CN110068584A - Scan-type X-ray grating interference imaging system and method - Google Patents
Scan-type X-ray grating interference imaging system and method Download PDFInfo
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- CN110068584A CN110068584A CN201910198696.6A CN201910198696A CN110068584A CN 110068584 A CN110068584 A CN 110068584A CN 201910198696 A CN201910198696 A CN 201910198696A CN 110068584 A CN110068584 A CN 110068584A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
- G01N23/20008—Constructional details of analysers, e.g. characterised by X-ray source, detector or optical system; Accessories therefor; Preparing specimens therefor
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
- G01N23/20008—Constructional details of analysers, e.g. characterised by X-ray source, detector or optical system; Accessories therefor; Preparing specimens therefor
- G01N23/20016—Goniometers
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
- G01N23/20075—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials by measuring interferences of X-rays, e.g. Borrmann effect
Abstract
The present invention provides a kind of scan-type X-ray grating interference imaging system and method, has: generating the light source of X-ray；The source grating for being separated into multiple linear light sources from the X-ray of light source incidence；X-ray wavefront can be made to generate phase distribution in the phase grating of the vertical striped of grating downstream generation rule；The analysis grating of strength information is converted into using X-ray absorption grating and by the decaying, distortion or fuzzy message of stripe；With the image after record X-ray transparent analysis grating and sample to be tested is made to translate and carry out in one direction the detector of continuous scanning；Wherein, source grating, sample to be tested, phase grating, analysis grating and detector are configured in order from the direction of light source incidence X-ray；Any one in source grating, phase grating and analysis grating is the ladder-like grating of dislocation.According to the present invention, structure is simple and operation is easy, and can expand areas imaging, reduces the adjusting requirement in imaging process, and improve system robustness.
Description
Technical field
The present invention relates to a kind of scan-type X-ray grating interference imaging system and methods.
Background technique
As grating interference imaging technique, currently used technology is to utilize X-ray source and phase grating generation rule
Vertical stripe (i.e., Talbot striped), sample the front and back distortion of pattern, intensity into optical path are increased by detection and declined
The information such as subtract, obscure, realizing to the separation of the absorptions contrast of sample, the imaging of phase contrast and dark field contrast and information.
In plane wave and in the case of do not consider enlarge-effect, if phase grating is π to the phase-shift phase of design X-ray
When, the period of vertical striped is the 1/2 of phase grating period, if phase-shift phase is other rational fraction times π, vertical striped
Period is that the phase grating period is consistent.Then under plane wave situation, position that ideal vertical striped occurs after phase grating
DT is vertical striped at a distance from phase grating, should meet following formula:
Wherein, p is the phase grating period；λ is X-ray wavelength；M mutually pipettes odd number or even number according to phase grating；Phase
When grating π phase shift, χ takes 2, and other situations take 1.
For usually used X-ray energy (i.e., 10-100keV), since the scale of striped is less than imaging detector
One to two magnitudes of pixel, thus common imaging detector need it is completely the same with aforementioned stripe structure using one piece
Absorption grating does step-scan detection before the detectors, converts imaging detection for many variations of striped as analysis grating
The variation of intensity in one pixel of device.Specifically, step-scan is that detector is allowed gradually to move with certain location interval.
However, if coherence is inadequate, it will the vertical striped of aforementioned rule can not be generated.Therefore, for coherence compared with
The X-ray source of difference, such as conventional X-ray tube, need to increase by one piece of source grating to improve light source coherence.Source grating is also
Absorption grating, it can cleave large-sized light source at a rule linear light source, and each linear light source is respectively separately as light source
The vertical striped of phase grating generation rule can be passed through.But due to the deviation for having position between linear light source, vertical striped is only being set
The location dislocation of meter is superimposed, that is, adjacent linear light source is staggered a cycle.That is, it is generally the case that the m in range formula
A series of values are no longer taken, only one value is available.In addition, X-ray tube uses the amplification for making us need to consider point light source to imitate
Answer etc..
