CN109211443A - A kind of bend-insensitive pressure sensor - Google Patents
A kind of bend-insensitive pressure sensor Download PDFInfo
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- CN109211443A CN109211443A CN201811083854.5A CN201811083854A CN109211443A CN 109211443 A CN109211443 A CN 109211443A CN 201811083854 A CN201811083854 A CN 201811083854A CN 109211443 A CN109211443 A CN 109211443A
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- flexible substrates
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- bend
- porous structure
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- 239000000758 substrate Substances 0.000 claims abstract description 20
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 14
- 239000002121 nanofiber Substances 0.000 claims abstract description 12
- 239000004020 conductor Substances 0.000 claims abstract description 8
- 239000002041 carbon nanotube Substances 0.000 claims abstract description 5
- 229910021393 carbon nanotube Inorganic materials 0.000 claims abstract description 5
- 239000000463 material Substances 0.000 claims abstract description 5
- 229910021389 graphene Inorganic materials 0.000 claims abstract description 4
- 239000011159 matrix material Substances 0.000 claims abstract description 4
- 239000002086 nanomaterial Substances 0.000 claims abstract description 4
- -1 polyethylene terephthalate Polymers 0.000 claims abstract description 4
- 229920000139 polyethylene terephthalate Polymers 0.000 claims abstract description 4
- 239000005020 polyethylene terephthalate Substances 0.000 claims abstract description 4
- 239000011148 porous material Substances 0.000 claims abstract description 4
- 238000005259 measurement Methods 0.000 abstract description 4
- 238000001514 detection method Methods 0.000 abstract description 2
- 238000005452 bending Methods 0.000 description 9
- 238000010586 diagram Methods 0.000 description 2
- 238000004088 simulation Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000002071 nanotube Substances 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Abstract
The invention discloses a kind of bend-insensitive pressure sensors, belong to microsensor field.It includes flexible substrates (1), coated on the gold-plated film layer 2 on flexible substrates (1), the nano-porous structure layer (3) being installed between flexible substrates (1) and gold-plated film layer (2)；Flexible substrates (1) are made of polyethylene terephthalate material, the porous material layer that the nanofibers and hybrid conductive nano material that nano-porous structure layer (3) is 500-800 nanometers by diameter form, hybrid conductive material is located at the inside of nanofiber matrix, mass fraction 1-2wt%；The carbon nanotube (31) and formed with a thickness of 10-50 nanometers of graphene (32) that hybrid conductive material is 10-50 nanometers by diameter.The present invention is a kind of to be applicable to that the bend-insensitive pressure sensor of additonal pressure will not be generated when lower flexible surface detection, synthetical elastic modulus, measurement surface curvature.
Description
Technical field
The invention mainly relates to microsensor fields, refer in particular to a kind of bend-insensitive pressure sensor.
Background technique
Pressure sensor for measuring flexible surface needs to carry out good mechanics with flexible surface to contact, due to manufacture
The elasticity modulus of pressure sensor material is higher, therefore the bending of flexible surface will necessarily cause stress the transverse strain of sensor
The stress induced.Therefore, it is necessary to design the pressure sensor that a kind of pair of bending strain is insensitive, synthetical elastic modulus reduces.
Summary of the invention
Present invention technical problem to be solved is: for technical problem of the existing technology, the present invention provides one kind can
Suitable for flexible surface detection, synthetical elastic modulus it is lower, measurement surface curvature when will not generate additonal pressure bending it is unwise
Pressure-sensitive force snesor.
To solve the above-mentioned problems, solution proposed by the present invention are as follows: a kind of bend-insensitive pressure sensor, it is wrapped
Include flexible substrates, coated on the gold-plated film layer in the flexible substrates, be installed in the flexible substrates and the gold-plated film layer it
Between nano-porous structure layer, structure feature is:
The flexible substrates are made of polyethylene terephthalate material, and nano-porous structure layer is 500- by diameter
The porous material layer of 800 nanometers of nanofibers and hybrid conductive nano material composition, the hybrid conductive material are located at institute
State the inside of nanofiber matrix, mass fraction 1-2wt%；The carbon that the hybrid conductive material is 10-50 nanometers by diameter
Nanotube and with a thickness of 10-50 nanometers graphene form.
The flexible substrates are with a thickness of 1-2 microns, and the gold-plated film layer 2 is with a thickness of 40-80 nanometers.
The nano-porous structure layer is with a thickness of 5-10 microns.
Compared with the prior art, the invention has the following advantages and beneficial effects:
A kind of bend-insensitive pressure sensor of the invention uses nano-porous structure layer, when the flexible surface of measurement
When certain bending deformation occurs, especially biggish bending deformation when, significant elasticity can occur for nano-porous structure layer
Deformation, to just reduce synthetical elastic modulus；And when even more important, nanofibers in nano-porous structure due to
Porous deformation is to occur apparent elongation strain.Therefore, it is soft to be that one kind is applicable to pressure sensor of the invention
Property Surface testing, synthetical elastic modulus be lower, measurement surface curvature when will not generate the bend-insensitive pressure of additonal pressure and pass
Sensor.
Detailed description of the invention
Fig. 1 is a kind of structural schematic diagram of bend-insensitive pressure sensor of the invention.
Fig. 2 is the reticular structure schematic diagram of nano-porous structure layer of the invention.
In figure, 1-flexible substrates；2-gold-plated film layers；3-nano-porous structure layers；31-carbon nanotubes；32-graphite
Alkene.
Specific embodiment
Below with reference to the drawings and specific embodiments, invention is further described in detail.
Referring to figure 1 and figure 2, a kind of bend-insensitive pressure sensor of the invention, it includes flexible substrates 1, applies
The gold-plated film layer 2 being overlying in flexible substrates 1, the nano-porous structure layer 3 being installed between flexible substrates 1 and gold-plated film layer 2.
Referring to figure 1 and figure 2, flexible substrates 1 are made of polyethylene terephthalate material, nano-porous structure
The porous material layer that the nanofibers and hybrid conductive nano material that layer 3 is 500-800 nanometers by diameter form, hybrid conductive
Material is located at the inside of nanofiber matrix, mass fraction 1-2wt%；Hybrid conductive material is 10-50 nanometers by diameter
It carbon nanotube 31 and is formed with a thickness of 10-50 nanometers of graphene 32, the wherein relative mass of carbon nanotube 31 and graphene 32
Than for 1:10.One gauging surface of numerical simulation is the electricity of nano-porous structure layer 3 within the scope of 500-1000pa in surface pressing
Resistance can reduce by 5 orders of magnitude, i.e., by~108Ω drops to~103Ω。
Referring to figure 1 and figure 2, flexible substrates 1 are with a thickness of 1-2 microns, and gold-plated film layer 2 is with a thickness of 40-80 nanometers.
Referring to figure 1 and figure 2, nano-porous structure layer 3 is with a thickness of 5-10 microns.Two gauging surface of numerical simulation, when
When biggish bending occurs for nano-porous structure layer 3, the strain of nanofibers and the strain of nano-porous structure layer 3 are than small
In 25%, it is smaller that this illustrates that the bending of flexible surface influences the strain of nanofibers.
Synthetical elastic modulus reduces principle: when significant bending deformation occurs for flexible surface, nano-porous structure layer 3 will
Occur corresponding bending deformation, however due to porous presence, the nanofibers in nano-porous structure will not then occur bright
Aobvious elongation strain.Therefore, from the point of view of entire sensor, due to using the comprehensive springform of nano-porous structure layer 3
Amount significantly reduces.
Claims (3)
1. a kind of bend-insensitive pressure sensor, including flexible substrates (1), coated on gold-plated on the flexible substrates (1)
Film layer (2), the nano-porous structure layer (3) being installed between the flexible substrates (1) and the gold-plated film layer (2), feature
It is:
The flexible substrates (1) are made of polyethylene terephthalate material, and nano-porous structure layer (3) is by diameter
The porous material layer of 500-800 nanometers of nanofibers and hybrid conductive nano material composition, hybrid conductive material position
In the inside of the nanofiber matrix, mass fraction 1-2wt%；The hybrid conductive material is 10-50 nanometers by diameter
Carbon nanotube (31) and with a thickness of 10-50 nanometers graphene (32) form.
2. a kind of bend-insensitive pressure sensor according to claim 1, it is characterised in that: the flexible substrates (1)
With a thickness of 1-2 microns, the gold-plated film layer (2) is with a thickness of 40-80 nanometers.
3. a kind of bend-insensitive pressure sensor according to claim 1, it is characterised in that: the nano-porous structure
Layer (3) is with a thickness of 5-10 microns.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811083854.5A CN109211443A (en) | 2018-09-18 | 2018-09-18 | A kind of bend-insensitive pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811083854.5A CN109211443A (en) | 2018-09-18 | 2018-09-18 | A kind of bend-insensitive pressure sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109211443A true CN109211443A (en) | 2019-01-15 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811083854.5A Pending CN109211443A (en) | 2018-09-18 | 2018-09-18 | A kind of bend-insensitive pressure sensor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109211443A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110123271A (en) * | 2019-04-10 | 2019-08-16 | 华中科技大学 | Wearable pressure sensor and its manufacturing method based on carbon nano-tube film |
| GB2580660A (en) * | 2019-01-21 | 2020-07-29 | Equinor Energy As | Pressure sensor |
| CN111766001A (en) * | 2019-04-01 | 2020-10-13 | 天津大学 | Micro-wrinkle gold thin film flexible crack sensor with controllable scale |
| CN111766000A (en) * | 2019-04-01 | 2020-10-13 | 天津大学 | Gold thin film flexible crack sensor based on micro-scale wrinkles |
| CN112857634A (en) * | 2021-01-21 | 2021-05-28 | 天津城建大学 | graphene/Carbon Nano Tube (CNTs) flexible pressure sensor and manufacturing method thereof |
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| CN102954848A (en) * | 2011-08-16 | 2013-03-06 | 中国科学技术大学 | Novel flexible mechanical sensor and preparation method thereof |
| US20130055558A1 (en) * | 2011-09-06 | 2013-03-07 | Samsung Electro-Mechanics Co., Ltd. | Method for manufacturing touch panel |
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2018
- 2018-09-18 CN CN201811083854.5A patent/CN109211443A/en active Pending
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| CN102954848A (en) * | 2011-08-16 | 2013-03-06 | 中国科学技术大学 | Novel flexible mechanical sensor and preparation method thereof |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2580660A (en) * | 2019-01-21 | 2020-07-29 | Equinor Energy As | Pressure sensor |
| CN111766001A (en) * | 2019-04-01 | 2020-10-13 | 天津大学 | Micro-wrinkle gold thin film flexible crack sensor with controllable scale |
| CN111766000A (en) * | 2019-04-01 | 2020-10-13 | 天津大学 | Gold thin film flexible crack sensor based on micro-scale wrinkles |
| CN110123271A (en) * | 2019-04-10 | 2019-08-16 | 华中科技大学 | Wearable pressure sensor and its manufacturing method based on carbon nano-tube film |
| CN112857634A (en) * | 2021-01-21 | 2021-05-28 | 天津城建大学 | graphene/Carbon Nano Tube (CNTs) flexible pressure sensor and manufacturing method thereof |
| CN112857634B (en) * | 2021-01-21 | 2022-12-06 | 天津城建大学 | graphene/Carbon Nano Tube (CNTs) flexible pressure sensor and manufacturing method thereof |
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| PB01 | Publication | ||
| PB01 | Publication | ||
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| RJ01 | Rejection of invention patent application after publication | ||
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Application publication date: 20190115 |