CN110005809B - Device for sealing vacuum electronic device - Google Patents
Device for sealing vacuum electronic device Download PDFInfo
- Publication number
- CN110005809B CN110005809B CN201910221516.1A CN201910221516A CN110005809B CN 110005809 B CN110005809 B CN 110005809B CN 201910221516 A CN201910221516 A CN 201910221516A CN 110005809 B CN110005809 B CN 110005809B
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- CN
- China
- Prior art keywords
- protective cover
- shell
- sealing
- cover shell
- rubber ring
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
- F04B39/12—Casings; Cylinders; Cylinder heads; Fluid connections
- F04B39/123—Fluid connections
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/02—Sealings between relatively-stationary surfaces
- F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
- F16J15/10—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing
- F16J15/104—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing characterised by structure
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Gasket Seals (AREA)
Abstract
The invention relates to the technical field of vacuum sealing equipment, in particular to a device for sealing a vacuum electronic device, which comprises: the protective cover comprises a protective cover shell (1), an inner rubber ring (3), an inner fixed ring (4) and a shell (6); the protective cover shell (1) is of a cylindrical structure, and one end of the protective cover shell is provided with a round hole for connecting a pipeline (5); a valve (2) is arranged on the pipeline (5); the other end of the protective cover shell (1) is open, an annular boss (9) extends outwards from the open, and the annular boss and the protective cover shell (1) are of an integrated structure; an inner fixed ring (4) is arranged on the outer end face of the annular boss (9), and an inner rubber ring (3) is arranged on the inner side of the inner fixed ring (4); one end of the shell (6) is matched and connected with the open end of the protective cover shell (1) to form sealing; the vacuum electronic device (10) is placed in the shell (6) but does not contact the inner wall of the protective cover shell (1), and a closed space is formed in the protective cover shell (1).
Description
Technical Field
The invention belongs to the technical field of vacuum sealing equipment, and particularly relates to a device for sealing a vacuum electronic device.
Background
At present, for vacuum electronic devices, such as vacuum ionization gauges, residual gas analyzers, electron sources, traveling wave tubes, and the like, these vacuum electronic devices are required to operate not only in a vacuum environment, but also in a vacuum environment during production, storage, and transportation of the vacuum electronic devices, so that the operating performance thereof is not affected. However, the conventional device for sealing the vacuum electronic device is simply connected through threads, has no sealing mechanism, and has no valve or pipeline, so that a gap is large, the leakage rate is high, the internal sealing cannot be maintained, and the internal device is greatly influenced by the external environment.
Disclosure of Invention
The invention aims to solve the defects of the existing sealing device, and provides the sealing device for the vacuum electronic device.
In order to achieve the above object, the present invention provides an apparatus for sealing a vacuum electronic device, the apparatus comprising: the protective cover comprises a protective cover shell, an inner rubber ring, an inner fixed ring and a shell;
the protective cover shell is of a cylindrical structure, and one end of the protective cover shell is provided with a round hole for connecting a pipeline; the pipeline is provided with a valve for opening or closing the gas circuit; the other end of the protective cover shell is an opening, and an annular boss extends outwards from the opening and is of an integrated structure with the protective cover shell; an inner fixed ring is arranged on the outer end face of the annular boss, and an inner rubber ring is arranged on the inner side of the inner fixed ring; one end of the shell is matched and connected with the open end of the protective cover shell to form sealing; the vacuum electronic device is placed in the shell but does not contact the inner wall of the protective cover shell, and a closed space is formed in the protective cover shell and serves as a vacuum environment.
As one improvement of the technical scheme, the inner rubber ring and the inner fixed ring are both of annular structures, and the annular radius of the inner fixed ring is larger than that of the inner sealing ring.
As one improvement of the technical scheme, one end of the shell is connected with the open end of the protective cover shell in a threaded fit mode, and a sealing step of an annular structure extends outwards on the outer wall of the shell at the connection position; the sealing step is arranged below the inner rubber ring and is tightly compacted and connected with the inner rubber ring for sealing the protective cover shell. Wherein, one end of the shell is provided with an external thread, the inner wall of the opening of the protective cover shell is provided with an internal thread, and the shell is connected with the protective cover shell in a thread fit way; the sealing step is arranged at the end part close to the shell with the external thread and is tightly connected with the inner rubber ring and the inner fixing ring.
