CN110131142A - A kind of minitype piezoelectric pump - Google Patents

A kind of minitype piezoelectric pump Download PDF

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Publication number
CN110131142A
CN110131142A CN201910361234.1A CN201910361234A CN110131142A CN 110131142 A CN110131142 A CN 110131142A CN 201910361234 A CN201910361234 A CN 201910361234A CN 110131142 A CN110131142 A CN 110131142A
Authority
CN
China
Prior art keywords
film tongue
diaphragm
film
sap cavity
tongue
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201910361234.1A
Other languages
Chinese (zh)
Inventor
邱俊
张秀琴
李红元
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BESTAR SENSORTECH Co Ltd
Original Assignee
BESTAR SENSORTECH Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BESTAR SENSORTECH Co Ltd filed Critical BESTAR SENSORTECH Co Ltd
Priority to CN201910361234.1A priority Critical patent/CN110131142A/en
Publication of CN110131142A publication Critical patent/CN110131142A/en
Pending legal-status Critical Current

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Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00Machines, pumps, or pumping installations having flexible working members
    • F04B43/0009Special features
    • F04B43/0054Special features particularities of the flexible members
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00Machines, pumps, or pumping installations having flexible working members
    • F04B43/02Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04Pumps having electric drive
    • F04B43/043Micropumps
    • F04B43/046Micropumps with piezoelectric drive
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/08Cooling; Heating; Preventing freezing
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/10Valves; Arrangement of valves
    • F04B53/102Disc valves
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/16Casings; Cylinders; Cylinder liners or heads; Fluid connections

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)

Abstract

The invention belongs to piezoelectricity pump technical fields, more particularly to a kind of minitype piezoelectric pump, including the pump housing, piezoelectric vibrator, diaphragm, diaphragm is arranged at piezoelectric vibrator bottom, it is not contacted between diaphragm and piezoelectric vibrator, the pump housing of separator bottom sets that there are two the admission chambers that are not communicated with, sap cavity out, admission chamber, which is connected with, leads to external inlet tube, sap cavity, which is connected with, out leads to external outlet tube, diaphragm includes transparent outer membrane, the opaque counterdie in outer membrane bottom side, laser passes through outer membrane and burns counterdie realization outer membrane, welded connecting between counterdie and the pump housing, movable first film tongue is equipped at the corresponding sap cavity out of counterdie, movable second film tongue is equipped at corresponding admission chamber, the first film tongue is set to be only capable of the first hole moved to sap cavity side out equipped with smaller than the first film tongue at corresponding first film tongue on outer membrane, second hole bigger than the second film tongue is equipped at corresponding second film tongue, first Film tongue is less than sap cavity, and the second film tongue is greater than admission chamber, small in size, highly-safe, is more suitable for medical application.

