CN110123271A - Wearable pressure sensor and its manufacturing method based on carbon nano-tube film - Google Patents
Wearable pressure sensor and its manufacturing method based on carbon nano-tube film Download PDFInfo
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- CN110123271A CN110123271A CN201910284809.4A CN201910284809A CN110123271A CN 110123271 A CN110123271 A CN 110123271A CN 201910284809 A CN201910284809 A CN 201910284809A CN 110123271 A CN110123271 A CN 110123271A
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- 239000002238 carbon nanotube film Substances 0.000 title claims abstract description 58
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 14
- 239000000919 ceramic Substances 0.000 claims abstract description 28
- 229920005570 flexible polymer Polymers 0.000 claims abstract description 20
- 230000007246 mechanism Effects 0.000 claims abstract description 20
- 238000012544 monitoring process Methods 0.000 claims abstract description 16
- 238000012360 testing method Methods 0.000 claims abstract description 15
- 239000003792 electrolyte Substances 0.000 claims abstract description 13
- 230000004044 response Effects 0.000 claims description 22
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 19
- 239000002041 carbon nanotube Substances 0.000 claims description 17
- 229910021393 carbon nanotube Inorganic materials 0.000 claims description 17
- FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical group [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 claims description 14
- 230000008859 change Effects 0.000 claims description 13
- 239000000463 material Substances 0.000 claims description 11
- 238000001514 detection method Methods 0.000 claims description 10
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- 230000005518 electrochemistry Effects 0.000 claims description 7
- 239000011780 sodium chloride Substances 0.000 claims description 7
- BAPJBEWLBFYGME-UHFFFAOYSA-N Methyl acrylate Chemical compound COC(=O)C=C BAPJBEWLBFYGME-UHFFFAOYSA-N 0.000 claims description 6
- 229920002379 silicone rubber Polymers 0.000 claims description 4
- 238000001179 sorption measurement Methods 0.000 claims description 4
- 238000000034 method Methods 0.000 claims description 3
- 229920006324 polyoxymethylene Polymers 0.000 claims description 3
- 229910052799 carbon Inorganic materials 0.000 claims description 2
- 238000006243 chemical reaction Methods 0.000 claims description 2
- 239000004945 silicone rubber Substances 0.000 claims description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 4
- 230000007613 environmental effect Effects 0.000 abstract description 3
- 238000005516 engineering process Methods 0.000 abstract description 2
- 239000000243 solution Substances 0.000 description 7
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- 239000004033 plastic Substances 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 210000003462 vein Anatomy 0.000 description 2
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
- VVQNEPGJFQJSBK-UHFFFAOYSA-N Methyl methacrylate Chemical compound COC(=O)C(C)=C VVQNEPGJFQJSBK-UHFFFAOYSA-N 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
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- 239000008280 blood Substances 0.000 description 1
- 210000004369 blood Anatomy 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
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- 238000007906 compression Methods 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 125000000118 dimethyl group Chemical group [H]C([H])([H])* 0.000 description 1
- 201000010099 disease Diseases 0.000 description 1
- 208000037265 diseases, disorders, signs and symptoms Diseases 0.000 description 1
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- 230000036541 health Effects 0.000 description 1
- 230000003862 health status Effects 0.000 description 1
- 210000005240 left ventricle Anatomy 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
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- 238000003199 nucleic acid amplification method Methods 0.000 description 1
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- 230000004962 physiological condition Effects 0.000 description 1
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- 229920005573 silicon-containing polymer Polymers 0.000 description 1
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- 239000011734 sodium Substances 0.000 description 1
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- 238000006467 substitution reaction Methods 0.000 description 1
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Classifications
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/68—Arrangements of detecting, measuring or recording means, e.g. sensors, in relation to patient
- A61B5/6801—Arrangements of detecting, measuring or recording means, e.g. sensors, in relation to patient specially adapted to be attached to or worn on the body surface
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
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- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- Heart & Thoracic Surgery (AREA)
- Molecular Biology (AREA)
- Pathology (AREA)
- Engineering & Computer Science (AREA)
- Biomedical Technology (AREA)
- General Physics & Mathematics (AREA)
- Medical Informatics (AREA)
- Biophysics (AREA)
- Surgery (AREA)
- Animal Behavior & Ethology (AREA)
- General Health & Medical Sciences (AREA)
- Public Health (AREA)
- Veterinary Medicine (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
The invention belongs to the wearable pressure sensor correlative technology fields of human body, it discloses a kind of wearable pressure sensor and its manufacturing method based on carbon nano-tube film, the pressure sensor includes sensing mechanism, sensing mechanism include seal box, porous ceramic plate, working electrode, to electrode and flexible polymer film, porous ceramic plate open up it is fluted, to electrode be arranged in groove；Working electrode is arranged on porous ceramic plate, and it covers groove；Groove is for accommodating electrolyte；Flexible polymer film is arranged on seal box, is used for porous ceramic plate, working electrode and is sealed in seal box to electrode；Pressure sensor is to convert electric energy for pressure energy using pressure-induction electrochemical potential variation characteristic of carbon nano-tube film, and then realize the real-time monitoring of testing pressure.Good environmental adaptability of the present invention can be applied to water environment, and accuracy is preferable.
