CN110060887A - A kind of aluminium electrolutic capacitor sealing needle and preparation method thereof - Google Patents
A kind of aluminium electrolutic capacitor sealing needle and preparation method thereof Download PDFInfo
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- CN110060887A CN110060887A CN201910305901.4A CN201910305901A CN110060887A CN 110060887 A CN110060887 A CN 110060887A CN 201910305901 A CN201910305901 A CN 201910305901A CN 110060887 A CN110060887 A CN 110060887A
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- layer
- needle
- film
- aluminium electrolutic
- electrolutic capacitor
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/513—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using plasma jets
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
- H01G13/00—Apparatus specially adapted for manufacturing capacitors; Processes specially adapted for manufacturing capacitors not provided for in groups H01G4/00 - H01G11/00
- H01G13/003—Apparatus or processes for encapsulating capacitors
Abstract
The invention discloses a kind of aluminium electrolutic capacitor sealing needles and preparation method thereof, are related to aluminium electrolutic capacitor technical field of sealing technology.The embodiment provides a kind of aluminium electrolutic capacitors to seal needle, and it includes sealing needle ontology which, which seals needle,.And the outer application of the sealing needle ontology is provided with diamond-like carbon composite film.The diamond-like carbon composite film be with high rigidity, high-bond, low-friction coefficient, high-wearing feature, resistance to bond self-lubricating coat in use; imparting sealing needle set has good wearability, resistance to bond, self-lubrication; to effectively prevent sealing needle from occurring viscous aluminium phenomenon in use; and effective protection matrix, avoid in process because caused by matrix abrasion product there is burr phenomena;Sealing needle is lubricated without special fueller in use process, to avoid lubricant pollution product, without product is cleaned again, production efficiency is greatly improved and saves production cost, be with a wide range of applications.
Description
Technical field
The present invention relates to capacitor technical field of sealing technology, in particular to a kind of aluminium electrolutic capacitor seal needle and its
Preparation method.
Background technique
With universal, the demand of capacitor of the products such as computer, communication equipment and household electrical appliance in daily life
Also it steeply rises, in the prior art, capacitor seal operation includes sealing and girdles the waist, currently, it is anti-for organizing vertical machine closing device
Only there is viscous aluminium phenomenon in use in sealing needle, and special fueller is needed to be lubricated sealing needle, and uses and add
Add the mode of lubricating oil that can bring following problems in capping processes, the lubricating oil of sealing wire surface first can polluted product surface
Quality needs to clean capacitor after processing, to increase cleaning cost and reduce production efficiency.
Summary of the invention
The purpose of the present invention is to provide a kind of aluminium electrolutic capacitors to seal needle, and aluminium electrolutic capacitor sealing needle set has can
It is effectively prevented in use and viscous aluminium phenomenon occurs.
Another object of the present invention is to provide a kind of preparation methods of aluminium electrolutic capacitor sealing needle.This method can be prepared
Above-mentioned aluminium electrolutic capacitor sealing needle is obtained, viscous aluminium phenomenon occurs to can be effectively prevented in use, can reduce
The appearance of burr phenomena.
The embodiment of the present invention is achieved in that
A kind of aluminium electrolutic capacitor sealing needle, comprising:
Needle ontology is sealed, the outer application of sealing needle ontology is provided with diamond-like carbon composite film.
Further, in the preferred embodiment, diamond-like carbon composite film includes setting gradually outward from interior
Prime coat, First Transition layer, the second transition zone, third transition zone and surface layer, wherein prime coat be layer of nitride film, first
Transition zone is metallic diaphragm, and the second transition zone is the composite film that replaces of metal layer and carbide, and third transition zone is with mixing
The diamond-like carbon film layer of sundries, surface layer are diamond-like carbon film layer.
Further, in the preferred embodiment, the layer of nitride film of prime coat be by selected from Cr, Ti, Zr, V,
The nitride of at least one of Al element is constituted.
Further, in the preferred embodiment, the layer of nitride film of prime coat with a thickness of 0.5um~
1.5um。
Further, in the preferred embodiment, the gold of the metallic diaphragm of First Transition layer and the second transition zone
Category is any element in Cr, Ti, Zr, V, Al;Carbide lamella is in WC, TiC, CrC, ZrC in second transition zone
It is any;Dopant in the diamond-like carbon film layer with dopant of third transition zone be in W, Cr, Ti at least
A kind of element doping composition.
