CN109975938A - The electric precision adjustable slit device of more bandwidth filter functions can be achieved - Google Patents

The electric precision adjustable slit device of more bandwidth filter functions can be achieved Download PDF

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Publication number
CN109975938A
CN109975938A CN201910212958.XA CN201910212958A CN109975938A CN 109975938 A CN109975938 A CN 109975938A CN 201910212958 A CN201910212958 A CN 201910212958A CN 109975938 A CN109975938 A CN 109975938A
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CN
China
Prior art keywords
mounting plate
slit sheet
sliding block
filter functions
bandwidth filter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201910212958.XA
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Chinese (zh)
Inventor
崔雷
王弼陡
于波
周旻超
何大永
田浩然
刘鑫龙
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Suzhou Institute of Biomedical Engineering and Technology of CAS
Original Assignee
Suzhou Institute of Biomedical Engineering and Technology of CAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Suzhou Institute of Biomedical Engineering and Technology of CAS filed Critical Suzhou Institute of Biomedical Engineering and Technology of CAS
Priority to CN201910212958.XA priority Critical patent/CN109975938A/en
Publication of CN109975938A publication Critical patent/CN109975938A/en
Pending legal-status Critical Current

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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/42Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
    • G02B27/46Systems using spatial filters
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00Mountings, adjusting means, or light-tight connections, for optical elements

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)

Abstract

The invention discloses a kind of electric precision adjustable slit device that more bandwidth filter functions can be achieved, including the first mounting plate, the positive upper slit sheet of the first mounting plate and lower slit sheet is arranged in, is arranged on the first mounting plate front the first driving mechanism for driving upper slit sheet to slide up and down on the first mounting plate, the second mounting plate and the second driving mechanism for driving the first mounting plate to slide up and down on the second mounting plate that the second mounting plate is arranged in;The upper slit sheet and lower slit sheet are inclined on first mounting plate, and the back side is provided with reflecting layer, and the back side of the upper slit sheet=and lower slit sheet is not parallel to each other.The present invention passes through the upper slit sheet being obliquely installed and lower slit sheet for the reflection of generation incident light to device two sides, is not only able to achieve control, the acquisition of front emergent light, moreover it is possible to control, the acquisition for realizing two sides reflected light, to can realize multichannel while acquire imaging.

