CN110068405A - A kind of optical pressure sensor - Google Patents
A kind of optical pressure sensor Download PDFInfo
- Publication number
- CN110068405A CN110068405A CN201910252438.1A CN201910252438A CN110068405A CN 110068405 A CN110068405 A CN 110068405A CN 201910252438 A CN201910252438 A CN 201910252438A CN 110068405 A CN110068405 A CN 110068405A
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- China
- Prior art keywords
- angle
- pressure sensor
- reflection
- layer
- laser
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- 230000003287 optical effect Effects 0.000 title claims abstract description 34
- 238000001514 detection method Methods 0.000 claims abstract description 32
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 18
- 229910002804 graphite Inorganic materials 0.000 claims description 10
- 239000010439 graphite Substances 0.000 claims description 10
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 9
- 239000000377 silicon dioxide Substances 0.000 claims description 9
- 235000012239 silicon dioxide Nutrition 0.000 claims description 7
- 229910052710 silicon Inorganic materials 0.000 claims description 5
- 239000010703 silicon Substances 0.000 claims description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 4
- 241000931526 Acer campestre Species 0.000 claims description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical group [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 3
- 230000005540 biological transmission Effects 0.000 claims description 3
- 229910052802 copper Inorganic materials 0.000 claims description 3
- 239000010949 copper Substances 0.000 claims description 3
- 229910052814 silicon oxide Inorganic materials 0.000 claims 1
- 230000035945 sensitivity Effects 0.000 abstract description 6
- 230000036039 immunity Effects 0.000 abstract description 3
- 230000036632 reaction speed Effects 0.000 abstract description 2
- 238000005516 engineering process Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000003471 anti-radiation Effects 0.000 description 1
- 238000009530 blood pressure measurement Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 230000003862 health status Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000011664 signaling Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/24—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L11/00—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
- G01L11/02—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by optical means
Abstract
The invention proposes a kind of optical pressure sensors, including laser light source, beam splitting arrangement, detection unit, reflecting mirror and laser spot detection device；Detection unit includes a conductive deformation layer and reflecting layer；The laser that laser light source is launched forms transmitted light and reflected light after beam splitting arrangement beam splitting；Transmitted light enters laser spot detection device behind reflecting layer；The first angle of reflection is formed between transmitted light and reflecting layer；Reflected light enters laser spot detection device after reflecting mirror reflects；The second angle of reflection is formed between reflected light and reflecting mirror；First angle of reflection is equal to the second angle of reflection.The present invention can obtain extraneous pressure parameter value by comparing the reflected light of reflecting mirror and the facula position of strain detecting unit reflected light, have the advantages that structure simply, strong interference immunity, reaction speed is fast, precision is high, high sensitivity and at low cost.
Description
Technical field
The invention belongs to sensor technical field more particularly to a kind of optical pressure sensors.
Background technique
With the development of sensor technology, the pressure sensors such as pressure resistance type, condenser type, resonant mode are in automobile, space flight, biology
Equal fields, which suffer from, to be widely applied.But above-mentioned pressure sensor is in the side such as sensitivity, dynamic property, range, electromagnetic compatibility
It is badly in need of improving in face.To solve the above-mentioned problems, there is novel optical pressure sensor again in recent years, and obtained increasingly
More concerns.Optical pressure sensor has that anti-radiation, anti-electromagnetic field interference, simple process, size be small, high sensitivity, precision
The advantages that height, broad quantum, it is suitble in the extreme environments such as space, desert, the contour radiation of oil drilling, high electromagnetic interference, high temperature
Using.Optical pressure sensor primarily rests on the relationship between pressure and optical signalling to the detection of pressure.For example light is strong
Degree, the phase of light, the wavelength of light etc..Currently, pressure sensor is broadly divided into fibre optic compression sensor and based on silicon planner technology
Optical pressure sensor.Currently, optical pressure sensor needs to measure micron mainly using silica splicing process is based on
The silica of grade is arranged and is welded according to certain sequence.The optical pressure sensor is in the presence of structure is complicated, difficulty of processing is big, essence
The disadvantages of exactness is not high, temperature stability is poor.
