CN103470539B - A kind of vibration damping of rolling bearing and sink - Google Patents
A kind of vibration damping of rolling bearing and sink Download PDFInfo
- Publication number
- CN103470539B CN103470539B CN201310443435.9A CN201310443435A CN103470539B CN 103470539 B CN103470539 B CN 103470539B CN 201310443435 A CN201310443435 A CN 201310443435A CN 103470539 B CN103470539 B CN 103470539B
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- China
- Prior art keywords
- rolling bearing
- bearing
- wave spring
- vibration damping
- sink
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C37/00—Cooling of bearings
- F16C37/007—Cooling of bearings of rolling bearings
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C27/00—Elastic or yielding bearings or bearing supports, for exclusively rotary movement
- F16C27/06—Elastic or yielding bearings or bearing supports, for exclusively rotary movement by means of parts of rubber or like materials
- F16C27/066—Ball or roller bearings
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C19/00—Bearings with rolling contact, for exclusively rotary movement
- F16C19/02—Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows
- F16C19/04—Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows for radial load mainly
- F16C19/06—Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows for radial load mainly with a single row or balls
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2360/00—Engines or pumps
- F16C2360/44—Centrifugal pumps
- F16C2360/45—Turbo-molecular pumps
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
- Rolling Contact Bearings (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Abstract
The invention provides a kind of vibration damping and sink of rolling bearing, described vibration damping and sink comprise bearing support, bearing gland, rotating shaft, vibration isolation rubber circle, wave spring, rolling bearing.In the gap of wave spring fitting between rolling bearing side and bearing support.Wave spring adopts beryllium-bronze material, and heat conductivity is comparatively large, can the heat of effective by-pass roll dynamic bearing High Rotation Speed generation.Wave spring in the present invention adopts Semicircular arched structure to improve elasticity, reduces the radial contact stiffness of rolling bearing, reduces the vibratory impulse of rolling bearing.Extend the working life of rolling bearing, and then extend the working life of turbomolecular pump.
Description
Technical field
The invention belongs to rolling bearing vibration damping and technical field of heat dissipation, be specifically related to a kind of vibration damping and sink of rolling bearing.The present invention can be applied to the rolling bearing structure of turbomolecular pump, can extend the working life of rolling bearing, and then improves the working life of turbomolecular pump.
Background technique
Turbomolecular pump comprises movable vane wheel and stator blade, and the rotating shaft of movable vane wheel is bearing in bearing support by rolling bearing system, and rolling bearing mainly adopts oil lubrication or grease lubrication.Because turbomolecular pump movable vane takes turns rotation per minute tens thousand of turns, the vibration abrasion of rolling bearing and temperature rise very large to its aging effects.The axis of housing washer is not directly connected with bearing support with radial direction, in the gap of housing washer and bearing support, in the gap of rolling bearing end face and bearing support, be all provided with elastic element.
The life-span of rolling bearing determines the life-span of turbomolecular pump, for improving the life-span of turbomolecular pump, first solves vibration abrasion and the heating problem of rolling bearing.Vibration damping generally adopts elastomer, as the patent " pump bearing arrangement " (China Patent Publication No.: CN101809292A) of Oerlikon Leybold Vacuum GmbH, adopts elastomeric O-type ring; Patent " turbomolecular pump of bearing dissipating heat through grease lubrication " (China Patent Publication No.: CN201496293U) of Wuji Vacuum Science and Technology Co., Ltd., Chengdu City, adopts shockproof rubber coil.If adopt rubber material effectively can reduce the vibration of rolling bearing, but the heat that rolling bearing produces is not delivered on bearing support by rubber material, rolling bearing is generated heat serious, reduce the life-span of rolling bearing; If adopt and add a certain amount of Heat Conduction Material in the elastomer, the effectiveness in vibration suppression of rolling bearing is deteriorated, and the nonuniformity of Heat Conduction Material causes amount of localized heat transmission not go out or heat trnasfer is slower, bearing vibration is aggravated, heating is serious, wearing and tearing are accelerated, reduce the working life of rolling bearing, thus reduce the working life of turbomolecular pump.
Summary of the invention
In order to solve vibration damping and the heat dissipation problem of rolling bearing in existing turbomolecular pump, the invention provides a kind of vibration damping and sink of rolling bearing.Rolling bearing vibration damping of the present invention and sink, while realizing vibration damping, can meet the delivery request that turbomolecular pump rolling bearing High Rotation Speed produces heat.
The vibration damping of rolling bearing of the present invention and sink, be characterized in, described vibration damping and sink comprise bearing support, bearing gland, rotating shaft, vibration isolation rubber circle, wave spring, rolling bearing.Its annexation is, embeds and be provided with vibration isolation rubber circle in described bearing support and bearing gland.Rolling bearing is arranged in rotating shaft, and rotating shaft is bearing in bearing support by rolling bearing.Be provided with wave spring in the gap of rolling bearing side and bearing support, rolling bearing upper and lower end face contacts with the vibration isolation rubber circle in bearing gland with bearing support; Bearing gland, above bearing support, compresses rolling bearing.
