CN110017795A - A kind of relative type motor swing-arm profilometry and detection method for mirror surface inspection - Google Patents
A kind of relative type motor swing-arm profilometry and detection method for mirror surface inspection Download PDFInfo
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- CN110017795A CN110017795A CN201910333161.5A CN201910333161A CN110017795A CN 110017795 A CN110017795 A CN 110017795A CN 201910333161 A CN201910333161 A CN 201910333161A CN 110017795 A CN110017795 A CN 110017795A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C21/00—Navigation; Navigational instruments not provided for in groups G01C1/00 - G01C19/00
Abstract
The invention discloses a kind of relative type motor swing-arm profilometry examined for mirror surface and detection methods.Contourgraph relative specular attitude detection structure is installed below swing-arm profilometry, the contourgraph relative specular attitude detection structure includes three attitude transducers, the installation point of three attitude transducers constitutes a triangle, shaft of the triangle perpendicular to swing-arm profilometry, and the axis of shaft passes through the center of the triangle, the swing-arm profilometry uses the hollow air-float turntable equipped with mesoporous, and the contourgraph relative specular attitude detection structure passes through the mesoporous and is connected on the part that swing-arm profilometry does not rotate.Relative type motor swing-arm profilometry of the invention further includes probe lateral attitude precision adjustment structure.The present invention improves the precision of testing result for the relative type motor swing-arm profilometry and detection method of mirror surface inspection.
Description
Technical field
The invention belongs to optical mirror plane surface testing fields, and in particular to a kind of swing-arm profilometry is used for optical mirror plane
The detection in fine grinding stage.
Background technique
Surface error of the optical mirror plane in the fine grinding stage is greater than 2 microns, and rough surface, can not use optical interference
Detection, generallys use point-by-point contour detecting.After bore reaches 1 meter or more, to avoid in process equipment and examining between equipment
Risk brought by carrying simultaneously shortens the manufacturing cycle, recommends using the check system in station.Swing-arm profilometry is that mirror surface is thin
The mill stage examine a kind of common method, it has the advantages that, and freedom degree is few, precision is high, in bit trial, but there is also it is following not
Foot:
(1) belong to absolute type measurement, systematic error can not demarcate, and the accuracy and confidence of testing result is insufficient；
(2) spatial position of contourgraph and detected mirror surface is difficult to determine, causes contourgraph pose adjustment difficult, is not easy to detain
Except (mirror surface rotate caused by) runout error in testing result；
(3) adjustment of accurate measurement sensor is difficult, and conventional horizontal and vertical adjustment cannot ensure sensor along normal pair
Quasi- mirror surface.
Summary of the invention
In order to overcome the above deficiency of swing-arm profilometry, a kind of relative type motor swing-arm profilometry is proposed, is specifically included
The following contents:
The present invention provides a kind of relative type motor swing-arm profilometry examined for mirror surface, pacifies in the lower section of swing-arm profilometry
Equipped with contourgraph relative specular attitude detection structure, the contourgraph relative specular attitude detection structure includes three posture sensings
Device, the installation point of three attitude transducers constitute a triangle, and the triangle turns perpendicular to swing-arm profilometry
Axis, and the axis of shaft passes through the center of the triangle, the swing-arm profilometry uses the hollow air bearing equipped with mesoporous to turn
Platform, the contourgraph relative specular attitude detection structure pass through the mesoporous and are connected to the part that swing-arm profilometry does not rotate
On.
Further, three attitude transducers distribution in equilateral triangle, wherein one is located at 0 degree of angle of swing arm
Axis on, other two separation 0 degree of angle axis two sides and be arranged symmetrically, the length of the side length of the equilateral triangle makes appearance
State sensor is staggered with swing arm contourgraph.
