CN109994396B - Carrier plate with off-line vacuum degree maintaining function - Google Patents
Carrier plate with off-line vacuum degree maintaining function Download PDFInfo
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- CN109994396B CN109994396B CN201910266021.0A CN201910266021A CN109994396B CN 109994396 B CN109994396 B CN 109994396B CN 201910266021 A CN201910266021 A CN 201910266021A CN 109994396 B CN109994396 B CN 109994396B
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- 238000001179 sorption measurement Methods 0.000 claims abstract description 23
- 238000003860 storage Methods 0.000 claims description 14
- 238000001514 detection method Methods 0.000 claims description 8
- 230000009471 action Effects 0.000 claims description 3
- 230000014759 maintenance of location Effects 0.000 claims 2
- 238000000034 method Methods 0.000 abstract description 27
- 230000008569 process Effects 0.000 abstract description 25
- 210000004027 cell Anatomy 0.000 description 17
- 230000001276 controlling effect Effects 0.000 description 6
- 230000000875 corresponding effect Effects 0.000 description 5
- 238000012423 maintenance Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000010248 power generation Methods 0.000 description 3
- 238000011161 development Methods 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 238000004806 packaging method and process Methods 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 1
- 238000007792 addition Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 210000003850 cellular structure Anatomy 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000011112 process operation Methods 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 230000008054 signal transmission Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
- H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
Abstract
The invention relates to an auxiliary tool for producing a solar cell panel, in particular to a carrier plate with an off-line vacuum degree maintaining function, and belongs to the field of industrial automation. The carrier plate with the off-line vacuum degree maintaining function comprises a carrier plate body, wherein a vacuum cavity is arranged in the carrier plate body, and a vacuum generating device is arranged on the carrier plate body and is used for enabling the vacuum cavity to form vacuum so as to adsorb materials on the carrier plate body through adsorption. The vacuum generating device sets up on the carrier plate body in this scheme for the carrier plate body has the function that off-line vacuum kept, promptly, and the carrier plate body can circulate between each process to, still can keep vacuum adsorption function when circulation between each process, for prior art, the adsorption capacity of carrier plate body when each process circulation can be guaranteed effectively to this scheme, thereby has improved solar cell panel's equipment precision of assembling, and equipment easy to maintain of equipment solar cell panel.
Description
Technical Field
The invention relates to an auxiliary tool for producing a solar cell panel, in particular to a carrier plate with an off-line vacuum degree maintaining function, and belongs to the field of industrial automation.
Background
The solar photovoltaic industry has been developed for decades, the power generation efficiency of the conventional series welded assembly has basically reached the limit, and how to further improve the power generation efficiency of the photovoltaic assembly is a basic direction of industry development. The research directions for improving the power generation efficiency of the components in the market at present mainly comprise two directions of improving the conversion efficiency of the solar cell and optimizing the packaging form of the components, namely the high efficiency of the back contact cell and no main grid of the back contact cell, and the packaging form of the components with no welding strip structure enables the back contact cell component to have considerable advantages in the aspect of finding efficiency compared with the traditional components, so that the back contact cell must occupy a certain position in the future photovoltaic development.
In the preparation process of the back contact battery, a carrier plate is required to be used as a carrier to circulate among all modules of the equipment, the carrier plate stays in each module, and each module is finally manufactured to complete a module after corresponding process steps are completed. The characteristics of the back contact battery require that the carrier plate fixes the position of the component on the carrier plate, so that vacuum adsorption is needed, but because the carrier plate is circulated among all modules, the vacuum adsorption device in the prior art has a complex structure and cannot generate off-line vacuum adsorption, so that the production equipment for assembling the solar cell panel has a complex structure and is difficult to maintain.
Disclosure of Invention
The invention aims to provide a carrier plate with an off-line vacuum degree maintaining function so as to solve the technical problem that the carrier plate for carrying a solar cell panel in the prior art cannot realize the off-line vacuum adsorption function.
