CN110043558A - A kind of thermally conductive damping spring of high-speed bearing and the damping structure using the spring - Google Patents
A kind of thermally conductive damping spring of high-speed bearing and the damping structure using the spring Download PDFInfo
- Publication number
- CN110043558A CN110043558A CN201910405738.9A CN201910405738A CN110043558A CN 110043558 A CN110043558 A CN 110043558A CN 201910405738 A CN201910405738 A CN 201910405738A CN 110043558 A CN110043558 A CN 110043558A
- Authority
- CN
- China
- Prior art keywords
- interconnecting piece
- thermally conductive
- pedestal
- damping spring
- bearing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000013016 damping Methods 0.000 title claims abstract description 66
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims abstract description 49
- 230000000694 effects Effects 0.000 abstract description 9
- 230000017525 heat dissipation Effects 0.000 abstract description 6
- 230000035939 shock Effects 0.000 abstract description 3
- 238000005096 rolling process Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 3
- 230000002349 favourable effect Effects 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229910000906 Bronze Inorganic materials 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000010974 bronze Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 210000004907 gland Anatomy 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/58—Cooling; Heating; Diminishing heat transfer
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C27/00—Elastic or yielding bearings or bearing supports, for exclusively rotary movement
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C37/00—Cooling of bearings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2360/00—Engines or pumps
- F16C2360/44—Centrifugal pumps
- F16C2360/45—Turbo-molecular pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F2230/00—Purpose; Design features
- F16F2230/36—Holes, slots or the like
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F2238/00—Type of springs or dampers
- F16F2238/02—Springs
Abstract
The invention discloses a kind of thermally conductive damping springs of high-speed bearing, it is characterised in that: including pedestal, interconnecting piece and support portion, the pedestal is formed with recess after connecting with interconnecting piece, and the support portion is also formed with recess after connecting with interconnecting piece；The thermally conductive damping spring damping spring has preferable heat dissipation effect, can quickly be conducted heat, while can also achieve the purpose that bumper and absorbing shock；The present invention also provides a kind of damping structures simultaneously, bearing including pedestal and for being cooperated with main shaft, the thermally conductive damping spring is equipped between pedestal and bearing, the damping structure can play preferable supporting role to main shaft, elastic force can be continuously applied to bearing, enable to main axis bounce to reset in time when being displaced, while heat quickly can shed, to improve the service life of element in molecular pump, and then improve the service life of molecular pump.
Description
Technical field
The present invention relates to a kind of molecular pump technical field of heat dissipation, and in particular to a kind of thermally conductive damping spring of high-speed bearing, together
When further relate to a kind of damping structure using the thermally conductive damping spring.
Background technique
Molecular pump is a kind of ultrahigh vacuum acquisition equipment, mainly gives gas MOMENTUM TRANSMISSION using high-speed rotating rotor
Body molecule is allowed to obtain directed velocity, to be compressed, be driven to a kind of vacuum pump taken away after exhaust outlet for prime, is used for
Obtain the ultrahigh vacuum of 10-4pa or more.
Molecular pump in high-speed rotation process (general 24000rpm-72000rpm), can generate larger vibration to bearing, existing
Have in technology in order to reduce bear vibration bring influence, generally can between bearing and bearing block be equipped with vibration damping cushion rubber or its
It has the nonmetallic materials of vibration-damping function.The presence of vibration damping cushion rubber plays good damping effect, but vibration damping cushion rubber simultaneously
Presence again bearing and bearing block are separated, cause the gap between bearing and bearing block there are 0.1mm-0.3mm；Bearing is turning
A large amount of heat will be generated during dynamic, will largely bearing temperature be made rapidly to increase, the temperature of bearing is every to increase ten degree,
Service life will be reduced to the half in service life before temperature rise, substantially reduce the service life of molecular pump, give industrial continuity
It makes troubles, it is serious to bring the danger such as broken pump, very huge economic loss is caused to user；Meanwhile a large amount of heat cannot
It sheds, is blocked in the pump housing in time, increase the temperature of molecular pump housing internal components, improve the general of internal element failure
Rate.
