CN109939750A - A kind of microchannel plate of functionalization and bimolecular sensors comprising the microchannel plate - Google Patents

A kind of microchannel plate of functionalization and bimolecular sensors comprising the microchannel plate Download PDF

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Publication number
CN109939750A
CN109939750A CN201711384070.1A CN201711384070A CN109939750A CN 109939750 A CN109939750 A CN 109939750A CN 201711384070 A CN201711384070 A CN 201711384070A CN 109939750 A CN109939750 A CN 109939750A
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China
Prior art keywords
microchannel plate
metal
metal nano
functionalization
rod
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CN201711384070.1A
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Chinese (zh)
Inventor
张兴业
曹臻
杨彦彬
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Zigong Innovation Center of Zhejiang University
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Zigong Innovation Center of Zhejiang University
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Abstract

A kind of microchannel plate of functionalization, it is characterised in that: microchannel plate is arranged with multiple inclined transparent micropores, and micropore is parallel to each other, and metal nano-rod array is attached in micropore.A kind of bimolecular sensors, it is characterized by comprising have signal amplifying apparatus, transducing head and identification device, microchannel plate as described above is used in the signal amplifying apparatus, realizes the detection to trace marker (concentration :~fg/mL) or even unimolecule concentration;Metal nano-rod is prepared in microchannel plate, based on the surface plasmon resonance of the metal nano-rod array in microchannel plate micropore, utilizes Raman spectroscopic detection biomarker.

