CN110039530A - Manipulator - Google Patents
Manipulator Download PDFInfo
- Publication number
- CN110039530A CN110039530A CN201910448643.5A CN201910448643A CN110039530A CN 110039530 A CN110039530 A CN 110039530A CN 201910448643 A CN201910448643 A CN 201910448643A CN 110039530 A CN110039530 A CN 110039530A
- Authority
- CN
- China
- Prior art keywords
- support arm
- fixed
- arm plate
- plate
- block
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J11/00—Manipulators not otherwise provided for
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
- B25J9/12—Programme-controlled manipulators characterised by positioning means for manipulator elements electric
Abstract
This application involves a kind of manipulators, belong to manipulator technical field.Manipulator, including three-shaft linkage device and gripping body, gripping body is connect with three-shaft linkage device, three-shaft linkage device can drive gripping body to move along tri- directions X, Y, Z, gripping body includes support arm plate, fixed middle component, two locating pieces being spaced apart are provided on support arm plate, on the perpendicular bisector for the line that component is located at two locating pieces in fixed, component connect with support arm plate and can move along perpendicular bisector in fixed, and fixed middle component can cooperate with two locating pieces to clamp the carrier being located on support arm plate.The manipulator, support arm plate play the role of support to carrier, so that carrier and support arm plate have biggish contact surface, the cooperation of fixed middle component and support arm plate plays the role of clamping to carrier, improves the stationarity in carrier transmission process.
Description
Technical field
This application involves manipulator technical fields, in particular to a kind of manipulator.
Background technique
Full-automatic silicon wafer cleaning machine equipment is mainly used for during the semiconductor cleaning process of different size silicon wafers, carries out rotten
It loses, remove photoresist, degreasing, going the technical process such as wax, cleaning, for removing the greasy dirt of workpiece surface and other organic matters, paraffin removal, removing gold
Belong to ion etc..
In order to meet different technique requirement during silicon wafer is manufactured and pursue higher surface clean effect,
Multiple silicon wafers are placed on one carrier to carry out while handling, and have not only met higher surface clean effect, but also improve work
Efficiency.Since multi-disc carrier is much larger than traditional single wafer silicon wafer on thickness and weight, this multi-disc is carried
The clamping of disk and the stationarity of transmission process require just higher.
Summary of the invention
The purpose of the application is in view of the above-mentioned problems, provide a kind of manipulator, by support arm plate and it is fixed in component
The support and clamping to carrier are realized in cooperation, are improved the stationarity of carrier transmission, are improved the above problem.
According to the manipulator of the application one side embodiment, including three-shaft linkage device and gripping body, gripping body with
The connection of three-shaft linkage device, three-shaft linkage device can drive gripping body respectively in X direction, Y-direction, Z-direction it is mobile, clamping
Mechanism includes support arm plate, fixed middle component, is provided with two locating pieces being spaced apart on support arm plate, fixed middle component is fixed positioned at two
On the perpendicular bisector of the line of position block, fixed middle component connect with support arm plate and can move along perpendicular bisector, and fixed middle component can be with two
A locating piece cooperation is to clamp the carrier being located on support arm plate.
According to the manipulator of the embodiment of the present application, support arm plate plays the role of support to carrier, so that carrier and branch
Arm plate has biggish contact surface, and the cooperation of fixed middle component and support arm plate plays the role of clamping to carrier, improves carrying
Stationarity in disk transmission process.
In addition, also there is following additional technical characteristic according to the manipulator of the embodiment of the present application:
According to some embodiments of the present application, support arm plate is connect with three-shaft linkage device by connecting plate, fixed middle component packet
Guide rail in surely is included, middle sliding block is determined, determines middle block and gripper cylinder, fixed middle guide rail is installed on connecting plate, is determined middle sliding block and is led in determining
Rail is slidably connected, it is fixed in block with it is fixed in sliding block connect and is located at one end of close two locating pieces of sliding block in fixed, determine
Block and two locating pieces constitute the clamp area for clamping carrier, and gripper cylinder is connect with fixed middle sliding block, and gripper cylinder can
Sliding block is mobile relative to support arm plate during driving is fixed, so that block is close to or far from two locating pieces in fixed.
In the above-described embodiment, under the power drive of gripper cylinder, fixed middle block is along the line of two locating pieces
Vertical line direction is mobile, to pass through the clamping of the cooperation composition of surely middle block and two locating pieces close to or far from two locating pieces
Area realizes the clamping to the carrier on support arm plate, guarantees that relative to support arm plate position will not occur for carrier during transmission
Set offset.