Description
Technical field
The invention belongs to the wearable pressure sensor correlative technology fields of human body, are received more particularly, to one kind based on carbon
The wearable pressure sensor and its manufacturing method of mitron film.
Background technique
In human motion and physiological signal field of detecting, pressure change can be used for recording human body as a kind of important information
Motion conditions and analysis physiological conditions, the main monitoring instrument relied on is pressure sensor, in biologic medical, intelligence
Sensing, motion recording and the fields such as monitoring and simulation of human body have wide application scenarios.Human motion and physiological signal
Real-time monitoring helps more accurately to assess human health status, provides early stage Disease Warning Mechanism, therefore the wearable pressure of intelligence
Sensor has received widespread attention and develops.
The current wearable pressure sensor of intelligence can be divided into four major class according to working mechanism difference: resistor-type, it is capacitive,
Piezo-electric type and the electric type that rubs.Resistor-type and capacitance type transducers when being acted on by ambient pressure by itself generate deformation (or
Person displacement) Lai Yinqi resistance and capacitor variation, to realize the detection of ambient pressure.These two types of sensors all have the spirit of superelevation
Sensitivity, and the characteristics of deformation behavior when its work imparts sensor plastic deformation, it has been widened in human motion and life
Manage the applicable scene in signal monitoring.However, these two types of sensors are required to external power supply at work, when real-time monitoring, needs
Mass energy significantly limits it in the application of wearable sensory field.In order to overcome problems of energy consumption, self-powered can be worn
The piezoelectric type pressure sensor worn comes into being, during the work time the autonomous telecommunications generated in response to external pressure change
Number, it is not necessarily to external power supply.However, it generally requires multilevel signal amplification system during the work time, the body of sensor is increased
Product, wearable comfort level and convenient carrying degree are lower, and it is generally applicable in human motion and physiologic signal monitoring to constrain it
Property.In addition, the output power and energy of such sensor are lower, other wearable device work cannot be driven.In order to reduce
Wearable device volume, increases the electric signal in response to pressure change, and the electric type pressure sensor of wearable friction receives extensively
Concern, such device realizes the transfer of charge by electrode contact separation mode, to realize the perception of ambient pressure.This kind of biography
The pressure response signal that sensor solves piezo-type sensor part is small, the low problem of power, while also can be prepared into plastic deformation
Senser element has shown huge application prospect in wearable pressure sensing field.However, the moisture in environment can cause to rub
The electric-charge-dissipating in electric type pressure sensor is wiped, degrade its sensing capabilities, i.e., job stability declines, and human body daily routines
In inevitably contact wetting environment, such as rainy season environment, daily cleaning, water sailing and swimming of drifting about again, limit
The application of the electric type pressure sensor of friction.Correspondingly, there is develop a kind of preferably wearable pressure of environmental suitability for this field
The technical need of force snesor and its manufacturing method.
