CN109978287B - 多晶硅智能生产方法及系统 - Google Patents
多晶硅智能生产方法及系统 Download PDFInfo
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- CN109978287B CN109978287B CN201910410451.5A CN201910410451A CN109978287B CN 109978287 B CN109978287 B CN 109978287B CN 201910410451 A CN201910410451 A CN 201910410451A CN 109978287 B CN109978287 B CN 109978287B
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 70
- 229910021420 polycrystalline silicon Inorganic materials 0.000 title claims abstract description 52
- 238000004458 analytical method Methods 0.000 claims abstract description 58
- 238000004088 simulation Methods 0.000 claims abstract description 35
- 238000007405 data analysis Methods 0.000 claims abstract description 26
- 238000000034 method Methods 0.000 claims abstract description 25
- 238000004364 calculation method Methods 0.000 claims abstract description 23
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- 230000006872 improvement Effects 0.000 description 4
- 238000012986 modification Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
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- 238000006467 substitution reaction Methods 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000012517 data analytics Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
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- 238000004377 microelectronic Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/02—Silicon
- C01B33/021—Preparation
- C01B33/027—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material
- C01B33/035—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material by decomposition or reduction of gaseous or vaporised silicon compounds in the presence of heated filaments of silicon, carbon or a refractory metal, e.g. tantalum or tungsten, or in the presence of heated silicon rods on which the formed silicon is deposited, a silicon rod being obtained, e.g. Siemens process
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06Q—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
- G06Q10/00—Administration; Management
- G06Q10/04—Forecasting or optimisation specially adapted for administrative or management purposes, e.g. linear programming or "cutting stock problem"
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- G06Q10/06395—Quality analysis or management
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06Q—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
- G06Q10/00—Administration; Management
- G06Q10/06—Resources, workflows, human or project management; Enterprise or organisation planning; Enterprise or organisation modelling
- G06Q10/067—Enterprise or organisation modelling
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CN109978287A CN109978287A (zh) | 2019-07-05 |
CN109978287B true CN109978287B (zh) | 2020-04-21 |
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Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
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CN110850718A (zh) * | 2019-11-22 | 2020-02-28 | 无锡多纬智控科技有限公司 | 一种小数据控制系统 |
TWI721879B (zh) * | 2020-05-04 | 2021-03-11 | 和碩聯合科技股份有限公司 | 決定產能參數的方法及產能參數產生系統 |
CN113130017B (zh) * | 2020-06-05 | 2024-01-30 | 北京星云联众科技有限公司 | 基于人工智能的晶体生长分析方法及系统 |
CN112257200A (zh) * | 2020-10-21 | 2021-01-22 | 亚洲硅业(青海)股份有限公司 | 多晶硅生产场景的模拟仿真方法、装置、系统及设备 |
CN114655958B (zh) * | 2020-12-22 | 2024-04-26 | 新疆新特晶体硅高科技有限公司 | 一种多晶硅生产的控制方法、系统 |
CN114660998A (zh) * | 2020-12-22 | 2022-06-24 | 新疆新特晶体硅高科技有限公司 | 一种多晶硅生产模拟的控制系统及方法 |
CN112465274B (zh) * | 2020-12-30 | 2024-03-29 | 镇江龙源铝业有限公司 | 生产车间智能化管理系统 |
CN113066655B (zh) * | 2021-03-26 | 2023-03-14 | 安徽工业大学 | 一种自主学习的高硅钢软磁复合铁芯智能化生产系统及生产方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107815729A (zh) * | 2016-09-12 | 2018-03-20 | 上海新昇半导体科技有限公司 | 一种单晶炉 |
CN108563913A (zh) * | 2018-05-29 | 2018-09-21 | 广东工业大学 | 一种多晶硅还原炉还原过程能耗预测方法、系统 |
CN108954375A (zh) * | 2018-07-18 | 2018-12-07 | 厦门邑通软件科技有限公司 | 锅炉节煤控制方法 |
CN109338456A (zh) * | 2018-12-03 | 2019-02-15 | 上海交通大学 | 基于数值模拟与神经网络判断的单晶制品生产智能控制技术 |
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KR20180031799A (ko) * | 2015-08-18 | 2018-03-28 | 비코 인스트루먼츠 인코포레이티드 | 화학 기상 증착 시스템 및 공정에서 열적 균일성을 향상시키기 위한 공정별 웨이퍼 캐리어 보정 |
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Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107815729A (zh) * | 2016-09-12 | 2018-03-20 | 上海新昇半导体科技有限公司 | 一种单晶炉 |
CN108563913A (zh) * | 2018-05-29 | 2018-09-21 | 广东工业大学 | 一种多晶硅还原炉还原过程能耗预测方法、系统 |
CN108954375A (zh) * | 2018-07-18 | 2018-12-07 | 厦门邑通软件科技有限公司 | 锅炉节煤控制方法 |
CN109338456A (zh) * | 2018-12-03 | 2019-02-15 | 上海交通大学 | 基于数值模拟与神经网络判断的单晶制品生产智能控制技术 |
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Address after: 810007 No.1, Jinsi Road, Xining Economic and Technological Development Zone, Xining City, Qinghai Province Applicant after: Asia silicon (Qinghai) Co., Ltd Applicant after: Qinghai Asia silicon silicon material engineering technology Co., Ltd. Address before: 810000 Qinghai city of Xining Province Economic and Technological Development Zone No. 1 gold Guilu Applicant before: Asia Silicon Industry (Qinghai) Co., Ltd. Applicant before: Qinghai Asia silicon silicon material engineering technology Co., Ltd. |
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