CN110010442A - A kind of broadening formation Focusing of charged particles transmitting device - Google Patents
A kind of broadening formation Focusing of charged particles transmitting device Download PDFInfo
- Publication number
- CN110010442A CN110010442A CN201910286065.XA CN201910286065A CN110010442A CN 110010442 A CN110010442 A CN 110010442A CN 201910286065 A CN201910286065 A CN 201910286065A CN 110010442 A CN110010442 A CN 110010442A
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- China
- Prior art keywords
- charged particles
- rod piece
- transmitting device
- focusing
- broadening formation
- Prior art date
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- 239000002245 particle Substances 0.000 title claims abstract description 41
- 230000015572 biosynthetic process Effects 0.000 title claims abstract description 15
- 239000002184 metal Substances 0.000 claims description 9
- 239000011248 coating agent Substances 0.000 claims description 6
- 238000000576 coating method Methods 0.000 claims description 6
- 239000004429 Calibre Substances 0.000 abstract description 5
- 230000005540 biological transmission Effects 0.000 abstract description 4
- 238000001514 detection method Methods 0.000 abstract description 4
- 230000035945 sensitivity Effects 0.000 abstract description 4
- 238000012423 maintenance Methods 0.000 abstract description 3
- 150000002500 ions Chemical class 0.000 description 8
- 230000007935 neutral effect Effects 0.000 description 8
- 230000005684 electric field Effects 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 238000010884 ion-beam technique Methods 0.000 description 4
- 230000008901 benefit Effects 0.000 description 2
- 239000000571 coke Substances 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000007670 refining Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000010183 spectrum analysis Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/06—Electron- or ion-optical arrangements
- H01J49/062—Ion guides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/26—Mass spectrometers or separator tubes
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- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
Abstract
The invention discloses horn mouth Focusing of charged particles transmission parts, including more conductive rod pieces, and the conduction rod piece is around the space symmetr structure that the entrance hole diameter that same central axis is formed is big, exit caliber is small；Multiple support bases with hollow via-hole, the conduction rod piece fixed connection is in the hollow cavity of the support base；The present invention is by using the broadening formation Focusing of charged particles transmitting device for being greater than charged particle beam exit caliber with charged particle beam inlet calibre, corresponding detection sensitivity not only can be improved, volume can also be reduced, cost is reduced, while also bringing the convenient of maintenance.
Description
Technical field
It is especially a kind of based on broadening formation Focusing of charged particles transmission dress the present invention relates to ion focusing transmission field
It sets.
Background technique
It in some physical operations, needs for the particle with charge in certain vacuum to be focused, and enters next
In the detection of the charged particle of step, a kind of existing ways and means are by using multiple conductive rod pieces around same axle center ring
It is coiled into the cylindrical shape of same diameter, applies rf electric field and axial gradient electric field on conductive rod piece, charged particle is by charged ion
Source results from the atmospheric pressure outside vacuum, can mix with neutral particle, enter cylinder interior by corresponding entrance,
Then outlet is entered from entrance, is in the atmospheric pressure outside vacuum due to ion source, ion and neutral gas are true together
Empty and atmospheric pressure pressure difference drives, and the cylinder interior of rod piece formation is entered by the narrower bore of a very little, works as borehole enlargement,
The total amount of the charged particle amount and neutral gas that vacuum can be entered will increase, but be needed the vacuum pump of bigger pumping speed,
Energy maintains separation, the detection necessary base vacuum of ion, and correspondingly, and the cylinder inscribed circle needs that rod piece is formed are bigger,
It can make most of ion, after small holes rapid expansion, into cylinder, by the constraint of AC field, be then focused into, still
After cylinder inscribed circle diameter is big, the focusing effect in exit is deteriorated, and will lead to more charged particles and has gone out cylinder outlet
Afterwards, it dissipates, has lost, it is difficult to enter in junior's optical path, currently used technology is needing to reach certain specific precision and spirit
When sensitivity requires, perhaps need biggish volume or need bigger equipment cost, can not meet simultaneously volume, cost with
And the requirement of easy to maintain.
Summary of the invention
In view of this, needing to overcome at least one of drawbacks described above in the prior art, the present invention provides a kind of loudspeakers
Shape of the mouth as one speaks Focusing of charged particles transmitting device, including more conductive rod pieces, the conduction rod piece are formed around same central axis
Entrance hole diameter is big, space symmetr structure that exit caliber is small；Multiple support bases with hollow via-hole, the conduction rod piece are solid
Surely it is bound up in the hollow cavity of the support base.
According to described in the prior art, being wanted needing to reach certain specific accuracy and sensitivity in this patent background technique
When asking, perhaps needs biggish volume or need bigger equipment cost, volume, cost and maintenance can not be met simultaneously
Easily require；And broadening formation Focusing of charged particles transmitting device disclosed by the invention, by using with charged particle beam
Inlet calibre is greater than the broadening formation Focusing of charged particles transmitting device of charged particle beam exit caliber, and not only mechanism production is simple
Convenient, low in cost, ion beam is focused in the small electric field of entrance large outlet, is transmitted convenient for the focusing of ion beam, can be with
Reach better effect with smaller volume；Present invention also improves the refining effects to charged particle beam, remove band electrochondria
Most neutral molecule in beamlet, improves charged particle Ionization Efficiency, reduces charged particle source to mass spectral analysis
The pollution of device further improves detection sensitivity, while maintenance also becomes more convenient.
Charged particle source is in the atmospheric pressure outside vacuum, and charged particle and neutral gas are together by vacuum and atmospheric pressure
Pressure difference driving, focusing transmitting device is entered by the narrower bore of a very little, transmitting device ontology is focused and applies rf electric field
After axial gradient electric field, charged particle can focus on rod piece cylinder interior, enter outlet from entrance.Inlet calibre is bigger,
It can make more ions, after small holes rapid expansion, into rod piece cylinder, by the constraint of AC field, then gather
Coke, while transmitting device exit caliber is focused less than inlet calibre (using the easier easy processing of round bore), it is more advantageous to
Exit ion further focuses, while neutral particle can also be made to focus accounting for inside transmitting device with charged particle to be measured
Than becoming larger, neutral molecule most in charged particle beam is removed, Ionization Efficiency is improved, promoted whole sensitive
Degree.
In addition, a kind of disclosed broadening formation Focusing of charged particles transmitting device also has additional skill as follows according to the present invention
Art feature:
Further, the conductive rod piece is metal rod or the rod piece or internal with metal rod with package metal coating
Outer layer has the rod piece of insulating coating.
Further, the conductive rod piece 4 or 6 or 8.
The additional aspect of the present invention and advantage will be set forth in part in the description, and will partially become from the following description
Obviously, or practice through the invention is recognized.
Detailed description of the invention
Above-mentioned and/or additional aspect of the invention and advantage will become from the following description of the accompanying drawings of embodiments
Obviously and it is readily appreciated that, in which:
Fig. 1 is the structural schematic diagram of the embodiment of the present invention；
1 rod piece cylinder, 2 conductive rod pieces, 3 support bases, 11 entrances, 12 outlets.
Specific embodiment
The embodiment of the present invention is described below in detail, examples of the embodiments are shown in the accompanying drawings, wherein from beginning to end
Same or similar label indicates same or similar element or element with the same or similar functions；Below with reference to attached
The embodiment of figure description is exemplary, and for explaining only the invention, and is not construed as limiting the claims.
In the description of the present invention, it is to be understood that, term " on ", "lower", "bottom", "top", "front", "rear",
The orientation or positional relationship of the instructions such as "inner", "outside", " cross ", " perpendicular " is to be based on the orientation or positional relationship shown in the drawings, and is only
For the convenience of describing the present invention and simplifying the description, rather than the device or element of indication or suggestion meaning must have specific side
Position is constructed and operated in a specific orientation, therefore is not considered as limiting the invention.
In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, term " connection " " connects
It is logical ", " connected ", " connection ", " cooperation " shall be understood in a broad sense, for example, it may be being fixedly connected, be integrally connected, be also possible to
It is detachably connected；It can be the connection inside two elements；It can be directly connected, the indirect phase of intermediary can also be passed through
Even；" cooperation " can be the cooperation in face and face, be also possible to the cooperation a little with face or line and face, also include the cooperation of hole axle, right
For those skilled in the art, the concrete meaning of above-mentioned term in the present invention can be understood with concrete condition.
Inventive concept of the invention is as follows, a kind of broadening formation Focusing of charged particles transmitting device is provided, by using tool
There is charged particle beam inlet calibre to be greater than the broadening formation Focusing of charged particles transmitting device of charged particle beam exit caliber, not only
Mechanism makes simple and convenient, and low in cost, ion beam is focused in the small electric field of entrance large outlet, convenient for the poly- of ion beam
Coke transmission, can reach better effect with smaller volume；Present invention also improves the refining effects to charged particle beam, clearly
In addition to neutral molecule most in charged particle beam, charged particle Ionization Efficiency is improved, charged particle source is reduced
Pollution to mass spectrometer.
As shown, according to an embodiment of the invention, a kind of broadening formation Focusing of charged particles transmitting device, including
More conductive rod pieces 2, the conduction rod piece 2 is big around 11 aperture of entrance that same central axis is formed, 12 bores of outlet are small
Space symmetr structure；Multiple support bases 3 with hollow via-hole, conduction 2 fixed connection of rod piece is in the support base 3
In cavity, the conduction rod piece 2 can hollow cavity of the fixed connection in the support base 3 by welding inside, institute
A variety of rod piece shapes can be used by stating conductive rod piece 2;The outer shape of the conduction rod piece can be circle, taper, bending-type
Etc. structures.
In addition, a kind of disclosed also having for broadening formation Focusing of charged particles transmitting device is added as follows according to the present invention
Technical characteristic:
According to some embodiments of the present invention, the conductive rod piece is metal rod or the rod piece or interior with package metal coating
Portion has the rod piece of insulating coating with metal rod outer layer.
Further, the conductive rod piece 4 or 6 or 8.
It is any to refer to that " one embodiment ", " embodiment ", " illustrative examples " etc. mean to combine embodiment description
Specific component, structure or feature are included at least one embodiment of the present invention；This specification everywhere this schematically
Statement is not necessarily referring to identical embodiment；Moreover, when combining any embodiment to describe specific component, structure or feature
When, advocated, component, structure or feature in conjunction with as the realization of other embodiments all fall within those skilled in the art
Within the scope of.
Although having carried out detailed retouch to a specific embodiment of the invention referring to multiple illustrative examples of the invention
It states, it must be understood that those skilled in the art can be designed that various other improvement and embodiment, these improve and implement
Example will be fallen within spirit and scope；Specifically, in aforementioned disclosure, attached drawing and the scope of the claims
Within, reasonable variations and modifications can be made in terms of the arrangement that components and/or sub-combination are laid out, without departing from
Spirit of the invention；In addition to components and/or the variations and modifications of layout aspect, range is by appended claims and its is equal
Object limits.
Claims (3)
1. a kind of broadening formation Focusing of charged particles transmitting device, which is characterized in that including more conductive rod pieces, the conducting rod
Part is around the space symmetr structure that the entrance hole diameter that same central axis is formed is big, exit caliber is small；It is multiple that there is hollow via-hole
Support base, it is described conduction rod piece fixed connection in the hollow cavity of the support base.
2. a kind of broadening formation Focusing of charged particles transmitting device according to claim 1, which is characterized in that the conduction
Rod piece is metal rod or rod piece or the internal bar with metal rod outer layer with insulating coating with package metal coating
Part.
3. a kind of broadening formation Focusing of charged particles transmitting device according to claim 1, which is characterized in that the conduction
Rod piece 4 or 6 or 8.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910286065.XA CN110010442A (en) | 2019-04-10 | 2019-04-10 | A kind of broadening formation Focusing of charged particles transmitting device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910286065.XA CN110010442A (en) | 2019-04-10 | 2019-04-10 | A kind of broadening formation Focusing of charged particles transmitting device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110010442A true CN110010442A (en) | 2019-07-12 |
Family
ID=67170900
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910286065.XA Pending CN110010442A (en) | 2019-04-10 | 2019-04-10 | A kind of broadening formation Focusing of charged particles transmitting device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110010442A (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6417511B1 (en) * | 2000-07-17 | 2002-07-09 | Agilent Technologies, Inc. | Ring pole ion guide apparatus, systems and method |
| US20030136905A1 (en) * | 2001-12-06 | 2003-07-24 | Bruker Daltonik Gmbh | Ion-guide systems |
| CN201918357U (en) * | 2009-05-28 | 2011-08-03 | 安捷伦科技有限公司 | Multipole ion guide part used for convergence for forming ion beam |
| CN105931944A (en) * | 2016-05-18 | 2016-09-07 | 中山大学 | Ion transmission system |
| CN107004566A (en) * | 2014-11-28 | 2017-08-01 | Dh科技发展私人贸易有限公司 | RF ion guides |
| CN209544280U (en) * | 2019-04-10 | 2019-10-25 | 江苏天瑞仪器股份有限公司 | A kind of broadening formation Focusing of charged particles transmitting device |
-
2019
- 2019-04-10 CN CN201910286065.XA patent/CN110010442A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6417511B1 (en) * | 2000-07-17 | 2002-07-09 | Agilent Technologies, Inc. | Ring pole ion guide apparatus, systems and method |
| US20030136905A1 (en) * | 2001-12-06 | 2003-07-24 | Bruker Daltonik Gmbh | Ion-guide systems |
| CN201918357U (en) * | 2009-05-28 | 2011-08-03 | 安捷伦科技有限公司 | Multipole ion guide part used for convergence for forming ion beam |
| CN107004566A (en) * | 2014-11-28 | 2017-08-01 | Dh科技发展私人贸易有限公司 | RF ion guides |
| CN105931944A (en) * | 2016-05-18 | 2016-09-07 | 中山大学 | Ion transmission system |
| CN209544280U (en) * | 2019-04-10 | 2019-10-25 | 江苏天瑞仪器股份有限公司 | A kind of broadening formation Focusing of charged particles transmitting device |
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