CN110044929B - Curved surface glass subsurface defect detection device based on dark field illumination - Google Patents
Curved surface glass subsurface defect detection device based on dark field illumination Download PDFInfo
- Publication number
- CN110044929B CN110044929B CN201910329425.XA CN201910329425A CN110044929B CN 110044929 B CN110044929 B CN 110044929B CN 201910329425 A CN201910329425 A CN 201910329425A CN 110044929 B CN110044929 B CN 110044929B
- Authority
- CN
- China
- Prior art keywords
- light
- wave
- incident
- plane
- mirror
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N2021/0106—General arrangement of respective parts
- G01N2021/0112—Apparatus in one mechanical, optical or electronic block
Abstract
The invention discloses a curved glass subsurface defect detection device based on dark field illumination, which comprises an illumination module, an image acquisition module and an image processing module, wherein the illumination module is used for acquiring images; the illumination module comprises a laser light source, a polarization beam splitter, a first plane reflector, a first light interception diaphragm, a second plane reflector, a second light interception diaphragm, a 45-degree semi-transparent semi-reflecting mirror, a beam expander and a third plane reflector; the image acquisition module comprises a microscope objective, a focusing lens and a CCD which are sequentially arranged together with a main optical axis; the image processing module is connected with the image acquisition module; laser is incident to the polarization beam splitter, two beams of polarized light P waves and two beams of polarized light S waves with mutually vertical polarization directions are obtained after passing through the polarization beam splitter, and two paths of dark field illumination are respectively carried out on the to-be-detected piece to obtain scattered light containing the to-be-detected piece defects. The invention utilizes the polarization spectroscope to obtain two paths of illuminating light, wherein one path of illuminating light is used for roughly positioning the defect, and the other path of illuminating light is used for accurately positioning the defect, thereby improving the contrast of the detection device and simplifying the operation.
Description
Technical Field
The invention belongs to the technical field of visual inspection, and particularly relates to a curved glass subsurface defect detection device based on dark field illumination.
Background
With the increasing popularity of electronic products, the performance requirements of people for electronic products are gradually increasing. In recent years, the traditional flat screen cannot meet the requirement of market development, and the curved glass can greatly improve the observation experience due to the fact that the radian of the curved glass is more fit with the human retina, so that the curved glass becomes a hot spot for production and application in recent years. The quality of the curved glass has a great influence on intelligent products, so that the detection of various internal defects caused in the production process of the curved glass is very important.
The detection technology of the internal defects of the components is mainly divided into destructive detection and non-destructive detection at present, the destructive detection technology needs to destroy the components and then observe the components, the components are damaged, and the operation process also depends on the experience of workers. Nondestructive inspection technology has been widely studied because of its non-contact property and the rapid development of computer technology in recent years, which can convert defects into image information and analyze and process them in a computer.
However, the current internal defect detection technology is mostly used for detecting defects of planar elements, and the defect detection of curved elements is less involved. At present, the defect detection of the curved glass mainly depends on the long-term observation and accumulated experience of an observer to carry out manual detection, has low efficiency and more subjective influences, and is not suitable for the development requirement of the current intelligent mass production. Because the edge bending property of the curved glass, the requirement for illumination is higher when the nondestructive technology is adopted to detect the internal defects of the curved glass. Dark field illumination is an illumination mode for imaging by using particle scattering characteristics, and can improve the contrast of a curved glass defect image.
Disclosure of Invention
Aiming at the defects of the prior art, the invention aims to provide a curved surface glass subsurface defect detection device based on dark field illumination, and aims to solve the problem of low efficiency caused by subjective observation depending on manual experience in the prior detection technology.
