CN110125982A - Micro-manipulating robot three-degree-of-freedom motion control system motion profile orthogonality measurement method - Google Patents

Micro-manipulating robot three-degree-of-freedom motion control system motion profile orthogonality measurement method Download PDF

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CN110125982A
CN110125982A CN201910456218.0A CN201910456218A CN110125982A CN 110125982 A CN110125982 A CN 110125982A CN 201910456218 A CN201910456218 A CN 201910456218A CN 110125982 A CN110125982 A CN 110125982A
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motion profile
orthogonality
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point
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CN110125982B (en
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王跃宗
陈浩
张鑫
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Beijing University of Technology
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/0095Means or methods for testing manipulators
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00Programme-controlled manipulators
    • B25J9/16Programme controls
    • B25J9/1656Programme controls characterised by programming, planning systems for manipulators
    • B25J9/1664Programme controls characterised by programming, planning systems for manipulators characterised by motion, path, trajectory planning

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  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
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  • Numerical Control (AREA)
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Abstract

The present invention relates to a kind of micro-manipulating robot three-degree-of-freedom motion control system motion profile orthogonality measurement methods, more particularly to the motion profile orthogonality appraisal procedure and motion profile nonorthogonality antidote using kinetic control system.This method mainly comprises the steps that building motion profile orthogonality measuring system, and the analysis of normal orthogonal referential orthogonality acquires motion profile, motion profile straight line fitting, the assessment of motion profile orthogonality, the correction of motion profile nonorthogonality.The present invention solves the problems, such as that the motion profile of kinetic control system is non-orthogonal, realizes the accurate positionin under quadrature condition, and the positioning accuracy of micro-manipulating robot has been effectively ensured.

Description

The measurement of micro-manipulating robot three-degree-of-freedom motion control system motion profile orthogonality Method
Technical field
The present invention relates to a kind of micro-manipulating robot three-degree-of-freedom motion control system motion profile orthogonality measurement method, More particularly to using kinetic control system motion profile orthogonality appraisal procedure and motion profile nonorthogonality antidote, It realizes the accurate positionin under quadrature condition, the positioning accuracy of micro-manipulating robot is effectively ensured.
Background technique
Micro-manipulating robot is within the scope of micron or sub-micrometer precision, to micro- within the scope of micron to sub-mm size The operating system that wisp (such as biological tissue, cell, MEMS micro-structure, MEMS) is grabbed, shifted, assembled, For the multiclass such as micro assemby, microinjection, bioengineering, Minimally Invasive Surgery field, it is usually by vision system, micromanipulator and movement Control system three parts composition.The vision system constructed based on optical stereo microscope forms one kind in conjunction with microoperation Special micro-manipulating robot, this robot carry out micromanipulator and the object to be operated by stereomicroscope vision system Positioning and tracking, obtain the location information of the object to be operated, then mobile by kinetic control system driving micromanipulator, complete each Kind microoperation precise operation.
