CN109940350B - Isostatic pressing cylindrical target material thread machining method - Google Patents
Isostatic pressing cylindrical target material thread machining method Download PDFInfo
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- CN109940350B CN109940350B CN201910259659.1A CN201910259659A CN109940350B CN 109940350 B CN109940350 B CN 109940350B CN 201910259659 A CN201910259659 A CN 201910259659A CN 109940350 B CN109940350 B CN 109940350B
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Abstract
The invention relates to the field of target processing, in particular to a method for processing threads of an isostatic pressing cylindrical target, which comprises the following steps of providing threads and a copper sleeve of the target, wherein the outer circle and the thread surface of the target have a processing allowance of 0.5-2 mm; turning the target material, wherein the target material is turned on a lathe to form an end face, and the inner diameter of the target material is finely turned; placing the copper sleeve on an oven for heating and baking, sleeving the copper sleeve on the target material, and tightly matching the copper sleeve and the target material by adopting an isostatic pressing technology; drilling pin holes on the target material on a drilling machine, and drilling pins; and further turning the target on a lathe, turning threads on one surface of the target, and turning the reference size of the target. By the processing method, the purposes of simple processing, good product quality, high working efficiency and the like are achieved.
Description
Technical Field
The invention relates to the field of target processing, in particular to a method for processing threads of an isostatic pressing cylindrical target.
Background
The sputtering technology is one of the common processes in the field of semiconductor manufacturing, and with the increasing development of the sputtering technology, the sputtering target plays an increasingly important role in the sputtering technology, and the quality of the sputtering target directly influences the film forming quality after sputtering. The target material with strict component proportion, fine organization structure, high purity, high density and large size is the basic requirement of modern high-end optical and electrical device manufacturing industries, such as industries of displays, solar thin film batteries and the like. This also puts higher demands on the traditional target material production and preparation technology and equipment.
The existing target processing method has the disadvantages of complex process, unsatisfied product quality requirements of users, low working efficiency, increased cost and poor practicability.
Disclosure of Invention
In order to solve the technical problems, the invention provides the isostatic pressing cylindrical target material thread machining method which is simple to machine, good in product quality and high in working efficiency.
The invention adopts the following technical scheme:
the isostatic pressing cylindrical target material thread processing method comprises the following processing steps,
s1, providing a thread and a copper bush of the target, wherein the outer circle and the thread face of the target have machining allowance of 0.5-2 mm;
s2, turning the target, wherein the target is turned on a lathe to form an end face, and the inner diameter of the target is finely turned;
s3, placing the copper sleeve on an oven for heating and baking, sleeving the copper sleeve on the target material, and tightly matching the copper sleeve and the target material by adopting an isostatic pressing technology;
s4, drilling pin holes on the target material on a drilling machine, and drilling pins;
and S5, further turning the target on a lathe, turning threads on one surface of the target, and turning the reference dimension of the target.
In the step S3, the heating temperature is 250 ℃, the expansion coefficient of the copper sleeve is 17.2-17.9, and the inner diameter size of the expanded copper sleeve is 0.05-1 mm larger than the outer circle size of the target material; the target material is one of chromium, titanium or aluminum.
In a further improvement of the above technical solution, in step S1, the outer circle of the target and the thread surface have a machining allowance of 2 mm.
The technical scheme is further improved in that in step S1, the inner diameter of the target is 0.1-0.15 mm larger than that of the copper sleeve.
The technical proposal is further improved in that in the step S3, when the copper sleeve expands to the inner diameter size larger than the outer circle size of the target material, the copper sleeve is sleeved on the target material quickly, wood is pressed on the target material, and an iron hammer is used for beating the target material forcefully.
The technical scheme is further improved in that aluminum sheets are padded on the target and the copper sleeve in the turning process.
The invention has the beneficial effects that:
1. the method comprises the following steps of providing a thread and a copper sleeve of a target, wherein the outer circle and the thread surface of the target have machining allowance of 0.5-2 mm; turning the target material, wherein the target material is turned on a lathe to form an end face, and the inner diameter of the target material is finely turned; placing the copper sleeve on an oven for heating and baking, sleeving the copper sleeve on the target material, and tightly matching the copper sleeve and the target material by adopting an isostatic pressing technology; drilling pin holes on the target material on a drilling machine, and drilling pins; the target material is further turned on a lathe, threads are turned on one surface of the target material, and the reference size of the target material is turned.
2. The target material is one of chromium, titanium or aluminum, various metal targets can be processed, the application range of the process is wide, the working efficiency is effectively improved, and the cost is saved.