Description

The electric precision adjustable slit device of more bandwidth filter functions can be achieved
Technical field
The present invention relates to optomechanical arts, in particular to a kind of electric precision that more bandwidth filter functions can be achieved is adjustable Slit arrangement.
Background technique
Slit arrangement primarily serves the function of space filtering, bandwidth and the position of strict control space filtering, just necessary The size and location of slit is accurately controlled, major part slit arrangement is to manually adjust at present, the problem of there are four aspect: its One, degree of regulation is low, second, the more difficult determination of slit width, third, slit center determines;And present motorized adjustment Slit arrangement, degree of regulation is poor, and plant bulk is larger, is difficult to apply in the instrument for needing precision control slit, fourth, Current slit arrangement can only realize single bandwidth filtering, the application range of slit be significantly limited, especially in spectral class In instrument, conventional slit mechanism can only the imaging of single bandwidth (spectral hand), i.e. single channel is imaged, greatly limitation instrument Frequency range is imaged.
Summary of the invention
In view of the above-mentioned deficiencies in the prior art, the technical problem to be solved by the present invention is that providing a kind of achievable more The electric precision adjustable slit device of bandwidth filter function.
In order to solve the above technical problems, the technical solution adopted by the present invention is that: it is a kind of that more bandwidth filter functions can be achieved Electric precision adjustable slit device, including the first mounting plate, be arranged in the positive upper slit sheet of first mounting plate and under Slit sheet, be arranged on first mounting plate front for drive the upper slit sheet on first mounting plate up and down First driving mechanism of sliding, the second mounting plate and be arranged in second mounting plate for driving first mounting plate to exist The second driving mechanism slided up and down on second mounting plate;
The upper slit sheet and lower slit sheet are inclined on first mounting plate, and the back side is provided with reflection Layer, and the back side of the upper slit sheet=and lower slit sheet is not parallel to each other;
Guide-lighting through-hole is offered on first mounting plate and the second mounting plate.
Preferably, the positive two sides of first mounting plate are provided with two the first guide rails along the vertical direction, and described The first top shoe and the first sliding block are slidably provided on one guide rail, the upper slit sheet is arranged in first top shoe On, the lower slit sheet is arranged on first sliding block.
Preferably, first driving mechanism include the first motor being fixed on first mounting plate, with it is described It is the first screw rod that the output shaft of first motor is drivingly connected, the first screw rod sleeve cooperated with first wire rod thread, affixed In the first mounting disc on the first screw rod sleeve and the first connecting plate being fixed in first mounting disc.
Preferably, it is provided with sliding block link block on first sliding block, the sliding block link block and described the The connection of one connecting plate;The first inclination mounting surface for installing the lower slit sheet is provided on the sliding block link block;
The two sides of first sliding block are additionally provided with the first optoelectronic switch and the second optoelectronic switch.
Preferably, first connecting plate includes the round plate connecting with first mounting disc and is vertically set on institute State the rectangle block portion for connecting with the sliding block link block on round plate.
Preferably, it is provided with top shoe link block on first top shoe, is provided on the top shoe link block For installing the second inclination mounting surface of the upper slit sheet;
The two sides of the top shoe link block are additionally provided with matches with first optoelectronic switch and the second optoelectronic switch respectively The the first long baffle and the first short shutter closed.
Preferably, between the first inclination mounting surface and horizontal plane, and the front of first mounting plate Angle be lower slit sheet inclination angle;The second inclination mounting surface and horizontal plane, the front with first mounting plate Between angle be upper slit sheet inclination angle, the upper slit sheet inclination angle is not identical as the size at lower slit sheet inclination angle.
Preferably, the back side two sides of first mounting plate are provided with two the second guide rails along the vertical direction, and described The second sliding block is slidably provided on two guide rails, the front of upper second mounting plate is connect with second sliding block.
Preferably, second driving mechanism includes being fixed in the second motor and the institute of the second installation back It states output shaft the second screw rod being drivingly connected of the second motor and the second screw rod sleeve of second wire rod thread cooperation, consolidate It connects the second mounting disc on the second screw rod sleeve and one end and second mounting disc is affixed and the other end and described the The second affixed connecting plate of one mounting plate.
Preferably, the two sides of the second installation back are additionally provided with third optoelectronic switch and the 4th optoelectronic switch; It is also connected with baffle link block in second mounting disc, the two sides of the baffle link block are connected with for respectively with described the The the second long baffle and the second short shutter of three optoelectronic switches and the cooperation of the 4th optoelectronic switch.
The beneficial effects of the present invention are: the electric precision adjustable slit dress that more bandwidth filter functions can be achieved of the invention It sets, drives upper slit sheet to slide up and down by the first driving mechanism, to control the gap between upper slit sheet and lower slit sheet Size, i.e. change slit width;Entire movable installation board and upper slit sheet, lower slit thereon are driven by the second driving mechanism Piece, the first driving mechanism integrally slide up and down, to control the position of slit;Finally it is able to achieve the accurate of slit size and location Mechanical adjustment;
