CN109950597A - A kind of full solid thin film fuel cell and preparation method thereof - Google Patents
A kind of full solid thin film fuel cell and preparation method thereof Download PDFInfo
- Publication number
- CN109950597A CN109950597A CN201910274819.XA CN201910274819A CN109950597A CN 109950597 A CN109950597 A CN 109950597A CN 201910274819 A CN201910274819 A CN 201910274819A CN 109950597 A CN109950597 A CN 109950597A
- Authority
- CN
- China
- Prior art keywords
- groove
- layer
- fuel cell
- plate
- filler
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000446 fuel Substances 0.000 title claims abstract description 127
- 239000007787 solid Substances 0.000 title claims abstract description 47
- 239000010409 thin film Substances 0.000 title claims abstract description 43
- 238000002360 preparation method Methods 0.000 title abstract description 5
- 239000000945 filler Substances 0.000 claims abstract description 72
- 238000004519 manufacturing process Methods 0.000 claims abstract description 51
- 239000003792 electrolyte Substances 0.000 claims abstract description 35
- 238000003475 lamination Methods 0.000 claims abstract description 10
- 238000000034 method Methods 0.000 claims description 61
- 239000000463 material Substances 0.000 claims description 41
- 238000005530 etching Methods 0.000 claims description 29
- 238000010438 heat treatment Methods 0.000 claims description 24
- 238000000151 deposition Methods 0.000 claims description 15
- 239000004065 semiconductor Substances 0.000 claims description 13
- 229910010293 ceramic material Inorganic materials 0.000 claims description 9
- 238000001816 cooling Methods 0.000 claims description 9
- 238000011049 filling Methods 0.000 claims description 8
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 claims description 8
- 229910052761 rare earth metal Inorganic materials 0.000 claims description 8
- 150000002910 rare earth metals Chemical class 0.000 claims description 8
- 229910052727 yttrium Inorganic materials 0.000 claims description 8
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 claims description 8
- 229910001928 zirconium oxide Inorganic materials 0.000 claims description 8
- 239000002210 silicon-based material Substances 0.000 claims description 7
- 239000002131 composite material Substances 0.000 claims description 6
- 150000001875 compounds Chemical class 0.000 claims description 6
- 239000000084 colloidal system Substances 0.000 claims description 5
- XGPJPLXOIJRLJN-UHFFFAOYSA-N [Mn].[Sr].[La] Chemical compound [Mn].[Sr].[La] XGPJPLXOIJRLJN-UHFFFAOYSA-N 0.000 claims description 4
- 230000008021 deposition Effects 0.000 claims description 4
- 230000008034 disappearance Effects 0.000 claims description 4
- 239000000203 mixture Substances 0.000 claims description 4
- 239000004793 Polystyrene Substances 0.000 claims description 3
- 229920002223 polystyrene Polymers 0.000 claims description 3
- 238000004544 sputter deposition Methods 0.000 claims description 3
- 230000003647 oxidation Effects 0.000 claims description 2
- 238000007254 oxidation reaction Methods 0.000 claims description 2
- 238000004062 sedimentation Methods 0.000 claims description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims 2
- 229910052759 nickel Inorganic materials 0.000 claims 1
- 238000012545 processing Methods 0.000 abstract description 12
- 239000010410 layer Substances 0.000 description 133
- 230000008569 process Effects 0.000 description 20
- 230000005611 electricity Effects 0.000 description 14
- 238000006243 chemical reaction Methods 0.000 description 8
- 238000005516 engineering process Methods 0.000 description 8
- 239000000919 ceramic Substances 0.000 description 7
- 238000010586 diagram Methods 0.000 description 7
- 239000000758 substrate Substances 0.000 description 7
- 239000010408 film Substances 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
- 239000002356 single layer Substances 0.000 description 5
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 4
- -1 anode plate Substances 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 4
- 239000000306 component Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000000178 monomer Substances 0.000 description 4
- 238000005245 sintering Methods 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 230000008901 benefit Effects 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 239000012528 membrane Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910000480 nickel oxide Inorganic materials 0.000 description 3
- GNRSAWUEBMWBQH-UHFFFAOYSA-N oxonickel Chemical compound [Ni]=O GNRSAWUEBMWBQH-UHFFFAOYSA-N 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 238000012546 transfer Methods 0.000 description 3
- HBBGRARXTFLTSG-UHFFFAOYSA-N Lithium ion Chemical compound [Li+] HBBGRARXTFLTSG-UHFFFAOYSA-N 0.000 description 2
- 238000002679 ablation Methods 0.000 description 2
- 239000011149 active material Substances 0.000 description 2
- 238000002485 combustion reaction Methods 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 239000002346 layers by function Substances 0.000 description 2
- 229910001416 lithium ion Inorganic materials 0.000 description 2
- 239000002086 nanomaterial Substances 0.000 description 2
- 238000012805 post-processing Methods 0.000 description 2
- 238000006722 reduction reaction Methods 0.000 description 2
- 239000004449 solid propellant Substances 0.000 description 2
- 239000011787 zinc oxide Substances 0.000 description 2
- RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 240000007594 Oryza sativa Species 0.000 description 1
- 235000007164 Oryza sativa Nutrition 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- JTCFNJXQEFODHE-UHFFFAOYSA-N [Ca].[Ti] Chemical compound [Ca].[Ti] JTCFNJXQEFODHE-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 239000005030 aluminium foil Substances 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000001680 brushing effect Effects 0.000 description 1
- 238000001354 calcination Methods 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000011889 copper foil Substances 0.000 description 1
- 239000008358 core component Substances 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000001627 detrimental effect Effects 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 238000002309 gasification Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- PIRUAZLFEUQMTG-UHFFFAOYSA-N lanthanum;oxomanganese;strontium Chemical compound [Sr].[La].[Mn]=O PIRUAZLFEUQMTG-UHFFFAOYSA-N 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000011244 liquid electrolyte Substances 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- JXSUUUWRUITOQZ-UHFFFAOYSA-N oxygen(2-);yttrium(3+);zirconium(4+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[O-2].[O-2].[Y+3].[Y+3].[Zr+4].[Zr+4] JXSUUUWRUITOQZ-UHFFFAOYSA-N 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 239000005297 pyrex Substances 0.000 description 1
- 238000006479 redox reaction Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000003014 reinforcing effect Effects 0.000 description 1
- 230000008439 repair process Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 235000009566 rice Nutrition 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 238000006748 scratching Methods 0.000 description 1
- 230000002393 scratching effect Effects 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- IGPAMRAHTMKVDN-UHFFFAOYSA-N strontium dioxido(dioxo)manganese lanthanum(3+) Chemical compound [Sr+2].[La+3].[O-][Mn]([O-])(=O)=O IGPAMRAHTMKVDN-UHFFFAOYSA-N 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/30—Hydrogen technology
- Y02E60/50—Fuel cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Fuel Cell (AREA)
Abstract
A kind of full solid thin film fuel cell and preparation method thereof, belongs to fuel cell field.Production method includes: offer assembly, and processing assembly makes filler be removed to form the fuel flow channel including the first groove and the second groove.Wherein, assembly includes the first current collector layer, first electrode layer, electrolyte layer, second electrode and the second current collector layer of successively lamination arrangement, and the first current collector layer has the first groove towards first electrode layer, and the second current collector layer has the second groove towards the second electrode lay.Filled with the filler that can be removed in first groove and the second groove.Fuel cell in example is a kind of all solid state hull cell, and thickness can achieve micron, even nanometer, so as to improve volume energy density, fuel cell be enable to minimize, and is developed to micro fuel cell.
