CN110132115A - The signal adapter and signal correction method of submicron order high-precision HBT displacement sensor - Google Patents
The signal adapter and signal correction method of submicron order high-precision HBT displacement sensor Download PDFInfo
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- CN110132115A CN110132115A CN201910409593.XA CN201910409593A CN110132115A CN 110132115 A CN110132115 A CN 110132115A CN 201910409593 A CN201910409593 A CN 201910409593A CN 110132115 A CN110132115 A CN 110132115A
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- displacement sensor
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
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- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Abstract
The present invention provides a kind of signal adapter of submicron order high-precision HBT displacement sensor, comprising: excitation signal generator, synchronized sampling impulse generator, AC amplifier, synchronous sampler, active filter, high gain DC amplifier, A/D converter, single-chip microcontroller, D A converter, analog output mouth and digital interface；It is equipped with signal correction module in the single-chip microcontroller, is linearly corrected for the measured value to HBT displacement sensor；The present invention also proposes a kind of signal correction method of the signal adapter of submicron order high-precision HBT displacement sensor.The present invention improves the measurement accuracy of HBT displacement sensor, and good linearity is suitble to the in-site measurement demand of multi items, high-accuracy flexible production line.
Description
Technical field
The present invention relates to a kind of signal adapter of inductance displacement sensor more particularly to a kind of wide range submicron order are high
The signal adapter of precision HBT displacement sensor.
Background technique
Currently, the matching used detection of institute is set as the demand that domestic industry produces miniaturization and fining is more strong
Testing agency in standby also needs more to minimize.To adapt to this market demand, the half-bridge that coil number is less, shape is more small and exquisite is passed
Sensor (such as HBT half-bridge displacement sensor, HBT:Half-bridge transducer) is more and more applied.But half
Bridge sensor has that the linear relationship between the pressure variable amount of gauge head and fed back values is poor.After tested, ± 250 μm always make
With in range, the linearity error of each section of use scope is uncontrollable, and worst error is about 9 μm, has seriously affected the inspection of measuring device
Survey precision.
Summary of the invention
It is an object of the present invention to overcome the shortcomings of the prior art and provide a kind of submicron order high-precision HBT
The signal adapter of displacement sensor, and corresponding signal correction method, improve the measurement accuracy of HBT displacement sensor, line
Property it is good, be suitble to multi items, high-accuracy flexible production line in-site measurement demand.The technical solution adopted by the present invention is that:
A kind of signal adapter of submicron order high-precision HBT displacement sensor, comprising: excitation signal generator, synchronized sampling
Impulse generator, AC amplifier, synchronous sampler, active filter, high gain DC amplifier, A/D converter, monolithic
Machine, D A converter, analog output mouth and digital interface；In the single-chip microcontroller be equipped with signal correction module, for pair
The measured value of HBT displacement sensor is linearly corrected；
The output terminal of clock of single-chip microcontroller is connected to the input terminal of excitation signal generator, the letter of excitation all the way of excitation signal generator
Number output terminates to the pumping signal input terminal of HBT displacement sensor, the another way pumping signal output of excitation signal generator
End is connected to the pumping signal input terminal of synchronized sampling impulse generator, the pulse signal output end of synchronized sampling impulse generator
It is connect with synchronous sampler；
The detection signal output end of HBT displacement sensor is connected to the input terminal of AC amplifier, the output end of AC amplifier
The sampled signal input terminal of synchronous sampler is connect, the output end of synchronous sampler is connected to the input terminal of active filter, active
The output end of filter is connected to the input terminal of high gain DC amplifier, the analog signal output of high gain DC amplifier
It is connected to the input end of analog signal of A/D converter, the digital signal of the digital signal output end connection single-chip microcontroller of A/D converter
Input terminal, the serial signal input/output terminal of single-chip microcontroller are connected to digital interface, and the analog output mouth of single-chip microcontroller is connected to
D A converter analog quantity input, D A converter output end connect analog output mouth.
Further, the DC simulation voltage signal of simulation output interface output is between -5V~+5V.