Kinetic control system is the significant components of micro-manipulating robot, the main motion control and precision for realizing micromanipulator Positioning, performance affect the positioning accuracy of micro-manipulating robot, it generally includes multiple freedom degrees, mainly freely by translation Degree and rotary freedom are constituted, and the kinetic control system of three translation freedoms is relatively conventional type.Three translation freedoms The performance indicator of kinetic control system mainly includes three classes: assembly orthogonality, the motion profile orthogonality of positioning accuracy and three axis. Assembly orthogonality can be assessed by the method for angle measurement, and the assessment of positioning accuracy can be using laser interference ranging Mode realizes that these two types of Indexes Comparisons are easy measurement;The assessment of the motion profile orthogonality of three axis is more difficult, in existing micro- behaviour It is often ignored in studying, but this kind of index is an important factor for influencing micro-manipulating robot precision positioning.Sun Yanbo etc. (2013) evaluation index and test method are proposed for the assembly orthogonality of kinetic control system, mainly measurement motion control The depth of parallelism, verticality and the straightness of system assembly.In actual use, although kinetic control system has dress well With orthogonality, but it cannot be guaranteed that the motion profile of three axis has good orthogonality, i.e. the motion profile of three axis not necessarily meets Absolute orthogonality relation.If the motion profile nonorthogonality of kinetic control system is larger, even if the object that vision is calculated is empty Between point coordinate it is how accurate again, cannot guarantee that the accuracy of object space positioning, lead to the physical location variable quantity of micromanipulator It is inconsistent with calculating position variable quantity, the shadow of the deviation sizes of two class positions by the motion profile orthogonality of kinetic control system It rings.In view of the above problems, the invention proposes a kind of micro-manipulating robot three-degree-of-freedom motion control system motion profile is orthogonal Property measurement method, for micro-manipulating robot, the present invention has special meaning, and show: (1) laser displacement established is fixed Position system can be used as normal orthogonal referential, can provide necessary base for kinetic control system motion profile orthogonality measurement Plinth data;(2) invent motion profile orthogonality measurement method be micro-manipulating robot kinetic control system motion profile just The property handed over assessment provides foundation;(3) micro-manipulating robot can be effectively ensured in the motion profile nonorthogonality antidote established Positioning accuracy.
Summary of the invention
The present invention proposes micro-manipulating robot three-degree-of-freedom motion control system motion profile orthogonality measurement method, mesh Be to be to carry out assessment and the correction of motion profile nonorthogonality by the motion profile orthogonality to kinetic control system, realize The positioning accuracy of micro-manipulating robot is effectively ensured in accurate positionin under quadrature condition.
Micro-manipulating robot three-degree-of-freedom motion control system motion profile orthogonality measurement method according to the present invention, Based on laser displacement measurement principle, motion profile orthogonality measuring system is constructed, the normal orthogonal referential of auxiliary is established, established Emulation mode carries out the analysis of normal orthogonal referential orthogonality, acquires motion profile in normal orthogonal referential, to movement rail Mark carries out straight line fitting, then establishes motion profile orthogonality appraisal procedure, finally moves to non-orthogonal motion profile The correction of track nonorthogonality, realizes the accurate positionin under quadrature condition.The micro-manipulating robot three-degree-of-freedom motion control System motion track orthogonality measurement method the following steps are included:
1) motion profile orthogonality measuring system is constructed
There is the grating scale for closed loop precision control kinematic axis on three kinematic axis of kinetic control system respectively.In order to adopt Collect kinematic axis motion profile, on kinetic control system dispose a standard gauge block, three faces for using it adjacent as be displaced Monitoring surface is measured, the normal of three displacement monitoring surfaces is respectively parallel to three kinematic axis.The center of three laser displacement sensors Axis meets at any and the displacement perpendicular to corresponding displacement monitoring surface, for measurement standard gauge block.Three have orthogonal pass Normal orthogonal referential of the laser displacement positioning system that the laser displacement sensor of system is established as auxiliary is joined in normal orthogonal Examine be middle description standard gauge block motion profile.
2) normal orthogonal referential orthogonality is analyzed
It is influenced by assembly factor, the central axis of three laser displacement sensors not necessarily meets absolute orthogonal pass System, the non-orthogonal normal orthogonal referential of foundation, which measures motion profile orthogonality to exist, to be influenced, by standard gauge block and laser How the rotation angle of displacement sensor, which influences motion profile orthogonality measurement, is established emulation mode, is used to analytical standard orthogonal reference It is the influence that orthogonality measures motion profile orthogonality.Simulation result shows: the rotation of standard gauge block and laser displacement sensor Corner can ignore the influence that normal orthogonal referential orthogonality measures motion profile orthogonality when within 10 degree.Therefore Rotation angle is adjusted within 10 degree when assembling standard gauge block and laser displacement sensor, subsequently into step 3).
3) motion profile is acquired
Standard gauge block is in the public useful space of laser displacement sensor respectively in the direction for being parallel to three kinematic axis On it is mobile at equal intervals generate discrete loci point, three motion profiles of formation represent the real motion track of three kinematic axis, Three motion profiles are just used as three reference axis of motion profile coordinate system (O-XYZ).Three laser displacement sensors can be surveyed Standard gauge block displacement, certain moment three obtained displacement as standard gauge block in normal orthogonal referential currently from Dissipate the space coordinate vector of tracing point.