3. In the step S1, the outer circle and the thread surface of the target have machining allowance of 2mm, so that the target can be conveniently turned, the working efficiency is improved, the cost is saved, and the practicability is improved.
4. In step S1, the inner diameter of the target is 0.1-0.15 mm larger than the inner diameter of the copper sleeve, and in this range, the copper sleeve needs to be processed, so that the size of the copper sleeve can be sleeved on the target, and when the copper sleeve is not deformed, the size of the copper sleeve does not need to be given to the inner diameter of the copper sleeve, the inner diameter of the copper sleeve is used as a reference, and the size of the turned target is matched with the inner diameter of the copper sleeve, so that the processing time is effectively saved, the processing efficiency is improved, and the practicability is high.
5. In the step S3, the heating temperature is 250 ℃, the expansion coefficient of the copper sleeve is 17.2-17.9, and under the temperature and the expansion coefficient of the copper sleeve, the copper sleeve can effectively expand to be matched with the size of the target material, so that the working efficiency is further improved, and the practicability is high.
6. In the step S3, when the copper sleeve expands to the inner diameter size larger than the outer circle size of the target material, the copper sleeve is quickly sleeved on the target material and pressed on the target material by wood, and an iron hammer is used for beating forcefully, so that the copper sleeve and the target material are effectively further tightly matched together, and the working efficiency is effectively improved.
7. The inner diameter of the expanded copper sleeve is larger than the outer circle of the target by 0.05-1 mm, the copper sleeve and the target are effectively tightly matched in the range, the working efficiency is further improved, and the practicability is high.
8. In the turning process, all fill up at target and copper sheathing and be equipped with the aluminum sheet, prevent effectively that target and copper sheathing from being pressed from both sides by the anchor clamps on the lathe and hindering, the protection is effectual, further improves product quality, and the practicality is strong.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the embodiments of the present invention.
The method comprises the following steps of providing a thread and a copper sleeve of a target, wherein the outer circle and the thread surface of the target have machining allowance of 0.5-2 mm; turning the target material, wherein the target material is turned on a lathe to form an end face, and the inner diameter of the target material is finely turned; placing the copper sleeve on an oven for heating and baking, sleeving the copper sleeve on the target material, and tightly matching the copper sleeve and the target material by adopting an isostatic pressing technology; drilling pin holes on the target material on a drilling machine, and drilling pins; and further turning the target on a lathe, turning threads on one surface of the target, and turning the reference size of the target.
The target material is one of chromium, titanium or aluminum, various metal targets can be processed, the application range of the process is wide, the working efficiency is effectively improved, and the cost is saved.
In the step S1, the outer circle and the thread surface of the target have machining allowance of 2mm, so that the target can be conveniently turned, the working efficiency is improved, the cost is saved, and the practicability is improved.
In step S1, the inner diameter of the target is 0.1-0.15 mm larger than the inner diameter of the copper sleeve, and in this range, the copper sleeve needs to be processed, so that the size of the copper sleeve can be sleeved on the target, and when the copper sleeve is not deformed, the size of the copper sleeve does not need to be given to the inner diameter of the copper sleeve, the inner diameter of the copper sleeve is used as a reference, and the size of the turned target is matched with the inner diameter of the copper sleeve, so that the processing time is effectively saved, the processing efficiency is improved, and the practicability is high.
In the step S3, the heating temperature is 250 ℃, the expansion coefficient of the copper sleeve is 17.2-17.9, and under the temperature and the expansion coefficient of the copper sleeve, the copper sleeve can effectively expand to be matched with the size of the target material, so that the working efficiency is further improved, and the practicability is high.
In the step S3, when the copper sleeve expands to the inner diameter size larger than the outer circle size of the target material, the copper sleeve is quickly sleeved on the target material and pressed on the target material by wood, and an iron hammer is used for beating forcefully, so that the copper sleeve and the target material are effectively further tightly matched together, and the working efficiency is effectively improved.
The inner diameter of the expanded copper sleeve is larger than the outer circle of the target by 0.05-1 mm, the copper sleeve and the target are effectively tightly matched in the range, the working efficiency is further improved, and the practicability is high.
In the turning process, all fill up at target and copper sheathing and be equipped with the aluminum sheet, prevent effectively that target and copper sheathing from being pressed from both sides by the anchor clamps on the lathe and hindering, the protection is effectual, further improves product quality, and the practicality is strong.