Description
Technical field
This application involves fuel cell fields, in particular to a kind of full solid thin film fuel cell and its production side
Method.
Background technique
Fuel cell is a kind of a kind of device using hydrogen and the chemical reaction generation electricity of oxygen, and anti-using chemistry
Electronics brought by redox reaction is answered to convert and generate electric current.The process of fuel cell entirely to generate electricity is not related to firing
The burning of material, without the Carnot cycle for following the second law of thermodynamics.Thus it is possible to measure transfer efficiency it is very high-generally can achieve
40~60%-fuel cell is a kind of very efficient clean energy resource generating equipment.
Traditional fuel cell, especially Solid-state fuel cell, main electrode and electrolyte component part are metal oxygens
Compound and ceramic material.Therefore, the solid fuel cell of this type is carried out often through ceramic process and its production line
Production.But it is smaller, more to be difficult to produce and manufacture in the case where ceramic process volume for the limitation for being limited to ceramic process itself
Thin, more fine structure solid fuel cell, especially the micron even fuel cell of Nano grade.
As fuel cell is to the development of miniaturization, especially to the limitation of space size, to volume energy density requirement
Raising, have increasing need for the dimension of fuel cell to reduce, the micron even fuel cell of Nano grade are prepared in production.
The information disclosed in the background technology section is intended only to deepen the understanding to the general background technology of the application, and
It is not construed as recognizing or implying in any form that the information constitutes the prior art known to those skilled in the art.
Summary of the invention
For improve, even solve the problems, such as it is in the prior art at least one, present applicant proposes a kind of combustions of full solid thin film
Expect battery and preparation method thereof.
The application is achieved in that
In a first aspect, the example of the application provides a kind of production method of full solid thin film fuel cell.
The production method includes:
There is provided assembly, assembly includes successively the first current collector layer of lamination arrangement, first electrode layer, electrolyte layer, the
Two electrode layers and the second current collector layer；
Wherein, the first current collector layer has the first groove towards first electrode layer, and the second current collector layer has towards the second electrode lay
There is the second groove, and filled with the filler that can be removed in the first groove and the second groove；
Processing assembly makes filler be removed to form the fuel flow channel including the first groove and the second groove.
Fuel cell needs are fueled will pass through the chemical reaction of fuel (redox) and release energy, to turn
Electric energy is turned to power supply for electrical equipment.In the prior art generally for all solid state fuel cell of production, it is often necessary to lose its knot
Thickness on structure is lower so as to cause its energy density.
Normally, in the related technology, production fuel cell needs first to reserve fuel and provides channel and it is avoided to be blocked, and needs
The each structure for constituting fuel cell is prepared respectively, it is then laminated by the progress of appropriate technique, so that its thickness be made to be difficult to
It further reduces, and the specification of the fuel cell of the different batches of production, size and performance difference are larger.
In this application by improving its production method, before production fuel provides channel, it is initially formed fuel
Overall structure, then provide fuel to channel by way of post-processing and get through, to obtain all solid state film-form
Fuel cell.Channel is provided by forming fuel in post-processing, can avoid the need for reserving channel in advance to various processing works
The inconvenience of skill, and the thickness of fuel cell can be made significantly to reduce by the cooperation of technique.
With reference to first aspect, in the first possible embodiment of the first aspect of the application, the first current collector layer, second
Current collector layer is made of etching technics or depositing operation.
Etching technics and depositing operation can continue to use or borrow various equipment, technique in manufacture of semiconductor and therefore pass through
Mature technique can obtain the effect of better product quality and higher efficiency.
For the different structure sheafs in fuel cell, choosing can be corresponded to according to the needs of its function and the difficulty or ease of technique
Different technique is selected to realize more preferable technological effect.
For example, first electrode layer, second electrode and electrolyte layer take depositing operation to make.
For example, depositing operation includes sputtering sedimentation or pulse laser deposition.
With reference to first aspect, in some optional examples of second of possible embodiment of the first aspect of the application
In, the first current collector layer is made by the first material, and the first current collector layer obtains in the following manner:
Patterned first mask is formed in the base formed by the first material, it is recessed to form first by etching base
Slot；
Filler is filled in the first groove.
Passing through mask, etching and the first current collector layer of filler production is arranged may be implemented the technological operation more refined, with
Just thinner thickness and corresponding first groove are obtained.
It can choose to obtain thinner thickness in subsequent thinned base.
Needs based on subsequent operation, the production method of the first current collector layer also may include: to form first in etching base
It is executed before filling filler after groove, in the first groove and removes the first mask；Alternatively, filling filling in the first groove
It is executed after object and removes the first mask.
Second of possible embodiment with reference to first aspect, in the third possible implementation of the first aspect of the application
In some optional examples of mode, the second current collector layer is made by the second material, and the second current collector layer obtains in the following manner:
It is formed in second electrode using filler and removes layer；
Patterned second mask is formed removing layer, layer is removed by etching and forms the second groove, and removes mask；
The second material is filled into the second groove in such a way that covering removes layer.
With it is aforementioned similarly, mask and etching combine technique the adjustment to more fine structure may be implemented, so as to
To obtain the reduction effect on thickness.
With reference to first aspect, in some optional examples of the 4th kind of possible embodiment of the first aspect of the application
In, assembly includes third electrode, and third polar stack is placed in the second current collector layer；
Second current collector layer has the third groove away from the second electrode lay, and third groove is occupied by filler.
In order to integrate more batteries, in order to provide higher electric energy, more battery structures can be set.Thus not
It destroys on the basis of treated assembly, while being also unlikely to lead to the increase of thickness when subsequent production fuel cell,
Channel is provided in order to which subsequent processing forms fuel by forming third groove in the second current collector layer, it can be ensured that multiple fuel electricity
The electricity performance of pond overlaying structure having had.
With reference to first aspect, in some optional examples of the 5th kind of possible embodiment of the first aspect of the application
In, the method that processing assembly is removed filler includes:
Heating assembly makes filler disappear by way of burning or gasifying.
