CN110081815A - Low coherence interference striped distortion correction method based on white light LEDs - Google Patents
Low coherence interference striped distortion correction method based on white light LEDs Download PDFInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02055—Reduction or prevention of errors; Testing; Calibration
- G01B9/0207—Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer
- G01B9/02072—Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer by calibration or testing of interferometer
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- G—PHYSICS
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- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/0209—Low-coherence interferometers
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Abstract
The low coherence interference striped distortion correction method based on white light LEDs that the invention discloses a kind of carries out Fourier transformation to interference signal first, obtains the frequency domain information for corresponding to different spectral regions；Then the relational expression between the corresponding wave number of different spectral regions and sampled point is obtained；Uniform resampling is carried out to two groups of frequency-region signals respectively by cubic spline interpolation, to realize the dispersion compensation of signal；Alignment superposition is finally carried out according to bistriate positional relationship, realizes the distortion correction of interference fringe.The present invention is applicable not only to single Gauss light source demodulating system interference fringe distortion correction, is also applied for double gauss even more Gauss light source demodulating systems；Based on each Gauss light source center wave number, the dispersion distortion correction to the corresponding interference fringe of each Gauss light source is realized, while can be realized the alignment at multiple groups interference fringe center solve the interference fringe aberration problems that more Gauss light sources introduce；Interference fringe through correcting is compared with original interference striped, and demodulation accuracy is significantly improved.
Description
Technical field
The invention belongs to sensory field of optic fibre, more particularly to a kind of for using white light LEDs as the low coherence interference of light source
The interference fringe distortion correction method of system.
Background technique
White light LEDs have low-power consumption, high efficiency, high brightness, small in size, price is low as important one of wideband light source
The advantages such as honest and clean, are widely used in low coherence interference system.Low coherence interference system is a kind of absolute position of progress high-acruracy survey
The effective ways of shifting are mainly used in surface tri-dimensional profile detection, optical coherence tomography and sensory field of optic fibre.
In general, the method demodulated to low coherence interference signal is divided into interference pattern method and phase information method.This
A little methods are all based on the low coherence interference signal of acquisition, or directly extract interference fringe peak position, or carry out direct computation of DFT
Leaf transformation extracts phase information to realize demodulation.So obtaining the distortionless interference signal pattern of high quality is to realize high-precision
The key of demodulation.In the polarization low coherence interference system using birefringece crystal, in conjunction with the white light LEDs light of double gauss spectrum
Source, since birefringence difference changes with the variation of wave number, this can make shape of interference fringe generate serious distortion.Interfere item
The distortion of line will be greatly reduced demodulation accuracy, directly result in traditional demodulation method based on interference pattern, such as envelope peak
The methods of method, central peak position method are no longer feasible, and the frequency domain nonlinear effect in addition generated simultaneously is but also spatial frequency domain is calculated
The phase demodulating method of method (SFDA) generates nonlinearity erron.The distortion correction of interference fringe is obtained so realizing before demodulation
Interference signal to high quality is very important problem.
Summary of the invention
It is an object of the invention to solve the distortion of the interference fringe of the low coherence interference system based on more Gauss spectroscopic light sources
Problem provides a kind of low coherence interference striped distortion correction method in white light LEDs, based on wave-number domain non-linear correction and
The method of the corresponding position of interference fringe offset correction of different center wave numbers, obtains the low coherence interference item of high quality high accuracy
Line, and then improve low coherence interference demodulation accuracy；Suitable for solving the low of spectroscopic light source containing double gauss or more Gauss spectroscopic light sources
The interference fringe aberration problems of coherent interference system.