In order to achieve the aim, the invention provides a curved glass subsurface defect detection device based on dark field illumination, which comprises an illumination module, an image acquisition module and an image processing module;
the illumination module comprises a laser light source, a polarization beam splitter, a first plane reflector, a first light blocking diaphragm, a second plane reflector, a second light blocking diaphragm, a 45-degree semi-transparent semi-reflecting mirror, a beam expander and a third plane reflector which are sequentially arranged along the direction of a light path;
the image acquisition module comprises a microscope objective, a focusing lens and a CCD which are sequentially arranged together with a main optical axis;
the image processing module is connected with the image acquisition module;
laser emitted by a laser source is vertically incident on a polarization beam splitter, the laser passes through the polarization beam splitter and then is divided into P waves and S waves with mutually vertical polarization directions and mutually vertical propagation light paths and propagation directions to a dispersion direction, transmitted light is P waves, reflected light is S waves, the included angle between the two light paths is 90 degrees, the S waves pass through a first plane reflector and a second plane reflector to change the light paths and still vertically propagate with the P waves, the two propagation directions are intersected at the same point of a 45-degree half-transmitting and half-reflecting mirror, the reflected light of the S waves passing through the 45-degree half-transmitting and half-reflecting mirror and the transmitted light path of the P waves passing through the 45-degree half-transmitting and half-reflecting mirror are overlapped, the S waves and the P waves enter a beam expander at the same position and the same direction at different moments, a first light blocking diaphragm blocks the S waves, a second light blocking diaphragm blocks the P waves, the unblocked P waves or S waves enter the beam expander and are, and then, adjusting the angle by a third plane reflector to make incidence along the side surface of the piece to be detected, forming total reflection in the piece to be detected, forming dark field illumination on the internal defect of the piece to be detected to obtain scattered light containing the defect of the piece to be detected, receiving the scattered light by a microscope, focusing the scattered light on a photosensitive surface of the CCD by a focusing lens to obtain an image containing the defect of the piece to be detected, and transmitting the image to a computer for display and processing.
Preferably, during operation, the upper surface of the objective table is a plane, the piece to be measured is horizontally placed on the objective table, the piece to be measured is provided with two longitudinal symmetric surfaces which are perpendicular to each other, and the parallel light incident to the piece to be measured is parallel to one of the longitudinal symmetric surfaces of the piece to be measured.
Preferably, the laser light source is a monochromatic light source.
Preferably, the laser light emitted by the laser light source is vertically incident on the polarization beam splitter and then is split into P-wave and S-wave with mutually perpendicular polarization directions and mutually perpendicular propagation light paths, and the P-wave and the S-wave propagate in the dispersion direction.
Preferably, the included angle between the placing direction of the first plane mirror and the positive direction of the horizontal main optical axis is 135 degrees, and the included angle between the placing direction of the second plane mirror and the positive direction of the horizontal main optical axis is 45 degrees.
Preferably, the S-wave passes through the first plane mirror and the second plane mirror to change the optical path and then propagates to the converging direction of the two light beams together with the P-wave, and the two light beams are incident to the same point of the 45-degree half mirror.
Preferably, the propagation directions of the reflected light of the S-wave passing through the 45 ° half mirror and the transmitted light of the P-wave passing through the 45 ° half mirror coincide with each other, and the reflected light and the P-wave are incident on the beam expander in the same direction and at the same position at different times.
Preferably, the first light blocking diaphragm is arranged between the first plane reflector and the second plane reflector, the second light blocking diaphragm is arranged between the transmitted light emergent surface of the polarization beam splitter and the 45-degree half-transmitting half-reflecting mirror, and the first light blocking diaphragm and the second light blocking diaphragm selectively block S waves or P waves respectively at different moments.
Preferably, the object stage has a central axis in a vertical direction, and can rotate horizontally around the central axis, and rotate 90 ° each time, the object to be measured can rotate along with the horizontal rotation of the object stage, and when the optical path is not changed, the light beams can be incident from four sides of the object to be measured respectively, so as to obtain four images.
Preferably, the focal plane of the focusing lens coincides with the photosensitive surface of the CCD.