Filler can not only be removed by heating assembly, to form fuel feed passage, can also be made
Gather even closer, secured between each layer in the fuel cell of formation, and other connection fit systems can not needed
Auxiliary.
According to the difference of filler, heating method can have different selections, such as temperature, the time of heating etc..For example,
The mode of heating assembly includes: to heat assembly to filler by way of gradient increased temperature to disappear.
After filler removal, naturally it is also possible to select the type of cooling, to avoid causing due to being quickly cooled down
Cracking the problems such as, therefore, optionally, after filler disappearance, pass through the cooling assembly of gradient cooling mode.
Based on the suitable demand of convenient padding and heat treatment in a groove, optionally, filler is colloid, glue
Body includes polystyrene.
In second aspect, the example of the application provides a kind of full solid thin film fuel cell.
Full solid thin film fuel cell includes the first monocell.
First monocell therein includes the first collector plate that successively lamination is arranged, anode plate, electrolyte panel, cathode plate layer
And second collector plate.
First collector plate and the second collector plate are made using semiconductor silicon material, anode plate, electrolyte panel and yin
Pole plate is formed using ceramic material；
First groove is arranged towards anode plate in first collector plate, and second groove is arranged towards cathode plate in the second collector plate, the
One groove and second groove are configured to conveying fuel；
Full solid thin film fuel cell reaches micro-meter scale or nanoscale in the thickness of stack direction.
The above fuel cell is based on silicon materials and combines ceramic material, can pass through the process of manufacture of semiconductor
Processing and fabricating is carried out, it is hereby achieved that the all-solid-state battery of thickness smaller (film-grade).In this way, in the fuel electricity of same thickness
On the basis of pond, the fuel cell in the application can integrate the battery of more, to obtain higher volume energy density.
In conjunction with second aspect, in some optional examples of the first possible embodiment of the second aspect of the application
In, anode plate is in stack direction with a thickness of 10~100 microns；
Alternatively, electrolyte panel is in stack direction with a thickness of 5~30 microns；
Alternatively, cathode plate is in stack direction with a thickness of 10~100 microns；
Alternatively, the first collector plate is in stack direction with a thickness of 50~200 microns；
Alternatively, the second collector plate is in stack direction with a thickness of 50~200 microns.
Although the thickness of single battery can be defined to micron or nanoscale, the knot of each layer of inside battery
Structure can also carry out selective adjustment, to be changed accordingly according to the difference of each layer function, to improve battery
Performance.
In conjunction with the possible embodiment of the first of second aspect or second aspect, the second of the first aspect of the application
In some optional examples of the possible embodiment of kind, anode plate is made of the mixture of nickel oxide and the zirconium oxide for adulterating yttrium
It forms；
Alternatively, electrolyte panel is made using the zirconium oxide of doping yttrium；
Alternatively, cathode plate layer is made using rare-earth base perovskite composite oxides, wherein rare earth based perovskite is compound
Oxide includes lanthanum-strontium manganese ternary compound oxides.
Electrolyte panel, the electrode plate of ceramic base use the electrical performance having had, and material as battery functi on layer
It is low in cost, be easily obtained.
In conjunction with second aspect, in some optional examples of the third possible embodiment of the second aspect of the application
In, the second collector plate has the third groove away from the second groove；
Full solid thin film fuel cell includes at least one second monocell that lamination is arranged on the first monocell, at least
The second monocell of each of one second monocell include second plate plate, the second electrolyte panel, the second cathode plate layer and
Third collector plate, third collector plate have the 4th groove arranged towards the second cathode；
It is stacked, and is held in such a way that third collector plate and second plate plate contact between two neighboring second monocell
Third collector plate between second cathode and second plate is provided with the 5th groove, and the 5th groove deviates from the 4th trench layouts.
It, can be by integrating more batteries based on the needs of higher energy density.It is special with the structure of above-mentioned collector plate
It forms multiple cell stack structures by additional other structures layer with can be convenient for point, so as in thinner thickness
More batteries are integrated in degree.
During implementation above, the production method of full solid thin film fuel cell provided by the embodiments of the present application is by fuel
The formation of the forming process and each structure sheaf of battery that provide channel separates.Each structure sheaf is first stackably formed, so
Fuel is formed and handling aforementioned structure afterwards, channel is provided, making between two steps will not adversely mutual shadow each other
It rings and restricts, implement this method production fuel electricity so as to select and go in conjunction with the technique for being easily formed micro-structure and thin layer
Pond.
It is currently on the market fuel cell that electrolyte is liquid mostly with research.Therefore traditional to have liquid electrolyte
Fuel cell have no idea to accomplish such micro-nano structure, to miniaturization such as micron even Nano grade development it is very tired
It is difficult.Technique proposed in the application example can achieve the full solid thin film fuel cell of micro-nano structure.
Detailed description of the invention
Technical solution in ord to more clearly illustrate embodiments of the present application, below will be to needed in the embodiment attached
Figure is briefly described, it should be understood that the following drawings illustrates only some embodiments of the application, therefore is not construed as pair
The restriction of range for those of ordinary skill in the art without creative efforts, can also be according to this
A little attached drawings obtain other relevant attached drawings.
Fig. 1 is the structural schematic diagram for the assembly that the embodiment of the present application proposes；
Fig. 2 shows the structural schematic diagrams of the full solid thin film fuel cell based on assembly shown in FIG. 1；
Fig. 3 shows the structural schematic diagram of another full solid thin film fuel cell in the embodiment of the present application；
Fig. 4 shows the structural schematic diagram of another full solid thin film fuel cell in the embodiment of the present application；
Fig. 5 shows the flow diagram that the first current collector layer is made in the manufacture craft of the assembly in Fig. 1；
Fig. 6 is shown by the first current collector layer production first electrode layer, electrolyte layer, the second electrode lay and the shifting in Fig. 5
Except the flow diagram of layer；
Fig. 7 shows the flow diagram that assembly is made on the basis of Fig. 5.
Icon: 100- assembly；The first current collector layer of 101-；102- first electrode layer；103- electrolyte layer；The second electricity of 104-
Pole layer；The second current collector layer of 105-；106- filler；The first groove of 107-；The second groove of 108-；109- fuel flow channel；110-
Three grooves；111- second plate plate；The second electrolyte panel of 112-；The second cathode plate of 113-；114- third collector plate；115- second
Monocell；201- base；202- removes layer；The first mask of 203-；The second mask of 204-.
Specific embodiment
In this application, in the case where not contradiction or conflict, embodiments herein, embodiment and feature can be with
It is combined with each other.In this application, conventional unit, component etc., both can be commercially available, can also be according to disclosed in the present application
Content self-control.In this application, in order to protrude the emphasis of the application, some conventional operations and unit, component are carried out
Omission, or be only briefly described.
