CN110146992A - A kind of light-beam forming unit of diode laser matrix - Google Patents
A kind of light-beam forming unit of diode laser matrix Download PDFInfo
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- CN110146992A CN110146992A CN201910390634.5A CN201910390634A CN110146992A CN 110146992 A CN110146992 A CN 110146992A CN 201910390634 A CN201910390634 A CN 201910390634A CN 110146992 A CN110146992 A CN 110146992A
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- Prior art keywords
- translucent window
- window film
- laser
- light
- piece
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0916—Adapting the beam shape of a semiconductor light source such as a laser diode or an LED, e.g. for efficiently coupling into optical fibers
- G02B27/0922—Adapting the beam shape of a semiconductor light source such as a laser diode or an LED, e.g. for efficiently coupling into optical fibers the semiconductor light source comprising an array of light emitters
Abstract
A kind of light-beam forming unit of diode laser matrix, is related to laser diode.Equipped with laser diode and translucent window film, the translucent window film is equipped at least 2, two opposite flanks A and B of every a piece of translucent window film are parallel to each other and polish, the spacing of two opposite flanks is denoted as translucent window film width w, two surfaces per a piece of translucent window film are parallel, and orthogonal with two surfaces per a piece of translucent window film per a piece of translucent window film side A and B, the thickness per a piece of translucent window film is denoted as t, all translucent window films it is of same size, the thickness of all translucent window films is identical.Shaping effect is good, while having the characteristics that of simple structure and low cost.
Description
Technical field
The present invention relates to laser diodes, are pumped more particularly, to diode laser matrix output light can be used to produce
A kind of light-beam forming unit of diode laser matrix of other raw laser situations.
Background technique
It needs to carry out shaping to the light beam of diode laser matrix in the application of many laser higher to generate symmetry
Such as round or distributed rectangular hot spot, such as solid-state laser through, as pumping source, being frequently with diode laser matrix
Acquisition better pumping efficiency needs to be shaped to round or distributed rectangular.Common method includes microlens array, fiber optic bundle
There is a problem of that processing is complicated or expensive Deng, these methods, therefore it is simple, cheap while again to design a kind of structure
Device with good shaping effect is highly desirable.
Chinese patent CN107121781A discloses a kind of light-beam forming unit, including light source, successively far from light source and is arranged
In the first lens array, the second lens array, beam shaping, beam-focuser and the first light on the emitting light path of light source
Fibre, light source include the semiconductor laser of multiple array settings, and the first lens array includes the first lens of multiple array settings,
Face is corresponding one by one with semiconductor laser for first lens, and the second lens include the second lens of multiple array settings, and second thoroughly
Face is corresponding one by one with the first lens for mirror;Light source is located at the front focal plane of the first lens array, the rear Jiao Ping of the first lens array
Face is overlapped with the front focal plane of the second lens array.First lens array collimates light of the light source on fast axis direction, the
Two lens arrays collimate light of the light source on slow-axis direction, by being collimated to light of the light source on slow-axis direction,
Reduce due to the loss caused by side of the diverging on slow-axis direction, to improve shaping efficiency.
Chinese patent CN101144909 discloses a kind of light-beam forming unit of surface array semiconductor laser, which includes
Fast axis collimation mirror, slow axis collimating mirror, ladder lens, the first parallelepiped prism group, the second parallelepiped prism group.Face battle array half
The light beam that conductor laser issues reduces fast axis divergence angle and slow axis divergence by fast axis collimation mirror and slow axis collimating mirror respectively
Angle;Again by the luminous gap between ladder lens removal bar item, and compressed in fast axis direction;Finally with the first parallel six face
Body prism group and the second parallelepiped prism group translate segment beam after fast axis direction translation, then along slow-axis direction.Through
The above process is crossed, light beam is rearranged, and has achieved the purpose that fast and slow axis beam quality reaches unanimity.After rearranging
Light beam is through the over-focusing hot spot that can obtain high power high luminance.
Chinese patent CN103424872A discloses a kind of light-beam forming unit of semiconductor laser, by swashing semiconductor
Light device tube core carries out: (i) obtains Linear Amplifer by optical amplification element, luminous zone, and the luminous zone (ii) segmentation passes through 90 °
Optics rotating element, the optical transform of 90 ° of rotations is carried out to every section respectively, and (iii) is carried out each section by optical translation element
Spatial translation draws close them more, reduces the gap between them, and (iv) makes the picture of luminous zone by optical reduction element
Linear narrowing appropriate is carried out, the dimension size and the angle of divergence adaptable with output are formed.
