CN110116365A - Chemical-mechanical grinding device bench monitoring system - Google Patents
Chemical-mechanical grinding device bench monitoring system Download PDFInfo
- Publication number
- CN110116365A CN110116365A CN201910555218.6A CN201910555218A CN110116365A CN 110116365 A CN110116365 A CN 110116365A CN 201910555218 A CN201910555218 A CN 201910555218A CN 110116365 A CN110116365 A CN 110116365A
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- Prior art keywords
- signal
- sensor
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- chemical
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/005—Control means for lapping machines or devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
- B24B53/017—Devices or means for dressing, cleaning or otherwise conditioning lapping tools
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Abstract
The present invention is chemical-mechanical grinding device bench monitoring system, and structure includes main control module and the threshold setting module connecting respectively with main control module signal, numerical value display module, alarm module, signal conversion module and monitoring sensor.Advantages of the present invention: it is developed based on PLC, is multichannel, the signal acquisition of polymorphic type, the alarm system of comparison.Increase detecting, alarm mechanism on board, is prevented and alarmed in advance to that may be led to the problem of in production, ensured product quality stability.It is vdiverse in function, data collection point is more, level of integrated system is high, can be convenient and be transplanted on other similar board.
Description
Technical field
The present invention relates to chemical-mechanical grinding device bench monitoring systems.
Background technique
With the gradually development of semiconductor technology, requirement intelligentized to chemical mechanical grinding (CPM) equipment board is more next
Higher, the important parameter that board is related to is more and more important with the development of processing procedure, and the improvement of processing procedure is needed by these parameters
It is detected.
Chemical-mechanical grinding device board in the prior art, can not be right without effective integration detecting, alarm mechanism
It may be led to the problem of in production and be prevented and alarmed in advance, stable product quality is unable to get guarantee.
Summary of the invention
Proposed by the present invention is chemical-mechanical grinding device bench monitoring system, and purpose is intended to fill up prior art presence
Above-mentioned blank, on board increase detecting, alarm mechanism, prevented and reported in advance to that may be led to the problem of in production
It is alert, it ensures product quality stability.
Technical solution of the invention: chemical-mechanical grinding device bench monitoring system, structure include main control module
Threshold setting module, numerical value display module, alarm module, signal conversion module and the prison being connect respectively with main control module signal
Control sensor；
The main control module is for the next acquisition signal of monitoring sensor transmission and is transferred to signal conversion module, then
It receives the numerical signal that signal conversion module transmission comes to be compared with the threshold signal in threshold setting module, and numerical value is believed
It number is sent to numerical value display module and alarm signal is sent to alarm module；
The threshold setting module is for inputting threshold signal and being sent to main control module；
The numerical value display module is used to receive the numerical signal that main control module transmission comes and is shown；
The alarm module is used to receive the alarm signal that main control module transmission comes；
The signal conversion module is used to receive the acquisition signal that main control module transmission comes and is converted into numerical signal and passes
It is defeated by main control module.
Preferably, monitoring sensing includes grinding mat trimmer upper and lower position detection sensor, grinding mat trimmer
Revolving speed detection sensor, grinding head cameral mantle leak sensor, high-pressure spraying are discharged flow sensor tube, high-pressure spraying outlet valve
Baroceptor, chemical flow sensor, wafer rotation driving wheel speed sampling sensor and fresh air air quantity of fan sensor；
The grinding mat trimmer upper and lower position detection sensor is for detecting grinding mat trimmer up/down state signal
And it is transferred to signal conversion module；
The grinding mat trimmer revolving speed detection sensor is used to detect tach signal and the transmission of grinding mat trimmer
To signal conversion module；
The grinding head cameral mantle leak sensor turns for detecting grinding head gas chamber moisture signal and being transferred to signal
Change the mold block；
The flow signal and biography of high-pressure spraying outlet pipe of the high-pressure spraying water outlet flow sensor tube for detecting
It is defeated by signal conversion module；
Air pressure letter of the high-pressure spraying outlet valve baroceptor for the high-pressure spraying outlet pipe outlet valve of detecting
Number and be transferred to signal conversion module；
The chemical flow sensor is by detecting based on chemical flow signal in place and being transferred to signal modulus of conversion
Block；
The wafer rotation driving wheel speed sampling sensor is for detecting wafer rotation driving wheel speed signal and passing
It is defeated by signal conversion module；
The fresh air air quantity of fan sensor is for detecting fresh air fan air-out volume signal and being transferred to signal conversion
Module.