Further, in the preferred embodiment, First Transition layer with a thickness of 0.1um~0.5um;Second mistake
Cross layer with a thickness of 0.2um~1um;Third transition zone with a thickness of 0.5um~1.5um.
Further, in the preferred embodiment, the diamond-like carbon film layer on surface layer is selected from amorphous carbon-film, tetrahedron
Amorphous carbon-film, metal-doped amorphous carbon-film, hydrogeneous amorphous carbon-film, tetrahedroid are containing hydrogen amorphous, metal-doped containing hydrogen amorphous
Any one of film.
Further, in the preferred embodiment, surface layer with a thickness of 0.5um~3um.
Further, in the preferred embodiment, the 0.03~0.1um of surface roughness Ra on surface layer, friction system
Number is 0.05~0.2, and microhardness is Hv2000~7000.
A kind of preparation method of aluminium electrolutic capacitor sealing needle, comprising:
Prime coat, First Transition layer, the second transition zone, third transition zone and table are successively coated on sealing needle ontology
Layer.
The embodiment of the present invention at least have following advantages or the utility model has the advantages that
The embodiment provides a kind of aluminium electrolutic capacitors to seal needle, and it includes envelope which, which seals needle,
Lancet ontology.And the outer application of the sealing needle ontology is equipped with diamond-like carbon composite film.The diamond-like carbon composite film is tool
There is the self-lubricating coat in use of high rigidity, high-bond, low-friction coefficient, high-wearing feature, resistance to bond, imparting sealing needle set has well
Wearability, resistance to bond, self-lubrication, to effectively prevent sealing needle from occurring viscous aluminium phenomenon in use, and effective
Matrix is protected, product caused by wearing in process because of matrix is avoided burr phenomena occur;In use process without special
Fueller to sealing needle be lubricated, to avoid lubricant pollution product, without product is cleaned again, greatly mention
It has risen production efficiency and has saved production cost, be with a wide range of applications.
Detailed description of the invention
In order to illustrate the technical solution of the embodiments of the present invention more clearly, below will be to needed in the embodiment attached
Figure is briefly described, it should be understood that the following drawings illustrates only certain embodiments of the present invention, therefore is not construed as pair
The restriction of range for those of ordinary skill in the art without creative efforts, can also be according to this
A little attached drawings obtain other relevant attached drawings.
Fig. 1 is the structural schematic diagram that the aluminium electrolutic capacitor that the embodiment of the present invention provides seals needle;
Fig. 2 is the partial profile structure that the aluminium electrolutic capacitor that the embodiment of the present invention provides seals needle.
Icon: 100- sealing capacitor needle;101- seals needle ontology;103- first connecting portion;105- second connecting portion;
107- third interconnecting piece;109- diamond-like carbon composite film;111- prime coat;113- First Transition layer;The second transition zone of 115-;
117- third transition zone;The surface layer 119-;The angle 121-R.
Specific embodiment
In order to make the object, technical scheme and advantages of the embodiment of the invention clearer, below in conjunction with the embodiment of the present invention
In attached drawing, technical scheme in the embodiment of the invention is clearly and completely described, it is clear that described embodiment is
A part of the embodiment of the present invention, instead of all the embodiments.The present invention being usually described and illustrated herein in the accompanying drawings is implemented
The component of example can be arranged and be designed with a variety of different configurations.Therefore, below to the reality of the invention provided in the accompanying drawings
The detailed description for applying example is not intended to limit the range of claimed invention, but is merely representative of selected implementation of the invention
Example.Based on the embodiments of the present invention, obtained by those of ordinary skill in the art without making creative efforts
Every other embodiment, shall fall within the protection scope of the present invention.
It should also be noted that similar label and letter indicate similar terms in following attached drawing, therefore, once a certain Xiang Yi
It is defined in a attached drawing, does not then need that it is further defined and explained in subsequent attached drawing.
In the description of the embodiment of the present invention, it should be noted that term " center ", "upper", "lower", "left", "right",
The orientation or positional relationship of the instructions such as "vertical", "horizontal", "inner", "outside" is to be based on the orientation or positional relationship shown in the drawings,
Either the invention product using when the orientation or positional relationship usually put, be merely for convenience of the description present invention and simplification retouched
It states, rather than the device or element of indication or suggestion meaning must have a particular orientation, be constructed and operated in a specific orientation,
Therefore it is not considered as limiting the invention.In addition, term " first ", " second ", " third " etc. are only used for distinguishing description, and
It cannot be understood as indicating or implying relative importance.