It further, further include probe lateral attitude precision adjustment structure, the air-float turntable is equipped with rigidity measurement
Arm, one end of the rigidity measurement arm are equipped with counterweight, and the other end adjusts structure by the probe lateral attitude precision and is connected with
Probe, the probe lateral attitude precision adjustment structure include yoke structure, rectangular recess structure, rotary encoder, accurate tune
Whole unit, rotating shaft locking device, a side of the rectangular recess structure and a side of yoke structure are connected by shaft
It is connected to rotary encoder, another side of the rectangular recess structure is connect with another side of yoke structure by shaft
To rotating shaft locking device, the probe is fixed at the center of rectangular recess, and the yoke structure is equipped with precision on upper surface
Adjustment unit.
Further, an accurate adjustment unit is respectively installed at the front and rear edges of yoke structure upper surface.
Further, the rotary encoder is rotation angular encoder.
Further, the probe is contact micro-displacement sensor or contactless optical displacement sensor.
The present invention also provides a kind of detection methods of relative type motor swing-arm profilometry examined for mirror surface: including:
S1: the calibration of contourgraph；
S1-1: the contourgraph that contourgraph is mounted on above calibration index plane is fixed on device；
S1-2: contourgraph, with single pass is completed in plane, if the reading of probe is non-constant, illustrates contourgraph in calibration
There are deviations for spatial attitude；
S1-3: adjusting the spatial attitude of contourgraph, keeps the reading of the probe in probe lateral attitude precision adjustment structure permanent
It is fixed；The reading in contourgraph relative specular attitude detection structure on three attitude transducers is recorded simultaneouslyAnd probe
Length L1；
S1-4: the inclination angle theta of measurement sensor when calculating measurement mirror surface, then according to the curvature for being tested mirror surface best-fit sphere
Radius Rbfs, contourgraph pendulum arm length l, the length L1 of probe and inclination angle theta, the length L2 to pop one's head in when deriving spherical surface, and will probe
Reading be set to benchmark zero-bit；
S2: the relative attitude of contourgraph and mirror surface is determined；
S2-1: swing-arm profilometry is mounted on lathe sloping shaft, in the shaft and lathe sloping shaft of air-float turntable
Heart line is overlapped；
S2-2: according to inclination angle theta, structure is adjusted by probe lateral attitude precision, precision adjusts the lateral attitude of probe, so
Afterwards by lathe straight line and banking motion, make probe vertical in aspherical, it is aspherical to be placed on mirror surface turntable, and pass through mirror surface
Minimum point O；
S2-3: the reading (D' on three attitude transducers is read1,D'2,D'3) and with the registration on standard flatIt compares, if there is difference, illustrates that there are deviations for contourgraph relative specular posture；
S2-4: adjusting the spatial attitude of contourgraph, so that reading adjusted is identical as the reading on standard flat, at this time
The posture of contourgraph relative specular determines；
S2-5: the rotation of mirror surface turntable is primary, and three attitude transducer records once arrive the distance of plane；According to the number of record
According to the changes in coordinates for deriving best-fit sphere center of curvature Q caused by mirror surface bounce；Then sampled point is calculated to desired curvature
The difference of the distance of the distance and center of curvature after offset at center is to introduce error caused by mirror surface bounce；
S3: measurement sensor lateral attitude precision adjustment；
S3-1: before adjustment, probe vertical is first read when mirror surface, rotates the reading of angular encoder；
S3-2: being popped one's head in by accurate adjustment unit WidFin, obtains the angle that shaft turns over according to rotation angular encoder
Degree, judges whether sensor is adjusted to predetermined position；
S3-3: after adjustment, shaft is locked by locking device.
Further, the calibration is plane or spherical surface with index plane.
Further, the calibration selects low thermal expansion material to be process with index plane.
By adopting the above technical scheme, the present invention can obtain following technical effect:
A kind of relative type motor swing-arm profilometry examined for mirror surface of the invention is done on the basis of traditional contourgraph
It is further improved, improves the precision of testing result, three aspects below specific manifestation:
(1) contourgraph uses relative type motor detection mode, and the mark of profiler systems error has been completed before mirror surface detection
Fixed, the accuracy and confidence of inspection result gets a promotion；
(2) by three attitude transducers, contourgraph can be determined relative to the posture of tested surface and is adjusted, eliminate
The influences of the alignment errors to testing result such as contourgraph inclination, offset；According to the reading of sensor, can calculate because of mirror surface
Error is introduced caused by bounce, and is deducted in data processing, and the accuracy of testing result is improved；
(3) adjustment of measurement sensor lateral attitude precision may be implemented, guarantee in Aspherical-surface testing, sensor remains to hang down
Directly in mirror surface.High-precision rotary encoder and locking device can be eliminated and introduce error caused by sensor perturbations.
