CN110127593A - A kind of star-like hilted broadsword four-throw RF switch - Google Patents
A kind of star-like hilted broadsword four-throw RF switch Download PDFInfo
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- CN110127593A CN110127593A CN201910347504.3A CN201910347504A CN110127593A CN 110127593 A CN110127593 A CN 110127593A CN 201910347504 A CN201910347504 A CN 201910347504A CN 110127593 A CN110127593 A CN 110127593A
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- 239000000758 substrate Substances 0.000 claims abstract description 20
- 230000005540 biological transmission Effects 0.000 claims abstract description 13
- 230000002093 peripheral effect Effects 0.000 claims description 7
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 3
- 239000011148 porous material Substances 0.000 claims description 2
- 238000003780 insertion Methods 0.000 abstract description 18
- 230000037431 insertion Effects 0.000 abstract description 18
- 238000002955 isolation Methods 0.000 abstract description 14
- 238000010586 diagram Methods 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910000449 hafnium oxide Inorganic materials 0.000 description 1
- WIHZLLGSGQNAGK-UHFFFAOYSA-N hafnium(4+);oxygen(2-) Chemical compound [O-2].[O-2].[Hf+4] WIHZLLGSGQNAGK-UHFFFAOYSA-N 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000006855 networking Effects 0.000 description 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
- B81B7/02—Microstructural systems; Auxiliary parts of microstructural devices or systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
- H01P1/00—Auxiliary devices
- H01P1/10—Auxiliary devices for switching or interrupting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/01—Switches
Abstract
The invention belongs to RF MEMS fields, and in particular to a kind of star-like hilted broadsword four-throw RF switch.A kind of four throw switch of star-like hilted broadsword, mainly it is made of substrate, microwave transmission line, driving electrodes, top electrode, lower electrode, fixed anchor point and contact, microwave transmission line and driving electrodes setting on substrate, power on extremely board-type structure, and lower electrode uses the double-contact with spring beam.Input signal power is divided into four equal signals using hub-and-spoke configuration power splitter and exported by microwave transmission line.For microwave transmission angle, hub-and-spoke configuration is highly efficient, and the isolation between each branch is more preferable, and the degree of balance is high.Thus the four throw switch Insertion Loss of hilted broadsword designed is smaller, and each road amplitude and phase equalization are more preferable.
Description
Technical field
The invention belongs to RF MEMS fields, and in particular to a kind of star-like hilted broadsword four-throw RF switch.
Background technique
RF MEMS Switches are one of basic modules of radio frequency system, pass through micro mechanical structure as a kind of passive device
Movement, to control the conducting and disconnection of radiofrequency signal.Compared with conventional solid-state electronic device, small, the low in energy consumption, body with Insertion Loss
Accumulate the unsurpassed advantage such as small, at low cost.It can be widely used in various radio frequencies, microwave and millimeter wave communication system,
It is significant to fields such as early radar warning, tactics and strategy scouting, Satellite Networkings.
RF MEMS Switches can be divided into bis- (more) throw switches of single-pole single-throw(SPST, hilted broadsword by its input/output mode.Hilted broadsword
Single-throw switch only handles signal all the way, and bis- (more) throw switches of hilted broadsword can handle two-way or multiple signals.Wherein hilted broadsword is thrown out more
The Primary Component as phased-array radar is closed, in recent years gazing at by research institution, various countries.Currently, opening four throw switch of hilted broadsword
The mechanism of exhibition research mainly has University of Electronic Science and Technology, Institutes Of Technology Of Nanjing, middle electric 13 institute, China Shipbuilding Industry Corporation the 723rd to grind
Study carefully institute etc..Such as the 723rd research institute, China Shipbuilding Industry Corporation devises four throw switch of wide band absorption formula hilted broadsword, this switch
Select PIN pipe and MA4AGSW1A switch composition one four throw switch of K-type hilted broadsword, exist structure is complicated, volume is larger, Insertion Loss compared with
The problems such as poor.
