CN109992808B - Method for quickly generating parameterized unit - Google Patents
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- CN109992808B CN109992808B CN201711491201.6A CN201711491201A CN109992808B CN 109992808 B CN109992808 B CN 109992808B CN 201711491201 A CN201711491201 A CN 201711491201A CN 109992808 B CN109992808 B CN 109992808B
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Abstract
The invention discloses a method for quickly generating a parameterized unit, which comprises the following steps: (1) Designing one or more two-dimensional geometric figures required by a parameterized unit on a user graphical interface of a layout editing tool, and performing parameter definition on the finally generated graphical attributes required by the parameterized unit; (2) Setting a constraint relation between two-dimensional geometric figures, wherein the constraint relation comprises position constraint and shape constraint; (3) the operation constraint computing engine generates a parameterization unit; (4) And (3) converting the parameterized unit obtained in the step (3) into a script according to a corresponding script conversion rule. The invention can change the position relation of the geometric figure through the constraint relation, also can change the shape of the geometric figure, and can simplify the use method.
Description
Technical Field
The invention relates to the field of semiconductor design and production, in particular to a method for quickly generating a parameterized unit.
Background
Because integrated circuits are a very complex and highly integrated product, integrated circuit designs are becoming increasingly complex due to numerous constraints, such as high density designs, process flows, design rules, and the like. In general, a semiconductor manufacturing enterprise provides a Process Development Kit (PDK) to a chip design company, and there are many parameterized units in the PDK, where the parameterized units are graphical programmable units, and constituent elements of each graph are given parameter attributes to adapt to various rule design changes. When a chip design company designs a chip, the chip design company can call a parameterization unit in the PDK to meet different design requirements. As process nodes get smaller and process development packages get more complex, and comparing 0.18um RF (radio frequency circuit) with 65nm RF PDK packages, it can be seen that there are only 120 devices in the 0.18um RF PDK package and 590 devices in the 65nm RF PDK package, while the regular file of DRC and LVS grows more geometrically. The most advanced integrated circuit technology at present reaches 7/5nm, and devices and rule files in the technology development kit are more numerous.
In the process of developing process lines and improving product yield, semiconductor manufacturing enterprises also use parameterized units to make a large number of experimental Designs (DOEs), and use the experimental designs to perform a large number of tests to obtain data necessary for improving the process yield, including materials extraction, manufacturing processes, devices and circuit parameters, for detecting process defects, evaluating product reliability, making layout design rules, evaluating process equipment performance, and the like.
The invention patent publication CN102930088B discloses a method of generating parameterized units. The invention designs one or more parameterized units on the graphical interface and sets constraint relation among the parameterized units. The user does not need to write parameterized unit scripts, and the design complexity is reduced. When an engineer designs and develops the parameterized unit, the technical specifications, such as critical dimensions, line widths, line spacing, layers, relative positional relationships among layers, and the like, are represented by parameters and control the relevant properties of the parameterized unit. Therefore, the shape of the parameterized unit is controlled by a software program according to a parameter programming formula after the shape is created, and the later constraint relation is mainly used for changing the position relation of the geometric figure, so that the shape and the size of the geometric figure cannot be dynamically changed through the constraint relation. This results in a great effort for engineers to set the calculation formulas of the parameterized graphics in the parameterized cells when designing the cells to satisfy the constraint that the layout generated when the parameter variables of the parameterized cells are set at different values satisfies the technical specifications.
Disclosure of Invention
In order to solve the above problems, an object of the present invention is to provide a method for quickly generating a parameterized unit, which further proposes a concept of shape constraint based on position constraint such as distance constraint and alignment constraint, so that the position relationship of geometric figures can be changed and the shape of geometric figures can be changed through constraint relationship.
In order to achieve the above purpose, the present invention adopts the following technical scheme:
a method of rapidly generating parameterized elements, comprising the steps of:
(1) Designing one or more two-dimensional geometric figures required by a parameterized unit on a user graphical interface of a layout editing tool, and performing parameter definition on the finally generated graphical attributes required by the parameterized unit;
(2) Setting a constraint relation between two-dimensional geometric figures, wherein the constraint relation comprises position constraint and shape constraint;
(3) The operation constraint calculation engine generates a parameterization unit;
(4) Converting the parameterized unit obtained in the step (3) into a script according to a corresponding script conversion rule;
the specific working steps of the constrained computing engine production parameterization unit in the step (3) are as follows:
(3-1) debugging the constraint relation in the step (2), judging whether the constraint relation among the geometric figures meets the corresponding design rule, if not, failing to pass the debugging, and returning to the user graphical interface for modification until the debugging passes;
(3-2) recognizing the geometric figure which only needs to be subjected to position change and the geometric figure which needs to be subjected to shape change according to the constraint relation, and respectively identifying;
(3-3) calculating the displacement of the geometric figure which only needs to change in position; for the geometric figure needing to be subjected to shape change, determining a moving edge related to the shape change, and calculating to obtain the displacement of the moving edge;
(3-4) processing the corresponding geometric figure according to the calculation result of the step (3-3).