Low coherence interference striped distortion correction method based on white light LEDs of the invention, using white light LEDs as light source,
The light source has the characteristic of double gauss spectrum, and Fabry-Perot (F-P) sensor experiences ambient atmos pressure change, F-P cavity
Two faces constitute sensing interferometer, and wedge constitutes as optical path difference spacescan element and receives interferometer, in the office of zero optical path difference
Portion region is formed interference fringe and is received using line array CCD, is carried out using cubic spline interpolation to nonuniform frequency spectrum signal
Uniform resampling come realize signal distortion correct, the specific implementation steps are as follows:
Step 1 carries out discrete Fourier transform to collected low coherence interference signal first, obtains amplitude-frequency signal and mixes
The phase signal being stacked in (- π, π) is respectively corresponded there are two obvious Gaussian peaks in the amplitude-versus-frequency curve of interference signal
The Gauss spectral peak in two amplitude-frequency signals in white LED light source；
Step 2, according to two Gaussian spectrum peak-to-peak values in amplitude-frequency signal, extracted respectively corresponding to light source difference Gaussian spectrum
The frequency-region signal of two groups of interference fringes at center wave number；
Step 3 is respectively done as follows two groups of frequency-region signals: with the corresponding birefringence of single Gauss spectrum center wave number
On the basis of difference, the corresponding desired homogeneous wave number value sequence of frequency-region signal sampling point sequence is calculated；According in visible-range
Dispersion equation carries out linear approximation in single Gauss spectral region, and calculates frequency-region signal sampled point sequence according to approximation
Arrange corresponding practical non uniform wave sequence of values；
Step 4, on the basis of step 3, using cubic spline interpolation method, according to the wave number of calculated desired homogeneous
Value sequence carries out uniform resampling to frequency-region signal, then the frequency-region signal after being corrected carries out inverse discrete Fourier transform,
Two groups of interference fringes after being corrected；
Step 5, according to two Gauss spectrum center wave numbers corresponding birefringence difference and interference fringe central peak position
Relationship is modified another interference fringe central peak position on the basis of some interference fringe central peak position,
So that two groups of interference fringe central peak aligned in position, finally by two groups of stripeds are superimposed corrected after interference fringe.
Desired homogeneous wave number value sequence k in the step 3I is idealSpecific formula for calculation it is as follows:
kI is ideal=2 π i/ (nN Δ d)
Wherein, i is sampling point sequence (i=1,2,3,4..., N), and N is total sampled point quantity, and Δ d is neighbouring sample point
The difference of corresponding wedge thickness, n are that the two-fold rate of wedge is poor.
Practical wave number value sequence k heterogeneousI is practicalIt can be calculated with following formula, and birefringent to changing with wave number k
Rate difference n (k) carries out linear approximation:
kI is practical=2 π i/ [n (kI is practical) N Δ d], n (k)=n0+α(k-k0)
Wherein, α is the slope of birefringence dispersion, k0It is Gauss spectrum center wave number, n0It is that center wave number is corresponding birefringent
Rate is poor.
With desired homogeneous wave number sequence for new sampled point, cubic spline interpolation uniform resampling is carried out to spectrum signal, is obtained
Spectrum signal to after dispersion correction.
The two of its feature are that center wave number is k1And k2Light corresponding to after correction interference fringe center d1With
d2Deviation calculation formula is as follows, and wherein h is that the chamber of F-P sensor is long:
n1(k1)d1=n2(k2)d2=2h, Δ L=[(n1(k1)-n2(k2))d1/n2(k2)]/Δd
It is calculated after two groups of fringe center position deviation Δ L, two groups of stripeds is subjected to alignment superposition, are obtained final
Interference fringe after distortion correction.
Compared with prior art, beneficial effects of the present invention and advantage are:
1, the method for the present invention is applicable not only to single Gauss light source demodulating system interference fringe distortion correction, can equally be well applied to
Double gauss even more Gauss light source demodulating systems；
2, the method for the present invention is based on each Gauss light source center wave number, realizes the color to the corresponding interference fringe of each Gauss light source
Distortion correction is dissipated, while can be realized the alignment at multiple groups interference fringe center, solves the interference fringe that more Gauss light sources introduce
Aberration problems；
3, by the method for the present invention correct interference fringe compared with original interference striped, equally using envelope peak method into
When row demodulation, demodulation accuracy is significantly improved.
