CN105603354A - Method for preparing metal zinc alloy target by arc-spraying process - Google Patents
Method for preparing metal zinc alloy target by arc-spraying process Download PDFInfo
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- CN105603354A CN105603354A CN201610059956.8A CN201610059956A CN105603354A CN 105603354 A CN105603354 A CN 105603354A CN 201610059956 A CN201610059956 A CN 201610059956A CN 105603354 A CN105603354 A CN 105603354A
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- electric arc
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
- C23C4/04—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the coating material
- C23C4/06—Metallic material
- C23C4/08—Metallic material containing only metal elements
Abstract
A method for preparing a metal zinc alloy target by an arc-spraying process comprises raw material preparation, substrate preparation, arc spraying and post processing, wherein a high purity zinc alloy wire with the diameter phi of 2.0 mm is selected as an arc spraying material; a steel pipe with suitable size is selected for machining and taken as a liner pipe of a rotating target; the arc-spraying process is adopted, and the defect of an existing metal rotating target production process is overcome; the coating material has consistent quality and purity, and mixing is not required before construction; the coating bonding strength is high, sagging cannot occur, and the quality of an arc spraying coating is improved; the target length is not limited, at the same time, the target has stable and excellent performance, and the requirement of large-area film coating can be directly met; the process is simple, the production efficiency and the energy utilization ratio are high, and control of the target manufacturing cost can be effectively realized.
Description
Technical field
The present invention relates to C23C vacuum vapor deposition method, sputtering method, ion implantation or chemical vapour deposition technique in IPC classificationGeneral coating technology, belongs to and is applied to Low-e glass and shows the industry new and high technology Material Fields such as coated glass, especiallyElectric arc spraying process is prepared the method for metallic zinc alloy target material.
Background technology
TCO, as a kind of good transparency conductive electrode material, is widely used in solar cell, flat-panel screens, sends outThe various photovoltaic such as optical diode, TCO is transparent conductive oxide (transparentconductingoxide),Can there is the high light transmittance being greater than more than 80% in visible region, and TCO film has resistivity and is less than 10 Ω cmElectric conductivity.
Target is the raw material of vacuum coating, and the purity of target, density directly affect composition and the combination property of film system. Therefore,For ensureing that sputtered film has lower resistivity, the high transparency and the uniformity of film thickness, the target using withoutOpinion is the uniformity that composition or crystal orientation all must have, high density and low resistivity. So preparing kirsiteIn oxide target material process, should ensure that kirsite purity is not less than 99.95%, strictly control kind and the quantity of impurity. ThisSample just can have the uniformity of good uniformity and bulk article quality in target length of life sputtered film.
Kirsite is the alloy that adds other element compositions taking zinc as basis. The alloying element often adding have aluminium, copper, magnesium, cadmium,The Low Temperature Zn alloys such as lead, titanium. Kirsite fusing point is low, good fluidity, and easily melting welding, soldering and plastic working, resistance in atmosphereCorrosion, maimed material is convenient to reclaim and remelting; But creep strength is low, easily there is natrual ageing and cause change in size. Melting legal systemStandby, die casting or pressure processing are become a useful person. The main adding elements of kirsite has aluminium, copper and magnesium etc., can by manufacture and processing technologyKirsite is divided into deformation kirsite and cast zinc alloy two classes, and cast zinc alloy mobility and corrosion resistance are better, are applicable toDie casting instrument, auto parts shell etc.
Allumen and Zinc-tin alloy all can be used to prepare target, are applied to optical glass by magnetron sputtering. Film resiativityLow, transmissivity is high and surface topography good, and growth temperature approaches room temperature, good with substrate attachment, can Large-Area-Uniform maskingAnd masking cost is low. In recent years, adopting in the world kirsite semiconductor to do raceway groove develops high performance thin film transistor (TFT) and becomes and grindStudy carefully focus, be considered to a very promising material.
Published pertinent literature is less.
Chinese patent application 201210384229.0 relates to a kind of boron zinc oxide sputtered target material and application thereof. For overcoming traditionBoron zinc oxide sputtered target material cannot use the problem of the DC sputtering technique formation boron zinc oxide film of high sputtering rate, thisInvention provides a kind of boron zinc oxide sputtered target material, and the boron content of its BZO sputtered target material is with respect to the content of boron and zinc and be1.15 atomic percent to 6.74 atomic percents, and the secondary phase area of BZO sputtered target material accounts for boron zinc oxide sputter target2% to 25% of the area of material. The present invention be by the secondary phase area control of boron zinc oxide sputtered target material in suitable scope,Can via DC sputtering technique promote sputtering rate, and form by this kind of light transmittance in visible region higher than80% and resistivity lower than 1 × 10-2The boron zinc oxide film of Ω cm.