At present in the control and monitoring of military field, such as space flight equipment, aircraft etc. field pressure, health status monitoring
Needs, the performance of sensor is put forward higher requirements, especially for space flight and aviation demand is met, sensor needs full
The requirement such as sufficient strong interference immunity, stability height, fast response time, vibration.
Summary of the invention
The purpose of the present invention is to provide a kind of optical pressure sensor, structure is simple, is convenient for operation, anti-interference
By force, sensitivity and accuracy are higher.To achieve the above object, the technical scheme adopted by the invention is as follows:
A kind of optical pressure sensor, including laser light source, beam splitting arrangement, detection unit, reflecting mirror and laser spot detection device；
Wherein, the detection unit includes a conductive deformation layer and reflecting layer；
The laser that the laser light source is launched forms transmitted light and reflected light after the beam splitting arrangement beam splitting；
The transmitted light enters the laser spot detection device behind the reflecting layer；It is formed between the transmitted light and reflecting layer
First angle of reflection；
The reflected light enters the laser spot detection device after reflecting mirror reflection；Between the reflected light and reflecting mirror
Form the second angle of reflection；
First angle of reflection is equal to second angle of reflection.
Preferably, the angle between the incidence angle between the transmitted light and the detection unit and first angle of departure is 0 °
~180 °.
Preferably, the conductive deformation layer includes a pair of electrodes component；The electrode member includes an electrode and a graphite
Layer；The electrode is formed in the graphite linings；The graphite linings are formed on the reflecting layer.
Preferably, one of them described electrode member is formed on the reflecting surface of the emission layer.
Preferably, the electrode is copper electrode.
Preferably, the reflecting layer includes the silicon dioxide layer being successively bonded and silicon layer；The silicon dioxide layer is towards institute
State transmission light direction setting.
Preferably, the transmitted light formed through the beam splitting arrangement is along the output optical axis direction of laser light source；Through described
Output optical axis direction of the reflected light that beam splitting arrangement is formed perpendicular to laser light source.
Preferably, the optical maser wavelength is 300nm~1800nm.
Compared with prior art, advantages of the present invention are as follows:
1) present invention only includes laser light source, beam splitting arrangement, 5 detection unit, reflecting mirror and laser spot detection device optical path members
Pressure measurement can be realized in part, and light path element is few, and system is simple；
2) external world can be obtained by comparing the facula position of the reflected light of reflecting mirror and strain detecting unit reflected light
Pressure parameter value, have the advantages that strong interference immunity, reaction speed are fast, precision is high, high sensitivity and at low cost.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the optical pressure sensor of one embodiment of the invention.
Wherein, 100- laser light source, 200- beam splitting arrangement, 300- reflecting mirror, 400- laser spot detection device, 500- detection are single
Member, 510- electrode, 520- graphite linings, 530- silicon dioxide layer, 540- silicon layer.
Specific embodiment
Optical pressure sensor of the invention is described in more detail below in conjunction with schematic diagram, which show this
The preferred embodiment of invention, it should be appreciated that those skilled in the art can modify invention described herein, and still realize this
The advantageous effects of invention.Therefore, following description should be understood as the widely known of those skilled in the art, and not make
For limitation of the present invention.
As shown in Figure 1, a kind of optical pressure sensor, including laser light source 100, beam splitting arrangement 200, detection unit 500,
Reflecting mirror 300 and laser spot detection device 400；Wherein, detection unit 500 includes a conductive deformation layer and reflecting layer；Conductive deformation layer
It generates heat after connecting with the mains, the deformation of detection unit 500 generates pressure distortion；The laser that laser light source 100 is launched is filled through beam splitting
Transmitted light and reflected light are formed after setting 200 beam splitting；Transmitted light enters laser spot detection device 400 behind reflecting layer；Transmitted light and reflection
The first angle of reflection is formed between layer；Reflected light enters laser spot detection device 400 after the reflection of reflecting mirror 300；Reflected light and reflecting mirror
The second angle of reflection is formed between 300；First angle of reflection is equal to the second angle of reflection, i.e., the laser position reflected through reflecting mirror 300 is made
For benchmark position, the laser position reflected through detection unit 500 is strain location.