Application No. is: CN201310443435.9, Publication No.: the patent of invention of CN103470539B discloses a kind of rolling
The vibration damping and radiator of dynamic bearing, the vibration damping and radiator include bearing block, bearing gland, shaft, vibration isolation rubber
Circle, wave spring, rolling bearing.Wave spring is mounted in the gap between rolling bearing side and bearing block.Wave spring
Using beryllium-bronze material, thermal conductivity is larger, can effectively transmit the heat of rolling bearing high speed rotation generation.Wave in the present invention
Spring improves elasticity using Semicircular arched structure, and reduce rolling bearing radially contacts with rigidity, reduces the vibration punching of rolling bearing
It hits.The service life of rolling bearing is extended, and then extends the service life of turbomolecular pump；Foregoing invention is to a certain degree
On can play damping and thermally conductive effect, still, setting wave spring, wave spring use Semicircular arched structure, wave
Unrestrained spring is contacted with bearing for line, in molecule pump work, when main shaft high-speed rotation, and the contact surface between wave spring and bearing
Product is still limited, can not quickly be conducted the heat that bearing generates.
Summary of the invention
It is an object of the invention to overcome to conduct using the heat that wave spring generates bearing in the prior art, wave
Line between unrestrained spring and bearing contacts the disadvantage for causing heat transfer effect bad, provides a kind of thermally conductive damping bullet of high-speed bearing
Spring, the damping spring have preferable heat dissipation effect, can quickly be conducted heat, while can also reach bumper and absorbing shock
Purpose.
In order to solve the above technical problems, the technical scheme adopted by the invention is that:
A kind of thermally conductive damping spring of high-speed bearing, it is characterised in that: including pedestal, interconnecting piece and support portion, the pedestal and company
It is formed with recess after socket part connection, the support portion is also formed with recess after connecting with interconnecting piece.
The interconnecting piece has one, and section is in " N " type after interconnecting piece is connected with pedestal and support portion.
There are two the interconnecting pieces, and after two interconnecting piece connections, both ends are connect with pedestal and support portion respectively, and are connected
It is afterwards in " M " type.
The interconnecting piece has 3 or more, and multiple interconnecting pieces are whole after being connected to be serrated, and both ends respectively with pedestal and branch
Support part is connected.The interconnecting piece and support portion are equipped with notch, and the notch on interconnecting piece connects with the notch on support portion.
The notch has multiple, and is evenly arranged on interconnecting piece and support portion thermally conductive damping spring being divided into flap-type structure.
Between the interconnecting piece and support portion, pass through a curved portion between interconnecting piece and pedestal and between adjacent interconnecting piece
It is connected.
A kind of damping structure, it is characterised in that: the bearing including pedestal and for being cooperated with main shaft, the pedestal with
The thermally conductive damping spring is equipped between bearing.
The pedestal is equipped with groove, and described thermally conductive damping spring one end is located in groove, and is bonded with groove walls, another
End is bonded with bearing surface.
Compared with prior art, the invention has the following advantages:
Bearing can be rotated generated amount of heat and is transmitted on pedestal by thermally conductive damping spring of the present invention, by setting
The support portion set and bearing surface progress are thermally conductive, and support portion, which be bonded with bearing surface, can effectively increase support portion and axis
The contact area for holding surface is more favorable for the conduction of heat；Meanwhile the pedestal connect with interconnecting piece after be formed with recess, institute
It states and is also formed with recess after support portion is connect with interconnecting piece, so that thermally conductive damping spring has preferable volume elasticity, can be right
Bearing plays the role of support, plays damping to bearing, extends the service life of bearing.
Damping structure of the present invention mainly includes the thermally conductive damping spring, and thermally conductive damping spring can quickly will be warm
Amount is transmitted on pedestal, can be effectively reduced the temperature inside molecular pump, can be played protection to the element inside molecular pump
Effect, to extend the service life of molecular pump.
Detailed description of the invention
Fig. 1 is the overall structure diagram of the embodiment of the present invention 4.
Fig. 2 is thermally conductive damping spring global sections figure in the embodiment of the present invention 4.