4) motion profile straight line fitting
It is quasi- that straight line is carried out to the motion profile that space coordinate vector of the discrete loci point in normal orthogonal referential represents It closes, if the distance of discrete loci point to fitting a straight line is greater than 0.02mm, then it is assumed that be gross error, this some discrete track Point is removed from set, carries out straight line fitting again.It is final to obtain motion profile linear equation and vector parameters, as move rail The linear equation and vector parameters of mark coordinate system X-axis, Y-axis and Z axis.
5) motion profile orthogonality is assessed
The calculating of vector orthogonality is carried out according to movement locus vector parameter, the angle between motion profile is obtained, as moves Angle between trajectory coordinates system X-axis, Y-axis and Z axis assesses motion profile orthogonality according to corner dimension, and assessment motion profile is just The judgment criteria for the property handed over are as follows: set angle threshold value is 0.3 degree, and three angles are poor with 90 degree of works respectively, when the difference between them When being respectively less than equal to angle threshold, then meet orthogonality condition, motion profile is orthogonal;If the difference between them has any one When greater than angle threshold, then it is unsatisfactory for orthogonality condition, motion profile is nonopiate, enters step 6) progress motion profile nonorthogonality Correction.
6) motion profile nonorthogonality is corrected
The correction of motion profile nonorthogonality is carried out to non-orthogonal motion profile, a virtual orthographic coordinate system is set, is built Mapping relations between vertical virtual orthographic coordinate system and non-orthogonal motion profile coordinate system, it is known that any point is virtual in space Coordinate vector in orthogonal coordinate system, according to mapping relations acquire coordinate of this in non-orthogonal motion profile coordinate system to Amount can be such that kinetic control system accurate motion in non-orthogonal motion profile coordinate system realizes under quadrature condition to the point It is accurately positioned, the positioning accuracy of micro-manipulating robot is effectively ensured.
Detailed description of the invention
Fig. 1 is micro-manipulating robot three-degree-of-freedom motion control system motion profile orthogonality measurement side of the present invention The flow chart of method
Fig. 2 is motion profile orthogonality measuring system of the present invention
Fig. 3 is acquisition movement locus schematic diagram of the present invention
Fig. 4 is motion profile straight line fitting schematic diagram of the present invention
Fig. 5 is that motion profile orthogonality of the present invention assesses schematic diagram
Fig. 6 is that motion profile nonorthogonality of the present invention corrects schematic diagram
Description of symbols in attached drawing:
S1, building motion profile orthogonality measuring system
S2, the analysis of normal orthogonal referential orthogonality
S3, acquisition motion profile
S4, motion profile straight line fitting
S51, the assessment of motion profile orthogonality
S52, motion profile are orthogonal
S6, motion profile are nonopiate
S71, the correction of motion profile nonorthogonality
Coordinate vector in S72, virtual orthographic coordinate system
Coordinate vector in S73, motion profile coordinate system
Accurate positionin under S8, realization quadrature condition
1, kinetic control system
2, X kinematic axis
3, Y motion axis
4, Z kinematic axis
5, X kinematic axis grating scale
6, Y motion axis grating scale
7, Z kinematic axis grating scale
8, motion profile coordinate system
9, standard gauge block
10, X-axis monitoring surface
11, Y-axis monitoring surface
12, Z axis monitoring surface
13, X-axis laser displacement sensor
14, Y-axis laser displacement sensor
15, Z axis laser displacement sensor
16, normal orthogonal referential
17, computer
Angle between α, X-axis and Y-axis
Angle between β, X-axis and Z axis
Angle between γ, Y-axis and Z axis
Specific embodiment
