CN110076115A - A kind of high-precision detection device with dust reduction capability for chip manufacture - Google Patents
A kind of high-precision detection device with dust reduction capability for chip manufacture Download PDFInfo
- Publication number
- CN110076115A CN110076115A CN201910280436.3A CN201910280436A CN110076115A CN 110076115 A CN110076115 A CN 110076115A CN 201910280436 A CN201910280436 A CN 201910280436A CN 110076115 A CN110076115 A CN 110076115A
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- Prior art keywords
- dust
- cabinet
- rotating disc
- camera
- cleaning
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- 239000000428 dust Substances 0.000 title claims abstract description 94
- 238000001514 detection method Methods 0.000 title claims abstract description 29
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 22
- 238000004140 cleaning Methods 0.000 claims abstract description 72
- 239000000463 material Substances 0.000 claims abstract description 44
- 230000000712 assembly Effects 0.000 claims description 13
- 238000000429 assembly Methods 0.000 claims description 13
- 239000004744 fabric Substances 0.000 claims description 11
- 238000005246 galvanizing Methods 0.000 claims description 4
- 239000010687 lubricating oil Substances 0.000 claims description 3
- 230000005540 biological transmission Effects 0.000 claims description 2
- 230000000694 effects Effects 0.000 abstract description 17
- 230000000903 blocking effect Effects 0.000 abstract description 3
- 235000012431 wafers Nutrition 0.000 description 15
- 238000010586 diagram Methods 0.000 description 4
- 230000002950 deficient Effects 0.000 description 3
- 230000005484 gravity Effects 0.000 description 3
- 238000007689 inspection Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 125000000129 anionic group Chemical group 0.000 description 2
- 230000035939 shock Effects 0.000 description 2
- 238000007664 blowing Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 235000013399 edible fruits Nutrition 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000005461 lubrication Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Classifications
-
- B08B1/32—
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B17/00—Methods preventing fouling
- B08B17/02—Preventing deposition of fouling or of dust
- B08B17/04—Preventing deposition of fouling or of dust by using removable coverings
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
- B07C—POSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
- B07C5/00—Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
- B07C5/04—Sorting according to size
- B07C5/10—Sorting according to size measured by light-responsive means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
- B07C—POSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
- B07C5/00—Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
- B07C5/34—Sorting according to other particular properties
Landscapes
- Studio Devices (AREA)
Abstract
The present invention relates to a kind of high-precision detection devices with dust reduction capability for chip manufacture, including cabinet, monitor station, grabbing arm and camera, the monitor station is arranged in the intracorporal bottom of case, the grabbing arm is arranged in the intracorporal side of case, the other side of the cabinet is equipped with material transfer mouth, the camera is arranged in cabinet, the camera and monitor station face are arranged, the grabbing arm is between camera and monitor station, cleaning mechanism and dust-proof mechanism are equipped in the cabinet, the high-precision detection device with dust reduction capability for being used for chip manufacture is realized by cleaning mechanism removes dust on camera, dust is avoided to influence the clarity of camera chip photo and reduce detection accuracy, moreover, the function of blocking material transfer mouth is also realized by dust-proof mechanism, reduce dust by material transfer mouth into In cartonning body, dust-proof effect is played.
Description
Technical field
The present invention relates to chip detecting equipment field, in particular to a kind of height with dust reduction capability for chip manufacture
Precision testing device.
Background technique
Chip detecting equipment is completed the appearance after cutting mainly for the chip on wafer and is detected, for example size, breakage, splits
Grain, stomata, slight crack, nickel layer are bad etc., so also referred to as wafer cuts detection device, it is that detection is realized by machine vision
, chip detecting equipment is to be shot by camera to wafer, and photo is being transmitted to software, is analyzed and is produced by the algorithm of feature
The appearance of product, and automatic sorting non-defective unit and substandard products.
Existing chip detecting equipment after long-term use, can generate dust on camera, and dust will affect camera
The clarity of chip photo, to reduce detection accuracy, moreover, the dust on wafer can also make the detection knot of inspection software
Fruit generates deviation, further reduced detection accuracy.