To sum up, the period p 0 of linear light source spacing i.e. source grating, the period p of phase grating 1, the period for analyzing grating
The spacing l and phase grating of p2, source grating and phase grating and the spacing d for analyzing grating need to meet following geometrical relationship,
Wherein, it is π phase shift phase grating:
Since system realizes that more contrast imagings and isolated realization all rely on X-ray grating, and X-ray wavelength is short, wears
Saturating ability is strong, and the difficulty of processing of X-ray grating is big, and the effective coverage of grating is generally little, the view of grating interference imaging system
Field is greatly limited.
In addition, the step-scan detection of analysis grating requires analysis grating precise displacement, precision can want in one cycle
The magnitude in sub-micron is sought, has very high requirement for whole system stability and anti-seismic performance.
Summary of the invention
Problems to be solved by the invention:
In view of the above-mentioned problems, the purpose of the present invention is to provide a kind of scan-type X-ray grating interference imaging system and method, knot
Structure is simple and operation is easy, and can expand areas imaging, reduces the adjusting requirement in imaging process, and improve system robustness.
Technical means to solve problem:
The present invention provides a kind of scan-type X-ray grating interference imaging system, has:
Generate the light source of X-ray；
Using X-ray absorption grating to the source grating for being separated into multiple linear light sources from the X-ray of the light source incidence；
X-ray wavefront can be made to generate phase distribution in the phase grating of the vertical striped of grating downstream generation rule；
The analysis light of strength information is converted into using X-ray absorption grating and by the decaying, distortion or fuzzy message of stripe
Grid；With
Image after record X-ray transparent analysis grating simultaneously makes sample to be tested translate and carry out in one direction the spy of continuous scanning
Survey device；
Wherein, the source grating, the sample to be tested, the phase light are configured in order from the direction of the light source incidence X-ray
Grid, the analysis grating and the detector；
The analysis grating and the vertical striped period having the same；
Any one in the source grating, the phase grating and the analysis grating is the ladder-like grating of dislocation.
According to the present invention, firstly, sample to be tested can be made to translate in one direction by its structure carries out continuous scanning
Come replace it is original analysis grating step-scan, thus continuous scanning imaging mode be greatly enlarged areas imaging.Source light
Any one in grid, phase grating and analysis grating is changed to the ladder-like grating of dislocation by common regular vertical bar shape grating, with
This makes under working condition, and vertical striped and analysis grating are in different overlapping phases.Specifically, it is moved along sample to be tested
The visual field in direction is extended to the range of translational adjustment, another dimension is then also extended since grating can be made into strip.
Secondly, replacing the step-scan of the analysis grating of sub-micrometer precision with sample translation scan, can greatly reduce in imaging process
It adjusts and requires, improve system robustness.Finally, more contrast images that traditional raster interference imaging obtains change the mode of scanning into only
One piece in three blocks of gratings is needed replacing, displacement regulating mechanism is increased, and the information content obtained is not reduced.
It is also possible in the present invention, when the source grating to be changed to the ladder-like grating of dislocation, is then equivalent to subregion
Ground moves linear light source.To make vertical striped become the ladder-like of dislocation.
It is also possible in the present invention, when the phase grating to be changed to the ladder-like grating of dislocation, is then equivalent to change
The phase shift distribution of the phase grating.To make vertical striped become the ladder-like of dislocation.
It is also possible in the present invention, when the analysis grating is changed to the ladder-like grating of dislocation, due to described vertical
Striped remains unchanged, so the overlapping phase of the vertical striped and the analysis grating is not single value.
It is also possible in the present invention, the overlapping phase of the vertical striped and the analysis grating is three or more, and
It is different from each other.
It is also possible in the present invention, the sample to be tested is moved along the direction of perpendicular light source covering of the fan, the sample to be tested meeting
By the region that all overlapping phases are different.