In the present embodiment, the angle between the incidence angle between transmitted light and detection unit 500 and first angle of departure is
90 °, in other embodiments except this embodiment, angle can be 45 °, 90 °, 135 ° or 150 ° etc..
In the present embodiment, conductive deformation layer includes 510 component of a pair of electrodes；510 component of electrode includes 510 He of an electrode
One graphite linings 520；Electrode 510 is formed in graphite linings 520；Graphite linings 520 are formed on reflecting layer.A pair of electrodes 510 includes
Positive electrode and negative electrode are respectively connected to the anode and cathode of external power.
In the present embodiment, one of 510 component of electrode is formed on the reflecting surface of emission layer, another electrode 510
Component is formed in the opposite face of reflecting surface, so that the deformation of the detection unit 500 is uniform, so that transmitted light is through the detection
It is sensitiveer when laser position is subjected to displacement after unit 500 reflects, and then improve the sensitivity of the optical pressure sensor.
In the present embodiment, electrode 510 is copper electrode, is reduced costs.
In the present embodiment, reflecting layer includes the silicon dioxide layer 530 being successively bonded and silicon layer 540；Silicon dioxide layer 530
Towards transmission light direction setting, i.e., transmitted light reflects in silicon dioxide layer 530.
In the present embodiment, the transmitted light formed through beam splitting arrangement 200 is along the output optical axis direction of laser light source 100；Through
Output optical axis direction of the reflected light that beam splitting arrangement 200 is formed perpendicular to laser light source 100.
In the present embodiment, optical maser wavelength is 300nm~1800nm.
The operation principle of the present invention is that: the laser position reflected through reflecting mirror 300 is as a reference value, through detection unit 500
The laser of reflection can generate displacement with the pressure change of conductive deformation layer, by comparing the reflected light hot spot position of reflecting mirror 300
Extraneous pressure parameter value can be obtained with the facula position of 500 reflected light of strain detecting unit by setting.
The above is only a preferred embodiment of the present invention, does not play the role of any restrictions to the present invention.Belonging to any
Those skilled in the art, in the range of not departing from technical solution of the present invention, to the invention discloses technical solution and
Technology contents make the variation such as any type of equivalent replacement or modification, belong to the content without departing from technical solution of the present invention, still
Within belonging to the scope of protection of the present invention.
Claims (8)
1. a kind of optical pressure sensor, which is characterized in that including laser light source, beam splitting arrangement, detection unit, reflecting mirror and light
Spot detector；
Wherein, the detection unit includes a conductive deformation layer and reflecting layer；
The laser that the laser light source is launched forms transmitted light and reflected light after the beam splitting arrangement beam splitting；
The transmitted light enters the laser spot detection device behind the reflecting layer；First is formed between the transmitted light and reflecting layer
Angle of reflection；
The reflected light enters the laser spot detection device after reflecting mirror reflection；It is formed between the reflected light and reflecting mirror
Second angle of reflection；
First angle of reflection is equal to second angle of reflection.
2. optical pressure sensor according to claim 1, which is characterized in that the transmitted light and the detection unit it
Between incidence angle and first angle of departure between angle be 0 °~180 °.
3. optical pressure sensor according to claim 1, which is characterized in that the conduction deformation layer includes a pair of electrodes
Component；The electrode member includes an electrode and a graphite linings；The electrode is formed in the graphite linings；The graphite linings shape
On reflecting layer described in Cheng Yu.
4. optical pressure sensor according to claim 3, which is characterized in that one of them described electrode member is formed in
On the reflecting surface of the emission layer.
5. optical pressure sensor according to claim 3, which is characterized in that the electrode is copper electrode.