Summary of the invention
The technical problem to be solved by the present invention is for overcome the deficiencies in the prior art, providing a kind of for chip manufacture
The high-precision detection device with dust reduction capability.
The technical solution adopted by the present invention to solve the technical problems is: a kind of to have dust reduction capability for chip manufacture
High-precision detection device, including cabinet, monitor station, grabbing arm and camera, the monitor station is arranged at the intracorporal bottom of case
Portion, in the intracorporal side of case, the other side of the cabinet is equipped with material transfer mouth for the grabbing arm setting, and the camera setting exists
In cabinet, the camera and monitor station face are arranged, and the grabbing arm is between camera and monitor station, the cabinet
It is interior to be equipped with cleaning mechanism and dust-proof mechanism；
The cleaning mechanism includes moving assembly and cleaning assemblies, and the moving assembly includes slide bar, sliding block and bracket, institute
The axis for stating slide bar is parallel with the moving direction of grabbing arm, and the both ends of the slide bar are separately fixed at the intracorporal two sides of case, institute
It states sliding block to be set on slide bar, the grabbing arm is fixedly connected by bracket with the side of the separate material transfer mouth of sliding block, described
Cleaning assemblies is located at the other side of sliding block, and the side of the close monitor station of sliding block, the cleaning assemblies is arranged in the camera
Between camera and monitor station；
The cleaning assemblies includes cleaning deskitte, cleaning cloth, rotating disc, driving unit and two gear units, the cleaning
Disk is parallel with monitor station, and the cleaning cloth is laid on the side of the separate monitor station of cleaning deskitte, and the rotating disc is located at cleaning deskitte
Between monitor station, the rotating disc and cleaning deskitte are coaxially disposed, and the axis of the rotating disc is located between two gear units,
The rotating disc is connect by gear unit with cleaning deskitte, and the one of the close monitor station of rotating disc is arranged in the driving unit
Side, the driving unit and rotating disc are sequentially connected；
The dust-proof mechanism includes Power Component and dust preventing component, and what the dust preventing component was arranged in cabinet is equipped with material transfer mouth
Side, the dust preventing component includes dust excluding plate, pull rod, two connecting rods and two sliding rails, and the dust excluding plate and cabinet are equipped with
Plane where the side of material transfer mouth is parallel, and the pull rod is parallel with dust excluding plate, and the connecting rod is located at the top of dust excluding plate, described
The axis of pull rod and the axis of slide bar are vertical, and the connecting rod is between dust excluding plate and pull rod, the axis and pull rod of the connecting rod
Axis it is vertical and intersect, the connecting rod is parallel with dust excluding plate, and the both ends of the pull rod pass through two connecting rods and dust excluding plate respectively
It is fixedly connected, the material transfer mouth is located between two connecting rods, and the dust excluding plate is covered on material transfer mouth, the sliding rail and connecting rod one
One is corresponding, and the sliding rail is fixed on cabinet, and the two sides of the dust excluding plate are separately mounted on sliding rail, and the separate of the pull rod prevents
The side of dirt plate is connect by Power Component with sliding block.
Preferably, the gear unit includes connecting rod, link block in order to realize cleaning deskitte rotation and mobile function
And spring, the connecting rod is parallel with the axis of rotating disc, and the rotating disc is set in connecting rod, one end of the connecting rod
It is fixedly connected with cleaning deskitte, the link block is fixed on the other end of connecting rod, the link block and rotating disc against the bullet
Between rotating disc and cleaning deskitte, the rotating disc is connect by spring with cleaning deskitte spring.
Preferably, in order to achieve the effect that rotating disc is mobile and rotation, the driving unit include cylinder, drive plate,
Driving motor and at least three balls, the drive plate and rotating disc are coaxially disposed, and the driving motor is fixed on drive plate
Close to the side of rotating disc, the driving motor and rotating disc are sequentially connected, and the separate rotation of drive plate is arranged in the cylinder
The side of disk, the cylinder are fixed on the inner wall of cabinet, axial movement of the cylinder driving drive plate along drive plate, institute
The periphery for stating drive plate is equipped with annular groove, and the annular groove and drive plate are coaxially disposed, and the ball is with the axis of drive plate
Center is circumferentially uniformly arranged in a ring groove, and in a ring groove, the ball is matched and slided with annular groove for the ball setting
Connection, the ball are fixedly connected with rotating disc.