The present invention also provides the working methods of above-mentioned scan-type X-ray grating interference imaging system, comprising:
1) source grating, phase grating and the angles and positions for analyzing grating are adjusted, so that at slice as defined in three pieces of gratings satisfactions
Part；
2) in the case where not putting sample to be tested, the size of the overlapping phase value after each pixel is fixed is determined, it is initial under determining
In the case where position and initial phase, step distance and overlapping phase value are calculated；
3) sample to be tested is moved into imaging region, detector start recording image, until to be measured along the direction of perpendicular light source covering of the fan
Sample 3 all removes imaging region；
4) image that the regional record of each different overlapping phases arrives is spliced into the image as entire sample to be tested respectively, and is gone
Except motion blur；
5) the stepping curve under sample situation is obtained according to above-mentioned image zooming-out and fitting, whether there is or not samples to be tested two to calculate
Under kind situation, the variation of the mean intensity, initial phase and contrast of stepping curve, i.e. the absorption contrast of acquisition sample to be tested,
The image of phase contrast and scattering three kinds of contrasts of contrast.
Invention effect:
The present invention can provide a kind of scan-type X-ray grating interference imaging system, and structure is simple and operation is easy, and can expand imaging
Range reduces the adjusting requirement in imaging process, and improves system robustness.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of scan-type X-ray grating interference imaging system according to the present invention；
Fig. 2 is to analyze grating and detector along the partial schematic diagram of a section of light source covering of the fan in dotted line frame shown in FIG. 1；
Fig. 3 is the echelon local schematic diagram of common strip grating and dislocation；
Fig. 4 is the schematic diagram of overlapping phase；
Fig. 5 is the stepping curve received when the detector pixel calibration in different overlapping phase regions；
Symbol description:
1 light source, 2 source gratings, 3 samples to be tested, 4 phase gratings, 5 analysis gratings, 6 detectors.
Specific embodiment
The present invention is further illustrated below in conjunction with following embodiments, it should be appreciated that following embodiments are merely to illustrate this
Invention, should not be understood as limiting the scope of the invention, and those skilled in the art's above content according to the present invention is made
Some nonessential modifications and adaptations out all belong to the scope of protection of the present invention.Following specific technological parameters of example etc. are also only
It is an example in OK range, i.e., those skilled in the art can be done in suitable range by the explanation of this paper and be selected,
And hereafter exemplary specific value is not really wanted to be defined in.Identical in the various figures or corresponding appended drawing reference indicates the same part, and
Omit repeated explanation.In addition, in the present invention, continuous scanning is sample to be tested 3 and imaging system in the direction of perpendicular light source covering of the fan,
With certain speed relative motion, imaging system is enable to carry out continuous scanning to large scale sample to be tested 3.Relatively, stepping
Scanning is to analyze the position that side, vertical striped occur before the detectors of grating 5, perpendicular to grating grid direction, with certain position
Interval is set gradually to move.
It is disclosed a kind of scan-type X-ray grating interference imaging system S, as shown in Figure 1, imaging system S has: light
Source 1, source grating 2, sample to be tested 3, phase grating 4, analysis grating 5 and detector 6.Wherein light source 1 is usually X-ray tube, but
It may be other x-ray sources, the X-ray of design energy can be generated by adjusting.Source grating 2 is X-ray absorption grating,
Incident light separates in column, forms plural linear light source, and single linear light source has preferable coherence, and linear light source is irrelevant each other.Phase
Grating 4 has certain phase difference through grid line and the X-ray for being not through grid line, and then make X for the X-ray of certain energy
Ray wavefront generates phase distribution, can be in the vertical striped T of grating downstream generation rule.Analysis grating 5 is X-ray absorption light
Grid and above-mentioned vertical striped T period having the same.Detector 6 records the image after X-ray transparent analysis grating 5.That is, such as
Shown in Fig. 1, source grating 2, sample to be tested 3, phase grating 4, analysis 5 and of grating are configured in order from the direction of 1 incident X-rays of light source
Detector 6.