In some specific embodiments of the application, the side of the separate gripper cylinder of fixed middle block is provided with the first circular arc
The side in face, the fixed middle block of the direction of locating piece is provided with the second arc surface, when surely middle block and two locating pieces cooperations, the second circle
Cambered surface and the first arc surface are located at same circumference.
In the above-described embodiment, fixed middle first arc surface of block, the second arc surface of locating piece are configured to and carry
The part-circular periphery that the profile of disk matches, guarantees the position centering of carrier, so that the clamping to carrier be better achieved.
Optionally, there are two gripping body settings, the support arm plate of two gripping bodies is arranged along Y-direction interval, works as branch
When arm plate is in initial position, the projection of the corresponding support arm plate of two gripping bodies in the Y direction is overlapped.
In the above-described embodiment, there are two gripping body settings, two gripping bodies are stacked in the Y direction, can
The transmission for realizing the carrier of different station, improves efficiency of transmission.
According to some embodiments of the present application, three-shaft linkage device includes translation mechanism, elevating mechanism and telescoping mechanism, is risen
Descending mechanism is moved by the first driving mechanism relative to translation mechanism in X direction, and telescoping mechanism is opposite by the second driving mechanism
It is moved in elevating mechanism along Y-direction, gripping body is moved relative to telescoping mechanism along Z-direction by third driving mechanism.
In the above-described embodiment, elevating mechanism can be realized relative to translation mechanism along the side X by the first driving mechanism
To movement, telescoping mechanism can be realized by the second driving mechanism and moved relative to elevating mechanism along Y-direction, driven by third
Mechanism can be realized gripping body and move relative to telescoping mechanism along Z-direction, and the setting of three driving mechanisms enables to clamp
Mechanism realizes the movement of three axis different directions, improves mobile flexibility.
Optionally, the first driving mechanism includes first straight line electric machine assembly.
In the above-described embodiment, the high speed and steady mobile, mobile essence of elevating mechanism are realized by first straight line motor
Degree is high.
Further, translation mechanism includes mounting plate, and mounting plate is used to be installed on the rack of cleaning equipment, first straight line
Electric machine assembly includes the first positioning plate, the first guide rail, the first sliding block, first primary and first grade, the first positioning plate and installation
Plate is detachably connected, and the first guide rail and the first primary are respectively arranged on the first positioning plate, and the first guide rail and the first primary are
It is arranged in X direction, the first sliding block is slidably connected with the first guide rail, and the first sliding block and first grade are mounted on elevator
Structure, when first grade is with the first primary energization, first grade is able to drive elevating mechanism and moves in X direction relative to translation mechanism
It is dynamic.
In the above-described embodiment, the first primary and the first guide rail are installed on the first positioning plate, first grade and first
Primary cooperates and is installed on elevating mechanism, the first sliding block and the cooperation of the first guide rail and is installed on elevating mechanism, passes through the first primary
It is powered with first grade, first time grade can be primary mobile relative to first, so that the first sliding block is driven to move along the first guide rail,
Realize that elevating mechanism moves in X direction relative to translation mechanism.
Optionally, the second driving mechanism includes screw-nut driving assembly.
In the above-described embodiment, the second driving mechanism includes screw-nut driving assembly, by the rotation of lead screw, is realized
The lifting of telescoping mechanism.
Further, elevating mechanism includes mounting base, riser guide, lifting slider and elevating lever, and riser guide is installed on
Mounting base and it is arranged along Y-direction, lifting slider is slidably connected with riser guide, one end of elevating lever and lifting slider company
It connects, the other end of elevating lever is connect with telescoping mechanism, and the second driving mechanism includes servo motor, lead screw and screw, servo motor
It is installed on mounting base, lead screw and mounting base are rotatably coupled and are arranged along Y-direction, and output end and the lead screw of servo motor can pass
It connects dynamicly, nut sleeve is set to lead screw and cooperates with lead screw, and lifting slider is connect with screw, and servo motor energization is able to drive silk
Thick stick rotation, so that elevating lever drives telescoping mechanism to move along Y-direction.
In the above-described embodiment, under the power drive of servo motor, lead screw is rotated relative to mounting base, and screw is along silk
The length direction (Y-direction) of thick stick is mobile, and lifting slider moves under the drive of screw along Y-direction, so that elevating lever drives
Telescoping mechanism is moved along Y-direction.
Optionally, third driving mechanism includes second straight line electric machine assembly.
In the above-described embodiment, the movement of the different trips of gripping body is realized by second straight line electric machine assembly, just
In transmission of the realization to the carrier of different station.