Preferably, the main control module also respectively with board, sound and light alarm module, remote monitoring end and third party signalling
Module by signal connection.
Preferably, grinding mat trimmer upper and lower position detection sensor setting drives in grinding mat trimmer bottom
Mechanism side, grinding mat trimmer revolving speed detection sensor are arranged in grinding mat trimmer side.
Preferably, the grinding head cameral mantle leak sensor is humidity sensor, is arranged in grinding head chamber vacuum
In connecting tube.
Preferably, high-pressure spraying water outlet flow sensor tube is Doppler flowmeter, is arranged to go out in high-pressure spraying
On water pipe, high-pressure spraying outlet valve baroceptor is air pressure acquisition sensor, setting in board valve group and high-pressure spraying water outlet
On pipeline between pipe outlet valve.
Preferably, the chemical flow sensor is arranged at chemicals outlet tube flowmeter upper floating ball.
Preferably, the setting of wafer rotation driving wheel speed sampling sensor is on wafer rotation driving wheel.
Preferably, the fresh air air quantity of fan sensor is arranged at fresh air fan outlet.
Preferably, the signal conversion module can also with ambient wind velocity sensor, environment temperature sensor and change planes wet
Spend sensor signal connection.
Advantages of the present invention: it is developed based on PLC, is multichannel, the signal acquisition of polymorphic type, the alarm system of comparison.?
Increase detecting, alarm mechanism on board, prevented and alarmed in advance to that may be led to the problem of in production, guarantees product matter
Measure stability.It is vdiverse in function, data collection point is more, level of integrated system is high, can be convenient and be transplanted on other similar board.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of chemical-mechanical grinding device bench monitoring system of the present invention.
1 in figure it is main control module, 2 be threshold setting module, 3 be numerical value display module, 4 be alarm module, 5 is signal
Conversion module, 6 be sound and light alarm module, 7 be remote monitoring end, 8 be third party signalling module, 9 be grinding mat trimmer or more
Position detecting sensor, 10 be grinding mat trimmer revolving speed detection sensor, 11 be grinding head cameral mantle leak sensor, 12 be
High-pressure spraying water outlet flow sensor tube, 13 be high-pressure spraying outlet valve baroceptor, 14 be chemical flow sensor, 15
It is wafer rotation driving wheel speed sampling sensor, 16 is fresh air air quantity of fan sensor.
Specific embodiment
Below with reference to embodiment and specific embodiment, the present invention is described in further detail.
As shown in Figure 1, chemical-mechanical grinding device bench monitoring system, structure include main control module 1 and respectively with master
Threshold setting module 2, numerical value display module 3, alarm module 4, signal conversion module 5 and the monitoring for controlling the connection of 1 signal of module pass
Sensor；
The main control module 1 is for the next acquisition signal of monitoring sensor transmission and is transferred to signal conversion module 5, so
It is followed by the numerical signal that the receipts transmission of signal conversion module 5 comes to be compared with the threshold signal in threshold setting module 2, and will count
Value signal is sent to numerical value display module 3 and alarm signal is sent to alarm module 4；
The threshold setting module 2 is for inputting threshold signal and being sent to main control module 1；
The numerical value display module 3 is used to receive the numerical signal that the transmission of main control module 1 comes and is shown；
The alarm module 4 is used to receive the alarm signal that the transmission of main control module 1 comes；
The signal conversion module 5 is used to receive the acquisition signal that the transmission of main control module 1 comes and is converted into numerical signal simultaneously
It is transferred to main control module 1.