Fig. 3 is thermally conductive damping spring overall structure diagram in the embodiment of the present invention 4.
Fig. 4 is thermally conductive damping spring global sections figure in the embodiment of the present invention 2.
Fig. 5 is the overall structure diagram of the embodiment of the present invention 3.
Appended drawing reference: 1 pedestal, 2 thermally conductive damping springs, 3 support portions, 4 bearings, 5 interconnecting pieces, 6 pedestals, 7 notches, 8 arcs
Portion, 9 grooves, 10 main shafts, 11 recess, 12 contact points.
Specific embodiment
The present invention will be further described with reference to the examples below, and described embodiment is only present invention a part
Embodiment is not whole embodiment.Based on the embodiments of the present invention, those skilled in the art are not making
Other embodiments used obtained, belong to protection scope of the present invention under the premise of creative work.
Embodiment 1
A kind of damping structure, the bearing 4 including pedestal 1 and for being cooperated with main shaft 10, between the pedestal 1 and bearing 4
Equipped with thermally conductive damping spring 2.
Wherein, the pedestal 1 is equipped with groove 9, and described thermally conductive 2 one end of damping spring is located in groove 9, and with groove 9
Wall fitting, the other end are bonded with 4 surface of bearing.
Wherein, the thermally conductive damping spring 2, including pedestal 6, interconnecting piece 5 and support portion 3, the pedestal 6 and interconnecting piece 5
Recess 11 is formed with after connection, the support portion 3 is also formed with recess 11 after connecting with interconnecting piece 5.
It advanced optimizes, the interconnecting piece 5 has one, and section is in " N " after interconnecting piece 5 is connected with pedestal 6 and support portion 3
Type.
In the present embodiment, the pedestal 6 is formed with recess 11, the support portion 3 and interconnecting piece after connecting with interconnecting piece 5
It is also formed with recess 11 after 5 connections, is in bending structure after enabling to pedestal 6, interconnecting piece 5 and support portion 3 to be connected with each other in this way,
It can guarantee that thermally conductive damping spring 2 has preferable elasticity；Meanwhile support portion 3 can be bonded with bearing 4, and 6 energy of pedestal
Enough to be bonded with pedestal 1, the heat generated on bearing 4 can pass sequentially through support portion 3, interconnecting piece 5, pedestal 6 and be transmitted to base
It sheds on seat 1, preferable heat-conducting effect can be played；It is bonded, can be increased with 4 surface of bearing by support portion 3
Contact area between the two is more favorable for the conduction of heat；Also, thermally conductive damping spring 2 to bearing 4 play support limit and
The effect of damping avoids bearing 4 and pedestal 1 that rigid collision occurs, can effectively extend the service life of bearing 4.
Wherein, limit and support can be played the role of to thermally conductive damping spring 2 by the way that groove 9 is arranged on pedestal 1, when
After thermally conductive damping spring 2 is pressurized, thermally conductive damping spring 2 will deformation occurs interconnecting piece 5 is connected be in groove with support portion 3
9 walls are contacted, in this way, heat can not only be directly delivered on pedestal 1, additionally it is possible to are directly delivered on 9 wall of groove, into one
Step increases the area of heat transfer, and then improves the efficiency of heat dissipation, and the heat generated on bearing 4 is preferably transmitted to
On pedestal 1.
Also, section not only increases thermally conductive resistance in " N " type, in this way setting after interconnecting piece 5 is connected with pedestal 6 and support portion 3
The contact point 12 of Buddhist nun's spring 2 and groove 9, while can also ensure that the elasticity of thermally conductive damping spring 2.
Embodiment 2
The present embodiment is substantially the same manner as Example 1, the difference is that, there are two the interconnecting pieces 5, and two interconnecting pieces 5 connect
After connecing, both ends are connect with pedestal 6 and support portion 3 respectively, and are in " M " type after connecting.
In such manner, it is possible to be further ensured that the elasticity of thermally conductive damping spring 2, while thermally conductive damping spring 2 is had with groove 9
There are multiple heat dissipation contact points 12, is more favorable for radiating.