Further, telescoping mechanism includes substrate, and substrate is connect with elevating mechanism, and second straight line electric machine assembly includes second
Positioning plate, the second guide rail, the second sliding block, the second primary, second subprime, the second positioning plate and the second guide rail are installed on substrate,
Second primary is installed on the second positioning plate, and the second guide rail and the second primary are arranged along Z-direction, the second sliding block and the second guide rail
It being slidably connected, the second sliding block, second subprime are connect with support arm plate, when the second primary energization with second subprime, second
Secondary is able to drive support arm plate and moves along Z-direction.
In the above-described embodiment, by the second primary energization with second subprime, second subprime can be relative to second
Primary movement, to drive the second sliding block mobile relative to the second guide rail, to realize that support arm plate is moved along Z-direction.
The additional aspect and advantage of the application will be set forth in part in the description, and will partially become from the following description
It obtains obviously, or recognized by the practice of the application.
Detailed description of the invention
Technical solution in ord to more clearly illustrate embodiments of the present application, below will be to needed in the embodiment attached
Figure is briefly described, it should be understood that the following drawings illustrates only some embodiments of the application, therefore is not construed as pair
The restriction of range for those of ordinary skill in the art without creative efforts, can also be according to this
A little attached drawings obtain other relevant attached drawings.
Fig. 1 is the perspective view of manipulator provided by the embodiments of the present application；
Fig. 2 is the partial sectional view of the top view of manipulator provided by the embodiments of the present application；
Fig. 3 is the left view of manipulator provided by the embodiments of the present application；
Fig. 4 is the partial enlarged view of the support arm plate of manipulator provided by the embodiments of the present application；
Fig. 5 is the main view of manipulator provided by the embodiments of the present application；
Fig. 6 is the partial sectional view of the top view of manipulator provided by the embodiments of the present application；
Fig. 7 is the perspective view of manipulator provided by the embodiments of the present application.
Icon: 100- manipulator；1- gripping body；11- support arm plate；Component during 12- is fixed；Guide rail during 121- is fixed；122- is fixed
Middle sliding block；Block during 123- is fixed；124- gripper cylinder；The first arc surface of 125-；126- protecting box；13- locating piece；The circle of 131- second
Cambered surface；132- boss；14- cushion block；15- connecting plate；The clamp area 16-；17- connector；2- translation mechanism；21- mounting plate；3- liter
Descending mechanism；31- mounting base；311- datum plate；312- top plate；313- bottom plate；315- side plate；316- storage chamber；317- sealing ring；
32- riser guide；33- lifting slider；34- elevating lever；4- telescoping mechanism；41- substrate；The first driving mechanism of 5-；51- first is fixed
Position plate；The first guide rail of 52-；The first sliding block of 53-；54- first is primary；First grade of 55-；The second driving mechanism of 6-；61- servo electricity
Machine；62- lead screw；63- screw；The first synchronous pulley of 64-；The second synchronous pulley of 65-；66- synchronous belt；67- support；7- third is driven
Motivation structure；The second positioning plate of 71-；The second guide rail of 72-；The second sliding block of 73-；74- second is primary；75- second subprime；76- protection
Outer cover；8- carrier.
Specific embodiment
To keep the purposes, technical schemes and advantages of the embodiment of the present application clearer, below in conjunction with the embodiment of the present application
In attached drawing, the technical scheme in the embodiment of the application is clearly and completely described, it is clear that described embodiment is
Some embodiments of the present application, instead of all the embodiments.The application being usually described and illustrated herein in the accompanying drawings is implemented
The component of example can be arranged and be designed with a variety of different configurations.
Therefore, the detailed description of the embodiments herein provided in the accompanying drawings is not intended to limit below claimed
Scope of the present application, but be merely representative of the selected embodiment of the application.Based on the embodiment in the application, this field is common
Technical staff's every other embodiment obtained without creative efforts belongs to the model of the application protection
It encloses.
It should also be noted that similar label and letter indicate similar terms in following attached drawing, therefore, once a certain Xiang Yi
It is defined in a attached drawing, does not then need that it is further defined and explained in subsequent attached drawing.
In the description of the present application, it should be noted that the orientation or positional relationship of the instructions such as term "inner", "outside" is base
In orientation or positional relationship shown in the drawings or this application product using when the orientation or positional relationship usually put, only
It is the application and simplified description for ease of description, rather than the device or element of indication or suggestion meaning must have specifically
Orientation is constructed and operated in a specific orientation, therefore should not be understood as the limitation to the application.In addition, term " first ", " the
Two " etc. are only used for distinguishing description, are not understood to indicate or imply relative importance.
In the description of the present application, it is also necessary to which explanation is unless specifically defined or limited otherwise, term " setting ",
" connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or be integrally connected；It can be
It is connected directly, the connection inside two elements can also be can be indirectly connected through an intermediary.For the common of this field
For technical staff, the concrete meaning of above-mentioned term in this application can be understood with concrete condition.