The apparatus according to the invention, which needs to meet following condition, to work.That is, in the present invention, phase grating 4 and analysis
Spacing between grating 5 meets following formula:
Wherein, M is Talbot order, mutually pipettes odd number or even number according to phase grating；χ is one and phase grating phase-shift phase
Relevant parameter, when phase grating π phase shift, χ takes 2, and other situations take 1；p1For the period of phase grating；p2For phase grating
Period；λ is the wavelength of X-ray.
Also, 4 period of phase grating and analysis 5 period of grating meet condition such as following formula in the present invention:
Wherein, p1For the period of phase grating 4, p2For analyze grating 5 period, l between source grating and phase grating away from
From d is the distance between phase grating and analysis grating 5；χ is a parameter relevant to phase grating phase-shift phase, phase grating π
When phase shift, χ takes 2, and other situations take 1.This condition is to make to analyze the imaging certainly that grating 5 and phase grating 4 generate and have
Identical structure；
Also, 2 period of source grating and analysis 5 period of grating meet condition such as following formula in the present invention:
Wherein, p0For the period of source grating 2, p2For analyze grating 5 period, l be the distance between source grating and phase grating,
D is the distance between phase grating and analysis grating 5.The linear light source that this condition can be such that the source grating 2 separates issues
X-ray mutually staggering the complete period from imaging and be superimposed at analysis grating 5.
Also, any one in source grating 2, phase grating 4 and analysis grating 5 needs to be made into mistake shown in Fig. 3 in the present invention
The echelon of position.Specifically, it can be directly made into the pattern of the echelon of dislocation, but can also make when making grating
Make strip grating, several blocks of strip gratings then spelled into pile in grating grid mode parallel to each other with the method that micro-group fills,
But manufacture craft is without being limited thereto.Thus as shown in figure 4, making under working condition, vertical striped T and analysis grating 5 are in difference
Overlapping phase under.Specifically, change source grating is similar to subregion and moves light source, and vertical striped T is made to become the rank of dislocation
Scalariform；Change phase grating is equivalent to the phase shift distribution for changing phase grating, and vertical striped T can also be made to become the ladder of dislocation
Shape；If change analysis grating 5, vertical striped T is remained unchanged.The requirement of core is exactly to require vertical striped T and analysis grating 5
Overlapping phase be no longer common single value.
More specifically, the echelon of dislocation of the invention refers on the basis of vertical striped T grating, grating grid
Line subregion is misplaced, and non-dislocated is gradually increased big situation.Similarly, it can also be applied to cross in addition to vertical striped T
The case where striped, as long as the initial phase for being made into each region is different.Requirement to the echelon of dislocation is to make to analyze
Grating 5 and vertical striped T can be overlapped in each sub-regions with different phases.Overlapping phase value sum cannot less than 3,
And disperses as far as possible in the value range of 2 π, be advisable entirely less than pi/2 with the difference of two neighboring overlapping phase value.
Also, the production method for not limiting the echelon of dislocation in the present invention, such as when system parameter is not high, Ke Yizhi
The shape that the echelon of dislocation is made into the prior art, the positioning accuracy 0.1um of existing LIGA technology are connect, screen periods lead to
Often all in um magnitude；Or on the basis of strip grating, then spelling/pile is got up for cutting, then with the method that micro-group fills by grid
Line leveling is gone and is fixed.
Overlapping phase is no less than three, and different from each other.Sample to be tested is moved along the direction of perpendicular light source covering of the fan, to be measured
The region that sample can be overlapped by all differences.Detector 6 records the image after X-ray transparent analysis grating 5.It that is to say
It says, present invention uses the echelons of dislocation to replace one piece in original three blocks of vertical bar gratings, as a result, can be by making sample
This movement replaces the step-scan method of existing accurate displacement analysis grating.In other words, the present invention does not need mobile analysis
Grating 5 can make the overlapping phase for analyzing grating 5 and vertical striped T (i.e., Talbot striped), on the mobile direction of sample
Single value there are multiple values, rather than when using vertical bar grating.