The monitoring sensing is detectd including grinding mat trimmer upper and lower position detection sensor 9, grinding mat trimmer revolving speed
It surveys sensor 10, grinding head cameral mantle leak sensor 11, high-pressure spraying and is discharged flow sensor tube 12, high-pressure spraying outlet valve
Baroceptor 13, chemical flow sensor 14, wafer rotation driving wheel speed sampling sensor 15 and fresh air air quantity of fan
Sensor 16；
The grinding mat trimmer upper and lower position detection sensor 9 is for detecting grinding mat trimmer up/down state signal
And it is transferred to signal conversion module 5；
The grinding mat trimmer revolving speed detection sensor 10 is used to detect the tach signal and biography of grinding mat trimmer
It is defeated by signal conversion module 5；
The grinding head cameral mantle leak sensor 11 is for detecting grinding head gas chamber moisture signal and being transferred to signal
Conversion module 5；
The flow signal of high-pressure spraying outlet pipe of the high-pressure spraying water outlet flow sensor tube 12 for detecting is simultaneously
It is transferred to signal conversion module 5；
Air pressure of the high-pressure spraying outlet valve baroceptor 13 for the high-pressure spraying outlet pipe outlet valve of detecting
Signal is simultaneously transferred to signal conversion module 5；
The chemical flow sensor 14 is by detecting based on chemical flow signal in place and being transferred to signal conversion
Module 5；
The wafer rotation driving wheel speed sampling sensor 15 is for detecting wafer rotation driving wheel speed signal simultaneously
It is transferred to signal conversion module 5；
The fresh air air quantity of fan sensor 16 turns for detecting fresh air fan air-out volume signal and being transferred to signal
Change the mold block 5.
The main control module 1 also respectively with board 5, sound and light alarm module 6, remote monitoring end 7 and third party signalling mould
The connection of 8 signal of block.
The grinding mat trimmer upper and lower position detection sensor 9 is arranged in grinding mat trimmer bottom driving mechanism one
Side, grinding mat trimmer revolving speed detection sensor 10 are arranged in grinding mat trimmer side.
The grinding head cameral mantle leak sensor 11 is humidity sensor, is arranged in grinding head chamber vacuum connecting tube
It is interior.
The high-pressure spraying water outlet flow sensor tube 12 is Doppler flowmeter, is arranged in high-pressure spraying outlet pipe
On, high-pressure spraying outlet valve baroceptor 13 is air pressure acquisition sensor, is arranged in board valve group and high-pressure spraying outlet pipe
On pipeline between outlet valve.
The chemical flow sensor 14 is arranged at chemicals outlet tube flowmeter upper floating ball.
Wafer rotation driving wheel speed sampling sensor 15 setting is on wafer rotation driving wheel.
The fresh air air quantity of fan sensor 16 is arranged at fresh air fan outlet.
The signal conversion module 5 can also be with ambient wind velocity sensor, environment temperature sensor and humidity sensor of changing planes
The connection of device signal.
According to the above structure, when this monitoring system works,
Grinding mat trimmer upper and lower position detection sensor 9 and grinding mat trimmer revolving speed detection sensor 10 can be detectd in time
Grinding mat trimmer motion state is surveyed, mechanism or electrical exception is avoided to lead to grinding mat trimmer velocity anomaly；
Grinding head cameral mantle leak sensor 11 can predict in advance grinding head cameral mantle leakage, avoid pressure anomaly or
Fragmentation generates product quality problem；
High-pressure spraying water outlet flow sensor tube 12 and high-pressure spraying outlet valve baroceptor 13 can predict flow in advance,
Prevention Traffic Anomaly causes product abnormal in advance；
Chemical flow sensor 14 can handle the problem immediately, reduce water flow and impact to wafer；
Wafer rotation driving wheel speed sampling sensor 15 can handle hardware problem immediately, reduce wafer impact；
Fresh air air quantity of fan sensor 16 can predict in advance there are the problem of, avoid more defects from generating；
Each component described above is the prior art, and those skilled in the art, which can be used, arbitrarily can be achieved its corresponding function
Model and existing design.
What has been described above is only a preferred embodiment of the present invention, it is noted that for those of ordinary skill in the art
For, without departing from the concept of the premise of the invention, various modifications and improvements can be made, these belong to the present invention
Protection scope.