Chinese patent application 201510185516.2 discloses aluminium scandium rotary target material and preparation method thereof, wherein preparation method's bagDraw together following steps: sintering, ball milling, sieve and prepare aluminium scandium powder; Pretreatment stainless steel base pipe; Use arc spray processSpraying alloy prime coat; On the stainless steel base that contains alloy prime coat, use controlled atmosphere cold spray-coating method spraying aluminium scandium powderRotary target material is prepared at end, and technological parameter is: use vacuum unit to spraying cavity extracting vacuum, then pass into recycling-guard gas argonGas, nozzle inlet place operating temperature is 300～700 DEG C, and pressure is 2～5Mpa, and working gas is argon gas, and its pressure is 2.5～4.5Mpa, temperature is 400～900 DEG C, gas flow is 20～50m3/ h, spray distance is 40～60mm, powder feeding gas flowBe 200～400l/h, powder sending quantity is 30～60g/min. The Lv Kang rotary target material dense structure of preparing by the present invention, pureSpend high, composition is even, target diameter and length are unrestricted, length can reach 4000mm, thickness is 3～15mm, targetRelative density >=97%, purity >=99.99%, oxygen content≤200ppm.
Electric arc spraying is to utilize to burn to make gold in two electric arcs by between the wire rod of spray metal of sending to continuously as thermal sourceBelong to wire rod and melt, molten metal is atomized into particulate with high velocity air, and make that it accelerates, atomization particle jet high speed is sunkAmass the technology that matrix surface forms coating. Arc spraying technology is the important of plasma spray technology in emerging Surface Engineering subjectBranch. The transformation of electric arc spraying equipment and the progress of sprayed on material, comprise arc spray gun, wire feeder and Special spray coatingPower supplys etc., have improved coating quality greatly, have promoted the range of application of arc spraying technology in industry, make electric arc spraying skillArt becomes developed recently one of plasma spray technology the most rapidly.
Same plasma spraying, flame-spraying, three kinds of heat spraying methods of high-velocity oxy-fuel spraying are compared, and arc spraying technology is mainThere is following some advantage: 1. production efficiency is high; 2. tie platform intensity high; 3. energy utilization rate is high, can reach 90%, is allIn heat spraying method, using energy source is the most sufficient; 4. in equipment investment low, when operation, safeguards simple. Therefore arc spraying technologyObtain application for very fast development in China, be successfully applied to ten thousand tons of extruder plungers of spraying, large-scale paper-making drying cylinder etc.
Preparation metal targets has following several method at present, specifically, adopts extrusion efficiency high, the target end of preparingMouth intensity is bad and preparation cost is high; Adopt casting method equipment requirement high, and may there is pore and shrinkage cavity in the target of preparingProblem, unstable properties; Adopt when plasma spraying can the be cooled cooling water band of nozzle and tungsten electrode of a large amount of heatsTo walk. its energy utilization rate only has 10%.
At present, electric arc spraying process is prepared metallic zinc alloy target material technology and be there is not yet open.
Summary of the invention
The object of this invention is to provide a kind of electric arc spraying process and prepare the method for metallic zinc alloy target material, overcome existing metal and revolveTurn the weak point of target production technology, make the rotary target material length that makes unrestricted, can directly meet large-area coating filmDemand has good stability simultaneously, have higher utilization rate and energy utilization rate, can realize target manufacturing costGood control.
Object of the present invention will realize by following technical measures: preparation method comprises that raw material is prepared, matrix is prepared, electric arcSpraying and rear processing, specifically comprise following steps:
Step 1: choose diameter and be the high-purity Zn alloying metal silk of Φ 2.0mm as material for arc spraying;
Step 2: choose the steel pipe that is applicable to size as the internal lining pipe of spraying rotary target material, steel pipe is carried out to machined, and rightMatrix surface carries out cleaning with acetone, removes surperficial dirt and oxide layer, re-uses special sand-blasting machine it is carried out to surfaceBlasting treatment; In sandblast process, air pressure is 0.4MPa, and sandblast distance is 100-150mm;
Step 3: when electric arc spraying, two wires materials intersect 25 °～45° angle degree, and two wires materials are connected respectivelyThe positive and negative polarities of power supply, send to continuously; The end of two wire rods produces electric arc in moment of short circuit because of contact; According to sprayingMaterial setting voltage and electric current, under the effect of power supply, electric arc keeps smooth combustion; In the behind of electric arc origination point, through mistThe high velocity air of changing after nozzle accelerates makes the molten drop of fusing depart from wire rod and be atomized into particle, under the effect of high velocity air, spraysTo forming coating through pretreated substrate surface;
Step 4: after having sprayed, standing cooling, target material surface is carried out to necessary Vehicle Processing.