Description

A kind of microchannel plate of functionalization and bimolecular sensors comprising the microchannel plate
Technical field
The present invention relates to a kind of microchannel plate of functionalization and include the bimolecular sensors of the microchannel plate.
Background technique
Biomolecule is the substance undertaker of human physiological activity and the prediction and diagnosis of disease and information carrier. (such as nucleic acid, protein, virus, unite specific biological molecules below in detection biological sample (including blood, saliva, urine etc.) Referred to as marker) concentration, for research human normal vital movement rule and disease early diagnosis and personalized treatment It is of great significance.The substance that predetermined substance can selectively be offered an explanation in organism has enzyme, antibody, tissue, cell Deng.These molecular recognition function substances can be combined into compound with measured target by identification process, such as the knot of antibody and antigen It closes, the combination of enzyme and matrix.
Preferably to detect biological sample, people more use biosensor, and biosensor is by molecular recognition portion Divide (sensing element) and conversion portion (energy converter) to constitute, is sensitive to biological substance and its concentration is converted into electric signal progress The instrument of detection.
Light, heat, the generation of chemical substance or consumption etc. can generate corresponding variable quantity in sensing element.According to these variations Amount, can choose energy converter appropriate.Sensing element is frequently necessary to be applied in combination with signal amplifying apparatus, and biomolecule passes at present Signal amplifying apparatus in sensor is often used microchannel plate.
Microchannel plate is using glass flake as substrate for microchannel plate (Microchannel Plate, MCP), with number on substrate The micron micropore smaller with hexagonal periodic arrangement aperture ratio space periodic to more than ten microns of space periodic, one piece of microchannel plate On there are about microchannels up to a million.Since secondary electron can amplify collision multiplication on conduit wall, microchannel plate is as a kind of big The electron multiplication detector of the high-space resolution of face battle array, is widely used in the multiple fields such as high-performance night vision image intensifier.
As the effective means for identifying substance classes, Raman spectrum is widely used always, and metal surface plasma swashs Member resonance can effectively enhance Ramam effect.Surface plasmon resonance, i.e., the free electron in metal is under electromagnetic field effect The oscillation effect that communality occurs, when the frequency of external electromagnetic field is close to this collective oscillation frequency (resonance mode), electromagnetism Field can be by the sub-wavelength region of local near metal surface, and intensity is very big.The strong laser field and detected material of the local occur Inelastically scattered intensity increases, to enhance Raman signal.Cu is generally used, the reason of metals such as Ag, Au is their d The energy gap of electronics and s electronics is bigger, is not susceptible to band-to-band transition, can avoid light absorbing energy due to band-to-band transition occurs Conversion.
Currently, the microchannel plate that the biosensor in other patents uses, is carried out based on Secondary-emission multipbcation principle Signal amplification, microchannel plate at this moment need to use flint glass, and the reduction treatment in atmosphere of hydrogen, and not only preparation process is multiple It is miscellaneous, and cannot effectively enhance the Raman spectrum of marker, lack the enhancing to the specific signals of biomolecule.
Summary of the invention
To solve the above problems, the present invention provides following scheme:
A kind of microchannel plate of functionalization, microchannel plate are arranged with multiple inclined transparent micropores, and micropore is included Have metal nano-rod array.
Further, in metal nano-rod array metal nano-rod diameter be 50~150nm, length be 100~ 700nm;Metal nano-rod distribution density is 103~106/μm2
Further, the metal nano-rod array is prepared using following methods, before preparing metal nano-rod, is passed through Sputter coating process is grown one layer of metal on microchannel plate surface to be processed and is existed as preliminary sedimentation lamination, then using metal evaporation technology Metal nano-rod array is prepared on the preliminary sedimentation lamination;In metal nano-rod array preparation process, microchannel plate bottom surface to be processed is flat Row is placed in above evaporation material, and is rotated, rotation speed 0-30rpm, and microchannel plate temperature to be processed is 25 DEG C~ 70 DEG C, evaporation of metal rate 0.3nm~10nm/s, evaporation material is using any metal and alloy in gold, silver, copper.
Using microchannel plate to be processed as growth substrates, microchannel plate to be processed is placed horizontally above evaporation source, (substrate and horizontal line angle are greater than 70 at intrinsic inclination angleo) nanostructure is grown for the shadow effect of metal deposition process.It is heavy Long-pending early period, metal nucleation form island structure;Later growth, since high position has intercepted the supply of metallic vapour, to limit The growth at the position that it is closed on is made.Finally, foring suitable metal nano-rod array, i.e., since microchannel plate micro-pore wall has Have an inclination angle, metallic vapour due to micro-pore wall blocking so that the metal nano-rod that internally positioned metallic vapour is formed is shorter, and It is longer compared with the metal nano-rod in outside positioned at micropore, thus the metal nano-rod array needed for being formed.Above-mentioned metal nano-rod is heavy Product process is localization inclination angle deposition technique, using this technology when preparing metal nano-rod array, microchannel to be processed Plate is carried out without being connected on inclined pedestal (or sample stage), reduces evaporation process complexity and evaporated device complexity., And prepared metal nano-rod meets demand.
Further, pedestal rotation speed is preferably 5-25rpm.
Further, microchannel plate temperature to be processed is preferably 30-65 DEG C.
Further, evaporation of metal rate is preferably 0.4-9.8nm/s.
A kind of bimolecular sensors include signal amplifying apparatus, are used in signal amplifying apparatus as described above micro- Channel plate.
The invention has the benefit that
1. preparing metal nano-rod on microchannel plate, is resonated using metal nano-rod metallic surface plasma excimer and effectively increased Strong Ramam effect, using Raman spectroscopic detection biomarker, instead of the original of Secondary-emission multipbcation used by existing microchannel plate Reason, enhancing signal amplification effect is, it can be achieved that detection to trace marker (concentration :~fg/mL) or even unimolecule concentration.
2. utilizing localization inclination angle deposition technique, saves and incline to the pedestal (or sample stage) of microchannel plate to be processed Oblique process, preparation process is easier, and reduces to the configuration requirement of filming equipment.
Detailed description of the invention
Fig. 1, Fig. 3 are schematic structural view of the invention;
Fig. 2 is part A cross-sectional view in Fig. 1;
Fig. 4, Fig. 5, Fig. 6 are the representative metal nano-rod shape appearance figure of scanning electron microscope observation;
Fig. 7 is sensor Ramam effect detection figure.
1. micropore;2. metal nano-rod;3. metallic vapour.
Specific embodiment
Now in conjunction with attached drawing, the present invention is described in detail:
Embodiment 1: as shown in Figure 1-3,
A kind of microchannel plate, microchannel plate are arranged with multiple inclined transparent micropores 1, are attached with gold in micropore 1 Belong to 2 array of nanometer rods, 2 material of metal nano-rod is silver.
The diameter of metal nano-rod 2 is 60nm, length 130nm in metal nano-rod array, and metal nano-rod array is close Degree is 104/μm2, 2 pattern of metal nano-rod is clear.
2 array of metal nano-rod is using microchannel plate as growth substrates, intrinsic inclination angle (1 wall of micropore and horizontal line Angle is greater than 70 °) nanostructure is grown for the shadow effect of metal deposition process.Early period is deposited, metal nucleation forms island Structure;Later growth, since high position has intercepted the supply of metallic vapour, to limit the growth at the position that it is closed on. Finally, foring suitable 2 array of metal nano-rod, i.e., since microchannel plate micro-pore wall has inclination angle, metallic vapour is due to micro- The blocking of hole wall so that the metal nano-rod that internally positioned metallic vapour is formed is shorter, and is located at metal of the micropore compared with outside Nanometer rods are longer, thus the metal nano-rod array needed for being formed.In preparation process, microchannel plate to be processed is placed horizontally at steaming Above rising, is carried out without being connected on inclined pedestal (or sample stage), reduce evaporation process complexity and evaporated device Complexity.
Before electron beam evaporation plating metal, one layer of metallic silver can be grown as pre-deposition by sputter coating process by silver Layer, when preparing metal nano-rod array, microchannel plate rotation speed to be processed is 15r/m, and underlayer temperature is 30 DEG C, evaporation rate 1nm/s, evaporation material is using silver.
A kind of bimolecular sensors include in signal amplifying apparatus described in signal amplifying apparatus using as described above Microchannel plate.
2 shape appearance figure of representative metal nano-rod of scanning electron microscope observation is as Figure 4-Figure 6.
The signal amplification dress of bimolecular sensors is prepared into using the microchannel plate for being attached with 2 array of metal nano-rod It sets, Ramam effect has high sensitivity.For using rhodamine B as marker, the sensor based on the invention is obtained Concentration be 10-4M, Raman spectrum characteristic peak intensity are that concentration is 10 unexpectedly-11~10 times of the bulk solution of M.Such as Fig. 7 institute Show.
Metal nano-rod is prepared on microchannel plate, being resonated using metal nano-rod metallic surface plasma excimer is effectively enhanced Ramam effect is visited instead of conventional microchannel plate using Secondary-emission multipbcation principle using Raman spectroscopic detection biomarker The mode of biomarker is surveyed, enhancing signal amplification effect is, it can be achieved that trace marker (concentration :~fg/mL) or even list The detection of molecular concentration.

