CN110137110A - A kind of vacuum valve automatic rotating disk - Google Patents

A kind of vacuum valve automatic rotating disk Download PDF

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Publication number
CN110137110A
CN110137110A CN201910415466.0A CN201910415466A CN110137110A CN 110137110 A CN110137110 A CN 110137110A CN 201910415466 A CN201910415466 A CN 201910415466A CN 110137110 A CN110137110 A CN 110137110A
Authority
CN
China
Prior art keywords
guided mode
product
station
vacuum valve
suction joint
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
CN201910415466.0A
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Chinese (zh)
Inventor
谢国清
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
DONGGUAN HAYE AUTOMATION EQUIPMENT Co Ltd
Original Assignee
DONGGUAN HAYE AUTOMATION EQUIPMENT Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by DONGGUAN HAYE AUTOMATION EQUIPMENT Co Ltd filed Critical DONGGUAN HAYE AUTOMATION EQUIPMENT Co Ltd
Priority to CN201910415466.0A priority Critical patent/CN110137110A/en
Publication of CN110137110A publication Critical patent/CN110137110A/en
Withdrawn legal-status Critical Current

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B07SEPARATING SOLIDS FROM SOLIDS; SORTING
    • B07CPOSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
    • B07C5/00Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
    • B07C5/02Measures preceding sorting, e.g. arranging articles in a stream orientating
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B07SEPARATING SOLIDS FROM SOLIDS; SORTING
    • B07CPOSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
    • B07C5/00Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
    • B07C5/34Sorting according to other particular properties
    • B07C5/342Sorting according to other particular properties according to optical properties, e.g. colour
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B07SEPARATING SOLIDS FROM SOLIDS; SORTING
    • B07CPOSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
    • B07C5/00Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
    • B07C5/36Sorting apparatus characterised by the means used for distribution
    • B07C5/361Processing or control devices therefor, e.g. escort memory
    • B07C5/362Separating or distributor mechanisms
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36Removing material
    • B23K26/362Laser etching
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06VIMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V30/00Character recognition; Recognising digital ink; Document-oriented image-based pattern recognition
    • G06V30/10Character recognition
    • G06V30/22Character recognition characterised by the type of writing
    • G06V30/224Character recognition characterised by the type of writing of printed characters having additional code marks or containing code marks
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67242Apparatus for monitoring, sorting or marking
    • H01L21/67271Sorting devices
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B07SEPARATING SOLIDS FROM SOLIDS; SORTING
    • B07CPOSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
    • B07C2301/00Sorting according to destination
    • B07C2301/0008Electronic Devices, e.g. keyboard, displays

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Multimedia (AREA)
  • Theoretical Computer Science (AREA)
  • Manufacture Or Reproduction Of Printing Formes (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)

Abstract

A kind of vacuum valve automatic rotating disk of the invention, it lines up round setting by that will pick and place material station, buffer station, radium-shine print stations and Image detection station, its volume for reducing equipment, the production cost of equipment is reduced, radium-shine printing is carried out to solve the problems, such as tradition to IC electronic component and Image detection is leads to that equipment volume is huge, take up a large area and manufacturing cost is high using the structure of pipeline system;It on the circumferential edges of guided mode disk further through being provided with multiple guided modes, each suction joint is set to suck the product being placed in above each guided mode, it is set not only to eliminate the trouble needed using jig clamping product, it has been also effectively prevented from jig and has been difficult to the lesser product of clamping volume ratio and product is caused to be easy the problem of loosening, and efficiently avoid laser machine and the problem that printing precision is low, printing effect is poor and bad product rate is high often occur when the product loosened to positioning prints, it is more convenient to use, quick.