Advantage of the present invention and effect: adopt electric arc spraying process, can effectively overcome existing metal rotation target production technologyDeficiency, coating material has consistent quality and purity, before construction, do not need mix; Coating knot platform intensity is high, can not produceRaw sagging, has improved arc spraying coating quality; Spraying target length is unrestricted, has good stability, energy simultaneouslyEnough directly meet large-area coating film demand; Technique is simple, and production efficiency and energy utilization rate are high, can effectively realize target manufactureThe control of cost.
Detailed description of the invention
The principle of the invention is, utilize burn in two send to continuously by the electric arc between the wire rod of spray metal as heatSource is melted metal wire rod, molten metal is atomized into particulate with high velocity air, and makes its acceleration, atomization grainSub-jet high speed deposition forms coating to matrix surface. Preparation method comprises following steps:
Step 1: raw material is prepared: the high-purity Zn alloying metal silk of choosing diameter and be Φ 2.0mm is material for arc spraying, zincAlloy ratio determines according to the actual requirements, requires proportioning even, ensures the uniformity of spray-on coating;
Step 2: matrix is prepared: choose according to demand the steel pipe that is applicable to size as the internal lining pipe of rotary target material, steel pipe is enteredRow machined and cleaning is carried out to acetone in its surface, removes surperficial dirt and oxide layer, re-uses special sand-blasting machine pairIt carries out surface sand-blasting processing, strengthens its surperficial cohesive force, is conducive to better spraying effect; Air pressure in sandblast processFor 0.4MPa, sandblast distance is 100-150mm;
Step 3: electric arc spraying: when electric arc spraying, two wires materials are crossing to have a certain degree, and is generally 25 °～45 °,The positive and negative polarities that two wires materials switch on power respectively, send to continuously; The end of two wire rods in moment of short circuit because of contactAnd generation electric arc;
Step 4: set certain voltage and current according to sprayed on material, under the effect of power supply, electric arc keeps smooth combustion;In the behind of electric arc origination point, the high velocity air after atomizer accelerates makes the molten drop of fusing depart from wire rod atomization granulatingSon is ejected into through pretreated substrate surface and forms coating under the effect of high velocity air.
Step 5: after having sprayed, standing cooling, necessary Vehicle Processing is carried out in its surface, meet target size and surfaceRequirement.
Below in conjunction with embodiment, the invention will be further described.
Embodiment 1:
Choosing diameter is Φ 2.0mm, and the allumen wire that purity is 99.99% is material for arc spraying, and aluminium content is 2%,Alloy proportion is even, ensures the uniformity of follow-up spray-on coating; Choose internal diameter 125mm, external diameter 133mm, length 3855mmStainless steel tube be the internal lining pipe of metal zinc-aluminium rotary target material, steel pipe is carried out to machined, steel pipe matrix surface is entered with acetoneRow cleaning, removes surperficial dirt and oxide layer, re-uses special sand-blasting machine it is carried out to surface sand-blasting processing, strengthens itSurface cohesive force, is conducive to better spraying effect; In sandblast process, air pressure is 0.4MPa, and sandblast distance is 140mm.Two metallic zinc aluminium wires are intersected to 30 ° and also send to continuously, the positive and negative polarities that switch on power respectively, the end of two wire rodsProduce electric arc in moment of short circuit because of contact; Setting voltage is 32V, and electric current is 140A, and compressed air pressure is 0.65MPa,Bushing pipe rotating speed is 100r/min, and spray gun translational speed is 0.8m/min, and bushing pipe wall and spray-painting gun spacing distance are 200mm,Spraying area length 3820mm, arc spray gun moves back and forth along bushing pipe length direction. Under the effect of power supply, electric arc keepsSmooth combustion; In the behind of electric arc origination point, the high velocity air after atomizer accelerates makes the molten drop of fusing depart from wire rod alsoBe atomized into particle, under the effect of high velocity air, be ejected into through pretreated substrate surface and form metallic zinc aluminized coating. SprayingAfter completing, standing cooling, necessary Vehicle Processing is carried out in its surface, meet target size and surface requirements.