Description

A kind of minitype piezoelectric pump
Technical field
The invention belongs to piezoelectricity pump technical fields, and in particular to a kind of minitype piezoelectric pump.
Background technique
Piezoelectric pump is kind of a novel fluid driver.It does not need additional drives motor, but utilizes the inverse pressure of piezoelectric ceramics Electrical effect is deformed piezoelectric vibrator, then is realized fluid output by the volume variation that deformation generates pump chamber or shaken using piezoelectricity Son generates fluctuation to transmit liquid since piezoelectric pump has the characteristics that not available for conventional pump.Piezoelectric pump by piezoelectric vibrator, diaphragm, Pump valve and pump housing composition.In work, when piezoelectric vibrator both ends apply AC power source U, piezoelectric vibrator is radial under electric field action Compression, inside generates tensile stress, to make piezoelectric vibrator bending deformation.When the bending of piezoelectric vibrator forward direction, piezoelectric vibrator elongation, Diaphragm is caused to change, diaphragm variation causes, and pump chamber increases, and cavity fluid pressure reduces, and pump valve is opened, and liquid enters pump Chamber;When piezoelectric vibrator is to when back-flexing, piezoelectric vibrator is shunk, and pump chamber reduces, and cavity fluid pressure increases, and pump valve closes It closes, pump chamber liquid is extruded discharge, forms gentle continuously directed flow.The small in size of piezoelectric pump, structure are a variety of more Sample, it is extensive using be in industry, agricultural production, biology, medical domain.Medicine, medical field middle application in, often For the transportation system of medical fluid, for the ease of using, there is further requirement to the volume of piezoelectric pump, it is desirable that the body of piezoelectric pump Product will as far as possible small, however the volume of existing piezoelectric pump is larger, and in the application of medical domain, there are biggish limitations.
In addition, the diaphragm of existing piezoelectric pump is Nian Jie by glue with the pump housing, the glue of bonding is under the long period of soaking of medical fluid It is easy to come unglued, piezoelectric pump is caused to fail, also, there are adverse effects to safety for glue, reduce the safety of piezoelectric pump.
Summary of the invention
It is small in size the technical problem to be solved by the present invention is in view of the foregoing drawbacks, provide a kind of minitype piezoelectric pump, safety Property it is high, be more suitable for medical application.
It is as follows that the technical scheme adopted by the invention to solve the technical problem:
A kind of minitype piezoelectric pump, including the pump housing, the piezoelectric vibrator of pump body, diaphragm, the diaphragm is arranged in piezoelectricity It at oscillator bottom, is not contacted between diaphragm and piezoelectric vibrator, the pump housing of separator bottom sets there are two the admission chamber being not communicated with, goes out liquid Chamber, admission chamber, which is connected with, leads to external inlet tube, and sap cavity, which is connected with, out leads to external outlet tube, and the diaphragm includes saturating Bright outer membrane, the opaque counterdie for being close to outer membrane bottom side, laser pass through the weldering that outer membrane is burnt between counterdie realization outer membrane, counterdie and the pump housing It connects in succession, is equipped with movable first film tongue at the corresponding sap cavity out of counterdie, corresponds at admission chamber equipped with movable second film tongue, outer membrane Being equipped at upper the first film of correspondence tongue smaller than the first film tongue makes the first film tongue be only capable of the first hole move to sap cavity side out, correspondence the Second hole bigger than the second film tongue is equipped at two film tongues, the first film tongue is less than sap cavity, and the second film tongue is greater than admission chamber, piezoelectricity vibration Son vibration drives diaphragm movement to generate the pump power for making medical fluid enter sap cavity by admission chamber, and the thickness of minitype piezoelectric pump is not more than 7mm。
Further, the piezoelectricity chamber of a setting piezoelectric vibrator is equipped in the pump housing, piezoelectric vibrator is set by installing film Set intracavitary in piezoelectricity, intracavitary be equipped with of the piezoelectricity of piezoelectric vibrator bottom is embedded the diaphram tank of diaphragm, keeps between diaphragm and piezoelectric vibrator In parallel, diaphram tank shape and structure and membrane shape structure are coincide, and counterdie and diaphragm groove groove wall are welded.
Further, the diaphragm is symmetrical " 8 " font structure, and sap cavity, admission chamber are about in diaphragm out Between bilateral symmetry, the axle center in first hole is conllinear with sap cavity axle center out, the axle center of second through-hole and admission chamber Axle center is conllinear, and admission chamber opening is close in the second film tongue bottom surface makes the second film tongue be only capable of chamber the second through-hole side activity opening.
Further, the counterdie is black.
Further, the depth of the diaphram tank is consistent with membrane thicknesses.
Further, the first film tongue, the second film tongue it is in the same size, the first film tongue, the second film tongue are arc.
Further, the first film tongue, the second film tongue cut membrane body shape by the notch for being provided with corresponding position on counterdie At.
Further, the limit for going out in sap cavity to be equipped with the first film tongue opening degree of limitation at corresponding first film tongue bottom Position column.
Further, the inlet tube, outlet tube are conical pipe, the equal direction in the biggish one end of inlet tube, outlet tube On the outside of the pump housing.