In the description of the embodiment of the present invention, it is also necessary to which explanation is unless specifically defined or limited otherwise, term
" setting ", " installation ", " connected ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, be also possible to detachably connect
It connects, or is integrally connected;It can be mechanical connection, be also possible to be electrically connected;It can be directly connected, intermediate matchmaker can also be passed through
Jie is indirectly connected, and can be the connection inside two elements.It for the ordinary skill in the art, can be with concrete condition
Understand the concrete meaning of above-mentioned term in the present invention.
In the present invention unless specifically defined or limited otherwise, fisrt feature can be on or below second feature
Directly contacted including the first and second features, also may include the first and second features be not direct contact but by them it
Between other characterisation contact.Moreover, fisrt feature is on second feature, top and above include fisrt feature second spy
Right above sign and oblique upper, or first feature horizontal height is merely representative of higher than second feature.Fisrt feature second feature it
Under, lower section and fisrt feature included below be directly below and diagonally below the second feature, or be merely representative of first feature horizontal height
Less than second feature.
Embodiment 1
Fig. 1 is the structural schematic diagram that aluminium electrolutic capacitor provided in this embodiment seals needle 100;
Fig. 2 is the part section structural representation that aluminium electrolutic capacitor provided in this embodiment seals needle 100.Please refer to Fig. 1
With Fig. 2, a kind of aluminium electrolutic capacitor sealing needle 100 is present embodiments provided, comprising: sealing needle ontology 101.
In detail, referring to Fig. 1 and Fig. 2, in the present embodiment, the outer application of sealing needle ontology 101 is provided with
Diamond-like carbon composite film 109.The diamond-like carbon composite film 109 is with high rigidity, high-bond, low-friction coefficient, height
The self-lubricating coat in use of wearability, resistance to bond, imparting sealing needle set has good wearability, resistance to bond, self-lubrication, to have
Effect prevents sealing needle from occurring viscous aluminium phenomenon in use, and effective protection matrix, avoids in process because of base
Body abrasion causes product burr phenomena occur;Sealing needle is lubricated without special fueller in use process, thus
Lubricant pollution product is avoided, without product is cleaned again, production efficiency is greatly improved and saves production cost, tool
Have wide practical use.
It should be noted that referring to Fig. 1, in the present embodiment, sealing needle ontology 101 has set gradually first to connect
Socket part 103, second connecting portion 105 and third interconnecting piece 107, first connecting portion 103 are substantially in cylindrical shape, second connecting portion
105 is in the form of annular discs relative to 103 outwardly convex of first connecting portion, and third interconnecting piece 107 is set to second connecting portion 105 and Xiang Yuan
Direction from second connecting portion 105 is extended, and the end of third interconnecting piece 107 is the angle R 121, eka-gold provided in this embodiment
Hard rock composite film 109 can at least be coated and is set at this, generation the phenomenon that avoid viscous aluminium.
Wherein, in the present embodiment, the material for sealing needle ontology 101 is selected from wolfram steel, high-speed steel, mould steel, hard alloy
With ceramics one of which.These materials are selected to can guarantee the performances such as the hardness of sealing needle ontology 101 itself.Meanwhile diamond-like
The number of plies of composite film 109 can be 2 layers or more, and specific coated thickness can be selected according to demand, of the invention
Embodiment is without limitation.
Referring to Fig. 2, in the present embodiment, diamond-like carbon composite film 109 includes setting gradually outward from interior
Prime coat 111, First Transition layer 113, the second transition zone 115, third transition zone 117 and surface layer 119, wherein prime coat 111
For layer of nitride film, First Transition layer 113 is metallic diaphragm, and the second transition zone 115 is that metal layer and replacing for carbide are compound
Film layer, third transition zone 117 are the diamond-like carbon film layer with dopant, and surface layer 119 is diamond-like carbon film layer.By successively setting
Prime coat 111, First Transition layer 113, the second transition zone 115, third transition zone 117 and the surface layer 119 set can effectively mention
High whole hardness, binding force, wearability, resistance to bond and self-lubricating property, thus the phenomenon that being effectively prevented from viscous aluminium appearance.