Below with reference to figure description according to the manipulator 100 of the application one side embodiment.
As shown in Figure 1, according to the manipulator 100 of the embodiment of the present application, comprising: three-shaft linkage device and gripping body 1, folder
Mechanism 1 is taken to connect with three-shaft linkage device.
Specifically, three-shaft linkage device can drive gripping body 1 respectively in X direction, Y-direction, Z-direction be (such as Fig. 1 institute
Show) it is mobile, so that gripping body 1 can be realized the movement of three different directions, to clamp the object (carrying of different location
Disk).Gripping body 1 includes support arm plate 11, fixed middle component 12, and support arm plate 11 is plate structure, the area with support bearing disk 8
Domain can be realized the transmission to carrier 8；Two locating pieces 13 being spaced apart are provided on support arm plate 11, fixed middle component 12
On the perpendicular bisector of the line of two locating pieces 13, fixed middle component 12 connect with support arm plate 11 and can move along perpendicular bisector,
Component 12 and two locating pieces 13 form three anchor points in determining, when surely middle component 12 is moved to designated position, fixed middle component
12 and two locating pieces 13 can constitute circular contour, therefore, it is fixed in component 12 can be with two cooperations of locating pieces 13 to clamp
Carrier 8 (as shown in Figure 7) on support arm plate 11.
It should be pointed out that tri- directions X, Y, Z are the direction in three orientation, and signal gripping body 1 can be in Fig. 1
Movement is realized on this three directions.Meanwhile in order to save installation space, transmission convenient for gripping body 1 to carrier 8, two
The perpendicular bisector of the line of locating piece 13 is parallel with Z-direction.
According to the manipulator 100 of the embodiment of the present application, support arm plate 11 plays the role of support to carrier 8, so that carrying
Disk 8 and support arm plate 11 have biggish contact surface, and fixed middle component 12 plays the work of clamping with the cooperation of support arm plate 11 to carrier 8
With improving the stationarity in 8 transmission process of carrier.
Below with reference to figure description according to the composition of each component of the manipulator 100 of the application one side embodiment.
According to some embodiments of the present application, support arm plate 11 is connect with three-shaft linkage device by connecting plate 15, connecting plate
15 play connecting bridge beam action, and the movement of three-shaft linkage device is transferred to support arm plate 11.The setting of connecting plate 15, Neng Goujie
Installation space is saved, so that support arm plate 11 is arranged along Z-direction.As shown in Figures 2 and 3, fixed middle component 12 includes guide rail in fixed
121, block 123 and gripper cylinder 124 in determining middle sliding block 122, determining, fixed middle guide rail 121 are installed on connecting plate 15, determine middle guide rail
121 are arranged along Z-direction；Sliding block 122 is slidably connected with fixed middle guide rail 121 in determining, and fixed middle block 123 connects with fixed middle sliding block 122
Connect and be located at one end close to two locating pieces 13 of sliding block 122 in fixed.Block 123 is constituted with two locating pieces 13 for pressing from both sides in fixed
The clamp area 16 for holding carrier 8 constitutes three anchor points by surely middle block 123 and two locating pieces 13, realizes to carrier 8
Three-point fix and clamping.Gripper cylinder 124 is connect with fixed middle sliding block 122, and gripper cylinder 124 can drive 122 phase of sliding block in surely
It is mobile for support arm plate 11, so that block 123 realizes that block 123 is to carrier 8 in fixed close to or far from two locating pieces 13 in fixed
Clamping is unclamped.
Under the power drive of gripper cylinder 124, perpendicular bisector direction (Z of the fixed middle block 123 along the line of two locating pieces 13
Direction) it is mobile, thus close to or far from two locating pieces 13.When surely middle block 123 is close to two locating pieces 13, fixed middle block 123
The range of the clamp area 16 constituted with two locating pieces 13 reduces, and is realized by the cooperation of surely middle block 123 and two locating pieces 13
Clamping to the carrier 8 on support arm plate 11 guarantees that carrier 8 is fixed on support arm plate 11, carrier 8 in transmission process
Offset is not subjected to displacement with relative to support arm plate 11.After carrier 8 is transported to designated position by support arm plate 11, by clamping gas
The contraction of cylinder 124, fixed middle block 123 increase far from two locating pieces 13, the range of clamp area 16, and carrier 8 is turned by clamp position
For free state.