Further, the model AD9835 of pumping signal generator.
A kind of signal correction method of the signal adapter of submicron order high-precision HBT displacement sensor, comprising:
HBT displacement sensor is fixed on rack by step S1, and by HBT displacement sensor connection signal converter, signal turns
Parallel operation connects PC machine；
It determines the zero-bit central point of HBT displacement sensor, and records corresponding measured value；
Rack is respectively adjusted n times to the positive negative direction of sensor by step S2, and sensor when each M μm and record are adjusted every time is surveyed
Magnitude；The NxM μm of total use scope for needing to cover HBT displacement sensor；
The data of record are divided into 2N+1 group with rack value and measurement value sensor for one group, wherein comprising in zero-bit by step S3
Heart point and respective sensor measured value that group, and statistical form is made in all groups of data in PC machine；
Step S4 starts linear fixed software in PC machine, reads all groups of data of preservation；
Step S5 calculates 2N group according to the rack value of two adjacent groups in 2N+1 group data and the difference of measurement value sensor span
Different linear K；
2N+1 group data and the linear K of 2N group are transferred to the signal correction module of single-chip microcontroller by step S6 by digital interface；
Step S7, when the signal adapter of HBT displacement sensor receives sensor actual measured value, according to 2N+1 group data
Corresponding range determines the linear K that sensor actual measured value is applicable in, and utilizes corresponding line to sensor actual measured value
Property K carry out special amendment, then by D A converter exported again by analog output mouth.
The present invention has the advantages that the present invention motivates HBT displacement sensor using the pumping signal of high stable, use simultaneously
The high gain DC amplifier realization high stable measurement of the synchronous sampler, active filter and high stable of high stable, so that sub-
The high-precision signal adapter of micron order exports the high stable DC simulation voltage signal proportional to displacement；With high-precision
24 A/D converters, realize high-precision digital measurement.Its measurement range is big, and precision is high.And pass through the signal inside single-chip microcontroller
Correction module realizes the high-precision and High Linear of half bridge sensor, and when measurement range ± 250 μm, precision can be controlled in ± 0.3 μm.
Detailed description of the invention
Fig. 1 is electrical schematic diagram of the invention.
Specific embodiment
Below with reference to specific drawings and examples, the invention will be further described.
As shown in Figure 1, a kind of signal adapter 14 of submicron order high-precision HBT displacement sensor proposed by the present invention
(hereinafter referred to as signal adapter), comprising: excitation signal generator 2, synchronized sampling impulse generator 3, AC amplifier 4, same
Walk sampler 5, active filter 6, high gain DC amplifier 7, A/D converter 8, single-chip microcontroller 10, D A converter 11, simulation
Measure delivery outlet 12 and digital interface 13；Signal correction module 9 is equipped in the single-chip microcontroller 10；Signal correction module 9 is single
Program on piece machine 10；
The output terminal of clock of single-chip microcontroller 10 is connected to the input terminal of excitation signal generator 2, and excitation signal generator 2 swashs all the way
The pumping signal input terminal that signal output end is connected to HBT displacement sensor 1 is encouraged, the another way of excitation signal generator 2 motivates letter
Number output end is connected to the pumping signal input terminal of synchronized sampling impulse generator 3, the pulse letter of synchronized sampling impulse generator 3
Number output end is connect with synchronous sampler 5；
The detection signal output end of HBT displacement sensor 1 is connected to the input terminal of AC amplifier 4, the output of AC amplifier 4
The sampled signal input terminal of synchronous sampler 5 is terminated, the output end of synchronous sampler 5 is connected to the input terminal of active filter 6,
The output end of active filter 6 is connected to the input terminal of high gain DC amplifier 7, the simulation letter of high gain DC amplifier 7
Number output end is connected to the input end of analog signal of A/D converter 8, and the digital signal output end of A/D converter 8 connects single-chip microcontroller
10 digital signal input end, the serial signal input/output terminal of single-chip microcontroller 10 are connected to digital interface 13, single-chip microcontroller 10
Analog output mouth be connected to D A converter 11 analog quantity input, D 11 output end of A converter connect analog output mouth
12；
The digital interface 13 of single-chip microcontroller 10 is used to connect the mould of PLC module 15 for connecting PC machine 16, analog output mouth 12
Analog quantity input port.