Preferably, being coated with lubrication on the inner wall of the annular groove to reduce the frictional force between annular groove and ball
Oil.
Preferably, in order to improve the driving force of driving motor, the driving motor is servo motor.
Preferably, the Power Component includes fixed pulley and connecting line, is set on the cabinet in order to drive pull rod mobile
Have a through-hole, the connecting line passes through through-hole, and one end of the connecting line is fixedly connected with a slide block, the other end of the connecting line around
It crosses fixed pulley to be fixedly connected with pull rod, the fixed pulley is fixed on cabinet.
Preferably, in order to improve the reliability of connecting line, the making material of the connecting line is wirerope.
Preferably, in order to improve dust-proof effect, the inner wall of the separate material transfer mouth side of the cabinet is equipped with ion wind
Rifle.
Preferably, being coated with anticorrosion galvanizing layer on the bracket for the service life of extending bracket.
Preferably, the sliding rail is equipped with limited block in order to avoid dust excluding plate is separated with sliding rail, the limited block is located at
The side of the separate pull rod of dust excluding plate.
The invention has the advantages that the high-precision detection device with dust reduction capability for being used for chip manufacture passes through clearly
Clean mechanism realizes the function of removing dust on camera, and dust is avoided to influence the clarity of camera chip photo and reduce inspection
Precision is surveyed, compared with existing cleaning mechanism, cleaning mechanism operation opportunity is identical as grabbing arm mobile opportunity, and structure is more
Add ingenious, moreover, the function of blocking material transfer mouth is also realized by dust-proof mechanism, reduce dust and entered by material transfer mouth
In cabinet, dust-proof effect is played, compared with existing dust-proof mechanism, this is anti-by the mobile driving of sliding block for the dust-proof mechanism
The operation of dirt mechanism, practicability are stronger.
Detailed description of the invention
Present invention will be further explained below with reference to the attached drawings and examples.
Fig. 1 is the structural schematic diagram of the high-precision detection device with dust reduction capability for chip manufacture of the invention；
Fig. 2 is the knot of the cleaning assemblies of the high-precision detection device with dust reduction capability for chip manufacture of the invention
Structure schematic diagram；
Fig. 3 is the knot of the dust preventing component of the high-precision detection device with dust reduction capability for chip manufacture of the invention
Structure schematic diagram；
Fig. 4 is the portion the A enlarged drawing of Fig. 1；
In figure: 1. cabinets, 2. monitor stations, 3. grabbing arms, 4. cameras, 5. slide bars, 6. sliding blocks, 7. brackets, 8. cleanings
Disk, 9. cleaning cloths, 10. rotating discs, 11. dust excluding plates, 12. pull rods, 13. connecting rods, 14. sliding rails, 15. connecting rods, 16. link blocks,
17. spring, 18. cylinders, 19. drive plates, 20. driving motors, 21. balls, 22. fixed pulleys, 23. connecting lines, 24. ion winds
Rifle, 25. limited blocks.
Specific embodiment
In conjunction with the accompanying drawings, the present invention is further explained in detail.These attached drawings are simplified schematic diagram, only with
Illustration illustrates basic structure of the invention, therefore it only shows the composition relevant to the invention.
As shown in Figure 1, a kind of high-precision detection device with dust reduction capability for chip manufacture, including cabinet 1, inspection
The bottom in cabinet 1 is arranged in scaffold tower 2, grabbing arm 3 and camera 4, the monitor station 2, and the grabbing arm 3 is arranged in case
Side in body 1, the other side of the cabinet 1 are equipped with material transfer mouth, and the camera 4 is arranged in cabinet 1, the camera 4
It is arranged with 2 face of monitor station, the grabbing arm 3 is equipped with cleaner in the cabinet 1 between camera 4 and monitor station 2
Structure and dust-proof mechanism；
Wafer passes through material transfer mouth and enters in cabinet 1, and wafer is moved on monitor station 2 by grabbing arm 3, passes through camera shooting
First 4 pairs of wafers shooting, then photo is transmitted to software, the appearance of product, and automatic sorting non-defective unit are analyzed by the algorithm of feature
And substandard products, here, the effect that cleaning mechanism is arranged is the dust removed on camera 4, and the effect that dust-proof mechanism is arranged is to reduce
Dust enters in cabinet 1.