Specifically, as shown in figure 5, the purpose of step-scan is mobile analysis grating 5, make to analyze grating 5 and vertical item
Line T is overlapping with different phases, and striped is just penetrated the X-ray intensity after analysis grating 5 by every position with detector
It records, and then obtains stepping curve, to by the Strength Changes of vertical striped T, distortion and fuzzy be converted to stepping song
DC component, phase shift and the contrast variation of line.In contrast, in the present invention, used dislocation ladder-like grating it
Afterwards, the occurrence of overlapping phase has been demarcated in advance, in this way it is no longer necessary to mobile analysis grating 5, it is only necessary to which mobile example makes its process
The different region of overlapping phase can replace step-scan, obtain " stepping curve ".
Illustrate the working principle of imaging system S, below to further understand the present invention.Grating interference imaging and more contrasts
In the case of isolated cardinal principle is to compare and has two kinds of no specimen, by the variation for the vertical striped T that phase grating 4 generates.Letter
It singly says, the Strength Changes of striped entirety are to absorb contrast, and the distortion of striped is phase contrast, and striped obscures as dark field lining
Degree.
In previous practice, due to factors such as X-ray wavelength is short, imaging system limited lengths, the period of vertical striped T is usual
In micron dimension, one to two amounts smaller than the Pixel Dimensions of the usually used detector such as X-ray flat panel detector 6
Grade, it is therefore desirable to which one piece of absorption grating does step-scan detection as analysis grating 5 in front of detector 6.Step-scan detection
Process in fact be exactly gone to block striped by different phases with the grid line of absorption grating, after then striped is at least partially obscured
Intensity is recorded.Such step-scan detecting way needs to analyze grating 5 in the scale of a magnitude smaller than fringe period
On the one hand step-wise displacement proposes high requirement to the degree of regulation of system, resistance to shock, on the other hand makes system imaging
Limited speed is in the speed of step-scan.
In contrast, need will be any in grating interference system by scan-type X-ray grating interference imaging system S of the invention
One piece, the ladder-like of dislocation shown in Fig. 2 is altered to by traditional vertical bar shape grating so that under working condition, vertical striped T and
Analysis grating 5 is at different subregions under different overlapping phases.It changes source grating 2 and phase grating 4 is so that phase
The vertical striped T that grating 4 generates generates different offsets, and analysis on altered project grating 5 is to make to analyze the screening that grating 5 generates out of phase
Gear.In the present invention, vertical striped T and analysis grating 5 play detection substantially in a plane, with this convenient for analysis grating 5
Effect.
In addition, before scanning imagery, it is thus necessary to determine that the value of the overlapping phase of different zones, the i.e. value of abscissa in Fig. 3.Tool
There are two types of methods on body ground: in the case where there are many overlapping phase value, phase value can be according to the light source type used, by nothing
Collected intensity value progress triangle (synchrotron radiation)/sinusoidal (X-ray tube) fitting obtains in the case of sample；Alternatively, overlapping
In the case that phase value is seldom, or research is in application, can first determine phase with step-scan mode in the installation and debugging stage
Value.
That is, scan-type X-ray grating interference imaging system S service life absorption grating of the invention is as source
Grating 2 is to improve light source coherence, using X-ray phase grating 4 so as in the vertical striped T of grating downstream generation rule,
It also uses absorption grating as analysis grating 5, converts displacement curve for the information such as the decaying of stripe, distortion, fuzzy
The variation of mean intensity, initial phase and contrast.At the same time, the present invention carries out the design and Irnaging procedures of above-mentioned grating
It improves, makes to analyze grating 5 and vertical striped T different in the overlapping phase of different zones, and make sample to be tested 3 along a side
To translation, using sample to be tested 3 continuous scanning replace it is original analysis grating 5 step-scan.