It with unique advantage, therefore is also a kind of very potential electric energy conversion dress for fuel cell
It sets.Its energy conversion efficiency is high and is produced electricl energy with relatively lower Environmental costs.For electrical equipment, continuation of the journey is one
The point for needing to pay close attention to.Therefore, people are also highly desirable to fuel cell certainly can provide enough electric energy.Based on this demand,
People are made that effort in terms of the fuel cell of exploitation high-energy density.
Currently, common processing mode is: by multiple cell stack parallel/series, however, such mode will obviously increase
The volume of refuelling battery, so that its portability and storage property be made to substantially reduce.Therefore, the advantages of being brought by higher continuation of the journey
Thus brought disadvantage can not be covered.
In consideration of it, the solution of the high volume energy density and compressed thickness that provide fuel cell just becomes a difficulty
Topic.
After study, inventor thinks that one of main crux of the problem is: the limitation master of existing Solid-state fuel cell
If since its process conditions is limited.Wherein one of problem is, in the related technology, fuel cell is often used in production
Ceramic process, so that its thickness be made to be typically difficult to further compress.And existing fuel cell process also tends to take off
Carry out from ceramic process.
In view of the above problems, inventors herein proposing a kind of method with the problem more than evading.One of improvement of this method
It is: the forming process that the fuel of fuel cell provides each structure sheaf in the forming process and fuel cell in channel is separated.
In example, it is initially formed each structure sheaf of fuel cell, then it is handled to form fuel and provide channel.In this way,
The forming process of each structure sheaf can be made thinner in fuel cell, and can provide channel without the concern for fuel
Forming process, thus more than preferably solving the problems, such as.
Fuel cell in the application example is a kind of structure of whole solid state, and forms stacked structure/layer shape structure.Cause
This, its each structure sheaf is also solid.Further, which is also a hull cell.Change speech
It, the thickness of the battery be it is relatively thin, can satisfy special cell thickness needs.Therefore, in some examples, fuel electricity
Pond can be referred to as with full solid thin film fuel cell.
The explanation of property as an example, the thickness of the fuel cell can be restricted to micron dimension, even nanometer amount
Grade.And such thickness is for existing fuel cell, is usually to be not easy to realize.However, it should be understood that
Although technique proposed in the application example can be used for making the battery with more thin structure, according to this method
It can be used for making the bigger fuel cell of thickness.
In addition, the full solid thin film fuel cell of single layer can be made using the method provided in the application example.When
So, this method can be used for the full solid thin film fuel cell of production multilayer, such as two layers, two layers, four layers, even more
Layer.It should be pointed out that " single layer "/" two layers " etc. described herein is the primary structure with fuel cell that battery is included
The number of the battery of layer.Subsequent, the battery addressed in this way is can be referred to monocell.Therefore, the fuel cell of single layer
It can refer to the first monocell；Two layers of fuel cell can refer to including two monocells, such as the first monocell and second
Monocell.
If only needing to do the full solid thin film fuel cell of a monomer or single layer, structure such as Fig. 2 uses Fig. 1 knot
Structure excludes filler clean through oversintering.If doing multilayer, therefore all monomers can be superimposed (work in layer
Can be realized by the deposition in manufacture of semiconductor in skill), unify sintering again after the completion of laminated construction and filler is excluded to do
Only.Here example only is done by the full solid thin film fuel cell of 2 layers of monomer, the 3rd can also be done again in fact, the 4th is waited packet
Containing 3 even the multilayer full solid thin film fuel cell of the above monomer.
For generally, the method in example can produce the core component of Solid-state fuel cell such as with combination film technique
Anode, cathode and electrolyte.In addition, by combination film and etching technics, it can be by the bipolar plates portion with groove structure
Part is effective and electrode is combined together, and constitutes a complete full battery structure.
Existing conventional fuel cell, this fluted block is bipolar plates, usually steel plate or graphite plate.In useization above
The method for learning corrosion, which etches, carrys out groove structure.Then ready-made bipolar plates are buckled on the positive and negative anodes of battery, form one very
Positive individual fuel cells.So being complete different preparation method with membrane fuel cell described in the application example
And process.Because conventional fuel cell is thick, the positive and negative anodes of bipolar plates and battery can be prepared separately completely.
However, electrode material thickness is only as membrane fuel cell desired in the application example and may be implemented
There are micron or even Nano grade, therefore inventor proposes to allow the material of bipolar plates as substrate or substrate, on this substrate first
Groove structure is etched, all technique is just established to be done step by step on the substrate.Secondly because the side of chemical attack
Method is unable to reach controllable the micron even etching of Nano grade, therefore the method that reactive ion beam etching (RIBE) can be used, industrially,
The controllable micron even microstructure of Nano grade can be reached with the method that reaction particle beam etches.
The method in example will be described in detail below.
The production method of full solid thin film fuel cell in example mainly includes the steps that following referring to S101 and step
S102, and may be in the subsequent some steps selectively added being mentioned.
Step S101, assembly 100 is provided.
The assembly 100 is provided with the fuel cell of a basic structure in principle.Also, from the angle that technique is realized
For on degree, combination film technique, refering to fig. 1, assembly 100 include first the 101, first electricity of current collector layer of successively lamination arrangement
Pole layer 102, electrolyte layer 103, the second electrode lay 104 and the second current collector layer 105.
From material level, above each structure sheaf can use ceramic material, specifically can be according to actual
Selection needs to be adjusted.Illustratively, for example, first electrode layer 102 uses nickel oxide and adulterates the combination of the zirconium oxide of yttrium
Object is made.The second electrode lay 104 can be made using rare-earth base perovskite composite oxides.Wherein, rare-earth base calcium
Titanium ore composite oxides include lanthanum-strontium manganese ternary compound oxides.Electrolyte panel can using doping yttrium zirconium oxide production and
At.
Refering to fig. 1 and Fig. 2, the first current collector layer 101 have the first groove 107, the second current collector layer towards first electrode layer 102
105 have the second groove 108 towards the second electrode lay 104, and being filled in the first groove 107 and the second groove 108 can
The filler 106 being removed, to remove the filler 106 in subsequent step S102 step.
For the first current collector layer 101 and the second current collector layer 105, the two (can be based on technique using identical material
The convenience of operation considers, and the two is also possible to be made by different materials of course) production.As its name suggests, the first afflux
101/ second current collector layer 105 of layer has the ability for collecting electric current, and therefore has corresponding structure.It can be by battery
The electric current that active material (oxidized reduction reaction) generates collects, and forms current versus output macroscopically.?