Summary of the invention
It is an object of the invention to be directed to the prior art there are above-mentioned deficiency, while offer with good shaping effect
It is able to achieve light-beam forming unit of the structure simply with a kind of cheap diode laser matrix again.
The present invention is equipped with laser diode and translucent window film, and the translucent window film is equipped at least 2, per a piece of translucent window film
Two opposite flanks A and B it is parallel to each other and polish, the spacing of two opposite flanks is denoted as translucent window film width w, per a piece of
Two surfaces of optical window piece are parallel, hang down mutually per a piece of translucent window film side A and B with two surfaces per a piece of translucent window film
Directly, the thickness per a piece of translucent window film is denoted as t, all translucent window films it is of same size, the thickness of all translucent window films is identical.
The upper and lower surfaces of any a piece of translucent window film are parallel with the direction of laser propagation z-axis of laser diode, swash
The laser of optical diode is entered inside translucent window film with incident angle α from the translucent window film side A of polishing, and incident angle α is known as deflecting
Angle.Due to refraction effect, into translucent window film after the direction of laser propagation of laser diode can change, change angle and depend on
In the refractive index n and incident angle α of translucent window film, the laser propagated in translucent window film can be from the translucent window film side of another polishing
B outgoing, the direction of laser propagation after outgoing is parallel with the direction of propagation before entering translucent window film, but spy occurs for laser trace
Determine the translation of direction and distance.
The long axis of laser distributed cross-section refers to that there are light energy distributions apart from longest, long axis and laser on this straight line
The arragement direction of diode array is parallel, is known as propagation face with the plane of direction of laser propagation composition, translucent window film upper surface and
Lower surface and propagation face can be sent out there are when the non-zero angle that one is known as inclination angle by the ray trajectory translation before and after translucent window film
Life is except propagation face, refractive index, translucent window film width, deflection angle and the inclination of translation distance and direction depending on translucent window film
Angle.
The modes of emplacement of the translucent window film is that the upper and lower surfaces of all translucent window films are parallel to each other, and all with swash
Optical propagation direction is parallel, inclination angle having the same, and the deflection angle of different translucent window films is depended on to the requirement of corresponding incident ray
Translation distance and direction.
Upper and lower surfaces can be bonded two-by-two to cover a certain range of institute of long axis direction between the translucent window film
There is light.
Glass can be used in the translucent window film or other can be with the material of transmitted light.
The present invention has following beneficial effect:
The light beam that the present invention can export laser diode carries out shaping and obtains good shaping effect, has simultaneously
Simple, the cheap feature of structure.The present invention includes a certain number of translucent window films, the quantity of translucent window film, size and
There are particular requirements for combination between translucent window film.The laser of specific position is carried out using the refraction effect of translucent window film
A certain number of translucent window films are combined to realize that light beam is whole by the translation of assigned direction and distance using specific mode
Form the purpose close to distributed rectangular.Diode laser array is used as pumping source by many lasers, its output is linear point
The laser of cloth, by can preferably focus after shaping of the present invention to obtain higher pumping efficiency.Shaping effect of the present invention
Well, while having the characteristics that of simple structure and low cost.
Detailed description of the invention
Fig. 1 is the composition schematic diagram of the embodiment of the present invention.
Fig. 2 is the translucent window film axonometric drawing of the embodiment of the present invention.
Fig. 3 is the translucent window film top view of the embodiment of the present invention.
Fig. 4 is the translucent window film side view of the embodiment of the present invention.
Fig. 5 is the deflection angle schematic diagram of the single translucent window film of the embodiment of the present invention.
Fig. 6 is the schematic diagram that multiple translucent window films of the embodiment of the present invention are placed with certain inclination angle.
Fig. 7 is that multiple translucent window film upper and lower surfaces of the embodiment of the present invention are affixed the schematic diagram of placement two-by-two.
Specific embodiment
Following embodiment will the present invention is further illustrated in conjunction with attached drawing.
As shown in Fig. 1~7, the embodiment of the present invention is equipped with laser diode and translucent window film 1, and the translucent window film 1 is equipped with
At least 2, two opposite flanks A and B of every a piece of translucent window film 1 are parallel to each other and polish, the spacing note of two opposite flanks
For translucent window film width w, the upper surface 11 per a piece of translucent window film 1 is parallel with lower surface 12, translucent window film side A and B with often
The upper surface 11 and lower surface 12 of a piece of translucent window film 1 are orthogonal, and the thickness per a piece of translucent window film 1 is denoted as t, all light transmissions
The width w of window 1 is identical, and the thickness t of all translucent window films 1 is identical.