Summary of the invention
The purpose of the present invention is to the deficiencies of traditional single-pole single-throw switch (SPST), devise a kind of suitable for 0-18GHz's
Star-like four throw switch of hilted broadsword.Not only it may be implemented to reduce volume of switch, reduce insertion loss but also four tunnel of switch switching function may be implemented
Energy.
The specific technical solution of the present invention is as follows: a kind of star-like hilted broadsword four-throw RF switch, and the star-like hilted broadsword four-throw is penetrated
Frequency switchs
At least one provides the substrate of support brace foundation；
The microwave transmission component of substrate surface is arranged at least one set；
The microwave transmission component includes the signal wire unit for being used for transmission signal, the ground that signal wire unit side is arranged in
Line unit, the driving electrodes being arranged in below the signal wire unit；
The signal wire unit includes input signal cable, output signal line, star-like signal wire, and stating star-like signal wire is one
Disc angularly extends at least five bar shaped ports in the peripheral side of the disc, and the bar shaped port includes being used for
It is the signal wire input port of input signal cable connection, defeated adjacent to the proximal port of signal input port two sides and relative to signal
The far distance port of inbound port；
The signal wire input port, proximal port and far distance port are equiangularly arranged in disc peripheral side, constitute radial
Hub-and-spoke configuration, the signal input port is oppositely arranged with input signal cable, and the proximal port, far distance port are believed with output respectively
Number line is oppositely arranged.
Further, the output signal line corresponds to star-like signal wire to be defined as proximal port output signal line, far distance port defeated
Signal wire out；
The proximal port output signal line, far distance port output signal line correspond to the proximal port and far distance port is respectively set
For triggering the cantilever beam of folding；
Described cantilever beam one end is by being fixedly installed the proximal port output signal line, far distance port output signal by anchor point
On line, the other end vacantly extends to the top of the star-like signal thread end.
Further, the star-like signal wire is an oblate disk body, extends five in the peripheral side of the oblate disk body
A bar shaped port, the angle between adjacent bar shaped port is 72 °, and constituting tool, there are four the bar shaped ports that angle is 72 ° of angles.
Further, the signal wire input port, proximal port and far distance port are along star-like signal wire radial direction to extension
At least two contacts are stretched out, two contacts are arranged in parallel, and are always positioned at the cantilever beam lower position.
Further, release hole array is provided on the cantilever beam.
Further, the lead for connecting external circuit is provided on the substrate, the substrate corresponds to the cantilever
The overhead positions of beam are fixedly installed driving electrodes；
The driving electrodes are connect with the lead.
Further, one layer of silicon nitride medium layer is arranged towards the one side of cantilever beam in the driving electrodes.
Further, the ground wire unit includes: the first ground wire, the second ground wire, third ground wire；
Two first ground wires are separately positioned on the angle of the input signal cable and two proximal port output lines；
Two second ground wires are separately positioned on the angle of a proximal port output line and a far distance port output line；
The third signal wire is located at the angle of two far distance port output lines.
Further, the first ground wire restocking has an air bridges, and the air bridges connection is located at the of lead two sides
One ground wire；
The second ground wire restocking has an air bridges, and the air bridges connection is located on the second ground wire of lead two sides.
Further, the release hole array includes multiple relief holes in array-like arrangement, the release hole array packet
Include 3-5 row, 6-10 column；
The release pore diameter size is 8-10 μm, and distance is 15-25 μm between the adjacent relief hole of any two.
The beneficial effects of the present invention are using star-like hilted broadsword four-throw RF switch of the present invention, mainly by star-like knot
The advantages that structure power splitter combines composition with single-pole single-throw switch (SPST), has structure simple, small in size, and insertion loss is small.It is passed from microwave
For defeated angle, the isolation between each branch of hub-and-spoke configuration power splitter is more preferable, and the degree of balance is high.Thus the hilted broadsword four-throw designed
Switch Insertion Loss is smaller, and each road amplitude and phase equalization are more preferable.Star-like four throw switch of hilted broadsword has four symmetrical cantilever beams, both
It reduces insertion loss and increases isolation again, while also improving the service life of switch.Have in operating frequency range relatively strong
Practicability, it can be achieved that the four-way of the highly integrated and DC-18GHz of RF MEMS Switches gates.
There is apparent advantage compared with traditional four throw switch of hilted broadsword, star-like four throw switch of hilted broadsword has four cantilevers
The symmetrical structure of beam composition, had not only reduced insertion loss but also had increased isolation, and also enhanced service life and the microwave of switch in this
Performance.In 0-18GHz, there is superior practicability.The four-way gating that DC-18GHz can be achieved, realizes RF MEMS Switches
It is highly integrated.
Detailed description of the invention
Fig. 1 is star-like four throw switch overall structure figure of hilted broadsword described in the embodiment of the present invention；
Fig. 2 is star-like four throw switch overall structure top view of hilted broadsword described in the embodiment of the present invention；
Fig. 3 is star-like signal line structure figure described in the embodiment of the present invention；
Fig. 4 is switch block opening state structure chart described in the embodiment of the present invention；
Fig. 5 is switch block off-state structure chart described in the embodiment of the present invention；
Fig. 6 is the structure chart of cantilever beam described in the embodiment of the present invention；
Switch proximal port insertion loss analogous diagram Fig. 7 of the invention；
Switch proximal port isolation analogous diagram Fig. 8 of the invention；
Switch far distance port insertion loss analogous diagram Fig. 9 of the invention；
Switch far distance port isolation analogous diagram Figure 10 of the invention；
Detailed description of the invention:: 1- substrate, 2- input signal cable, 3- proximal port output signal line, 4- far distance port output signal line,
The first ground wire of 5-, the second ground wire of 6-, 7- third ground wire, the star-like signal wire of 8-, 9- proximal port, 10- far distance port, the contact 11-, 12-
Cantilever beam, 13- driving electrodes, 14- dielectric layer, 15- relief hole, 16- anchor point, 17- air bridges, 18- lead, 19- air bridges branch
Point.
Specific embodiment
The embodiment of the present invention is described below in detail, examples of the embodiments are shown in the accompanying drawings, wherein from beginning to end
Same or similar label indicates same or similar element or element with the same or similar functions.Below with reference to attached
The embodiment of figure description is exemplary, and for explaining only the invention, and is not considered as limiting the invention.
In the description of the present invention, it is to be understood that, term " center ", "upper", "lower", "front", "rear", " left side ",
The orientation or positional relationship of instructions such as " right sides " is to be based on the orientation or positional relationship shown in the drawings, and is merely for convenience of describing this hair
Bright and simplified description, rather than the combination of indication or suggestion meaning or element must have a particular orientation, with specific orientation
Construction and operation, therefore be not considered as limiting the invention.In addition, during the description of the embodiment of the present invention, Suo Youtu
In the device positions relationship such as "upper", "lower", "front", "rear", "left", "right", using Fig. 1 as standard.
The present invention will be further described below with reference to the accompanying drawings:
As shown in figures 1 to 6 for the present embodiment provides a kind of star-like four throw switch of hilted broadsword, the star-like four throw switch packets of hilted broadsword
The microwave transmission component for including the substrate 1 for providing brace foundation and being arranged on the substrate 1.
As shown in Figure 1, 2, the substrate 1 is the low cube structure of conductivity, the material of substrate 1 be glass, ceramics and
High Resistivity Si, such conductivity is lower, ensure that low loss characteristic when transmitting radio frequency signal.
The microwave transmission component includes symmetrically arranged signal wire unit, the ground wire list that signal wire unit side is arranged in
Member and the driving electrodes 13 being arranged in below the signal wire unit.
The driving electrodes 13 are connected with lead 18.It is electric when applying driving to the driving electrodes 13 by the lead 18
When pressure, electrostatic force is generated between the cantilever beam 12 and the driving electrodes 13, so that cantilever beam 12 is towards 11 direction of contact
It bends and is contacted with contact 11, RF MEMS Switches are in the open state at this time；Drive is not applied in the driving electrodes 13
When dynamic voltage, the top electrode 11 is mutually disconnected with the contact 11, at this point, the RF MEMS Switches are in close state.
The signal wire unit includes: input signal cable 2, proximal port output signal line 3, far distance port output signal line 4, star
Type signal wire 8.
The input signal cable 2, the proximal port output signal line 3 and the far distance port output signal line 4 are respectively set
The surrounding on surface over the substrate, the input signal cable 2, the proximal port output signal line 3 and far distance port output
One end of signal wire 4 towards 1 center position of substrate is separately connected the star-like signal wire 8；
As shown in figure 3, the star-like signal wire 8 is an oblate disk body, extend in the peripheral side of the oblate disk body
Five bar shaped ports, the angle between adjacent bar shaped port is 72 °, constitutes tool there are four the bar shaped port that angle is 72 ° of angles,
What one of them was used to connect with input signal cable 2 is defined as signal wire input port, and with the signal wire input port two
The adjacent bar shaped port in side is defined as proximal port 9, and bar shaped end opposite with signal wire input port and adjacent with proximal port 9
Mouth is defined as far distance port 10.The proximal port 9 and far distance port 10 extend outward at least two along star-like 8 radial direction of signal wire
Contact 11, two contacts 11 are arranged in parallel；
As shown in fig. 6, the proximal port output signal line 3 and the far distance port output signal line 4 are close to star-like signal wire
A cantilever beam 12 is respectively arranged in 8 side, and described 12 one end of cantilever beam is fixed on 3 He of proximal port output signal line by anchor point 16
On the far distance port output signal line 4,13 other end of cantilever beam vacantly extends to the upper of 8 end of star-like signal wire
Side.Release hole array is provided on the cantilever beam 12.
The release hole array includes multiple relief holes 15 in array-like arrangement, and the release hole array includes 3-5 row,
6-10 column；15 diameter of relief hole is 8-10 μm, and distance is 15-25 μm between the close relief hole 15 of any two.
Signal wire input line 2 is directly connected to signal wire input port as described in Fig. 4,5, for external signal to be inputted,
The proximal port output signal line 3 is correspondingly arranged with the proximal port 9, and anchor point is being arranged close to one end of the proximal port 9
16, cantilever beam 12 is fixedly installed above the anchor point 16, the cantilever beam 12 is located at described close in contrast to one end of anchor point 16
The position directly above of the contact 11 of port 9；
The far distance port output signal line 4 is correspondingly arranged with the far distance port 10, and close to the one of the far distance port 10
End setting anchor point 16, is fixedly installed cantilever beam 12, the one end of the cantilever beam 12 in contrast to anchor point 16 above the anchor point 16
Positioned at the position directly above of the contact 11 of the far distance port 10；
At the following position directly that the upper surface of the substrate 1 corresponds to the cantilever beam 12, driving electrodes 13 are fixedly installed,
One layer of dielectric layer 14 is arranged towards the one side of cantilever beam 12 in the driving electrodes 13.It is electric when not applying driving in driving electrodes 13
Pressure, driving electrodes 13 do not act on, and cantilever beam 12 is separated with contact 11, and switch is in an off state.When driving voltage acts on drive
When on moving electrode 13, the effect generation electrostatic force of driving electrodes 13 makes cantilever beam 12, and deformation occurs, thus with electrode contact point 11
It is in contact, then switch is in opening state.
14 material of dielectric layer includes silicon nitride and hafnium oxide, and such material relative dielectric constant is higher, guarantees cantilever
The isolation of beam 12 and driving electrodes 13.
The ground wire unit includes: the first ground wire 5, the second ground wire 6, third ground wire 7.
Two first ground wires 5 are separately positioned on the angle of the input signal cable 2 and two proximal port output lines 3
Place, the surface location and institute being interpreted as between the corresponding lead 18 of the substrate 1 and input signal cable 2 in the present embodiment
First ground wire 5 can be arranged by stating the angular position between lead 18 and proximal port output line 3；
Two second ground wires are separately positioned on the angle of a proximal port output line 3 and a far distance port output line 4
Place, the surface location being interpreted as between the corresponding lead 18 of the substrate 1 and proximal port output line 3 in the present embodiment and
First ground wire 5 can be arranged in angular position between the lead 18 and far distance port output line 4；
The third signal wire is located at the angle of two far distance port output lines 4.
An air bridges 17 are each provided on first ground wire 5 and the second ground wire 6, the air bridges 17 pass through air bridges
Fulcrum 19 is mounted in the top of lead 18.
It is illustrated in figure 7 the insertion loss of designed switch proximal port.It can be seen that star-like four throw switch of hilted broadsword exists
In the frequency range of 0-18Ghz, the insertion loss of proximal port is about 0.76dB.
It is illustrated in figure 8 the isolation of designed switch proximal port.It can be seen that star-like four throw switch of hilted broadsword is in 0-
In the frequency range of 18Ghz, the isolation of proximal port is about 21.45dB.
It is illustrated in figure 9 the insertion loss of designed switch far distance port.It can be seen that star-like four throw switch of hilted broadsword exists
In the frequency range of 0-18Ghz, the insertion loss of far distance port is about 0.27dB.
It is as shown in Figure 10 the isolation of designed switch far distance port.It can be seen that star-like four throw switch of hilted broadsword is in 0-
In the frequency range of 18Ghz, the isolation of far distance port is about 18.65dB.
Using star-like hilted broadsword four-throw RF switch of the present invention, mainly by hub-and-spoke configuration power splitter and single-pole single-throw switch (SPST)
The advantages that combination is constituted, and has structure simple, small in size, and insertion loss is small.For microwave transmission angle, hub-and-spoke configuration function point
Isolation between each branch of device is more preferable, and the degree of balance is high.Thus the four throw switch Insertion Loss of hilted broadsword designed is smaller, each road amplitude and
Phase equalization is more preferable.Star-like four throw switch of hilted broadsword has four symmetrical cantilever beams, had not only reduced insertion loss but also had increased
Isolation, while also improving the service life of switch.There is stronger practicability in operating frequency range, it can be achieved that RF MEMS
The four-way of the highly integrated and DC-18GHz of switch gates.
There is apparent advantage compared with traditional four throw switch of hilted broadsword, star-like four throw switch of hilted broadsword has four cantilevers
The symmetrical structure of beam composition, had not only reduced insertion loss but also had increased isolation, and also enhanced service life and the microwave of switch in this
Performance.In 0-18GHz, there is superior practicability.The four-way gating that DC-18GHz can be achieved, realizes RF MEMS Switches
It is highly integrated.
Claims (10)
1. a kind of star-like hilted broadsword four-throw RF switch, which is characterized in that the star-like hilted broadsword four-throw RF switch includes:
At least one provides the substrate of support brace foundation；
The microwave transmission component of substrate surface is arranged at least one set；
The microwave transmission component includes the signal wire unit for being used for transmission signal, the ground wire list that signal wire unit side is arranged in
Member, the driving electrodes being arranged in below the signal wire unit；
The signal wire unit includes input signal cable, output signal line, star-like signal wire, and stating star-like signal wire is a disk
Body angularly extends at least five bar shaped ports in the peripheral side of the disc, and the bar shaped port includes for inputting
Signal wire connection signal wire input port, adjacent to the proximal port of signal input port two sides and relative to signal input part
The far distance port of mouth；
The signal wire input port, proximal port and far distance port are equiangularly arranged in disc peripheral side, constitute radial star
Type structure, the signal input port are oppositely arranged with input signal cable, the proximal port, far distance port respectively with output signal line
It is oppositely arranged.
2. a kind of star-like hilted broadsword four-throw RF switch according to claim 1, which is characterized in that the output signal line corresponds to star-like
Signal wire is defined as proximal port output signal line, far distance port output signal line；
The proximal port output signal line, far distance port output signal line correspond to the proximal port and far distance port is respectively arranged to
Trigger the cantilever beam of folding；
Described cantilever beam one end is by being fixedly installed the proximal port output signal line, far distance port output signal line by anchor point
On, the other end vacantly extends to the top of the star-like signal thread end.
3. a kind of star-like hilted broadsword four-throw RF switch according to claim 1, which is characterized in that the star-like signal wire is one flat
Disc extends five bar shaped ports in the peripheral side of the oblate disk body, and the angle between adjacent bar shaped port is
72 °, constituting tool, there are four the bar shaped ports that angle is 72 ° of angles.
4. according to a kind of star-like hilted broadsword four-throw RF switch of claim 3, which is characterized in that the signal wire input port, close
Port and far distance port extend outward at least two contacts along star-like signal wire radial direction, and two contacts are parallel to each other
Setting, and it is always positioned at the cantilever beam lower position.
5. according to a kind of star-like hilted broadsword four-throw RF switch of claim 2, which is characterized in that be provided with release on the cantilever beam
Hole array.
6. according to a kind of star-like hilted broadsword four-throw RF switch of claim 2, which is characterized in that be provided on the substrate for connecting
The lead of external circuit is connect, the overhead positions that the substrate corresponds to the cantilever beam are fixedly installed driving electrodes；
The driving electrodes are connect with the lead.
7. according to a kind of star-like hilted broadsword four-throw RF switch of claim 6, which is characterized in that the driving electrodes are towards cantilever beam
One side be arranged one layer of silicon nitride medium layer.
8. according to a kind of star-like hilted broadsword four-throw RF switch of claim 2, which is characterized in that the ground wire unit includes: first
Ground wire, the second ground wire, third ground wire；
Two first ground wires are separately positioned on the angle of the input signal cable and two proximal port output lines；
Two second ground wires are separately positioned on the angle of a proximal port output line and a far distance port output line；
The third signal wire is located at the angle of two far distance port output lines.
9. according to a kind of star-like hilted broadsword four-throw RF switch of claim 8, which is characterized in that the first ground wire restocking has one
Air bridges, the air bridges connection are located at the first ground wire of lead two sides；
The second ground wire restocking has an air bridges, and the air bridges connection is located at the second ground wire of lead two sides.
10. according to a kind of star-like hilted broadsword four-throw RF switch of claim 5, which is characterized in that the release hole array includes more
A relief hole in array-like arrangement, the release hole array include 3-5 row, 6-10 column；
The release pore diameter size is 8-10 μm, and distance is 15-25 μm between the adjacent relief hole of any two.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110706981A (en) * | 2019-10-21 | 2020-01-17 | 中北大学 | Radio frequency MEMS four-way snake-shaped delayer combined with single-pole four-throw switch |
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| CN107437483A (en) * | 2017-07-24 | 2017-12-05 | 中北大学 | A kind of board-type single-pole single-throw switch (SPST) single-chip integration attenuator |
| US20190115659A1 (en) * | 2017-10-18 | 2019-04-18 | General Electric Company | High impedance rf mems transmission devices and method of making the same |
| CN108508392A (en) * | 2018-06-21 | 2018-09-07 | 中北大学 | A kind of four beam type Electronic Calibration part of T-type switch |
| CN210710730U (en) * | 2019-04-28 | 2020-06-09 | 中北大学 | Star type single-pole four-throw radio frequency switch |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110706981A (en) * | 2019-10-21 | 2020-01-17 | 中北大学 | Radio frequency MEMS four-way snake-shaped delayer combined with single-pole four-throw switch |
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