Therefore, to improve or improving the ability for collecting charge, two current collector layers can usually come into full contact with active material, and internal resistance is answered
It is as small as possible to be preferred.It is considered based on such, current collector layer can be made of silicon materials used in semiconductor technology.Invention
People thinks that the electric conductivity of silicon materials (such as semiconductor silicon) is just able to satisfy the functionality of fuel cell current collection.
In order to facilitate understanding, which can obtain similar with the second current collector layer 105 in lithium ion battery
Structure show.In lithium ion battery, this is often meant that, metal foil, such as copper foil, aluminium foil.In this application, alternative
Ground, such as above-mentioned current collector layer can be silicon thin film.
For from structure, above each structure sheaf can have different thickness, specifically can be according to actual choosing
Needs are selected to be adjusted.For example, first electrode layer 102 is in stack direction with a thickness of 10~100 microns；The second electrode lay 104
In stack direction with a thickness of 10~100 microns；Electrolyte layer 103 is in stack direction with a thickness of 5~30 microns；First afflux
Layer 101 is in stack direction with a thickness of 50~200 microns；Second current collector layer 105 is in the micro- with a thickness of 50~200 of stack direction
Rice.Although here, give the thickness of each structure sheaf (substantially and functional layer), this is not intended to restriction or more
Thickness be necessary.On the contrary, each structure sheaf can have different thickness, and usually bigger thickness is to be easy to real
It applies, and smaller thickness may generally require finer and exacting terms to realize.For example, passing through choosing as above-mentioned
Selecting the thin-film technique in manufacture of semiconductor may be implemented the scale control of micron, even nanometer.It should be noted, however, that right
In micron, the micro-structure of even nanometer all solid state membrane fuel cell for, using except semiconductor technology, it is also necessary to
The processing side in channel is provided to obtain fuel by subsequent processing (the step S102 as follows referred to) in conjunction with described above
Formula.
The technique of each structure sheaf in process aspect, assembly 100 has a variety of possible selections.But generally and
Speech, the first current collector layer 101, the second current collector layer 105 can be made of etching technics or depositing operation.Generally, when the first collection
When fluid layer 101 is made by etching technics, the second current collector layer 105 usually can choose depositing operation production, and vice versa.
First electrode layer 102, second electrode and electrolyte layer 103 take depositing operation to make.Wherein, depositing operation includes that sputtering is heavy
Long-pending or pulse laser deposition.Based on such elaboration, it is recognised that assembly 100 is mainly in conjunction with increasing material and subtract the side of material
Formula is made.
As an example, the first current collector layer 101 obtains in the following manner:
First step, refering to Fig. 5, formed in the base 201 for the first material production for being used to form the first current collector layer 101
Patterned first mask 203.For example, surface coverage mask plate, the mask plate have on a silicon substrate by semiconductor technology
The figure showed in a manner of hole, through-hole, through slot etc..
Second step, refering to Fig. 5, pass through etching base/base 201 and form the first groove 107.Figure therein will be constituted
The a part in fuel offer channel.For example, making substrate by high-energy light beam guiding by the etching base of the hole of mask plate using laser
Calcination and remove some materials formed channel.It is apparent that the first mask 203 can be kept under etching condition (such as laser irradiation)
The stability of its own, i.e., will not simultaneously superlaser ablation.It is therefore contemplated that the first mask 203 is the non-of etching condition
Bright material, etching condition can only penetrate the first mask 203 at patterned area (such as groove) and be irradiated in base 201.In addition, being
Avoid etching that the figure come is different from desired shape, and therefore, etching condition, which is contemplated to be, vertically to be irradiated in base 201
It, will be on the figure " transfer " to base 201 on the first mask 203 to reach in mask plate.
Third step fills filler 106 in the first groove 107, refering to Fig. 6.
Filler 106 can choose the various substances being easily removed, and not cause because removing filler 106 to substrate
Detrimental effect.As a kind of selection, filler 106 can choose the substance for being easy to be removed by heating.
It in initial provide is mentioned with relatively thicker state (can play a supporting role) in view of base 201
For therefore, after executing the above first step to third step, can choose and handle base 201, that is, subtract come what is used
Thin base 201.It means that being carried out to it thinned when base 201 can provide a supporting role in the state of relatively thinner
The step of processing, can not need to execute.
Further, the needs for being made other structures layer in the first current collector layer 101 based on subsequent, can choose first
Mask 203 removes.The opportunity of mask removal for example can be after etching base forms the first groove 107, in the first groove
It is executed before filling filler 106 in 107 and removes the first mask 203；Alternatively, in the first groove 107 fill filler 106 it
It executes afterwards and removes the first mask 203.Since the first mask 203 does not need the surface for being particularly fixed on base 201,
It is also to be easily achieved that it, which is removed,.
Adaptably with the production method of the first above-mentioned current collector layer 101, the second collector plate can be made by the second material
It forms, accordingly the second current collector layer 105 can be obtained in the following manner (refering to Fig. 7):
Layer 202 is removed firstly, being formed in the second electrode lay 104 using the material of filler.Usually removing layer 202 can lead to
It crosses to carry out the coating method such as scratching using filler material and be formed, still, based on special thickness requirement, it may be necessary to take it
His mode, which handles filler, covers it on the second electrode with thinner thickness.
Secondly, forming patterned second mask 204 removing layer 202, it is recessed to remove the formation second of layer 202 by etching
Slot, and remove mask.
Similar with the first current collector layer 101 of aforementioned production, the second mask 204 is the opaque body of etching condition.Etch item
Part is only contacted by such as through-hole of the second mask 204, through slot structure with second electrode, and causes ablation etc. to second electrode
Role and influence.Second mask 204 can be made using material identical with the first mask 203, still, patterned
Shape, magnitude/size can be different with the first mask 203.For example, the patterned structures of the first mask 203 can be with
Multiple fillet connected in stars that first size equidistantly arranges；The patterned structures of second mask 204 can be with the second size (no
With and first size, such as larger than or be less than) multiple fillet connected in stars for equidistantly arranging.It can certainly be other layout sides
Formula, for example, multiple fillet connected in stars of the first mask 203 arrange in a first direction, multiple fillet connected in stars of the second mask 204
In second direction arrangement (vertical with first direction).
By the way that the second mask 204 removed after etching, thus make in second electrode part is removed by filler material after
Removal layer have patterned structures identical with the second mask 204.
Again, the second material is filled into the second groove in such a way that covering removes layer 202.
By previous step, removes layer 202 and form fluted i.e. the second groove 108.As a result, by the second groove 108
The second material of interior filling, the second groove 108 is filled up.It is based further on the needs such as charge transfer and cell package, the second material
Material, which can be, covers the whole for removing layer 202.Therefore, the second material not only has the part in the second groove 108,
Also there is the surface in removal layer 202 and cover the region for removing not set second groove 108 of layer 202.
When the second current collector layer 105 of the above production, the removal layer 202 mainly constituted by forming complete filler 106,
The removal for carrying out part to it again refills the making material (the second material) of the second current collector layer 105.In other examples,
It is also possible to directly make and has reeded graphical removal layer 202.For example, on the second electrode by mask covering, then again
106 material of filler is covered on mask by way of such as brushing.The mask can be the complementary mask of the second mask 204
(i.e. the two is made by same sheet material, and the hole of one is used for shape for etching removal 106 material of filler, the hole of another one
At 106 material of filler).
As a kind of further embodiment, in other examples of the application, in order to integrate more fuel cells
Structure may also comprise third electrode in assembly 100, and the third polar stack is placed in the second current collector layer 105.Show such
Example in, the second current collector layer 105 be usually with bipolar plates (channel pass fuel can be passed through in the two sides of thickness direction) by way of
It is produced and utilizes, therefore, the second current collector layer 105 has the third groove 110 away from the second electrode lay 104, and third groove
110 are occupied by filler 106.In this way, in other further examples, it is subsequent to be formed and first electrode layer 102, electricity
Solve matter layer 103, the second electrode lay 104 and the similar electrode of the second current collector layer 105, electrolyte, electrode and current collector layer structure.
In this way, such fuel cell can be equal to the cascaded structure of two batteries.In other words, the production method of assembly 100
The step of may also include production electrode, electrolyte, electrode and current collector layer structure.
First mask 203 mentioned above and a kind of the second mask 204 (can be photomask, Photomask) can be with
Using the various mask materials in existing manufacture of semiconductor, it is not particularly limited in the application.In order to be more clearly understood that
Mask in example, such as can choose metal, glass (such as quartz glass, Pyrex) production mask.Mask can be one
A structure with rectangular section can have multiple hole slots etc. for subsequent production fuel and provide channel.
Step S102, processing assembly 100 is removed to form filler 106 recessed including the first groove 107 and second
The fuel flow channel 109 of slot 108.
The mode of assembly 100 is handled there are a variety of possible selections, with specific reference to the property also assembly of filler 106
The property of each structure sheaf in 100 is chosen.For example, in a kind of optional example, when filler 106 can pass through heat treatment
Removal, and when heat treatment is not sufficient to damage each structure sheaf (such as the first current collector layer 101), can choose heating assembly
100.Therefore, the method that processing assembly 100 is removed filler 106 includes: that heating assembly 100 keeps filler 106 logical
The mode for crossing burning or gasification disappears.
In some examples above-mentioned, the first current collector layer 101 and the second current collector layer 105 are silicon materials, and first electrode
Layer 102, the second electrode lay 104 and electrolyte layer 103 are ceramic materials, and filler 106 is that colloid has polystyrene
When, it can choose heating assembly 100.The temperature of heating can be 1000 DEG C, heating time be 2 hours, colloid is heated
It vapors away.Filler 106 can also be other high molecular materials such as polypropylene, polyethylene etc. resin material.This is understood that
It is handled for assembly 100 by sintering process, eliminates filler 106, and each structure sheaf of ceramic material is made to combine closely
And reinforcing.
It, can be to the control that its heating method is more refined, for example, heating group corresponding to the scheme of the heat treatment
The mode of zoarium 100 includes: to heat assembly 100 to filler 106 by way of gradient increased temperature to disappear.By to heating side
The selection of formula may make it easier for removing for certain 106 material of filler, while may also be ensured that in assembly 100
Other structures layer more firmly combine.
Further, after heating, based on test, use need to cool down it, therefore, in filler 106
After disappearance, it can choose by the cooling assembly 100 of gradient cooling mode, to make assembly 100 not occur feelings of such as chapping
Condition.Certainly, the heat treatment of assembly 100 can be to be placed directly in the container (such as furnace) such as 1000 DEG C and directly adds
Heat, then air cooling or furnace cooling.
In addition to above-mentioned heat treatment, or filler 106 can also be made to remove by such as chemically reacting, such as pass through illumination
It reacts it and disappears or remove filler 106 by other chemical reactions.But, it is contemplated that it is each in assembly 100
It can be in conjunction with more firm, therefore, if filler 106 cannot be removed by temperature appropriate by heat treatment between a structure sheaf
In the case where (can not still eliminate on temperature of each structure sheaf by high temperature), can first be heat-treated assembly 100 makes
Each structure sheaf combines, and then handles filler 106 in the corresponding mode of use and removes it.
It is explained above and removes filler 106 by the modes such as being heat-treated, chemically reacting, still, it is not excluded that pass through machine
Tool mode removes filler 106.For example, filler 106 can be used magnetisable material production, pass through when needing to remove it
As magnet absorption and remove filler 106.Alternatively, using atomic small (less than the width of the first groove 107 and the second groove 108
Degree) probe, filler 106 is removed in a manner of puncture, extruding, dragging etc..
Alternatively, the mode of removal filler 106, which is also possible to chemical reaction, combines mode with mechanical treatment.For example, logical
Crossing chemical reaction makes filler 106 change and the contact jail between groove (such as the first groove 107 and the second groove 108)
Gu degree decline even loosens filler 106, so as to remove filler 106 by various mechanical systems appropriate.
In addition, first electrode and second electrode described above can be cathode, anode respectively, naturally it is also possible to be point
It is not anode, cathode.
Corresponding to above-mentioned process, a kind of full solid thin film fuel cell is obtained in example.
In a kind of embodiment, which substantially can be first monocell.It is in thickness
(stack direction) reaches micro-meter scale or nanoscale.First monocell includes the first collector plate that successively lamination is arranged, anode
Plate, electrolyte panel, cathode plate layer and the second collector plate.
First groove is arranged towards anode plate in first collector plate, and second groove is arranged towards cathode plate in the second collector plate, the
One groove and second groove are configured to conveying fuel.
Wherein, the first collector plate and the second collector plate are made using semiconductor silicon material, anode plate (e.g., zinc oxide/
Stable zirconium oxide/the YSZ of ZnO+ yttrium), electrolyte panel (such as YSZ) and cathode plate (such as LaSrMnOx/ lanthanum strontium manganese oxygen or strontium manganate
Lanthanum) it is formed using ceramic material.Anode plate can be made using the composition of nickel oxide and the zirconium oxide for adulterating yttrium；
Alternatively, electrolyte panel is made using the zirconium oxide of doping yttrium；Alternatively, cathode plate layer uses rare earth based perovskite combined oxidation
Object is made, wherein rare-earth base perovskite composite oxides include lanthanum-strontium manganese ternary compound oxides.