Illustrate the workflow of scan-type X-ray grating interference imaging system S of the invention below.
1) source grating 2, phase grating 4 and the angles and positions for analyzing grating 5 are accurately adjusted so that three blocks of gratings meet with
Lower condition: grid line is equally oriented, and plane where grating is parallel to each other, and the center of three blocks of gratings is basic and x-ray source, X-ray are visited
It surveys 6 center of device and is in same straight line, the spacing between grating meets image-forming condition.
2) stage is debugged, in the case where not putting sample to be tested 3, accurate displacement analyzes grating 5, each pixel of detector 6
(m*,n*) acquisition X-ray intensityFixed analysis grating 5.It willIt is rightIt is fitted, thus
According to current X-ray intensity, obtains and be fixed up, the size phase (m of the overlapping phase value after each pixel is fixed*,
n*).Due to the use of the echelon of dislocation, phase (m*,n*) generally in each sub-regions phaseiInside it is consistent.And
And ideally, the X-ray intensity value in each sub-regions is consistent I substantiallyB(phasei).In other words, if it is repeatedly heavy
Again in use, debugging step can also be omitted.Wherein, (m*,n*) indicate detector 6 on pixel coordinate value, be the change of intensity function
One of amount, another variable are the overlapping phase of striped and analysis grating 5 or the stepping-in amount for analyzing raster scanning, subscript x generation
Table distance, dimension are " rice ".In the case where fixing initial position and initial phase, step distance and overlapping phase value can lead to
Cross the period p of the analysis vertical striped T of grating 5/2Conversion, it may be assumed that
3) sample to be tested 3 is moved into imaging region along the direction of perpendicular light source covering of the fan shown in FIG. 1, detector 6 starts to remember
Image is recorded, until sample to be tested 3 all removes imaging region.Sample to be tested 3 is with speed vm/s uniform motion, until being fully removed
Detector regimes.Detector 6 is according to the intensity of light source, under the premise of proof strength records quality, with maximum acquisition frame rate fs-1
Record X-ray intensity.It is assumed that the effective width of the different subregion of each overlapping phase is dm, then need to meet v≤df, with
Guarantee that sample to be tested 3 leaves complete image in each sub-regions.
4) image that the regional record of each different overlapping phases arrives is spliced to the figure as entire sample to be tested 3 respectively
Picture, and motion blur is removed, obtain IS(phasei,m,n).In the present invention, the splicing of image and the removal of motion blur can all be adopted
With ready-made algorithm.
5) according to IS(phasei, m, n), to each unit (m, n) on sample to be tested 3, it can extract and be fitted
Stepping curve under sample situation, i.e., with phaseiFor independent variable, IS(phasei, m, n) and it is dependent variable, (m, n) is for test sample
It is definite value, I for the position determined on product 3S(phasei, m, n) and it is to ISOne group of sampling of (phase, m, n), IS(phase,
M, n) it is the true stepping curve having under 3 situation of sample to be tested, IS(phasei, m, n) and by being fitted available IS
The approximation of (phase, m, n), according to IB(phasei) can be fitted to obtain the stepping curve under general no specimen situation,
I.e. with phaseiFor independent variable, IB(phasei) it is dependent variable, IB(phasei) it is to IB(phase) one group of sampling, IB
It (phase) is the true stepping curve having under 3 situation of sample to be tested, IB(phasei) by being fitted available IB(phase)
Approximation.It calculates whether there is or not under 3 two kinds of situations of sample to be tested, the mean intensity of stepping curve, initial phase and contrast
Variation can be obtained absorption contrast, phase contrast and the image for scattering three kinds of contrasts of contrast of sample to be tested 3.In the present invention, under
Marking S indicates that sample Sample, subscript B indicate background Background, and the variable outside coordinate value is directly overlapping phase value
Size, dimensionless.