Embodiment 2: choosing diameter is Φ 2.0mm, and the Zinc-tin alloy wire that purity is 99.95% is material for arc spraying,Tin content is 50%, and alloy proportion is even, ensures the uniformity of follow-up spray-on coating; Choose internal diameter 125mm, external diameter 133mm,The stainless steel tube of length 3855mm is the internal lining pipe of metal zinc-aluminium rotary target material, and steel pipe is carried out to machined, re-uses specialSand-blasting machine carries out surface sand-blasting processing to it, strengthens its surperficial cohesive force, is conducive to better spraying effect. After sandblast to steelPipe matrix surface carries out cleaning with acetone, removes surperficial dirt and oxide layer; In sandblast process, air pressure is0.4MPa, sandblast distance is 140mm. Two metallic zinc solder materials are intersected to 40 ° and also send to continuously, switch on power respectivelyPositive and negative polarities, the end of two wire rods produces electric arc in moment of short circuit because of contact; Setting voltage is 30V, and electric current is120A, bushing pipe rotating speed is 100r/min, and spray gun translational speed is 0.8m/min, and bushing pipe wall and spray-painting gun spacing distance are200mm, spraying area length 3192mm, arc spray gun moves back and forth along bushing pipe length direction. Under the effect of power supply,Electric arc keeps smooth combustion; In the behind of electric arc origination point, the high velocity air after atomizer accelerates makes the molten drop of fusing de-Off-line material is also atomized into particle, is ejected into through pretreated substrate surface and forms the painting of metal zinc-tin under the effect of high velocity airLayer. After having sprayed, standing cooling, necessary Vehicle Processing is carried out in its surface, meet target size and surface requirements.
Above-described embodiment is described the preferred embodiment of the present invention in detail, only gives an example for convenience of description, and the present invention advocatesInterest field from should be as the criterion with described in claim, but not only limit to above-described embodiment. In technical conceive scope of the present inventionIn, technical scheme of the present invention is carried out to multiple equivalents, all belong to protection scope of the present invention.
Claims (3)
1. electric arc spraying process is prepared the method for metallic zinc alloy target material, it is characterized in that, preparation method comprise raw material prepare,Matrix preparation, electric arc spraying and rear processing, specifically comprise following steps:
Step 1: the high-purity Zn alloying metal silk of choosing diameter and be Φ 2.0mm is material for arc spraying;
Step 2: choose the steel pipe that is applicable to size as the internal lining pipe of rotary target material, carry out machined, to steel pipe matrix surfaceCarry out cleaning with acetone, remove surperficial dirt and oxide layer, re-use special sand-blasting machine it is carried out to surface sand-blasting processing;In sandblast process, air pressure is 0.4MPa, and sandblast distance is 100-150mm;
Step 3: when electric arc spraying, two wires materials intersect 25 °～45° angle degree, and two wires materials are connected respectivelyThe positive and negative polarities of power supply, send to continuously; The end of two wire rods produces electric arc in moment of short circuit because of contact; According to sprayingMaterial setting voltage and electric current, under the effect of power supply, electric arc keeps smooth combustion; In the behind of electric arc origination point, through mistThe high velocity air of changing after nozzle accelerates makes the molten drop of fusing depart from wire rod and be atomized into particle, under the effect of high velocity air, spraysTo forming coating through pretreated substrate surface;
Step 4: after having sprayed, standing cooling, target material surface is carried out to necessary Vehicle Processing.
2. electric arc spraying process as claimed in claim 1 is prepared the method for metallic zinc alloy target material, it is characterized in that choosingCut-off footpath is Φ 2.0mm, and the allumen wire that purity is 99.99% is material for arc spraying, and aluminium content is 2%, alloyProportioning is even, ensures the uniformity of follow-up spray-on coating; Choose internal diameter 125mm, external diameter 133mm, length 3855mm notRust steel pipe is the internal lining pipe of metal zinc-aluminium rotary target material, and steel pipe is carried out to machined, and steel pipe matrix surface is carried out clearly with acetoneClean processing, removes surperficial dirt and oxide layer, re-uses special sand-blasting machine it is carried out to surface sand-blasting processing; In sandblast processAir pressure is 0.4MPa, and sandblast distance is 140mm; Two metallic zinc aluminium wires are intersected to 30 ° and also send to continuously, pointThe positive and negative polarities that do not switch on power, the end of two wire rods produces electric arc in moment of short circuit because of contact; Setting voltage is32V, electric current is 140A, and compressed air pressure is 0.65MPa, and bushing pipe rotating speed is 100r/min, and spray gun translational speed is0.8m/min, bushing pipe wall and spray-painting gun spacing distance are 200mm, spraying area length 3820mm, arc spray gun is along liningLength of tube direction moves back and forth; Under the effect of power supply, electric arc keeps smooth combustion; In the behind of electric arc origination point, through mistThe high velocity air of changing after nozzle accelerates makes the molten drop of fusing depart from wire rod and be atomized into particle, under the effect of high velocity air, spraysTo forming metallic zinc aluminized coating through pretreated substrate surface; After having sprayed, standing cooling, its surface is metThe necessary Vehicle Processing of target size and surface requirements.