Claims (7)

1. a kind of microchannel plate of functionalization, microchannel plate is arranged with multiple inclined transparent micropores, and micropore is mutual In parallel, it is characterised in that: metal nano-rod array is attached in micropore.
2. a kind of microchannel plate of functionalization as described in the appended claim 1, it is characterised in that: golden in the metal nano-rod array The diameter for belonging to nanometer rods is 50~150nm, and length is 100~700nm;Metal nano-rod distribution density is 103~106/μm2
3. a kind of microchannel plate of functionalization as described in the appended claim 1, it is characterised in that: the metal nano-rod array uses Following methods preparation grows one on microchannel plate surface to be processed by sputter coating process before preparing metal nano-rod Layer metal prepares metal nano-rod array on the preliminary sedimentation lamination as preliminary sedimentation lamination, then using metal evaporation technology;Metal is received In rice stick array preparation process, microchannel plate to be processed is placed horizontally above evaporation source, and is rotated, intrinsic inclination angle Nanostructure is grown for the shadow effect of metal deposition process, microchannel plate rotation speed to be processed is 0-30rpm, to be processed Microchannel plate temperature is 25 DEG C~70 DEG C, evaporation of metal rate 0.3nm~10nm/s, and evaporation material is using any in gold, silver, copper Metal and alloy.
4. a kind of functionalization microchannel plate as claimed in claim 3, it is characterised in that: the microchannel plate rotation speed to be processed Degree is preferably 5-25rpm.
5. a kind of functionalization microchannel plate as claimed in claim 3, it is characterised in that: the microchannel plate temperature to be processed is excellent It is selected as 30-65 DEG C.
6. a kind of functionalization microchannel plate as claimed in claim 3, it is characterised in that: the evaporation of metal rate is preferably 0.4‐9.8nm/s。
7. a kind of bimolecular sensors include signal amplifying apparatus, it is characterised in that: using as weighed in signal amplifying apparatus Benefit requires any microchannel plate in 1-6.
CN201711384070.1A 2017-12-20 2017-12-20 A kind of microchannel plate of functionalization and bimolecular sensors comprising the microchannel plate Pending CN109939750A (en)

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Application publication date: 20190628