Further, the piezoelectricity chamber is equipped with the inside and outside heat release hole of connection at piezoelectric vibrator top.
The beneficial effects of the present invention are: using the above scheme,
1) pump housing thickness is no more than 7mm, small in size, occupies little space, and is more suitable for medical field;
2) diaphragm is connect with pump housing laser welding, and welding consistency is good, connection is reliable, when by long period of soaking, temperature change Connection will not fail, and promote to reduce thickness, non-toxic, safety is higher;
3) diaphragm, which has both, provides the effect of pump power, control valve, is not required to setting valve mechanism, reduces pump housing thickness, pump Structure is simple, reduces manufacturing cost;
4) consistency of flow control is good, and flow control is accurate, and the fast response time of diaphragm valve control improves making for micropump With performance, diaphragm valve mechanism is simple, easy to process.
Detailed description of the invention
Through the following detailed description taken in conjunction with the accompanying drawings, present invention objects, features and advantages above-mentioned and other will become Obviously.
Fig. 1 is the cross section structure schematic diagram of one embodiment of the present invention.
Fig. 2 is the structural schematic diagram of counterdie, outer membrane decomposing state in one embodiment of the present invention.
Fig. 3 is the structural schematic diagram of counterdie in one embodiment of the present invention, outer membrane assembled state.
Fig. 4 is a kind of status diagram of septation of the present invention.
Fig. 5 is another status diagram of septation of the present invention.
Wherein: 1 is the pump housing, and 11 is go out sap cavity, and 112 be limited post, and 12 be admission chamber, and 13 be diaphram tank, and 14 be heat release hole, 2 be piezoelectric vibrator, and 3 be diaphragm, and 31 be counterdie, and 311 be the first film tongue, and 312 be the second film tongue, and 32 be outer membrane, and 321 be first Hole, 322 be the second hole.
Specific embodiment
The present invention will be further described with reference to the accompanying drawing.
Embodiment 1: referring to Fig.1, a kind of minitype piezoelectric pump, including the pump housing 1, piezoelectric vibrator 2, diaphragm 3 is inside the pump housing 1 The piezoelectricity chamber of piezoelectric vibrator 2, diaphragm 3 is set, and piezoelectricity is intracavitary to be equipped with a step surface, and piezoelectric vibrator 2 is arranged by installation film in platform At terrace, piezoelectricity chamber is divided into the radiating area on top, the workspace of lower part by piezoelectric vibrator 2, and the shell on 2 top of piezoelectric vibrator is equipped with Be connected to the intracavitary portion of piezoelectricity and external heat release hole 14, by piezoelectric vibrator work in the heat that generates timely distribute, keep preferable Working condition, promote to improve service life, diaphragm 3 is parallel to be arranged at the bottom of piezoelectric vibrator 2, the piezoelectricity in workspace Storehouse corresponding position is equipped with the diaphram tank 13 for being embedded diaphragm 3, and diaphragm 3 is not contacted with piezoelectric vibrator 2, between diaphragm 3 and piezoelectric vibrator 2 Space forms valve chamber, and the depth of diaphram tank 13 is not less than the thickness of diaphragm 3, expands the volume of valve chamber, the pump housing 1 of 3 bottom of diaphragm If there are two independent cylindrical admission chamber 12, going out sap cavity 11, admission chamber 12 goes out intermediate left and right pair of the sap cavity 11 about diaphragm 3 Claiming setting, sap cavity 11 is greater than admission chamber 12 out, and diaphragm 3 uses symmetrical " 8 " the shape structure in both sides, and it is corresponding, diaphram tank Structure is consistent with membrane configuration, this kind of structure positions convenient for the assembly of diaphragm and diaphram tank, improves the installation accuracy of diaphragm, the pump housing 1 top corresponds to piezoelectricity chamber opening equipped with cover board, convenient for the assembly of this micropump.
Specifically, diaphragm 3 includes the transparent outer membrane 32 of the counterdie 31 of black, 31 upper layer of counterdie, counterdie referring to Fig. 3, Fig. 4 Bottom face and the opening for being fitted in admission chamber, going out sap cavity, the membrane body size of diaphragm side are greater than sap cavity, and counterdie 31 corresponds to It is equipped at the axle center of sap cavity 11 at the axle center of movable first film tongue 311, corresponding admission chamber 12 and is equipped with movable second film tongue 312, the first film tongue 311, the shape size of the second film tongue 312 are consistent, and the position of the first film tongue 311, the second film tongue 312 about The intermediate symmetry of counterdie is equipped with first hole 321 smaller than the first film tongue 311, outer membrane 32 at corresponding first film tongue 311 on outer membrane 32 It is equipped at upper the second film of correspondence tongue 312 than the second big hole 322 of the second film tongue 312, the axle center in the first hole 321 and sap cavity 11 out Axle center is on same vertical line, and the axle center in the second hole 322 and the axle center of admission chamber 12 are in same vertical straight line, due to the One hole, 321 to the first film tongue 311 is small, so the first film tongue 311 is only capable of moving into the cavity of sap cavity 12 out, admission chamber 12 is open Place is covered at the top end opening of admission chamber 312 less than the second film tongue 312,312 bottom face of the second film tongue, makes the second film tongue 312 It is only capable of into the second hole 322 activity opening, so, the first film tongue, the second film tongue constitute two individual check valves, counterdie, Outer membrane