Preferably, the script conversion rule in step (4) is as follows: according to the sequence of converting parameters, converting graphs and converting constraint relations, the parameters defined by the parameterization unit, the geometric figures in the parameterization unit, the parameter relations of the corresponding geometric figures and the constraint relations are stored, and are translated into texts according to the corresponding grammar formats.
Preferably, the geometry in step (1) comprises a parametric shape and a non-parametric shape, wherein the parametric shape has parameters for defining its own shape properties, and the parametric shape can define its own shape properties by simple parameters; the non-parametric graphic does not have parameters defining its own graphic properties.
Preferably, in the step (4), the parameterized graph, the related graph attribute parameters and the calculation rule of the constraint relation are stored correspondingly; and storing the non-parametric graph corresponding to the non-parametric graph and the constraint relation related to the non-parametric graph.
Preferably, the constraint relation is divided into a parameterized constraint relation and a non-parameterized constraint relation according to whether parameter calculation is related or not, and in the step (4), the operation of converting the parameterized constraint relation into a script is performed according to a parameterized graph, a non-parameterized graph, the parameterized constraint relation and the parameterized constraint relation.
The method for rapidly generating the parameterized unit does not require parameterization processing of the geometric figure for generating the parameterized unit, can directly change the shape of the geometric figure through shape constraint, does not require a user to manually write a calculation formula of shape change according to figure attribute parameters, and is simple and convenient to use.
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Fig. 1 is a schematic structural diagram of embodiment 1 of the present invention.
Detailed Description
Preferred embodiments of the present patent are described in further detail below with reference to the accompanying drawings.
A method of rapidly generating parameterized elements, comprising the steps of:
(1) Designing one or more two-dimensional geometric figures required by a parameterized unit on a user graphical interface of a layout editing tool, and performing parameter definition on the finally generated graphical attributes required by the parameterized unit;
(2) Setting constraint relation between two-dimensional geometric figures, wherein the constraint relation comprises position constraint and shape constraint, the position constraint is used for controlling the position of an object on a user graphical interface so as to control the position relation of the objects relative to each other, and the shape constraint is used for controlling the graphical shape of the object;
(3) The operation constraint calculation engine generates a parameterization unit;
(4) And (3) converting the parameterized unit obtained in the step (3) into a script according to a corresponding script conversion rule.
Wherein the geometry in step (1) comprises a parametric shape and a non-parametric shape, the parametric shape having parameters defining its own shape properties, the parametric shape defining its own shape properties by simple parameters; the non-parametric graphic does not have parameters defining its own graphic properties.
The specific working steps of the constrained computing engine production parameterization unit in the step (3) are as follows:
(3-1) debugging the constraint relation in the step (2), judging whether the constraint relation among the geometric figures meets the corresponding design rule, if not, failing to pass the debugging, and returning to the user graphical interface for modification until the debugging passes;
(3-2) recognizing the geometric figure which only needs to be subjected to position change and the geometric figure which needs to be subjected to shape change according to the constraint relation, and respectively identifying;
(3-3) calculating the displacement of the geometric figure which only needs to be changed in position, in particular the displacement distance of the geometric figure in the horizontal and vertical directions; for the geometric figure needing to be subjected to shape change, determining a moving edge related to the shape change, and calculating to obtain the displacement of the moving edge, in particular the moving distance of each moving edge in the horizontal and vertical directions;
(3-4) processing the corresponding geometric figure according to the calculation result of the step (3-3), in particular, for the geometric figure which only needs to be changed in position, carrying out displacement in the horizontal and vertical directions; and for the geometric figure needing to be subjected to shape change, moving the moving edge of the geometric figure in the horizontal and vertical directions to obtain a new geometric figure.