Description

A kind of vacuum valve automatic rotating disk
Technical field
The present invention relates to a kind of vacuum valve automatic rotating disks.
Background technique
Tradition carries out radium-shine printing to IC electronic component and Image detection is the structure using pipeline system, assembly line With length length and the huge deficiency of equipment, the structure manufacturing cost for causing it whole is high, and tradition is to IC electronic component It carries out positioning to position using jig, when jig clamping IC electronic component is positioned, due to IC electronic component ratio Smaller, jig is difficult to be fixed, and causes IC electronic component to be also easy to the phenomenon that loosening after jig positions it, most Laser machine is caused to be easy to appear defective products when printing to IC electronic component eventually, bad product rate height, work poor with printing effect Make low efficiency and production capacity is low etc. insufficient.
Summary of the invention
The technical problem to be solved in the present invention is to provide a kind of vacuum valve automatic rotating disks, by that will pick and place material station, delay It rushes station, radium-shine print stations and Image detection station and lines up round setting, reduce the volume of equipment, reduce equipment Production cost carries out radium-shine printing to IC electronic component with solution tradition and Image detection is led using the structure of pipeline system Cause equipment have it is bulky, take up a large area the problem high with manufacturing cost;It is further through on the circumferential edges of guided mode disk Multiple guided modes are provided with, and are provided with the first suction joint, the second suction joint, third suction joint and the 4th suction joint point Guided mode not corresponding with position therewith matches, and each suction joint is enable to inhale the product above each guided mode is placed in Tightly, so that it is not only eliminated the trouble needed using jig clamping product, be also effectively prevented from jig and be difficult to clamping volume Smaller product and cause product to be easy the problem of loosening, and efficiently avoid laser machine the product that positioning is loosened into Often there is the problem that printing precision is low, printing effect is poor and bad product rate is high when row printing.The present invention is by following technology Scheme is realized:
A kind of vacuum valve automatic rotating disk, including bracket are provided with solenoid valve on front side of bracket, and servo electricity is provided on rear side of bracket Machine, the upper surface of servo motor are provided with graphite plate, and the upper surface of graphite plate is provided with guided mode disk, and servo motor is connected with guided mode disk Rotary shaft, the side of graphite plate are provided with the first suction joint, and the other side of graphite plate is provided with the second suction joint, and first inhales The side of gas connector is provided with the 4th suction joint, and the side of the second suction joint is provided with third suction joint, graphite plate Rear side is provided with inductor, and the side of inductor is provided with air blowing connector;It is set as picking and placing material station, guided mode on the upside of guided mode disk It is set as radium-shine print stations on the downside of disk, Image detection station is set as on the left of guided mode disk, is set as on the right side of guided mode disk Buffer station.This product is used with the collocation of sucker manipulator, laser machine and Image detection instrument, and sucker manipulator is mounted on The side of material station is picked and placed, sucker manipulator, which can be used but be not limited to Foshan City, is satisfied with the production of automation equipment Co., Ltd Sucker manipulator.Laser machine is mounted on the side of radium-shine print stations, and Image detection instrument is mounted on Image detection station Side.Sucker manipulator, the structure of laser machine and Image detection instrument and working principle have been common knowledges, herein no longer in detail Thin to explain, sucker manipulator can be used but be not limited to the manipulator of Hefei power occasion automation Science and Technology Ltd. production, laser Laser machine can be used but be not limited to the laser machine of Dongguan Zheng Rui automation equipment Co., Ltd production, and Image detection instrument can It uses but is not limited to brand as the difficult to understand Image detection instrument for being AMQ320 at, article No..
Preferably, being evenly distributed with several guided modes at equal intervals on the circumferential edges of the guided mode disk.Guided mode Refer to the mold for carrying product, each guided mode is disposed as intermediate structure low, four sides are high, and is in when each guided mode vertical view The guided mode of the structure of " well " word, said structure design can be limited or be positioned to IC electronic component, conventionally employed to solve Jig is difficult to the problem of clamping IC electronic component.
Preferably, the guided mode is provided at least four, the degree for the angle that adjacent two guided modes are formed is set as 90 Degree.
Preferably, the upper surface of each described guided mode is provided with stomata, four guided modes are arranged that there are four stomata, four gas altogether Hole is respectively the first stomata, the second stomata, third stomata and the 4th stomata, and a stomata is connected to a suction joint but does not connect It connects, such as the first stomata be connected to the first suction joint, and the issues stomata is connected to the second suction joint, third stomata and third suction Gas fittings, so analogize, and after putting product above each guided mode, each suction joint passes through toward that in communication Stomata above guided mode inputs vacuum gas, adsorb each guided mode realization can securely product.
Preferably, the guided mode disk can be carried out by servo motor and rotate clockwise or rotate counterclockwise.
Preferably, the angle that the guided mode disk is rotated clockwise or rotated counterclockwise is less than or equal to 360 degree.
Preferably, the angle that the guided mode disk is rotated clockwise every time or rotated counterclockwise is 90 degree.
Preferably, pick-and-place material station, radium-shine print stations, Image detection station and buffer station are between equal Every being arranged in circle.