constitutes a diaphragm valve, does not need that traditional valve member is arranged in this micropump, makes the thickness of micropump no more than 7mm, has The volume for reducing micropump of effect, is more applicable in medical field, and the edge of counterdie 31 and diaphragm groove groove wall are by swashing Photocoagulation connection, the transparent outer membrane 32 of laser penetration, which acts on the counterdie 31 of black, to be burnt counterdie 31 and realizes counterdie 31 and outer membrane 32, the welded connecting of counterdie 31 and 13 groove face of diaphram tank, diaphragm and the consistency of pump housing laser welding are good, avoid using glue, The thickness at this is effectively reduced, promotes to reduce integral thickness, also, laser welding is highly-safe, the long period of soaking weldering of liquid medicine Socket part will not snap, non-toxic more safe and reliable, and corresponding position, which is equipped with, on the pump housing 1 is connected to out sap cavity 11 and external goes out liquid Pipe 111, corresponding position is equipped with connection admission chamber 12 and external inlet tube 121 on the pump housing 1, medical fluid by inlet tube 121 enter into In sap cavity 12, the conveying of completion medical fluid in outlet tube 111 is entered by going out sap cavity 11, the vibration of piezoelectric vibrator 2 drives diaphragm 3 upward Or move downward, referring to Fig. 4, Fig. 5, diaphragm is moved upwards, drive the second film tongue 312 to open up, medical fluid by admission chamber 12 into Enter into valve chamber, diaphragm moves downward, and the first film tongue is driven to open downwards, and the medical fluid in valve chamber enters out in sap cavity 11, real The quantitative pumping to medical fluid is showed, the volume of valve chamber is fixed, and two individual check valves are formed at diaphragm, effectively raises this The consistency of micropump pump discharge, cylindrical goes out sap cavity, admission chamber, and the axle center in the axle center of sap cavity and the first hole is total out Line, the axle center of admission chamber are conllinear with the axle center in the second hole, and the cooperation precision of diaphragm and diaphram tank is high, promote the consistent of flow control Property it is high, inlet tube 121, outlet tube 111 are cone structure, and inlet tube 121, the biggish one end of outlet tube 111 are towards outside the pump housing The speed that liquid enters admission chamber can be improved in side, this kind of structure, improves pumping efficiency, and sap cavity volume holds greater than admission chamber out Long-pending and outlet tube outer end is big, interior short and small, and reduce out sap cavity goes out liquid speed degree, promotes medical fluid steady by going out sap cavity outflow, improves medicine Stability, the continuity of liquid conveying, improve medical fluid pumping effect.
Outer membrane, counterdie are PET film, have preferable intensity, long service life, outer membrane with a thickness of 0.05mm, counterdie With a thickness of 0.1mm, outer membrane is thin to be acted on counterdie convenient for laser quick penetration, is burnt counterdie, is realized counterdie and outer membrane, the pump housing Between rapid welding connect, the consistency of laser welding is good, and weld weld width is consistent, and weld moves towards shape and laser and moves towards Unanimously, welding quality is high, promotes the accuracy for improving flow control.
Specifically, the first film tongue 311, the second film tongue 312 are the arc incision cutting film for being provided with corresponding position on counterdie Body is formed, and the shape of notch is the shape of film tongue, this kind of structure is in together after being convenient for the molding of film tongue, film tongue to reset with membrane body It on one side, convenient for the cooperation of film tongue and membrane body, resets film tongue quickly, and makes not generating interval between film tongue and membrane body, The effective effect for playing check valve, diaphragm 2 are 0.3mm at a distance from piezoelectric vibrator 2, and the second film tongue flips up open Angle is not more than 90 degree, and the length of the second film tongue is greater than 0.3mm, makes the second film tongue when opening, and installation film can be to the second film Tonguing row stops, and the amplitude for avoiding the fold of film tongue from opening is excessive, guarantees that the second film tongue can timely reset, gives full play to check valve The effect of, the limited post 112 that the first film of limitation tongue 311 protruding upward opens amplitude is equipped at the axle center in sap cavity 11 out, the One film tongue 311 is turned over downwards blocking of the open amplitude by limited post, and the first film tongue can be opened flexibly, and the first film tongue can It quickly to reset, avoids fold amplitude excessive, gives full play to the unidirectional valve action at the first film tongue, the thickness of this micropump Small, small in size, flow control is accurate, and safety is more preferable, is more suitable for medicine, in medical field.
Embodiment 2: the present embodiment the difference from embodiment 1 is that, the shape of diaphragm is racetrack, the shape of the first film tongue For semicircle, the thickness of diaphragm and the depth of diaphram tank are consistent, and the spacing between diaphragm and installation film is 0.5mm, and installation film is convenient for Fixed piezoelectric vibrator, the valve chamber between diaphragm and installation film is cylindrical-shaped structure, and compound with regular structure, flow control is accurate, improves and uses Performance.
The above is only presently preferred embodiments of the present invention, not does limitation in any form to the present invention, it is all according to According to any simple modification to the above embodiments in technical spirit of the invention, equivalent variations, guarantor of the invention is each fallen within Within the scope of shield.