As shown in Fig. 2, the cleaning mechanism includes moving assembly and cleaning assemblies, the moving assembly includes slide bar 5, slides
The axis of block 6 and bracket 7, the slide bar 5 is parallel with the moving direction of grabbing arm 3, and the both ends of the slide bar 5 are separately fixed at
Two sides in cabinet 1, the sliding block 6 are set on slide bar 5, and the grabbing arm 3 passes through the separate material transfer of bracket 7 and sliding block 6
The side of mouth is fixedly connected, and the cleaning assemblies is located at the other side of sliding block 6, and the close inspection of sliding block 6 is arranged in the camera 4
The side of scaffold tower 2, the cleaning assemblies is between camera 4 and monitor station 2；
The cleaning assemblies includes cleaning deskitte 8, cleaning cloth 9, rotating disc 10, driving unit and two gear units, described
Cleaning deskitte 8 is parallel with monitor station 2, and the cleaning cloth 9 is laid on the side of the separate monitor station 2 of cleaning deskitte 8, the rotating disc 10
Between cleaning deskitte 8 and monitor station 2, the rotating disc 10 is coaxially disposed with cleaning deskitte 8, and the axis of the rotating disc 10 is located at
Between two gear units, the rotating disc 10 is connect by gear unit with cleaning deskitte 8, and the driving unit setting is rotating
The side of the close monitor station 2 of disk 10, the driving unit and rotating disc 10 are sequentially connected；
When grabbing arm 3 is towards close to the movement of material transfer mouth, grabbing arm 3 moves up sliding block 6 in slide bar 5 by bracket 7
Dynamic, the mobile drive camera 4 of sliding block 6 is mobile, and when grabbing arm 3 is moved to wafer position, camera 4 and cleaning deskitte 8 are just
To setting, the rotation of rotating disc 10 and movement are made by driving unit, the rotation and movement of rotating disc 10 are made clearly by gear unit
Clean cloth 9 and camera 4 against and rotate, to realize the function of removing dust on camera 4.
As shown in figure 3, the dust-proof mechanism includes Power Component and dust preventing component, the dust preventing component is arranged in cabinet 1
The side equipped with material transfer mouth, the dust preventing component includes dust excluding plate 11,12, two connecting rods 13 of pull rod and two sliding rails 14, institute
It is parallel with the plane where the side equipped with material transfer mouth of cabinet 1 to state dust excluding plate 11, the pull rod 12 is parallel with dust excluding plate 11, institute
The top that connecting rod 13 is located at dust excluding plate 11 is stated, the axis of the pull rod 12 is vertical with the axis of slide bar 5, and the connecting rod 13 is located at anti-
Between dirt plate 11 and pull rod 12, the axis of the connecting rod 13 is vertical with the axis of pull rod 12 and intersects, the connecting rod 13 with it is dust-proof
Plate 11 is parallel, and the both ends of the pull rod 12 pass through two connecting rods 13 respectively and are fixedly connected with dust excluding plate 11, and the material transfer mouth is located at
Between two connecting rods 13, the dust excluding plate 11 is covered on material transfer mouth, and the sliding rail 14 is corresponded with connecting rod 13, the sliding rail
14 are fixed on cabinet 1, and the two sides of the dust excluding plate 11 are separately mounted on sliding rail 14, the separate dust excluding plate 11 of the pull rod 12
Side connect with sliding block 6 by Power Component.
When grabbing arm 3 is towards close to the movement of material transfer mouth direction, band movable slider 6 is mobile, and the movement of sliding block 6 passes through power
Component makes dust excluding plate 11 drive connecting rod 13 and pull rod 12 mobile on sliding rail 14 by self gravity, and material transfer mouth is made to be located at pull rod 12
Between dust excluding plate 11, material transfer mouth is passed through convenient for wafer, when mobile wafer to the monitor station 2 of grabbing arm 3,3 band of grabbing arm
Movable slider 6 resets, and sliding block 6 resets pull rod 12 by Power Component, and the movement of pull rod 12 keeps dust excluding plate 11 multiple by connecting rod 13
Position, makes dust excluding plate 11 block material transfer mouth.