Summary of the invention
Aiming at the above defects or improvement requirements of the prior art, what the present invention provides a kind of based on carbon nano-tube film can
Pressure sensor and its manufacturing method are dressed, based on the work characteristics of existing pressure sensor, for the knot of pressure sensor
Structure is designed.For pressure sensor provided by the present invention under testing pressure effect, the electrochemistry of working electrode is available
Area changes, and then electrochemical double-layer capacitor is caused to change, and its adsorption equilibrium quantity of electric charge remains unchanged, described
Pressure sensor can generate certain potential change, to can convert electric energy, and ambient pressure and generation for ambient pressure
Real-time current there is corresponding relationship, measurement obtains real-time current, and then is turned the real-time current according to the corresponding relationship
Become corresponding pressure, it can be achieved that pressure real-time monitoring in moisture environment, the pressure sensor are adapted to preferable environment
Property, there is self-powered function, and current responsing signal is larger.
To achieve the above object, according to one aspect of the present invention, a kind of wearing based on carbon nano-tube film is provided
Pressure sensor is worn, which includes sensing mechanism, and the sensing mechanism is used to convert the pressure energy of testing pressure
For electric energy comprising seal box, porous ceramic plate, working electrode, to electrode and flexible polymer film, the porous ceramic plate
Open up it is fluted, it is described to electrode setting in the groove；The working electrode is arranged on the porous ceramic plate, and its
Cover the groove；The groove is for accommodating electrolyte, and the electrolyte is for infiltrating the working electrode；It is described flexible poly-
It closes object film to be arranged on the seal box, be used for the porous ceramic plate, the working electrode and described close to electrode
It is enclosed in the seal box；
The working electrode is using made of carbon nano-tube film, and the surface of the carbon nano-tube film has nanometer recessed
Slot structure；The pressure sensor be using the carbon nano-tube film pressure-induction electrochemical potential variation characteristic by
Pressure energy is converted into electric energy, and then the pressure sensor can according to the relationship between generated electric current and corresponding pressure
Current pressure is obtained, the real-time monitoring of testing pressure is achieved in.
Further, the working electrode is after electrolyte infiltrates, adsorption balancing charge；Testing pressure passes through described
Flexible polymer film is transmitted on the working electrode, so that the electrochemistry usable area of the working electrode reduces, then
Reduce the electric double layer capacitance of the working electrode, thus the sensing mechanism generates potential change, that is, realize pressure energy to
The conversion of electric energy.
Further, the relationship corresponding to the electric energy that pressure converts between electric current and corresponding pressure is using following
Formula indicates:
I=0.0037+0.362 × (1-exp (- P/684))+0.362 × (1-exp (- P/685))；
In formula, electric current corresponding to the electric energy that I converts for pressure；P is the corresponding pressure of electric current.
Further, the carbon nano-tube film is to be prepared by non-array carbon nano-tube material through mechanical commutation draft.
Further, the density of the carbon nano-tube film is 520mg/cm3, axial orientation degree is 0.68.
Further, the flexible polymer film is polyformaldehyde Methylacrylate Film.
Further, the seal box is using made of transparent silicone rubber.
Further, the sensing range of the pressure sensor is 30Pa~330kPa, and pressure detection sensitivity is
4.7kPa-1, pressure response time 100ms.
Further, the electrolyte is sodium chloride solution, and the concentration of the sodium chloride solution is 5.0M/L.
Other side according to the invention provides a kind of wearable pressure sensor based on carbon nano-tube film
Manufacturing method, the manufacturing method the following steps are included: will be first separately positioned on porous ceramic plate to electrode and working electrode, then
This is sealed in seal box electrode, the working electrode and the porous ceramic plate with flexible polymer film, is thus somebody's turn to do
Pressure sensor.
In general, through the invention it is contemplated above technical scheme is compared with the prior art, base provided by the invention
It is mainly had the advantages that in the wearable pressure sensor and its manufacturing method of carbon nano-tube film
1. the pressure sensor be using pressure-induction electrochemical potential variation characteristic of the carbon nano-tube film come
Convert electric energy for pressure energy, so pressure sensor electric current according to corresponding to the electric energy that pressure converts with it is right
The relationship between pressure answered can get current pressure, be achieved in the real-time monitoring to testing pressure, the pressure sensor
It is not necessarily to external power supply when work, reduces the consumption of electric energy, and there is big work range, has both high sensitivity, while having fast
Response speed, be applicable to water environment, environmental suitability is preferable.
2. the surface of the carbon nano-tube film has nano grooves structure, so as to adsorb in electrolyte environment
More charges, when compression, can utmostly reduce electrochemistry useable surface area and cause big capacitance variations, improve electricity
Chemical potential has preferable capacitive property.