Claims (10)

1. a kind of minitype piezoelectric pump, including the pump housing, the piezoelectric vibrator of pump body, diaphragm, which is characterized in that
The diaphragm is arranged at piezoelectric vibrator bottom, does not contact between diaphragm and piezoelectric vibrator, the pump housing of separator bottom is equipped with Two admission chambers being not communicated with go out sap cavity, and admission chamber, which is connected with, leads to external inlet tube, and sap cavity, which is connected with, out leads to outside Outlet tube,
The diaphragm includes transparent outer membrane, the opaque counterdie for being close to outer membrane bottom side, and laser passes through outer membrane and burns counterdie realization Welded connecting between outer membrane, counterdie and the pump housing, counterdie it is corresponding go out sap cavity at be equipped with movable first film tongue, set at corresponding admission chamber There is movable second film tongue, is only capable of the first film tongue to sap cavity one out equipped with smaller than the first film tongue at corresponding first film tongue on outer membrane It is equipped with second hole bigger than the second film tongue at first hole of side movement, corresponding second film tongue, the first film tongue is less than sap cavity, and second Film tongue is greater than admission chamber, and piezoelectric vibrator vibration drives diaphragm movement to generate the pump power for making medical fluid enter sap cavity by admission chamber, The thickness of minitype piezoelectric pump is not more than 7mm.
2. a kind of minitype piezoelectric pump according to claim 1, which is characterized in that be equipped with a setting piezoelectricity in the pump housing The piezoelectricity chamber of oscillator, piezoelectric vibrator is intracavitary in piezoelectricity by installation film setting, and intracavitary be equipped with of the piezoelectricity of piezoelectric vibrator bottom is embedded The diaphram tank of diaphragm, keeping parallelism between diaphragm and piezoelectric vibrator, diaphram tank shape and structure and membrane shape structure are coincide, counterdie with The welding of diaphragm groove groove wall.
3. a kind of minitype piezoelectric pump according to claim 1, which is characterized in that the diaphragm is symmetrical " 8 " Font structure, the intermediate bilateral symmetry of sap cavity, admission chamber about diaphragm, the axle center in first hole are total with sap cavity axle center out out The axle center of line, second through-hole is conllinear with the axle center of admission chamber, and admission chamber opening is close in the second film tongue bottom surface makes the second film Tongue is only capable of chamber the second through-hole side activity opening.
4. a kind of minitype piezoelectric pump according to claim 1, which is characterized in that the counterdie is black.
5. a kind of minitype piezoelectric pump according to claim 2, which is characterized in that the depth and diaphragm of the diaphram tank are thick Degree is consistent.
6. a kind of minitype piezoelectric pump according to claim 1, which is characterized in that the first film tongue, the second film tongue In the same size, the first film tongue, the second film tongue are arc.
7. a kind of minitype piezoelectric pump according to claim 1, which is characterized in that the first film tongue, the second film tongue by The notch for being provided with corresponding position on counterdie cuts membrane body and is formed.
8. a kind of minitype piezoelectric pump according to claim 1, which is characterized in that described goes out corresponding first film tongue in sap cavity The limited post of the first film tongue opening degree of limitation is equipped at bottom.
9. a kind of minitype piezoelectric pump according to claim 1, which is characterized in that the inlet tube, outlet tube are cone Shape pipe, the biggish one end of inlet tube, outlet tube is towards pump housing outside.
10. a kind of minitype piezoelectric pump according to claim 2, which is characterized in that the piezoelectricity chamber is on piezoelectric vibrator The inside and outside heat release hole of connection is equipped at portion.
CN201910361234.1A 2019-04-30 2019-04-30 A kind of minitype piezoelectric pump Pending CN110131142A (en)