Preferably, in order to realize the rotation of cleaning deskitte 8 and mobile function, the gear unit includes connecting rod 15, connects
Block 16 and spring 17 are connect, the connecting rod 15 is parallel with the axis of rotating disc 10, and the rotating disc 10 is set in connecting rod 15,
One end of the connecting rod 15 is fixedly connected with cleaning deskitte 8, and the link block 16 is fixed on the other end of connecting rod 15, the company
Block 16 and rotating disc 10 are connect against for the spring 17 between rotating disc 10 and cleaning deskitte 8, the rotating disc 10 passes through spring
17 connect with cleaning deskitte 8.
The rotation of rotating disc 10 drives cleaning deskitte 8 to rotate by connecting rod 15, and the movement of rotating disc 10 passes through 17 band of spring
Dynamic cleaning deskitte 8 is mobile, when cleaning cloth 9 and camera 4 against when, by the elastic reaction of spring 17 can to avoid camera 4 by
To rigid shock.
Preferably, in order to achieve the effect that rotating disc 10 is mobile and rotation, the driving unit include cylinder 18, transmission
Disk 19, driving motor 20 and at least three balls 21, the drive plate 19 are coaxially disposed with rotating disc 10, the driving motor 20
It is fixed on the side of the close rotating disc 10 of drive plate 19, the driving motor 20 is sequentially connected with rotating disc 10, the cylinder
18 are arranged in the side of the separate rotating disc 10 of drive plate 19, and the cylinder 18 is fixed on the inner wall of cabinet 1, the cylinder 18
Drive drive plate 19 along the axial movement of drive plate 19, the periphery of the drive plate 19 is equipped with annular groove, the annular groove with
Drive plate 19 is coaxially disposed, and the ball 21 is circumferentially uniformly arranged in a ring groove centered on the axis of drive plate 19, described
Ball 21 is arranged in a ring groove, and the ball 21 is matched and is slidably connected with annular groove, and the ball 21 and rotating disc 10 are solid
Fixed connection.
It is run by cylinder 18, keeps drive plate 19 mobile, the movement of drive plate 19 drives rotating disc 10 to move by ball 21
It is dynamic, also, rotating disc 10 is rotated by driving motor 20, support rotating disk is played by the cooperation of ball 21 and annular groove
The effect of 10 rotations reduces the stress that driving motor 20 is subject to.
Preferably, being coated with profit on the inner wall of the annular groove to reduce the frictional force between annular groove and ball 21
Lubricating oil.
The effect of lubricating oil is the frictional force reduced between annular groove and ball 21, improves ball 21 and moves in a ring groove
Fluency.
Preferably, in order to improve the driving force of driving motor 20, the driving motor 20 is servo motor.
As shown in figure 4, the Power Component includes fixed pulley 22 and connecting line 23, the cabinet 1 is equipped with through-hole, described
Connecting line 23 passes through through-hole, and one end of the connecting line 23 is fixedly connected with sliding block 6, and the other end of the connecting line 23 is around fixed
Pulley 22 is fixedly connected with pull rod 12, and the fixed pulley 22 is fixed on cabinet 1.
When grabbing arm 3 is mobile towards close material transfer mouth direction with movable slider 6, connecting line 23 unclamps, to make dust-proof
Plate 11 is mobile away from 22 direction of fixed pulley under the effect of gravity, and when grabbing arm 3 resets, sliding block 6 passes through company
Wiring 23 pulls pull rod 12 to reset, so that dust excluding plate 11 be made to reset.
Preferably, in order to improve the reliability of connecting line 23, the making material of the connecting line 23 is wirerope.
Wirerope has the characteristics that intensity is not high, easily broken, improves the reliability of connecting line 23.
Preferably, in order to improve dust-proof effect, the inner wall of the separate material transfer mouth side of the cabinet 1 is equipped with ion wind
Rifle 24.