In detail, in the present embodiment, the layer of nitride film of prime coat 111 be by Cr, Ti, Zr, V, Al extremely
A kind of few nitride of element is constituted.The metal of the metallic diaphragm of First Transition layer 113 and the second transition zone 115 be selected from Cr,
Any element in Ti, Zr, V, Al;Carbide lamella is selected from any one of WC, TiC, CrC, ZrC in second transition zone 115;
Dopant in the diamond-like carbon film layer with dopant of third transition zone 117 is selected from least one of W, Cr, Ti member
Element doping is constituted.The diamond-like carbon film layer on surface layer 119 be selected from amorphous carbon-film, tetrahedral amorphous carbon film, metal-doped amorphous carbon-film,
Hydrogeneous amorphous carbon-film, tetrahedroid are containing any one of hydrogen amorphous, metal-doped hydrogeneous amorphous carbon-film.Pass through the material of each film layer
The selection of material obtains high rigidity, intensity and wear-resisting composite film after may make each film layer rationally to cooperate.
As a preferred option, in the present embodiment, the layer of nitride film of prime coat 111 with a thickness of 0.5um~
1.5um.First Transition layer 113 with a thickness of 0.1um~0.5um;Second transition zone 115 with a thickness of 0.2um~1um;Third
Transition zone 117 with a thickness of 0.5um~1.5um.Surface layer 119 with a thickness of 0.5um~3um.Certainly, in other realities of the invention
It applies in example, the thickness of each film layer can also be selected according to demand, and the embodiment of the present invention is without limitation.
Further, in the present embodiment, the 0.03~0.1um of surface roughness Ra on surface layer 119, coefficient of friction are
0.05~0.2, microhardness is Hv2000~7000.By roughness, friction system and the microhardness to surface layer 119 into
Row control, can be obtained 119 coating of surface layer of high rigidity and high-wearing feature, thus while protecting bottom film layer, in conjunction with bottom
Film layer improves hardness, wearability and the self-lubricity of entire sealing needle ontology 101 jointly.
The embodiments of the present invention also provide a kind of preparation method of aluminium electrolutic capacitor sealing needle 100, the preparation methods
Including successively coating prime coat 111, First Transition layer 113, the second transition zone 115, third transition zone on sealing needle ontology 101
117 and surface layer 119.
In detail comprising following steps:
(1) implement pretreatment in the outer surface using plasma lithographic technique of sealing needle ontology 101;
(2) the nitride coating prime coat 111 on the outer surface of sealing needle ontology 101;
(3) metallic diaphragm of First Transition layer 113 is coated in the layer of nitride film of prime coat 111;
(4) metallic diaphragm and carbide film layer that the second transition zone 115 is coated on the metal layer of First Transition layer 113 are handed over
For composite film.
(5) the doped diamond-like film layer of third transition zone 117 is coated on the metallic diaphragm of the second transition zone 115.
(6) 119 diamond-like of surface layer (DLC) film layer is coated on the doped diamond-like film layer of third transition zone 117.
Wherein, plasma etching technology is selected from impressed current anode plasma etching, ion source etching, arc ions etching
One of.Prime coat 111, First Transition layer 113, the second transition zone 115, third transition zone 117 using selected from magnetron sputtering,
The preparation of one of arc ion plating, plasma enhanced chemical vapor deposition, technology of ion source technology, preferably magnetron sputtering.
Surface layer 119DLC film layer, which uses, is selected from magnetron sputtering, arc ion plating, plasma enhanced chemical vapor deposition, technology of ion source
One of technology preparation, preferably plasma enhanced chemical vapor deposition or technology of ion source.Certainly, in of the invention other
In embodiment, the coating method of each coating can also be selected according to demand, and the embodiment of the present invention is without limitation.
The film layer that the present embodiment specifically uses is described in detail below:
Wolfram steel material preparation sealing needle is selected, using CrN film layer as prime coat 111, the gold that Cr film layer is First Transition layer 113
Belong to layer, Cr film layer and WC film layer be the alternating layer of the second transition zone 115, mix tungsten diamond-like carbon film layer be third transition zone 117,
DLC film layer is surface layer 119, prepares DLC film layer with multi-layer structure.
(1) wolfram steel material is selected to process by aluminium electrolutic capacitor sealing 100 schematic diagram of needle of Fig. 1, radius is at the angle R 121
Outer surface at sealing needle section and the angle R 121 is polished to roughness Ra less than 0.1um by 2mm.
(2) sealing needle matrix is successively cleaned by ultrasonic to surface using degreaser, wax removing agent, metal cleaner without spot.
(3) the sealing needle matrix cleaned up is implemented using multifunctional vacuum filming equipment plasma etching technology pre-
It handles, wherein plasma etching parameter are as follows: 150~300V of bias, impressed current anode 60~100A of electric current, argon flow 50ml/
min。
(4) multifunctional vacuum filming equipment magnetron sputtering technique is used to pretreated sealing needle matrix, deposited first
Prime coat 111CrN film layer, sedimentation time 60min, wherein magnetron sputtering parameter are as follows: nitrogen flow 60ml/min, argon flow
120ml/min, Cr target power output are 5kw.
(5) 113 Cr thin film layer of First Transition layer, deposition are deposited using magnetron sputtering technique on the basis of (4) step
Time 10min, wherein magnetron sputtering parameter are as follows: Cr target power output is 5kw, argon flow 120ml/min.
(6) using magnetron sputtering technique deposition 115 Cr thin film layer of the second transition zone and WC film on the basis of (5) step
Layer alternately composite film, sedimentation time 15min, wherein magnetron sputtering parameter are as follows: Cr target power output is 0.5~5kw, WC target power output
For 0.5~5kw, argon flow 120ml/min.
(7) tungsten diamond-like DLC is mixed using magnetron sputtering technique deposition third transition zone 117 on the basis of (6) step
Film layer, sedimentation time 40min, wherein magnetron sputtering parameter are as follows: WC target power output is 5kw, acetylene gas flow 50ml/min, argon
Throughput 120ml/min.
(8) using plasma enhancing chemical vapour deposition technique deposits surface layer 119DLC film layer on the basis of (7),
Sedimentation time is 120min, wherein plasma enhanced chemical vapor deposition parameter are as follows: 750~1000V of bias, acetylene flow
180~220ml/min.
(9) it can be obtained the aluminium electrolutic capacitor with multilayered structure film layer when in-furnace temperature is lower than 150 DEG C and seal needle
100。
Through detecting, using above-mentioned aluminium electrolutic capacitor sealing needle 100 without special on aluminium electrolutic capacitor closing device
Fueller lubrication sealing needle, the product processed is without oily pollution, product surface impulse- free robustness, seals needle service life up to 6
Month or more.
Embodiment 2
A kind of aluminium electrolutic capacitor sealing needle 100 is present embodiments provided, the difference from embodiment 1 is that:
The present embodiment selects mould steel material preparation sealing needle, is the first mistake by prime coat 111, Cr film layer of CrN film layer
Cross that the metal layer of layer 113, Cr film layer and WC film layer are the alternating layer of the second transition zone 115, to mix tungsten diamond-like carbon film layer be third
Transition zone 117, DLC film layer are that surface layer 119 prepares DLC film layer with multi-layer structure.
(1) mould steel material is selected to process by aluminium electrolutic capacitor sealing 100 schematic diagram of needle of Fig. 1, radius at the angle R 121
For 2mm, outer surface at sealing needle section and the angle R 121 is polished to roughness Ra less than 0.1um.
(2) sealing needle matrix is successively cleaned by ultrasonic to surface using degreaser, wax removing agent, metal cleaner without spot.
(3) the sealing needle matrix cleaned up is implemented using multifunctional vacuum filming equipment plasma etching technology pre-
It handles, wherein plasma etching parameter are as follows: 150~250V of bias, impressed current anode 70~90A of electric current, argon flow 50ml/
min。
(4) multifunctional vacuum filming equipment magnetron sputtering technique is used to pretreated sealing needle matrix, deposited first
Prime coat 111CrN film layer, sedimentation time 60min, wherein magnetron sputtering parameter are as follows: nitrogen flow 60ml/min, Cr target power output is
5kw, argon flow 120ml/min.
(5) 113 Cr thin film layer of First Transition layer, deposition are deposited using magnetron sputtering technique on the basis of (4) step
Time 10min, wherein magnetron sputtering parameter are as follows: Cr target power output is 5kw, argon flow 120ml/min.