The method comprises the following steps of providing a thread and a copper sleeve of a target, wherein the outer circle and the thread surface of the target have machining allowance of 0.5-2 mm; turning the target material, wherein the target material is turned on a lathe to form an end face, and the inner diameter of the target material is finely turned; placing the copper sleeve on an oven for heating and baking, sleeving the copper sleeve on the target material, and tightly matching the copper sleeve and the target material by adopting an isostatic pressing technology; drilling pin holes on the target material on a drilling machine, and drilling pins; the target material is further turned on a lathe, threads are turned on one surface of the target material, and the reference size of the target material is turned.
The above-mentioned embodiments only express one embodiment of the present invention, and the description thereof is more specific and detailed, but not construed as limiting the present invention. It should be noted that it would be apparent to one of ordinary skill in the art that the present invention may be practiced without departing from its spirit or essential characteristics. Therefore, the protection scope of the present patent shall be subject to the appended claims.
Claims (5)
1. The isostatic pressing cylindrical target material thread processing method is characterized by comprising the following steps: comprises the following processing steps of the following steps of,
s1, providing a thread and a copper bush of the target, wherein the outer circle and the thread face of the target have machining allowance of 0.5-2 mm;
s2, turning the target, wherein the target is turned on a lathe to form an end face, and the inner diameter of the target is finely turned;
s3, placing the copper sleeve on an oven for heating and baking, sleeving the copper sleeve on the target material, and tightly matching the copper sleeve and the target material by adopting an isostatic pressing technology;
s4, drilling pin holes on the target material on a drilling machine, and drilling pins;
s5, further turning the target on a lathe, turning threads on one surface of the target, and turning the reference size of the target;
in the step S3, the heating temperature is 250 ℃, the expansion coefficient of the copper sleeve is 17.2-17.9, and the inner diameter size of the expanded copper sleeve is 0.05-1 mm larger than the outer circle size of the target material; the target material is one of chromium, titanium or aluminum.
2. The isostatic pressing cylindrical target threading method according to claim 1, characterized in that: in the step S1, the outer circle of the target and the thread surface have a machining allowance of 2 mm.
3. The isostatic pressing cylindrical target threading method according to claim 1, characterized in that: in step S1, the inner diameter of the target is 0.1-0.15 mm larger than the inner diameter of the copper sleeve.
4. The isostatic pressing cylindrical target threading method according to claim 1, characterized in that: in step S3, when the copper sleeve is expanded to an inner diameter larger than the outer diameter of the target, the copper sleeve is quickly inserted into the target and pressed against the target with wood, and the target is forcibly knocked with an iron hammer.
5. The isostatic pressing cylindrical target threading method according to claim 1, characterized in that: and in the turning process, aluminum sheets are padded on the target and the copper sleeve.
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| CN201910259659.1A CN109940350B (en) | 2019-04-02 | 2019-04-02 | Isostatic pressing cylindrical target material thread machining method |
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| CN201910259659.1A CN109940350B (en) | 2019-04-02 | 2019-04-02 | Isostatic pressing cylindrical target material thread machining method |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104551381A (en) * | 2013-10-25 | 2015-04-29 | 宁波江丰电子材料股份有限公司 | Welding method of tungsten target material component |
| CN104741776A (en) * | 2013-12-31 | 2015-07-01 | 宁波江丰电子材料股份有限公司 | Welding method of target component |
| CN105378141A (en) * | 2013-07-05 | 2016-03-02 | 旭硝子工业陶瓷株式会社 | Sputtering target and method for manufacturing same |
| CN105729037A (en) * | 2016-04-18 | 2016-07-06 | 哈尔滨汽轮机厂有限责任公司 | Ball screw repair and reuse method |
| CN108543955A (en) * | 2018-04-23 | 2018-09-18 | 宁波江丰电子材料股份有限公司 | target processing method |
-
2019
- 2019-04-02 CN CN201910259659.1A patent/CN109940350B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105378141A (en) * | 2013-07-05 | 2016-03-02 | 旭硝子工业陶瓷株式会社 | Sputtering target and method for manufacturing same |
| CN104551381A (en) * | 2013-10-25 | 2015-04-29 | 宁波江丰电子材料股份有限公司 | Welding method of tungsten target material component |
| CN104741776A (en) * | 2013-12-31 | 2015-07-01 | 宁波江丰电子材料股份有限公司 | Welding method of target component |
| CN105729037A (en) * | 2016-04-18 | 2016-07-06 | 哈尔滨汽轮机厂有限责任公司 | Ball screw repair and reuse method |
| CN108543955A (en) * | 2018-04-23 | 2018-09-18 | 宁波江丰电子材料股份有限公司 | target processing method |
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