CN110006895A - Detection device and detection method - Google Patents

Detection device and detection method Download PDF

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Publication number
CN110006895A
CN110006895A CN201910008428.3A CN201910008428A CN110006895A CN 110006895 A CN110006895 A CN 110006895A CN 201910008428 A CN201910008428 A CN 201910008428A CN 110006895 A CN110006895 A CN 110006895A
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CN
China
Prior art keywords
intensity
concentration
measured object
detection device
image
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Pending
Application number
CN201910008428.3A
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Chinese (zh)
Inventor
梁明况
邓宇珊
戴明吉
沈志明
罗安钧
赵玉麟
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Industrial Technology Research Institute ITRI
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Industrial Technology Research Institute ITRI
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Filing date
Publication date
Priority claimed from TW107135836A external-priority patent/TWI670485B/en
Application filed by Industrial Technology Research Institute ITRI filed Critical Industrial Technology Research Institute ITRI
Publication of CN110006895A publication Critical patent/CN110006895A/en
Pending legal-status Critical Current

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications

Abstract

The present invention discloses a kind of detection device and detection method.Detection device includes an optical check unit, an optical analysis unit and a concentration detecting unit.An image of the optical check unit to extract a measured object.One first intensity of one first primary colors of the optical analysis unit to analyze the image and one second intensity of one second primary colors.The concentration detecting unit is to obtain a concentration of an ingredient of the measured object depending at least on first intensity and second intensity with a detection regression curve or a grouping model.