The script conversion rule in the step (4) is as follows: according to the sequence of converting parameters, converting graphs and converting constraint relations, the parameters defined by the parameterization unit, the geometric figures in the parameterization unit, the parameter relations of the corresponding geometric figures and the constraint relations are stored, and are translated into texts according to the corresponding grammar formats. In the step (4), the constraint relation is divided into a parameterized constraint relation and a non-parameterized constraint relation according to whether parameter calculation is related or not, and the specific steps when script conversion is carried out are as follows:
(4-1) converting the parameters defined in the parameterization unit into scripts including parameter names, parameter types, parameter values, etc.;
(4-2) identifying the parameterized graphics in the parameterized unit, converting the parameterized graphics and formulas with different attributes into scripts, and converting the parameterized graphics into corresponding scripts;
(4-3) identifying non-parameterized graphics in the parameterized unit, converting the graphics into corresponding scripts;
(4-4) identifying parameterized constraint relationships among the constraint relationships, converting the distance formulas thereof into scripts, and converting the parameterized constraint relationships into scripts.
(4-5) identifying a non-parameterized one of the constraint relationships, converting the constraint relationship to a script.
Take the generation of the simplest Comb (Comb) pattern in an integrated circuit design as an example. A plurality of rectangles with arbitrary shapes are generated along the horizontal direction on the user interface, and a rectangle perpendicular to the rectangles along the horizontal direction is drawn along the vertical direction. In the simplest case, namely, a plurality of rectangles extending in the horizontal direction are aligned left and right, the positions and the shapes of the rectangles do not need to be adjusted, and the positions and the shapes of the rectangles extending in the vertical direction only need to be changed. A comparison of the generation of a combo pattern using the method disclosed in CN102930088B (hereinafter referred to as "method 1") and using the method provided by the present invention (hereinafter referred to as "method 2") is given in fig. 1.
The step of generating a parameterized element using method 1 comprises: (1) Designing geometric figures related to comb tooth patterns on a user graphical interface, wherein the geometric figures comprise a topmost rectangle 1 extending in a horizontal direction, a bottommost rectangle 2 extending in a horizontal direction, a side rectangle 3 extending in a vertical direction and a plurality of internal rectangles (comb) 4 extending in the horizontal direction for forming comb teeth, the widths of the internal rectangles (comb) 4 extending in the horizontal direction are consistent with the widths of the topmost rectangle 1 and the bottommost rectangle 2, and finally, parameterization units are formed, each comb4 needs to be distributed among the side rectangle 3, the topmost rectangle 1 and the bottommost rectangle 2 at equal intervals, the left ends of the topmost rectangle 1, the bottommost rectangle 2 and the comb4 are aligned with the right ends of the side rectangle 3, the upper ends of the side rectangle 3 are aligned with the top ends of the topmost rectangle 1, and the lower ends of the side rectangle 3 are aligned with the lower ends of the bottommost rectangle 2; (2) Defining parameters that the final generation parameterization unit needs to see in the generator list user, including width (c_width) and height (c_height) of the rectangle extended in each horizontal direction, number of combs (combnumber), distance between each Comb (m2_space), spacing of Comb from top-most rectangle (m2_topspace), spacing of Comb from bottom-most rectangle (m2_topspace); (3) Defining a graph of movement or/and deformation required by the parameterization unit, wherein the side rectangle 3 is selected by a dotted line frame in fig. 1, and comprises a side rectangle 3 reference point coordinate variable pos (pos_x, pos_y) and a height variable height of the side rectangle 3; (4) Calculating a formula by a parameter programming algorithm of the parameterization unit to change the shape of a rectangle extending in the vertical direction, wherein the calculating formula in the embodiment is height= (m2_space+c_height) ×combnumber-1) +c_height+m2_topspace+c_height+m2_bottom space+c_height; (5) Defining a position constraint, in this embodiment pos_x= -c_height; pos_y= -m2_bottom space-c_height; (6) generating the required parameterization unit.
The step of generating a parameterized element using method 2 includes: (1) Designing geometric figures related to comb tooth patterns on a user graphical interface, wherein the geometric figures comprise a topmost rectangle 1 extending in a horizontal direction, a bottommost rectangle 2 extending in a horizontal direction, a side end rectangle 3 extending in a vertical direction and a plurality of internal rectangles (comb) 4 extending in a horizontal direction for forming comb teeth, the widths of the comb4 extending in the horizontal direction are consistent with the widths of the topmost rectangle 1 and the bottommost rectangle 2, and finally, parameterization units are formed, each comb4 needs to be equidistantly distributed among the side end rectangle 3, the topmost rectangle 1 and the bottommost rectangle 4, the left ends of the topmost rectangle 1, the bottommost rectangle 4 and the comb3 are aligned with the right end of the side end rectangle, the upper ends of the side end rectangle 3 are aligned with the top ends of the topmost rectangle 1, and the lower ends of the side end rectangle 3 are aligned with the lower ends of the bottommost rectangle 2; (2) Defining parameters that the final generation parameterization unit needs to see in the generator list user, including width (c_width) and height (c_height) of the rectangle extended in each horizontal direction, number of combs (combnumber), distance between each combs (m2_space), spacing of combs from the topmost rectangle (m2_topspace), spacing of combs from the bottommost rectangle (m2_topspace); (3) Defining a pattern of required movements or/and deformations to which the parameterization unit relates; (4) Defining a constraint relation between non-parameterized graphics, wherein the constraint relation comprises that the uppermost side of a side end rectangle is aligned with the upper left corner of a topmost rectangle, and the lowermost side of the side end rectangle is aligned with the lower left corner of a bottommost rectangle; (5) generating the required parameterization unit; wherein the constraint relation in step (4) and step (5) is indicated with reference to the dashed line in the figure.
Since the final parameterized elements of method 1 and method 2 are identical, a complete element in the integrated circuit design needs to have the corresponding parameters for editing, the first step in both methods needs to define the parameters that the final parameterized element needs to see in the generator list.
As can be seen, in the present embodiment, the method 1 is used to change the height of a graph, which requires a relatively complex height change formula, and when the width needs to be changed or the comb number increases or a large number of parameterization units are generated at the same time, the parameters need to be considered are more and more, the calculation formula of the parameterization graph becomes extremely complex, which results in higher error rate and greatly reduced parameterization unit generation efficiency. The position constraint and the shape constraint in the using method 2 can change the position of the graph and the shape of the graph, can intuitively, simply and quickly generate the parameterized unit in operation, and also need to consider the influence on other shapes when the design complexity is increased, but the design efficiency is greatly improved, and the error rate is obviously reduced.
Claims (4)
1. A method for fast generating parameterized elements, characterized in that,
the method comprises the following steps:
(1) Designing one or more two-dimensional geometric figures required by a parameterized unit on a user graphical interface of a layout editing tool, and performing parameter definition on the finally generated graphical attributes required by the parameterized unit;
(2) Setting a constraint relation between two-dimensional geometric figures, wherein the constraint relation comprises position constraint and shape constraint;
(3) The operation constraint calculation engine generates a parameterization unit;
(4) Converting the parameterized unit obtained in the step (3) into a script according to a corresponding script conversion rule;
the specific working steps of the constrained computing engine production parameterization unit in the step (3) are as follows:
(3-1) debugging the constraint relation in the step (2), judging whether the constraint relation among the geometric figures meets the corresponding design rule, if not, failing to pass the debugging, and returning to the user graphical interface for modification until the debugging passes;
(3-2) recognizing the geometric figure which only needs to be subjected to position change and the geometric figure which needs to be subjected to shape change according to the constraint relation, and respectively identifying;
(3-3) calculating the displacement of the geometric figure which only needs to change in position; for the geometric figure needing to be subjected to shape change, determining a moving edge related to the shape change, and calculating to obtain the displacement of the moving edge;
(3-4) processing the corresponding geometric figure according to the calculation result of the step (3-3);
wherein the geometry in step (1) comprises a parametric shape and a non-parametric shape, the parametric shape having parameters defining its own shape properties, the parametric shape defining its own shape properties by simple parameters; the non-parametric graphic does not have parameters defining its own graphic properties;
wherein the position constraints are used to control the position of the objects on the user graphical interface to control the positional relationship of the objects with respect to each other and the shape constraints are used to control the graphical shape of the objects themselves.
2. The method of claim 1, wherein the script transformation rules in step (4) are as follows: according to the sequence of converting parameters, converting graphs and converting constraint relations, the parameters defined by the parameterization unit, the geometric figures in the parameterization unit, the parameter relations of the corresponding geometric figures and the constraint relations are stored, and are translated into texts according to the corresponding grammar formats.
3. The method for quickly generating parameterized elements according to claim 1, wherein in the step (4), for parameterized graphics, the parameterized graphics, related graphics attribute parameters and calculation rules of constraint relations are stored correspondingly; and storing the non-parametric graph corresponding to the non-parametric graph and the constraint relation related to the non-parametric graph.
4. The method of claim 1, wherein the constraint relation is divided into a parameterized constraint relation and a non-parameterized constraint relation according to whether the constraint relation relates to parameter calculation, and in the step (4), the parameterized graph, the non-parameterized graph, the parameterized constraint relation and the parameterized constraint relation are respectively converted into scripts.
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