Through the technical scheme, compared with the prior art, the invention has the following beneficial effects:
1. the curved glass subsurface defect detection device based on dark field illumination provided by the invention adopts the polarization spectroscope as a device for polarization generation to obtain two beams of polarized light with mutually vertical polarization directions for standby, and then the light path is changed and controlled by using the plane reflector, the 45-degree semi-transparent and semi-reflective mirror and the light blocking diaphragm to obtain two paths of illumination light for dark field illumination of a to-be-detected piece at different moments, wherein one path of illumination light is used for roughly positioning defects, the other path of illumination light is used for accurately positioning defects, and the contrast ratio of the detection device can be improved;
2. the object stage for placing the piece to be detected can rotate in four directions, and different scattering information is obtained by taking four different side surfaces as incident surfaces respectively, so that different defect images are obtained, and complete defect information can be obtained by integrating the four images;
3. the curved glass subsurface defect detection device provided by the invention is used for placing an object stage of a piece to be detected, and the incident angle of incident light relative to the side surface is unchanged by combining the tetragonal symmetry of the curved glass every time, so that total internal reflection dark field illumination can be formed without readjusting a light path, and the operation is greatly simplified.
Drawings
FIG. 1 is a schematic structural diagram of a curved glass subsurface defect detection device based on dark field illumination provided by the invention;
FIG. 2 is a top view of the relative placement of the stage and the object to be measured according to the present invention;
reference numerals:
1. the device comprises a laser light source, a polarizing beam splitter, a first plane reflector, a first light blocking diaphragm, a second plane reflector, a second light blocking diaphragm, a 7 and 45-degree semi-transparent semi-reflecting mirror, a 8 beam expander, a 9 and third plane reflectors, an object stage, an 11 to-be-detected piece, a 12, a microscope objective, a 13, a focusing lens, a 14, a CCD (charge coupled device), a 15 and a computer.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention. In addition, the technical features involved in the embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other.
The invention provides a curved glass subsurface defect detection device based on dark field illumination, which comprises an illumination module, an image acquisition module and an image processing module, wherein the illumination module is used for acquiring images;
the illumination module comprises a laser light source 1, a polarization beam splitter 2, a first plane reflector 3, a first light blocking diaphragm 4, a second plane reflector 5, a second light blocking diaphragm 6, a 45-degree semi-transparent semi-reflective mirror 7, a beam expander 8 and a third plane reflector 9 which are sequentially arranged along the direction of a light path;
the image acquisition module comprises a microscope objective 12, a focusing lens 13 and a CCD 14 which are sequentially arranged together with a main optical axis;
the image processing module is a computer 15 and is connected with the image acquisition module;
the laser source 1 emits a beam of laser, which perpendicularly enters the front light-passing surface of the polarization beam splitter 2, and is divided into two beams of P-wave and S-wave with mutually perpendicular polarization directions and mutually perpendicular propagation directions after passing through the polarization beam splitter 2, the transmission exit of the polarization beam splitter is the P-wave, the vibration direction is parallel to the paper surface, the reflection exit of the polarization beam splitter is the S-wave, and the vibration direction is perpendicular to the paper surface. The propagation directions are mutually perpendicular when the two beams of light are emitted from the polarization spectroscope, the two beams of light are respectively propagated to the dispersion directions of the two beams of light, and the two beams of light can not be incident to the same point of the beam expander at the same direction and the same position at different moments, so after the S wave passes through the first plane reflecting mirror 3 arranged at an included angle of 135 degrees with the positive direction of the horizontal main optical axis and the second plane reflecting mirror 5 arranged at an included angle of 45 degrees with the positive direction of the horizontal main optical axis, the light path direction is still perpendicular to the P wave, but the two beams of light are converged and propagated to the directions, and the two beams of light. The reflected light of the S wave passing through the 45-degree half-transmitting mirror is superposed with the light path of the transmitted light of the P wave passing through the 45-degree half-transmitting mirror. The first light blocking diaphragm 4 is used for blocking S waves, the second light blocking diaphragm 6 is opened at the same time, only P waves are allowed to pass through the semi-transparent semi-reflecting mirror 7 and then enter the beam expanding mirror 8 to be converted into parallel light, the light path direction is changed through the third plane reflecting mirror 9, the light direction entering the piece to be measured 11 is adjusted through the third plane reflecting mirror 9, the incident light is ensured to form total internal reflection dark field illumination on the inner side of the piece to be measured 11, therefore, P wave illumination is formed, defects in the piece to be measured 11 are scattered, scattered light with defect information is received by the microscope objective 12, an image containing the defects of the piece to be measured 11 is obtained by focusing the photosensitive surface of the CCD 14 through the focusing lens 13 and is transmitted to the computer 15 for display, the condition of the image is displayed through the observation computer 15, the angle of the third plane reflecting mirror 9 is finely adjusted until a position with obvious visible defects, this is fixed.