In some specific embodiments of the application, as shown in Fig. 2, the side of the separate gripper cylinder 124 of fixed middle block 123
It is provided with the first arc surface 125, as shown in figure 4, the side of block 123 is provided with the second arc surface during the direction of locating piece 13 is fixed
131, the profile of the first arc surface 125 and the second arc surface 131 with carrier 8 matches.When surely middle block 123 and two positioning
When block 13 cooperates, the second arc surface 131 and the first arc surface 125 are located at same circumference.It is equivalent to, with 123 direction of block in surely
The movement of two locating pieces 13, fixed middle block 123 is mobile towards the center of two locating pieces 13 by carrier 8, in conjunction with first
Arc surface 125 and the second arc surface 131 guarantee the position centering of carrier 8, so that the clamping to carrier 8 be better achieved.
As shown in figure 4, locating piece 13 is hierarchic structure, the side close to fixed middle block 123 of locating piece 13, which is provided with, to be used for
The boss 132 of carrier 8 is accepted, which is formed by the surface of locating piece 13 towards the recess of support arm plate 11 convex in support arm plate
11 structure, carrier 8 easy to support simultaneously position carrier 8.There are two match with locating piece 13 for setting on support arm plate 11
The cushion block 14 of conjunction, two cushion blocks 14 and two locating pieces 13 are symmetrical arranged and are located on same circumference, and cushion block 14 plays support and holds
The effect of load plate 8 can either increase the frictional force of carrier 8, additionally it is possible to buffer the effect that carrier 8 acts on support arm plate 11
Power.
In order to guarantee not damage carrier 8, fixed middle block 123, locating piece 13 and cushion block 14 are all made of corrosion-resistant plastic material；
And in order to guarantee the rigidity of gripping arm (general designation of the expenditures such as support arm plate 11 and connecting plate 15 part), support arm plate 11, connecting plate 15
It is all made of metal material.Since the application is suitable for chemical cleaning environment, in order to prevent being corroded property gas attack, connecting plate
15, the surface of support arm plate 11 is coated with anti-corrosion material；Component 12 further includes having protecting box 126 in fixed, and gripper cylinder 124 waits it
His electric elements part is located in protecting box 126, and protecting box 126 carries out anti-corrosion protection to above-mentioned component.
Optionally, there are two the settings of gripping body 1, as shown in figure 5, the support arm plate 11 of two gripping bodies 1 is along Y-direction
Interval setting, saves installation space, when support arm plate 11 is in initial position, the corresponding support arm plate 11 of two gripping bodies 1
Projection in the Y direction is overlapped.It is equivalent in initial position, in the Y direction, the stacking of two support arm plates 11 may be implemented, save
About installation space.The setting of two gripping bodies 1 can be realized the transmission of the carrier 8 of different station, improve transmission effect
Rate.Meanwhile the setting of two gripping bodies 1, both dry and wet can also be realized to avoid the intersection and mutually pollution of different process
Separation and other technique separation requirements.
According to some embodiments of the present application, three-shaft linkage device includes translation mechanism 2, elevating mechanism 3 and telescoping mechanism
4, elevating mechanism 3 is moved by the first driving mechanism 5 relative to translation mechanism 2 in X direction, and telescoping mechanism 4 passes through the second driving
Mechanism 6 is moved relative to elevating mechanism 3 along Y-direction, and gripping body 1 is by third driving mechanism 7 relative to telescoping mechanism 4 along Z
Direction is mobile.By the first driving mechanism 5, the second driving mechanism 6 and third driving mechanism 7, gripping body 1 is enabled to realize
The movement of three axis different directions, improves mobile flexibility.
Optionally, the first driving mechanism 5 includes first straight line electric machine assembly.Linear motor has high-speed mobile, movement flat
Steady characteristic, while can be realized the movement of different trips.
Further, translation mechanism 2 includes mounting plate 21, and mounting plate 21 uses sheet metal, has stronger intensity, energy
Enough supports and fixed other component.Mounting plate 21 is used for and the corresponding mounting plate 21 of equipment skeleton (rack) in wafer cleaning equipment
Connection is laid to a plane of entire manipulator installation, plane is leveled, and the installation and operation of every other installation part are all
On the basis of this mounting plate 21 and premise.As shown in Figures 3 and 5, first straight line electric machine assembly is led including the first positioning plate 51, first
Rail 52, first the 53, first primary 54 of sliding block and first grade 55.First positioning plate 51 and mounting plate 21 are detachably connected, the
One positioning plate 51 plays the role of positioning, convenient for the installation of other component.First guide rail 52 is respectively arranged in the first primary 54
On first positioning plate 51, the first guide rail 52 is arranged in X direction with the first primary 54, and the first sliding block 53 can be slided with the first guide rail 52
It connects dynamicly, the first sliding block 53 and first grade 55 are mounted on elevating mechanism 3.When the first primary 54 and first grade 55 are powered
When, first time grade 55 can move in X direction relative to the first primary 54, so that the first sliding block 53 be driven to move along the first guide rail 52
It is dynamic, realize that elevating mechanism 3 moves in X direction relative to translation mechanism 2.By the driving of first straight line motor mould group, realize
Movement of the elevating mechanism 3 relative to translation mechanism 2 in X direction, simultaneously as the cooperation side of the first primary 54 and first grade 55
Formula, first straight line motor mould group is mobile steady, and transmission accuracy, repeatable accuracy are high and position precision is high, and are suitble to long range
Steady conveying, installation maintenance is simple, long service life.