Simulation output interface 12 exports the DC simulation voltage signal proportional to the relative displacement of measured workpiece size,
DC simulation voltage signal is between -5V~+5V；PLC machine 15 reads signal adapter 14 by analog output mouth 12 and exports
DC simulation voltage signal, that is, the measurement conversion value of signal adapter 14.
The model AD9835 of pumping signal generator 2, the output of pumping signal generator 2 is sine wave exciting signal；
Synchronized sampling pulse hair grows up to be a useful person 3 according to sine wave exciting signal, generates sampling pulse signal；Synchronized sampling pulse hair grows up to be a useful person 3
Model LM393；
The model LF351 of high-gain AC amplifier 7, what high-gain AC amplifier 7 exported is amplified detection signal,
Synchronous sampler 5 is mainly made of field-effect tube, and the on-off under sampling pulse signal control carries out amplified detection signal
Sampling (or being known as sampling)；
The model TL074 of high gain DC amplifier 7, the model ADS1254 of A/D converter 8；
Signal correction method proposed by the present invention, comprising the following steps:
HBT displacement sensor 1 is fixed on rack by step S1, and by 1 connection signal converter 14 of HBT displacement sensor, is believed
Number converter 14 connects PC machine 16；
It determines the zero-bit central point of HBT displacement sensor 1, and records corresponding measured value, the measured value of HBT displacement sensor 1
It can be shown in PC machine；
Rack is respectively adjusted 20 times to the positive negative direction of sensor by step S2,15 μm and records sensor when adjusting every time every time
Measured value；
Step S3 is divided into 41 groups (wherein comprising zero-bit center by the data of record with rack value and measurement value sensor for one group
Point and that group of respective sensor measured value) and statistical form is made in all groups of data in PC machine；
Step S4 starts linear fixed software in PC machine, reads all groups of data of preservation；
Step S5 calculates 40 groups not according to the rack value of two adjacent groups in 41 groups of data and the difference of measurement value sensor span
Same linear K, K refers to slope here；
41 groups of data and 40 groups of linear K are transferred to the signal correction module of single-chip microcontroller by step S6 by digital interface；
Step S7, when the signal adapter 14 of HBT displacement sensor 1 receives sensor actual measured value, according to 41 groups of numbers
The linear K that sensor actual measured value is applicable in is determined according to corresponding range, and sensor actual measured value is utilized corresponding
Linear K carries out special amendment, then by D A converter exported again by analog output mouth.
This signal adapter 14 carries out calibration measurement, the survey of school part in actual use, with one or two school part
Magnitude signal is transferred to PLC module 15 by analog output mouth 12, records the measured value of school part, can according to the actual situation with
When revision measurement is carried out to school part.To carry out school zero before use.
The signal adapter precision that the present invention solves traditional HBT semibridge system inductance displacement sensor is low, signal conversion line
Property difference use defect.For the present invention at measurement range ± 250 μm, precision is ± 0.3 μm；It is suitble to sensor installation space small
The in-site measurement of high-accuracy flexible production line.
It should be noted last that the above specific embodiment is only used to illustrate the technical scheme of the present invention and not to limit it,
Although being described the invention in detail referring to example, those skilled in the art should understand that, it can be to the present invention
Technical solution be modified or replaced equivalently, without departing from the spirit and scope of the technical solution of the present invention, should all cover
In the scope of the claims of the present invention.