And the second light blocking diaphragm 6 is used for blocking the P wave, and the first light blocking diaphragm 4 is opened at the same time, so that only the S wave passes through the semi-transparent semi-reflecting mirror 7 and then enters the beam expanding mirror 8 to be converted into parallel light, namely, the P wave illumination is converted into S wave illumination. Similarly, the internal defect of the to-be-detected piece 11 scatters the incident light, and then the image is displayed and analyzed by a computer;
the stage 10 is rotated in order to make 4 side surfaces of the workpiece 11 sequentially serve as incident surfaces, and 4 defect images are obtained.
It will be understood by those skilled in the art that the foregoing is only a preferred embodiment of the present invention, and is not intended to limit the invention, and that any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the scope of the present invention.
Claims (10)
1. A curved surface glass subsurface defect detection device based on dark field illumination is characterized by comprising an illumination module, an image acquisition module and an image processing module;
the illumination module comprises a laser light source (1), a polarization beam splitter (2), a first plane reflector (3), a first light blocking diaphragm (4), a second plane reflector (5), a second light blocking diaphragm (6), a 45-degree semi-transparent semi-reflecting mirror (7), a beam expander (8) and a third plane reflector (9);
the image acquisition module comprises a microscope objective (12), a focusing lens (13) and a CCD (14) which are sequentially arranged together with a main optical axis;
the image processing module is connected with the image acquisition module;
laser emitted by the laser source (1) is incident to the polarization beam splitter (2), two beams of polarized light P wave and S wave with mutually vertical polarization directions are obtained after passing through the polarization beam splitter (2), the included angle of the light paths of the two beams is 90 degrees, the S wave changes the light path through the first plane reflector (3) and the second plane reflector (5) and is converged to the 45-degree semi-transparent and semi-reflective mirror (7) together with the P wave, and the S wave is incident to the beam expander (8) at any moment through the reflected light of the 45-degree semi-transparent and semi-reflective mirror (7) and the transmitted light of the P wave through the 45-degree semi-transparent and semi-reflective mirror (7); at different moments, the first light blocking diaphragm (4) blocks the S wave, and the P wave performs primary illumination; the second light blocking diaphragm (6) blocks the P wave, and the S wave performs secondary illumination; the P wave or the S wave is incident to the beam expander (8), the collimated light beam is incident along the side face of the piece to be detected (11) by adjusting the angle through the third plane reflector (9), total reflection is formed inside the piece to be detected (11), dark field illumination is formed on the internal defect of the piece to be detected (11), scattered light containing the defect of the piece to be detected (11) is obtained, the microscope (12) receives the scattered light, the scattered light is focused to the photosensitive surface of the CCD (14) through the focusing lens (13), an image containing the defect of the piece to be detected (11) is obtained, and the image is transmitted to the image processing module to be displayed and processed.
2. The device according to claim 1, wherein, in operation, the object (11) is horizontally placed on the stage (10), the upper surface of the stage (10) is a plane, the object (11) has two longitudinal symmetry planes, and the two longitudinal symmetry planes are perpendicular to each other, and the parallel light incident on the object (11) is parallel to one of the longitudinal symmetry planes of the object (11).