3. electric arc spraying process as claimed in claim 1 is prepared the method for metallic zinc alloy target material, it is characterized in that choosingCut-off footpath is Φ 2.0mm, and the Zinc-tin alloy wire that purity is 99.95% is material for arc spraying, and tin content is 50%, closesGold proportioning is even, ensures the uniformity of follow-up spray-on coating; Choose internal diameter 125mm, external diameter 133mm, length 3855mmStainless steel tube is the internal lining pipe of metal zinc-aluminium rotary target material, and steel pipe is carried out to machined, then it is carried out to surface sand-blasting processing;After sandblast, steel pipe matrix surface is carried out to cleaning with acetone, remove surperficial dirt and oxide layer; Air pressure in sandblast processPower is 0.4MPa, and sandblast distance is 140mm; Two metallic zinc solder materials are intersected to 40 ° and also send to continuously, connect respectivelyThe positive and negative polarities of power supply, the end of two wire rods produces electric arc in moment of short circuit because of contact; Setting voltage is 30V, electricityStream is 120A, and bushing pipe rotating speed is 100r/min, and spray gun translational speed is 0.8m/min, bushing pipe wall and spray-painting gun spacerFrom being 200mm, spraying area length 3192mm, arc spray gun moves back and forth along bushing pipe length direction; In the effect of power supplyUnder, electric arc keeps smooth combustion; In the behind of electric arc origination point, the high velocity air after atomizer accelerates makes the molten of fusingDrip and depart from wire rod and be atomized into particle, under the effect of high velocity air, be ejected into through pretreated substrate surface and form metallic zincTin coating; After having sprayed, standing cooling, its surface is met to the necessary Vehicle Processing of target size and surface requirements.
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106244968A (en) * | 2016-08-30 | 2016-12-21 | 广东通宇通讯股份有限公司 | A kind of antenna phasing unit aluminium section bar housing surface arc spray process and aluminium section bar cavity |
| CN109352153A (en) * | 2018-12-06 | 2019-02-19 | 烟台首钢磁性材料股份有限公司 | A kind of preparation facilities being used to form rare earth metal target and preparation method |
| CN113355628A (en) * | 2021-05-24 | 2021-09-07 | 芜湖映日科技股份有限公司 | Method for enhancing bonding strength between base tube and target coating |
| CN113604770A (en) * | 2021-07-23 | 2021-11-05 | 常州大学 | Preparation method and device of rotary spraying integrated coating |
| CN115679239A (en) * | 2022-11-07 | 2023-02-03 | 江苏迪丞光电材料有限公司 | A spraying device for metal target processing production |
| TWI798589B (en) * | 2020-09-30 | 2023-04-11 | 友礦材料股份有限公司 | Surface Roughness Processing Method of Sputtering Target |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106244968A (en) * | 2016-08-30 | 2016-12-21 | 广东通宇通讯股份有限公司 | A kind of antenna phasing unit aluminium section bar housing surface arc spray process and aluminium section bar cavity |
| CN109352153A (en) * | 2018-12-06 | 2019-02-19 | 烟台首钢磁性材料股份有限公司 | A kind of preparation facilities being used to form rare earth metal target and preparation method |
| TWI798589B (en) * | 2020-09-30 | 2023-04-11 | 友礦材料股份有限公司 | Surface Roughness Processing Method of Sputtering Target |
| CN113355628A (en) * | 2021-05-24 | 2021-09-07 | 芜湖映日科技股份有限公司 | Method for enhancing bonding strength between base tube and target coating |
| CN113604770A (en) * | 2021-07-23 | 2021-11-05 | 常州大学 | Preparation method and device of rotary spraying integrated coating |
| CN113604770B (en) * | 2021-07-23 | 2022-08-09 | 常州大学 | Preparation method and device of rotary spraying integrated coating |
| CN115679239A (en) * | 2022-11-07 | 2023-02-03 | 江苏迪丞光电材料有限公司 | A spraying device for metal target processing production |
| CN115679239B (en) * | 2022-11-07 | 2023-10-20 | 江苏迪丞光电材料有限公司 | Spraying device for metal target processing production |
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Application publication date: 20160525 |