Detailed description of the invention
Fig. 1 is that contourgraph demarcates schematic diagram on standard flat.
Fig. 2 is that contourgraph demarcates top view on standard flat.
Fig. 3 is contourgraph relative specular attitude detection structural schematic diagram.
Fig. 4 is probe lateral attitude precision adjustment structural schematic diagram.
Fig. 5 is to carry out Aspherical-surface testing schematic diagram by contourgraph.
It marks and represents in figure:
1- contourgraph relative specular attitude detection structure, 2- probe lateral attitude precision adjust structure, 3- counterweight, 4- air bearing
Turntable, 5- rigidly measure arm, and 6- calibration index plane, the fixed beam arm of 7-, 8- lathe sloping shaft, 9- is to be measured aspherical, 10-
Mirror surface turntable, 1-1 are attitude transducer fixture, and 1-2 is connecting rod, and 2-1 is rotary encoder, and 2-2 is yoke structure, 2-3
Probe, 2-4 are accurate adjustment unit, and 2-5 shaft, 2-6 is rectangular recess structure, and 2-7 is probe fixing bolt, and 2-8 is shaft
Locking device.
Specific embodiment
With reference to the accompanying drawings and examples, the present invention will be further described.
The present embodiment provides a kind of relative type motor swing-arm profilometries examined for mirror surface, as illustrated in fig. 1 and 2.In swing arm
Contourgraph relative specular attitude detection structure 1 is installed, contourgraph relative specular attitude detection structure 1 is wrapped below formula contourgraph
Three attitude transducers A, B, C and connecting rod 1-2 are included, as shown in Figures 2 and 3, three attitude transducers pass through attitude transducer
Fixture 1-1 is fixed.The installation point of three attitude transducers constitutes a triangle, and the triangle is perpendicular to swing-arm profilometry
Shaft, and the axis of shaft passes through the center of the triangle, the swing-arm profilometry uses the hollow air bearing equipped with mesoporous
Turntable 4, the contourgraph relative specular attitude detection structure pass through the mesoporous and are connected to the portion that swing-arm profilometry does not rotate
On point.
Preferably, three attitude transducer distributions in equilateral triangle, wherein one is located on the axis at 0 degree of angle of swing arm,
Other two separation 0 degree of angle axis two sides and be arranged symmetrically, the length of the side length of the equilateral triangle makes attitude transducer
It is staggered with swing arm contourgraph.
In the present embodiment, by adding three accurate attitude transducers, the posture of contourgraph relative specular is determined.In swing arm
Three precise displacement sensors of formula contourgraph positioned beneath, the installation point of sensor constitute a triangle, triangle perpendicular to
Contourgraph shaft, and the axis of shaft passes through triangle center.Preferential selection equilateral triangle distribution: one is located at swing arm 0
Spend angle axis on, other two separation 0 degree of angle axis two sides and be arranged symmetrically.As shown in Figure 1, determining equilateral triangle
Side length L is easily installed so that attitude transducer is staggered with swing arm contourgraph；Swing arm contourgraph uses hollow air-float turntable, appearance
State determining device passes through mesoporous and is connected on the part that contourgraph does not rotate.
The present embodiment provides a kind of relative type motor swing-arm profilometries examined for mirror surface, further include probe lateral attitude essence
Close adjustment structure 2, the air-float turntable are equipped with rigidity measurement arm 5, and one end of the rigidity measurement arm is equipped with counterweight 3, another
End adjusts structure by the probe lateral attitude precision and is connected with probe, and the probe lateral attitude precision adjustment structure includes
Yoke structure, rectangular recess structure, rotary encoder, accurate adjustment unit, rotating shaft locking device, the rectangular recess structure
One side and a side of yoke structure are connected to rotary encoder by shaft, the rectangular recess structure another
Side and another side of yoke structure are connected to rotating shaft locking device by shaft, and the probe is fixed on rectangular recess
At center, the yoke structure is equipped with accurate adjustment unit on upper surface.