As shown in figure 5, any upper surface 11 of a piece of translucent window film 1 and the laser propagation of lower surface 12 and laser diode
Direction z-axis is parallel, and the laser of laser diode is entered inside translucent window film 1 with incident angle α from the translucent window film side A of polishing,
Incident angle α is known as deflection angle.Due to refraction effect, into translucent window film 1 after the direction of laser propagation of laser diode can occur
Change, change refractive index n and incident angle α that angle depends on translucent window film 1, the laser propagated in translucent window film 1 can be from another
The translucent window film side B outgoing of one polishing, the direction of propagation before direction of laser propagation and entrance translucent window film after outgoing are flat
Row, but the translation of specific direction and distance occurs for laser trace.
The long axis of laser distributed cross-section refers to that there are light energy distributions apart from longest, long axis and laser on this straight line
The arragement direction of diode array is parallel, is known as propagation face, translucent window film upper and lower surface with the plane of direction of laser propagation composition
With the face of propagation there are when the non-zero angle that one is known as inclination angle, can occur passing by the ray trajectory translation before and after translucent window film
It broadcasts except face, refractive index, translucent window film width, deflection angle and the inclination angle of translation distance and direction depending on translucent window film.
The modes of emplacement of translucent window film is that the upper surface 11 and lower surface 12 of all translucent window films 1 are all parallel to each other, and all
Parallel with direction of laser propagation, the deflection angle at inclination angle having the same, different translucent window films is depended on to corresponding incident ray P
It is required that translation distance d and direction (in Fig. 5, label N be normal, Q is emergent ray).
Upper surface 11 and lower surface 12 can be bonded a certain range of to cover long axis direction two-by-two between translucent window film 1
All light.
According to Snell laws of refraction, translucent window film refractive index n, incident angle α, translucent window film width w and translation distance d are deposited
In following relationship:
The long axis of laser distributed cross-section refers to that there are light energy distributions apart from longest, long axis and laser on this straight line
The arragement direction of diode array is parallel, and such as Fig. 1, x-axis is long axis.The plane that long axis is formed with light direction of propagation z-axis is known as
Propagation face, that is, x-z-plane.Such as Fig. 6, translucent window film and propagation face are passed through there are when the non-zero angle θ that one is known as inclination angle
The ray trajectory translation crossed before and after translucent window film can occur except propagation face, and translation distance d and direction depend on translucent window film
Refractive index n, translucent window film width w, angle of deflection and tiltangleθ.
Such as Fig. 6, by taking two panels translucent window film as an example, the modes of emplacement of translucent window film 1 is: the upper surface of all translucent window films 1
11 and lower surface 12 it is all parallel to each other and all parallel with direction of laser propagation z-axis, tiltangleθ having the same, different light inlet windows
The angle of deflection of piece depends on the translation distance required corresponding incident ray.As shown in fig. 6, two light on propagation face,
It is projected as P1, P2 in x-y plane, the throwing of light on the x-y plane when light is emitted after different translucent window film translations
Shadow is moved to P1 ', P2 ', and the distance between P point to P ' point is exactly the translation distance d of respective ray of light.
Upper and lower surface can be bonded two-by-two to cover a certain range of all light of long axis direction between translucent window film.Such as
There is following relationship between Fig. 7, translucent window film coverage area l, translucent window film quantity m, translucent window film thickness t and tiltangleθ:
The light that P1, P2, P3, P4 are on long axis is moved into P1 ', P2 ', P3 ', P4 ' on central axes, central axes are such as
Shown in Fig. 6 dotted line.By taking P1 as an example, translation distance dp1It can be calculated according to trigonometric function:
dp2、dp3、dp4It can obtain in the same way, the d that formula (3) substitute into formula (1) can be calculated into phase
The angle of deflection answered.
