |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110658361A (en) * | 2019-09-27 | 2020-01-07 | 北京航空航天大学 | Mechanical response measuring tool based on Atomic Force Microscope (AFM) scanning probe |
| CN110749752A (en) * | 2019-10-12 | 2020-02-04 | 清华大学 | Two-dimensional material probe for atomic force microscope and preparation method and application thereof |
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| Publication number | Publication date |
|---|---|
| CN110155938B (en) | 2022-01-28 |
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