The present invention is further elaborated now in conjunction with attached drawing.Fig. 1 be micro-manipulating robot of the present invention three from By the flow chart of degree kinetic control system motion profile orthogonality measurement method, micro-manipulating robot three-degree-of-freedom motion control system Unite motion profile orthogonality measurement method the following steps are included:
1, motion profile orthogonality measuring system is constructed
Fig. 2 is motion profile orthogonality measuring system, and three freedom of motion of kinetic control system 1 respectively correspond X fortune Moving axis 2, Y motion axis 3 and Z kinematic axis 4 are respectively provided with X kinematic axis grating scale 5, Y motion axis grating scale 6 on three kinematic axis With Z kinematic axis grating scale 7, resolution ratio is 0.1 micron, controls kinematic axis for closed loop precision.In order to acquire the movement of kinematic axis Track disposes a standard gauge block 9, with its adjacent X-axis monitoring surface 10, Y-axis monitoring surface 11 and Z on kinetic control system 1 Shaft monitoring face 12 is used as displacement monitoring surface, they have good flatness and orthogonality relation, three displacement monitoring surfaces Normal is respectively parallel to three kinematic axis.Use X-axis laser displacement sensor 13, Y-axis laser displacement sensor 14 and Z axis laser Displacement sensor 15 monitors the displacement of three displacement monitoring surfaces respectively, their central axis is met at a little and perpendicular to correspondence Displacement monitoring surface, three with orthogonality relation laser displacement sensors establish laser displacement positioning systems as auxiliary Normal orthogonal referential 16, the motion profile of description standard gauge block 9 in normal orthogonal referential 16.
2, normal orthogonal referential orthogonality is analyzed
It is influenced by assembly factor, the central axis of three laser displacement sensors not necessarily meets absolute orthogonal pass System, the non-orthogonal normal orthogonal referential of foundation, which measures motion profile orthogonality to exist, to be influenced, by standard gauge block and laser How the rotation angle of displacement sensor, which influences motion profile orthogonality measurement, is established emulation mode, is used to analytical standard orthogonal reference It is the influence that orthogonality measures motion profile orthogonality.
Emulation mode specifically: three motion profile l of preset standard gauge blocku1、lv1、lw1Unit vector and discrete loci Point, the angle between motion profile constitute angle vector Λt.Preset standard gauge block is around U axis, the rotation angle of V axis and W axis and 8 tops The initial coordinate vector of point calculates the coordinate vector on 8 vertex after standard gauge block rotation.The central axis of laser displacement sensor lA、lB、lCRespectively with certain point M on axisA、MB、MCSmall angle rotation as a reference point, preset the corresponding unit of three axis to Amount and point MA、MB、MCCoordinate vector.
Standard gauge block is to preset the posture of rotation angle respectively along three motion profile lu1、lv1、lw1It is mobile, successively reach The position of default discrete loci point, lA、lB、lCThe intersection point generated with corresponding displacement monitoring surface is respectively NA、NB、NC, calculate The space coordinate vector of current location intersection point, the as measured value of discrete loci point obtain corresponding straight line l by straight line fittingu2、 lv2、lw2Unit vector, then carry out the calculating of vector orthogonality, obtain lu2、lv2、lw2Between angle constitute angle vector Λ. ΛtFor preset value, Λ is measured value, their difference is transported after representing the rotation angle that standard gauge block and laser displacement sensor is added The variation of dynamic rail mark orthogonality measurement result, measures motion profile orthogonality for analytical standard orthogonal reference system's orthogonality It influences.Simulation result shows: the rotation angle of standard gauge block and laser displacement sensor is when within 10 degree, preset value and measured value Maximum difference be 0.0967 degree, the influence that normal orthogonal referential orthogonality measures motion profile orthogonality can be ignored. Therefore rotation angle is adjusted within 10 degree when assembling standard gauge block and laser displacement sensor, subsequently into step 3.