Meanwhile first straight line electric machine assembly further include the first magnetic railings ruler, the first read head, the first optoelectronic switch, first flap,
The other assemblies such as the first drag chain.First magnetic railings ruler, the first optoelectronic switch are mounted on the first positioning plate 51, and above-mentioned component is translating
It is mobile that position does not occur in the process；First read head, first flap and the first drag chain are mounted on elevating mechanism 3, and above-mentioned component exists
Follow elevating mechanism 3 mobile in translation motion.Each component of first motor component is referred to existing linear motor mould group
Construction and principle.
Optionally, the second driving mechanism 6 includes screw-nut driving assembly, by the rotation of lead screw 62, realizes telescopic machine
The lifting of structure 4.
Further, as shown in figure 5, elevating mechanism 3 includes mounting base 31, riser guide 32, lifting slider 33 and lifting
Bar 34, first grade 55 and the first sliding block 53 are installed in mounting base 31, and mounting base 31 provides for the other component of elevating mechanism 3
Installation positioning.Riser guide 32 is installed on mounting base 31 and is arranged along Y-direction, and lifting slider 33 and riser guide 32 are slideably
Connection, one end of elevating lever 34 are connect with lifting slider 33, and the other end of elevating lever 34 is connect with telescoping mechanism 4.Such as Fig. 5 institute
Show, the second driving mechanism 6 includes servo motor 61, lead screw 62 and screw 63, and servo motor 61 is installed on mounting base 31, lead screw 62
It is rotatably coupled with mounting base 31 and is arranged along Y-direction, the output end of servo motor 61 can drivingly be connect with lead screw 62, silk
Mother 63 is sheathed on lead screw 62 and cooperates with lead screw 62, and lifting slider 33 is connect with screw 63.When servo motor 61 is powered, servo
Motor 61 drives lead screw 62 to rotate, and screw 63 is moved along lead screw 62, and lifting slider 33 can be gone up and down in the drive lower edge of screw 63
Guide rail 32 is mobile, meanwhile, elevating lever 34 follows lifting slider 33 to move along Y-direction, so that telescoping mechanism 4 be driven to move along Y-direction
It is dynamic.
In some specific embodiments of the application, elevating lever 34 is hollow structure, and part lead screw 62 is arranged in elevating lever
In 34, to save installation space.
In some specific embodiments of the application, servo motor 61 and lead screw 62 pass through toothed belt transmission, servo motor
61 output end is connected with the first synchronous pulley 64, and one end of lead screw 62 is provided with the second synchronous pulley 65, the first synchronous pulley
64 are sequentially connected with the second synchronous pulley 65 by synchronous belt 66.When servo motor 61 is powered, the rotation of servo motor 61 is dynamic
Power is transferred to lead screw 62 by synchronous belt 66, so that lead screw 62 is rotated relative to mounting base 31, so that screw 63 is along lead screw
62 is mobile.In order to guarantee the rotational stability of lead screw 62, lead screw 62 is rotatably coupled by support 67 with mounting base 31, support
67 can play the role of supporting lead screw 62.
In some specific embodiments of the application, mounting base 31 includes datum plate 311, top plate 312, bottom plate 313, protection
Lid (not marking in figure) and two side plates 315, datum plate 311, top plate 312, bottom plate 313, protection cap and two side plates 315 surround
The storage chamber 316 of sealing, riser guide 32, lifting slider 33, lead screw 62, screw 63 and part elevating lever 34 are located at storage chamber
In 316.First grade 55 and the first sliding block 53 are installed on datum plate 311, and servo motor 61 is installed on a side plate 315, top
Sealing ring 317 is installed on plate 312, elevating lever 34 be arranged in sealing ring 317 and with 317 company of sealing slidingly against of sealing ring
It connects.Protection cap is transparent observing protection cap, and material can be corrosion-resistant engineering plastics.
Optionally, third driving mechanism 7 includes second straight line electric machine assembly, is realized and is clamped by second straight line electric machine assembly
The movement of the different trips of mechanism 1 is easy to implement the transmission to the carrier 8 of different station, meanwhile, guarantee that carrier 8 transmits
Stationarity.