Claims (4)
1. a kind of light-beam forming unit of diode laser matrix, it is characterised in that be equipped with laser diode and translucent window film, institute
Translucent window film is stated equipped at least 2, two opposite flanks A and B of every a piece of translucent window film are parallel to each other and polish, and two opposite
The spacing of side is denoted as translucent window film width w, and two surfaces per a piece of translucent window film are parallel, per a piece of translucent window film side A
Orthogonal with B and two surfaces per a piece of translucent window film, the thickness per a piece of translucent window film is denoted as t, all translucent window films
It is of same size, the thickness of all translucent window films is identical;
The upper and lower surface of any a piece of translucent window film is parallel with the direction of laser propagation z-axis of laser diode, laser diode
Laser is entered inside translucent window film with incident angle α from the translucent window film side A of polishing, and incident angle α is known as deflection angle;Into light transmission
The direction of laser propagation of laser diode changes after window, changes refractive index n and incidence that angle depends on translucent window film
Angle α, the laser propagated in translucent window film are emitted from the translucent window film side B of another polishing, the direction of laser propagation after outgoing
It is parallel with the direction of propagation before entering translucent window film, but the translation in direction and distance occurs for laser trace;
The long axis of laser distributed cross-section and the arragement direction of diode laser matrix are parallel, translucent window film upper and lower surfaces
With direction of laser propagation composition plane exist one referred to as inclination angle non-zero angle when, by the light rail before and after translucent window film
Mark translation can occur except propagation face, and translation distance and direction depend on the refractive index of translucent window film, translucent window film width, partially
Corner and inclination angle.
2. a kind of light-beam forming unit of diode laser matrix as described in claim 1, it is characterised in that the translucent window film
Modes of emplacement be all translucent window films upper and lower surfaces it is parallel to each other and all parallel with direction of laser propagation, have
The deflection angle at identical inclination angle, different translucent window films depends on the translation distance required corresponding incident ray and direction.
3. a kind of light-beam forming unit of diode laser matrix as described in claim 1, it is characterised in that the translucent window film
Between upper and lower surfaces be bonded two-by-two, to cover a certain range of all light of long axis direction.
4. a kind of light-beam forming unit of diode laser matrix as described in claim 1, it is characterised in that the translucent window film
Using the material of glass or other transmitted lights.
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CN201910390634.5A CN110146992A (en) | 2019-05-10 | 2019-05-10 | A kind of light-beam forming unit of diode laser matrix |
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CN201910390634.5A CN110146992A (en) | 2019-05-10 | 2019-05-10 | A kind of light-beam forming unit of diode laser matrix |
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Citations (7)
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CN2499859Y (en) * | 2001-10-19 | 2002-07-10 | 武汉凌云光电科技有限责任公司 | Refraction method reshaper for linear light beam |
US20070002922A1 (en) * | 2005-06-30 | 2007-01-04 | Intel Corporation | Retro-reflecting lens for external cavity optics |
CN101545582A (en) * | 2009-05-05 | 2009-09-30 | 浙江大学 | Beam shaping illumination system of semiconductor laser array |
CN102129127A (en) * | 2011-01-18 | 2011-07-20 | 山西飞虹激光科技有限公司 | Semiconductor laser array fast and slow axis beam rearrangement device and manufacturing method |
CN202904125U (en) * | 2012-05-23 | 2013-04-24 | 武汉凌云光电科技有限责任公司 | A linear light beam shaping device using a total reflection method |
CN104122665A (en) * | 2014-03-28 | 2014-10-29 | 上海飞涅尔激光科技有限公司 | Beam shaping and coupling system for high-power laser diode array |
WO2016083487A1 (en) * | 2014-11-27 | 2016-06-02 | Carl Zeiss Smt Gmbh | Mirror, in particular collector mirror for microlithography |
-
2019
- 2019-05-10 CN CN201910390634.5A patent/CN110146992A/en active Pending
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN2499859Y (en) * | 2001-10-19 | 2002-07-10 | 武汉凌云光电科技有限责任公司 | Refraction method reshaper for linear light beam |
US20070002922A1 (en) * | 2005-06-30 | 2007-01-04 | Intel Corporation | Retro-reflecting lens for external cavity optics |
CN101545582A (en) * | 2009-05-05 | 2009-09-30 | 浙江大学 | Beam shaping illumination system of semiconductor laser array |
CN102129127A (en) * | 2011-01-18 | 2011-07-20 | 山西飞虹激光科技有限公司 | Semiconductor laser array fast and slow axis beam rearrangement device and manufacturing method |
CN202904125U (en) * | 2012-05-23 | 2013-04-24 | 武汉凌云光电科技有限责任公司 | A linear light beam shaping device using a total reflection method |
CN104122665A (en) * | 2014-03-28 | 2014-10-29 | 上海飞涅尔激光科技有限公司 | Beam shaping and coupling system for high-power laser diode array |
WO2016083487A1 (en) * | 2014-11-27 | 2016-06-02 | Carl Zeiss Smt Gmbh | Mirror, in particular collector mirror for microlithography |
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Application publication date: 20190820 |
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