Description

Detection device and detection method
Technical field
The present invention relates to a kind of detection device and detection methods.
Background technique
At present circuit board electroplating factory in order to ensure the ion concentration (such as copper ion) of electroplate liquid accuracy, it is necessary to take out Electroplate liquid sample, then (titration or atomic absorption spectrography (AAS) etc.) is detected to laboratory.However, these detection modes are suitable Time-consuming, and the ion concentration of electroplate liquid can not be obtained in real time.Once occurring in the ion concentration that laboratory testing goes out electroplate liquid different Chang Shi has produced several batches of circuit boards on production line, may seriously affect process rate.
Therefore, circuit board electroplating factory needs a kind of method and apparatus that can measure bath concentration in the production line, with Processing procedure is set to be able to carry out amendment.
In addition, e.g. the constituent concentration of biofluid contains with the ingredient dyed cloth at other with concentration dependent program Amount etc., it is also desirable to develop a kind of method and apparatus for capableing of real-time measurement concentration on line.
Summary of the invention
The present invention relates to a kind of detection device and detection methods, reach concentration in the production line using optical check unit Detection, and processing procedure is made to be able to carry out amendment.
A kind of detection device is proposed according to the present invention.Detection device includes an optical check unit, an optical analysis unit An and concentration detecting unit.An image of the optical check unit to extract a measured object.The optical analysis unit is to divide Analyse one first intensity of one first primary colors of the image and one second intensity of one second primary colors.The concentration detecting unit use so that It is few that one one-tenth of the measured object is obtained with a detection regression curve or a grouping model according to first intensity and second intensity The concentration divided.
A kind of detection method is separately proposed according to the present invention.Detection method includes the following steps.It is mentioned with an optical check unit Take an image of a measured object.Analyze one first intensity of one first primary colors of the image and the last the second of one second primary colors Degree.The measured object is obtained with a detection regression curve or a grouping model depending at least on first intensity and second intensity One concentration of one ingredient.
More preferably understand to have to above-mentioned and other aspect of the invention, special embodiment below, and cooperates attached drawing detailed Carefully it is described as follows:
Detailed description of the invention
Fig. 1 is painted the schematic diagram of the detection device according to an embodiment.
Fig. 2 is painted the flow chart of the detection method according to an embodiment.
Fig. 3 is painted the schematic diagram of image.
Fig. 4 is painted the detection regression curve according to an embodiment.
Fig. 5 is painted the flow chart of detection method according to another embodiment.
Fig. 6 is painted the schematic diagram of the grouping model according to an embodiment.
Fig. 7 is painted the schematic diagram of detection device according to another embodiment.
Fig. 8 is painted the flow chart of detection method according to another embodiment.
Fig. 9 is painted the schematic diagram of detection device according to another embodiment.
Figure 10 is painted the schematic diagram of detection device according to another embodiment.
Figure 11 is painted the schematic diagram of detection device according to another embodiment.
[symbol description]
100,200,300,400,400 ': detection device
110,210,310,410: optical check unit
111: lens module
112: aperture module
113: digital photosensitive element
120,220,320,420: optical analysis unit
130,230,330: concentration detecting unit
240: environment sensing unit
340,440: control unit
350: adding unit
450: brake
900: grouping model
CT1: testing container
CT3, CT4: processing procedure slot
CM3, CM4: control signal
CN1, CN2, CN3: concentration
CV1: detection regression curve
ES2: environmental parameter
IM1, IM2, IM3, IM4: image
L41, L43: incident light
L42: light is penetrated
L44: reflected light
LD1, LD4: light source
LQ1, LQ2, LQ3: liquid
OT4: measured object
PG: pixel group
PX: pixel
S11, S21, S31: the first intensity
S12, S22, S32: the second intensity
S110, S120, S130, S130 ', S230: step
S41: component content signal
R1, R2, R3, X1, Xi, Xn, Y1, Yi, Ym, Y1*, Yi*, Ym*: node
Specific embodiment
It please join Fig. 1, be painted the schematic diagram of the detection device 100 according to an embodiment.The measured object of the present embodiment is for example It is that copper ion solution used in copper wire processing procedure is electroplated in circuit board factory.Detection device 100 include an optical check unit 110, One optical analysis unit 120 and a concentration detecting unit 130.Optical check unit is, for example, automatic visual inspection unit (Automated Optical Inspection unit, AOI unit).Optical analysis unit 120 and concentration detecting unit 130 An one of e.g. circuit, a computer, a chip, a circuit board, a program module or storage array program code storage dress It sets.Optical analysis unit 120 and concentration detecting unit 130 can be stored in the program or an algorithm of a memory.Work as load Program or algorithm are calculated in a microprocessor (microprocessor), a chip (chip), a processor, a circuit, one out One of machine, a circuit board, a program module or storage array program code storage device is i.e. executable.Optical check unit 110 For example including a lens module 111, an aperture module 112 and a digital photosensitive element 113.In the present embodiment, optical check Unit 110 is not to be applied to traditional paste solder printing detection, but be applied in the real-time detection of liquid or equal measured objects of dying cloth. Paste solder printing detects carried out detection and is detected primarily directed to features such as position, shapes.In the present embodiment, collocation light Analytical unit 120 and concentration detecting unit 130 are learned, so that optical check unit 110 can be applied to the real-time detection of measured object, Such as electroplate liquid.And concentration need not be measured by chemically reacting using the way of optical check unit 110, therefore be different from passing The titration of system.It can be not required to carry out the analysis of complicated spectrum using the way of optical check unit 110, therefore be different from traditional Atomic absorption spectrography (AAS).The function mode of each item is described in detail in collocation flow chart further below.
Referring to figure 2., it is painted the flow chart of the detection method according to an embodiment.In step s 110, it is examined with optics Verification certificate member 110 extracts one of measured object image (e.g. one of liquid LQ1 image IM1).In this step, liquid LQ1 It can be taken out, and be set in a testing container CT1 by a processing procedure slot.After one light source LD1 is provided to liquid LQ1, optical check Unit 110 is shot against testing container CT1.After optical check unit 110 takes image IM1, it is transferred to optical analysis unit 120。
In this step, optical check unit 110 directly shoots image IM1.Due to the number sense of optical check unit 110 Optical element 113 includes several photosensitive pixel elements, and wherein photosensitive pixel element is, for example, charge coupled cell (Charge- Coupled Device, CCD), photosensitive pixel element can for the first primary colors received by each pixel light (such as Red light), the light (e.g. green light) of the second primary colors and light (the e.g. blue light of third primary color Line) it is converted into electric signal, and store, to form an image IM1, therefore the present embodiment can no longer need to carry out for spectrum Complicated analysis.
Then, in the step s 120, optical analysis unit 120 analyze image IM1 the first primary colors the first intensity S11 with Second intensity S12.Referring to figure 3., it is painted the schematic diagram of image IM1.Several pictures of the optical analysis unit 120 to image IM1 Plain group PG is analyzed.Each pixel group PG includes adjacent several pixel PX.As shown in figure 3, the quantity of pixel group PG is 9 A, these pixel groups PG is mutually non-conterminous, and the mode of 3X3 arranges.The quantity of pixel PX in each pixel group PG is 9 It is a.Pixel PX is with 3X3 matrix arrangement.That is, optical analysis unit 120 carries out 81 pixel PX of image IM1 Analysis.In one embodiment, at least 2 groups in several pixel group PG are mutually non-conterminous.
The red intensity of 81 pixel PX is averaged by optical analysis unit 120, to obtain the first of image IM1 Intensity S11;The intensity of the green of 81 pixel PX is simultaneously averaged by optical analysis unit 120, to obtain the of image IM1 Two intensity S12.First intensity S11 and the second intensity S12 is simultaneously transferred to concentration detecting unit 130.
Then, in step s 130, concentration detecting unit 130 is according to the first intensity S11 and the second intensity S12, with an inspection Regression curve (regression curve) CV1 (being illustrated in Fig. 4) is surveyed, concentration (the e.g. liquid of an ingredient of measured object is obtained A concentration C N1 of body LQ1).Referring to figure 4., it is painted the detection regression curve CV1 according to an embodiment.Detect regression curve CV1 indicates the summation of the first intensity S11 and the second intensity S12 and the regression relation of concentration C N1.It is preparatory to detect regression curve CV1 It is analyzed in the same way for different concentration, in the experiment of each concentration, optical analysis unit 120 can be passed through Obtain the summation of the first intensity S11 and the second intensity S12.By the experiment of various concentration for several times, various concentration pair can be obtained It should be in the coordinate (stain as shown in Figure 4) of the summation of the first intensity S11 and the second intensity S12.Pass through linear regression analysis again Or polynomial regression analysis, the then detection of the summation and concentration C N1 that can obtain the first intensity S11 and the second intensity S12 return Curve CV1.That is, concentration detecting unit 130 can analyze the first intensity S11 come and the second intensity according to practical The summation of S12 obtains the concentration C N1 of liquid LQ1.
In the present embodiment, liquid LQ1 is copper ion solution, and the first intensity S11 is red intensity, the second intensity S12 For the intensity of green.Following table one is please referred to, illustrates the coefficient of determination (the coefficient of of regression relation Determination, R2) experimental result.As can be seen from table 1, when detecting the concentration of copper ion solution, red is strong The coefficient of determination highest of degree and the summation of the intensity of green and the regression relation of concentration, and it is most representative.This experimental result Break through technology prejudice for a long time.For a long time, those skilled in the art think copper ion solution for blue, it should which detection is blue The intensity of color just accurately analyze by arriving for meeting.However, the hammer away through researcher of the present invention, find red intensity with it is green The just available highest accuracy of the summation of the intensity of color, technically an actually quantum jump.However, in addition to red intensity It is red in other embodiments (when especially detecting other in embodiment of type solution) other than the summation of the intensity of green The summation of the intensity of the intensity and blue of color can also carry out the detection of concentration.Alternatively, (especially detecting it in other embodiments He when type solution embodiment in), single red intensity can also carry out the detection of concentration.It is (outstanding in other embodiments It is when detecting other in embodiment of type solution), the intensity of single green can also carry out the detection of concentration.In other realities It applies in example (when especially detecting other in embodiment of type solution), the intensity of single blue can also carry out the inspection of concentration It surveys.
Table one
Referring to figure 5. and Fig. 6, Fig. 5 are painted the flow chart of detection method according to another embodiment, and Fig. 6 is painted according to one The schematic diagram of one of embodiment grouping model 900.Grouping model 900 is, for example, an opposite conduction type neural network (Counter- Propagation Network, CPN) model.In the step S130 ' of another embodiment, concentration detecting unit 130 can be according to According to the first intensity S11 and the second intensity S12, with grouping model 900, obtain measured object at point concentration (e.g. liquid LQ1 Concentration C N1).As shown in fig. 6, nodes X 1, Xi, Xn indicate that the first intensity S11, second intensity S12 etc. (may also comprise other Parameter, such as environment temperature, ambient humidity), node Y1, Yi, Ym indicate known concentration C N1.Node R 1, R2, R3 are hiding Node layer.Node Y1*, Yi*, Ym* of output layer then represent the result after grouping (the concentration C N1 after analyzing).
By grouping model 900, concentration detecting unit 130 can also smoothly analyze concentration C N1.Also, in an embodiment In, grouping model 900 can be after analysis each time, and feedback is analyzed as a result, to carry out the amendment of model.
The schematic diagram of detection device 200 according to another embodiment is painted referring again to Fig. 7 and Fig. 8, Fig. 7, Fig. 8 is painted root According to the flow chart of the detection method of another embodiment.In this embodiment, in addition to optical check unit 210, optical analysis unit 220 And other than concentration detecting unit 230, detection device 200 further includes an environment sensing unit 240.Environment sensing unit 240 is for example It is an optical sensor, a humidity sensor, a temperature sensor.Optical analysis unit 220 analyzes the last the first for image IM2 Spend S21, the second intensity S22.(e.g. environment temperature, environment are bright to sense an environmental parameter ES2 for environment sensing unit 240 Degree or ambient humidity).In step S230, concentration detecting unit 230 is according to environmental parameter ES2, the first intensity S21 and the last the second Spend S22, obtain measured object at point concentration (the e.g. concentration C N2 of liquid LQ2).In this embodiment, Concentration Testing list Influence of the member 230 more in view of the variation of environmental parameter ES2 to testing result.That is, step S230 can use it is multiple Regression analysis/multiple regression analysis (Multiple regression analysis) increases the factor of consideration, to increase inspection Survey accuracy.