3. The device according to claim 1, characterized in that the laser light source (1) is a monochromatic light source.
4. The device according to claim 1, characterized in that the light beam emitted by the laser source (1) is perpendicularly incident to the polarizing beam splitter (2), and after passing through the polarizing beam splitter, the light beam is split into P-wave and S-wave with mutually perpendicular polarization directions and mutually perpendicular propagation paths.
5. The device according to claim 1, characterized in that the first plane mirror (3) is placed at an angle of 135 ° to the positive direction of the horizontal main optical axis, the second plane mirror (5) is placed at an angle of 45 ° to the positive direction of the horizontal main optical axis, and the third plane mirror (9) is adjustable in direction.
6. The device according to claim 1, characterized in that the 45 ° half mirror (7) is centered at the intersection point of the S-wave and the P-wave, which changes the optical path through the first plane mirror (3) and the second plane mirror (5), and the 45 ° half mirror (7) is placed at an angle of 45 ° with the positive direction of the horizontal main optical axis.
7. The device according to claim 1 or 4, wherein the position of the S wave incident on the 45 ° half mirror (7) after changing the optical path is the same as the position of the P wave incident on the 45 ° half mirror (7), the reflected light of the S wave passing through the 45 ° half mirror (7) coincides with the optical path of the P wave passing through the 45 ° half mirror (7) after the transmitted light, and the reflected light is incident on the beam expander (8) in the same direction, at the same position and at different time, and the subsequent optical path passing through the beam expander (8) coincides with each other.
8. The device according to claim 1 or 4, characterized in that said first stop (4) is placed between said first (3) and second (5) planar mirrors, said second stop (6) is placed between the transmitted light exit face of said polarizing beam splitter (2) and the 45 ° half mirror (7), said first stop (4) and second stop (6) selectively blocking said S-wave or P-wave, respectively, at different times.
9. The apparatus according to claim 2, characterized in that the object table (10) has a central axis in a vertical direction, the object table (10) being horizontally rotatable around the central axis, each rotation being 90 °, the object (11) being rotated as the object table is horizontally rotated.
10. The device according to claim 1, characterized in that the focal plane of the focusing lens (13) coincides with the light-sensitive surface of the CCD (14).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910329425.XA CN110044929B (en) | 2019-04-23 | 2019-04-23 | Curved surface glass subsurface defect detection device based on dark field illumination |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910329425.XA CN110044929B (en) | 2019-04-23 | 2019-04-23 | Curved surface glass subsurface defect detection device based on dark field illumination |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110044929A CN110044929A (en) | 2019-07-23 |
| CN110044929B true CN110044929B (en) | 2020-05-19 |
Family
ID=67278810
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910329425.XA Active CN110044929B (en) | 2019-04-23 | 2019-04-23 | Curved surface glass subsurface defect detection device based on dark field illumination |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110044929B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110426397B (en) * | 2019-08-14 | 2022-03-25 | 深圳市麓邦技术有限公司 | Optical detection system, device and method |
| CN113640318B (en) * | 2021-10-19 | 2022-08-23 | 四川京龙光电科技有限公司 | Four mirror surface intellectual detection system equipment of monocular |