Preferably, respectively with electromagnetic valve, servomotor, sucker manipulator, laser machine and Image detection instrument control system It is connected with PLC controller.PLC controller can be used but be not limited to the model of the great electrical limited liability company's production of Guangdong letter The programmable controller of FX3U-32MR/ES-A.The information that Image detection instrument can be photographed is sent to PLC controller, makes The result that can control sucker manipulator after PLC controller reception information can detect according to Image detection instrument draws product, sucker machine Tool hand can also carry out classification processing to product.
Vacuum valve automatic rotating disk of the invention, including bracket, electromagnetic valve, servomotor, graphite plate, guided mode disk, the first suction Gas connector, the 4th suction joint, third suction joint, inductor, air blowing connector, picks and places material station, is radium-shine the second suction joint Print stations, Image detection station, buffer station and guided mode.The present invention is examined with sucker manipulator, laser machine and image Survey what instrument collocation used, sucker manipulator can be by product placement to being located on the guided mode for picking and placing material station, and the first suction joint is logical Cross stomata in communication for for be rotated into pick and place material station on guided mode absorption vacuum gas, enable product by first Suction joint sucks on the guided mode in pick-and-place material station;When guided mode disk is rotated by 90 ° for the first time under the driving of servo motor When, the guided mode for being loaded with product can be with guided mode disk the upper surface of from pick-and-place material station to buffer station, and the second suction joint passes through Stomata in communication is used to draw vacuum gas for the guided mode being rotated on buffer station, and product is enable to be sucked in place In on the guided mode on buffer station;When guided mode disk is rotated by 90 ° for the second time under the driving of servo motor, it is loaded with leading for product Mould can be with guided mode disk the upper surface of from buffering station to radium-shine print stations, and third suction joint passes through stomata in communication For drawing vacuum gas for the guided mode above radium-shine print stations, so that product is sucked and rotating into radium-shine print stations On guided mode above, after laser machine completes radium-shine printing to product and when guided mode disk under the driving of servo motor third It is secondary that the guided mode for being loaded with product can be transplanted on the upper surface of Image detection station from radium-shine print stations with guided mode disk when being rotated by 90 °, 4th suction joint is used to draw vacuum gas for rotation to the guided mode above Image detection station by stomata in communication, Product is set to be sucked on guided mode on Image detection station;Image detection instrument can detect the appearance of product;When When guided mode disk is rotated by 90 ° for the 4th time under the driving of servo motor, the guided mode for being loaded with product can be with guided mode disk from Image detection work Displacement is sent to the upper surface of pick-and-place material station, and the sucker manipulator by picking and placing material station side takes the product for completing Image detection It walks, meanwhile, sucker manipulator and the next product to be processed of automatic sucking, and the next processed product being drawn to is put It is put on the guided mode picked and placed in material station, to start the process operation of a new round, so recycles;Its by will pick and place expect station, Buffer station, radium-shine print stations and Image detection station line up round setting, are carried out with solving tradition to IC electronic component Radium-shine printing and Image detection are to lead to that equipment volume is huge, takes up a large area and manufacturing cost height using the structure of pipeline system The problem of;It is provided with the first suction joint, second inhales further through being provided with multiple guided modes on the circumferential edges of guided mode disk Guided mode corresponding with position therewith matches respectively for gas connector, third suction joint and the 4th suction joint, makes each air-breathing Connector can suck the product being placed in above each guided mode, not only eliminate the trouble needed using jig clamping product, It has been also effectively prevented from product loosening, and then ensures that its processing effect is good, machining accuracy is high and yields is high, uses It is more convenient, quick.
Detailed description of the invention
The present invention is described in detail by following preferred embodiments and attached drawing for ease of explanation,.
Fig. 1 is a kind of main view of vacuum valve automatic rotating disk of the invention.
Fig. 2 is a kind of perspective view of vacuum valve automatic rotating disk of the invention.
The guided mode disk and the top view after graphite plate assembling that Fig. 3 is a kind of vacuum valve automatic rotating disk of the invention.
Specific embodiment
To facilitate the understanding of the present invention, a more comprehensive description of the invention is given in the following sections with reference to the relevant attached drawings.In attached drawing Give better embodiment of the invention.But the invention can be realized in many different forms, however it is not limited to herein Described embodiment.On the contrary, the purpose of providing these embodiments is that making to understand more the disclosure Add thorough and comprehensive.
Unless otherwise defined, all technical and scientific terms used herein and belong to technical field of the invention The normally understood meaning of technical staff is identical.