3. the carbon nano-tube film is to be prepared by non-array carbon nano-tube material through mechanical commutation draft, to non-battle array
When column carbon nano-tube material carries out mechanical commutation draft, due to the node between non-array carbon nano-tube material low density and carbon nanotube
Contact form, under the action of drafting stress, so that Relative sliding occurs between the carbon nanotube of node contact, by main section
Point contact form is changed into the short-term contact form of part, so that carbon nanotube is straightened, improves the axis of carbon nano-tube film
To the degree of orientation, high axial orientation degree provides quick transmission path for electronics conduction.
4. the sensing range of the pressure sensor is 30Pa~330kPa, pressure detection sensitivity is 4.7kPa-1, pressure
Response time is 100ms, and range unit is larger, can meet the testing requirements such as human body low pressure, middle pressure, high pressure, and fast response time,
Precision is higher.
5. the pressure sensor is small in size, and volume is 1.5 × 1.5 × 0.3cm3, it is compatible with human skin, meet people
The wearable demand of body can be used for human body respiration, beat pulse, the monitoring such as sound discrimination.
Detailed description of the invention
Fig. 1 is that the structure of the sensing mechanism of the wearable pressure sensor provided by the invention based on carbon nano-tube film is shown
It is intended to；
Fig. 2 is the decomposition diagram of the sensing mechanism in Fig. 1；
Fig. 3 is under the different pressures detected using the wearable pressure sensor based on carbon nano-tube film in Fig. 1
Current responsing signal and sensitivity curve；
Fig. 4 be the electric current that is detected using the wearable pressure sensor based on carbon nano-tube film in Fig. 1 at any time
Change curve；
Fig. 5 A and Fig. 5 B are the fortune obtained using the wearable pressure sensor based on carbon nano-tube film in Fig. 1 respectively
Dynamic preceding and post exercise breathing current-responsive curve graph；
Fig. 6 A and Fig. 6 B are the arteries and veins obtained using the wearable pressure sensor based on carbon nano-tube film in Fig. 1 respectively
It fights current-responsive curve caused by bounce and single pulse；
Fig. 7 is obtained using the wearable pressure sensor based on carbon nano-tube film in Fig. 1 to sound variation
Response current curve:
Fig. 8 is sensor array composed by the wearable pressure sensor based on carbon nano-tube film in Fig. 1 to alphabetical H
Pressure shape striograph.
In all the appended drawings, identical appended drawing reference is used to denote the same element or structure, in which: 1- flexible polymer
Film, 2- working electrode, 3- porous ceramic plate, 4- is to electrode, 5- seal box, 6- signal export line.
Specific embodiment
In order to make the objectives, technical solutions, and advantages of the present invention clearer, with reference to the accompanying drawings and embodiments, right
The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and
It is not used in the restriction present invention.As long as in addition, technical characteristic involved in the various embodiments of the present invention described below
Not constituting a conflict with each other can be combined with each other.
Please refer to Fig. 1 and Fig. 2, the wearable pressure sensor provided by the invention based on carbon nano-tube film, the pressure
Sensor includes sensing mechanism, current detection component and processor, and the current detection component is connected to the sensing mechanism,
For electric current caused by sensing mechanism described in real-time detection, and the current information that will test is transferred to the processor.Institute
Processor is stated for calculating corresponding pressure according to the current information that receives, and the pressure is shown.This implementation
In mode, the current detection component is electrochemical workstation；The pressure sensor be suitable for human body respiration, beat pulse,
The monitoring of sound discrimination etc..
The sensing mechanism is used to by the pressure energy of testing pressure convert electric energy, and then the pressure sensor is according to must
To the electric energy production electric current and corresponding pressure between relationship and current electric current obtain current pressure, thus
Realize the real-time monitoring of testing pressure.
The sensing mechanism include seal box 5, porous ceramic plate 3, working electrode 2, to electrode 4, flexible polymer film 1
And signal export line 6, the seal box 5 is for accommodating the porous ceramic plate 3, the working electrode 2 and described to electrode 4.
In present embodiment, the seal box 5 is formed with opening, the flexible polymer film 1 be used for by the porous ceramic plate 3,
The working electrode 2 and described electrode 4 is sealed in the seal box 5.