Citations (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1743793A (en) * | 2005-09-28 | 2006-03-08 | 中国科学院上海光学精密机械研究所 | Holographic phase difference amplifying restructuring device based on sagnac interferometer |
| JP2007085958A (en) * | 2005-09-26 | 2007-04-05 | Hitachi High-Technologies Corp | Method and apparatus for inspecting wafer flaw |
| JP2007225432A (en) * | 2006-02-23 | 2007-09-06 | Hitachi High-Technologies Corp | Inspection method and inspection device |
| JP2008051666A (en) * | 2006-08-25 | 2008-03-06 | Hitachi High-Technologies Corp | Flaw inspection device |
| CN201110835Y (en) * | 2007-09-11 | 2008-09-03 | 中国科学院上海光学精密机械研究所 | Laser scattering detection device of large caliber neodymium glass surface blemishes |
| CN101706426A (en) * | 2009-11-20 | 2010-05-12 | 江苏华创光电科技有限公司 | Refractive index measuring instrument for transparent material with Brewster angle |
| CN101832945A (en) * | 2010-04-29 | 2010-09-15 | 中国科学院上海技术物理研究所 | Online detection method and device for defects of coated glass film |
| JP5007979B2 (en) * | 2008-05-22 | 2012-08-22 | 独立行政法人産業技術総合研究所 | Defect inspection method and defect inspection apparatus |
| CN104678611A (en) * | 2013-12-03 | 2015-06-03 | 三星显示有限公司 | Inspection Apparatus Having Liquid Crystal Modulator And Manufacturing Mehod Of Liquid Crystal Modulator |
| CN104792798A (en) * | 2014-01-20 | 2015-07-22 | 南京理工大学 | Total internal reflection illumination technology-based subsurface damage measuring apparatus and method thereof |
| CN105092585A (en) * | 2014-05-05 | 2015-11-25 | 南京理工大学 | Subsurface measuring device and method based on total internal reflection and optical coherence tomography |
| CN106290372A (en) * | 2015-05-14 | 2017-01-04 | 南京理工大学 | Method based on scatter light polarization change-detection extreme ultraviolet mask phase type defect |
| CN106442538A (en) * | 2016-08-22 | 2017-02-22 | 中国电子科技集团公司第四十研究所 | Optical element damage detecting device and method based on polarization imaging |
| CN106501279A (en) * | 2016-12-02 | 2017-03-15 | 中国兵器科学研究院宁波分院 | A kind of low sub-surface damage detection method of firmly crisp optical material |
| CN109470710A (en) * | 2018-12-07 | 2019-03-15 | 哈尔滨工业大学 | The confocal sub-surface detection device of dark field and method based on coaxial biconical lens |
| CN109470711A (en) * | 2018-12-07 | 2019-03-15 | 哈尔滨工业大学 | A kind of confocal sub-surface non-destructive testing device of shading type dark field and method |
-
2019
- 2019-04-23 CN CN201910329425.XA patent/CN110044929B/en active Active
Patent Citations (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007085958A (en) * | 2005-09-26 | 2007-04-05 | Hitachi High-Technologies Corp | Method and apparatus for inspecting wafer flaw |
| CN1743793A (en) * | 2005-09-28 | 2006-03-08 | 中国科学院上海光学精密机械研究所 | Holographic phase difference amplifying restructuring device based on sagnac interferometer |
| JP2007225432A (en) * | 2006-02-23 | 2007-09-06 | Hitachi High-Technologies Corp | Inspection method and inspection device |
| JP2008051666A (en) * | 2006-08-25 | 2008-03-06 | Hitachi High-Technologies Corp | Flaw inspection device |
| CN201110835Y (en) * | 2007-09-11 | 2008-09-03 | 中国科学院上海光学精密机械研究所 | Laser scattering detection device of large caliber neodymium glass surface blemishes |
| JP5007979B2 (en) * | 2008-05-22 | 2012-08-22 | 独立行政法人産業技術総合研究所 | Defect inspection method and defect inspection apparatus |
| CN101706426A (en) * | 2009-11-20 | 2010-05-12 | 江苏华创光电科技有限公司 | Refractive index measuring instrument for transparent material with Brewster angle |
| CN101832945A (en) * | 2010-04-29 | 2010-09-15 | 中国科学院上海技术物理研究所 | Online detection method and device for defects of coated glass film |
| CN104678611A (en) * | 2013-12-03 | 2015-06-03 | 三星显示有限公司 | Inspection Apparatus Having Liquid Crystal Modulator And Manufacturing Mehod Of Liquid Crystal Modulator |
| CN104792798A (en) * | 2014-01-20 | 2015-07-22 | 南京理工大学 | Total internal reflection illumination technology-based subsurface damage measuring apparatus and method thereof |