Preferably, an accurate adjustment unit is respectively installed at the front and rear edges of yoke structure upper surface；Encoder is rotation angle
Spend encoder；Probe is contact micro-displacement sensor or contactless optical displacement sensor.
In the present embodiment, probe lateral attitude precision adjustment structure 2 is devised.The structure is based on yoke structure, square
The shaft of connected in star structure two sides is passed through from the mesoporous of yoke structure two sides；Probe is fixed at the center of rectangular recess,
And pass through probe fixing bolt 2-7 locking；One accurate adjustment unit is respectively installed at the front and rear edges of yoke structure upper surface；Yoke
The left side center of structure is installed by high-precision rotary encoder, right side installation locking structure.Rotary encoder preferentially selects
Select the absolute value type rotary encoder of high resolution；It pops one's head in optionally connected touch micro-displacement sensor or contactless optical degree
Displacement sensor.
The present embodiment, which is devised, detects calibration index plane based on relative type motor.The standard can be processed into plane or ball
The scaling method in face, spherical surface is identical as plane；Low thermal expansion material (such as devitrified glass) Lai Jiagong is selected, to guarantee its shape
Thermal stability；The thickness of calibration index plane 6 should meet self-deformation it is small under conditions of, it is as small as possible, it is easy to carry in this way；
Calibration is examined with index plane by the methods of optical interference, guarantees that the surface figure accuracy of index plane is higher by one magnitude of tested surface.
Detection method of the present invention for the relative type motor swing-arm profilometry that mirror surface is examined is as follows:
1, the calibration of contourgraph:
1) as shown in Figure 1, contourgraph is mounted on the fixed horizontal of 6 top of calibration plane by the flange on contourgraph
On arm beam 7；
2) it as shown in Fig. 2, contourgraph completes single pass in plane 6 in calibration, if the reading of probe E is non-constant, says
There are deviations for the spatial attitude of bright contourgraph；
3) spatial attitude for adjusting contourgraph keeps the reading of the probe 2-3 in probe lateral attitude precision adjustment structure 2 permanent
It is fixed；The reading in contourgraph relative specular attitude detection structure 1 on three attitude transducers A, B, C is recorded simultaneously
With the length L1 of probe 2-3, contourgraph relative specular attitude detection structure 1 is as shown in Figure 2；
4) inclination angle theta of measurement sensor when calculating measurement mirror surface, then according to the curvature half for being tested mirror surface best-fit sphere
Diameter Rbfs, contourgraph pendulum arm length l, the length L1 of probe and inclination angle theta, the length L2 to pop one's head in when deriving spherical surface, and the 2- that will pop one's head in
3 reading is set to benchmark zero-bit.
2, the relative attitude of contourgraph and mirror surface is determined:
1) as shown in figure 3, swing-arm profilometry is mounted on lathe sloping shaft 8 by flange, air-float turntable (4) turns
Axis is overlapped with the center line of lathe sloping shaft；
2) according to inclination angle theta, structure 2 is adjusted by probe lateral attitude precision, precision adjusts the lateral attitude of probe 2-3,
Then by lathe straight line and banking motion, the 2-3 that makes to pop one's head in passes through the minimum point O of mirror surface perpendicular to be measured aspherical 9；
3) reading (D' on three attitude transducers A, B, C is read1,D'2,D'3) and with the registration on standard flatIt compares, if there is difference, illustrates that there are deviations for contourgraph relative specular posture；
4) spatial attitude for adjusting contourgraph, so that reading adjusted, this hour wheel identical as the reading on standard flat
The posture of wide instrument relative specular determines.