The technical scheme adopted by the invention for solving the technical problems is as follows:
the carrier plate with the off-line vacuum degree maintaining function comprises a carrier plate body, wherein a vacuum cavity is arranged in the carrier plate body, an adsorption hole is formed in one side face of the carrier plate body, the adsorption hole is communicated with the vacuum cavity, a vacuum generating device which enables the vacuum cavity to generate vacuum is arranged on the carrier plate body, the vacuum generating device comprises a gas storage tank, a vacuum generator, a gas nozzle, a vacuum breaking valve, a vacuum degree detector for detecting the vacuum degree in the vacuum cavity, a gas inlet valve and a controller, the gas nozzle is communicated with the gas storage tank through the gas inlet valve, the gas storage tank is communicated with the vacuum cavity through the vacuum generator, the gas storage tank is communicated with the outside through the vacuum breaking valve, the gas inlet valve and the vacuum generator are all controlled to work by the controller.
The carrier plate with the off-line vacuum degree maintaining function comprises a carrier plate body, wherein a vacuum cavity is arranged in the carrier plate body, and a vacuum generating device is arranged on the carrier plate body and is used for enabling the vacuum cavity to form vacuum so as to adsorb materials on the carrier plate body through adsorption. The vacuum generating device sets up on the carrier plate body in this scheme for the carrier plate body has the function that off-line vacuum kept, namely, the carrier plate body can circulate between each process to, still can keep vacuum adsorption function when the circulation between each process, for prior art, the adsorption capacity of carrier plate body when each process circulation can be guaranteed effectively to this scheme, thereby has improved solar cell panel's equipment structure simple, easy to maintain, moreover.
Preferably, the carrier plate body comprises a first part with a groove body and a second part covering the groove body to form a vacuum cavity, and the adsorption holes are uniformly distributed on the second part.
The carrier plate body comprises two parts, and this scheme makes the carrier plate body easily process, has reduced the manufacturing cost of carrier plate body.
Preferably, the carrier plate further comprises an air source and an air source opening and closing valve, the air source is communicated with the air tap through the air source opening and closing valve, and the air source opening and closing valve are controlled by the controller to work.
The air source is convenient to control, and the stability of the carrier plate in the working process is improved.
Preferably, the air source switch valve is fixed on a frame matched with the carrier plate.
Preferably, the vacuum degree sensor comprises a vacuum degree detection valve, a photoelectric sensor, a reflector and a driver for driving the reflector to reciprocate, the photoelectric sensor is communicated with the controller, the driver is controlled to work by the vacuum degree detection valve, the driver controls the reflector to reciprocate according to the action of the vacuum degree detection valve, the photoelectric sensor detects signals fed back by the reflector and transmits the detected signals to the controller, and the photoelectric sensor is fixed on a rack matched with the carrier plate.
The vacuum sensor is reasonable in structure, the reflector and the photoelectric sensor are arranged, so that the vacuum sensor is flexible in arrangement position, and the detection precision of the vacuum sensor is improved.
Preferably, the driver is a driving cylinder, the driving cylinder comprises a cylinder body and a piston rod, the reflector is fixed on the piston rod, and the driving cylinder further comprises a reset spring for resetting the piston rod.
The reset spring is favorable for resetting the piston rod, and the stability of the driver in the working process is improved.
Preferably, one end of the return spring is fixedly connected with the piston rod, the other end of the return spring is fixed on the carrier plate body, a positioning block for positioning the return spring is fixed on the carrier plate body, and the return spring is fixed on the positioning block through a screw.
The setting of the positioning block enables the setting position of the reset spring to be flexible, and is beneficial to the maintenance of the carrier plate.
Preferably, the vacuum breaking valve comprises a valve body and a first execution cylinder for controlling the valve body to work, the first execution cylinder is controlled by the controller to work, and the first execution cylinder is fixed on a rack matched with the carrier plate.
The arrangement of the first execution cylinder enables the vacuum breaking valve to be convenient to control, and stability of the carrier plate in the working process is improved.
Preferably, the air inlet valve comprises a valve component and a second execution cylinder for controlling the valve component to work, the second execution cylinder is controlled by the controller to work, and the second cylinder is fixed on a rack matched with the carrier plate.
The arrangement of the second execution cylinder improves the stability of the carrier plate in the working process.
Preferably, the opening and closing states of the air inlet valve and the vacuum breaking valve are opposite, and the opening and closing states of the air inlet valve and the vacuum breaking valve are opposite through a pilot air path.
The performance of the carrier plate is optimized, and the carrier plate is easy to maintain.
Compared with the prior art, the invention has the following advantages and effects:
1. be provided with vacuum generator on the carrier plate body, this scheme makes the carrier plate body can realize off-line vacuum function, and the carrier plate still can keep vacuum adsorption function when the circulation between each process promptly.
2. The vacuum breaking valve is mainly used for controlling the state of the vacuum cavity, namely, after the vacuum breaking valve acts, the vacuum cavity can not maintain vacuum any more, and the performance of the carrier plate is optimized.
Drawings
In order to more clearly illustrate the embodiments of the invention or the technical solutions of the prior art, the drawings which are used in the description of the embodiments or the prior art will be briefly described, it being obvious that the drawings in the description below are only some embodiments of the invention, and that other drawings can be obtained according to these drawings without inventive faculty for a person skilled in the art.
Fig. 1 is an isometric view of the present invention.
FIG. 2 is a schematic diagram of the present invention.
Description of the reference numerals:
1. the vacuum test device comprises a carrier plate body, 2, a vacuum cavity, 3, an adsorption hole, 4, a gas storage tank, 5, a vacuum generator, 6, an air tap, 7, a vacuum breaking valve, 8, a vacuum degree detector, 9, an air inlet valve, 10, a first part, 11, a second part, 12, an air source opening and closing valve, 13, a vacuum degree detection valve, 14, a photoelectric sensor, 15, a reflector, 16, a driver, 17, a cylinder body, 18, a piston rod, 19, a return spring, 20 and a positioning block.
Detailed Description
The present invention will be described in further detail with reference to the following examples, which are illustrative of the present invention and are not intended to limit the present invention thereto.
Example 1
The carrier plate with the off-line vacuum degree maintaining function is used for assembling the solar cell panel, namely, carrying the solar cell panel to circulate among the working procedures and adsorbing the solar cell panel positioned on the carrier plate so as to improve the positioning accuracy of the solar cell panel.
As shown in fig. 1 and 2, the carrier plate comprises a carrier plate body 1, a vacuum cavity 2 is arranged in the carrier plate body 1, an adsorption hole 3 is arranged on one side surface of the carrier plate body 1, the adsorption hole 3 is communicated with the vacuum cavity 2, a solar cell panel placed on the carrier plate covers all the adsorption holes 3, and when the vacuum cavity 2 generates vacuum degree, the adsorption holes 3 adsorb the solar cell panel, so that the solar cell panel has higher position precision relative to the carrier plate body 1, and the position of the solar cell panel is prevented from changing in the flow process of the carrier plate.
As shown in fig. 1 and fig. 2, a vacuum generating device for generating vacuum in the vacuum chamber 2 is disposed on the carrier plate body 1, and the vacuum generating device includes a gas storage tank 4, a vacuum generator 5, a gas nozzle 6, a vacuum breaking valve 7, a vacuum degree detector 8 for detecting the vacuum degree in the vacuum chamber 2, a gas inlet valve 9, and a controller, where the controller may be a control system for controlling the whole solar panel assembly apparatus, and of course, the carrier plate may also be provided with an independent control structure, and the specific form of the controller is not limited, and can be freely selected by a person skilled in the art. But the communication between the control system and the controller should be ensured so that the controller can do corresponding actions according to the actual station of the carrier plate.
Referring to fig. 1 and 2, the air tap 6 is communicated with the air storage tank 4 through an air inlet valve 9, the air storage tank 4 is communicated with the vacuum cavity 2 through a vacuum generator 5, the air storage tank 4 is communicated with the outside through a vacuum breaking valve 7, the vacuum degree detector 8 is communicated with the controller, and the vacuum breaking valve 7, the air inlet valve 9 and the vacuum generator 5 are controlled to work by the controller.
The working principle of the carrier plate is described below in connection with its practical application in a device. It will be appreciated that this description is merely exemplary and is not limiting of the carrier application environment, and that the actual working environment of the carrier may be freely chosen.
Examples: after the carrier plate enters the first process module, the module can accurately position the carrier plate, and then corresponding process operation is carried out on the carrier plate, namely after the carrier plate flows to the first process module, the first process module positions the carrier plate and carries out corresponding process treatment on the solar cell panel;
after the first process module is processed, the control system controls the air inlet valve 9 to be opened, the vacuum breaking valve 7 to be closed, and compressed air enters the air storage tank 4 and the vacuum generator 5 to enable the vacuum cavity 2 to generate vacuum;
when the vacuum detector detects that the vacuum degree in the vacuum cavity 2 reaches the set value, the carrier plate can leave the first process module, at the moment, the control system enables the air inlet valve 9 to be closed, and releases the carrier plate for positioning, so that the carrier plate can continue to flow into the next process module.
When abnormal conditions occur in the actual working process and the vacuum degree of the vacuum cavity 2 needs to be manually destroyed, an operator can destroy the vacuum degree of the vacuum cavity 2 through the vacuum breaking valve 7.
The present example only briefly describes the functions of the components when the vacuum chamber 2 generates or breaks vacuum, and various valve bodies, detectors, etc. may be replaced by other structures having similar functions in actual design, which will not be described herein.
Example 2
The present embodiment describes the structure of the carrier plate body 1, and combines with embodiment 1.
As shown in fig. 1 and 2, the carrier plate body 1 includes a first portion 10 having a groove body and a second portion 11 covering the groove body to form a vacuum chamber 2, and the adsorption holes 3 are uniformly distributed on the second portion 11.
The first part 10 and the second part 11 may be adhered together, or the first part 10 and the second part 11 may be connected together by screws, and a gasket should be further provided between the first part 10 and the second part 11 to improve the sealing performance of the vacuum chamber 2.
The carrier plate body 1 is divided into two parts, so that the carrier plate body 1 is easy to process, and the manufacturing cost of the carrier plate body 1 is reduced. When the process conditions allow, the carrier plate can be integrated, the actual structure of the carrier plate is not limited, and the carrier plate can be reasonably designed according to the needs of the person skilled in the art.
Example 3
This example describes a gas source in combination with example 1 or example 2.
As shown in fig. 1 and 2, the carrier plate further comprises an air source and an air source opening and closing valve 12, the air source is mainly used for providing compressed air to the air storage tank 4, the air source is communicated with the air faucet 6 through the air source opening and closing valve 12, and both the air source and the air source opening and closing valve 12 are controlled to work by the controller. The air source switch valve is fixed on a rack matched with the carrier plate. The frame is a structure for carrying and circulating the carrier plate body 1, the frame can be formed by splicing rod pieces or plates, the specific form of the frame is not limited, and the frame can be reasonably designed according to the working environment by a person skilled in the art.
The air source and the air source opening and closing valve 12 can be connected through corresponding pipelines, so that the air source and the air source opening and closing valve 12 are flexible in setting positions, and the maintenance of the carrier plate is facilitated.
Example 4
The present embodiment describes the structure of the vacuum sensor, and may be combined with any of the above embodiments.
Referring to fig. 1 and 2, the vacuum sensor includes a vacuum detecting valve 13, a photoelectric sensor 14, a reflector 15, and a driver 16 for driving the reflector 15 to reciprocate, the photoelectric sensor 14 communicates with the controller, the driver 16 is controlled by the vacuum detecting valve 13 to work, the driver 16 controls the reflector 15 to reciprocate according to the action of the vacuum detecting valve 13, the photoelectric sensor 14 detects a signal fed back by the reflector 15 and transmits the detected signal to the controller, and the photoelectric sensor 14 is fixed on a frame matched with the carrier plate. The reflector 15 may be a mirror that reflects light.
The driver 16 is a driving cylinder, the driving cylinder comprises a cylinder body 17 and a piston rod 18, the reflector 15 is fixed on the piston rod 18, and the driving cylinder further comprises a reset spring 19 for resetting the piston rod 18.
Other mechanisms for outputting linear motion, such as a linear motor, can be used instead of the driving cylinder. The specific structure thereof is not limited.
One end of the return spring 19 is fixedly connected with the piston rod 18, the other end of the return spring 19 is fixed on the carrier plate body 1, a positioning block 20 for positioning the return spring 19 is fixed on the carrier plate body 1, and the return spring 19 is fixed on the positioning block 20 through a screw.
The reset spring 19 can be fixed on the piston rod 18 through a screw, and a guide post for guiding the spring can be further arranged on the positioning block 20, the guide post does not affect the stroke of the piston rod 18, and the arrangement of the guide post is mainly used for guiding the spring, so that the spring is prevented from generating plastic deformation in the long-term use process, and the service life of the spring is prolonged.
The vacuum degree sensor can also be of other structures, and is only used for detecting the vacuum degree of the vacuum cavity 2, acquiring a signal and sending the signal to the controller, so that when the vacuum degree sensor does not need to consider the working environment, the vacuum degree sensor can also directly acquire the vacuum degree of the vacuum cavity 2 and directly send the signal to the controller, thereby simplifying the structure of the vacuum degree sensor and facilitating the maintenance of the carrier plate.
Example 5
The present embodiment describes the manner of operation of the related accessories, and may be combined with any of the above embodiments.
The vacuum breaking valve 7 comprises a valve body and a first execution cylinder for controlling the valve body to work, the first execution cylinder is controlled by the controller to work, and the first execution cylinder is fixed on a rack matched with the carrier plate.
The air inlet valve 9 comprises a valve component and a second execution cylinder for controlling the valve component to work, the second execution cylinder is controlled by the controller to work, and the second cylinder is fixed on a rack matched with the carrier plate.
The opening and closing states of the air inlet valve 9 and the vacuum breaking valve 7 are opposite, and the opening and closing states of the air inlet valve 9 and the vacuum breaking valve 7 are opposite through a pilot air path.
The first actuating cylinder and the second actuating cylinder can also be replaced by other mechanisms for outputting linear motion, such as a linear motor, etc., the specific form is not limited, and the person skilled in the art can freely select.
In the above scheme, the valve body structures are connected through pipelines to form an effective air channel, and the specific connection mode is not limited, and refers to the connection mode of the air channel in the prior art.
In addition, in the above-mentioned scheme, the driving mode of each valve structure and the signal transmission mode, for example, the arrangement of the photoelectric sensor 14, etc. are only to meet the requirement of the off-line vacuum degree of the carrier plate, that is, to meet the requirement that the carrier plate can be circulated between any processes, and maintain the vacuum degree. The above description is not intended to limit the embodiments themselves, but merely to provide one embodiment that may be implemented.
In addition, the specific embodiments described in the present specification may differ in terms of parts, shapes of components, names, and the like. All equivalent or simple changes of the structure, characteristics and principle according to the inventive concept are included in the protection scope of the present invention. Those skilled in the art may make various modifications or additions to the described embodiments or substitutions in a similar manner without departing from the scope of the invention as defined in the accompanying claims.
Claims (8)
1. Carrier plate with off-line vacuum degree keeps function, including carrier plate body (1), characterized by: the vacuum type air conditioner comprises a carrier plate body (1), wherein a vacuum cavity (2) is arranged in the carrier plate body (1), an adsorption hole (3) is formed in one side face of the carrier plate body (1), the adsorption hole (3) is communicated with the vacuum cavity (2), a vacuum generating device which enables the vacuum cavity (2) to generate vacuum is arranged on the carrier plate body (1), the vacuum generating device comprises an air storage tank (4), a vacuum generator (5), an air tap (6), a vacuum breaking valve (7), a vacuum degree detector (8) for detecting the vacuum degree in the vacuum cavity (2), an air inlet valve (9) and a controller, the air tap (6) is communicated with the air storage tank (4) through the air inlet valve (9), the air storage tank (4) is communicated with the outside through the vacuum breaking valve (7), the vacuum breaking valve (8) is communicated with the controller, and the vacuum breaking valve (7), the air inlet valve (9) and the vacuum generator (5) are controlled to work by the controller; the vacuum degree detector comprises a vacuum degree detection valve (13), a photoelectric sensor (14), a reflector (15) and a driver (16) for driving the reflector (15) to reciprocate, wherein the photoelectric sensor (14) is communicated with the controller, the driver (16) is controlled to work by the vacuum degree detection valve (13), the driver (16) controls the reflector (15) to reciprocate according to the action of the vacuum degree detection valve (13), the photoelectric sensor (14) detects a signal fed back by the reflector (15) and transmits the detected signal to the controller, and the photoelectric sensor (14) is fixed on a rack matched with a carrier plate; the opening and closing states of the air inlet valve (9) and the vacuum breaking valve (7) are opposite, and the opening and closing states of the air inlet valve (9) and the vacuum breaking valve (7) are opposite through a pilot air passage.
2. The carrier plate with an off-line vacuum level maintaining function according to claim 1, wherein:
the support plate body (1) comprises a first part (10) with a groove body and a second part (11) covering the groove body to form a vacuum cavity (2), and the adsorption holes (3) are uniformly distributed on the second part (11).
3. The carrier plate with an off-line vacuum level maintaining function according to claim 1, wherein:
the carrier plate also comprises an air source and an air source opening and closing valve (12), wherein the air source is communicated with the air faucet (6) through the air source opening and closing valve (12), and both the air source and the air source opening and closing valve (12) are controlled to work by the controller.
4. The carrier plate with off-line vacuum retention function according to claim 3, wherein: the air source opening and closing valve (12) is fixed on a frame matched with the carrier plate.
5. The carrier plate with an off-line vacuum level maintaining function according to claim 1, wherein:
the driver (16) is a driving cylinder, the driving cylinder comprises a cylinder body (17) and a piston rod (18), the reflector (15) is fixed on the piston rod (18), and the driving cylinder further comprises a reset spring (19) for resetting the piston rod (18).
6. The carrier plate with off-line vacuum retention function of claim 5, wherein:
one end of the reset spring (19) is fixedly connected with the piston rod (18), the other end of the reset spring (19) is fixed on the carrier plate body (1), a positioning block (20) for positioning the reset spring (19) is fixed on the carrier plate body (1), and the reset spring (19) is fixed on the positioning block (20) through a screw.
7. The carrier plate with an off-line vacuum level maintaining function according to claim 1, wherein:
the vacuum breaking valve (7) comprises a valve body and a first execution cylinder for controlling the valve body to work, the first execution cylinder is controlled by the controller to work, and the first execution cylinder is fixed on a rack matched with the carrier plate.
8. The carrier plate with an off-line vacuum level maintaining function according to claim 1, wherein:
the air inlet valve (9) comprises a valve component and a second execution cylinder for controlling the valve component to work, the second execution cylinder is controlled by the controller to work, and the second execution cylinder is fixed on a rack matched with the carrier plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910266021.0A CN109994396B (en) | 2019-04-03 | 2019-04-03 | Carrier plate with off-line vacuum degree maintaining function |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910266021.0A CN109994396B (en) | 2019-04-03 | 2019-04-03 | Carrier plate with off-line vacuum degree maintaining function |
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| Publication Number | Publication Date |
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| CN109994396A CN109994396A (en) | 2019-07-09 |
| CN109994396B true CN109994396B (en) | 2024-02-20 |
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN202481753U (en) * | 2012-03-09 | 2012-10-10 | 深圳市华星光电技术有限公司 | Transfer equipment for liquid crystal panel |
| CN104526703A (en) * | 2015-01-16 | 2015-04-22 | 艾尔发（苏州）自动化科技有限公司 | Energy-saving vacuum loop |
| CN105097633A (en) * | 2015-06-24 | 2015-11-25 | 合肥京东方光电科技有限公司 | Carrying mechanism for offline vacuum adsorption substrate and substrate transferring method |
| CN209641622U (en) * | 2019-04-03 | 2019-11-15 | 杭州中为光电技术有限公司 | A kind of support plate keeping function with offline vacuum degree |
-
2019
- 2019-04-03 CN CN201910266021.0A patent/CN109994396B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN202481753U (en) * | 2012-03-09 | 2012-10-10 | 深圳市华星光电技术有限公司 | Transfer equipment for liquid crystal panel |
| CN104526703A (en) * | 2015-01-16 | 2015-04-22 | 艾尔发（苏州）自动化科技有限公司 | Energy-saving vacuum loop |
| CN105097633A (en) * | 2015-06-24 | 2015-11-25 | 合肥京东方光电科技有限公司 | Carrying mechanism for offline vacuum adsorption substrate and substrate transferring method |
| CN209641622U (en) * | 2019-04-03 | 2019-11-15 | 杭州中为光电技术有限公司 | A kind of support plate keeping function with offline vacuum degree |
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| CN109994396A (en) | 2019-07-09 |
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