The present invention passes through the upper slit sheet that is obliquely installed and lower slit sheet for the reflection of generation incident light to device two sides, can not only be real Control, the acquisition of existing front emergent light, moreover it is possible to control, the acquisition for realizing two sides reflected light, to can realize multichannel while adopt Collection imaging, i.e., more bandwidth filtering imagings;Be combined additionally by by multiple devices, may be implemented the acquisition of more multichannel at Picture can greatly expand the application range of slit component, extend the function and application of relevant instrument.
Detailed description of the invention
Fig. 1 is that the positive structure of the electric precision adjustable slit device that more bandwidth filter functions can be achieved of the invention is shown It is intended to;
Fig. 2 is that the structure of the side of the electric precision adjustable slit device that more bandwidth filter functions can be achieved of the invention is shown It is intended to;
Fig. 3 is that the structure at the back side of the electric precision adjustable slit device that more bandwidth filter functions can be achieved of the invention is shown It is intended to;
Fig. 4 is the electric precision adjustable slit device work that more bandwidth filter functions can be achieved in a kind of embodiment of the invention The schematic diagram of optical path when making;
Fig. 5 is the structural schematic diagram of the first mounting plate of the invention;
Fig. 6 is the decomposition diagram that sliding block link block of the invention and lower slit sheet, the first connecting plate cooperate;
Fig. 7 is the structural schematic diagram of the first inclination mounting surface and the second inclination mounting surface of the invention.
Description of symbols:
1-the first mounting plate;2-upper slit sheets;3-lower slit sheets;4-the first driving mechanism;5-the second driving machine Structure;6-the second mounting plate;7-guide-lighting through-holes;8-lower slit sheet inclination angles;9-upper slit sheet inclination angles;10-the first guide rail; 11-the first top shoe;12-the first sliding block;13-sliding block link blocks;14-the first optoelectronic switch;15-the second photoelectricity Switch;16-top shoe link blocks;17-the second guide rail;18-the second sliding block;40-first motors;41-the first screw rod; 42-the first screw rod sleeve;43-the first mounting disc;44-the first connecting plate;50-the second motor;51-the second screw rod;52— Second screw rod sleeve;53-the second mounting disc;54-the second connecting plate;55-baffle link blocks;56-the second long baffle;57— Second short shutter;60-third optoelectronic switches;61-the four optoelectronic switch;130-the first inclination mounting surface;160-the second inclines Oblique mounting surface;161-the first long baffle;162-the first short shutter;440-round plates;441-rectangle block portions.
Specific embodiment
The present invention will be further described in detail below with reference to the embodiments, to enable those skilled in the art referring to specification Text can be implemented accordingly.
It should be appreciated that such as " having ", "comprising" and " comprising " term used herein are not precluded one or more The presence or addition of a other elements or combinations thereof.
As shown in figs. 1-7, a kind of electric precision adjustable slit device that more bandwidth filter functions can be achieved of the present embodiment, Including the first mounting plate 1, the positive upper slit sheet 2 of the first mounting plate 1 and lower slit sheet 3, setting are set in the first installation The first driving mechanism 4 for driving slit sheet 2 to slide up and down on the first mounting plate 1 on 1 front of plate, the second mounting plate 6 and the second driving machine for driving the first mounting plate 1 to slide up and down on the second mounting plate 6 of the second mounting plate 6 is set Structure 5;
Drive upper slit sheet 2 to slide up and down by the first driving mechanism 4, thus control upper slit sheet 2 and lower slit sheet 3 it Between gap size, i.e., change slit width;Upper slit sheet by the second driving mechanism 5 the first mounting plate 1 of drive and thereon 2, lower slit sheet 3, the first driving mechanism 4 are whole slides up and down, to control the position of slit.
Upper slit sheet 2 and lower slit sheet 3 are inclined on the first mounting plate 1, and the back side is provided with reflecting layer, and on The back side of slit sheet 2 and lower slit sheet 3 is not parallel to each other.The back side of i.e. upper slit sheet 2 and lower slit sheet 3 is in the vertical direction It mutually staggers, the angle between the two and the front of the first mounting plate 1 is different.Such as in one embodiment, upper narrow 2 tilt angle of patch is 30 °, and lower 3 tilt angle of slit sheet is -30 °.The back side of upper slit sheet 2 and lower slit sheet 3 can pass through throwing Light, plated film form reflecting layer.Referring to Fig.1 with 4, incident light passes through the second mounting plate 6 and the first installation through guide-lighting through-hole 7 by the back side Plate 1 is irradiated to slit sheet 2 and lower 3 back side of slit sheet, slit of a part of light across upper slit sheet 2 and lower slit sheet 3, (emergent light) is emitted by front;The light of other part is reflexed to device two sides respectively by reflecting layer and projects (reflected light 1, reflection Light 2), the light in three directions can be controlled and be acquired.For example, passing through the inclination angle for controlling upper slit sheet 2, lower slit sheet 3 Degree, that is, can control the direction of the light of its back side mode;Then by adjusting width and the position of slit, front emergent light can control Brand bandwidth and band center position, so that the light in three directions be allow to be individually controlled, acquire, it can realize multi-pass Road acquires imaging simultaneously.If same slit dress is being arranged in the exit direction of emergent light (or reflected light 1, reflected light 2) It sets, then the acquisition imaging of more multichannel may be implemented, can greatly expand the application range of slit component, extend relevant instrument The function and application of device.