5) mirror surface turntable 10 rotates once, and three attitude transducers A, B, C just will record the primary distance for arriving plane；According to
The data of record can derive the changes in coordinates of best-fit sphere center of curvature Q caused by mirror surface bounce；Then sampling is calculated
Point to the center of curvature after the distance and offset at desired curvature center distance difference be mirror surface bounce caused by introduce mistake
Difference.
3, measurement sensor lateral attitude precision adjusts:
1) as shown in figure 4, being respectively provided with two shaft 2-5 on the two sides of rectangular recess structure 2-6, shaft passes through yoke
The mesoporous of the two sides structure 2-2, connect with rotary encoder 2-1 and rotating shaft locking device 2-8 respectively.Accurate adjustment unit 2-4 is solid
The upper surface front and rear sides of yoke structure 2-2 are scheduled on, the lateral attitude for accurate adjustment measurement sensor.
2) before adjusting, when first reading probe 2-3 perpendicular to mirror surface, the reading of angular encoder 2-1 is rotated；
3) by accurate adjustment unit 2-4 WidFin probe 2-3, shaft is obtained according to rotation angular encoder 2-1 and is turned
The angle crossed, judges whether sensor is adjusted to predetermined position；
4) after adjusting, shaft is locked by locking device 2-8, prevent in the detection process detector tremble and cause
Random error.
Involved technical characteristic in above embodiment, as long as not constituting conflict to each other can be combined with each other.
The present invention is not limited to the above embodiments, all belong to the present invention using the technical solution that equivalent replacement or equivalence replacement are formed and want
Seek the range of protection.
Claims (9)
1. a kind of relative type motor swing-arm profilometry examined for mirror surface, it is characterised in that: pacify in the lower section of swing-arm profilometry
Equipped with contourgraph relative specular attitude detection structure, the contourgraph relative specular attitude detection structure includes three posture sensings
Device, the installation point of three attitude transducers constitute a triangle, and the triangle turns perpendicular to swing-arm profilometry
Axis, and the axis of shaft passes through the center of the triangle, the swing-arm profilometry uses the hollow air bearing equipped with mesoporous to turn
Platform, the contourgraph relative specular attitude detection structure pass through the mesoporous and are connected to the part that swing-arm profilometry does not rotate
On.
2. a kind of relative type motor swing-arm profilometry examined for mirror surface according to claim 1, it is characterised in that: described
Three attitude transducer distributions in equilateral triangle, wherein one is located on the axis at 0 degree of angle of swing arm, other two 0 degree of separation
It the axis two sides at angle and is arranged symmetrically, the length of the side length of the equilateral triangle keeps attitude transducer and swing arm contourgraph wrong
It opens.
3. a kind of relative type motor swing-arm profilometry examined for mirror surface according to claim 1, it is characterised in that: also wrap
Probe lateral attitude precision adjustment structure is included, the air-float turntable is equipped with rigidity measurement arm, one end of the rigidity measurement arm
Equipped with counterweight, the other end adjusts structure by the probe lateral attitude precision and is connected with probe, the probe lateral attitude essence
Close adjustment structure includes yoke structure, rectangular recess structure, rotary encoder, accurate adjustment unit, rotating shaft locking device, described
One side of rectangular recess structure and a side of yoke structure are connected to rotary encoder by shaft, and the rectangle is recessed
Another side of slot structure and another side of yoke structure are connected to rotating shaft locking device by shaft, and the probe is solid
At the center of rectangular recess, the yoke structure is equipped with accurate adjustment unit on upper surface.
4. a kind of relative type motor swing-arm profilometry examined for mirror surface according to claim 3, it is characterised in that: described
One accurate adjustment unit is respectively installed at the front and rear edges of yoke structure upper surface.
5. a kind of relative type motor swing-arm profilometry examined for mirror surface according to claim 3, it is characterised in that: described
Encoder is rotation angular encoder.
6. a kind of relative type motor swing-arm profilometry examined for mirror surface according to claim 3, it is characterised in that: described
Probe is contact micro-displacement sensor or contactless optical displacement sensor.
