CN110119036A - Optical device based on mutual capacitance detection diffractive-optical element - Google Patents

Optical device based on mutual capacitance detection diffractive-optical element Download PDF

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Publication number
CN110119036A
CN110119036A CN201810114156.0A CN201810114156A CN110119036A CN 110119036 A CN110119036 A CN 110119036A CN 201810114156 A CN201810114156 A CN 201810114156A CN 110119036 A CN110119036 A CN 110119036A
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China
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electrode
diffractive
capacitance
optical element
capacitor
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CN201810114156.0A
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Inventor
陈振宇
陈飞帆
戎琦
黄乾友
刘筱迪
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Ningbo Sunny Opotech Co Ltd
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Ningbo Sunny Opotech Co Ltd
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Priority to CN201810114156.0A priority Critical patent/CN110119036A/en
Publication of CN110119036A publication Critical patent/CN110119036A/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/42Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
    • G02B27/4205Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect having a diffractive optical element [DOE] contributing to image formation, e.g. whereby modulation transfer function MTF or optical aberrations are relevant

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)

Abstract

This application discloses a kind of optical devices based on mutual capacitance detection diffractive-optical element, which includes diffractive-optical element, first capacitor electrode, the second capacitance electrode and detection circuit, and wherein first capacitor electrode is located at the side of diffractive-optical element;Second capacitance electrode and first capacitor electrode are located opposite from the other side of diffractive-optical element;And detection circuit is electrically connected with first capacitor electrode and the second capacitance electrode, to detect the mutual capacitance between first capacitor electrode and the second capacitance electrode.

Description

Optical device based on mutual capacitance detection diffractive-optical element
Technical field
This application involves the optical devices based on mutual capacitance detection diffractive-optical element, more particularly, to can pass through The capacitance variations between a pair of electrodes being arranged on diffractive-optical element are detected to judge the integrality of diffractive-optical element Optical device.
Background technique
As structured light technique is perfect, also gradually it is applied on all kinds of mobile terminals using the depth camera of structure light, Such as IphoneX takes depth camera to carry out recognition of face.General depth camera includes project structured light device and reception device, And what the corresponding light source of grenade instrumentation was generally taken is infrared light, infrared light belongs to black light, i.e. human eye can not identify infrared The presence of light.When infrared light is too strong, it is easy to damage human eye, therefore when using project structured light device, therefore, to assure that It avoids damaging human eye.
Project structured light device includes light source (VCSEL), calibration lens system and diffractive-optical element (DOE), light source institute The laser of sending is collimated by calibration lens system, then by diffractive-optical element diffraction (beam splitting, duplication), is finally projected to sky Between target surface.Wherein, when diffractive-optical element is split the light beam by collimation, the energy of structure light can correspondingly be reduced Amount, so as to avoid damaging the extraterrestrial targets such as human eye.
But in use, due to the effect of external force, so that diffractive-optical element may rupture, or work as water When drop etc. is attached to diffractive-optical element, so that the structured light patterns that grenade instrumentation projects change, filled to make to receive Received pattern inaccuracy is set, imaging effect is finally influenced.In addition, the variation of diffractive-optical element possibly even throws structure light The structure light that injection device projects damages human eye etc., such as the rupture of diffractive-optical element can be understood as light source sending Laser it is collimated after be directly projected to the extraterrestrial targets such as human eye, at this point, being made since the energy of light beam is excessive to extraterrestrial target At injury.
It is respectively placed on two substrates in addition, disclosing capacitance electrode in the prior art to which the structure for detecting DOE is complete The technical solution of whole property, but in this scenario, it, can when rupturing or adhering to droplet occur in two respective two sides of capacitance electrode It can not can accurately detect the generation of abnormal conditions.Such as on the same substrate, at the opposed flattened surface of DOE micro-structure When forming droplet, it is also possible to will lead to project structured light quality variation.Secondly, in the above scheme, existing between two substrates Clearance layer, clearance layer may due to temperature variation and make capacitance that larger change occur, thus improve in detection process Error rate.In addition, due to the presence of this clearance layer, therefore, to assure that the good leakproofness of clearance layer, so that technology difficulty is significantly Increase.
Summary of the invention
To solve posed problems above, the application provides a kind of optics device based on mutual capacitance detection diffractive-optical element Part.The optical device can judge light by detecting the capacitance variations between a pair of electrodes being arranged on diffractive-optical element The integrality of diffraction element is learned, to avoid changing by the beam pattern of diffractive-optical element diffraction and influencing projection effect Fruit and the excessive injury that extraterrestrial target may cause of beam energy.
The application illustrative embodiments provide a kind of optical device based on mutual capacitance detection diffractive-optical element, the light Learning device may include diffractive-optical element, first capacitor electrode, the second capacitance electrode and detection circuit, wherein first capacitor electricity Pole can be located at the side of diffractive-optical element;Second capacitance electrode can be located opposite from diffractive-optical element with first capacitor electrode The other side;And detection circuit can be electrically connected with first capacitor electrode and the second capacitance electrode, to detect first capacitor electrode With the mutual capacitance between the second capacitance electrode.
According to the application illustrative embodiments, first capacitor electrode and the second capacitance electrode can be plane electrode, and It is located on opposite two surface of diffractive-optical element.
According to the application illustrative embodiments, first capacitor electrode and the second capacitance electrode may be alternatively located at optical diffraction member On the identical surface of part.
According to the application illustrative embodiments, first capacitor electrode and the second capacitance electrode can be interdigital electricity Pole.
According to the application illustrative embodiments, diffractive-optical element may include diffracting layer and pattern generation layer, diffracting layer On be provided with micro-structure for diffracted beam, and the light beam through diffraction is formed as pattern beam by pattern generation layer.
According to the application illustrative embodiments, first capacitor electrode and the second capacitance electrode can be separately positioned on diffracting layer Two opposite surfaces on.
According to the application illustrative embodiments, first capacitor electrode be may be provided on diffracting layer, and the second capacitance electrode It can be oppositely disposed at first capacitor electrode on pattern generation layer.
According to the application another exemplary embodiment, diffractive-optical element may include diffracting layer, be provided on diffracting layer Micro-structure for diffracted beam;And optical device may also include transparent protective layer, and transparent protective layer covers the micro- of diffracting layer Structure, so that forming sealing space between transparent protective layer and diffracting layer.
According to the application another exemplary embodiment, first capacitor electrode be may be provided on a surface of diffracting layer, and Second capacitance electrode and first capacitor electrode are located opposite from another surface of diffracting layer.
According to the application another exemplary embodiment, first capacitor electrode be may be provided on diffracting layer, and the second capacitor Electrode may be provided on transparent protective layer.
According to the application another exemplary embodiment, transparent protective layer can be planar lens, convex lens and concavees lens One of.
According to the application another exemplary embodiment, transparent protective layer can be made of transparent glass.
It may also include a pair of of reference capacitance electrode according to the optical device of the application another exemplary embodiment, above-mentioned one Reference capacitance electrode can be located in the stable operation region of diffractive-optical element, and be respectively electrically connected to detection circuit, wherein The capacitor and a pair of of reference capacitance electrode that detection circuit can will test between first capacitor electrode and the second capacitance electrode it Between capacitor be compared.
It may also include ground unit according to the optical device of the application another exemplary embodiment, ground unit can be located at Between first capacitor electrode and diffractive-optical element and between the second capacitance electrode and diffractive-optical element and it is configured to be grounded, To reduce influence of the parasitic capacitance to the mutual capacitance between first capacitor electrode detected and the second capacitance electrode.
The application illustrative embodiments also provide a kind of project structured light device, which may include base In mutual capacitance detection diffractive-optical element optical device, the optical device may include diffractive-optical element, first capacitor electrode, Second capacitance electrode and detection circuit, wherein first capacitor electrode can be located at the side of diffractive-optical element;Second capacitance electrode The other side of diffractive-optical element can be located opposite from first capacitor electrode;And the both ends of detection circuit are electric with first respectively Hold electrode and the connection of the second capacitance electrode, to detect the capacitor between first capacitor electrode and the second capacitance electrode.In addition, structure Light projecting apparatus further includes laser emitter, colimated light system and control unit, wherein colimated light system can be located at laser emitter institute In the optical path of the light beam of sending, to be collimated to the light beam issued;Control unit can be detected according to detection circuit Mutual capacitance between one capacitance electrode and the second capacitance electrode controls shining for laser emitter.
Detailed description of the invention
Above and/or other aspects will describe by referring to accompanying drawing certain illustrative embodiments and become more to show and easy See.Attached drawing is intended to show that the illustrative embodiments of the application rather than is limited.In the accompanying drawings:
Fig. 1 is the perspective view according to the optical device of one illustrative embodiments of the application;
Fig. 2 is the front schematic view according to the optical device of one illustrative embodiments of the application;
Fig. 3 is the reverse side schematic diagram according to the optical device of one illustrative embodiments of the application;
Fig. 4 is the structural schematic diagram according to the optical device of the application another exemplary embodiment;
Fig. 5 is the structural schematic diagram according to the optical device of the application another exemplary embodiment;
Fig. 6 is the structural schematic diagram according to the optical device of the application another exemplary embodiment;
Fig. 7 is the structural schematic diagram for showing the project structured light device of applicable embodiment another according to the present invention.
Specific embodiment
Certain illustrative embodiments are described in more detail below with reference to accompanying drawings, wherein in the text, identical Appended drawing reference refer to identical element.In this respect, illustrative embodiments can have different forms, and should not be solved It is interpreted as being limited to description described herein.Correspondingly, it is only used for explaining below by way of describing illustrative embodiments with reference to the accompanying drawings The various aspects of the application.The size of property for the convenience of explanation, the element in attached drawing can be exaggerated.That is, due in figure Component size and thickness for ease of illustration arbitrarily shown, therefore following exemplary embodiment should not be limited by it System.
In addition, term used in this specification is only used for describing specific embodiment, it is not intended that limitation the application. The statement of singular includes the statement of plural form, unless it has visibly different meaning within a context.In this explanation In book, it should be appreciated that term such as " comprising " or " having " etc. are intended to indicate that feature disclosed in this specification, number, operation, portion The presence of part, part or their combination, it is not intended that exclude the presence of or be attached with one or more other features, number, behaviour Work, component, part or their combination.
Spreading out based on mutual capacitance detection optics according to the application illustrative embodiments is described in detail below with reference to accompanying drawings Penetrate the optical device of element.
Fig. 1 shows the optics device based on mutual capacitance detection diffractive-optical element of an illustrative embodiments according to the present invention The perspective view of part 100, and Fig. 2 and Fig. 3 be respectively according to the example the front schematic view of the optical device 100 of property embodiment and Reverse side schematic diagram.
Optical device 100 according to the present invention includes diffractive-optical element (DOE;Diffractive Optical Elements) 110, first capacitor electrode 120, the second capacitance electrode 130 and detection circuit 140.First capacitor electrode 120 can As driving electrodes, the second capacitance electrode 130 can be used as sensing electrode, and vice versa.In the present embodiment, first capacitor electricity Pole 120 and the second capacitance electrode 130 are respectively plane electrode, and are located on two surfaces of diffractive-optical element 110, And opposite to each other.
For example, as shown in Fig. 2, diffractive-optical element 110 is limited to positive feelings with etched recesses on one side Under condition, first capacitor electrode 120 can cover the front that diffractive-optical element 110 is arranged in.Since first capacitor electrode 120 can be by The transparent materials such as ITO are made, therefore do not influence the diffracting effect of diffractive-optical element 110.In addition, the second capacitance electrode 130 can The reverse side of diffractive-optical element 110 is arranged in covering, and opposite with first capacitor electrode 120.
In this embodiment, the area that first capacitor electrode 120 and the second capacitance electrode 130 are covered can be greater than optics The area of the etched recesses of diffraction element 110.
In this case, conductor can be respectively set at the neighboring on positive and negative two surfaces of diffractive-optical element 110 Unit 141 and 142.Respective one end of conductor element 141 and 142 respectively with first capacitor electrode 120 and the second capacitance electrode 130 Connection, and their other end is connect with detection circuit 140 respectively.Detection circuit 140 is able to detect first capacitor electrode as a result, 120 and the second capacitor between capacitance electrode 130.Conductor element 141 and 142, which is not constituted diffracting effect, to be influenced.Further, Above-mentioned conductor element 141 and 142 can be shaped in detection circuit 140 respectively.
In another embodiment, conductor element 141 and 142 can be shaped in above-mentioned first capacitor electrode respectively 120 and second capacitance electrode 130, i.e., when forming first capacitor electrode 120 and the second capacitance electrode 130, respectively in the first electricity The corresponding position (for example, the positions such as edge of capacitance electrode) for holding electrode 120 and the second capacitance electrode 130 forms conductor element 141 and 142.
Detection circuit 140 may also include oscillator (not shown), to constitute pierce circuit, and thus detect capacitance. It is understood that under normal operation, the capacitance difference between first capacitor electrode 120 and the second capacitance electrode 130 Value is maintained within the scope of predetermined capacitance value.However, when the structure of diffractive-optical element changes, for example, occurring broken, broken It splits, deform or when condensate moisture is at the surface of diffractive-optical element, the optical characteristics of diffraction element will be changed, thus caused Capacitive differential between first capacitor electrode 120 and the second capacitance electrode 130 also changes therewith.At this point, can be according to detection The capacitance variations that circuit detects judge whether diffractive-optical element 110 breaks down.
Fig. 4 is the structural schematic diagram according to the optical device 200 of the application another exemplary embodiment.It is exemplary at this In embodiment, first capacitor electrode 120 and the second capacitance electrode 130 can arranged crosswise in the identical of diffractive-optical element 110 Surface on.As shown in figure 4, first capacitor electrode 120 and the second capacitance electrode 130 can be interdigitated electrodes.It is worth one It is mentioned that, the interdigitated electrodes can be set on a surface of diffractive-optical element 110, or can also set simultaneously It sets on two surface.When first capacitor electrode 120 and the second capacitance electrode 130 are set to diffractive-optical element 110 simultaneously Two surfaces on when, in addition on same surface first capacitor electrode 120 and 130 cross-pair of the second capacitance electrode formed with answering Outside mutual capacitance structure, the first capacitor electrode 120 on a surface and the second capacitance electrode 130 on another surface Mutual capacitance structure can be formed each other.
Fig. 5 is the structural schematic diagram according to the optical device 300 of the application another exemplary embodiment.It is exemplary at this In embodiment, first capacitor electrode 120 and the second capacitance electrode 130 may be provided at the both sides of the edge of diffractive-optical element 110 Place, and connect respectively with detection circuit 140, enable detection circuit 140 to measure first capacitor electrode 120 and the second capacitor electricity Capacitor between pole 130.
Optical device according to the present invention may also include a pair of of reference capacitance electrode (not shown).A pair of of reference capacitance electrode It may be provided in the stable operation region of diffractive-optical element, wherein aforementioned stable operating area is limited to diffractive-optical element In the opposite region for being not easily susceptible to external action or breaking down.Detecting capacitor can be by the capacitor between a pair of of reference capacitance electrode Capacitor between detected first capacitor electrode and the second capacitance electrode is compared, and then determines diffractive-optical element Whether normal operating.
In addition, optical device according to the present invention may also include ground unit (for example, earthed circuit).The ground unit can It is arranged at the neighboring position of diffraction optical element.Ground unit is applied earthing potential, so as in detection circuit Reducing when detecting the capacitor between first capacitor electrode and the second capacitance electrode influences as caused by parasitic capacitance or noise.
Fig. 6 is the structural schematic diagram for showing the optical device 400 according to the application another exemplary embodiment.Show at this In example property embodiment, optical device 400 further includes for protecting the transparency protected of the diffracting layer 211 of diffractive-optical element 210 Layer 212, can be respectively set that there are two capacitance electrodes 120 on the diffracting layer 211 and transparent protective layer 212 of diffractive-optical element 210 With 130.Specifically, it may be provided on diffracting layer 211 micro-structure (DOE), and transparent protective layer 212 can be made of simultaneously transparent glass On the surface for being provided with micro-structure in diffracting layer 211, thus formed between diffracting layer 211 and transparent protective layer 212 close Seal space.By this seal protection structure, it can prevent the impurity such as external moisture or micronic dust from touching micro-structure to shadow The performance for ringing micro-structure even damages it.In the illustrative embodiments, transparent protective layer 212 can have flat Surface, and the diffraction of light beam is not influenced.However, the present invention is not limited thereto.According to other embodiments, transparent protective layer 212 It can be achieved as convex lens with for further being collimated to light beam, or can also realize as concavees lens, to prevent the remittance of light beam It is poly-.It should be understood that the material in transparent protective layer is not limited to embodiments described herein.
Although Fig. 6 shows first capacitor electrode 120 and the second capacitance electrode 130 is located at diffractive-optical element 210 Diffracting layer 211 and transparent protective layer 213 embodiment, but the present invention is not limited thereto.For example, being similar to referring to Fig.1 To embodiment described in Fig. 5, first capacitor electrode 120 and the second capacitance electrode 130 can also be separately positioned on diffracting layer 121 At two opposite positions of (herein, being equivalent to single layer optical diffraction element), to form mutual capacitance structure.
Fig. 7 is the structural schematic diagram for showing the project structured light device of applicable embodiment another according to the present invention.
The project structured light device 1000 of another embodiment further includes laser emitter 10, colimated light system according to the present invention 20 and diffractive-optical element 30, diffractive-optical element 30 includes diffracting layer 301 and pattern generation layer 302, wherein colimated light system position In in the optical path for the light beam that laser emitter is issued, to be collimated to the light beam issued;Collimated light beam passes through The pattern generation layer forms pattern beam, and pattern beam carries out diffraction using diffracting layer, is projected to extraterrestrial target.Due to light Learning diffraction element can be generated pattern beam, therefore in this embodiment of the invention, laser emitter is set as the light source of rule.Value It is to be noted that, it is preferable that first capacitor electrode 320 and the second capacitance electrode 330 be located at two of diffracting layer it is opposite On surface, first capacitor electrode 320 and the second capacitance electrode 330 constitute mutual capacitance structure, to be detected by detection circuit Capacitance is achieved in the monitoring to diffractive-optical element 30.In addition to this, first capacitor electrode 320 and the second capacitance electrode 330 can be used the surface that staggered form mode is arranged in diffractive-optical element 30, to realize the monitoring to diffractive-optical element 30.
It should be noted that according to other embodiments of the present invention, may also set up multipair capacitance electrode.For example, in diffracting layer and A pair of of capacitance electrode is respectively set on respective two opposite surfaces of pattern generation layer, so that between each pair of capacitance electrode Mutual capacitance can be formed, realizes comprehensive monitoring.Further, it may also set up a pair of of capacitance electrode, wherein a capacitor electricity Pole may be provided on a surface of diffracting layer, and another capacitance electrode may be provided on a surface of pattern generation layer, And two capacitance electrodes is made to form mutual capacitance.
In addition, further including that laser emitter, colimated light system and control are single according to the project structured light device of the embodiment Member, wherein colimated light system is located in the optical path for the light beam that laser emitter is issued, to collimate to the light beam issued; The mutual capacitance between first capacitor electrode and the second capacitance electrode that control unit is detected according to detection circuit controls laser Transmitter shines.
Further, control unit can will test between the first capacitor electrode and the second capacitance electrode that circuit detects Mutual capacitance is compared with predetermined capacitance, and judged according to comparison result diffractive-optical element whether normal operating.
Alternatively, control unit may also include a pair of of reference capacitance electrode, and a pair of of reference capacitance electrode can spread out positioned at optics It penetrates in the stable operation region of element, and is respectively connected to detection circuit.In addition, control unit will be detected by detection circuit Capacitor between first capacitor electrode and the second capacitance electrode is compared with the capacitor between a pair of of reference capacitance electrode, and root According to comparison result judge diffractive-optical element whether normal operating.
For example, if control unit controls when being judged as that diffractive-optical element is abnormal according to the capacitance measured And laser emitter is closed, so that the light beam projection for avoiding laser emitter from issuing is bad or makes to extraterrestrial target object At damage.
Further, according to the structured light projecting device of the application illustrative embodiments apply also for smart phone, The various electronic equipments such as wearable device, computer equipment, television set, the vehicles, camera, video camera, monitoring device.
Although having shown and described some embodiments of the application, it should be appreciated to those skilled in the art that These embodiments can be changed in the case where not departing from the principle and spirit of the application, scope of the present application is by weighing Benefit requires and its equivalent restriction.

Claims (22)

1. a kind of optical device based on mutual capacitance detection diffractive-optical element, comprising:
Diffractive-optical element;
First capacitor electrode, positioned at the side of the diffractive-optical element;
Second capacitance electrode is located opposite from the other side of the diffractive-optical element with the first capacitor electrode;And
Detection circuit is electrically connected with the first capacitor electrode and second capacitance electrode, to detect the first capacitor electricity Mutual capacitance between pole and second capacitance electrode.
2. optical device according to claim 1, wherein the first capacitor electrode and second capacitance electrode are flat Face electrode, and be located on opposite two surface of the diffractive-optical element.
3. optical device according to claim 1, wherein the first capacitor electrode and second capacitance electrode are located at On the identical surface of the diffractive-optical element.
4. optical device according to claim 3, wherein the first capacitor electrode and second capacitance electrode are to hand over Interdigitated electrodes.
5. optical device according to claim 1, wherein
The diffractive-optical element includes diffracting layer and pattern generation layer, is provided on the diffracting layer for the micro- of diffracted beam Structure, and the light beam through diffraction is formed as pattern beam by the pattern generation layer.
6. optical device according to claim 5, wherein
The first capacitor electrode and second capacitance electrode are separately positioned on two opposite surfaces of the diffracting layer.
7. optical device according to claim 5, wherein
The first capacitor electrode is arranged on the diffracting layer, and second capacitance electrode and the first capacitor electrode phase It is arranged on the pattern generation layer over the ground.
8. optical device according to claim 1, wherein
The diffractive-optical element includes diffracting layer, and the micro-structure for diffracted beam is provided on the diffracting layer;And
The optical device further include:
Transparent protective layer, the transparent protective layer cover the micro-structure of the diffracting layer so that the transparent protective layer with Sealing space is formed between the diffracting layer.
9. optical device according to claim 8, wherein a table of the diffracting layer is arranged in the first capacitor electrode On face, and second capacitance electrode and the first capacitor electrode are located opposite from another surface of the diffracting layer.
10. optical device according to claim 8, wherein the first capacitor electrode is arranged on the diffracting layer, and Second capacitance electrode is arranged on the transparent protective layer.
11. the optical device according to any one of claim 8 to 10, wherein
The transparent protective layer is one of planar lens, convex lens and concavees lens.
12. optical device according to claim 8, wherein the transparent protective layer is made of transparent glass.
13. optical device according to any one of claim 1 to 10, further includes:
A pair of of reference capacitance electrode in the stable operation region of the diffractive-optical element, and is respectively connected to the inspection Slowdown monitoring circuit,
Wherein, the capacitor that the detection circuit will test between the first capacitor electrode and second capacitance electrode with Capacitor between the pair of reference capacitance electrode is compared.
14. optical device according to any one of claim 1 to 10, further includes:
Ground unit, the ground unit is between the first capacitor electrode and the diffractive-optical element and described It between two capacitance electrodes and the diffractive-optical element and is configured to be grounded, to reduce parasitic capacitance to the first capacitor electrode The influence of mutual capacitance between the diffractive-optical element.
15. a kind of project structured light device, comprising:
Optical device according to claim 1 based on mutual capacitance detection diffractive-optical element,
Laser emitter;
Colimated light system, in the optical path of the light beam issued positioned at the laser emitter, to be collimated to the light beam issued;
Control unit, the first capacitor electrode and second electricity that described control unit is detected according to the detection circuit Hold the mutual capacitance between electrode to control shining for the laser emitter.
16. project structured light device according to claim 15, wherein
Between the first capacitor electrode and second capacitance electrode that described control unit detects the detection circuit The difference of mutual capacitance be compared with predetermined capacitance, and judge the diffractive-optical element whether just according to comparison result Often operation.
17. project structured light device according to claim 15, wherein
The optical device further includes a pair of of reference capacitance electrode, and the pair of reference capacitance electrode is located at the optical diffraction member In the stable operation region of part, and it is respectively connected to the detection circuit, and,
Described control unit by the first capacitor electrode detected by the detection circuit and second capacitance electrode it Between capacitor be compared with the capacitor between the pair of reference capacitance electrode, and judge that the optics spreads out according to comparison result Penetrate element whether normal operating.
18. project structured light device according to claim 16 or 17, wherein
If described control unit is judged as the diffractive-optical element operation exception according to comparison result, the laser is closed Transmitter.
19. project structured light device according to claim 16 or 17, wherein
The diffractive-optical element further includes ground unit, and the ground unit is located at the first capacitor electrode and the optics It between diffraction element and between second capacitance electrode and the diffractive-optical element and is configured to be grounded, to reduce parasitism Influence of the capacitor to the mutual capacitance between the first capacitor electrode and the diffractive-optical element.
20. a kind of depth camera, comprising:
Structured light projecting device as described in any one of claim 15 to 17, for the surface projective structure to extraterrestrial target Light light beam, to form recognizable region;
Mould group is acquired, is formed by the recognizable region on the surface for acquiring the extraterrestrial target,
Wherein, the field depth of the acquisition mould group is greater than or equal to the projection scope of the structured light projecting device.
21. a kind of electronic equipment, comprising: depth camera as claimed in claim 20.
22. electronic equipment according to claim 21, wherein the electronic equipment is smart phone, wearable device, meter Calculate one of machine equipment, television set, the vehicles, camera, video camera, monitoring device.
CN201810114156.0A 2018-02-05 2018-02-05 Optical device based on mutual capacitance detection diffractive-optical element Pending CN110119036A (en)

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JP2021086595A (en) * 2019-11-27 2021-06-03 奇景光電股▲ふん▼有限公司 Optical film stack, changeable light source device, and face sensing module
US11126823B2 (en) 2019-11-27 2021-09-21 Himax Technologies Limited Optical film stack, changeable light source device, and face sensing module

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