In one embodiment, the positive two sides of the first mounting plate 1 are provided with two the first guide rails 10 along the vertical direction, the The first top shoe 11 and the first sliding block 12 are slidably provided on one guide rail 10, upper slit sheet 2 is arranged in the first top shoe 11 On, lower slit sheet 3 is arranged on the first sliding block 12.
Wherein, the first driving mechanism 4 includes the first motor 40 being fixed on the first mounting plate 1 and first motor 40 The first screw rod 41 that output shaft is drivingly connected and the first screw rod sleeve 42 that the first screw rod 41 is threadedly engaged are fixed in first The first mounting disc 43 on rod sleeve 42 and the first connecting plate 44 being fixed in the first mounting disc 43.
Wherein, sliding block link block 13, sliding block link block 13 and the first connecting plate 44 are provided on the first sliding block 12 Connection;The first inclination mounting surface 130 for installing lower slit sheet 3 is provided on sliding block link block 13;First sliding block 12 Two sides be additionally provided with the first optoelectronic switch 14 and the second optoelectronic switch 15.
Wherein, referring to Fig. 6, the first connecting plate 44 includes the round plate 440 connecting with the first mounting disc 43 and is vertically arranged The rectangle block portion 441 for being connect with sliding block link block 13 on round plate 440.
Wherein, it is provided with top shoe link block 16 on the first top shoe 11, be provided on top shoe link block 16 for pacifying Load onto the second inclination mounting surface 160 of slit sheet 2;The two sides of top shoe link block 16 be additionally provided with respectively with the first optoelectronic switch 14 and second optoelectronic switch 15 cooperate the first long baffle 161 and the first short shutter 162.
Wherein, it is further preferred that the first, second, third, fourth optoelectronic switch 61 is groove type photoelectric switch;First Motor 40 and the second motor 50 are precision stepper motor;First guide rail 10 and the second guide rail 17 are precise guide rail.
Its working principle is that: first motor 40 drives the rotation of the first screw rod 41, the first screw rod sleeve 42 and the first screw rod 41 It is threadedly engaged, slides up and down the first screw rod sleeve 42, to drive upper slit sheet 2 in the first guide rail by the first connecting plate 44 It is slided up and down on 10, to adjust the gap size between upper slit sheet 2 and lower slit sheet 3;First long baffle 161 and first simultaneously Short shutter 162 moves up and down, insertion or the fluting for being detached from the first optoelectronic switch 14, the second optoelectronic switch 15, slit sheet 2 in realization Lower limit position and upper limit position positioning.For example, when the first short shutter 162 is inserted into the fluting of the second optoelectronic switch 15 When middle, the lower limit position of as upper slit sheet 2;When the first long baffle 161 is extracted out from the fluting of the first optoelectronic switch 14, The upper limit position of as upper slit sheet 2.
Wherein, referring to Fig.1 with 7, the first inclination mounting surface 130 and horizontal plane, with the front of the first mounting plate 1 Between angle be lower slit sheet inclination angle 8;Second inclination mounting surface 160 and horizontal plane, with the front of the first mounting plate 1 Between angle be upper slit sheet inclination angle 9, upper slit sheet inclination angle 9 is not identical as the size at lower slit sheet inclination angle 8.Pass through the first inclination The setting at the inclination angle of lower slit sheet 3, upper slit sheet 2 is realized in the setting at the inclination angle of mounting surface 130 and the second inclination mounting surface 160, Namely first inclination mounting surface 130 inclination angle be lower slit sheet 3 inclination angle, second inclination mounting surface 160 inclination angle be upper slit The inclination angle of piece 2.
In one embodiment, referring to Fig. 2, the back side two sides of the first mounting plate 1 are provided with two second along the vertical direction Guide rail 17, the second sliding block 18 is slidably provided on the second guide rail 17, and front and the second sliding block 18 of upper second mounting plate 6 connect It connects.Second driving mechanism 5 includes the second motor 50 for being fixed in 6 back side of the second mounting plate, the output shaft drive with the second motor 50 Second screw rod 51 of dynamic connection, is fixed in the second screw rod sleeve 52 at the second screw rod sleeve 52 being threadedly engaged with the second screw rod 51 On the second mounting disc 53 and one end and the second mounting disc 53 is affixed and the other end and affixed the second connecting plate of the first mounting plate 1 54。
Wherein, the two sides at 6 back side of the second mounting plate are additionally provided with third optoelectronic switch 60 and the 4th optoelectronic switch 61;Second Be also connected with baffle link block 55 in mounting disc 53, the two sides of baffle link block 55 be connected with for respectively with third optoelectronic switch 60 and the 4th optoelectronic switch 61 cooperate the second long baffle 56 and the second short shutter 57.
The working principle of second driving mechanism 5 is identical as the first driving mechanism 4, repeats no more.Wherein, pass through third photoelectricity Switch 60 and the second long cooperation of baffle 56 realize that the upper limit position of slit location positions, short by the 4th optoelectronic switch 61 second The lower limit position positioning of slit location is realized in the cooperation of baffle 57.
Although the embodiments of the present invention have been disclosed as above, but its is not only in the description and the implementation listed With it can be fully applied to various fields suitable for the present invention, for those skilled in the art, can be easily Realize other modification, therefore without departing from the general concept defined in the claims and the equivalent scope, the present invention is simultaneously unlimited In specific details.

Claims (10)

1. a kind of electric precision adjustable slit device that more bandwidth filter functions can be achieved, which is characterized in that including the first installation The positive upper slit sheet of first mounting plate and lower slit sheet, setting is arranged on the first mounting plate front in plate The first driving mechanism for driving the upper slit sheet to slide up and down on first mounting plate, the second mounting plate and set Second for driving first mounting plate to slide up and down on second mounting plate set in second mounting plate drives Motivation structure;
The upper slit sheet and lower slit sheet are inclined on first mounting plate, and the back side is provided with reflecting layer, and The back side of the upper slit sheet=and lower slit sheet is not parallel to each other;
Guide-lighting through-hole is offered on first mounting plate and the second mounting plate.
2. the electric precision adjustable slit device according to claim 1 that more bandwidth filter functions can be achieved, feature exist Two the first guide rails are provided with along the vertical direction in, positive two sides of first mounting plate, on first guide rail slidably It is provided with the first top shoe and the first sliding block, the upper slit sheet is arranged on first top shoe, the lower slit sheet It is arranged on first sliding block.
3. the electric precision adjustable slit device according to claim 2 that more bandwidth filter functions can be achieved, feature exist In first driving mechanism includes the first motor being fixed on first mounting plate, the output with the first motor First screw rod sleeve of the first screw rod and first wire rod thread cooperation that axis is drivingly connected is fixed in first screw rod The first mounting disc on sleeve and the first connecting plate being fixed in first mounting disc.
4. the electric precision adjustable slit device according to claim 3 that more bandwidth filter functions can be achieved, feature exist In being provided with sliding block link block on first sliding block, the sliding block link block is connect with first connecting plate;Institute State the first inclination mounting surface being provided on sliding block link block for installing the lower slit sheet;
The two sides of first sliding block are additionally provided with the first optoelectronic switch and the second optoelectronic switch.
5. the electric precision adjustable slit device according to claim 3 that more bandwidth filter functions can be achieved, feature exist In first connecting plate includes the round plate connecting with first mounting disc and the use being vertically set on the round plate In the rectangle block portion being connect with the sliding block link block.
6. the electric precision adjustable slit device according to claim 4 that more bandwidth filter functions can be achieved, feature exist In being provided with top shoe link block on first top shoe, be provided on the top shoe link block described for installing Second inclination mounting surface of slit sheet;
The two sides of the top shoe link block, which are additionally provided with, respectively to be cooperated with first optoelectronic switch and the second optoelectronic switch First long baffle and the first short shutter.
7. the electric precision adjustable slit device according to claim 6 that more bandwidth filter functions can be achieved, feature exist In the angle between the first inclination mounting surface and horizontal plane, and the front of first mounting plate is lower slit Piece inclination angle;It is described second inclination mounting surface and horizontal plane, and the front of first mounting plate between angle be on Slit sheet inclination angle, the upper slit sheet inclination angle be not identical as the size at lower slit sheet inclination angle.
8. the electric precision adjustable slit device according to claim 1 that more bandwidth filter functions can be achieved, feature exist Two the second guide rails are provided with along the vertical direction in, back side two sides of first mounting plate, on second guide rail slidably It is provided with the second sliding block, the front of upper second mounting plate is connect with second sliding block.
9. the electric precision adjustable slit device according to claim 8 that more bandwidth filter functions can be achieved, feature exist In, second driving mechanism include the second motor for being fixed in the second installation back, it is defeated with second motor Second screw rod sleeve of the second screw rod and second wire rod thread cooperation that shaft is drivingly connected is fixed in described second The second mounting disc and one end on rod sleeve and second mounting disc is affixed and the other end and first mounting plate are affixed Second connecting plate.
10. the electric precision adjustable slit device according to claim 1 that more bandwidth filter functions can be achieved, feature exist In the two sides of the second installation back are additionally provided with third optoelectronic switch and the 4th optoelectronic switch;Second mounting disc On be also connected with baffle link block, the two sides of the baffle link block be connected with for respectively with the third optoelectronic switch and the The the second long baffle and the second short shutter of four optoelectronic switches cooperation.
CN201910212958.XA 2019-03-20 2019-03-20 The electric precision adjustable slit device of more bandwidth filter functions can be achieved Pending CN109975938A (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110487405A (en) * 2019-09-27 2019-11-22 中国科学院长春光学精密机械与物理研究所 A kind of geometric calibration device of push-broom type imaging spectrometer
CN112946848A (en) * 2021-01-29 2021-06-11 中国科学院苏州生物医学工程技术研究所 High-precision closed-loop control slit adjusting device
CN114193002A (en) * 2021-12-24 2022-03-18 苏州迈为科技股份有限公司 Device for automatically controlling slit width and method for controlling slit width

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN203798720U (en) * 2013-12-24 2014-08-27 中国科学院苏州生物医学工程技术研究所 Slit width and position adjustable electric slit device for spectrograph and control system thereof
CN204269914U (en) * 2014-12-05 2015-04-15 中国科学院苏州生物医学工程技术研究所 A kind of reflectance slit device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN203798720U (en) * 2013-12-24 2014-08-27 中国科学院苏州生物医学工程技术研究所 Slit width and position adjustable electric slit device for spectrograph and control system thereof
CN204269914U (en) * 2014-12-05 2015-04-15 中国科学院苏州生物医学工程技术研究所 A kind of reflectance slit device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110487405A (en) * 2019-09-27 2019-11-22 中国科学院长春光学精密机械与物理研究所 A kind of geometric calibration device of push-broom type imaging spectrometer
CN110487405B (en) * 2019-09-27 2021-10-08 中国科学院长春光学精密机械与物理研究所 Geometric calibration device of push-broom type imaging spectrometer
CN112946848A (en) * 2021-01-29 2021-06-11 中国科学院苏州生物医学工程技术研究所 High-precision closed-loop control slit adjusting device
CN114193002A (en) * 2021-12-24 2022-03-18 苏州迈为科技股份有限公司 Device for automatically controlling slit width and method for controlling slit width

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