Further, telescoping mechanism 4 includes substrate 41, and substrate 41 is connect with the elevating lever 34 of elevating mechanism 3, and substrate 41 rises
To the effect of installation positioning.As shown in Figure 3 and Figure 6, second straight line electric machine assembly include the second positioning plate 71, the second guide rail 72,
Second sliding block 73, the second primary 74, second subprime 75.Second positioning plate 71 and the second guide rail 72 are installed on substrate 41, and second
Positioning plate 71 plays the role of installation positioning；Second primary 74 is installed on the second positioning plate 71, at the beginning of the second guide rail 72 and second
Grade 74 is arranged along Z-direction, and the second sliding block 73 is slidably connected with the second guide rail 72, and the second sliding block 73, the second guide rail 72 are logical
Crossing connector 17, (connecting plate 15 is connect with support arm plate 11 namely the second sliding block 73, the second guide rail 72 and support arm plate with connecting plate 15
11 connections) connection, the second sliding block 73 and the second guide rail 72 are installed on connector 17.When the second primary 74 and second subprime 75 are logical
When electric, second subprime 75 can be moved relative to the second primary 74 along Z-direction, and second subprime 75 drives the second sliding block 73 and connection
Part 17 is moved along the second guide rail 72, so that driving support arm plate 11 to move along Z-direction with connector 17.
Meanwhile second straight line electric machine assembly further include the second magnetic railings ruler, the second read head, the second optoelectronic switch, second flap,
The other assemblies such as the second drag chain.Second magnetic railings ruler, the second optoelectronic switch are mounted on the second positioning plate 71, and above-mentioned component is flexible
It is mobile that position does not occur in the process；Second read head, second flap and the second drag chain are mounted on connector 17, and above-mentioned component is being stretched
Follow connector 17 mobile in compression process.Each component of first motor component is referred to the construction of existing linear motor mould group
And principle.
Corrode in order to prevent, as shown in fig. 7, the outer cup in third driving mechanism 7 is buckled with outside protective covers 76, to prevent
The component of three driving mechanisms 7 is corroded under the action of etchant gas.
In this application, in order to guarantee the intensity of the first positioning plate 51 and the second positioning plate 71, the first positioning plate 51 and
Two positioning plates 71 are all made of the sheet metal with some strength.
The working principle of the manipulator 100 of the embodiment of the present application are as follows:
Elevating mechanism 3, the movement of telescoping mechanism 4 and gripping body 1 in X direction are realized by the first driving mechanism 5, are passed through
Second driving mechanism 6 realizes telescoping mechanism 4 and gripping body 1 moving along Y-direction, is realized and is clamped by third driving mechanism 7
Mechanism 1 is moved along Z-direction, passes through the clamping of locating piece 13 and the fixed middle realization of component 12 carrier 8 on support arm plate 11.
The manipulator realizes the smooth transport to carrier 8 using the cooperation of support arm plate 11 and fixed middle component 12, in conjunction with straight
The application of line electric machine assembly can be realized the transmission of different station, and driving mechanism installation is simple, easy to maintenance, improves transmission
Efficiency.
It should be noted that in the absence of conflict, the feature in embodiment in the application can be combined with each other.
The foregoing is merely preferred embodiment of the present application, are not intended to limit this application, for the skill of this field
For art personnel, various changes and changes are possible in this application.Within the spirit and principles of this application, made any to repair
Change, equivalent replacement, improvement etc., should be included within the scope of protection of this application.
Claims (11)
1. a kind of manipulator, which is characterized in that including three-shaft linkage device and gripping body, the gripping body and three axis
Linkage connection, the three-shaft linkage device can drive the gripping body respectively in X direction, Y-direction, Z-direction it is mobile,
The gripping body includes support arm plate, fixed middle component, is provided with two locating pieces being spaced apart on the support arm plate, described fixed
Middle component is located on the perpendicular bisector of the line of described two locating pieces, and the fixed middle component connect with the support arm plate and being capable of edge
The perpendicular bisector is mobile, and the fixed middle component can cooperate with described two locating pieces to clamp and be located at holding on the support arm plate
Load plate.
2. manipulator according to claim 1, which is characterized in that the support arm plate and the three-shaft linkage device pass through company
Fishplate bar connection, it is described it is fixed in component include guide rail in fixed, be fixed in sliding block, it is fixed in block and gripper cylinder, it is described it is fixed in guide rail installation
In on the connecting plate, it is described it is fixed in sliding block and it is described it is fixed in guide rail be slidably connected, it is described it is fixed in block and it is described it is fixed in slide
One end of block connection and close described two locating pieces positioned at the fixed middle sliding block, the fixed middle block and described two locating pieces
The clamp area for clamping the carrier is constituted, the gripper cylinder is connect with the fixed middle sliding block, the gripper cylinder energy
Enough drive the fixed middle sliding block mobile relative to the support arm plate, so that the fixed middle block is close to or far from described two positioning
Block.