Priority Applications (1)

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CN201910361234.1A CN110131142A (en) 2019-04-30 2019-04-30 A kind of minitype piezoelectric pump

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CN201910361234.1A CN110131142A (en) 2019-04-30 2019-04-30 A kind of minitype piezoelectric pump

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113171552A (en) * 2021-04-13 2021-07-27 清华大学 Fluid driving device with valve structure and application thereof

Citations (9)

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Publication number Priority date Publication date Assignee Title
JPH10110681A (en) * 1996-10-04 1998-04-28 Hitachi Ltd Micropump and pump system
CN2356161Y (en) * 1999-01-13 1999-12-29 伍永秀 Hand pump for liquid split charging
JP2008101495A (en) * 2006-10-18 2008-05-01 Alps Electric Co Ltd Diaphragm pump
CN103599578A (en) * 2013-12-03 2014-02-26 吉林大学 Portable piezoelectric driving insulin pump
CN203628984U (en) * 2013-10-30 2014-06-04 长城汽车股份有限公司 Muffler of automobile air-conditioning pipeline
CN105349924A (en) * 2015-12-07 2016-02-24 瑞安市贝斯特压缩机制造有限公司 Noise reduction treatment technique for valve plate of air compressor and air compressor
CN105508208A (en) * 2016-01-22 2016-04-20 中国电子科技集团公司第二十六研究所 Piezoelectric pump
CN109681414A (en) * 2018-03-09 2019-04-26 常州威图流体科技有限公司 A kind of minitype piezoelectric pump, piezoelectricity pump group and assembly method based on optical transmission weldering
CN210859141U (en) * 2019-04-30 2020-06-26 常州波速传感器有限公司 Miniature piezoelectric pump

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10110681A (en) * 1996-10-04 1998-04-28 Hitachi Ltd Micropump and pump system
CN2356161Y (en) * 1999-01-13 1999-12-29 伍永秀 Hand pump for liquid split charging
JP2008101495A (en) * 2006-10-18 2008-05-01 Alps Electric Co Ltd Diaphragm pump
CN203628984U (en) * 2013-10-30 2014-06-04 长城汽车股份有限公司 Muffler of automobile air-conditioning pipeline
CN103599578A (en) * 2013-12-03 2014-02-26 吉林大学 Portable piezoelectric driving insulin pump
CN105349924A (en) * 2015-12-07 2016-02-24 瑞安市贝斯特压缩机制造有限公司 Noise reduction treatment technique for valve plate of air compressor and air compressor
CN105508208A (en) * 2016-01-22 2016-04-20 中国电子科技集团公司第二十六研究所 Piezoelectric pump
CN109681414A (en) * 2018-03-09 2019-04-26 常州威图流体科技有限公司 A kind of minitype piezoelectric pump, piezoelectricity pump group and assembly method based on optical transmission weldering
CN210859141U (en) * 2019-04-30 2020-06-26 常州波速传感器有限公司 Miniature piezoelectric pump

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113171552A (en) * 2021-04-13 2021-07-27 清华大学 Fluid driving device with valve structure and application thereof

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