Detailed description of the invention
Fig. 1 is the spacescan type low coherence interference Fibre Optical Sensor atmospheric pressure demodulating equipment schematic diagram based on white light LEDs；
Fig. 2 is the interference signal and Fourier transformation spectrum signal figure of real system acquisition, and (a) pressure is real under 105kpa
The interference signal of border acquisition, (b) the amplitude-frequency signal effective coverage after Fourier transformation；
Fig. 3 is using the interference fringe comparison diagram of distortion correction algorithm adjustment front and back, the interference item of (a) blue light correction front and back
Line, (b) interference fringe of yellow light correction front and back, (c) total interference fringe of correction front and back；
Fig. 4 is the demodulation result comparison diagram using phase demodulation algorithm, envelope peak method and distortion correction algorithm；
Fig. 5 is the demodulating error comparison diagram of envelope peak method and distortion correction algorithm, (a) distortion correction algorithm demodulating error
Figure, (b) envelope peak method demodulating error figure.
Specific embodiment
Technical solution of the present invention is described in detail with reference to the accompanying drawings and examples.
Low coherence interference striped distortion correction method based on white light LEDs of the invention first carries out in Fu interference signal
Leaf transformation obtains the frequency domain information for corresponding to different spectral regions；Then according to dispersion equation, it is corresponding that different spectral regions are obtained
Relational expression between wave number and sampled point；Uniform resampling is carried out to two groups of frequency-region signals respectively by cubic spline interpolation, with
Realize the dispersion compensation of signal；Alignment superposition is finally carried out according to bistriate positional relationship, realizes that the distortion of interference fringe is rectified
Just.
As shown in Figure 1, the Low coherence based on white light LEDs for external atmospheric pressure measurement being related to for the method for the present invention
Interferometric demodulation device figure.The device selects the white light LEDs of the spectrum containing double gauss as light source, Fabry-Pérot sensor conduct
The sensing element of experiencing ambient pressure variation, wedge are based on two-beam interference principle zero as optical path difference spacescan element
Optical path difference nearby generates interference fringe.The light that white LED light source 1 issues enters fibre-optical F-P sensor 3 by three-dB coupler 2,
The variation of ambient pressure is converted to the long variation of chamber as the sensing probe for experiencing external atmospheric pressure by fibre-optical F-P sensor,
Two faces of F-P cavity constitute sensing interferometer, are spread out of by the modulated optical signal of F-P sensor from the outlet of coupler 2, and according to
It is secondary to be transmitted through cylindrical mirror 4, the polarizer 5, birefringent wedge 6 and analyzer 7, eventually arrive at line array CCD 8, birefringent wedge 6
The optical path difference of spacescan distribution is provided, it, can be in line array CCD 8 when optical path difference caused by the optical path difference and 3 caused by 6 matches
Corresponding regional area generates apparent low coherence interference striped.
Low coherence interference striped distortion correction method based on white light LEDs of the invention is tested by following experiment
Card, verification result are specifically as shown in Figures 2 to 5.
The pressure change needed in experiment is generated by the pressure controller of high-precision, high stable, which can
To reach the control precision of 10Pa, control pressure increases to 230kPa from 3kPa dullness using 1kPa as interval in experiment, and pressure changes
The time interval of change is 5 minute.Effective pixel number of line array CCD is 3000, using the pixel lock-out pulse of CCD as acquisition
The external sampling clock of card carries out high-velocity scanning sampling to interference light signal, carry out after analog-to-digital conversion obtained digital signal by
3000 discrete data points are constituted, and represent a CCD pixel interval between every two adjacent data.
Step 1 carries out discrete Fourier transform for time-domain signal x (n) to the interferometric fringe signal of capture card output first
It is transformed into frequency domain X (k), whereinThe a frame low phase of CCD acquisition when attached drawing 2 is 105kpa
Initial frequency sampled point is extracted in dry interference signal and the effective coverage for passing through amplitude-versus-frequency curve after discrete Fourier transform
34 to terminate stepped-frequency signals 57 be effective frequency section, extracts the corresponding interference fringe of different center wave numbers, i.e. blue light respectively
Interference fringe and sodium yellow interference fringe, while filtering out other frequency band noise signals.
