CN110125982A - Micro-manipulating robot three-degree-of-freedom motion control system motion profile orthogonality measurement method - Google Patents
Micro-manipulating robot three-degree-of-freedom motion control system motion profile orthogonality measurement method Download PDFInfo
- Publication number
- CN110125982A CN110125982A CN201910456218.0A CN201910456218A CN110125982A CN 110125982 A CN110125982 A CN 110125982A CN 201910456218 A CN201910456218 A CN 201910456218A CN 110125982 A CN110125982 A CN 110125982A
- Authority
- CN
- China
- Prior art keywords
- motion profile
- orthogonality
- axis
- coordinate
- point
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000691 measurement method Methods 0.000 title claims abstract description 11
- 238000000034 method Methods 0.000 claims abstract description 11
- 238000012937 correction Methods 0.000 claims abstract description 9
- 238000006073 displacement reaction Methods 0.000 claims description 61
- 239000013598 vector Substances 0.000 claims description 54
- 238000005259 measurement Methods 0.000 claims description 17
- 238000012544 monitoring process Methods 0.000 claims description 17
- 238000013507 mapping Methods 0.000 claims description 7
- 230000000631 nonopiate Effects 0.000 claims description 4
- 230000015572 biosynthetic process Effects 0.000 claims description 3
- 238000004088 simulation Methods 0.000 claims description 3
- 235000013399 edible fruits Nutrition 0.000 claims 1
- 239000000729 antidote Substances 0.000 abstract description 3
- 238000010586 diagram Methods 0.000 description 8
- 238000013519 translation Methods 0.000 description 3
- 238000004364 calculation method Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000000520 microinjection Methods 0.000 description 1
- 238000002324 minimally invasive surgery Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
- B25J19/0095—Means or methods for testing manipulators
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/16—Programme controls
- B25J9/1656—Programme controls characterised by programming, planning systems for manipulators
- B25J9/1664—Programme controls characterised by programming, planning systems for manipulators characterised by motion, path, trajectory planning
Landscapes
- Engineering & Computer Science (AREA)
- Robotics (AREA)
- Mechanical Engineering (AREA)
- Numerical Control (AREA)
- Manipulator (AREA)
Abstract
The present invention relates to a kind of micro-manipulating robot three-degree-of-freedom motion control system motion profile orthogonality measurement methods, more particularly to the motion profile orthogonality appraisal procedure and motion profile nonorthogonality antidote using kinetic control system.This method mainly comprises the steps that building motion profile orthogonality measuring system, and the analysis of normal orthogonal referential orthogonality acquires motion profile, motion profile straight line fitting, the assessment of motion profile orthogonality, the correction of motion profile nonorthogonality.The present invention solves the problems, such as that the motion profile of kinetic control system is non-orthogonal, realizes the accurate positionin under quadrature condition, and the positioning accuracy of micro-manipulating robot has been effectively ensured.
Description
Technical field
The present invention relates to a kind of micro-manipulating robot three-degree-of-freedom motion control system motion profile orthogonality measurement method,
More particularly to using kinetic control system motion profile orthogonality appraisal procedure and motion profile nonorthogonality antidote,
It realizes the accurate positionin under quadrature condition, the positioning accuracy of micro-manipulating robot is effectively ensured.
Background technique
Micro-manipulating robot is within the scope of micron or sub-micrometer precision, to micro- within the scope of micron to sub-mm size
The operating system that wisp (such as biological tissue, cell, MEMS micro-structure, MEMS) is grabbed, shifted, assembled,
For the multiclass such as micro assemby, microinjection, bioengineering, Minimally Invasive Surgery field, it is usually by vision system, micromanipulator and movement
Control system three parts composition.The vision system constructed based on optical stereo microscope forms one kind in conjunction with microoperation
Special micro-manipulating robot, this robot carry out micromanipulator and the object to be operated by stereomicroscope vision system
Positioning and tracking, obtain the location information of the object to be operated, then mobile by kinetic control system driving micromanipulator, complete each
Kind microoperation precise operation.
Kinetic control system is the significant components of micro-manipulating robot, the main motion control and precision for realizing micromanipulator
Positioning, performance affect the positioning accuracy of micro-manipulating robot, it generally includes multiple freedom degrees, mainly freely by translation
Degree and rotary freedom are constituted, and the kinetic control system of three translation freedoms is relatively conventional type.Three translation freedoms
The performance indicator of kinetic control system mainly includes three classes: assembly orthogonality, the motion profile orthogonality of positioning accuracy and three axis.