Described wave spring is used for vibration damping, and its rigidity is 5 ~ 20N/ μm.
Described wave spring is used for heat conduction, and its heat conductivity is greater than 30W/mK.
Described wave spring adopts beryllium-bronze material.
Described wave spring adopts semicircle arch structure.
The quantity that described vibration isolation rubber circle is arranged is two.
Described wave spring, for rolling bearing provides radial vibration-reducing and conduction of heat.Adopt beryllium-bronze material, heat conductivity is comparatively large, can transmit in time the heat that high rotating speed rolling bearing produces; Adopt Semicircular arched structure to improve the elasticity of wave spring, reduce the radial contact stiffness of rolling bearing, reduce the vibratory impulse of rolling bearing.
Vibration damping and the sink beneficial effect of rolling bearing of the present invention are: adopt wave spring to improve heat conduction efficiency, reduce vibratory impulse, thus extend the working life of rolling bearing, and then improve the working life of turbomolecular pump.
Accompanying drawing explanation
Fig. 1 is vibration damping and the sink schematic diagram of rolling bearing of the present invention;
Fig. 2 is the wave spring schematic diagram in Fig. 1;
In figure: 1. bearing support 2. bearing gland 3. rotating shaft 4. vibration isolation rubber circle 5. wave spring 6. rolling bearing.
Embodiment
Below in conjunction with accompanying drawing, the present invention is further described in detail:
Fig. 1 is vibration damping and the sink schematic diagram of block bearing in turbomolecular pump of the present invention, and Fig. 2 is the wave spring schematic diagram in Fig. 1.
In Fig. 1,2, in turbomolecular pump of the present invention, the heat radiation of rolling bearing and vibration damping structure, comprise bearing support 1, bearing gland 2, rotating shaft 3, vibration isolation rubber circle 4, wave spring 5, rolling bearing 6; Its annexation is, embeds and be provided with vibration isolation rubber circle 4 in described bearing support 1 and bearing gland 2; Rolling bearing 6 is arranged in rotating shaft 3, and rotating shaft 3 is bearing in bearing support 1 by rolling bearing 6; Be provided with wave spring 5 in the gap of rolling bearing 6 side and bearing support 1, rolling bearing 6 upper and lower end face contacts with the vibration isolation rubber circle 4 in bearing gland 2 with bearing support 1; Bearing gland 2, above bearing support 1, compresses rolling bearing 6.
Described wave spring 5 is for vibration damping, and its rigidity is 5 ~ 20N/ μm.
Described wave spring 5 is for heat conduction, and its heat conductivity is greater than 30W/mK.
Described wave spring 5 adopts beryllium-bronze material.
Described wave spring 5 adopts semicircle arch structure.
Described vibration isolation rubber circle is provided with two, and vibration isolation rubber circle 4 is one of them.
Described wave spring 5, for rolling bearing 6 provides radial vibration-reducing and heat transfer process.Adopt beryllium-bronze material, heat conductivity is comparatively large, can conduct in time the heat that high rotating speed rolling bearing 6 produces; Adopt Semicircular arched structure to improve the elasticity of wave spring, reduce the radial contact stiffness of rolling bearing 6, reduce the vibratory impulse of rolling bearing 6.
Vibration damping and the sink working state of rolling bearing of the present invention are such: rotating shaft 3 rotates with the speed of tens thousand of turns, because rotating component exists certain unbalancing value, rolling bearing 6 is produced axially and radial vibration, axial vibration is by vibration isolation rubber circle 4 vibration damping, radial vibration, by wave spring 5 vibration damping, reduces the wearing and tearing of rolling bearing; The high rotating speed of rotating shaft 3 can produce a large amount of heats simultaneously, and heat is delivered on bearing support 1 and bearing gland 2 by the wave spring 5 of high thermal conductivity, solves the wearing and tearing aggravation caused because rolling bearing 6 is overheated.Adopt wave spring 5 namely to solve radial vibration problem, also solve the heat trnasfer problem of rolling bearing 6 simultaneously, extend the working life of rolling bearing 6, and then extend the working life of turbomolecular pump.
Claims (6)
1. the vibration damping of rolling bearing and a sink, it is characterized in that, described vibration damping and sink comprise bearing support (1), bearing gland (2), rotating shaft (3), vibration isolation rubber circle (4), wave spring (5), rolling bearing (6); Its annexation is, described bearing support (1) and middle embedding of bearing gland (2) are provided with vibration isolation rubber circle (4); Rolling bearing (6) is arranged in rotating shaft (3), and rotating shaft (3) is bearing in bearing support (1) by rolling bearing (6); Be provided with wave spring (5) in the gap of rolling bearing (6) side and bearing support (1), rolling bearing (6) upper and lower end face contacts with the vibration isolation rubber circle (4) in bearing gland (2) with bearing support (1); Bearing gland (2), in the top of bearing support (1), compresses rolling bearing (6).