Embodiment 3
The present embodiment is substantially the same manner as Example 1, the difference is that, the interconnecting piece 5 has 3 or more, multiple interconnecting pieces 5
It is whole after being connected to be serrated, and both ends are connected with pedestal 6 and support portion 3 respectively.
In the present embodiment, the interconnecting piece 5 has 4, and 4 interconnecting pieces 5 are serrated after being connected, and interconnecting piece 5 is connected to
Both ends are connected with pedestal 6 and support portion 3 respectively after entirety.
In this way, can show 11 structures of the recess after connecting adjacent interconnecting piece 5, guarantee thermally conductive damping spring
2 elasticity, and at the same time increasing multiple heat dissipation contact points 12, convenient for shedding for heat.
Embodiment 4
This implementation is to advanced optimize on the basis of embodiment 1, in the present embodiment, is set on the interconnecting piece 5 and support portion 3
Jagged 7, the notch 7 on interconnecting piece 5 connects with the notch 7 on support portion 3.
It advanced optimizes, the notch 7 has multiple, and is evenly arranged on thermally conductive damping spring 2 on interconnecting piece 5 and support portion 3
It is divided into flap-type structure.
Thermally conductive damping spring 2 is divided into flap-type structure by the notch 7 of setting by the present embodiment, and setting so further mentions
The function of its high bumper and absorbing shock, meanwhile, main shaft 10 is in rotation, it will generates center displacement, and passes through the flap-type structure of setting
Support preferably can be played the role of to bearing 4, can uniformly apply pressure to bearing 4, main shaft 10 is smoothly made to exist
It is restored to center in time when generating center displacement, can effectively reduce the bounce of main shaft 10 and bearing 4；Meanwhile passing through
The flap-type structure of setting can not only improve the heat-conducting area of itself and bearing 4, while reduce connecing between bearing 4 and pedestal 1
Rigidity is touched, main shaft 10 can effectively reduce the impact between bearing 4 and pedestal 1 when rotating, to play protection to bearing 4
Effect, improves its service life, and then improve the service life of molecular pump.
In the present embodiment, the notch 7 has 4.
It advanced optimizes, between the interconnecting piece 5 and support portion 3, between interconnecting piece 5 and pedestal 6 and adjacent interconnecting piece 5
Between by a curved portion 8 be connected.
It is enabled between interconnecting piece 5 and support portion 3 by the curved portion 8 of setting, between interconnecting piece 5 and pedestal 6 and phase
Adjacent 5 transition of interconnecting piece is more smooth, while it being made to be integrally formed a continuous curvilinear structures, makes it have preferable elasticity,
Deformation occurs for curvilinear structures after support portion 3 is pressurized, and the elastic force of generation is more stable.
Claims (9)
1. a kind of thermally conductive damping spring of high-speed bearing, it is characterised in that: including pedestal, interconnecting piece and support portion, the pedestal with
It is formed with recess after interconnecting piece connection, the support portion is also formed with recess after connecting with interconnecting piece.
2. the thermally conductive damping spring of a kind of high-speed bearing according to claim 1, it is characterised in that: the interconnecting piece has one
A, section is in " N " type after interconnecting piece is connected with pedestal and support portion.
3. the thermally conductive damping spring of a kind of high-speed bearing according to claim 1, it is characterised in that: the interconnecting piece has two
A, after two interconnecting piece connections, both ends are connect with pedestal and support portion respectively, and are in " M " type after connecting.
4. the thermally conductive damping spring of a kind of high-speed bearing according to claim 1, it is characterised in that: the interconnecting piece has 3
More than, multiple interconnecting pieces are whole after being connected to be serrated, and both ends are connected with pedestal and support portion respectively.
5. the thermally conductive damping spring of a kind of high-speed bearing according to claim 1, it is characterised in that: the interconnecting piece and support
Portion is equipped with notch, and the notch on interconnecting piece connects with the notch on support portion.
6. the thermally conductive damping spring of a kind of high-speed bearing according to claim 5, it is characterised in that: the notch have it is multiple,
And it is evenly arranged on interconnecting piece and support portion and thermally conductive damping spring is divided into flap-type structure.