Assembly orthogonality can be assessed by the method for angle measurement, and the assessment of positioning accuracy can be using laser interference ranging
Mode realizes that these two types of Indexes Comparisons are easy measurement;The assessment of the motion profile orthogonality of three axis is more difficult, in existing micro- behaviour
It is often ignored in studying, but this kind of index is an important factor for influencing micro-manipulating robot precision positioning.Sun Yanbo etc.
(2013) evaluation index and test method are proposed for the assembly orthogonality of kinetic control system, mainly measurement motion control
The depth of parallelism, verticality and the straightness of system assembly.In actual use, although kinetic control system has dress well
With orthogonality, but it cannot be guaranteed that the motion profile of three axis has good orthogonality, i.e. the motion profile of three axis not necessarily meets
Absolute orthogonality relation.If the motion profile nonorthogonality of kinetic control system is larger, even if the object that vision is calculated is empty
Between point coordinate it is how accurate again, cannot guarantee that the accuracy of object space positioning, lead to the physical location variable quantity of micromanipulator
It is inconsistent with calculating position variable quantity, the shadow of the deviation sizes of two class positions by the motion profile orthogonality of kinetic control system
It rings.In view of the above problems, the invention proposes a kind of micro-manipulating robot three-degree-of-freedom motion control system motion profile is orthogonal
Property measurement method, for micro-manipulating robot, the present invention has special meaning, and show: (1) laser displacement established is fixed
Position system can be used as normal orthogonal referential, can provide necessary base for kinetic control system motion profile orthogonality measurement
Plinth data;(2) invent motion profile orthogonality measurement method be micro-manipulating robot kinetic control system motion profile just
The property handed over assessment provides foundation;(3) micro-manipulating robot can be effectively ensured in the motion profile nonorthogonality antidote established
Positioning accuracy.
Summary of the invention
The present invention proposes micro-manipulating robot three-degree-of-freedom motion control system motion profile orthogonality measurement method, mesh
Be to be to carry out assessment and the correction of motion profile nonorthogonality by the motion profile orthogonality to kinetic control system, realize
The positioning accuracy of micro-manipulating robot is effectively ensured in accurate positionin under quadrature condition.
Micro-manipulating robot three-degree-of-freedom motion control system motion profile orthogonality measurement method according to the present invention,
Based on laser displacement measurement principle, motion profile orthogonality measuring system is constructed, the normal orthogonal referential of auxiliary is established, established
Emulation mode carries out the analysis of normal orthogonal referential orthogonality, acquires motion profile in normal orthogonal referential, to movement rail
Mark carries out straight line fitting, then establishes motion profile orthogonality appraisal procedure, finally moves to non-orthogonal motion profile
The correction of track nonorthogonality, realizes the accurate positionin under quadrature condition.The micro-manipulating robot three-degree-of-freedom motion control
System motion track orthogonality measurement method the following steps are included:
1) motion profile orthogonality measuring system is constructed
There is the grating scale for closed loop precision control kinematic axis on three kinematic axis of kinetic control system respectively.In order to adopt
Collect kinematic axis motion profile, on kinetic control system dispose a standard gauge block, three faces for using it adjacent as be displaced
Monitoring surface is measured, the normal of three displacement monitoring surfaces is respectively parallel to three kinematic axis.The center of three laser displacement sensors
Axis meets at any and the displacement perpendicular to corresponding displacement monitoring surface, for measurement standard gauge block.Three have orthogonal pass
Normal orthogonal referential of the laser displacement positioning system that the laser displacement sensor of system is established as auxiliary is joined in normal orthogonal
Examine be middle description standard gauge block motion profile.
2) normal orthogonal referential orthogonality is analyzed
It is influenced by assembly factor, the central axis of three laser displacement sensors not necessarily meets absolute orthogonal pass
System, the non-orthogonal normal orthogonal referential of foundation, which measures motion profile orthogonality to exist, to be influenced, by standard gauge block and laser
How the rotation angle of displacement sensor, which influences motion profile orthogonality measurement, is established emulation mode, is used to analytical standard orthogonal reference
It is the influence that orthogonality measures motion profile orthogonality.Simulation result shows: the rotation of standard gauge block and laser displacement sensor
Corner can ignore the influence that normal orthogonal referential orthogonality measures motion profile orthogonality when within 10 degree.Therefore
Rotation angle is adjusted within 10 degree when assembling standard gauge block and laser displacement sensor, subsequently into step 3).
3) motion profile is acquired
Standard gauge block is in the public useful space of laser displacement sensor respectively in the direction for being parallel to three kinematic axis
On it is mobile at equal intervals generate discrete loci point, three motion profiles of formation represent the real motion track of three kinematic axis,
Three motion profiles are just used as three reference axis of motion profile coordinate system (O-XYZ).Three laser displacement sensors can be surveyed
Standard gauge block displacement, certain moment three obtained displacement as standard gauge block in normal orthogonal referential currently from
Dissipate the space coordinate vector of tracing point.
4) motion profile straight line fitting
It is quasi- that straight line is carried out to the motion profile that space coordinate vector of the discrete loci point in normal orthogonal referential represents
It closes, if the distance of discrete loci point to fitting a straight line is greater than 0.02mm, then it is assumed that be gross error, this some discrete track
Point is removed from set, carries out straight line fitting again.It is final to obtain motion profile linear equation and vector parameters, as move rail
The linear equation and vector parameters of mark coordinate system X-axis, Y-axis and Z axis.
5) motion profile orthogonality is assessed
The calculating of vector orthogonality is carried out according to movement locus vector parameter, the angle between motion profile is obtained, as moves
Angle between trajectory coordinates system X-axis, Y-axis and Z axis assesses motion profile orthogonality according to corner dimension, and assessment motion profile is just
The judgment criteria for the property handed over are as follows: set angle threshold value is 0.3 degree, and three angles are poor with 90 degree of works respectively, when the difference between them
When being respectively less than equal to angle threshold, then meet orthogonality condition, motion profile is orthogonal;If the difference between them has any one
When greater than angle threshold, then it is unsatisfactory for orthogonality condition, motion profile is nonopiate, enters step 6) progress motion profile nonorthogonality
Correction.
6) motion profile nonorthogonality is corrected
The correction of motion profile nonorthogonality is carried out to non-orthogonal motion profile, a virtual orthographic coordinate system is set, is built
Mapping relations between vertical virtual orthographic coordinate system and non-orthogonal motion profile coordinate system, it is known that any point is virtual in space
Coordinate vector in orthogonal coordinate system, according to mapping relations acquire coordinate of this in non-orthogonal motion profile coordinate system to
Amount can be such that kinetic control system accurate motion in non-orthogonal motion profile coordinate system realizes under quadrature condition to the point
It is accurately positioned, the positioning accuracy of micro-manipulating robot is effectively ensured.
Detailed description of the invention
Fig. 1 is micro-manipulating robot three-degree-of-freedom motion control system motion profile orthogonality measurement side of the present invention
The flow chart of method
Fig. 2 is motion profile orthogonality measuring system of the present invention
Fig. 3 is acquisition movement locus schematic diagram of the present invention
Fig. 4 is motion profile straight line fitting schematic diagram of the present invention
Fig. 5 is that motion profile orthogonality of the present invention assesses schematic diagram
Fig. 6 is that motion profile nonorthogonality of the present invention corrects schematic diagram
Description of symbols in attached drawing:
S1, building motion profile orthogonality measuring system
S2, the analysis of normal orthogonal referential orthogonality
S3, acquisition motion profile
S4, motion profile straight line fitting
S51, the assessment of motion profile orthogonality
S52, motion profile are orthogonal
S6, motion profile are nonopiate
S71, the correction of motion profile nonorthogonality
Coordinate vector in S72, virtual orthographic coordinate system
Coordinate vector in S73, motion profile coordinate system
Accurate positionin under S8, realization quadrature condition
1, kinetic control system
2, X kinematic axis
3, Y motion axis
4, Z kinematic axis
5, X kinematic axis grating scale
6, Y motion axis grating scale
7, Z kinematic axis grating scale
8, motion profile coordinate system
9, standard gauge block
10, X-axis monitoring surface
11, Y-axis monitoring surface
12, Z axis monitoring surface
13, X-axis laser displacement sensor
14, Y-axis laser displacement sensor
15, Z axis laser displacement sensor
16, normal orthogonal referential
17, computer
Angle between α, X-axis and Y-axis
Angle between β, X-axis and Z axis
Angle between γ, Y-axis and Z axis
Specific embodiment
The present invention is further elaborated now in conjunction with attached drawing.Fig. 1 be micro-manipulating robot of the present invention three from
By the flow chart of degree kinetic control system motion profile orthogonality measurement method, micro-manipulating robot three-degree-of-freedom motion control system
Unite motion profile orthogonality measurement method the following steps are included:
1, motion profile orthogonality measuring system is constructed
Fig. 2 is motion profile orthogonality measuring system, and three freedom of motion of kinetic control system 1 respectively correspond X fortune
Moving axis 2, Y motion axis 3 and Z kinematic axis 4 are respectively provided with X kinematic axis grating scale 5, Y motion axis grating scale 6 on three kinematic axis
With Z kinematic axis grating scale 7, resolution ratio is 0.1 micron, controls kinematic axis for closed loop precision.In order to acquire the movement of kinematic axis
Track disposes a standard gauge block 9, with its adjacent X-axis monitoring surface 10, Y-axis monitoring surface 11 and Z on kinetic control system 1
Shaft monitoring face 12 is used as displacement monitoring surface, they have good flatness and orthogonality relation, three displacement monitoring surfaces
Normal is respectively parallel to three kinematic axis.Use X-axis laser displacement sensor 13, Y-axis laser displacement sensor 14 and Z axis laser
Displacement sensor 15 monitors the displacement of three displacement monitoring surfaces respectively, their central axis is met at a little and perpendicular to correspondence
Displacement monitoring surface, three with orthogonality relation laser displacement sensors establish laser displacement positioning systems as auxiliary
Normal orthogonal referential 16, the motion profile of description standard gauge block 9 in normal orthogonal referential 16.
2, normal orthogonal referential orthogonality is analyzed
It is influenced by assembly factor, the central axis of three laser displacement sensors not necessarily meets absolute orthogonal pass
System, the non-orthogonal normal orthogonal referential of foundation, which measures motion profile orthogonality to exist, to be influenced, by standard gauge block and laser
How the rotation angle of displacement sensor, which influences motion profile orthogonality measurement, is established emulation mode, is used to analytical standard orthogonal reference
It is the influence that orthogonality measures motion profile orthogonality.
Emulation mode specifically: three motion profile l of preset standard gauge blocku1、lv1、lw1Unit vector and discrete loci
Point, the angle between motion profile constitute angle vector Λt.Preset standard gauge block is around U axis, the rotation angle of V axis and W axis and 8 tops
The initial coordinate vector of point calculates the coordinate vector on 8 vertex after standard gauge block rotation.The central axis of laser displacement sensor
lA、lB、lCRespectively with certain point M on axisA、MB、MCSmall angle rotation as a reference point, preset the corresponding unit of three axis to
Amount and point MA、MB、MCCoordinate vector.
Standard gauge block is to preset the posture of rotation angle respectively along three motion profile lu1、lv1、lw1It is mobile, successively reach
The position of default discrete loci point, lA、lB、lCThe intersection point generated with corresponding displacement monitoring surface is respectively NA、NB、NC, calculate
The space coordinate vector of current location intersection point, the as measured value of discrete loci point obtain corresponding straight line l by straight line fittingu2、
lv2、lw2Unit vector, then carry out the calculating of vector orthogonality, obtain lu2、lv2、lw2Between angle constitute angle vector Λ.
ΛtFor preset value, Λ is measured value, their difference is transported after representing the rotation angle that standard gauge block and laser displacement sensor is added
The variation of dynamic rail mark orthogonality measurement result, measures motion profile orthogonality for analytical standard orthogonal reference system's orthogonality
It influences.Simulation result shows: the rotation angle of standard gauge block and laser displacement sensor is when within 10 degree, preset value and measured value
Maximum difference be 0.0967 degree, the influence that normal orthogonal referential orthogonality measures motion profile orthogonality can be ignored.
Therefore rotation angle is adjusted within 10 degree when assembling standard gauge block and laser displacement sensor, subsequently into step 3.
3, motion profile is acquired
Fig. 3 is acquisition movement locus schematic diagram, and computer 17 controls kinetic control system 1, makes standard gauge block 9 respectively flat
Row generates discrete loci point in mobile at equal intervals on the direction of three kinematic axis, and three motion profiles of formation represent three fortune
The real motion track of moving axis, three motion profiles are just used as the X-axis, Y-axis and Z axis of motion profile coordinate system 8.Three laser positions
Displacement sensor can measure the displacement of standard gauge block 9, certain moment three obtained displacement as standard gauge block 9 standard just
Hand over the space coordinate vector of current discrete tracing point in referential 16.Discrete loci point of the standard gauge block 9 in X-axis standard just
It hands in referential 16 and corresponds to space coordinate vector { SAN, { SANThree components respectively correspond three laser displacement sensors and survey
Measure displacement of the standard gauge block 9 at each discrete loci point.Similarly, discrete loci point of the standard gauge block 9 in Y-axis and Z axis
Space coordinate vector { S is corresponded in normal orthogonal referential 16BMAnd { SCK}.The sample of these three space coordinate vectors building
As the basic data of motion profile orthogonality assessment, it is saved in computer 17.
4, motion profile straight line fitting
Fig. 4 is motion profile straight line fitting schematic diagram, to space coordinate of the discrete loci point in normal orthogonal referential
Vector { SAN}、{SBMAnd { SCKThe motion profile that represents carries out straight line fitting, if discrete loci point is to the distance of fitting a straight line
Greater than 0.02mm, then it is assumed that be gross error, this some discrete tracing point is removed from set, carries out straight line fitting again.
It is final to obtain motion profile linear equation and vector parameters, as the linear equation of motion profile coordinate system X-axis, Y-axis and Z axis and
Vector parameters.In normal orthogonal referential, space coordinate vector { SAN}、{SBMAnd { SCKCorresponding motion profile straight line is quasi-
Close general formula are as follows:
SLFM indicates a kind of motion profile line fitting method, and input quantity is { SAN}、{SBMAnd { SCK, output quantity is
It is fitted obtained movement locus vector parameter Pa、PbAnd Pc。
5, motion profile orthogonality is assessed
Fig. 5 is that motion profile orthogonality assesses schematic diagram, the angle difference between X-axis and Y-axis, X-axis and Z axis, Y-axis and Z axis
It is indicated with α, β, γ.According to movement locus vector parameter, motion profile unit vector n is calculateda、nbAnd nc, then carrying out vector just
The property handed over calculates, and obtains the value of α, β, γ, vector orthogonality calculation formula are as follows:
Motion profile orthogonality is assessed according to the size of α, β, γ, assesses the judgment criteria of motion profile orthogonality are as follows:
T in formulaabcFor angle threshold, 0.3 degree is taken.When three conditions are set up in formula, then meet orthogonality condition, moves
The orthogonal S52 in track;If there is any one condition invalid in formula, it is unsatisfactory for orthogonality condition, the nonopiate S6 of motion profile, into
Enter step 6 and carries out the correction of motion profile nonorthogonality.
6, motion profile nonorthogonality is corrected
Motion profile nonorthogonality is carried out to non-orthogonal motion profile and corrects S71.Fig. 6 rectifys for motion profile nonorthogonality
Positive schematic diagram, is arranged a virtual orthographic coordinate system (O-XGH), and motion profile coordinate system and virtual orthographic coordinate system possess public
Coordinate origin O and reference axis X, the coordinate plane XOY and XOG of Two coordinate system be overlapped, ∠ XOY=α, ∠ XOZ=β, ∠ YOZ=
γ.Establish the mapping relations between Two coordinate system, it is known that coordinate vector of any point P in virtual orthographic coordinate system in space
rp,gh=(xp,gh,yp,gh,zp,gh)T, acquiring coordinate vector of the point P in motion profile coordinate system is rp,yz=(xp,yz,yp,yz,
zp,yz)T。
The parallel lines that point P does H axis are crossed, meet at subpoint P with XOG plane1, the parallel lines that point P does Z axis are crossed, with plane XOY
Meet at subpoint P11.From point P11Draw vertical line to G axis, intersection point is point P13, line segment P11P13Point P is met at Y-axis12, point P13And P12Point
It Wei not point P11Subpoint on G axis and Y-axis.It crosses point P and is line segment OP11Parallel lines, meet at subpoint P with Z axis7。
Unit vector of the Y-axis in virtual orthographic coordinate system is ny,gh=(cos α, sin α, 0)T, Z axis is in virtual orthographic seat
Unit vector in mark system is nz,gh=(cos β, cos βz,gh,cosγz,gh)T, returned according to dot product formula and unit vector
One change condition can acquire cos βz,ghWith cos γz,gh.In right angled triangle P11PP1In have zp,yz=zp,gh/cosγz,ghAnd it is known
zp7,yz=zp,yz, then can be according to rp7,gh=zp7,yz·nz,ghAcquire rp7,gh, rp7,ghFor point P7Seat in virtual orthographic coordinate system
Mark vector.Point P11Coordinate vector in virtual orthographic coordinate system is rp11,gh, the coordinate vector in motion profile coordinate system is
rp11,yz, in right angled triangle P12OP13It is middle that following formula can be obtained according to geometrical relationship:
Point P11It is located at the subpoint of XOY plane in motion profile coordinate system for point P, r can be established by above formulap,ghWith rp,yzBetween
Mapping relations:
According to mapping relations, so that it may by the coordinate vector r of virtual orthographic coordinate system midpoint Pp,ghS72 calculates it and corresponds to
Coordinate vector r in motion profile coordinate systemp,yzS73, kinetic control system is according to rp,yzPoint P can be accurately moved to, it is real
Accurate positionin S8 under existing quadrature condition, is effectively ensured the positioning accuracy of micro-manipulating robot.
It is obvious to those skilled in the art that the present invention can make a variety of improvements and changes, as long as falling into institute
In attached claims and its equivalent range, the present invention just covers such modifications and variations of the invention.
Claims (1)
1. micro-manipulating robot three-degree-of-freedom motion control system motion profile orthogonality measurement method, it is characterised in that: be based on
Laser displacement measurement principle constructs motion profile orthogonality measuring system, establishes the normal orthogonal referential of auxiliary, establishes emulation
Method carry out normal orthogonal referential orthogonality analysis, acquire motion profile in normal orthogonal referential, to motion profile into
Then row straight line fitting establishes motion profile orthogonality appraisal procedure, finally carry out motion profile to non-orthogonal motion profile
Nonorthogonality correction, realizes the accurate positionin under quadrature condition, specifically includes the following steps:
1) motion profile orthogonality measuring system is constructed
There is the grating scale for closed loop precision control kinematic axis on three kinematic axis of kinetic control system respectively;In order to acquire fortune
The motion profile of moving axis, disposes a standard gauge block on kinetic control system, and three faces for using it adjacent are supervised as displacement
Survey face, the normal of three displacement monitoring surfaces are respectively parallel to three kinematic axis;The central axis of three laser displacement sensors
Meet at any and the displacement perpendicular to corresponding displacement monitoring surface, for measurement standard gauge block;Three have orthogonality relation
Normal orthogonal referential of the laser displacement positioning system that laser displacement sensor is established as auxiliary, in normal orthogonal referential
The motion profile of middle description standard gauge block;
2) normal orthogonal referential orthogonality is analyzed
It is influenced by assembly factor, the central axis of three laser displacement sensors not necessarily meets absolute orthogonality relation, builds
Vertical non-orthogonal normal orthogonal referential, which measures motion profile orthogonality to exist, to be influenced, and standard gauge block and laser displacement are passed
How the rotation angle of sensor, which influences motion profile orthogonality measurement, is established emulation mode, and for analytical standard orthogonal reference, system is orthogonal
Property to motion profile orthogonality measurement influence;
Three motion profiles and discrete loci point of preset standard gauge block, the angle between motion profile constitute angle vector Λt, so
The rotation angle of preset standard gauge block and laser displacement sensor again afterwards;Standard gauge block is to preset the posture of rotation angle respectively along pre-
If motion profile is mobile, the space coordinate vector of the intersection point of laser displacement sensor central axis and displacement monitoring surface is calculated,
The as measured value of discrete loci point is calculated by straight line fitting and vector orthogonality, obtains what angle between three straight lines was constituted
Angle vector Λ;ΛtFor preset value, Λ is measured value, their difference, which represents, is added standard gauge block and laser displacement sensor
Rotation angle after motion profile orthogonality measurement result variation, be used to analytical standard orthogonal reference system orthogonality to motion profile
The influence of orthogonality measurement;Simulation result shows: the rotation angle of standard gauge block and laser displacement sensor is when within 10 degree, in advance
If the maximum difference of value and measured value is 0.0967 degree, ignores normal orthogonal referential orthogonality and motion profile orthogonality is measured
Influence;Therefore rotation angle is adjusted within 10 degree when assembling standard gauge block and laser displacement sensor, subsequently into step
It is rapid 3);
3) motion profile is acquired
Standard gauge block is in the public useful space of laser displacement sensor respectively on the direction for being parallel to three kinematic axis etc.
Interval is mobile to generate discrete loci point, and three motion profiles of formation represent the real motion track of three kinematic axis, and three
Motion profile is just used as three reference axis of motion profile coordinate system (O-XYZ);Three laser displacement sensors measure standard volume
The displacement of block, certain moment three obtained displacement current discrete tracing point in normal orthogonal referential as standard gauge block
Space coordinate vector;
4) motion profile straight line fitting
The motion profile represented to space coordinate vector of the discrete loci point in normal orthogonal referential carries out straight line fitting, such as
Fruit discrete loci point to fitting a straight line distance be greater than 0.02mm, then it is assumed that be gross error, this some discrete tracing point from
It is removed in set, carries out straight line fitting again;Final to obtain motion profile linear equation and vector parameters, as motion profile is sat
The linear equation and vector parameters of mark system X-axis, Y-axis and Z axis;
5) motion profile orthogonality is assessed
The calculating of vector orthogonality is carried out according to movement locus vector parameter, obtains the angle between motion profile, as motion profile
Angle between coordinate system X-axis, Y-axis and Z axis assesses motion profile orthogonality according to corner dimension, assesses motion profile orthogonality
Judgment criteria are as follows: set angle threshold value be 0.3 degree, three angles are poor with 90 degree of works respectively, when the difference between them is small
When being equal to angle threshold, then meet orthogonality condition, motion profile is orthogonal;If the difference between them has any one to be greater than
When angle threshold, then it is unsatisfactory for orthogonality condition, motion profile is nonopiate, enters step 6) progress motion profile nonorthogonality and rectifys
Just;
6) motion profile nonorthogonality is corrected
The correction of motion profile nonorthogonality is carried out to non-orthogonal motion profile;One virtual orthographic coordinate system (O-XGH) is set,
Motion profile coordinate system and virtual orthographic coordinate system possess public coordinate origin O and reference axis X, the coordinate plane of Two coordinate system
XOY and XOG is overlapped, and ∠ XOY=α, ∠ XOZ=β, ∠ YOZ=γ are established between virtual orthographic coordinate system and motion profile coordinate system
Mapping relations:
In formula, rp,yz=(xp,yz,yp,yz,zp,yz)T, xp,yzFor coordinate of the point P in O-XYZ coordinate system X-axis, yp,yzIt is point P in O-
Coordinate in XYZ coordinate system Y-axis, zp,yzFor coordinate of the point P on O-XYZ coordinate system Z axis;rp,gh=(xp,gh,yp,gh,zp,gh)T,
xp,ghFor coordinate of the point P in O-XGH coordinate system X-axis, yp,ghFor coordinate of the point P on O-XGH coordinate system G axis, zp,ghFor point P
Coordinate on O-XGH coordinate system H axis;nz,gh=(cos β, cos βz,gh,cosγz,gh)TIt is Z axis in O-XGH coordinate system
Unit vector, cos βz,ghFor the cosine value of ∠ ZOG, cos γz,ghFor the cosine value of ∠ ZOH;
According to mapping relations, by the coordinate vector r of virtual orthographic coordinate system midpoint Pp,ghIt is calculated to correspond in motion profile coordinate
Coordinate vector r in systemp,yz, kinetic control system is according to rp,yzAccurately move to point P.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201910456218.0A CN110125982B (en) | 2019-05-29 | 2019-05-29 | Method for measuring motion trajectory orthogonality of three-degree-of-freedom motion control system of micro-operation robot |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201910456218.0A CN110125982B (en) | 2019-05-29 | 2019-05-29 | Method for measuring motion trajectory orthogonality of three-degree-of-freedom motion control system of micro-operation robot |
Publications (2)
Publication Number | Publication Date |
---|---|
CN110125982A true CN110125982A (en) | 2019-08-16 |
CN110125982B CN110125982B (en) | 2020-09-25 |
Family
ID=67582576
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201910456218.0A Expired - Fee Related CN110125982B (en) | 2019-05-29 | 2019-05-29 | Method for measuring motion trajectory orthogonality of three-degree-of-freedom motion control system of micro-operation robot |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN110125982B (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112720469A (en) * | 2020-12-18 | 2021-04-30 | 北京工业大学 | Zero point calibration method for three-axis translational motion system by microscopic stereo vision |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101006346A (en) * | 2004-08-17 | 2007-07-25 | 皇家飞利浦电子股份有限公司 | Method and apparatus for calibration |
JP2014076498A (en) * | 2012-10-09 | 2014-05-01 | Sinfonia Technology Co Ltd | Articulated robot and semiconductor wafer carrier device |
JP6021036B1 (en) * | 2015-12-26 | 2016-11-02 | 晨之介 中島 | 3D scanning device and 3D positioning device |
CN106312397A (en) * | 2016-10-12 | 2017-01-11 | 华南理工大学 | Laser vision guided automatic welding track tracking system and method |
CN106705956A (en) * | 2017-02-28 | 2017-05-24 | 南京工程学院 | Rapid industrial robot tail end pose measuring device and measuring method thereof |
CN108393929A (en) * | 2018-02-01 | 2018-08-14 | 大连理工大学 | A kind of mechanical arm positional precision measuring device and method |
-
2019
- 2019-05-29 CN CN201910456218.0A patent/CN110125982B/en not_active Expired - Fee Related
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101006346A (en) * | 2004-08-17 | 2007-07-25 | 皇家飞利浦电子股份有限公司 | Method and apparatus for calibration |
JP2014076498A (en) * | 2012-10-09 | 2014-05-01 | Sinfonia Technology Co Ltd | Articulated robot and semiconductor wafer carrier device |
JP6021036B1 (en) * | 2015-12-26 | 2016-11-02 | 晨之介 中島 | 3D scanning device and 3D positioning device |
CN106312397A (en) * | 2016-10-12 | 2017-01-11 | 华南理工大学 | Laser vision guided automatic welding track tracking system and method |
CN106705956A (en) * | 2017-02-28 | 2017-05-24 | 南京工程学院 | Rapid industrial robot tail end pose measuring device and measuring method thereof |
CN108393929A (en) * | 2018-02-01 | 2018-08-14 | 大连理工大学 | A kind of mechanical arm positional precision measuring device and method |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112720469A (en) * | 2020-12-18 | 2021-04-30 | 北京工业大学 | Zero point calibration method for three-axis translational motion system by microscopic stereo vision |
Also Published As
Publication number | Publication date |
---|---|
CN110125982B (en) | 2020-09-25 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN107042528B (en) | A kind of Kinematic Calibration system and method for industrial robot | |
CN101203730B (en) | Apparatus and method for relocating an articulating-arm coordinate measuring machine | |
Chao et al. | Calibration of laser beam direction for optical coordinate measuring system | |
CN109304730A (en) | A kind of robot kinematics' parameter calibration method based on laser range finder | |
US20120029870A1 (en) | Method and system for automatically performing a study of a multi-dimensional space | |
CN105424024B (en) | A kind of position and orientation scaling method of the extraterrestrial target based on total powerstation | |
Yan et al. | A three degree-of-freedom optical orientation measurement method for spherical actuator applications | |
CN105678076A (en) | Method and device for point cloud measurement data quality evaluation optimization | |
Bhutani et al. | Novel design solution to high precision 3 axes translational parallel mechanism | |
CN106671081B (en) | A kind of lower-mobility robot kinematics calibration method based on monocular vision | |
CN110125982A (en) | Micro-manipulating robot three-degree-of-freedom motion control system motion profile orthogonality measurement method | |
Yang et al. | A cost-effective non-orthogonal 3D measurement system | |
Ma et al. | Precision pose measurement of an object with flange based on shadow distribution | |
CN110900608B (en) | Robot kinematics calibration method based on optimal measurement configuration selection | |
Lu et al. | Working pose measurement and quality evaluation of rotary drilling rig based on laser tracker | |
Easton et al. | A gaussian error model for triangulation-based pose estimation using noisy landmarks | |
CN205466311U (en) | Calibration system of robot based on terminal incomplete coordinate information | |
CN205497483U (en) | Calibration system of robot | |
CN113834500B (en) | Method and system for calibrating track sensor by using multi-degree-of-freedom equipment | |
Paijens et al. | Measurement of the positions of light sensors on a mobile frame being tracked with a lighthouse localization system | |
CN111323048B (en) | Performance test method and system for single relative attitude measurement machine | |
CN108801187A (en) | The geometric error discrimination method of guide rail slide unit movement based on coordinate transform | |
CN108375337B (en) | Robot and method and device for measuring relative pose of process equipment of robot | |
KR101525677B1 (en) | Virtual error estimation simulating method for circular test | |
Klug et al. | Measuring Human-made Corner Structures with a Robotic Total Station using Support Points, Lines and Planes. |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant | ||
GR01 | Patent grant | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20200925 |