The porous ceramic plate 3 open up it is fluted, the groove for accommodate it is described to electrode 4 and electrolyte.The work
Make electrode 2 to be arranged on the porous ceramic plate 3, and it covers the groove.The porous ceramic plate 3 is arranged in the sealing
In the accommodating chamber of box 5.The flexible polymer film 1 is arranged on the seal box 5, and it seals the opening.Two institutes
It states signal export line 6 and is connected to the working electrode 2 and described to electrode 4, the working electrode 2 and described to electrode 4
The current detection component is connected to by the corresponding signal export line 6 respectively.
In present embodiment, the seal box 5 is using made of flexible clear materials, it is preferable that the seal box 5 is adopted
It is made of transparent silicon rubber；The flexible polymer film 1 is polyformaldehyde Methylacrylate Film；The working electrode 2 is
Using made of carbon nano-tube film, the carbon nano-tube film is to be formed by non-array carbon nano-tube material through mechanical commutation draft
, surface has nano grooves structure.The carbon nano-tube film has folding configuration in the wearable pressure sensor.
The density of the carbon nano-tube film is 520mg/cm3, axial orientation degree height (Herman orientation factor is 0.68).To non-array
When carbon nano-tube material carries out mechanical commutation draft, since the node between non-array carbon nano-tube material low density and carbon nanotube connects
Touching form, under the action of drafting stress, so that Relative sliding occurs between the carbon nanotube of node contact, by main node
Contact form is changed into the short-term contact form of part, so that carbon nanotube is straightened, forms with nano grooves structure
Carbon nano-tube film, while improving the axial orientation degree of carbon nano-tube film.
At work, the pressure of the carbon nano-tube film-induction electrochemical potential variation characteristic (Pressure- is utilized
Induced electrochemical potential variation) by press electric energy can be electrochemically converted, it is main
Movable property gives birth to pressure response electric signal, is not necessarily to external power supply.In present embodiment, the electrolyte is sodium chloride solution, the chlorine
The concentration for changing sodium solution is 5.0M/L.
After the carbon nano-tube film is infiltrated by the sodium chloride solution of high concentration, since chemical potential between the two is different, the carbon
Nano-tube film adsorption balancing charge, this is the root that the pressure sensor generates electric signal.Testing pressure passes through described
Flexible polymer film 1 is conducted to the working electrode 2, so that the electrochemistry usable area of the working electrode 2 reduces, then
The electric double layer capacitance of the working electrode 2 is set to change, the surface electric double layer balancing charge amount of the working electrode 2 is kept not
Become, the potential change that the sensing mechanism generates, to convert electric energy for pressure energy.In present embodiment, the pressure is passed
The work range of sensor is 30Pa~330kPa, and pressure detection sensitivity is 4.7kPa-1, the electric response time is 100ms.
The relational expression between electric current I and corresponding pressure P that the sensing mechanism generates is indicated using following formula: I=
0.0037+0.362*(1-exp(-P/684))+0.362*(1-exp(-P/685))；The accuracy of electric current and pressure corresponding relationship
Up to 99.8%, real-time pressure variation can be analyzed by response current signal according to the current-to-pressure corresponding relationship.
The electric double layer capacitance C that balancing charge Q is formed, under pressure since the reduction of electrochemistry usable area A occurs
(formula of electric double layer capacitance is C=ε A/d, wherein ε is the dielectric constant of electrolyte for reduction；D is Debye length, about 1nm),
Electrochemical potential V according to carbon nano-tube film known to formula Q=CV is improved.
The present invention also provides the manufacturing method of the wearable pressure sensor based on carbon nano-tube film, the manufacturing methods
The following steps are included:
(1) flexible polymer film, porous ceramic plate and seal box are got out.The flexible polymer film is poly- methyl
Methylacrylate Film, with a thickness of 0.2mm；The porous ceramic plate with a thickness of 1mm, porosity is greater than 30%, and aperture is small
In 1 μm；The seal box is to use made of silicon rubber, preferably dimethyl silicone polymer.
(2) non-array carbon nano-tube material is subjected to mechanical commutation draft so that surface is made and has nano grooves structure, height axial
The carbon nano-tube film of the degree of orientation, and working electrode is made in the carbon nano-tube film.Wherein, the carbon nano-tube film
Density is 520mg/cm3, electrolyte solution surface tension effects can be resisted to the film dimensions structural damage.