In the present embodiment, referring to figs. 1 to shown in Fig. 3, a kind of vacuum valve automatic rotating disk of the invention, including bracket 1, bracket 1 front side is provided with solenoid valve 2, and the rear side of bracket 1 is provided with servo motor 3, and the upper surface of servo motor 3 is provided with graphite plate 4, The upper surface of graphite plate 4 is provided with guided mode disk 5, and the side of graphite plate 4 is provided with the first suction joint 61, the other side of graphite plate 4 It is provided with the second suction joint 62, the side of the first suction joint 61 is provided with the 4th suction joint 64, the second suction joint 62 Side be provided with third suction joint 63, the rear side of graphite plate 4 is provided with inductor 6, and the side of inductor 6 is provided with air blowing Connector 7;The upside of guided mode disk 5 is set as picking and placing material station 8, and the downside of guided mode disk 5 is set as radium-shine print stations 9, guided mode disk 5 Left side be set as Image detection station 10, the right side of guided mode disk 5 is set as buffer station 11.
In one embodiment, it is evenly distributed with several at equal intervals on the circumferential edges of the guided mode disk 5 Guided mode 51.
In one embodiment, the guided mode 51 is provided at least four, the angle that adjacent two guided modes 51 are formed Degree is set as 90 degree.
In one embodiment, the upper surface of each described guided mode 51 is provided with stomata 12.
In one embodiment, the guided mode disk 5 can be carried out by servo motor 3 and rotate clockwise or revolve counterclockwise Turn.
In one embodiment, the guided mode disk 5 rotated clockwise or the angle that rotates counterclockwise be less than or Equal to 360 degree.
In one embodiment, the angle that the guided mode disk 5 is rotated clockwise every time or rotated counterclockwise is 90 Degree.
In one embodiment, the pick-and-place material station 8, radium-shine print stations 9, Image detection station 10 and buffering work Position 11 is arranged in circle at equal intervals.
In one embodiment, which is and sucker manipulator, laser machine and Image detection Instrument collocation uses, operating process are as follows: sucker manipulator, which can arrive product placement to be located at, picks and places the guided mode 51 for expecting station 8 On, the first suction joint 61 is used to enable product quilt to be rotated into the absorption vacuum gas of guided mode 51 picked and placed on material station 8 First suction joint 61, which sucks, is picking and placing the upper surface of the guided mode 51 in material station 8;When under driving of the guided mode disk 5 in servo motor 3 When being rotated by 90 ° for the first time, the guided mode 51 for being loaded with product can be transplanted on the upper of buffer station 11 from material station 8 is picked and placed with guided mode disk 5 Face, the second suction joint 62 are used to draw vacuum gas for the guided mode 51 being rotated on buffer station 11, enable product quilt It sucks on the guided mode 51 being located above buffer station 11;When being rotated by 90 ° for the second time under driving of the guided mode disk 5 in servo motor 3 When, the guided mode 51 for being loaded with product can be transplanted on the upper surface of radium-shine print stations 9, third air-breathing from buffer station 11 with guided mode disk 5 Connector 63 is used to draw vacuum gas for the guided mode 51 above radium-shine print stations 9, so that product is sucked and is rotating into radium It penetrates on the guided mode 51 above print stations 9, after laser machine completes radium-shine printing to product and when guided mode disk 5 is in servo electricity When being rotated by 90 ° for the third time under the driving of machine 3, the guided mode 51 for being loaded with product can be transplanted on guided mode disk 5 from radium-shine print stations 9 The upper surface of Image detection station 10, the 4th suction joint 64 are used to draw for rotation to the guided mode 51 above Image detection station 10 Vacuum gas enables product to be sucked on guided mode 51 on Image detection station 10;Image detection instrument can be to the outer of product Sight is detected;When being rotated by 90 ° for the 4th time under driving of the guided mode disk 5 in servo motor 3, the guided mode 51 for being loaded with product can be with Guided mode disk 5 is transplanted on the upper surface of pick-and-place material station 8 from Image detection station 10, by the sucker manipulator for picking and placing material 8 side of station The product for completing Image detection is taken away, meanwhile, sucker manipulator and the next product to be processed of automatic sucking, and will draw To next processed product put pick and place material station 8 in guided mode 51 on, to start the process operation of a new round, so Circulation.
A kind of vacuum valve automatic rotating disk of the invention, including bracket, electromagnetic valve, servomotor, graphite plate, guided mode disk, One suction joint, the second suction joint, the 4th suction joint, third suction joint, inductor, air blowing connector, pick and place material station, Radium-shine print stations, Image detection station, buffer station and guided mode.The present invention expects station, buffer station, radium-shine by that will pick and place Print stations and Image detection station line up round setting, reduce the volume of equipment, reduce the production cost of equipment, with Solution tradition, which carries out radium-shine printing to IC electronic component, and Image detection is leads to equipment volume using the structure of pipeline system It is huge, take up a large area the problem high with manufacturing cost;Its further through being provided with multiple guided modes on the circumferential edges of guided mode disk, And be provided with the first suction joint, the second suction joint, third suction joint and the 4th suction joint respectively with position pair therewith That guided mode answered matches, and each suction joint is enable to suck the product being placed in above each guided mode, makes it not only The trouble needed using jig clamping product is eliminated, jig has been also effectively prevented from and has been difficult to the lesser product of clamping volume ratio And product is caused to be easy the problem of loosening, and it is frequent when the product loosened to positioning prints to efficiently avoid laser machine There is the problem that printing precision is low, printing effect is poor and bad product rate is high, which ensure that the processing effect of product is good, machining accuracy High and yields is high, more convenient to use, quick.
Above-described embodiment, only an example of the present invention, be not for limiting implementation and interest field of the invention, It is all identical or equivalent as principle described in the claims in the present invention and basic structure, it all falls in the scope of protection of the present invention.