Frequency-region signal after filtering is resolved into amplitude-frequency signal and phase frequency signal by step 2, is then distinguished two sections of phase frequency signals
Be that fixed phase carries out phase unwrapping with stepped-frequency signal 41 and sampled point 54, phase unwrapping according to following recursive expression into
Row:
Wherein, u () is jump function,It is relative phase, ΩiIt is stepped-frequency signal.
Step 3 calculates separately in two according to above-mentioned formula according to sampling point sequence (i=1,2,3,4..., 3000)
The wave number value sequence k of the corresponding desired homogeneous of cardiac wave numberI is idealWith practical wave number value sequence k heterogeneousI is practical, calculation formula is as follows:
kI is ideal=2 π i/ (nN Δ d)
kI is practical=2 π i/ [n (kI is practical)NΔd]
Wherein, n (k)=n0+α(k-k0)。
Step 4, using the method for cubic spline interpolation, respectively to the corresponding amplitude-frequency signal of two center wave numbers and after being unfolded
Phase frequency signal carry out resampling, frequency signal after obtaining two groups of corrections according to homogeneous wave sequence of values.
Step 5 will frequency by carrying out the interference fringe after inverse Fourier transform is corrected to the spectrum signal after correction
Domain signal X (k) is transformed into time-domain signal x (n), whereinBlue light after respectively obtaining correction
With the interference fringe of yellow light.
The interference fringe central peak position of step 6, blue light and yellow light can be connected with following formula:
n1(k1)d1=n2(k2)d2=2h
Wherein, n1(k1) and n2(k2) be respectively yellow light and blue light the corresponding birefringence difference of center wave number, so blue
The interference fringe centre distance difference of light and yellow light can be obtained by following formula:
Δ L=[(n1(k1)-n2(k2))d1/n2(k2)]/Δd
By blue light and yellow light central peak alignment then it is superimposed corrected after total interference fringe, such as attached drawing 3
It is shown.Obviously, it can be seen that the central peak alignment of the interference fringe after correction, symmetry raising, central peak and envelope
Peak value alignment, central peak peak strength improve.
In order to verify the feasibility of the method proposed in the present invention, respectively using envelope peak method to before correction and after correction
Interference fringe carry out demodulate and demodulated using phase demodulating method to compare, obtain demodulation result such as attached drawing 4
It is shown, it can be seen that the linearity of the envelope peak position curve of the interference fringe after correcting is apparent compared to having before correction
It improves, and avoids the jump problem for phase demodulating occur.Attached drawing 5 is the ambient pressure and packet of the interference fringe of correction front and back
Network peak location data carries out the error comparison diagram after fitting of a polynomial, it can be seen from the figure that worst error is after correction
0.058kpa, the worst error before correction is 1.665kpa, and demodulation accuracy about improves 28 times.
Claims (2)
1. a kind of low coherence interference striped distortion correction method based on white light LEDs, which is characterized in that use white light LEDs conduct
Light source, the light source have the characteristic of double gauss spectrum, and Fabry-Perot F-P sensor experiences ambient atmos pressure change, F-P
Two faces of chamber constitute sensing interferometer, and wedge constitutes as optical path difference spacescan element and receives interferometer, in zero optical path difference
Regional area formed and interference fringe and received using line array CCD, using cubic spline interpolation to nonuniform frequency spectrum signal
Uniform resampling is carried out to realize that signal distortion is corrected, the specific implementation steps are as follows:
Step 1 carries out discrete Fourier transform to collected low coherence interference signal first, obtains amplitude-frequency signal and is aliasing in
Phase signal in (- π, π) respectively corresponds white light there are two obvious Gaussian peaks in the amplitude-versus-frequency curve of interference signal
The Gauss spectral peak in two amplitude-frequency signals in LED light source；
Step 2, according to two Gaussian spectrum peak-to-peak values in amplitude-frequency signal, extracted respectively corresponding to light source difference Gaussian spectrum center
The frequency-region signal of two groups of interference fringes at wave number；
Step 3 is respectively done as follows two groups of frequency-region signals: being with the corresponding birefringence difference of single Gauss spectrum center wave number
Benchmark calculates the corresponding desired homogeneous wave number value sequence of frequency-region signal sampling point sequence；According to the dispersion in visible-range
Formula carries out linear approximation in single Gauss spectral region, and calculates frequency-region signal sampling point sequence pair according to approximation
The practical non uniform wave sequence of values answered；
Step 4, on the basis of step 3, using cubic spline interpolation method, according to the wave number value sequence of calculated desired homogeneous
Column carry out uniform resampling to frequency-region signal, then the frequency-region signal after being corrected carries out inverse discrete Fourier transform, obtains
Two groups of interference fringes after correction；
Step 5, according to two Gauss spectrum center wave numbers corresponding birefringence difference and interference fringe central peak positional relationship,
On the basis of some interference fringe central peak position, another interference fringe central peak position is modified, so that
Two groups of interference fringe central peak aligned in position, finally by two groups of stripeds are superimposed corrected after interference fringe.