3, motion profile is acquired
Fig. 3 is acquisition movement locus schematic diagram, and computer 17 controls kinetic control system 1, makes standard gauge block 9 respectively flat Row generates discrete loci point in mobile at equal intervals on the direction of three kinematic axis, and three motion profiles of formation represent three fortune The real motion track of moving axis, three motion profiles are just used as the X-axis, Y-axis and Z axis of motion profile coordinate system 8.Three laser positions Displacement sensor can measure the displacement of standard gauge block 9, certain moment three obtained displacement as standard gauge block 9 standard just Hand over the space coordinate vector of current discrete tracing point in referential 16.Discrete loci point of the standard gauge block 9 in X-axis standard just It hands in referential 16 and corresponds to space coordinate vector { SAN, { SANThree components respectively correspond three laser displacement sensors and survey Measure displacement of the standard gauge block 9 at each discrete loci point.Similarly, discrete loci point of the standard gauge block 9 in Y-axis and Z axis Space coordinate vector { S is corresponded in normal orthogonal referential 16BMAnd { SCK}.The sample of these three space coordinate vectors building As the basic data of motion profile orthogonality assessment, it is saved in computer 17.
4, motion profile straight line fitting
Fig. 4 is motion profile straight line fitting schematic diagram, to space coordinate of the discrete loci point in normal orthogonal referential Vector { SAN}、{SBMAnd { SCKThe motion profile that represents carries out straight line fitting, if discrete loci point is to the distance of fitting a straight line Greater than 0.02mm, then it is assumed that be gross error, this some discrete tracing point is removed from set, carries out straight line fitting again. It is final to obtain motion profile linear equation and vector parameters, as the linear equation of motion profile coordinate system X-axis, Y-axis and Z axis and Vector parameters.In normal orthogonal referential, space coordinate vector { SAN}、{SBMAnd { SCKCorresponding motion profile straight line is quasi- Close general formula are as follows:
SLFM indicates a kind of motion profile line fitting method, and input quantity is { SAN}、{SBMAnd { SCK, output quantity is It is fitted obtained movement locus vector parameter Pa、PbAnd Pc
5, motion profile orthogonality is assessed
Fig. 5 is that motion profile orthogonality assesses schematic diagram, the angle difference between X-axis and Y-axis, X-axis and Z axis, Y-axis and Z axis It is indicated with α, β, γ.According to movement locus vector parameter, motion profile unit vector n is calculateda、nbAnd nc, then carrying out vector just The property handed over calculates, and obtains the value of α, β, γ, vector orthogonality calculation formula are as follows:
Motion profile orthogonality is assessed according to the size of α, β, γ, assesses the judgment criteria of motion profile orthogonality are as follows:
T in formulaabcFor angle threshold, 0.3 degree is taken.When three conditions are set up in formula, then meet orthogonality condition, moves The orthogonal S52 in track;If there is any one condition invalid in formula, it is unsatisfactory for orthogonality condition, the nonopiate S6 of motion profile, into Enter step 6 and carries out the correction of motion profile nonorthogonality.
6, motion profile nonorthogonality is corrected
Motion profile nonorthogonality is carried out to non-orthogonal motion profile and corrects S71.Fig. 6 rectifys for motion profile nonorthogonality Positive schematic diagram, is arranged a virtual orthographic coordinate system (O-XGH), and motion profile coordinate system and virtual orthographic coordinate system possess public Coordinate origin O and reference axis X, the coordinate plane XOY and XOG of Two coordinate system be overlapped, ∠ XOY=α, ∠ XOZ=β, ∠ YOZ= γ.Establish the mapping relations between Two coordinate system, it is known that coordinate vector of any point P in virtual orthographic coordinate system in space rp,gh=(xp,gh,yp,gh,zp,gh)T, acquiring coordinate vector of the point P in motion profile coordinate system is rp,yz=(xp,yz,yp,yz, zp,yz)T
The parallel lines that point P does H axis are crossed, meet at subpoint P with XOG plane1, the parallel lines that point P does Z axis are crossed, with plane XOY Meet at subpoint P11.From point P11Draw vertical line to G axis, intersection point is point P13, line segment P11P13Point P is met at Y-axis12, point P13And P12Point It Wei not point P11Subpoint on G axis and Y-axis.It crosses point P and is line segment OP11Parallel lines, meet at subpoint P with Z axis7