2. the vibration damping of rolling bearing according to claim 1 and sink, is characterized in that: described wave spring (5) is for vibration damping, and its rigidity is 5 ~ 20N/ μm.
3. the vibration damping of rolling bearing according to claim 1 and sink, is characterized in that: described wave spring (5) is for heat conduction, and its heat conductivity is greater than 30W/mK.
4., according to vibration damping and the sink of the arbitrary described rolling bearing in claims 1 to 3, it is characterized in that: described wave spring (5) adopts beryllium-bronze material.
5. the vibration damping of rolling bearing according to claim 4 and sink, is characterized in that: described wave spring (5) adopts semicircle arch structure.
6. the vibration damping of rolling bearing according to claim 1 and sink, is characterized in that: the quantity that described vibration isolation rubber circle (4) is arranged is two.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310443435.9A CN103470539B (en) | 2013-09-26 | 2013-09-26 | A kind of vibration damping of rolling bearing and sink |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310443435.9A CN103470539B (en) | 2013-09-26 | 2013-09-26 | A kind of vibration damping of rolling bearing and sink |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103470539A CN103470539A (en) | 2013-12-25 |
| CN103470539B true CN103470539B (en) | 2015-11-25 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310443435.9A Active CN103470539B (en) | 2013-09-26 | 2013-09-26 | A kind of vibration damping of rolling bearing and sink |
Country Status (1)
| Country | Link |
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| CN (1) | CN103470539B (en) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104632691A (en) * | 2015-02-11 | 2015-05-20 | 中国工程物理研究院机械制造工艺研究所 | Turbine molecular pump bearing block |
| JP6767720B2 (en) * | 2015-07-08 | 2020-10-14 | パナソニックＩｐマネジメント株式会社 | Turbomachinery |
| JP6638444B2 (en) * | 2016-02-09 | 2020-01-29 | 株式会社島津製作所 | Vacuum pump |
| CN106194998B (en) * | 2016-08-01 | 2019-07-02 | 哈尔滨工业大学 | A kind of high speed roller bearing with reduction noise |
| DE102018132715A1 (en) * | 2018-12-18 | 2020-06-18 | Hengst Se | Electric motor with at least one roller bearing supporting a motor shaft and with means for dissipating the heat of the roller bearing generated during operation of the motor |
| CN110043558B (en) * | 2019-05-15 | 2024-05-03 | 中科九微科技有限公司 | High-speed bearing heat conduction damping spring and damping structure using same |
| CN110685950B (en) * | 2019-11-13 | 2021-05-25 | 上海裕达实业有限公司 | Molecular pump bearing structure |
| GB2617843B (en) * | 2022-04-20 | 2024-05-08 | Edwards Ltd | Vacuum pump damping arrangements |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19818634A1 (en) * | 1998-04-25 | 1999-11-04 | Weck Manfred | Movable bearing for e.g. spindles and shafts |
| CN101099043A (en) * | 2005-02-04 | 2008-01-02 | 株式会社大阪真空机器制作所 | Seal structure of turbo-molecular pump |
| EP1985874A2 (en) * | 2007-04-26 | 2008-10-29 | Pfeiffer Vacuum GmbH | Bearing device |
| CN203516225U (en) * | 2013-09-26 | 2014-04-02 | 中国工程物理研究院机械制造工艺研究所 | Damping and radiating device of rolling bearing |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4261339B2 (en) * | 2001-06-15 | 2009-04-30 | ソシエテ・ドゥ・メカニーク・マグネティーク | Emergency bearings not affected by shaft load |
| GB0511877D0 (en) * | 2005-06-10 | 2005-07-20 | Boc Group Plc | Vacuum pump |
-
2013
- 2013-09-26 CN CN201310443435.9A patent/CN103470539B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19818634A1 (en) * | 1998-04-25 | 1999-11-04 | Weck Manfred | Movable bearing for e.g. spindles and shafts |
| CN101099043A (en) * | 2005-02-04 | 2008-01-02 | 株式会社大阪真空机器制作所 | Seal structure of turbo-molecular pump |
| EP1985874A2 (en) * | 2007-04-26 | 2008-10-29 | Pfeiffer Vacuum GmbH | Bearing device |
| CN203516225U (en) * | 2013-09-26 | 2014-04-02 | 中国工程物理研究院机械制造工艺研究所 | Damping and radiating device of rolling bearing |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103470539A (en) | 2013-12-25 |
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