(6) using magnetron sputtering technique deposition 115 Cr thin film layer of the second transition zone and WC film on the basis of (5) step
Layer alternately composite film, sedimentation time 15min, wherein magnetron sputtering parameter are as follows: Cr target power output is 0.5~5kw, WC target power output
For 0.5~5kw, argon flow 120ml/min.
(7) tungsten diamond-like DLC is mixed using magnetron sputtering technique deposition third transition zone 117 on the basis of (6) step
Film layer, sedimentation time 40min, wherein magnetron sputtering parameter are as follows: WC target power output is 5kw, acetylene gas flow 50ml/min, argon
Throughput 120ml/min.
(8) using plasma enhancing chemical vapour deposition technique deposits surface layer 119DLC film layer on the basis of (7),
Sedimentation time is 120min, wherein plasma enhanced chemical vapor deposition parameter are as follows: 700~900V of bias, acetylene flow 190
~210ml/min.
(9) it can be obtained the aluminium electrolutic capacitor with multilayered structure film layer when in-furnace temperature is lower than 150 DEG C and seal needle
100。
Through detecting, using above-mentioned aluminium electrolutic capacitor sealing needle 100 without special on aluminium electrolutic capacitor closing device
Fueller lubrication sealing needle, the product processed is without oily pollution, product surface impulse- free robustness, seals needle service life up to 3
Month or more.
Embodiment 3
A kind of aluminium electrolutic capacitor sealing needle 100 is present embodiments provided, the difference from embodiment 1 is that:
The present embodiment selects wolfram steel material preparation sealing needle, is prime coat 111, Ti film layer as First Transition using TiN film layer
The metal layer of layer 113, Ti film layer and WC film layer are the alternating layer of the second transition zone 115, to mix tungsten diamond-like carbon film layer be third mistake
Cross layer 117, DLC film layer is that surface layer 119 prepares DLC film layer with multi-layer structure.
(1) wolfram steel material is selected to process by aluminium electrolutic capacitor sealing 100 schematic diagram of needle of Fig. 1, radius is at the angle R 121
Outer surface at sealing needle section and the angle R 121 is polished to roughness Ra less than 0.1um by 2mm.
(2) sealing needle matrix is successively cleaned by ultrasonic to surface using degreaser, wax removing agent, metal cleaner without spot.
(3) the sealing needle matrix cleaned up is implemented using multifunctional vacuum filming equipment plasma etching technology pre-
It handles, wherein plasma etching parameter are as follows: 200~220V of bias, impressed current anode 65~80A of electric current, argon flow 60ml/
min。
(4) multifunctional vacuum filming equipment magnetron sputtering technique is used to pretreated sealing needle matrix, deposited first
Prime coat 111TiN film layer, sedimentation time 60min, wherein magnetron sputtering parameter are as follows: nitrogen flow 50ml/min, Ti target power output is
4kw, argon flow 120ml/min.
(5) 113 metal Ti film layer of First Transition layer, deposition are deposited using magnetron sputtering technique on the basis of (4) step
Time 10min, wherein magnetron sputtering parameter are as follows: Ti target power output is 4kw, argon flow 120ml/min.
(6) using magnetron sputtering technique deposition 115 metal Ti film layer of the second transition zone and WC film on the basis of (5) step
Layer alternately composite film, sedimentation time 15min, wherein magnetron sputtering parameter are as follows: Ti target power output is 0.5~4kw, WC target power output
For 0.5~4kw, argon flow 120ml/min.
(7) tungsten diamond-like DLC is mixed using magnetron sputtering technique deposition third transition zone 117 on the basis of (6) step
Film layer, sedimentation time 40min, wherein magnetron sputtering parameter are as follows: WC target power output is 4kw, acetylene gas flow 60ml/min, argon
Throughput 120ml/min.
(8) using plasma enhancing chemical vapour deposition technique deposits surface layer 119DLC film layer on the basis of (7),
Sedimentation time is 120min, wherein plasma enhanced chemical vapor deposition parameter are as follows: 730~900V of bias, acetylene flow 190
~220ml/min.
(9) it can be obtained the aluminium electrolutic capacitor with multilayered structure film layer when in-furnace temperature is lower than 150 DEG C and seal needle
100。
Through detecting, using above-mentioned aluminium electrolutic capacitor sealing needle 100 without special on aluminium electrolutic capacitor closing device
Fueller lubrication sealing needle, the product processed is without oily pollution, product surface impulse- free robustness, seals needle service life up to 5
Month or more.