3. manipulator according to claim 2, which is characterized in that the side far from the gripper cylinder of the fixed middle block
Be provided with the first arc surface, the locating piece towards it is described it is fixed in the side of block be provided with the second arc surface, when it is described it is fixed in
When block and described two locating pieces cooperate, second arc surface and first arc surface are located at same circumference.
4. manipulator according to claim 2, which is characterized in that there are two the gripping body settings, two folders
The support arm plate of mechanism is taken to be arranged along the Y-direction interval, when the support arm plate is in initial position, two catching devices
The corresponding support arm plate of structure is overlapped in the projection of the Y-direction.
5. manipulator according to claim 1, which is characterized in that the three-shaft linkage device includes translation mechanism, lifting
Mechanism and telescoping mechanism, the elevating mechanism are moved relative to the translation mechanism along the X-direction by the first driving mechanism,
The telescoping mechanism is moved relative to the elevating mechanism along the Y-direction by the second driving mechanism, and the gripping body is logical
It crosses third driving mechanism and is moved relative to the telescoping mechanism along the Z-direction.
6. manipulator according to claim 5, which is characterized in that first driving mechanism includes first straight line motor group
Part.
7. manipulator according to claim 6, which is characterized in that the translation mechanism includes mounting plate, the mounting plate
For being installed on the rack of cleaning equipment, the first straight line electric machine assembly is slided including the first positioning plate, the first guide rail, first
Block, first primary and first grade, first positioning plate and the mounting plate are detachably connected, first guide rail and institute
It states the first primary to be respectively arranged on first positioning plate, first guide rail and first primary are along the X-direction
Setting, first sliding block are slidably connected with first guide rail, and first sliding block and first grade are respectively mounted
In the elevating mechanism, when first grade and the first primary energization, first grade is able to drive the liter
Descending mechanism is moved relative to the translation mechanism along the X-direction.
8. manipulator according to claim 5, which is characterized in that second driving mechanism includes screw-nut driving group
Part.
9. manipulator according to claim 8, which is characterized in that the elevating mechanism includes mounting base, riser guide, liter
Sliding block and elevating lever drop, and the riser guide is installed on the mounting base and is arranged along the Y-direction, the lifting slider and institute
It states riser guide to be slidably connected, one end of the elevating lever is connect with the lifting slider, the other end of the elevating lever
It is connect with the telescoping mechanism, second driving mechanism includes servo motor, lead screw and screw, and the servo motor is installed on
The mounting base, the lead screw and the mounting base are rotatably coupled and are arranged along the Y-direction, the servo motor it is defeated
Outlet can drivingly be connect with the lead screw, and the nut sleeve is set to the lead screw and cooperates with the lead screw, and the lifting is slided
Block is connect with the screw, and the servo motor energization is able to drive the lead screw rotation, so that described in elevating lever drive
Telescoping mechanism is moved along the Y-direction.
10. manipulator according to claim 5, which is characterized in that the third driving mechanism includes second straight line motor
Component.
11. manipulator according to claim 10, which is characterized in that the telescoping mechanism includes substrate, the substrate with
Elevating mechanism connection, the second straight line electric machine assembly include the second positioning plate, the second guide rail, the second sliding block, it is second primary, the
Secondary stage, second positioning plate and second guide rail are installed on the substrate, and second primary is installed on described the
On two positioning plates, second guide rail and second primary are arranged along the Z-direction, second sliding block and described second
Guide rail is slidably connected, and second sliding block, the second subprime are connect with the support arm plate, when described second it is primary with
When the second subprime is powered, the second subprime is able to drive the support arm plate and moves along the Z-direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910448643.5A CN110039530A (en) | 2019-05-28 | 2019-05-28 | Manipulator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910448643.5A CN110039530A (en) | 2019-05-28 | 2019-05-28 | Manipulator |
Publications (1)
| Publication Number | Publication Date |
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| CN110039530A true CN110039530A (en) | 2019-07-23 |
Family
ID=67283790
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910448643.5A Pending CN110039530A (en) | 2019-05-28 | 2019-05-28 | Manipulator |
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| Country | Link |
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| CN (1) | CN110039530A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| WO2022121212A1 (en) * | 2020-12-10 | 2022-06-16 | 江苏科技大学 | Underwater cleaning device for ship propeller and cleaning method therefor |
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Application publication date: 20190723 |