6. optical pressure sensor according to claim 1, which is characterized in that the reflecting layer includes two be successively bonded
Silicon oxide layer and silicon layer；The silicon dioxide layer is arranged towards the transmission light direction.
7. optical pressure sensor according to claim 1, which is characterized in that formed through the beam splitting arrangement described
Penetrate output optical axis direction of the light along laser light source；The reflected light formed through the beam splitting arrangement is perpendicular to the defeated of laser light source
Emergent shaft direction.
8. optical pressure sensor according to claim 1, which is characterized in that the optical maser wavelength be 300nm~
1800nm。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910252438.1A CN110068405A (en) | 2019-03-29 | 2019-03-29 | A kind of optical pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910252438.1A CN110068405A (en) | 2019-03-29 | 2019-03-29 | A kind of optical pressure sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110068405A true CN110068405A (en) | 2019-07-30 |
Family
ID=67366885
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910252438.1A Pending CN110068405A (en) | 2019-03-29 | 2019-03-29 | A kind of optical pressure sensor |
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| Country | Link |
|---|---|
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Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1229913A (en) * | 1998-03-04 | 1999-09-29 | 西门子公司 | Method and apparatus for evaluating internal film stress at high lateral resolution |
| CN1821748A (en) * | 2006-03-30 | 2006-08-23 | 西安电子科技大学 | Optical sensor for thin film detection |
| CN101029849A (en) * | 2007-04-03 | 2007-09-05 | 中国科学院上海光学精密机械研究所 | Method and apparatus for measuring thin-film stress |
| CN102023068A (en) * | 2010-10-10 | 2011-04-20 | 徐建康 | Film stress measuring equipment and film stress measuring method |
| CN202522351U (en) * | 2012-02-21 | 2012-11-07 | 徐东升 | Micro force detector |
| CN104568247A (en) * | 2013-10-10 | 2015-04-29 | 上海和辉光电有限公司 | Measuring method and measuring device for membrane stress |
| US9625331B2 (en) * | 2015-09-10 | 2017-04-18 | International Business Machines Corporation | Surface force apparatus based on a spherical lens |
| CN106872756A (en) * | 2017-01-13 | 2017-06-20 | 上海理工大学 | Based on garnet optics leakage current test device |
| CN107764442A (en) * | 2017-09-29 | 2018-03-06 | 上海理工大学 | Reflective optic pressure sensor |
| CN107843367A (en) * | 2017-09-29 | 2018-03-27 | 上海理工大学 | Optical pressure sensor |
-
2019
- 2019-03-29 CN CN201910252438.1A patent/CN110068405A/en active Pending
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1229913A (en) * | 1998-03-04 | 1999-09-29 | 西门子公司 | Method and apparatus for evaluating internal film stress at high lateral resolution |
| CN1821748A (en) * | 2006-03-30 | 2006-08-23 | 西安电子科技大学 | Optical sensor for thin film detection |
| CN101029849A (en) * | 2007-04-03 | 2007-09-05 | 中国科学院上海光学精密机械研究所 | Method and apparatus for measuring thin-film stress |
| CN102023068A (en) * | 2010-10-10 | 2011-04-20 | 徐建康 | Film stress measuring equipment and film stress measuring method |
| CN202522351U (en) * | 2012-02-21 | 2012-11-07 | 徐东升 | Micro force detector |
| CN104568247A (en) * | 2013-10-10 | 2015-04-29 | 上海和辉光电有限公司 | Measuring method and measuring device for membrane stress |
| US9625331B2 (en) * | 2015-09-10 | 2017-04-18 | International Business Machines Corporation | Surface force apparatus based on a spherical lens |
| CN106872756A (en) * | 2017-01-13 | 2017-06-20 | 上海理工大学 | Based on garnet optics leakage current test device |
| CN107764442A (en) * | 2017-09-29 | 2018-03-06 | 上海理工大学 | Reflective optic pressure sensor |
| CN107843367A (en) * | 2017-09-29 | 2018-03-27 | 上海理工大学 | Optical pressure sensor |
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Application publication date: 20190730 |