Referring again to Fig. 9, it is painted the schematic diagram of detection device 300 according to another embodiment.In this embodiment, light Inspection unit 310 is learned directly to shoot a processing procedure slot CT3.Since the present embodiment is not titration or atomic absorption spectrography (AAS), therefore It is not necessary that liquid LQ3 is taken out, so that it may directly shoot image IM3 using optical check unit 310, then pass through optical analysis list Member 320 analyzes the first intensity S31 and the second intensity S32.
In the present embodiment, detection device 300 further includes a control unit 340 and an adding unit 350.Control unit 340 are, for example, a circuits, a chip, a computer, a circuit board, a program module or store one depositing for array program code Storage device.Control unit 340 can be stored in the program or an algorithm of a memory.When setting out program or algorithm Yu Yiwei Processor (microprocessor), a chip (chip), a processor, a circuit, a computer, a circuit board, a program Module or the storage device for storing array program code are i.e. executable.Adding unit 350 be, for example, flow control valve or One helps out with money.After control unit 340 receives the concentration C N3 that concentration detecting unit 330 exports, that is, it can determine whether concentration C N3 meets Standard.
If concentration C N3 is gradually decreased and down to when not being inconsistent standardization, then control unit 340 with the progress of electroplating process A control signal CM3 can be exported immediately to adding unit 350, add copper ion to control adding unit 350.
In one embodiment, detection device 300 may include a light supply apparatus, and foundation liquid LQ3 (such as: in electroplate liquid Each ingredient) spectral characteristic, light supply apparatus optionally exports the coloured light of different-waveband, such as: it is wide band light (such as white light), narrow Frequency light (such as feux rouges, blue light or green light) or non-visible light light (such as infrared light, ultraviolet light).It similarly, can also be according to liquid The spectral characteristic of LQ3, also optionally collocation can respond different spectral signal to the optical analysis unit 320 of detection device 300 Sensing device.
In another embodiment, detection device 300 more can be using indicator (such as: phenolphthalein).Detection device 300 can be fast The concentration conversion that speed will test out goes out to control signal CM3 and feeds back to adding unit for signal CM3 is controlled through control unit 340 350, wherein control signal CM3 is associated with addition liquid measure.Wherein, tested ingredient is, for example, the copper ion concentration of electro-coppering, gloss Agent is at the concentration etc. divided, however, the present invention is not limited thereto.
It please join Figure 10, be painted the schematic diagram of detection device 400 according to another embodiment.In an embodiment, measured object OT4 can not be limited to liquid, and measured object OT4 may be, for example, to dye cloth, print cloth or paper etc..In this embodiment, detection device 400 Light source LD4 and optical check unit 410 may be disposed at the opposite sides of measured object OT4, and light source LD4 provides an incident light L41 and enters It is incident upon measured object OT4, optical check unit 410, which is received, penetrates light L42 through measured object OT4.
Optical analysis unit 420 receives the image IM4 (color/spectrum signal) that optical check unit 410 exports, through operation It obtains the component content signal S41 in measured object OT4 (e.g. dying cloth), and this component content signal S41 is exported to control Unit 440.
Control unit 440 receives mentioned component cont signal S41, and is converted to control signal CM4 and exports to fixing seat Brake 450 to drive measured object OT4 (e.g. dying cloth) to be again dipped into processing procedure slot CT4, repeat above-mentioned sensing, fortune The processes such as calculation, control, until the resulting component content signal S41 of operation reaches a fair receipts value or a fair receipts range.
It please join Figure 11, be painted the schematic diagram of detection device 400 ' according to another embodiment.In this embodiment, it detects The light source LD4 and optical check unit 410 of device 400 may be disposed at the same side of measured object OT4, and it is incident that light source LD4 provides one Light L43 is incident to measured object OT4, and optical check unit 410 receives the reflected light L44 through measured object OT4.
Optical analysis unit 420 receives the image IM4 (color/spectrum signal) that optical check unit 410 exports, through operation It obtains the component content signal S41 in measured object OT4 (e.g. dying cloth), and this component content signal S41 is exported to control Unit 440.
Control unit 440 receives mentioned component cont signal S41, and is converted to control signal CM4 and exports to fixing seat Brake 450 to drive measured object OT4 (e.g. dying cloth) to be again dipped into processing procedure slot CT4, repeat above-mentioned sensing, fortune The processes such as calculation, control, until the resulting component content signal S41 of operation reaches a fair receipts value or a fair receipts range.
Although liquid LQ1, LQ2, LQ3 of above-described embodiment are explained by taking copper ion solution or electroplate liquid as an example.However, liquid The type of body does not limit to the present invention.As long as it is necessary to the concentration to liquid to be monitored in wet process, applicable The detection device and method of invention.Alternatively, measured object OT4 can not be limited to liquid, measured object OT4 may be, for example, to dye cloth, print cloth Or paper etc..In an embodiment, above-mentioned detection device 300 and detection method can also be applied to detection biology biofluid (such as: Urine, blood etc.), and by acquired big data to establish the primary colors luminous intensity of biofluid and the recurrence of liquid component concentration Model.By this detection device 300 and the constituent concentration of detection method dynamic/real-time detection biofluid, and according to this, tracking should The situation of biology.In one embodiment, above-mentioned detection device 400,400 ' and detection method can also be applied to the processing procedure dyed cloth, with Monitor whether the component content signal S41 to dye cloth reaches fair receipts value or permit receipts range.
According to above-mentioned various embodiments, detection device and method can be reached dense by optical check unit on production line The real-time detection of degree, and processing procedure is made to be able to carry out amendment in real time and automatic addition.
Although however, it is not to limit the invention in conclusion the present invention is disclosed as above with embodiment.Institute of the present invention Category field technical staff without departing from the spirit and scope of the present invention, when can be used for a variety of modifications and variations.Therefore, of the invention Protection scope when view the appended claims confining spectrum subject to.