2. the low coherence interference striped distortion correction method method according to claim 1 based on white light LEDs, feature
It is, the desired homogeneous wave number value sequence k in the step 3I is idealSpecific formula for calculation it is as follows:
kI is ideal=2 π i/ (nN Δ d)
Wherein, i is sampling point sequence (i=1,2,3,4..., N), and N is total sampled point quantity, and Δ d is corresponding for neighbouring sample point
Wedge thickness difference, n is that the two-fold rate of wedge is poor；
Practical wave number value sequence k heterogeneousI is practicalIt can be calculated with following formula, and to the birefringence difference n changed with wave number k
(k) linear approximation is carried out:
kI is practical=2 π i/ [n (kI is practical) N Δ d], n (k)=n0+α(k-k0)
Wherein, α is the slope of birefringence dispersion, k0It is Gauss spectrum center wave number, n0It is the corresponding birefringence of center wave number
Difference；
With desired homogeneous wave number sequence for new sampled point, cubic spline interpolation uniform resampling is carried out to spectrum signal, obtains color
Dissipate the spectrum signal after correction；
Center wave number is k1And k2Gauss light corresponding to after correction interference fringe center d1And d2Deviation calculate it is public
Formula is as follows, and wherein h is that the chamber of F-P sensor is long:
n1(k1)d1=n2(k2)d2=2h, Δ L=[(n1(k1)-n2(k2))d1/n2(k2)]/Δd
It is calculated after two groups of fringe center position deviation Δ L, two groups of stripeds is subjected to alignment superposition, obtain final distortion
Interference fringe after correction.
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| CN115046470A (en) * | 2022-05-20 | 2022-09-13 | 浙江大学 | Interference fringe optimization method for optical fiber white light interference |
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| CN115931022A (en) * | 2023-01-04 | 2023-04-07 | 北京佰为深科技发展有限公司 | Optical fiber Fabry-Perot sensor demodulation system |
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| CN112326203A (en) * | 2020-10-28 | 2021-02-05 | 桂林电子科技大学 | Method for determining imaging system parameters through interference fringe central area data |
| CN112525070A (en) * | 2020-11-18 | 2021-03-19 | 南京理工大学 | Vibration-resistant white light interference measurement method based on non-uniform sampling correction |
| CN112525070B (en) * | 2020-11-18 | 2022-04-01 | 南京理工大学 | Vibration-resistant white light interference measurement method based on non-uniform sampling correction |
| CN115046470A (en) * | 2022-05-20 | 2022-09-13 | 浙江大学 | Interference fringe optimization method for optical fiber white light interference |
| CN115597644A (en) * | 2022-10-08 | 2023-01-13 | 南京航空航天大学（Cn） | Fabry-Perot sensor demodulation dispersion compensation device and method based on birefringence interferometer |
| CN115931022A (en) * | 2023-01-04 | 2023-04-07 | 北京佰为深科技发展有限公司 | Optical fiber Fabry-Perot sensor demodulation system |
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