Claims (8)

1. a kind of vacuum valve automatic rotating disk, it is characterised in that: including bracket, solenoid valve is provided on front side of bracket, after bracket Side is provided with servo motor, and the upper surface of servo motor is provided with graphite plate, and the upper surface of graphite plate is provided with guided mode disk, graphite plate Side is provided with the first suction joint, and the other side of graphite plate is provided with the second suction joint, and the side of the first suction joint is set It is equipped with the 4th suction joint, the side of the second suction joint is provided with third suction joint, induction is provided on rear side of graphite plate The side of device, inductor is provided with air blowing connector;It is set as picking and placing material station on the upside of guided mode disk, be set as on the downside of guided mode disk Radium-shine print stations are set as Image detection station on the left of guided mode disk, are set as buffer station on the right side of guided mode disk.
2. a kind of vacuum valve automatic rotating disk according to claim 1, it is characterised in that: on the circumferential edges of the guided mode disk It is evenly distributed with several guided modes at equal intervals.
3. a kind of vacuum valve automatic rotating disk according to claim 2, it is characterised in that: the guided mode is provided at least four A, the degree for the angle that adjacent two guided modes are formed is set as 90 degree.
4. a kind of vacuum valve automatic rotating disk according to claim 3, it is characterised in that: the setting of the upper surface of each described guided mode There is stomata.
5. a kind of vacuum valve automatic rotating disk according to claim 1, it is characterised in that: the guided mode disk passes through servo motor It can be carried out and rotate clockwise or rotate counterclockwise.
6. a kind of vacuum valve automatic rotating disk according to claim 5, it is characterised in that: the guided mode disk is revolved clockwise The angle for turning or rotating counterclockwise is less than or equal to 360 degree.
7. a kind of vacuum valve automatic rotating disk according to claim 6, it is characterised in that: the guided mode disk carries out up time every time The angle that needle is rotated or rotated counterclockwise is 90 degree.
8. a kind of vacuum valve automatic rotating disk according to claim 1, it is characterised in that: pick-and-place material station radium-shine is beaten Print station, Image detection station and buffer station are arranged in circle at equal intervals.
CN201910415466.0A 2019-05-17 2019-05-17 A kind of vacuum valve automatic rotating disk Withdrawn CN110137110A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201910415466.0A CN110137110A (en) 2019-05-17 2019-05-17 A kind of vacuum valve automatic rotating disk

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201910415466.0A CN110137110A (en) 2019-05-17 2019-05-17 A kind of vacuum valve automatic rotating disk

Publications (1)

Publication Number Publication Date
CN110137110A true CN110137110A (en) 2019-08-16

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CN201910415466.0A Withdrawn CN110137110A (en) 2019-05-17 2019-05-17 A kind of vacuum valve automatic rotating disk

Country Status (1)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113003215A (en) * 2021-03-02 2021-06-22 马丁科瑞半导体技术(南京)有限公司 Satellite wheel station of integrated machine and operation method thereof

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113003215A (en) * 2021-03-02 2021-06-22 马丁科瑞半导体技术(南京)有限公司 Satellite wheel station of integrated machine and operation method thereof

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Application publication date: 20190816

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