For the thickness of the first monocell, and following effect can be realized by the reasonable selection of above-mentioned technique: sun
Pole plate is in stack direction with a thickness of 10~100 microns；Alternatively, electrolyte panel is in stack direction with a thickness of 5~30 microns；Or
Person, cathode plate is in stack direction with a thickness of 10~100 microns；Alternatively, first collector plate stack direction with a thickness of 50~
200 microns；Alternatively, the second collector plate is in stack direction with a thickness of 50~200 microns.
Further, in other examples, full solid thin film fuel cell may include two single-cell structures, if any preceding
The first monocell and following the second monocells 115 that will be mentioned stated (refering to Fig. 4).First monocell and the second monocell
115 can be integrated in micron and nanoscale similar to concatenated mode.Certainly, in other examples, full solid thin film fuel
Battery also may include the monocell of three to become one or four or five or more.It below will be by first single electricity
It is illustrated for the battery (following to be referred to by bilayer cells generation) that pond and the second monocell 115 are constituted.
Bilayer cells include stacked first monocell and second monocell 115.For multi-layer cell,
It will include multiple second monocells 115.
In bilayer cells, the first monocell can be made to be adaptively adjusted as follows, so that it matches with the second monocell 115
It closes.For example, the second collector plate of the first monocell has third groove (in other words, the second afflux away from the second groove
Plate has two surface/top surface and bottom surface grooves --- second groove and the third groove for being distributed in thickness direction).
For two layers of battery in multi-layer cell comprising lamination is arranged in one second list on the first monocell
Battery 115.Second monocell 115 includes second plate plate 111, the second electrolyte panel 112, the second cathode plate 113 and third
Collector plate 114, third collector plate 114 have the 4th groove arranged towards the second cathode.Structure shown in Fig. 3 is as bilayer
And a front layer of above three layers or more of fuel cell structure is provided, complete battery structure is based on its subsequent production shape
At.In Fig. 3, schematic structure includes one layer of monocell and the structure sheaf being formed thereon composition.Wherein, one layer of monocell is by
One current collector layer, 101 to the second current collector layer 105 (having upper and lower two grooves) is constituted；" structure sheaf being formed thereon " includes second
Anode 111.Hole (such as the first groove 107) is formd with each current collector layer although showing it in Fig. 3, for
For one complete full solid thin film fuel cell with expected the number of plies (such as 1,2,3), the formation of hole is complete
After portion structure sheaf/functional layer stacking completes, constructed by the filler in sintering removal hole.
For three layers in multi-layer cell and the above battery, with third collection between two neighboring second monocell 115
The mode that flowing plate 114 and second plate plate 111 contact is stacked, and the third afflux being held between the second cathode and second plate
Plate 114 is provided with the 5th groove, and the 5th groove deviates from the 4th trench layouts.
For example, as a kind of explanation being more readily understood, when the quantity of the second monocell 115 is one, second single electricity
Pond 115 is incorporated in the second collector plate of the first monocell with second plate plate 111, and the third groove of the second collector plate is towards
The third collector plate 114 of the second plate plate 111 of two monocells 115, second monocell has the monocell towards second
4th groove of the second cathode plate 113 setting.
When the quantity of the second monocell 115 is two and is denoted as the first bottom cell and the first top cell respectively, the
One bottom cell and the first top cell contact stacked, the first bottom list of contact with second plate plate 111 with third collector plate 114
Fiveth groove opposite with third groove is arranged in the third collector plate 114 of battery.
When the quantity of the second monocell 115 is three or more, with second plate between two neighboring second monocell 115
Plate 111 contacts second single electricity that is stacked, and contacting in the second whole monocells 115 with the first battery with third collector plate 114
Pond 115 is defined as bottom cell, outermost second monocell 115 is defined as top cell, is located at bottom cell and top layer electricity
Second monocell 115 in pond is defined as middle layer battery.
For the technique in some of the above example and the fuel cell by its production, at least have for example as next
A little advantages.
(1) full solid thin film fuel cell thickness can be reduced to micron or even Nano grade.(2) above-mentioned technique can be with
Produce the full solid thin film fuel cell of single layer and two layers, multilayer.(3) combination film technique produce anode, cathode and
Electrolyte.It is the bipolar plate components with groove structure are effective and electrode is incorporated in one in addition, combination film and etching technics
It rises, constitutes a complete full battery structure.(4) above-mentioned technique is integrated manufacturing process, entire full solid thin film combustion
Material battery integrates in the manufacturing process of a set of combination.(5) process flow can use for reference semiconductor technology, and combine
Ceramic material and ceramic sintering process.
The foregoing is merely preferred embodiment of the present application, are not intended to limit this application, for the skill of this field
For art personnel, various changes and changes are possible in this application.Within the spirit and principles of this application, made any to repair
Change, equivalent replacement, improvement etc., should be included within the scope of protection of this application.
Claims (10)
1. a kind of production method of full solid thin film fuel cell, which is characterized in that the production method includes:
There is provided assembly, the assembly includes successively the first current collector layer of lamination arrangement, first electrode layer, electrolyte layer, the
Two electrode layers and the second current collector layer；
Wherein, first current collector layer has the first groove towards the first electrode layer, and second current collector layer is towards described
The second electrode lay has the second groove, and filled with the filling that can be removed in first groove and second groove
Object；
Handling the assembly makes the filler be removed to form the fuel stream including first groove and the second groove
Road.
2. the production method of full solid thin film fuel cell according to claim 1, which is characterized in that first afflux
Layer, second current collector layer are made of etching technics or depositing operation；
Preferably, the first electrode layer, the second electrode and the electrolyte layer take depositing operation to make；
It is highly preferred that the depositing operation includes sputtering sedimentation or pulse laser deposition.
3. the production method of full solid thin film fuel cell according to claim 1, which is characterized in that first afflux
Layer is made by the first material, and first current collector layer obtains in the following manner:
Patterned first mask is formed in the base formed by first material, forms first by etching the base
Groove；
The filler is filled in first groove；
Preferably, the base is thinned；
Preferably, the acquisition pattern of first current collector layer includes: after etching the base and forming the first groove, described
It is executed before the filling filler in first groove and removes first mask；Alternatively, filling institute in first groove
Execution removes first mask after stating filler.
4. the production method of full solid thin film fuel cell according to claim 3, which is characterized in that second afflux
Layer is made by the second material, and second current collector layer obtains in the following manner:
It is formed in the second electrode using the filler and removes layer；
Patterned second mask is formed in the removal layer, forms the second groove by etching the removal layer, and remove institute
State mask；
The second material is filled into the second groove in a manner of covering the removal layer.
5. the production method of full solid thin film fuel cell according to claim 1, which is characterized in that the assembly packet
Third electrode is included, and the third polar stack is placed in second current collector layer；
Second current collector layer has the third groove away from the second electrode lay, and the third groove is by the filler
It occupies.