In conclusion the present invention is greatly enlarged areas imaging in a manner of scanning imagery first.It is moved along sample to be tested 3
The visual field in direction is extended to the range of translational adjustment, another dimension is then also extended since grating can be made into strip.
Secondly, the step-scan of the analysis grating 5 of sub-micrometer precision is replaced with 3 translation scan of sample to be tested of millimeter precision, it can be greatly
The adjusting requirement in imaging process is reduced, system robustness is improved.Finally, more contrast images that traditional raster interference imaging obtains
The mode for changing scanning into only needs replacing one piece in three blocks of gratings, and increases the big travel displacement regulating mechanism of sample, structure
Simply, the information content obtained will not be reduced.
Above specific embodiment has carried out further specifically the purpose of the present invention, technical scheme and beneficial effects
It is bright, it should be appreciated that the above is only a kind of specific embodiments of the invention, however it is not limited to protection model of the invention
It encloses, under the objective for not departing from essential characteristic of the invention, the present invention can be presented as diversified forms, therefore the implementation in the present invention
Form is to be illustrative rather than definitive thereof, and is limited since the scope of the present invention is defined by the claims rather than by specification, Er Qieluo
All changes in the full scope of equivalents of the range that claim defines or the range that it is defined are understood to be included in right
In claim.All within the spirits and principles of the present invention, any modification, equivalent substitution, improvement and etc. made should all wrap
Containing within protection scope of the present invention.
Claims (5)
1. a kind of scan-type X-ray grating interference imaging system, which is characterized in that have:
Generate the light source of X-ray；
Using X-ray absorption grating to the source grating for being separated into multiple linear light sources from the X-ray of the light source incidence；
X-ray wavefront can be made to generate phase distribution in the phase grating of the vertical striped of grating downstream generation rule；
The analysis light of strength information is converted into using X-ray absorption grating and by the decaying, distortion or fuzzy message of stripe
Grid；With
Image after record X-ray transparent analysis grating simultaneously makes sample to be tested translate and carry out in one direction the spy of continuous scanning
Survey device；
Wherein, the source grating, the sample to be tested, the phase light are configured in order from the direction of the light source incidence X-ray
Grid, the analysis grating and the detector；
The analysis grating and the vertical striped period having the same；
Any one in the source grating, the phase grating and the analysis grating is the ladder-like grating of dislocation.
2. scan-type X-ray grating interference imaging system according to claim 1, which is characterized in that
The overlapping phase of the vertical striped and the analysis grating is three or more, and different from each other.
3. scan-type X-ray grating interference imaging system according to claim 1, which is characterized in that
The sample to be tested is moved along the direction of perpendicular light source covering of the fan, and the sample to be tested can be different by all overlapping phases
Region.
4. scan-type X-ray grating interference imaging system as claimed in any of claims 1 to 3, which is characterized in that
The analysis grating and the vertical striped are substantially in a plane.
5. a kind of work side of scan-type X-ray grating interference imaging system as claimed in any of claims 1 to 4
Method characterized by comprising
1) source grating, phase grating and the angles and positions for analyzing grating are adjusted, so that at slice as defined in three pieces of gratings satisfactions
Part；
2) in the case where not putting sample to be tested, the size of the overlapping phase value after each pixel is fixed is determined, it is initial under determining
In the case where position and initial phase, step distance and overlapping phase value are calculated；
3) sample to be tested is moved into imaging region, detector start recording image, until to be measured along the direction of perpendicular light source covering of the fan
Sample 3 all removes imaging region；
4) image that the regional record of each different overlapping phases arrives is spliced into the image as entire sample to be tested respectively, and is gone
Except motion blur；
5) the stepping curve under sample situation is obtained according to above-mentioned image zooming-out and fitting, whether there is or not samples to be tested two to calculate
Under kind situation, the variation of the mean intensity, initial phase and contrast of stepping curve, i.e. the absorption contrast of acquisition sample to be tested,
The image of phase contrast and scattering three kinds of contrasts of contrast.
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