Claims (14)

1. a kind of detection device, which is characterized in that the detection device includes:
Optical check unit, to extract the image of measured object;
Optical analysis unit, to analyze the first intensity of the first primary colors of the image and the second intensity of the second primary colors;And
Concentration detecting unit, to depending at least on first intensity and second intensity, to detect regression curve or grouping model, Obtain the concentration of the ingredient of the measured object.
2. detection device as described in claim 1, wherein the concentration detecting unit is according to first intensity and second intensity Summation, obtain the concentration of the ingredient of the measured object.
3. detection device as described in claim 1, wherein the measured object is liquid, which includes copper ion solution, this One primary colors is red, which is green.
4. detection device as described in claim 1, wherein the optical analysis unit is carried out for multiple pixel groups of the image Analysis, respectively the pixel group includes adjacent multiple pixels.
5. detection device as claimed in claim 4, wherein at least 2 groups in these pixel groups are mutually non-conterminous.
6. detection device as described in claim 1, further includes:
Environment sensing unit, to sense environmental parameter;
Wherein, which obtains being somebody's turn to do for the measured object according to the environmental parameter, first intensity and second intensity The concentration of ingredient.
7. detection device as described in claim 1, wherein the grouping model is opposite conduction type Connectionist model.
8. a kind of detection method, which is characterized in that the detection method includes:
The image of measured object is extracted with optical check unit;
Analyze the first intensity of the first primary colors of the image and the second intensity of the second primary colors;And
Depending at least on first intensity and second intensity, to detect regression curve or grouping model, obtain the measured object at The concentration divided.
9. detection method as claimed in claim 8, wherein in the step of obtaining concentration of the ingredient of the measured object, according to According to the summation of first intensity and second intensity, the concentration of the ingredient of the measured object is obtained.
10. detection method as claimed in claim 8, wherein the measured object is liquid, which includes copper ion solution, this One primary colors is red, which is green.
11. detection method as claimed in claim 8, wherein the step of analyzing first intensity and second intensity of the image In, it is analyzed for multiple pixel groups of the image, respectively the pixel group includes adjacent multiple pixels.
12. detection method as claimed in claim 11, wherein at least 2 groups in these pixel groups are mutually non-conterminous.
13. detection method as claimed in claim 8, further includes:
Sense environmental parameter;
Wherein, in the step of obtaining the concentration of the ingredient of the measured object, according to the environmental parameter, first intensity and this Two intensity obtain the concentration of the ingredient of the measured object.
14. detection method as claimed in claim 8, wherein in the step of obtaining concentration of the ingredient of the measured object, The grouping model is opposite conduction type Connectionist model.
CN201910008428.3A 2018-01-05 2019-01-04 Detection device and detection method Pending CN110006895A (en)

Applications Claiming Priority (4)

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US201862613778P 2018-01-05 2018-01-05
US62/613,778 2018-01-05
TW107135836 2018-10-11
TW107135836A TWI670485B (en) 2018-01-05 2018-10-11 Detection device and detection method

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