In conclusion the aluminium electrolutic capacitor sealing needle 100 that the embodiment of the present invention provides includes sealing needle ontology 101.
And the outer application of the sealing needle ontology 101 is provided with diamond-like carbon composite film 109.The diamond-like carbon composite film 109 is
With high rigidity, high-bond, low-friction coefficient, high-wearing feature, resistance to bond self-lubricating coat in use, impart sealing needle set have it is good
Wearability well, resistance to bond, self-lubrication to effectively prevent sealing needle from occurring viscous aluminium phenomenon in use, and have
Effect protects matrix, and product caused by wearing in process because of matrix is avoided burr phenomena occur;In use process without special
The fueller of door is lubricated sealing needle, to avoid lubricant pollution product, without product is cleaned again, greatly
It improves production efficiency and saves production cost, be with a wide range of applications.
The foregoing is only a preferred embodiment of the present invention, is not intended to restrict the invention, for the skill of this field
For art personnel, the invention may be variously modified and varied.All within the spirits and principles of the present invention, made any to repair
Change, equivalent replacement, improvement etc., should all be included in the protection scope of the present invention.
Claims (10)
1. a kind of aluminium electrolutic capacitor seals needle characterized by comprising
Needle ontology is sealed, the outer application of the sealing needle ontology is provided with diamond-like carbon composite film.
2. aluminium electrolutic capacitor according to claim 1 seals needle, it is characterised in that:
The diamond-like carbon composite film includes from the interior prime coat set gradually outward, First Transition layer, the second transition zone,
Three transition zones and surface layer, wherein the prime coat be layer of nitride film, the First Transition layer be metallic diaphragm, described second
Transition zone is the composite film that replaces of metal layer and carbide, and the third transition zone is the diamond-film-like with dopant
Layer, the surface layer are diamond-like carbon film layer.
3. aluminium electrolutic capacitor according to claim 2 seals needle, it is characterised in that:
The layer of nitride film of the prime coat is made of the nitride selected from least one of Cr, Ti, Zr, V, Al element.
4. aluminium electrolutic capacitor according to claim 3 seals needle, it is characterised in that:
The layer of nitride film of the prime coat with a thickness of 0.5um~1.5um.
5. aluminium electrolutic capacitor according to claim 2 seals needle, it is characterised in that:
The metal of the metallic diaphragm of the First Transition layer and second transition zone is any in Cr, Ti, Zr, V, Al
Kind element;Carbide lamella is selected from any one of WC, TiC, CrC, ZrC in second transition zone;The third transition zone
Dopant in diamond-like carbon film layer with dopant is constituted selected from least one of W, Cr, Ti element doping.
6. aluminium electrolutic capacitor according to claim 5 seals needle, it is characterised in that:
The First Transition layer with a thickness of 0.1um~0.5um;Second transition zone with a thickness of 0.2um~1um;It is described
Third transition zone with a thickness of 0.5um~1.5um.
7. aluminium electrolutic capacitor according to claim 2 seals needle, it is characterised in that:
The diamond-like carbon film layer on the surface layer is selected from amorphous carbon-film, tetrahedral amorphous carbon film, metal-doped amorphous carbon-film, hydrogeneous non-
Brilliant carbon film, tetrahedroid are containing any one of hydrogen amorphous, metal-doped hydrogeneous amorphous carbon-film.
8. aluminium electrolutic capacitor according to claim 7 seals needle, it is characterised in that:
The surface layer with a thickness of 0.5um~3um.
9. aluminium electrolutic capacitor according to claim 2 seals needle, it is characterised in that:
0.03~the 0.1um of surface roughness Ra on the surface layer, coefficient of friction be 0.05~0.2, microhardness be Hv2000~
7000。
10. the preparation method of the sealing needle of aluminium electrolutic capacitor described in a kind of any one of claim 2 to 9, which is characterized in that
Include:
The prime coat, the First Transition layer, second transition zone, described are successively coated on the sealing needle ontology
Three transition zones and the surface layer.
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CN111910151A (en) * | 2020-08-14 | 2020-11-10 | 广东省新材料研究所 | Bullet body, preparation method thereof and medical instrument |
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