7. the thermally conductive damping spring of a kind of high-speed bearing according to claim 3, it is characterised in that: the interconnecting piece and support
It is connected between portion, between interconnecting piece and pedestal and between adjacent interconnecting piece by a curved portion.
8. a kind of damping structure, it is characterised in that: the bearing including pedestal and for being cooperated with main shaft, the pedestal and axis
The thermally conductive damping spring as described in any one in claim 1-7 is equipped between holding.
9. a kind of damping structure according to claim 8, it is characterised in that: the pedestal is equipped with groove, described thermally conductive
Damping spring one end is located in groove, and is bonded with groove walls, and the other end is bonded with bearing surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910405738.9A CN110043558B (en) | 2019-05-15 | 2019-05-15 | High-speed bearing heat conduction damping spring and damping structure using same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910405738.9A CN110043558B (en) | 2019-05-15 | 2019-05-15 | High-speed bearing heat conduction damping spring and damping structure using same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110043558A true CN110043558A (en) | 2019-07-23 |
| CN110043558B CN110043558B (en) | 2024-05-03 |
Family
ID=67282209
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910405738.9A Active CN110043558B (en) | 2019-05-15 | 2019-05-15 | High-speed bearing heat conduction damping spring and damping structure using same |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110043558B (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06207533A (en) * | 1993-01-11 | 1994-07-26 | Toyota Motor Corp | Bearing for gas turbine |
| DE102005025261A1 (en) * | 2005-06-02 | 2006-12-14 | Leybold Vacuum Gmbh | Vacuum pump has housing containing rolling bearing with stator ring and sprung heat bridging element located between housing and ring for rotory shaft thermally connecting the two for better heat conduction |
| CN103470539A (en) * | 2013-09-26 | 2013-12-25 | 中国工程物理研究院机械制造工艺研究所 | Damping and heat-dissipating device for rolling bearing |
| CN104632691A (en) * | 2015-02-11 | 2015-05-20 | 中国工程物理研究院机械制造工艺研究所 | Turbine molecular pump bearing block |
| DE102016118040A1 (en) * | 2016-09-23 | 2016-12-08 | Agilent Technologies Inc. | Heat removal device for turbomolecular pump |
| CN209977072U (en) * | 2019-05-15 | 2020-01-21 | 四川九天真空科技有限公司 | High-speed bearing heat conduction damping spring and damping structure using same |
-
2019
- 2019-05-15 CN CN201910405738.9A patent/CN110043558B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06207533A (en) * | 1993-01-11 | 1994-07-26 | Toyota Motor Corp | Bearing for gas turbine |
| DE102005025261A1 (en) * | 2005-06-02 | 2006-12-14 | Leybold Vacuum Gmbh | Vacuum pump has housing containing rolling bearing with stator ring and sprung heat bridging element located between housing and ring for rotory shaft thermally connecting the two for better heat conduction |
| CN103470539A (en) * | 2013-09-26 | 2013-12-25 | 中国工程物理研究院机械制造工艺研究所 | Damping and heat-dissipating device for rolling bearing |
| CN104632691A (en) * | 2015-02-11 | 2015-05-20 | 中国工程物理研究院机械制造工艺研究所 | Turbine molecular pump bearing block |
| DE102016118040A1 (en) * | 2016-09-23 | 2016-12-08 | Agilent Technologies Inc. | Heat removal device for turbomolecular pump |
| CN209977072U (en) * | 2019-05-15 | 2020-01-21 | 四川九天真空科技有限公司 | High-speed bearing heat conduction damping spring and damping structure using same |
Also Published As
| Publication number | Publication date |
|---|---|
| CN110043558B (en) | 2024-05-03 |
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Effective date of registration: 20210329 Address after: Room 820, 8th Floor, Building 1, 13 Guocheng Road, Shunqing District, Nanchong City, Sichuan Province Applicant after: Zhongke Jiuwei Technology Co.,Ltd. Address before: No. 888, Duofu Industrial Park, Xichong County, Nanchong, Sichuan, 637200 Applicant before: SICHUAN JIUTIAN VACUUM TECHNOLOGY Co.,Ltd. |
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