| CN105092585A (en) * | 2014-05-05 | 2015-11-25 | 南京理工大学 | Subsurface measuring device and method based on total internal reflection and optical coherence tomography |
| CN106290372A (en) * | 2015-05-14 | 2017-01-04 | 南京理工大学 | Method based on scatter light polarization change-detection extreme ultraviolet mask phase type defect |
| CN106442538A (en) * | 2016-08-22 | 2017-02-22 | 中国电子科技集团公司第四十研究所 | Optical element damage detecting device and method based on polarization imaging |
| CN106501279A (en) * | 2016-12-02 | 2017-03-15 | 中国兵器科学研究院宁波分院 | A kind of low sub-surface damage detection method of firmly crisp optical material |
| CN109470710A (en) * | 2018-12-07 | 2019-03-15 | 哈尔滨工业大学 | The confocal sub-surface detection device of dark field and method based on coaxial biconical lens |
| CN109470711A (en) * | 2018-12-07 | 2019-03-15 | 哈尔滨工业大学 | A kind of confocal sub-surface non-destructive testing device of shading type dark field and method |
Non-Patent Citations (3)
| Title |
|---|
| Total internal reflection microscopy: inspection of surfaces of high bulk scatter materials;S. N. Jabr;《APPLIED OPTICS》;19850601;第24卷(第11期);全文 * |
| 光学元件亚表面缺陷的全内反射显微检测;邓燕等;《强激光与粒子束》;20090630;第21卷(第6期);全文 * |
| 全内反射技术检测大口径光学元件体内缺陷;杨菲菲等;《中国激光》;20170630;第44卷(第6期);全文 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN110044929A (en) | 2019-07-23 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN106198568B (en) | A kind of measuring device and measuring method of the film with transparent substrates | |
| CN106441571B (en) | A kind of light source module and the line scanning multi-optical spectrum imaging system using it | |
| CN106153626B (en) | A kind of surface blemish optical detection apparatus and its detection method | |
| CN110044930A (en) | A kind of bend glass subsurface defects detection method based on dark-ground illumination | |
| CN110044929B (en) | Curved surface glass subsurface defect detection device based on dark field illumination | |
| WO2021143527A1 (en) | Axial differential dark field confocal microscopic measurement device and method | |
| CN205642302U (en) | Optical element thickness measurement device | |
| CN209674115U (en) | Reflective REAL TIME INFRARED THERMAL IMAGE polarizes double separate imaging optical systems | |
| CN204536217U (en) | A kind of surface blemish optical detection apparatus | |
| CN103307969A (en) | White-light interferometric measuring device | |
| CN110044931A (en) | A kind of detection device on bend glass surface and internal flaw | |
| CN206710068U (en) | Large-numerical aperture immersion oil camera lens wave aberration detection means | |
| CN115900598A (en) | Device for measuring included angle between normal line of light passing surface of electro-optical crystal and optical axis of crystal | |
| CN100565142C (en) | Lightbeam measuring device | |
| WO2021227134A1 (en) | Absorptive defect single-beam photothermal measurement device and measurement method | |
| CN208156292U (en) | A kind of optical component body scattering imperfection detection device | |
| CN111208089B (en) | Device and method for measuring defects in long-distance rough end face crystal body | |
| JPS6312249B2 (en) | ||
| CN110044415A (en) | Misplace differential confocal interference element Multi-parameter Measurement Method and device | |
| CN203286992U (en) | Detection device for verticality of laser beam | |
| CN215263090U (en) | Illumination module and detection device | |
| CN205280608U (en) | Optical material defect real time imaging device based on light and heat detection and optics are micro - | |
| CN101430392A (en) | Shearing square glass prism for implementing shearing electronic speckle interference | |
| CN108490598A (en) | A kind of optical component body scattering imperfection detection device and detection method | |
| CN211086081U (en) | Testing arrangement of biax crystal main axis direction optical homogeneity |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |