CN110129752A - Zirconium alloy tube surface treatment method and device - Google Patents
Zirconium alloy tube surface treatment method and device Download PDFInfo
- Publication number
- CN110129752A CN110129752A CN201910438998.6A CN201910438998A CN110129752A CN 110129752 A CN110129752 A CN 110129752A CN 201910438998 A CN201910438998 A CN 201910438998A CN 110129752 A CN110129752 A CN 110129752A
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- Prior art keywords
- laser
- zirconium alloy
- alloy tube
- tube surface
- chromium
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Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
- C23C14/165—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon by cathodic sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
- C23C14/5806—Thermal treatment
- C23C14/5813—Thermal treatment using lasers
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Thermal Sciences (AREA)
- Physical Vapour Deposition (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
Abstract
The present invention relates to technical field of laser processing, a kind of zirconium alloy tube surface treatment method and device are particularly disclosed.The zirconium alloy tube surface treatment method, it is characterized in that, include the following steps: (1) magnetron sputtering plating step: chromium being plated in zirconium alloy tube surface using magnetically controlled sputter method, forms the chromium film of preset thickness；(2) laser consolidation treatment laser melting step: is carried out to chromium film.Magnetron sputtering coating method in conjunction with laser melting technology, is made the corrosion-resistant layers of chrome of zirconium alloy tube Surface Creation densification by the present invention, increases substantially corrosion resistance of the zirconium alloy tube in nuclear power station operating condition, has the advance of technical matters.
Description
(1) technical field
The present invention relates to technical field of laser processing, in particular to a kind of zirconium alloy tube surface treatment method and device.
(2) background technique
Zircaloy has a series of spies such as density is low, specific strength is high, corrosion-resistant, processing performance is excellent, thermal neutron absorption cross section is low
Point, is therefore widely used in nuclear industry.Although the corrosion resisting property of zircaloy is preferable, the corruption that it is faced in nuclear power station
Erosion environment is very harsh, and most zirconium alloy pipes are not able to satisfy long-time requirement still.Therefore, it coats on its surface more resistant to erosion
Material also become research hotspot.
Chromium has extremely strong corrosion resistance, therefore its corrosion resistance can be greatly improved in zirconium alloy tube surface coating chromium,
But chromium fusing point is higher, and mechanical properties decrease is obvious at high temperature for zircaloy, therefore metallurgical method is not suitable for two kinds of materials
In conjunction with being based on this, both can make to reach higher bond strength by magnetically controlled sputter method.
The study found that magnetically controlled sputter method has in chromium film prepared by zirconium alloy tube surface under certain sputter rate
There is certain porosity, these stomatas easily become the source of spot corrosion, and cause further more serious corrosion, and zirconium is caused to close
The corrosion resistance of golden pipe is poor.
(3) summary of the invention
In order to compensate for the shortcomings of the prior art, the present invention provides a kind of processing steps simply, the zirconium of product corrosion resistance and good
Alloy pipe surface treatment method and device.
The present invention is achieved through the following technical solutions:
A kind of zirconium alloy tube surface treatment method, includes the following steps:
(1) magnetron sputtering plating step: chromium is plated in zirconium alloy tube surface using magnetically controlled sputter method, forms preset thickness
Chromium film；
(2) laser consolidation treatment laser melting step: is carried out to chromium film.
The present invention first passes through magnetically controlled sputter method and carries out chrome-faced to zirconium alloy tube, then passes through laser consolidation treatment,
By the consolidation of chromium film to eliminate stomata, the poor technical problem of the corrosion resistance of zirconium alloy tube in the prior art is solved.
More excellent technical solution of the invention are as follows:
In step (1), inert gas is vacuumized and be filled with to working cavity, adjusts vacuum pumping rate and inert gas is filled with speed
Degree, makes air pressure constant in working cavity.
In step (1), magnetron sputtering power supply is connected, generates sputtering current, excited inert gas generates aura and puts a little, lotus energy
Particle bombardment chromium target makes chromium atom or chromium atom roll into a ball uniform deposition in zirconium alloy tube surface.
In step (2), laser generates laser, and laser is sent to laser Machining head via optical fiber, adjusts laser Machining head
Height and laser power, make axial uniform motion of the laser Machining head along laser Machining head.
Inert gas is kept to be filled with during the laser melting.
Realize the device of above-mentioned zirconium alloy tube surface treatment method, including magnetic control sputtering film plating device and laser melting dress
It sets, wherein magnetic control sputtering film plating device includes the cavity for being communicated with vacuum plant and inert gas charging device, cavity top end peace
Chromium target equipped with connection magnetron sputtering power supply, cavity bottom are placed with the zirconium alloy tube of face chromium target；Laser melting device packet
Laser Machining head is included, and laser melting device is connected to inert gas charging device.
Further, the laser Machining head passes through optical fiber connecting laser.
Further, the magnetron sputtering power supply is arranged outside cavity.
Further, the vacuum plant includes vacuum pump, and inert gas charging device includes air pump.
The present invention makes chromium in conjunction with zirconium alloy tube surface, simultaneously in such a way that intensity is higher by magnetically controlled sputter method
Chromium film has certain compactness, and carrying out laser consolidation treatment to chromium film makes the remelting of chromium film and the high speed cold on zirconium alloy tube surface
But, chromium film compactness is further increased, prevents from having an impact its corrosion resisting property because of a small amount of stomata.
Magnetron sputtering coating method in conjunction with laser melting technology, is made the densification of zirconium alloy tube Surface Creation by the present invention
Corrosion-resistant layers of chrome increases substantially corrosion resistance of the zirconium alloy tube in nuclear power station operating condition, has the advanced of technical matters
Property.
(4) Detailed description of the invention
The present invention will be further described below with reference to the drawings.
Fig. 1 is the structural schematic diagram of magnetic control sputtering film plating device of the present invention；
Fig. 2 is the structural schematic diagram of laser melting device of the present invention.
In figure, 1 magnetron sputtering power supply, 2 chromium targets, 3 zirconium alloy tubes, 4 vacuum plants, 5 inert gas charging devices, 6 swash
Light device, 7 optical fiber, 8 laser Machining heads.
(5) specific embodiment
Technical solution of the present invention is clearly and completely described below in conjunction with attached drawing, it is clear that described embodiment is
A part of the embodiment of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, those of ordinary skill in the art
Every other embodiment obtained without making creative work, shall fall within the protection scope of the present invention.
In the description of the present invention, it should be noted that such as occur term " center ", "upper", "lower", "left", "right",
"vertical", "horizontal", "inner", "outside" etc., indicated by orientation or positional relationship be orientation based on the figure or position
Relationship is merely for convenience of description of the present invention and simplification of the description, rather than the device or element of indication or suggestion meaning must have
There is specific orientation, be constructed and operated in a specific orientation, therefore is not considered as limiting the invention.In addition, as occurred
Term " first ", is used for descriptive purposes only and cannot be understood as indicating or suggesting relative importance " second ".Wherein, term
" first position " and " second position " is two different positions.
In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, term " installation ", " phase
Even ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or be integrally connected；It can
To be mechanical connection, it is also possible to be electrically connected；It can be directly connected, can also can be indirectly connected through an intermediary
Connection inside two elements.For the ordinary skill in the art, above-mentioned term can be understood at this with concrete condition
Concrete meaning in invention.
The present invention provides a kind of zirconium alloy tube surface treatment method and devices, and multiple embodiments are given below to this hair
The zirconium alloy tube surface treatment method and device of bright offer are described in detail.
Embodiment 1:
Zirconium alloy tube surface treatment method provided in this embodiment, comprising the following steps:
Magnetron sputtering plating step: chromium is plated in 3 surface of zirconium alloy tube using magnetically controlled sputter method, forms the chromium of preset thickness
Film；
Laser melting step: laser consolidation treatment is carried out to chromium film.
Make chromium in such a way that intensity is higher in conjunction with 3 surface of zirconium alloy tube by magnetically controlled sputter method, while making chromium film
With certain compactness, carrying out laser consolidation treatment to chromium film makes the remelting of chromium film and the Fast Cooling on 3 surface of zirconium alloy tube,
Chromium film compactness is further increased, prevents from having an impact its corrosion resisting property because of a small amount of stomata.By magnetron sputtering coating method with
Laser melting technology combines, and makes the corrosion-resistant layers of chrome of 3 Surface Creation of zirconium alloy tube densification, increases substantially zirconium alloy tube 3
Corrosion resistance in nuclear power station operating condition.
Specifically, as shown in Figure 1 to Figure 2, magnetron sputtering plating step further include: vacuum plant 4 takes out working cavity true
Sky is simultaneously filled with inert gas, adjusts vacuum pumping rate and inert gas is filled with speed, make air pressure constant in working cavity.Zirconium is closed
Golden tubing 3, which is placed in working cavity, carries out magnetron sputtering plating.
Further, magnetically controlled sputter method includes: to connect magnetron sputtering power supply 1, generates sputtering current, excited inert gas
Glow discharge is generated, lotus energy particle bombardment chromium target 2 makes chromium atom or chromium atom roll into a ball uniform deposition in 3 surface of zirconium alloy tube.
Magnetron sputtering process continues to reach preset thickness to 3 surface chromium film thickness of zirconium alloy tube, is drawn off work
Cavity carries out laser consolidation treatment.
Further, laser consolidation treatment includes: that laser 6 generates laser, and laser is sent to laser processing via optical fiber 7
First 8, adjust the parameters such as the height of laser Machining head 8 and laser power, make laser Machining head 8 along laser Machining head 8 axial direction at the uniform velocity
Movement.Inert gas is kept to be filled in laser melting step.
Zirconium alloy tube surface treatment method provided in this embodiment, comprising the following steps: magnetron sputtering plating step: make
Chromium is plated in 3 surface of zirconium alloy tube with magnetically controlled sputter method, forms the chromium film of preset thickness；Laser melting step: to chromium film
Carry out laser consolidation treatment.Make chromium in such a way that intensity is higher in conjunction with 3 surface of zirconium alloy tube by magnetically controlled sputter method, together
When make chromium film have certain compactness, to chromium film carry out laser consolidation treatment make the chromium film remelting on 3 surface of zirconium alloy tube simultaneously
Fast Cooling further increases chromium film compactness, prevents from having an impact its corrosion resisting property because of a small amount of stomata.By magnetron sputtering
Film method makes the corrosion-resistant layers of chrome of 3 Surface Creation of zirconium alloy tube densification in conjunction with laser melting technology, increases substantially zirconium conjunction
Corrosion resistance of the golden tubing 3 in nuclear power station operating condition.
Embodiment 2:
Zirconium alloy tube surface processing device provided in this embodiment, as shown in Figure 1 to Figure 2, including magnetic control sputtering film plating device,
Laser melting device, vacuum plant 4 and inert gas charging device 5；
Magnetic control sputtering film plating device includes cavity, and vacuum plant 4 and inert gas charging device 5 are connected to cavity respectively；
Laser melting device includes laser Machining head 8, and inert gas charging device 5 is also used to the pipe processed to laser Machining head 8
Material is filled with inert gas.
Wherein, for zirconium alloy tube 3 to be arranged in cavity, magnetic control sputtering film plating device can be by the table of zirconium alloy tube 3
Face carries out plated film.
Laser Machining head 8 can carry out remelting and Fast Cooling, and indifferent gas to the plated film on the surface of zirconium alloy tube 3
Body charging device 5 can be filled with inert gas to the tubing that laser Machining head 8 is processed.
Make chromium in such a way that intensity is higher in conjunction with 3 surface of zirconium alloy tube by magnetically controlled sputter method, while making chromium film
With certain compactness, carrying out laser consolidation treatment to chromium film makes the remelting of chromium film and the Fast Cooling on 3 surface of zirconium alloy tube,
Chromium film compactness is further increased, prevents from having an impact its corrosion resisting property because of a small amount of stomata.By magnetron sputtering coating method with
Laser melting technology combines, and makes the corrosion-resistant layers of chrome of 3 Surface Creation of zirconium alloy tube densification, increases substantially zirconium alloy tube 3
Corrosion resistance in nuclear power station operating condition.
Further, magnetic control sputtering film plating device further includes magnetron sputtering power supply 1 and chromium target 2；Magnetron sputtering power supply 1 and institute
The connection of chromium target 2 is stated, chromium target 2 is arranged in the cavity, and magnetron sputtering power supply 1 is arranged outside the cavity.