7. a kind of detection method for the relative type motor swing-arm profilometry examined for mirror surface, it is characterised in that: include:
S1: the calibration of contourgraph；
S1-1: the contourgraph that contourgraph is mounted on above calibration index plane is fixed on device；
S1-2: contourgraph, with single pass is completed in plane, if the reading of probe is non-constant, illustrates the space of contourgraph in calibration
There are deviations for posture；
S1-3: adjusting the spatial attitude of contourgraph, keeps the reading of the probe in probe lateral attitude precision adjustment structure constant；Together
When record reading in contourgraph relative specular attitude detection structure on three attitude transducersWith the length of probe
Spend L1；
S1-4: the inclination angle theta of measurement sensor when calculating measurement mirror surface, then according to the radius of curvature for being tested mirror surface best-fit sphere
Rbfs, contourgraph pendulum arm length l, the length L1 of probe and inclination angle theta, the length L2 to pop one's head in when deriving spherical surface, and by the reading of probe
Number is set to benchmark zero-bit；
S2: the relative attitude of contourgraph and mirror surface is determined；
S2-1: swing-arm profilometry is mounted on lathe sloping shaft, the shaft of air-float turntable and the center line of lathe sloping shaft
It is overlapped；
S2-2: according to inclination angle theta, structure is adjusted by probe lateral attitude precision, then the lateral attitude of precision adjustment probe is led to
Lathe straight line and banking motion are crossed, makes probe vertical in aspherical, it is aspherical to be placed on mirror surface turntable, and most by mirror surface
Low spot O；
S2-3: the reading (D' on three attitude transducers is read1,D'2,D'3) and with the registration on standard flatInto
Row comparison, if there is difference, illustrates that there are deviations for contourgraph relative specular posture；
S2-4: adjusting the spatial attitude of contourgraph, so that reading adjusted is identical as the reading on standard flat, profile at this time
The posture of instrument relative specular determines；
S2-5: the rotation of mirror surface turntable is primary, and three attitude transducer records once arrive the distance of plane；It is pushed away according to the data of record
Export the changes in coordinates of best-fit sphere center of curvature Q caused by mirror surface bounce；Then sampled point is calculated to desired curvature center
Distance and offset after the center of curvature distance difference be mirror surface bounce caused by introduce error；
S3: measurement sensor lateral attitude precision adjustment；
S3-1: before adjustment, probe vertical is first read when mirror surface, rotates the reading of angular encoder；
S3-2: being popped one's head in by accurate adjustment unit WidFin, is obtained the angle that shaft turns over according to rotation angular encoder, is sentenced
Whether link sensor is adjusted to predetermined position；
S3-3: after adjustment, shaft is locked by locking device.
8. a kind of detection method of relative type motor swing-arm profilometry examined for mirror surface according to claim 7, special
Sign is: the calibration is plane or spherical surface with index plane.
9. a kind of detection method of relative type motor swing-arm profilometry examined for mirror surface according to claim 7 or 8,
Be characterized in that: the calibration selects low thermal expansion material to be process with index plane.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN114018173A (en) * | 2021-11-01 | 2022-02-08 | 江苏鑫晨光热技术有限公司 | Heliostat surface shape initial normal outdoor measurement system and method |
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| NIK NUR ZULIYANA MOHD: "Textile-based Micro Electro Mechanical System (MEMS) Accelerometer for Pelvic Tilt Mesurement", 《PROCEDIA ENGINEERING》 * |
| 任锦霞: "基于激光位移传感器的车轮踏面磨损检测技术研究", 《机械与电子》 * |
| 崔天刚: "Wolter I型反射镜面形在线检测装置设计", 《光学精密工程》 * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114018173A (en) * | 2021-11-01 | 2022-02-08 | 江苏鑫晨光热技术有限公司 | Heliostat surface shape initial normal outdoor measurement system and method |
| CN114018173B (en) * | 2021-11-01 | 2024-04-02 | 江苏鑫晨光热技术有限公司 | Heliostat surface shape initial normal outdoor measurement system and method |
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|---|---|
| CN110017795B (en) | 2020-12-29 |
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