CN110132117A - Piezoelectric actuator nano-grade displacement Fusion Measurement System, method and apparatus - Google Patents
Piezoelectric actuator nano-grade displacement Fusion Measurement System, method and apparatus Download PDFInfo
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- CN110132117A CN110132117A CN201910478437.9A CN201910478437A CN110132117A CN 110132117 A CN110132117 A CN 110132117A CN 201910478437 A CN201910478437 A CN 201910478437A CN 110132117 A CN110132117 A CN 110132117A
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- 238000005259 measurement Methods 0.000 title claims abstract description 155
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
Abstract
The invention belongs to measuring instrument fields, more particularly to a kind of piezoelectric actuator nano-grade displacement Fusion Measurement System, it is intended that the existing measuring system of solution is to the nanoscale deformational displacement measurement result of piezoelectric actuator larger by non-linear effects, measuring accuracy is low, and sample frequency is low.The present invention includes from perception displacement measurement data acquisition module, for measuring piezoelectric ceramics electrode surface charge and driving voltage；When m- digital converted measurement data acquisition module, realize and foil gauge resistance measurement be converted into time measurement；Data processing and Fusion Module are fused to high-frequency displacement data for being handled measurement data and being calculated, and by asynchronous multi-frequency data source blending algorithm, as final measurement.The present invention occupies little space, and radiates low, can move to the nanoscale of piezoelectric actuator and carry out real-time, accurate measurement, and measurement result overcomes non-linear effects, and measurement accuracy is high, and sample frequency is high.
Description
Technical field
The invention belongs to measuring instrument fields, and in particular to a kind of piezoelectric actuator nano-grade displacement fusion measurement system
System, method and apparatus.
Background technique
Based on inverse piezoelectric effect, piezoelectric ceramic devices can generate small deformation, therefore quilt under the action of external electrical field
Applied to the actuator of nano-manipulation robot, make it to complete the operation and interaction to substance on nanoscale.In order to mention
The automatization level of high nano-manipulation robot needs to carry out closed-loop control, it is desirable that actuator to the movement of this nanoscale
Nanoscale deformational displacement carry out precise measurement.
From perception displacement measurement method based between the deformational displacement and other electricity physical quantitys derived from piezoelectric equations
Relationship, convert the free charge that driving voltage and piezoelectric effect generate for displacement measurement and measure, measuring device is configured at pressure
In electric actuator driving circuit, the probe etc. without increasing any occupied space in actuator working space or leading to fever is filled
It sets, the resolution ratio within 1 nanometer can be reached, and possess higher sampling rate, but its measurement result is larger by non-linear effects,
With certain distortion.
When m- digital conversion method be the resistance generated when deformation occurs together with piezoelectric actuator using resistance strain gage
Variation carries out resistance measurement and obtains displacement information, has many advantages, such as that the measurement result linearity is high, while also only piezoelectric actuated
Increase negligible micro volume in device working space.Compared with traditional resistor foil gauge measurement method, when m- number
Conversion method carry out resistance measurement when, the fever in measurement process can be reduced to 1/10th hereinafter, still sample frequency compared with
It is low, only tens hertz.
Existing measuring system is larger by non-linear effects to the nanoscale deformational displacement measurement result of piezoelectric actuator,
Measuring accuracy is low, and sample frequency is low, becomes the automatization level urgent problem to be solved for improving nano-manipulation robot.
Summary of the invention
In order to solve the above problem in the prior art, in order to solve existing measuring system to piezoelectric actuator
Nanoscale deformational displacement measurement result is larger by non-linear effects, and the low problem of measuring accuracy, the first aspect of the present invention mentions
A kind of piezoelectric actuator nano-grade displacement Fusion Measurement System is gone out, which includes from perception displacement measurement data acquisition
Module, when m- digital converted measurement data acquisition module, data processing and Fusion Module；
It is described to be configured to the first frequency acquisition from perception displacement measurement data acquisition module, obtain piezoelectric ceramics hair
The induced voltage for the free charge that driving voltage, piezoelectric ceramics electrode surface when raw displacement on piezoelectric ceramics electrode generate, will
Fetched data is as the first measurement data；
M- number converted measurement data acquisition module, is configured to the second frequency acquisition when described, by when m- number
Character conversion method is obtained through resistance strain gage to the discharge time after capacitor charging, using fetched data as the second measurement number
According to；
The data processing and Fusion Module are configured to first measurement data, second measurement data point
Not Ji Suan piezoelectric ceramics correspond to the displacement in each sampling interval, obtain two groups of different displacement datas of sample frequency are permeated
Group displacement measurement.
In some preferred embodiments, described to include: from perception displacement measurement data acquisition module
Voltage measurement submodule, the digital signal for being configured to obtain the driving voltage on the piezoelectric ceramics electrode indicate；
Charge measurement submodule is configured to obtain what the free charge induction that the piezoelectric ceramics electrode surface generates generated
The digital signal of induced voltage indicates.
In some preferred embodiments, the voltage measurement submodule includes voltage follower and analog-digital converter:
The voltage follower is configured to follow the driving voltage for acquiring the drive power supply for piezoelectric ceramics and output；
The analog-digital converter is configured to the output signal of the voltage follower, obtains the driving voltage
Digital signal indicates.
In some preferred embodiments, the charge measurement submodule includes charge amplifier and analog-digital converter:
The charge amplifier is arranged in series between the piezoelectric ceramics cathode and ground, for obtaining the piezoelectricity pottery
The induced voltage for the free charge that porcelain electrode surface generates；
The analog-digital converter obtains the number letter of the induced voltage for the output based on the charge amplifier
Number indicate.
In some preferred embodiments, m- number converted measurement data acquisition module includes: when described
Acquisition Circuit submodule, including resistance strain gage, capacitor and switching circuit；The resistance strain gage attaching is set to
Piezoelectric ceramics deformation surface, for acquiring piezoelectric ceramics deformational displacement；The capacitor is used for charge when charge or discharge
Storage；The switching circuit is used to carry out charge control and control of discharge to the capacitor with constant voltage；
Voltage measurement submodule is configured to measure by the voltage to the capacitor, obtains the analog signal of voltage
It indicates；
When m- digital transform subblock, the analog signal for being configured to the voltage of voltage measurement submodule output indicates,
By when m- digital quantizer obtain the digital signal of capacitor discharge time and indicate.
In some preferred embodiments, the data processing and Fusion Module include:
Electricity nonlinear compensation submodule is configured to the estimation of electric leakage accumulated error, to piezoelectric ceramics electrode surface
The measurement data of the free charge of generation carries out nonlinear compensation；
It is displaced computational submodule, is configured to first measurement data, second measurement data calculates separately pressure
The displacement in electroceramics each sampling interval；
It is displaced fusion calculation submodule, is configured to asynchronous multi-frequency data source blending algorithm to the displacement meter operator
Two groups of asynchronous piezoelectric ceramics displacement datas of module output carry out data fusion, obtain output frequency and adopt equal to two groups of displacement datas
The final mean annual increment movement measurement result of the sum of sample frequency
K (k)=(P-(k)HT+U)(HP-(k)HT+R+HU+UTHT)-1
Wherein,For the predicted value according to previous displacement measurement to current displacement measurement, K (k) is to increase
Beneficial coefficient, z (k) are quantity of state, and H is model coefficient.
The second aspect of the present invention proposes a kind of piezoelectric actuator nano-grade displacement fusion measurement method, this method
The following steps are included:
Based on the first frequency acquisition, driving voltage, the piezoelectricity when piezoelectric ceramics is subjected to displacement on piezoelectric ceramics electrode are obtained
The induced voltage for the free charge that ceramic electrode surface generates, using fetched data as the first measurement data；
Based on the second frequency acquisition, by when m- digital conversion method, obtain after resistance strain gage is to capacitor charging
Discharge time, using fetched data as the second measurement data；
Piezoelectric ceramics, which is calculated separately, based on first measurement data, second measurement data corresponds to each sampling interval
Displacement permeates obtain two groups of different displacement datas of sample frequency a group displacement measurement.
In some preferred embodiments, " obtain two groups of different displacement datas of sample frequency are permeated group
The method of displacement measurement " are as follows: data are carried out to two groups of asynchronous shifting data based on asynchronous multi-frequency data source blending algorithm and are melted
It closes, obtains the final mean annual increment movement measurement result that output frequency is equal to the sum of two groups of displacement data sample frequencys
K (k)=(P-(k)HT+U)(HP-(k)HT+R+HU+UTHT)-1
Wherein,For the predicted value according to previous displacement measurement to current displacement measurement, K (k) is to increase
Beneficial coefficient, z (k) are quantity of state, and H is model coefficient.
The third aspect of the present invention proposes a kind of storage device, wherein be stored with a plurality of program, described program be suitable for by
Processor is loaded and is executed to realize that above-mentioned piezoelectric actuator nano-grade displacement merges measurement method.
The fourth aspect of the present invention proposes a kind of processing unit, including processor, storage device；Processor, suitable for holding
Each program of row；Storage device is suitable for storing a plurality of program；Described program is suitable for being loaded by processor and being executed above-mentioned to realize
Piezoelectric actuator nano-grade displacement merge measurement method.
Beneficial effects of the present invention:
In present system by by from perception displacement measurement method with when obtain two groups of m- digital conversion method it is different
The displacement data of frequency, which permeates, organizes a high-frequency displacement data, and as final measurement, system not only occupies little space,
Heat dissipation capacity is low, and overcomes non-linear effects, has measurement accuracy high, and sample frequency is high, the low advantage of noise, realizes pair
Real-time, the precise measurement of piezoelectric actuator nanoscale movement.
Detailed description of the invention
Upon reading the detailed description of non-limiting embodiments with reference to the following drawings, other features,
Objects and advantages will become more apparent upon:
Fig. 1 piezoelectric actuator nano-grade displacement Fusion Measurement System system framework schematic diagram；
Fig. 2 perceives displacement measurement data acquisition module circuit diagram certainly；
M- number converted measurement data acquisition module circuit diagram when Fig. 3；
The asynchronous multi-frequency data source blending algorithm flow diagram of Fig. 4.
Specific embodiment
To make the object, technical solutions and advantages of the present invention clearer, below in conjunction with attached drawing to the embodiment of the present invention
In technical solution be clearly and completely described, it is clear that described embodiments are some of the embodiments of the present invention, without
It is whole embodiments.Based on the embodiments of the present invention, those of ordinary skill in the art are not before making creative work
Every other embodiment obtained is put, shall fall within the protection scope of the present invention.
The application is described in further detail with reference to the accompanying drawings and examples.It is understood that this place is retouched
The specific embodiment stated is used only for explaining related invention, rather than the restriction to the invention.It also should be noted that in order to
Convenient for description, part relevant to related invention is illustrated only in attached drawing.
It should be noted that in the absence of conflict, the features in the embodiments and the embodiments of the present application can phase
Mutually combination.
Piezoelectric actuator nano-grade displacement Fusion Measurement System 100 of the invention, as shown in Figure 1, including from perception
Displacement measurement data acquisition module 110, when m- digital converted measurement data acquisition module 120, data processing and Fusion Module
130。
From perception displacement measurement data acquisition module 110, it is configured to the first frequency acquisition, obtains piezoelectric ceramics
The induced voltage for the free charge that driving voltage, piezoelectric ceramics electrode surface when displacement on piezoelectric ceramics electrode generate, by institute
Data are obtained as the first measurement data.
When m- digital converted measurement data acquisition module 120, be configured to the second frequency acquisition, by when m- number
Conversion method is obtained through resistance strain gage to the discharge time after capacitor charging, using fetched data as the second measurement data.
Data processing and Fusion Module 130 are configured to first measurement data, second measurement data difference
It calculates piezoelectric ceramics and corresponds to the displacement in each sampling interval, obtain two groups of different displacement datas of sample frequency are permeated group
Displacement measurement.
In order to which more clearly the present invention will be described, with reference to the accompanying drawing to each mould in a kind of embodiment of present system
Block carries out expansion detailed description.
1, from perception displacement measurement data acquisition module
From perception displacement measurement data acquisition module 110, as shown in Fig. 2, being embedded in the driving electricity of piezoelectric actuator
Lu Zhong, including voltage measurement submodule 111, charge measurement submodule 112.
Voltage measurement submodule 111 is by analog-digital converter 1 by voltage follower to the driving voltage on piezoelectric ceramics
VdriverValue is sampled, quantified and is encoded, synchronous driving later to data processing and Fusion Module 130.
For charge measurement submodule 112 using piezoelectric ceramics as measurement object, interior dotted line frame is that piezoelectric ceramics equivalent model is (non-
Actual circuit), piezoelectric ceramics deformation generates charge, is equivalent to a controlled charge source in an equivalent capacity CpIt is discharged on pole plate
Charge Qe, and in charge amplifier feedback capacitor CfOn induce charge equivalence, then can be according to formula (1)
Qe=-Vout·Cf (1)
By VoutDirect measured value as charge measurement.
Charge measurement submodule 112 is connected between piezoelectric ceramics cathode and ground, with one with Low-bias Current high-precision
Operational amplifier and high stability feedback capacity CfThe charge amplifier of composition obtains the induced voltage on piezoelectric ceramics electrode
Vout, it sampled, quantified and is encoded through analog-digital converter 2, synchronous driving later to data processing and Fusion Module 130.
Because of equivalent resistance RpPresence, piezoelectric ceramics work when there is electric current to leak through, therefore in circuit be added resistance RlAs
The leakage path of this portion of electrical current, to prevent CfCaused to drift about by its charging.
2, m- number converted measurement data acquisition module when
2.1, Acquisition Circuit submodule 121
Circuit theory is as shown in figure 3, two panels resistance strain gage is affixed on the piezoelectric ceramics surface that deformation occurs and static respectively
Reference planes on.Controller is charged by switching circuit G1 to capacitor C with the constant voltage of V, when voltage reaches upper threshold value on C
VccWhen close G1.1 control switch circuit G2 of discharge control signal is opened, and the foil gauge electric discharge in measurement object is until capacitance voltage
Reach lower threshold value Vth, this discharge process time is denoted as t1, recharge process after G2 is closed, discharge control signal 2 controls later
Switching circuit G3 is opened, and the foil gauge electric discharge in reference planes is until capacitance voltage reaches lower threshold value Vth, this discharge process time
It is denoted as t2.For voltage oscillogram as shown in figure 3, wherein abscissa is time (time), ordinate is voltage.
2.2, voltage measurement submodule 122
When voltage reaches upper threshold value V on capacitor CccWhen, by the foil gauge electric discharge in measurement object until capacitance voltage reaches
To lower threshold value Vth；When voltage reaches upper threshold value V on capacitor CccWhen, by reference to the foil gauge electric discharge in plane until capacitor electricity
Pressure reaches lower threshold value Vth；Using the capacitance voltage in discharge process twice as when m- digital transform subblock input.
2.3, m- number transform subblock 123 when
Capacitance voltage analog signal based on input, by when the acquisition of m- digital quantizer obtain capacitor and discharged twice
The discharge time t of journey1And t2, wherein t1And t2For digital signal.Time signal t1And t2In a synchronous manner to data processing with melt
Block 130 is molded to export.
3, data processing and Fusion Module 130
Data processing and Fusion Module 130 include electricity nonlinear compensation submodule 131, displacement 132 and of computational submodule
It is displaced fusion calculation submodule 133.
3.1, electricity nonlinear compensation submodule 131
Based on the estimation of electric leakage accumulated error, the measurement data for the free charge that piezoelectric ceramics electrode surface generates is passed through
Nonlinear compensation algorithm carries out nonlinear compensation according to formula (2), obtains the revised charge value of i-th sampled result.
In formulaFor sample frequency inverse, that is, sampling interval duration.
3.2, it is displaced computational submodule 132
Based on the method for carrying out displacement calculating from perception 110 measurement data of displacement measurement data acquisition module are as follows:
By formula (3) according to QeAnd VdriverCalculate the final measurement displacement data of perception certainly:
This formula is obtained by piezoelectric equations combination maxwell equation group, and removes displacement of targets S, charge Qe, voltage Vdriver
It is outside constant；
With the calibrated parameter alpha of linear regression, β and γ, obtained according to formula (4) final from perception displacement measurement output
Value.
SSS=α Qe+β·Vdriver+γ (4)
Based on when m- digital 120 measurement data of the converted measurement data acquisition module method that carries out displacement calculating are as follows:
Based on when m- digital 120 measurement data of converted measurement data acquisition module, calculated by formula (5) and discharged twice
The difference Δ t of time；
Δ R on the right of formula (5)pIt is linear with deformational displacement x for the foil gauge resistance change on piezoelectric ceramics,
Remaining is all constant, then Δ t and x is also linear, and as shown in formula (6), wherein a, b are constant；
Δ t=ax+b (6)
M- digital transition shift measurement output result S when finalTDCFor the linear transfor amount of x, therefore being displaced can be according to line
Property return after normal parameter ω and η be calculated by formula (7).
STDC=ω Δ t+ η (7)
3.3, it is displaced fusion calculation submodule 133
Because the sampling of two displacement measurement data acquisition modules is asynchronous, and the two sample frequency difference is larger, wherein
Sample frequency from perception displacement measurement data acquisition module when being 10 times of m- digital converted measurement data acquisition module with
On, therefore it is different to be displaced two displacement data frequencies that computational submodule 132 is calculated.It is displaced fusion calculation submodule 133
By below based on the improved mode of Kalman filtering, as shown in figure 4, carrying out state estimations to two displacement datas to realize number
According to the purpose of fusion.
What is inputted when the k moment is from perception data SSS(k) when, its relatively upper one is calculated first from perception data SSS(k-
1) increment u (k)=SSS(k)-SSS(k-1), then judge that a upper input quantity is calculated from which measurement module
Displacement data, if from perception displacement measurement data acquisition module certainly, quantity of state z (k)=z (k-1)+u (k), if come from
M- number converted measurement data acquisition module, thenWhereinIt is the fusion knot of previous step
Fruit.Then update is followed the steps below to calculate:
P-(k)=P-1(k-1)+Q
K (k)=(P-(k)HT+U)(HP-(k)HT+R+HU+UTHT)-1
P (k)=(1-K (k) H) P-(k)-K(k)UT
Wherein K (0), P (0) can any nonnegative value initialization, model coefficient H=1, Q, R be respectively prediction model output
ValueMean square error and mean square error from sensing module output valve, U be withMean error and z (k) are averagely accidentally
The all relevant constant of difference, above each constant term can be obtained by the test of single module with estimation.For estimated result,
That is the final measurement at this moment,For the prediction according to previous displacement measurement to current displacement measurement
Value, K (k) are gain coefficient, and P (k) is the coefficient that an initial value is set as any positive real number, can gradually be restrained with iterative process, should
It is worth related with the mean square error between true value to estimated result.
When input measurement result from when m- digital converted measurement data acquisition module be calculated displacement data when,
STDC(k), a u (k), i.e., perception increment certainly nearest from current time, i.e. u (k)=u (k-1)=S are continued to useSS(k-1)-
SSS(k-2).Quantity of state is dual vector z (k)=[S at this timeTDC(k),SSS(k-1)]T, correspondingly, model coefficient H at this time
It is also a dual vector
Then update is followed the steps below to calculate:
P-(k)=P-1(k-1)+Q
K (k)=(P-(k)HT+U)(HP-(k)HT+R+HU+UTHT)-1
P (k)=(1-K (k) H) P-(k)-K(k)UT
Because z (k) is the vector from the combination of two measurement module results at this time, the dimension of corresponding U, R, K (k) is also sent out
Variation is given birth to.For estimated result, the i.e. final measurement of this moment displacement.
In order to improve the stability of blending algorithm at high frequencies, Q is carried out adaptively by formula (8):
Wherein C is constant,
By the above process, state estimation can be carried out to two displacement datas respectively, current displacement had both been utilized and has calculated
Input quantity, and utilize another displacement calculate increment information, with merge both measurement result.Final output frequency phase
When in the sum of the output frequency of two displacement datas.
Table 1 gives the comparison of several quantizating index in the above calculating process, it is seen that fusion measurement result is relative to two groups
Original measurement, error lie substantially in minimum.
Table 1
It should be noted that piezoelectric actuator nano-grade displacement Fusion Measurement System provided by the above embodiment, only
The example of the division of the above functional modules, in practical applications, it can according to need and by above-mentioned function distribution
Completed by different functional modules, i.e., by the embodiment of the present invention module or step decompose or combine again, for example, on
The module for stating embodiment can be merged into a module, multiple submodule can also be further split into, to complete above description
All or part of function.For module involved in the embodiment of the present invention, the title of step, it is only for distinguish each
Module or step, are not intended as inappropriate limitation of the present invention.
A kind of piezoelectric actuator nano-grade displacement of the embodiment of the present invention merges measurement method, comprising the following steps:
Based on the first frequency acquisition, driving voltage, the piezoelectricity when piezoelectric ceramics is subjected to displacement on piezoelectric ceramics electrode are obtained
The induced voltage for the free charge that ceramic electrode surface generates, using fetched data as the first measurement data；
Based on the second frequency acquisition, by when m- digital conversion method, obtain after resistance strain gage is to capacitor charging
Discharge time, using fetched data as the second measurement data；
The displacement that piezoelectric ceramics corresponds to each sampling interval is calculated separately based on the first measurement data, the second measurement data, it will
Two groups of obtained different displacement datas of sample frequency permeate a group displacement measurement.
The detailed implementation methods of each step are merged referring to a kind of piezoelectric actuator nano-grade displacement of the present invention in method
The functions of modules of measuring system realizes description.
A kind of storage device of the embodiment of the present invention, wherein being stored with a plurality of program, described program is suitable for being added by processor
It carries and executes to realize that above-mentioned piezoelectric actuator nano-grade displacement merges measurement method.
A kind of processing unit of the embodiment of the present invention, including processor, storage device；Processor is adapted for carrying out each journey
Sequence；Storage device is suitable for storing a plurality of program；Described program is suitable for being loaded by processor and being executed to realize above-mentioned piezoelectricity pottery
Porcelain actuator nano-grade displacement merges measurement method.
Person of ordinary skill in the field can be understood that, for convenience and simplicity of description, foregoing description
The specific work process and related explanation of storage device, processing unit, can refer to corresponding processes in the foregoing method embodiment,
Details are not described herein.
Those skilled in the art should be able to recognize that, mould described in conjunction with the examples disclosed in the embodiments of the present disclosure
Block, method and step, can be realized with electronic hardware, computer software, or a combination of the two, software module, method and step pair
The program answered can be placed in random access memory (RAM), memory, read-only memory (ROM), electrically programmable ROM, electric erasable and can compile
Any other form of storage well known in journey ROM, register, hard disk, moveable magnetic disc, CD-ROM or technical field is situated between
In matter.In order to clearly demonstrate the interchangeability of electronic hardware and software, in the above description according to function generally
Describe each exemplary composition and step.These functions are executed actually with electronic hardware or software mode, depend on technology
The specific application and design constraint of scheme.Those skilled in the art can carry out using distinct methods each specific application
Realize described function, but such implementation should not be considered as beyond the scope of the present invention.
Term " first ", " second " etc. are to be used to distinguish similar objects, rather than be used to describe or indicate specific suitable
Sequence or precedence.
Term " includes " or any other like term are intended to cover non-exclusive inclusion, so that including a system
Process, method, article or equipment/device of column element not only includes those elements, but also including being not explicitly listed
Other elements, or further include the intrinsic element of these process, method, article or equipment/devices.
So far, it has been combined preferred embodiment shown in the drawings and describes technical solution of the present invention, still, this field
Technical staff is it is easily understood that protection scope of the present invention is expressly not limited to these specific embodiments.Without departing from this
Under the premise of the principle of invention, those skilled in the art can make equivalent change or replacement to the relevant technologies feature, these
Technical solution after change or replacement will fall within the scope of protection of the present invention.