Unit vector of the Y-axis in virtual orthographic coordinate system is ny,gh=(cos α, sin α, 0)T, Z axis is in virtual orthographic seat Unit vector in mark system is nz,gh=(cos β, cos βz,gh,cosγz,gh)T, returned according to dot product formula and unit vector One change condition can acquire cos βz,ghWith cos γz,gh.In right angled triangle P11PP1In have zp,yz=zp,gh/cosγz,ghAnd it is known zp7,yz=zp,yz, then can be according to rp7,gh=zp7,yz·nz,ghAcquire rp7,gh, rp7,ghFor point P7Seat in virtual orthographic coordinate system Mark vector.Point P11Coordinate vector in virtual orthographic coordinate system is rp11,gh, the coordinate vector in motion profile coordinate system is rp11,yz, in right angled triangle P12OP13It is middle that following formula can be obtained according to geometrical relationship:
Point P11It is located at the subpoint of XOY plane in motion profile coordinate system for point P, r can be established by above formulap,ghWith rp,yzBetween Mapping relations:
According to mapping relations, so that it may by the coordinate vector r of virtual orthographic coordinate system midpoint Pp,ghS72 calculates it and corresponds to Coordinate vector r in motion profile coordinate systemp,yzS73, kinetic control system is according to rp,yzPoint P can be accurately moved to, it is real Accurate positionin S8 under existing quadrature condition, is effectively ensured the positioning accuracy of micro-manipulating robot.
It is obvious to those skilled in the art that the present invention can make a variety of improvements and changes, as long as falling into institute In attached claims and its equivalent range, the present invention just covers such modifications and variations of the invention.

Claims (1)

1. micro-manipulating robot three-degree-of-freedom motion control system motion profile orthogonality measurement method, it is characterised in that: be based on Laser displacement measurement principle constructs motion profile orthogonality measuring system, establishes the normal orthogonal referential of auxiliary, establishes emulation Method carry out normal orthogonal referential orthogonality analysis, acquire motion profile in normal orthogonal referential, to motion profile into Then row straight line fitting establishes motion profile orthogonality appraisal procedure, finally carry out motion profile to non-orthogonal motion profile Nonorthogonality correction, realizes the accurate positionin under quadrature condition, specifically includes the following steps:
1) motion profile orthogonality measuring system is constructed
There is the grating scale for closed loop precision control kinematic axis on three kinematic axis of kinetic control system respectively;In order to acquire fortune The motion profile of moving axis, disposes a standard gauge block on kinetic control system, and three faces for using it adjacent are supervised as displacement Survey face, the normal of three displacement monitoring surfaces are respectively parallel to three kinematic axis;The central axis of three laser displacement sensors Meet at any and the displacement perpendicular to corresponding displacement monitoring surface, for measurement standard gauge block;Three have orthogonality relation Normal orthogonal referential of the laser displacement positioning system that laser displacement sensor is established as auxiliary, in normal orthogonal referential The motion profile of middle description standard gauge block;
2) normal orthogonal referential orthogonality is analyzed
It is influenced by assembly factor, the central axis of three laser displacement sensors not necessarily meets absolute orthogonality relation, builds Vertical non-orthogonal normal orthogonal referential, which measures motion profile orthogonality to exist, to be influenced, and standard gauge block and laser displacement are passed How the rotation angle of sensor, which influences motion profile orthogonality measurement, is established emulation mode, and for analytical standard orthogonal reference, system is orthogonal Property to motion profile orthogonality measurement influence;
Three motion profiles and discrete loci point of preset standard gauge block, the angle between motion profile constitute angle vector Λt, so The rotation angle of preset standard gauge block and laser displacement sensor again afterwards;Standard gauge block is to preset the posture of rotation angle respectively along pre- If motion profile is mobile, the space coordinate vector of the intersection point of laser displacement sensor central axis and displacement monitoring surface is calculated, The as measured value of discrete loci point is calculated by straight line fitting and vector orthogonality, obtains what angle between three straight lines was constituted Angle vector Λ;ΛtFor preset value, Λ is measured value, their difference, which represents, is added standard gauge block and laser displacement sensor Rotation angle after motion profile orthogonality measurement result variation, be used to analytical standard orthogonal reference system orthogonality to motion profile The influence of orthogonality measurement;Simulation result shows: the rotation angle of standard gauge block and laser displacement sensor is when within 10 degree, in advance If the maximum difference of value and measured value is 0.0967 degree, ignores normal orthogonal referential orthogonality and motion profile orthogonality is measured Influence;Therefore rotation angle is adjusted within 10 degree when assembling standard gauge block and laser displacement sensor, subsequently into step It is rapid 3);
3) motion profile is acquired
Standard gauge block is in the public useful space of laser displacement sensor respectively on the direction for being parallel to three kinematic axis etc. Interval is mobile to generate discrete loci point, and three motion profiles of formation represent the real motion track of three kinematic axis, and three Motion profile is just used as three reference axis of motion profile coordinate system (O-XYZ);Three laser displacement sensors measure standard volume The displacement of block, certain moment three obtained displacement current discrete tracing point in normal orthogonal referential as standard gauge block Space coordinate vector;
4) motion profile straight line fitting
The motion profile represented to space coordinate vector of the discrete loci point in normal orthogonal referential carries out straight line fitting, such as Fruit discrete loci point to fitting a straight line distance be greater than 0.02mm, then it is assumed that be gross error, this some discrete tracing point from It is removed in set, carries out straight line fitting again;Final to obtain motion profile linear equation and vector parameters, as motion profile is sat The linear equation and vector parameters of mark system X-axis, Y-axis and Z axis;
5) motion profile orthogonality is assessed
The calculating of vector orthogonality is carried out according to movement locus vector parameter, obtains the angle between motion profile, as motion profile Angle between coordinate system X-axis, Y-axis and Z axis assesses motion profile orthogonality according to corner dimension, assesses motion profile orthogonality Judgment criteria are as follows: set angle threshold value be 0.3 degree, three angles are poor with 90 degree of works respectively, when the difference between them is small When being equal to angle threshold, then meet orthogonality condition, motion profile is orthogonal;If the difference between them has any one to be greater than When angle threshold, then it is unsatisfactory for orthogonality condition, motion profile is nonopiate, enters step 6) progress motion profile nonorthogonality and rectifys Just;
6) motion profile nonorthogonality is corrected
The correction of motion profile nonorthogonality is carried out to non-orthogonal motion profile;One virtual orthographic coordinate system (O-XGH) is set, Motion profile coordinate system and virtual orthographic coordinate system possess public coordinate origin O and reference axis X, the coordinate plane of Two coordinate system XOY and XOG is overlapped, and ∠ XOY=α, ∠ XOZ=β, ∠ YOZ=γ are established between virtual orthographic coordinate system and motion profile coordinate system Mapping relations:
In formula, rp,yz=(xp,yz,yp,yz,zp,yz)T, xp,yzFor coordinate of the point P in O-XYZ coordinate system X-axis, yp,yzIt is point P in O- Coordinate in XYZ coordinate system Y-axis, zp,yzFor coordinate of the point P on O-XYZ coordinate system Z axis;rp,gh=(xp,gh,yp,gh,zp,gh)T, xp,ghFor coordinate of the point P in O-XGH coordinate system X-axis, yp,ghFor coordinate of the point P on O-XGH coordinate system G axis, zp,ghFor point P Coordinate on O-XGH coordinate system H axis;nz,gh=(cos β, cos βz,gh,cosγz,gh)TIt is Z axis in O-XGH coordinate system Unit vector, cos βz,ghFor the cosine value of ∠ ZOG, cos γz,ghFor the cosine value of ∠ ZOH;
According to mapping relations, by the coordinate vector r of virtual orthographic coordinate system midpoint Pp,ghIt is calculated to correspond in motion profile coordinate Coordinate vector r in systemp,yz, kinetic control system is according to rp,yzAccurately move to point P.
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