Camera 4 blows anionic wind to wafer in shooting process, by ion wind gun 24, by anionic wind can in
And electrostatic, avoid electrostatic from leading to wafer damage, meanwhile, the effect for blowing off dust is also played, dust is avoided to reduce the essence of detection
Exactness.
Preferably, being coated with anticorrosion galvanizing layer on the bracket 7 for the service life of extending bracket 7.
The antirust ability of bracket 7, the service life of extending bracket 7 can be improved by anticorrosion galvanizing layer.
Preferably, the sliding rail 14 is equipped with limited block 25, the limit in order to avoid dust excluding plate 11 is separated with sliding rail 14
Position block 25 is located at the side of the separate pull rod 12 of dust excluding plate 11.
The effect of limited block 25 is to avoid falling off when dust excluding plate 11 is mobile away from 12 direction of pull rod with sliding rail 14, is played
The effect of limit.
The equipment application method:
When grabbing arm 3 is towards close to the movement of material transfer mouth direction, grabbing arm 3 makes sliding block 6 on slide bar 5 by bracket 7
Mobile, the mobile drive camera 4 of sliding block 6 is mobile, meanwhile, the movement of sliding block 6 also drives connecting line 23 to unclamp, and makes dust excluding plate 11
Drive connecting rod 13 and pull rod 12 mobile on sliding rail 14 by self gravity, make material transfer mouth be located at pull rod 12 and dust excluding plate 11 it
Between, it is put into cabinet 1 to allow user that wafer is passed through material transfer mouth, during which, camera 4 is made by the movement of sliding block 6
It is arranged with 8 face of cleaning deskitte, is run by cylinder 18, keep drive plate 19 mobile, the movement of drive plate 19 is driven by ball 21
Rotating disc 10 is mobile, and the movement of rotating disc 10 drives cleaning deskitte 8 mobile by spring 17, when cleaning cloth 9 and camera 4 against
When, it can be to avoid camera 4 by rigid shock by the elastic reaction of spring 17, also, make to rotate by driving motor 20
Disk 10 rotates, and the effect of the rotation of support rotating disk 10 is played by the cooperation of ball 21 and annular groove, reduces driving motor 20
The rotation of the stress being subject to, rotating disc 10 drives cleaning deskitte 8 to rotate by connecting rod 15, so that cleaning cloth 9 be made to support with camera 4
It leans on and rotates, when grabbing arm 3, which grabs wafer, is moved to monitor station 2, sliding block 6 is made to pull pull rod 12 multiple by connecting line 23
Position makes dust excluding plate 11 block material transfer mouth so that dust excluding plate 11 be made to reset, and is shot by camera 4 to wafer, then photo is transmitted
To software, the appearance of product, and automatic sorting non-defective unit and substandard products are analyzed by the algorithm of feature；
Here, it is resisted against on camera 4 and rotates by cleaning cloth 9, realize the function of removing dust on camera 4,
Material transfer mouth is blocked by dust excluding plate 11 can reduce dust and entered in cabinet 1 by material transfer mouth, play dust-proof effect.
Compared with prior art, which passes through cleaner
Structure realizes the function of removing dust on camera 4, and dust is avoided to influence the clarity of 4 chip photo of camera and reduce detection
Precision, compared with existing cleaning mechanism, cleaning mechanism operation opportunity is identical as the mobile opportunity of grabbing arm 3, and structure is more
Add ingenious, moreover, the function of blocking material transfer mouth is also realized by dust-proof mechanism, reduce dust and entered by material transfer mouth
In cabinet 1, dust-proof effect is played, compared with existing dust-proof mechanism, which should by the mobile driving of sliding block 6
Dust-proof mechanism operation, practicability are stronger.
Taking the above-mentioned ideal embodiment according to the present invention as inspiration, through the above description, relevant staff is complete
Various changes and amendments can be carried out without departing from the scope of the technological thought of the present invention' entirely.The technology of this invention
Property range is not limited to the contents of the specification, it is necessary to which the technical scope thereof is determined according to the scope of the claim.