Claims (10)
1. chemical-mechanical grinding device bench monitoring system, feature includes main control module (1) and believes respectively with main control module (1)
Number connection threshold setting module (2), numerical value display module (3), alarm module (4), signal conversion module (5) and monitoring sense
Device；
The main control module (1) is for the next acquisition signal of monitoring sensor transmission and is transferred to signal conversion module (5), so
The numerical signal that receipts signal conversion module (5) transmission comes is followed by be compared with the threshold signal in threshold setting module (2), and
Numerical signal is sent to numerical value display module (3) and alarm signal is sent to alarm module (4)；
The threshold setting module (2) is for inputting threshold signal and being sent to main control module (1)；
The numerical value display module (3) is used to receive the numerical signal that main control module (1) transmission comes and is shown；
The alarm module (4) is used to receive the alarm signal that main control module (1) transmission comes；
The signal conversion module (5) is used to receive the acquisition signal that main control module (1) transmission comes and is converted into numerical signal simultaneously
It is transferred to main control module (1).
2. chemical-mechanical grinding device bench monitoring system as described in claim 1, it is characterized in that the monitoring senses packet
Include grinding mat trimmer upper and lower position detection sensor (9), grinding mat trimmer revolving speed detection sensor (10), grinding head gas chamber
Film leak sensor (11), high-pressure spraying outlet valve baroceptor (13), is changed high-pressure spraying water outlet flow sensor tube (12)
Product flow sensor (14), wafer rotation driving wheel speed sampling sensor (15) and fresh air air quantity of fan sensor (16)；
The grinding mat trimmer upper and lower position detection sensor (9) is for detecting grinding mat trimmer up/down state signal simultaneously
It is transferred to signal conversion module (5)；
The grinding mat trimmer revolving speed detection sensor (10) is used to detect tach signal and the transmission of grinding mat trimmer
Give signal conversion module (5)；
The grinding head cameral mantle leak sensor (11) turns for detecting grinding head gas chamber moisture signal and being transferred to signal
It changes the mold block (5)；
The flow signal and biography of high-pressure spraying outlet pipe of high-pressure spraying water outlet flow sensor tube (12) for detecting
It is defeated by signal conversion module (5)；
Air pressure letter of the high-pressure spraying outlet valve baroceptor (13) for the high-pressure spraying outlet pipe outlet valve of detecting
Number and be transferred to signal conversion module (5)；
The chemical flow sensor (14) is by detecting based on chemical flow signal in place and being transferred to signal modulus of conversion
Block (5)；
Wafer rotation driving wheel speed sampling sensor (15) is for detecting wafer rotation driving wheel speed signal and passing
It is defeated by signal conversion module (5)；
The fresh air air quantity of fan sensor (16) is for detecting fresh air fan air-out volume signal and being transferred to signal conversion
Module (5).
3. chemical-mechanical grinding device bench monitoring system as claimed in claim 1 or 2, it is characterized in that the main control module
(1) it is also connect respectively with board (5), sound and light alarm module (6), remote monitoring end (7) and third party signalling module (8) signal.
4. chemical-mechanical grinding device bench monitoring system as claimed in claim 2, it is characterized in that the grinding pad is modified
Device upper and lower position detection sensor (9) is arranged in grinding mat trimmer bottom driving mechanism side, and grinding mat trimmer revolving speed is detectd
Sensor (10) are surveyed to be arranged in grinding mat trimmer side.
5. chemical-mechanical grinding device bench monitoring system as claimed in claim 2, it is characterized in that the grinding head gas chamber
Film leak sensor (11) is humidity sensor, is arranged in grinding head chamber vacuum connecting tube.
6. chemical-mechanical grinding device bench monitoring system as claimed in claim 2, it is characterized in that the high-pressure spraying goes out
Water pipe flow sensor (12) is Doppler flowmeter, is arranged on high-pressure spraying outlet pipe, high-pressure spraying outlet valve air pressure transmission
Sensor (13) is air pressure acquisition sensor, on the pipeline that is arranged between board valve group and high-pressure spraying outlet pipe outlet valve.
7. chemical-mechanical grinding device bench monitoring system as claimed in claim 2, it is characterized in that the chemical flow
Sensor (14) is arranged at chemicals outlet tube flowmeter upper floating ball.
8. chemical-mechanical grinding device bench monitoring system as claimed in claim 2 is driven it is characterized in that the wafer rotates
Driving wheel speed sampling sensor (15) setting is on wafer rotation driving wheel.
9. chemical-mechanical grinding device bench monitoring system as claimed in claim 2, it is characterized in that the fresh air fan wind
Quantity sensor (16) is arranged at fresh air fan outlet.
10. chemical-mechanical grinding device bench monitoring system as claimed in claim 2, it is characterized in that the signal modulus of conversion
Block (5) is also connect with ambient wind velocity sensor, environment temperature sensor and humidity sensor signal of changing planes.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910555218.6A CN110116365A (en) | 2019-06-25 | 2019-06-25 | Chemical-mechanical grinding device bench monitoring system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910555218.6A CN110116365A (en) | 2019-06-25 | 2019-06-25 | Chemical-mechanical grinding device bench monitoring system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110116365A true CN110116365A (en) | 2019-08-13 |
Family
ID=67524459
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910555218.6A Pending CN110116365A (en) | 2019-06-25 | 2019-06-25 | Chemical-mechanical grinding device bench monitoring system |
Country Status (1)
| Country | Link |
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| CN (1) | CN110116365A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110629207A (en) * | 2019-11-01 | 2019-12-31 | 吉姆西半导体科技（无锡）有限公司 | Control system of full-automatic chemical nickel-palladium-gold production equipment |
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| CN104070445A (en) * | 2013-03-29 | 2014-10-01 | 株式会社荏原制作所 | Polishing apparatus and wear detection method |
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| TW201733736A (en) * | 2016-02-12 | 2017-10-01 | 應用材料股份有限公司 | In-situ temperature control during chemical mechanical polishing with a condensed gas |
| CN108565228A (en) * | 2018-01-02 | 2018-09-21 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | A kind of wafer pressure control device, method and system |
| US20190143475A1 (en) * | 2017-11-16 | 2019-05-16 | Applied Materials, Inc. | Predictive filter for polishing pad wear rate monitoring |
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Patent Citations (8)
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|---|---|---|---|---|
| CN101049677A (en) * | 2007-05-09 | 2007-10-10 | 浙江工业大学 | Control system of accurate doublefaced polisher |
| CN102729136A (en) * | 2011-04-01 | 2012-10-17 | 无锡华润上华半导体有限公司 | Device and method for monitoring pad conditioner |
| CN104070445A (en) * | 2013-03-29 | 2014-10-01 | 株式会社荏原制作所 | Polishing apparatus and wear detection method |
| US20150364391A1 (en) * | 2013-03-29 | 2015-12-17 | Ebara Corporation | Polishing apparatus and wear detection method |
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| TW201733736A (en) * | 2016-02-12 | 2017-10-01 | 應用材料股份有限公司 | In-situ temperature control during chemical mechanical polishing with a condensed gas |
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| CN108565228A (en) * | 2018-01-02 | 2018-09-21 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | A kind of wafer pressure control device, method and system |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110629207A (en) * | 2019-11-01 | 2019-12-31 | 吉姆西半导体科技（无锡）有限公司 | Control system of full-automatic chemical nickel-palladium-gold production equipment |
| CN110629207B (en) * | 2019-11-01 | 2024-02-20 | 吉姆西半导体科技(无锡)股份有限公司 | Full-automatic chemical nickel palladium gold production equipment control system |
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| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| CB02 | Change of applicant information |
Address after: No.45 and 51, Yougu Industrial Park, Xibei Town, Xishan District, Wuxi City, Jiangsu Province Applicant after: GMC SEMITECH Co.,Ltd. Address before: No. 45, Yougu Enterprise Park, 58 Jinghong Road, Xibei Town, Xishan District, Wuxi City, Jiangsu Province Applicant before: GMC SEMITECH Co.,Ltd. |
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| CB02 | Change of applicant information | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20190813 |
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| RJ01 | Rejection of invention patent application after publication |