Specifically, vacuum plant 4 vacuumizes cavity, and inert gas charging device 5 is filled with inert gas to wall, adjusts
Vacuum pumping rate and inert gas are filled with speed, make air pressure constant in cavity, by zirconium alloy tube 3 be placed in working cavity into
Row magnetron sputtering plating.
Magnetron sputtering power supply 1 is connected, sputtering current is generated, excited inert gas generates glow discharge, lotus energy particle bombardment
Chromium target 2 makes chromium atom or chromium atom roll into a ball uniform deposition in 3 surface of zirconium alloy tube.Magnetron sputtering process continues to zirconium alloy pipe
3 surface chromium film thickness of material reaches preset thickness, is drawn off working cavity and carries out laser consolidation treatment.
Further, laser melting device further includes laser 6 and optical fiber 7；Laser 6, the optical fiber 7 and laser processing
First 8 are sequentially connected.
Laser 6 generates laser, and laser is sent to laser Machining head 8 via optical fiber 7, adjust 8 height of laser Machining head and
The parameters such as laser power make axial uniform motion of the laser Machining head 8 along laser Machining head 8.Keep lazy in laser melting step
Property gas is filled with.
Further, vacuum plant 4 includes vacuum pump, and vacuum pump can be connect with cavity, to vacuumize to cavity.
Further, inert gas charging device 5 includes air pump, and inert gas can be stored in gas cylinder, gas cylinder and gas
The entrance of pump connects, and the outlet of air pump is connect with cavity, and inert gas can be filled with for cavity, and the outlet of air pump is arranged in laser
The side of processing head 8 can be filled with inert gas to the tubing that laser Machining head 8 is processed.
Zirconium alloy tube surface processing device provided in this embodiment keeps chromium higher with intensity using magnetically controlled sputter method
Mode makes chromium film have certain compactness in conjunction with 3 surface of zirconium alloy tube, and carrying out laser consolidation treatment to chromium film makes
The chromium film remelting on 3 surface of zirconium alloy tube and Fast Cooling, further increase chromium film compactness, prevent the generation because of a small amount of stomata
Influence its corrosion resisting property.By magnetron sputtering coating method in conjunction with laser melting technology, keep 3 Surface Creation of zirconium alloy tube fine and close
Corrosion-resistant layers of chrome, increase substantially corrosion resistance of the zirconium alloy tube 3 in nuclear power station operating condition.
Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the present invention., rather than its limitations；To the greatest extent
Pipe present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that: its according to
So be possible to modify the technical solutions described in the foregoing embodiments, or to some or all of the technical features into
Row equivalent replacement；And these are modified or replaceed, various embodiments of the present invention technology that it does not separate the essence of the corresponding technical solution
The range of scheme.
Claims (9)
1. a kind of zirconium alloy tube surface treatment method, it is characterized in that, include the following steps: (1) magnetron sputtering plating step: making
Chromium is plated in zirconium alloy tube surface with magnetically controlled sputter method, forms the chromium film of preset thickness；(2) laser melting step: to chromium
Film carries out laser consolidation treatment.
2. zirconium alloy tube surface treatment method according to claim 1, it is characterised in that: in step (1), to working chamber
Body vacuumizes and is filled with inert gas, adjusts vacuum pumping rate and inert gas is filled with speed, make air pressure constant in working cavity.
3. zirconium alloy tube surface treatment method according to claim 1 or 2, it is characterised in that: in step (1), connect
Magnetron sputtering power supply generates sputtering current, and excited inert gas generates aura and puts a little, and lotus energy particle bombardment chromium target makes chromium atom
Or chromium atom group uniform deposition is in zirconium alloy tube surface.
4. zirconium alloy tube surface treatment method according to claim 1, it is characterised in that: in step (2), laser is produced
Raw laser, laser are sent to laser Machining head via optical fiber, adjust laser processing grease head highness and laser power, make laser Machining head
Along the axial uniform motion of laser Machining head.
5. zirconium alloy tube surface treatment method according to claim 4, it is characterised in that: during the laser melting
Inert gas is kept to be filled with.