Claims (10)
1. a kind of high-precision detection device with dust reduction capability for chip manufacture, including cabinet (1), monitor station (2), grab
Arm (3) and camera (4), the bottom that the monitor station (2) is arranged in cabinet (1) are taken, grabbing arm (3) setting exists
Side in cabinet (1), the other side of the cabinet (1) are equipped with material transfer mouth, and camera (4) setting is in cabinet (1), institute
It states camera (4) and monitor station (2) face is arranged, the grabbing arm (3) is located between camera (4) and monitor station (2),
It is characterized in that, cleaning mechanism and dust-proof mechanism is equipped in the cabinet (1)；
The cleaning mechanism includes moving assembly and cleaning assemblies, and the moving assembly includes slide bar (5), sliding block (6) and bracket
(7), the axis of the slide bar (5) is parallel with the moving direction of grabbing arm (3), and the both ends of the slide bar (5) are separately fixed at
Two sides in cabinet (1), the sliding block (6) are set on slide bar (5), and the grabbing arm (3) passes through bracket (7) and sliding block
(6) side of separate material transfer mouth is fixedly connected, and the cleaning assemblies is located at the other side of sliding block (6), and the camera (4) sets
It sets in the side of the close monitor station (2) of sliding block (6), the cleaning assemblies is located between camera (4) and monitor station (2)；
The cleaning assemblies includes cleaning deskitte (8), cleaning cloth (9), rotating disc (10), driving unit and two gear units, institute
State that cleaning deskitte (8) is parallel with monitor station (2), the cleaning cloth (9) is laid on the side of the separate monitor station (2) of cleaning deskitte (8),
The rotating disc (10) is located between cleaning deskitte (8) and monitor station (2), and the rotating disc (10) and cleaning deskitte (8) are coaxially disposed,
The axis of the rotating disc (10) is located between two gear units, and the rotating disc (10) passes through gear unit and cleaning deskitte
(8) it connects, the driving unit setting is in the side of the close monitor station (2) of rotating disc (10), the driving unit and rotation
Disk (10) transmission connection；
The dust-proof mechanism includes Power Component and dust preventing component, and the dust preventing component setting is equipped with material transfer mouth in cabinet (1)
Side, the dust preventing component includes dust excluding plate (11), pull rod (12), two connecting rods (13) and two sliding rails (14), described anti-
Dirt plate (11) is parallel with the plane where the side equipped with material transfer mouth of cabinet (1), and the pull rod (12) and dust excluding plate (11) are flat
Row, the connecting rod (13) are located at the top of dust excluding plate (11), and the axis of the pull rod (12) is vertical with the axis of slide bar (5), institute
It states connecting rod (13) to be located between dust excluding plate (11) and pull rod (12), the axis of the connecting rod (13) is vertical with the axis of pull rod (12)
And intersect, the connecting rod (13) is parallel with dust excluding plate (11), the both ends of the pull rod (12) pass through respectively two connecting rods (13) and
Dust excluding plate (11) is fixedly connected, and the material transfer mouth is located between two connecting rods (13), and the dust excluding plate (11) is covered on material transfer mouth
On, the sliding rail (14) and connecting rod (13) correspond, and the sliding rail (14) is fixed on cabinet (1), the dust excluding plate (11)
Two sides be separately mounted on sliding rail (14), the side of the separate dust excluding plate (11) of the pull rod (12) passes through Power Component and cunning
Block (6) connection.
2. being used for the high-precision detection device with dust reduction capability of chip manufacture as described in claim 1, which is characterized in that
The gear unit includes connecting rod (15), link block (16) and spring (17), the connecting rod (15) and rotating disc (10)
Axis is parallel, and the rotating disc (10) is set on connecting rod (15), and one end and cleaning deskitte (8) of the connecting rod (15) are fixed
Connection, the link block (16) are fixed on the other end of connecting rod (15), and the link block (16) and rotating disc (10) are against institute
It states spring (17) to be located between rotating disc (10) and cleaning deskitte (8), the rotating disc (10) passes through spring (17) and cleaning deskitte (8)
Connection.