Claims (4)
1. a kind of signal adapter of submicron order high-precision HBT displacement sensor characterized by comprising pumping signal hair
Raw device (2), synchronized sampling impulse generator (3), AC amplifier (4), synchronous sampler (5), active filter (6), Gao Zeng
Beneficial dc amplifier (7), A/D converter (8), single-chip microcontroller (10), D A converter (11), analog output mouth (12) and number
Word amount interface (13)；Signal correction module (9) are equipped in the single-chip microcontroller (10), for the measurement to HBT displacement sensor (1)
Value is linearly corrected；
The output terminal of clock of single-chip microcontroller (10) is connected to the input terminal of excitation signal generator (2), excitation signal generator (2)
Pumping signal output all the way terminates to the pumping signal input terminal of HBT displacement sensor (1), excitation signal generator (2) it is another
Pumping signal output end is connected to the pumping signal input terminal of synchronized sampling impulse generator (3), synchronized sampling pulse hair all the way
The pulse signal output end of raw device (3) is connect with synchronous sampler (5)；
The detection signal output end of HBT displacement sensor (1) is connected to the input terminal of AC amplifier (4), AC amplifier (4)
Output termination synchronous sampler (5) sampled signal input terminal, the output end of synchronous sampler (5) is connected to active filter
(6) output end of input terminal, active filter (6) is connected to the input terminal of high gain DC amplifier (7), high-gain DC
The analog signal output of amplifier (7) is connected to the input end of analog signal of A/D converter (8), the number of A/D converter (8)
Word signal output end connects the digital signal input end of single-chip microcontroller (10), and the serial signal input/output terminal of single-chip microcontroller (10) connects
Be connected to digital interface (13), the analog output mouth of single-chip microcontroller (10) be connected to D A converter (11) analog quantity input,
D A converter (11) output end connection analog output mouth (12).
2. the signal adapter of submicron order high-precision HBT displacement sensor as described in claim 1, which is characterized in that
The DC simulation voltage signal of simulation output interface (12) output is between -5V~+5V.
3. the signal adapter of submicron order high-precision HBT displacement sensor as described in claim 1, which is characterized in that
The model AD9835 of pumping signal generator (2).
4. a kind of signal correction method of the signal adapter of submicron order high-precision HBT displacement sensor, which is characterized in that packet
It includes:
HBT displacement sensor (1) is fixed on rack by step S1, and by HBT displacement sensor (1) connection signal converter
(14), signal adapter (14) connection PC machine (16)；
It determines the zero-bit central point of HBT displacement sensor (1), and records corresponding measured value；
Rack is respectively adjusted n times to the positive negative direction of sensor by step S2, and sensor when each M μm and record are adjusted every time is surveyed
Magnitude；The NxM μm of total use scope for needing to cover HBT displacement sensor；
The data of record are divided into 2N+1 group with rack value and measurement value sensor for one group, wherein comprising in zero-bit by step S3
Heart point and respective sensor measured value that group, and statistical form is made in all groups of data in PC machine；
Step S4 starts linear fixed software in PC machine, reads all groups of data of preservation；
Step S5 calculates 2N group according to the rack value of two adjacent groups in 2N+1 group data and the difference of measurement value sensor span
Different linear K；
2N+1 group data and the linear K of 2N group are transferred to the signal correction module of single-chip microcontroller by step S6 by digital interface；
Step S7, when the signal adapter (14) when HBT displacement sensor (1) receives sensor actual measured value, according to 2N+
1 group of corresponding range of data determines the linear K that sensor actual measured value is applicable in, and to the utilization pair of sensor actual measured value
The linear K that answers carries out special amendment, then by D A converter exported again by analog output mouth.
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| CN201910409593.XA CN110132115A (en) | 2019-05-16 | 2019-05-16 | The signal adapter and signal correction method of submicron order high-precision HBT displacement sensor |
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| CN201910409593.XA CN110132115A (en) | 2019-05-16 | 2019-05-16 | The signal adapter and signal correction method of submicron order high-precision HBT displacement sensor |
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| DE10243412B4 (en) * | 2002-09-18 | 2006-03-02 | Kern Technik Gmbh & Co. Kg | Hydraulic valve arrangement |
| CN103018699A (en) * | 2012-12-14 | 2013-04-03 | 天津瑞能电气有限公司 | Device and method for calibrating and detecting sensor and AD convertor of multiple devices |
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Application publication date: 20190816 |