(3) electrode is set in the groove of the porous ceramic plate by high-specific surface area, and by carbon nano-tube film
It is arranged on the porous ceramic plate, and the carbon nano-tube film covers the groove.
(4) flexible polymer film is arranged on the carbon nano-tube film, thus completes the encapsulation of upper surface.
(5) entire sensing mechanism is packaged using the seal box, before encapsulation, in the groove of the porous ceramic plate
The concentration that 1~2ml is added is the sodium chloride solution of 5m/L.
In order to characterize the performance of the pressure sensor, following performance test has been done to the pressure sensor:
Fig. 3, Fig. 4 and Fig. 7 are please referred to, is pressed using sensitive surface of the sinusoidal pressure to pressure sensor, to obtain different pressures
Current responsing signal under power；In test process, the working electrode of senser element and to electrode and current detection component (electrochemistry
Work station) it is connected, for acquiring and analyzing pressure response electric signal.The pressure sensor being capable of breathing to human body, pulse
Bounce monitoring, and can be realized the discrimination of sound, and it is lured during health monitoring using the pressure-of carbon nano-tube material
Conductive chemistry potential change characteristic actively generates response electric signal, is not necessarily to external power supply, avoids the consumption of the energy.
It is pressed using sinusoidal pressure to pressure sensor, pressure frequency is 1Hz；Sinusoidal surge pressure is changed to from 30Pa
380kPa, current signal are collected and analyzed using electrochemical workstation, according to current-to-pressure response relation curve, I=0.0037
+ 0.362* (1-exp (- P/684))+0.362* (1-exp (- P/685)), accuracy reaches 99.8%, can analyze and obtain in real time
Pressure change, and the sensitivity of pressure sensor can be calculated according to current-responsive curve.When pressure is 10kPa~330kPa
When, the sensitivity of pressure sensor is 4.7kPa-1。
It presses to pressure sensor, and keeps pressure constant, can be used for detecting the pressure response time of pressure sensor.By
Fig. 4 can be seen that the wearable pressure sensor based on carbon nano-tube film with fast response speed, i.e. electric current is from zero point position
Set time needed for rising to peak position, about 100ms.
It please refers to that Fig. 5 A and Fig. 5 B, human body are exhaled after the exercise and the frequency of air-breathing is obviously accelerated, and exhales and air-breathing
Hurriedly, it is shown as on curve, the expiration and air-breathing peak after exercise are significantly more than expiration and air-breathing peak before taking exercise, and take exercise
Expiration and air-breathing peak afterwards is relatively more sharp (expiration and air-breathing peak all relative smooths before taking exercise).
Fig. 6 A and Fig. 6 B is please referred to, during the experiment, pressure sensor is placed on and is used to detect arteries and veins at human body wrist
The pressure change fought caused by beating.The frequency that beat pulse is found out by Fig. 6 A is about 60~70 times/min, and Fig. 6 B is shown
When single beat pulse, pressure response current curve which records has on curve obvious
3 peaks, P1For peak systole, P2For left ventricle peak, P3For diastole peak (i.e. the peak of blood backflow generation).
Its response performance to different music is monitored using wearable pressure sensor.By finding out in Fig. 7, wearable pressure
Force snesor produces clearly distinguished current signal to two sections of different music and responds, and according to the peak in current curve
It is worth size and peak position frequency, it can be determined that the rhythm for going out music 1 is very fast, and is rhythmical repetition supper bass, and the section of music 2
It plays, it is opposite to releive.In experimentation, pressure sensor is about 10cm at a distance from music source.
Referring to Fig. 8,25 carbon nano-tube film working electrodes (5 × 5pixel density) is carried out whole in experiment
It closes, prepares the wearable pressure sensing array of human body, the size of sensor array is 5 × 5.5cm2；Using H-shaped load to sensing
Array pressure, different location can produce different current signal responses, and sensor array image has gone out the shape of used load, i.e. H
Shape；According to the response current signal of different location, H-shaped load can be analyzed and act on the pressure field distribution generated in sensor array
Figure.
Wearable pressure sensor and its manufacturing method provided by the invention based on carbon nano-tube film, without external
Power supply, and can produce the real-time voltage and current signal that there is certain relationship with ambient pressure, it can be adapted for water environment, be applicable in
Range is wider, and flexibility is preferable, and response speed is very fast.
As it will be easily appreciated by one skilled in the art that the foregoing is merely illustrative of the preferred embodiments of the present invention, not to
The limitation present invention, any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should all include
Within protection scope of the present invention.
Claims (10)
1. a kind of wearable pressure sensor based on carbon nano-tube film, it is characterised in that:
The pressure sensor includes sensing mechanism, and the sensing mechanism is used to convert electric energy for the pressure energy of testing pressure,
It include seal box (5), porous ceramic plate (3), working electrode (2), to electrode (4) and flexible polymer film (1), it is described more
Hole ceramic wafer (3) open up it is fluted, it is described to electrode (4) setting in the groove；The working electrode (2) is arranged described
On porous ceramic plate (3), and it covers the groove；The groove is for accommodating electrolyte, and the electrolyte is for infiltrating institute
State working electrode (2)；The flexible polymer film (1) is arranged on the seal box (5), is used for the porous ceramics
Plate (3), the working electrode (2) and described electrode (4) is sealed in the seal box (5)；
The working electrode (2) is using made of carbon nano-tube film, and the surface of the carbon nano-tube film is formed with nanometer
Groove structure；The pressure sensor be using pressure-induction electrochemical potential variation characteristic of the carbon nano-tube film come
Convert electric energy for pressure energy, so pressure sensor electric current according to corresponding to the electric energy that pressure converts with it is right
The relationship between pressure and current electric current answered obtain current pressure, are achieved in the real-time monitoring of testing pressure.
2. the wearable pressure sensor based on carbon nano-tube film as described in claim 1, it is characterised in that: the work
Electrode (2) is after electrolyte infiltrates, adsorption balancing charge；Testing pressure is passed by the flexible polymer film (1)
It is delivered on the working electrode (2), so that the electrochemistry usable area of the working electrode (2) reduces, then makes the work
The electric double layer capacitance of electrode (2) changes, and thus the sensing mechanism generates potential change to convert electric energy for pressure energy.
3. the wearable pressure sensor based on carbon nano-tube film as described in claim 1, it is characterised in that: pressure conversion
Relationship between electric current corresponding to obtained electric energy and corresponding pressure is indicated using following formula:
I=0.0037+0.362 × (1-exp (- P/684))+0.362 × (1-exp (- P/685))；
In formula, electric current corresponding to the electric energy that I converts for pressure；P is the corresponding pressure of electric current.
4. the wearable pressure sensor based on carbon nano-tube film as described in claim 1, it is characterised in that: the carbon is received
Mitron film is to be prepared by non-array carbon nano-tube material through mechanical commutation draft.
5. the wearable pressure sensor according to any one of claims 1-4 based on carbon nano-tube film, it is characterised in that:
The density of the carbon nano-tube film is 520mg/cm3, axial orientation degree is 0.68.
6. the wearable pressure sensor according to any one of claims 1-4 based on carbon nano-tube film, it is characterised in that:
The flexible polymer film (1) is polyformaldehyde Methylacrylate Film.
7. the wearable pressure sensor according to any one of claims 1-4 based on carbon nano-tube film, it is characterised in that:
The seal box (5) is using made of transparent silicone rubber.
8. the wearable pressure sensor according to any one of claims 1-4 based on carbon nano-tube film, it is characterised in that:
The sensing range of the pressure sensor is 30Pa~330kPa, and pressure detection sensitivity is 4.7kPa-1, pressure response time is
100ms。
9. the wearable pressure sensor according to any one of claims 1-4 based on carbon nano-tube film, it is characterised in that:
The electrolyte is sodium chloride solution, and the concentration of the sodium chloride solution is 5.0M/L.
10. a kind of manufacturer of the described in any item wearable pressure sensors based on carbon nano-tube film of claim 1-9
Method, which is characterized in that the manufacturing method will be the following steps are included: will first be separately positioned on electrode (4) and working electrode (2) porous
On ceramic wafer (3), then with flexible polymer film (1) by this to electrode (4), the working electrode (2) and the porous ceramic plate (3)
It is sealed in seal box (5), thus obtains the pressure sensor.
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