3. being used for the high-precision detection device with dust reduction capability of chip manufacture as described in claim 1, which is characterized in that
The driving unit includes cylinder (18), drive plate (19), driving motor (20) and at least three balls (21), the drive plate
(19) it is coaxially disposed with rotating disc (10), the driving motor (20) is fixed on the one of the close rotating disc (10) of drive plate (19)
Side, the driving motor (20) and rotating disc (10) are sequentially connected, and cylinder (18) setting turns in the separate of drive plate (19)
The side of Moving plate (10), the cylinder (18) are fixed on the inner wall of cabinet (1), and the cylinder (18) drives drive plate (19) edge
The axial movement of drive plate (19), the periphery of the drive plate (19) be equipped with annular groove, the annular groove and drive plate (19)
Coaxial arrangement, the ball (21) are circumferentially uniformly arranged in a ring groove centered on the axis of drive plate (19), the ball
(21) in a ring groove, the ball (21) matches and is slidably connected with annular groove, the ball (21) and rotating disc for setting
(10) it is fixedly connected.
4. being used for the high-precision detection device with dust reduction capability of chip manufacture as claimed in claim 3, which is characterized in that
Lubricating oil is coated on the inner wall of the annular groove.
5. being used for the high-precision detection device with dust reduction capability of chip manufacture as claimed in claim 3, which is characterized in that
The driving motor (20) is servo motor.
6. being used for the high-precision detection device with dust reduction capability of chip manufacture as described in claim 1, which is characterized in that
The Power Component includes fixed pulley (22) and connecting line (23), and the cabinet (1) is equipped with through-hole, and the connecting line (23) is worn
Through-hole is crossed, one end of the connecting line (23) is fixedly connected with sliding block (6), and the other end of the connecting line (23) bypasses fixed pulley
(22) it is fixedly connected with pull rod (12), the fixed pulley (22) is fixed on cabinet (1).
7. being used for the high-precision detection device with dust reduction capability of chip manufacture as claimed in claim 6, which is characterized in that
The making material of the connecting line (23) is wirerope.
8. being used for the high-precision detection device with dust reduction capability of chip manufacture as described in claim 1, which is characterized in that
The inner wall of the separate material transfer mouth side of the cabinet (1) is equipped with ion wind gun (24).
9. being used for the high-precision detection device with dust reduction capability of chip manufacture as described in claim 1, which is characterized in that
Anticorrosion galvanizing layer is coated on the bracket (7).
10. being used for the high-precision detection device with dust reduction capability of chip manufacture as described in claim 1, feature exists
In the sliding rail (14) is equipped with limited block (25), and the limited block (25) is located at the separate pull rod (12) of dust excluding plate (11)
Side.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910280436.3A CN110076115A (en) | 2019-04-09 | 2019-04-09 | A kind of high-precision detection device with dust reduction capability for chip manufacture |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910280436.3A CN110076115A (en) | 2019-04-09 | 2019-04-09 | A kind of high-precision detection device with dust reduction capability for chip manufacture |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110076115A true CN110076115A (en) | 2019-08-02 |
Family
ID=67414655
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910280436.3A Withdrawn CN110076115A (en) | 2019-04-09 | 2019-04-09 | A kind of high-precision detection device with dust reduction capability for chip manufacture |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110076115A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113188610A (en) * | 2021-06-30 | 2021-07-30 | 苏师大半导体材料与设备研究院(邳州)有限公司 | Surface defect and thickness detection device and method for semiconductor sheet |
| CN113828528A (en) * | 2021-09-23 | 2021-12-24 | 深圳市阿龙通讯技术有限公司 | Chip detection device with classification structure for mobile phone intelligent manufacturing |
-
2019
- 2019-04-09 CN CN201910280436.3A patent/CN110076115A/en not_active Withdrawn
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113188610A (en) * | 2021-06-30 | 2021-07-30 | 苏师大半导体材料与设备研究院(邳州)有限公司 | Surface defect and thickness detection device and method for semiconductor sheet |
| CN113828528A (en) * | 2021-09-23 | 2021-12-24 | 深圳市阿龙通讯技术有限公司 | Chip detection device with classification structure for mobile phone intelligent manufacturing |
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Application publication date: 20190802 |