As one improvement of the technical scheme, the annular radius of the sealing step is the same as that of the inner rubber ring, and the outer circumferential surface of the sealing step is tightly contacted with the inner circumferential surface of the inner fixed ring; through the inner rubber ring, the inner fixed ring and the sealing step, the protective cover shell forms a complete sealing structure at the opening, which is beneficial to forming a sealed vacuum environment and has good air tightness.
As one improvement of the technical scheme, the shell is of a hollow cylindrical structure; and the axial length of the housing is dependent on the length of the vacuum electronics with the seal.
As an improvement of the above technical solution, the valve is provided with a switch, and the gas path is correspondingly opened or closed by rotating the switch clockwise or counterclockwise.
Compared with the prior art, the invention has the beneficial effects that:
the sealing device of the invention forms a complete sealing structure by tightly compacting the inner rubber ring and the sealing step and tightly connecting the inner rubber ring and the annular boss, thereby ensuring that a closed vacuum environment is formed inside the protective cover shell and ensuring that the protective cover shell has good air tightness.
Drawings
FIG. 1 is a schematic structural view of an apparatus for sealing vacuum electronic devices of the present invention;
FIG. 2 is a cross-sectional view of an apparatus for sealing vacuum electronic devices of the present invention;
fig. 3 is a schematic structural view of sealing a vacuum electronic device using an apparatus for sealing a vacuum electronic device according to the present invention.
Reference numerals:
1. protective cover shell 2 and valve
3. Inner rubber ring 4 and inner fixing ring
5. Pipeline 6, casing
7. Sealing step 8 and switch
9. Annular boss 10 and vacuum electronic device
Detailed Description
The invention will now be further described with reference to the accompanying drawings.
As shown in fig. 1 and 2, the present invention provides an apparatus for sealing a vacuum electronic device, the apparatus comprising: the protective cover comprises a protective cover shell 1, an inner rubber ring 3, an inner fixed ring 4 and a shell 6;
as shown in fig. 2, the protective cover housing 1 is cylindrical, and a circular hole is formed at the top end thereof for connecting a pipeline 5; the pipeline 5 is provided with a valve 2 for opening or closing the gas circuit; the bottom end of the protective cover shell 1 is open, and an annular boss 9 extends outwards from the open and is integrated with the protective cover shell 1; an inner fixed ring 4 is arranged on the outer end face of the annular boss 9, and an inner rubber ring 3 is arranged on the inner side of the inner fixed ring 4; the top end of the shell 6 is matched and connected with the open end of the protective cover shell 1 to form sealing; as shown in fig. 3, the vacuum electronic device 10 is placed inside the housing 1 without contacting the inner wall of the protective cover housing 1, and forms a closed vacuum space inside the protective cover housing 1 as a vacuum environment.
As one improvement of the above technical solution, the inner rubber ring 3 and the inner fixed ring 4 are both of an annular structure, and the annular radius of the inner fixed ring 3 is greater than that of the inner seal ring 4.
As one improvement of the above technical solution, as shown in fig. 2, the top end of the shell 6 is connected with the open end of the protective cover shell 1 by screw thread fit, and at the connection point, a sealing step 7 of annular structure extends outwards on the outer wall of the shell 6; the sealing step 7 is arranged below the inner rubber ring 3 and is tightly compacted and connected with the inner rubber ring 3 for completing the sealing of the protective cover shell 1. Wherein, the top end of the shell 6 is provided with an external thread, the inner wall of the opening of the protective cover shell 1 is provided with an internal thread, and the shell 6 is connected with the protective cover shell 1 in a thread fit way; the sealing step 7 is arranged at the end part close to the shell 6 with the external thread and is tightly connected with the inner rubber ring 3 and the inner fixing ring 4.
As one improvement of the above technical solution, the annular radius of the sealing step 7 is the same as the annular radius of the inner rubber ring 3, and the outer circumferential surface of the sealing step 7 is in close contact with the inner circumferential surface of the inner fixing ring 4; through the inner rubber ring 3, the inner fixed ring 4 and the sealing step 7, the protective cover shell 1 forms a complete sealing structure at the opening, which is beneficial to forming a sealed vacuum environment and has good air tightness.
As one improvement of the above technical solution, the housing 6 has a hollow cylindrical structure; and the axial length of the housing 6 depends on the length of the vacuum electronics 10 with the seal.
As one improvement of the above technical solution, the valve 2 is provided with a switch 8, and the gas path is correspondingly opened or closed by rotating the switch 8 clockwise or counterclockwise, so as to complete the function of inflating the interior of the protective cover housing 1; meanwhile, the pipeline 5 is also connected with a vacuum pumping device, and air or gas in the protective cover shell 1 is pumped out through the valve 2, so that a vacuum environment is formed in the protective cover shell 1.
Finally, it should be noted that the above embodiments are only used for illustrating the technical solutions of the present invention and are not limited. Although the present invention has been described in detail with reference to the embodiments, it will be understood by those skilled in the art that various changes may be made and equivalents may be substituted without departing from the spirit and scope of the invention as defined in the appended claims.
Claims (6)
1. An apparatus for sealing a vacuum electronic device, the apparatus comprising: the protective cover comprises a protective cover shell (1), an inner rubber ring (3), an inner fixed ring (4) and a shell (6);
the protective cover shell (1) is of a cylindrical structure, and one end of the protective cover shell is provided with a round hole for connecting a pipeline (5); a valve (2) is arranged on the pipeline (5); the other end of the protective cover shell (1) is open, an annular boss (9) extends outwards from the open, and the annular boss and the protective cover shell (1) are of an integrated structure; an inner fixed ring (4) is arranged on the outer end face of the annular boss (9), and an inner rubber ring (3) is arranged on the inner side of the inner fixed ring (4); one end of the shell (6) is matched and connected with the open end of the protective cover shell (1) to form sealing; the vacuum electronic device (10) is placed in the shell (6) but does not contact the inner wall of the protective cover shell (1), and a closed space is formed in the protective cover shell (1).
2. The device for sealing vacuum electronic devices according to claim 1, wherein the inner rubber ring (3) and the inner fixing ring (4) are both of annular structure, and the annular radius of the inner fixing ring (4) is larger than that of the inner rubber ring (3).
3. The device for sealing vacuum electronic devices according to claim 1, wherein one end of the housing (6) is connected with the open end of the protective cover housing (1) by screw-fitting, and at the connection, a sealing step (7) of annular structure extends outwards on the outer wall of the housing (6); the sealing step (7) is arranged below the inner rubber ring (3) and is tightly connected with the inner rubber ring (3) in a compaction manner.
4. The apparatus for sealing vacuum electronic device as claimed in claim 3, wherein the annular radius of the sealing step (7) is the same as the annular radius of the inner rubber ring (3), and the outer circumferential surface of the sealing step (7) is in close contact with the inner circumferential surface of the inner fixing ring (4).
5. The device for sealing vacuum electronic devices according to claim 1, wherein the housing (6) is a hollow cylindrical structure.
6. The device for sealing vacuum electronic devices according to claim 1, wherein the valve (2) is provided with a switch (8).
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201910221516.1A CN110005809B (en) | 2019-03-22 | 2019-03-22 | Device for sealing vacuum electronic device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201910221516.1A CN110005809B (en) | 2019-03-22 | 2019-03-22 | Device for sealing vacuum electronic device |
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CN110005809A CN110005809A (en) | 2019-07-12 |
CN110005809B true CN110005809B (en) | 2020-04-14 |
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CN201910221516.1A Active CN110005809B (en) | 2019-03-22 | 2019-03-22 | Device for sealing vacuum electronic device |
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Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102324360A (en) * | 2011-08-16 | 2012-01-18 | 金海平 | A kind of vacuum gap pipe |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4971368A (en) * | 1990-01-17 | 1990-11-20 | The Devilbiss Company | Seal for connecting a tube to a housing member and method for forming same |
JP2001349432A (en) * | 2000-06-09 | 2001-12-21 | Toyota Industries Corp | Seal structure |
JP2010144199A (en) * | 2008-12-17 | 2010-07-01 | Canon Anelva Corp | Vacuum vessel, vacuum treatment apparatus having vacuum vessel, and method for manufacturing vacuum vessel |
CN205786469U (en) * | 2016-06-17 | 2016-12-07 | 广州杰特伟生物科技有限公司 | A kind of electrophresis apparatus |
CN106229249B (en) * | 2016-07-25 | 2018-10-02 | 中国科学院国家空间科学中心 | A kind of vibration absorber for installing photomultiplier |
CN107511847B (en) * | 2017-10-13 | 2020-11-03 | 北京工业大学 | Tail end gas circuit sealing device applied to tail end turnable wafer robot |
CN107742802A (en) * | 2017-10-18 | 2018-02-27 | 苏州雷目电子科技有限公司 | A kind of waterproof connector structure of electronic product |
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2019
- 2019-03-22 CN CN201910221516.1A patent/CN110005809B/en active Active
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102324360A (en) * | 2011-08-16 | 2012-01-18 | 金海平 | A kind of vacuum gap pipe |
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