Claims (10)
1. a kind of piezoelectric actuator nano-grade displacement Fusion Measurement System, which is characterized in that the system includes from perception position
Shift measurement data acquisition module, when m- digital converted measurement data acquisition module, data processing and Fusion Module；
It is described to be configured to the first frequency acquisition from perception displacement measurement data acquisition module, it obtains piezoelectric ceramics and position occurs
The induced voltage for the free charge that driving voltage, piezoelectric ceramics electrode surface when shifting on piezoelectric ceramics electrode generate, will be obtained
Access is according to as the first measurement data；
M- number converted measurement data acquisition module, is configured to the second frequency acquisition when described, by when m- number turn
Method is changed, is obtained through resistance strain gage to the discharge time after capacitor charging, using fetched data as the second measurement data；
The data processing and Fusion Module are configured to first measurement data, second measurement data is counted respectively
It calculates piezoelectric ceramics and corresponds to the displacement in each sampling interval, obtain two groups of different displacement datas of sample frequency are permeated a group position
Shift measurement result.
2. piezoelectric actuator nano-grade displacement Fusion Measurement System according to claim 1, which is characterized in that described
Include: from perception displacement measurement data acquisition module
Voltage measurement submodule, the digital signal for being configured to obtain the driving voltage on the piezoelectric ceramics electrode indicate；
Charge measurement submodule is configured to obtain the induction that the free charge induction that the piezoelectric ceramics electrode surface generates generates
The digital signal of voltage indicates.
3. piezoelectric actuator nano-grade displacement Fusion Measurement System according to claim 2, which is characterized in that described
Voltage measurement submodule includes voltage follower and analog-digital converter:
The voltage follower is configured to follow the driving voltage for acquiring the drive power supply for piezoelectric ceramics and output；
The analog-digital converter is configured to the output signal of the voltage follower, obtains the number of the driving voltage
Signal indicates.
4. piezoelectric actuator nano-grade displacement Fusion Measurement System according to claim 2, which is characterized in that described
Charge measurement submodule includes charge amplifier and analog-digital converter:
The charge amplifier is arranged in series between the piezoelectric ceramics cathode and ground, for obtaining the piezoelectric ceramics electricity
The induced voltage for the free charge that pole surface generates；
The analog-digital converter obtains the digital signal table of the induced voltage for the output based on the charge amplifier
Show.
5. piezoelectric actuator nano-grade displacement Fusion Measurement System according to claim 1, which is characterized in that described
When m- digital converted measurement data acquisition module include:
Acquisition Circuit submodule, including resistance strain gage, capacitor and switching circuit；The resistance strain gage attaching is set to described
Piezoelectric ceramics deformation surface, for acquiring piezoelectric ceramics deformational displacement；
The capacitor is used for the storage of charge when charge or discharge；The switching circuit be used for constant voltage to the capacitor into
Row charge control and control of discharge；
Voltage measurement submodule is configured to measure by the voltage to the capacitor, and the analog signal for obtaining voltage indicates；
When m- digital transform subblock, the analog signal for being configured to the voltage of voltage measurement submodule output indicates, passes through
When m- digital quantizer obtain the digital signal of capacitor discharge time and indicate.
6. piezoelectric actuator nano-grade displacement Fusion Measurement System according to claim 1, which is characterized in that described
Data processing and Fusion Module include:
Electricity nonlinear compensation submodule is configured to the estimation of electric leakage accumulated error, generates to piezoelectric ceramics electrode surface
Free charge measurement data carry out nonlinear compensation；
It is displaced computational submodule, is configured to first measurement data, second measurement data calculates separately piezoelectricity pottery
The displacement in porcelain each sampling interval；
It is displaced fusion calculation submodule, is configured to asynchronous multi-frequency data source blending algorithm to the displacement computational submodule
The asynchronous piezoelectric ceramics displacement data of two groups of output carries out data fusion, obtains output frequency and is equal to two groups of displacement data sampling frequencies
The final mean annual increment movement measurement result of the sum of rate
K (k)=(P-(k)HT+U)(HP-(k)HT+R+HU+UTHT)-1
Wherein,For the predicted value according to previous displacement measurement to current displacement measurement, K (k) is gain system
Number, z (k) are quantity of state, and H is model coefficient.
7. a kind of piezoelectric actuator nano-grade displacement merges measurement method, which is characterized in that method includes the following steps:
Based on the first frequency acquisition, driving voltage, the piezoelectric ceramics when piezoelectric ceramics is subjected to displacement on piezoelectric ceramics electrode are obtained
The induced voltage for the free charge that electrode surface generates, using fetched data as the first measurement data；
Based on the second frequency acquisition, by when m- digital conversion method, obtain through resistance strain gage to the electric discharge after capacitor charging
Time, using fetched data as the second measurement data；
The position that piezoelectric ceramics corresponds to each sampling interval is calculated separately based on first measurement data, second measurement data
It moves, obtain two groups of different displacement datas of sample frequency is permeated a group displacement measurement.
8. piezoelectric actuator nano-grade displacement according to claim 7 merges measurement method, which is characterized in that " will
Two groups of obtained different displacement datas of sample frequency permeate a group displacement measurement " method are as follows: be based on asynchronous multifrequency
Rate data source blending algorithm carries out data fusion to two groups of asynchronous displacement datas, obtains output frequency and adopts equal to two groups of displacement datas
The final mean annual increment movement measurement result of the sum of sample frequency
K (k)=(P-(k)HT+U)(HP-(k)HT+R+HU+UTHT)-1
Wherein,For the predicted value according to previous displacement measurement to current displacement measurement, K (k) is gain system
Number, z (k) are quantity of state, and H is model coefficient.
9. a kind of storage device, wherein being stored with a plurality of program, which is characterized in that described program is suitable for being loaded and being held by processor
To realize, piezoelectric actuator nano-grade displacement described in any claim merges measurement method to row in claim 7-8.
10. a kind of processing unit, including processor, storage device；Processor is adapted for carrying out each program；Storage device is suitable for
Store a plurality of program；It is characterized in that, described program is any in claim 7-8 to realize suitable for being loaded by processor and being executed
Piezoelectric actuator nano-grade displacement described in claim merges measurement method.
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110986752A (en) * | 2019-11-26 | 2020-04-10 | 深圳市智能机器人研究院 | Angle self-correction method and system based on multi-frequency excitation |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1508510A (en) * | 2002-12-13 | 2004-06-30 | 中国科学院自动化研究所 | Step-recursion nano-level measuring system based on high-precision inductive probe |
| CN103675481A (en) * | 2013-10-18 | 2014-03-26 | 中国科学院电子学研究所 | Piezoelectric cantilever beam type mini electric field sensor |
| JP2014240842A (en) * | 2011-04-08 | 2014-12-25 | 株式会社村田製作所 | Operation device |
| CN105846712A (en) * | 2016-04-26 | 2016-08-10 | 南京理工大学 | Piezoelectric driving power supply based on inductive charge feedback and control method thereof |
-
2019
- 2019-06-03 CN CN201910478437.9A patent/CN110132117B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1508510A (en) * | 2002-12-13 | 2004-06-30 | 中国科学院自动化研究所 | Step-recursion nano-level measuring system based on high-precision inductive probe |
| JP2014240842A (en) * | 2011-04-08 | 2014-12-25 | 株式会社村田製作所 | Operation device |
| CN103675481A (en) * | 2013-10-18 | 2014-03-26 | 中国科学院电子学研究所 | Piezoelectric cantilever beam type mini electric field sensor |
| CN105846712A (en) * | 2016-04-26 | 2016-08-10 | 南京理工大学 | Piezoelectric driving power supply based on inductive charge feedback and control method thereof |
Non-Patent Citations (2)
| Title |
|---|
| 王志等: "柔性压电智能反射面的静态形状控制", 《光学精密工程》 * |
| 邓露等: "基于TDC的纳米级位移测量方法及其误差分析", 《中国科学:信息科学》 * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110986752A (en) * | 2019-11-26 | 2020-04-10 | 深圳市智能机器人研究院 | Angle self-correction method and system based on multi-frequency excitation |
| CN110986752B (en) * | 2019-11-26 | 2021-05-18 | 深圳市智能机器人研究院 | Angle self-correction method and system based on multi-frequency excitation |
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