6. realizing the device of zirconium alloy tube surface treatment method described in claim 1, it is characterised in that: including magnetron sputtering
Coating apparatus and laser melting device, wherein magnetic control sputtering film plating device includes being communicated with vacuum plant (4) and inert gas fills
Enter the cavity of device (5), cavity top end is equipped with the chromium target (2) of connection magnetron sputtering power supply (1), and cavity bottom is placed with face
The zirconium alloy tube (3) of chromium target (2)；Laser melting device includes laser Machining head (8), and laser melting device is connected to indifferent gas
Body charging device (5).
7. device according to claim 6, it is characterised in that: the laser Machining head (8) connects laser by optical fiber (7)
Device (6).
8. device according to claim 6, it is characterised in that: the magnetron sputtering power supply (1) is arranged outside cavity.
9. device according to claim 6, it is characterised in that: the vacuum plant (4) includes vacuum pump, and inert gas fills
Entering device (5) includes air pump.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201910438998.6A CN110129752A (en) | 2019-05-24 | 2019-05-24 | Zirconium alloy tube surface treatment method and device |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201910438998.6A CN110129752A (en) | 2019-05-24 | 2019-05-24 | Zirconium alloy tube surface treatment method and device |
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| CN201910438998.6A Pending CN110129752A (en) | 2019-05-24 | 2019-05-24 | Zirconium alloy tube surface treatment method and device |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116516309A (en) * | 2023-05-10 | 2023-08-01 | 重庆文理学院 | Single-layer Cr-enriched N-doped coating on surface of zirconium alloy for nuclear and preparation method thereof |
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| CN102677014A (en) * | 2012-05-29 | 2012-09-19 | 重庆理工大学 | Modification method for alloying surface of magnesium alloy |
| CN104928675A (en) * | 2015-07-02 | 2015-09-23 | 江苏大学 | Special device for one-step remelting of turbine blade thermal barrier coating |
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| CN116516309A (en) * | 2023-05-10 | 2023-08-01 | 重庆文理学院 | Single-layer Cr-enriched N-doped coating on surface of zirconium alloy for nuclear and preparation method thereof |
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Effective date of registration: 20211012 Address after: 272000 block B, building A3, industry university research base, high tech Zone, No.9 Haichuan Road, Jining City, Shandong Province Applicant after: LASER INSTITUTE,SHANDONG ACADEMY OF SCIENCES Applicant after: Nan Leiguang Applicant after: Jin Shuo Applicant after: Ni Jiasheng Applicant after: Cheng Wei Applicant after: Ma Xinqiang Applicant after: Ren Yuan Applicant after: Ge Hailong Applicant after: Wang Jingwen Applicant after: Li Wenlong Applicant after: Wang Wentao Applicant after: He Jianqun Address before: 272000 block B, building A3, industry university research base, high tech Zone, No.9 Haichuan Road, Rencheng District, Jining City, Shandong Province Applicant before: LASER INSTITUTE,SHANDONG ACADEMY OF SCIENCES Effective date of registration: 20211012 Address after: 252000 Room 601, 6 / F, Liaocheng Industrial Technology Research Institute, No. 88, Huanghe Road, high tech Zone, Liaocheng City, Shandong Province Applicant after: Shandong chanyan Qiangyuan Laser Technology Co.,Ltd. Address before: 250000 Room 201, building 5, laser research institute, Shandong Academy of Sciences, No. 1659-3, Keyuan Road, Suncun area, high tech Zone, Jinan City, Shandong Province Applicant before: Jinan Huizhi Laser Technology Co.,Ltd. Effective date of registration: 20211012 Address after: 250000 Room 201, building 5, laser research institute, Shandong Academy of Sciences, No. 1659-3, Keyuan Road, Suncun area, high tech Zone, Jinan City, Shandong Province Applicant after: Jinan Huizhi Laser Technology Co.,Ltd. Address before: 272000 block B, building A3, industry university research base, high tech Zone, No.9 Haichuan Road, Jining City, Shandong Province Applicant before: LASER INSTITUTE,SHANDONG ACADEMY OF SCIENCES Applicant before: Nan Leiguang Applicant before: Jin Shuo Applicant before: Ni Jiasheng Applicant before: Cheng Wei Applicant before: Ma Xinqiang Applicant before: Ren Yuan Applicant before: Ge Hailong Applicant before: Wang Jingwen Applicant before: Li Wenlong Applicant before: Wang Wentao Applicant before: He Jianqun |
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