6. the production method of full solid thin film fuel cell according to claim 1, which is characterized in that handle the combination
The method that body is removed the filler includes:
Heating the assembly makes the filler disappear by way of burning or gasifying；
Preferably, the mode for heating the assembly includes: to heat the assembly by way of gradient increased temperature to fill out to described
Fill object disappearance；
It is highly preferred that passing through the cooling assembly of gradient cooling mode after filler disappearance；
It is further preferred that the filler is colloid, the colloid includes polystyrene.
7. a kind of full solid thin film fuel cell, which is characterized in that including the first monocell；
First monocell includes successively the first collector plate of lamination arrangement, anode plate, electrolyte panel, cathode plate layer and the
Two collector plates, wherein the first collector plate and the second collector plate are made using semiconductor silicon material, the anode plate, described
Electrolyte panel and the cathode plate are formed using ceramic material；
First groove is arranged towards the anode plate in first collector plate, and second collector plate is arranged towards the cathode plate
Second groove, the first groove and the second groove are configured to conveying fuel；
The full solid thin film fuel cell reaches micro-meter scale or nanoscale in the thickness of stack direction.
8. full solid thin film fuel cell according to claim 7, which is characterized in that the anode plate is in stack direction
With a thickness of 10~100 microns；
Alternatively, the electrolyte panel is in stack direction with a thickness of 5~30 microns；
Alternatively, the cathode plate is in stack direction with a thickness of 10~100 microns；
Alternatively, first collector plate is in stack direction with a thickness of 50~200 microns；
Alternatively, second collector plate is in stack direction with a thickness of 50~200 microns.
9. full solid thin film fuel cell according to claim 7 or 8, which is characterized in that the anode plate is using oxidation
The mixture of the zirconium oxide of nickel and doping yttrium is made；
Alternatively, the electrolyte panel is made using the zirconium oxide of doping yttrium；
Alternatively, the cathode plate layer is made using rare-earth base perovskite composite oxides, wherein the rare earth based perovskite
Composite oxides include lanthanum-strontium manganese ternary compound oxides.
10. full solid thin film fuel cell according to claim 7, which is characterized in that second collector plate has back
Third groove from the second groove；
The full solid thin film fuel cell includes at least one second monocell that lamination is arranged on first monocell,
The second monocell of each of at least one second monocell includes second plate plate, the second electrolyte panel, the second cathode
Plate layer and third collector plate, the third collector plate have the 4th groove arranged towards second cathode；
It is stacked in such a way that third collector plate and second plate plate contact between two neighboring second monocell, and is held on second
Third collector plate between cathode and the second plate is provided with the 5th groove, and the 5th groove deviates from the 4th groove
Layout.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910274819.XA CN109950597A (en) | 2019-04-04 | 2019-04-04 | A kind of full solid thin film fuel cell and preparation method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910274819.XA CN109950597A (en) | 2019-04-04 | 2019-04-04 | A kind of full solid thin film fuel cell and preparation method thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109950597A true CN109950597A (en) | 2019-06-28 |
Family
ID=67013797
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910274819.XA Pending CN109950597A (en) | 2019-04-04 | 2019-04-04 | A kind of full solid thin film fuel cell and preparation method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109950597A (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20070190379A1 (en) * | 2006-02-15 | 2007-08-16 | Lulu Song | Controlled-release vapor fuel cell |
| CN101582508A (en) * | 2008-05-13 | 2009-11-18 | 通用汽车环球科技运作公司 | Three-dimensional hydrophilic porous structure for fuel cell plate |
| CN103594719A (en) * | 2012-08-16 | 2014-02-19 | 中国科学院上海高等研究院 | Fuel cell |
| CN105529489A (en) * | 2016-01-20 | 2016-04-27 | 深圳先进技术研究院 | Preparation method for all-solid-state secondary battery assembly |
-
2019
- 2019-04-04 CN CN201910274819.XA patent/CN109950597A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20070190379A1 (en) * | 2006-02-15 | 2007-08-16 | Lulu Song | Controlled-release vapor fuel cell |
| CN101582508A (en) * | 2008-05-13 | 2009-11-18 | 通用汽车环球科技运作公司 | Three-dimensional hydrophilic porous structure for fuel cell plate |
| CN103594719A (en) * | 2012-08-16 | 2014-02-19 | 中国科学院上海高等研究院 | Fuel cell |
| CN105529489A (en) * | 2016-01-20 | 2016-04-27 | 深圳先进技术研究院 | Preparation method for all-solid-state secondary battery assembly |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| TWI224883B (en) | Fuel cell with embedded current collector | |
| CN102473987B (en) | Comprise electronic storage device and the block configuration of oxide ion cell battery pack | |
| Liu et al. | Bipolar electrodes for next‐generation rechargeable batteries | |
| JP2022125048A (en) | secondary battery | |
| JP6662802B2 (en) | Oxide all solid state battery | |
| EP2248216B1 (en) | Flexible thin film solid state lithium ion batteries | |
| US6740441B2 (en) | Metal current collect protected by oxide film | |
| CN108336154A (en) | Crystal silicon solar energy battery and preparation method thereof | |
| CN107112595A (en) | Amorphous cathode material for cell apparatus | |
| US8399147B2 (en) | Electrolyte-electrode assembly comprising an apatite-type oxide electrolyte and method for manufacturing the same | |
| KR20000059873A (en) | Single Cell and Stack Structure of Solid Oxide Fuel Cell | |
| JP2009071262A (en) | Private charging type secondary battery using light energy | |
| JPH0748378B2 (en) | Air electrode for solid electrolyte fuel cell and solid electrolyte fuel cell having the same | |
| JPH0161233B2 (en) | ||
| CN106374120A (en) | Structure of self-sealed flat-shaped solid oxide fuel cell/electrolytic cell | |
| EP3419085B1 (en) | Three-dimensional electrode structure, and secondary battery including the same | |
| KR101308096B1 (en) | Anode for rechargeable lithium thin film battery, method of preparing thereof, and rechargeable lithium thin film battery comprising the same | |
| CN112133885B (en) | Battery core and secondary battery with three-layer pole piece structure | |
| JP2006236685A (en) | Negative electrode, battery, and their manufacturing method | |
| CN102054981A (en) | Anode material doped with hydrogen and carbon elements and preparation method thereof | |
| CN209561540U (en) | A kind of collector plate, fuel cell and its precursor | |
| CN109950597A (en) | A kind of full solid thin film fuel cell and preparation method thereof | |
| JP2841340B2 (en) | Solid electrolyte fuel cell | |
| KR100699074B1 (en) | Honeycomb-type solid oxide fuel cell and method for manufacturing the same | |
| CN109360991A (en) | A kind of low-temperature solid oxide fuel cell composite cathode and preparation method thereof |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |