CN109931859A - Linear displacement transducer with complementary coupling structure - Google Patents
Linear displacement transducer with complementary coupling structure Download PDFInfo
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- CN109931859A CN109931859A CN201910286342.7A CN201910286342A CN109931859A CN 109931859 A CN109931859 A CN 109931859A CN 201910286342 A CN201910286342 A CN 201910286342A CN 109931859 A CN109931859 A CN 109931859A
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Abstract
The invention discloses a kind of linear displacement transducers with complementary coupling structure, including scale, dynamic ruler, scale installation base body and dynamic ruler installation base body, scale installation base body includes pedestal and limited block, the scale slot to match with the length of scale is offered on pedestal, scale is vertically mounted in scale slot and is limited by limited block and fixed, the centre of dynamic ruler installation base body offers straight trough mouth, the width of the straight trough mouth is greater than the sum of scale thickness and two pieces of dynamic ruler thickness, depth is greater than the scale sensing unit height on scale, dynamic ruler installation base body is symmetrical about straight trough mouth, dynamic ruler has two pieces, two pieces of dynamic rulers are symmetrically mounted on the two sides of the straight trough mouth, dynamic ruler sensing unit series connection on two pieces of dynamic rulers, scale is inserted into straight trough mouth, couple the dynamic ruler sensing unit with the scale sensing unit face.The present invention is able to achieve the complementary coupled between excitation and induction, can effectively reduce the influence to measurement performance such as sensor manufacture, assembly, installation.
Description
Technical field
The invention belongs to accurate measurement sensor technical fields, and in particular to a kind of straight line position with complementary coupling structure
Displacement sensor.
Background technique
Linear motion unit on lathe or Other Instruments equipment usually needs to reach preferable the linear positions
Linear displacement transducer is wanted to provide position feedback.Current linear displacement transducer mainly has induction, Electric field and light
Field formula, these linear displacement transducers mainly include scale and dynamic ruler, and scale is parallel with dynamic ruler face to be installed, but it exists such as
Lower problem: (1) moving ruler and only couple on one side of scale with scale, so that the measurement performance of sensor is by between dynamic ruler and scale
Gap size, depth of parallelism etc. are affected, thus manufacture to dynamic ruler and scale and installation propose higher requirement；(2) if
Scale sensing unit on scale is assemblied in scale matrix surface by way of stickup, it is difficult to ensure that scale sensing unit is flat
Face degree and straightness, to can also be impacted to the measurement performance of sensor.
Based on the linear displacement transducer of electromagnetic induction principle because it has been obtained preferably with stronger environmental suitability
Using.Induction linear displacement transducer includes magnet exciting coil and induction coil, is exchanged by applying in magnet exciting coil
Signal generates magnetic field, and induction coil receives the magnetic field and generates inductive signal relevant to measured position shifting, to realize straight line position
Shift measurement.Grating straight-line displacement sensor when disclosing a kind of absolute type in CN105300262A, magnet exciting coil and induction coil point
It is not contained in dynamic ruler and scale, moves the magnet exciting coil on ruler and generates magnetic field, the induction coil on scale receives magnetic field.
A kind of induction linear displacement transducer is disclosed in CN107796293A, magnet exciting coil and induction coil are both contained in fixed
Ruler.Magnet exciting coil and induction coil on scale generate magnetic field respectively and receive magnetic field, move ruler for changing Distribution of Magnetic Field.When dynamic
When relative displacement occurs for ruler and scale, the received magnetic field of induction coil changes, and the signal for exporting induction coil becomes
Change, the relative displacement of dynamic ruler and scale can be obtained by the signal processing that induction coil exports.Both linear displacement transducers are all
There are the following problems: (1) move ruler only scale the induction coil of influence on one side receive magnetic field so that the measurement performance of sensor by
Gap size, depth of parallelism etc. are affected between dynamic ruler and scale, thus move the manufacture of ruler and scale to sensor and installation mentions
Higher requirement is gone out；(2) if the coil on scale is assemblied in scale matrix surface by way of stickup, it is difficult to ensure that line
The flatness and straightness of circle, to can be impacted to the measurement performance of sensor.In addition, the plane in CN107796293A
Square spiral coil only has a kind of coiling direction, which can not resist extraneous common mode interference magnetic field, especially
It is the error source that sensor measurement be can not ignore when the planar rectangular spiral winding of sensor is as induction coil.
Summary of the invention
The object of the present invention is to provide a kind of linear displacement transducers with complementary coupling structure, to reduce dynamic ruler and determine
Influence of the manufacture and installation of ruler to measurement performance, further increases measurement accuracy.
A kind of linear displacement transducer with complementary coupling structure of the present invention, including scale and two pieces of dynamic rulers,
Further include scale installation base body and dynamic ruler installation base body, scale installation base body includes pedestal and limited block, offered on pedestal with
The scale slot that the length of scale matches, scale are vertically mounted in scale slot and are limited by limited block and fixed, and move ruler installation
The centre of matrix offers straight trough mouth, and the width of the straight trough mouth is greater than the sum of scale thickness and two pieces of dynamic ruler thickness, depth is greater than
Scale sensing unit height on scale, dynamic ruler installation base body is symmetrical about straight trough mouth, and two pieces of dynamic rulers are symmetrically mounted on described straight
The two sides of notch, the dynamic ruler sensing unit series connection on two pieces of dynamic rulers, scale are inserted into straight trough mouth, make the dynamic ruler sensing unit with
The scale sensing unit face coupling.This linear displacement transducer with complementary coupling structure can be adapted for electromagnetism sense
Formula linear displacement transducer is answered, (such as the Electric field straight-line displacement of non electromagnetic induction formula linear displacement transducer is readily applicable to
Sensor, light field formula linear displacement transducer etc.).This linear displacement transducer with complementary coupling structure has following effect
Fruit: (1) installation process is simple, it is only necessary to scale is vertically disposed in scale slot and limited by limited block and fixed；(2) pass through
Scale right angle setting is realized in pedestal, scale slot, limited block cooperation, and installation process has lacked the participation of bonding agent, scale sensing unit
Flatness and straightness no longer influenced by bonding agent, ensure that the flatness and straightness of scale sensing unit；(3) scale
Right angle setting, dynamic ruler installation base body is symmetrical about straight trough mouth, and two pieces of dynamic rulers are symmetrically mounted on the two sides of straight trough mouth, and scale insertion is dynamic
In the straight trough mouth of ruler installation base body, dynamic ruler sensing unit couple with scale sensing unit face, though move ruler install it is undesirable or
Motion profile is undesirable, and the gap summation between two pieces of dynamic rulers and scale remains unchanged, and realizes mutual between excitation and induction
Coupling is mended, which reduce the manufacture of dynamic ruler and scale and the influence to measurement performance is installed, further improves measurement accuracy.
For induction linear displacement transducer, the scale includes scale coil base and is printed on scale
The scale sensing unit on coil base, scale sensing unit by distribution period is W, distribution period number isFirst
Coil linear array and the second coil linear array are constituted, and first coil linear array is along the initial position of measurement direction with the second coil linear array along survey
Measure the initial position difference in directionThe dynamic ruler includes dynamic ruler coil base and is printed on described dynamic on dynamic ruler coil base
Ruler sensing unit, moves that ruler sensing unit by distribution period is W, distribution period number isFirst pair of sinusoidal coil linear array structure
At；Wherein, m1, n be even number, n >=4,2≤m1< n.
The first coil linear array and the second coil linear array are by the 4n straight wire that length is L and the connection straight wire
Connecting line composition, wherein 2n+2 straight wire is along the first wiring layer that measurement direction is distributed in scale coil base, in addition
2n-2 straight wire along the second wiring layer that measurement direction is distributed in scale coil base, and be distributed in the first wiring layer
Centre 2n-2 straight wire it is symmetrical；Adjacent two straight wires are along the spacing of measurement direction on same wiring layerFirst cloth
The 2i+1 articles straight wire on line layer is connect with the 2i+1 articles straight wire on the second wiring layer by connecting line, via hole, and second
The 2i+1 articles straight wire on wiring layer is connect with the 2i+5 articles straight wire on the first wiring layer by connecting line, via hole, the
The 2n-1 articles straight wire on one wiring layer is connect with the 2n+1 articles straight wire on the first wiring layer by connecting line, via hole,
First coil linear array is formed, the not connected end leads of the 1st article, the 3rd article straight wire on the first wiring layer are as First Line
The signal input/output terminals of astragal battle array；The 2i+ in the 2i+2 articles straight wire and the second wiring layer on first wiring layer
2 straight wires are connected by connecting line, via hole, the 2i in the 2i+2 articles straight wire and the first wiring layer on the second wiring layer
+ 6 straight wires are connected by connecting line, via hole, the 2n+ in the 2n articles straight wire and the first wiring layer on the first wiring layer
2 straight wires are connected by connecting line, via hole, form the second coil linear array, the 2nd article, the 4th article on the first wiring layer is directly led
Signal input/output terminals of the not connected end leads of line as the second coil linear array；Wherein, i successively takes 0 to n-2's
All integers.Odd-numbered straight wire on first, second wiring layer of scale coil base is by connecting and composing first coil
Linear array, the even-numbered straight wire on the first, second wiring layer of scale coil base by connecting and composing the second coil linear array,
This cross wire mode ensure that the symmetry of coil, ensure that first coil linear array and the second coil linear array relative to first
The symmetry of double sinusoidal coil linear arrays also makes first coil linear array and the second coil linear array be provided with " two coiling sides
To ", to reduce measurement error better against extraneous common mode interference magnetic field.
The first pair of sinusoidal coil linear array is identical by initial position, amplitude A, period W, number of cycles are
The sinusoidal conducting line segment of the first, second of 180 ° of phase mutual deviation surrounds, the first sinusoidal conducting line segmentSegment part,Segment part and the second sinusoidal conducting line segmentSegment part is all distributed in
On first wiring layer of dynamic ruler coil base, the second sinusoidal conducting line segmentSegment part,Segment part and the first sinusoidal conducting line segmentSegment part is all distributed in
On second wiring layer of dynamic ruler coil base, in the end leads for certain the two neighboring segment part being distributed on various wirings layer
As the signal input/output terminals of first pair of sinusoidal coil linear array, remaining is distributed in each section on various wirings layer
Partial end is connected by via hole；Wherein, j successively take 0 toAll integers.A part of cloth of first sinusoidal conducting wire
Be placed on the first wiring layer of dynamic ruler coil base, another part is arranged on the second wiring layer of dynamic ruler coil base, second
A part of sinusoidal conducting wire is arranged on the first wiring layer of dynamic ruler coil base, another part is arranged in dynamic ruler coil base
On second wiring layer, this wire laying mode ensure that first pair of sinusoidal coil linear array relative to first coil linear array and the second line
The symmetry of astragal battle array also makes first pair of sinusoidal coil linear array be provided with " two coiling directions ", thus better against
Extraneous common mode interference magnetic field, further reduces measurement error.
Preferably, L v notch v is offered at the top of the dynamic ruler installation base body, the first pair of sinusoidal coil linear array
Signal input/output terminals are exposed except dynamic ruler installation base body by the L v notch v, facilitate first pair of sinusoidal coil
The signal input/output terminals of linear array and the connection of subsequent signal processing system.
Upper to be directed to induction linear displacement transducer, when carrying out straight-line displacement measurement, there are two types of the modes of connection: the
One is using first coil linear array and the second coil linear array as magnet exciting coil, using first pair of sinusoidal coil linear array as induction
Coil each leads into the orthogonal alternating excitation signal of two-phase in first coil linear array, the second coil linear array, when dynamic ruler and scale edge
When relative motion occurs for measurement direction, the periodically variable induction letter of first pair of sinusoidal coil linear array output amplitude constant phase
Number, phase demodulation processing is carried out to the inductive signal, and straight-line displacement of the dynamic ruler with respect to scale is obtained after converting.Second is by
A pair of sinusoidal coil linear array is as magnet exciting coil, using first coil linear array and the second coil linear array as induction coil, first
It is passed through alternating excitation signal in double sinusoidal coil linear arrays, when along measurement direction relative motion occurs for dynamic ruler and scale, first
Coil linear array and the second coil linear array export the periodically variable inductive signal of phase-constant amplitude all the way respectively, to two road feel
Induction signal carries out amplitude discrimination processing, and straight-line displacement of the dynamic ruler with respect to scale is obtained after converting.
Another induction linear displacement transducer with complementary coupling structure of the present invention, including scale
With dynamic ruler, scale includes scale coil base and the sensing unit that is printed on scale coil base, and moving ruler is metal magnetic conducting body
Or conductive metal non-magnetizer, the sensor further includes scale installation base body, and scale installation base body includes pedestal and limit
Position block, the scale slot to match with the length of scale is offered on pedestal, and scale is vertically mounted in scale slot and passes through limit
Block limit is fixed, and the centre of dynamic ruler offers dynamic ruler straight trough mouth, and the width for moving ruler straight trough mouth is greater than greater than scale thickness, depth to be passed
Feel cell height, dynamic ruler is symmetrical about dynamic ruler straight trough mouth, and dynamic ruler is along the length of measurement directionScale is inserted into dynamic ruler straight trough mouth
It is interior, couple front and back two parts of ruler with sensing unit face；The sensing unit is by first coil linear array, the second coil line
Battle array and second pair of sinusoidal coil linear array are constituted, and the distribution period of the first, second coil linear array is W, distribution period number is
First coil linear array is staggered with the second coil linear array along the initial position of measurement direction along the initial position of measurement directionSecond
The distribution period of double sinusoidal coil linear arrays isDistribution period number isSecond pair of sinusoidal coil linear array is located at First Line
In the region that astragal battle array and the second coil linear array are formed, second pair of sinusoidal coil linear array is along the initial position and the of measurement direction
One coil linear array is differed along the initial position of measurement directionWherein, m2, n be even number, n >=4, m2>=4, k are integer and k >=0.
This induction linear displacement transducer with complementary coupling structure has the effect that (1) installation process is simple, only
It needs for scale to be vertically disposed in scale slot and is limited by limited block and fixed；(2) matched by pedestal, scale slot, limited block
It closes and realizes scale right angle setting, installation process has lacked the participation of bonding agent, the flatness and straightness of the sensing unit on scale
It is no longer influenced by bonding agent, ensure that the flatness and straightness of sensing unit；(3) scale right angle setting moves ruler about dynamic
Ruler straight trough mouth is symmetrical, and scale is inserted into dynamic ruler straight trough mouth, and front and back two parts of dynamic ruler are coupled with sensing unit face, even if dynamic ruler
Install that undesirable or motion profile is undesirable, the gap summation between dynamic ruler and scale remains unchanged, and realizes excitation and induction
Between complementary coupled, which reduce the manufacture of dynamic ruler and scale and influence to measurement performance is installed, further improves survey
Accuracy of measurement.
The first coil linear array and the second coil linear array are by the 4n straight wire that length is L and the connection straight wire
Connecting line composition, wherein 2n+2 straight wire is along the first wiring layer that measurement direction is distributed in scale coil base, in addition
2n-2 articles of straight wire along the 4th wiring layer that measurement direction is distributed in scale coil base, and be distributed in the first wiring layer
Centre 2n-2 straight wire it is symmetrical；Adjacent two straight wires are along the spacing of measurement direction on same wiring layerFirst cloth
The 2i+1 articles straight wire on line layer is connect with the 2i+1 articles straight wire on the 4th wiring layer by connecting line, via hole, and the 4th
The 2i+1 articles straight wire on wiring layer is connect with the 2i+5 articles straight wire on the first wiring layer by connecting line, via hole, the
The 2n-1 articles straight wire on one wiring layer is connect with the 2n+1 articles straight wire on the first wiring layer by connecting line, via hole,
First coil linear array is formed, the not connected end leads of the 1st article, the 3rd article straight wire on the first wiring layer are as First Line
The signal input/output terminals of astragal battle array；The 2i+ in the 2i+2 articles straight wire and the 4th wiring layer on first wiring layer
2 straight wires are connected by connecting line, via hole, the 2i in the 2i+2 articles straight wire and the first wiring layer on the 4th wiring layer
+ 6 straight wires are connected by connecting line, via hole, the 2n+ in the 2n articles straight wire and the first wiring layer on the first wiring layer
2 straight wires are connected by connecting line, via hole, form the second coil linear array, the 2nd article, the 4th article on the first wiring layer is directly led
Signal input/output terminals of the not connected end leads of line as the second coil linear array；Wherein, i successively takes 0 to n-2's
All integers.
The second pair of sinusoidal coil linear array is identical by initial position, amplitude A, period areNumber of cycles is
The third that 180 ° of phase mutual deviation, the 4th sinusoidal conducting line segment surround, third sine conducting line segmentSegment part,Segment part and the 4th sinusoidal conducting line segmentSegment part is all distributed in fixed
On second wiring layer of ruler coil base, the 4th sinusoidal conducting line segmentSegment part,Area
Between part and third sine conducting line segmentSegment part is all distributed in the third cloth of scale coil base
On line layer, certain the two neighboring segment part being distributed on various wirings layer end leads as second pair of sinusoidal coil
The signal input/output terminals of linear array, remaining end for being distributed in each segment part on various wirings layer are connected by via hole
It connects；Wherein, j successively take 0 toAll integers.
Odd-numbered straight wire on first, the 4th wiring layer of scale coil base is by connecting and composing First Line astragal
Battle array, the even-numbered straight wire on the first, the 4th wiring layer of scale coil base is by connecting and composing the second coil linear array, and the
A part of three sinusoidal conducting wires is arranged on the second wiring layer of scale coil base, another part is arranged in scale coil base
Third wiring layer on, a part of the 4th sinusoidal conducting wire is arranged on the second wiring layer of scale coil base, another part
It is arranged on the third wiring layer of scale coil base, this cross wire mode ensure that the symmetry of coil, ensure that
The symmetry of one coil linear array and the second coil linear array relative to second pair of sinusoidal coil linear array, also make first coil linear array,
Second coil linear array, second pair of sinusoidal coil linear array are provided with " two coiling directions ", thus better against the external world
Common mode interference magnetic field, further reduces measurement error.
Upper to be directed to induction linear displacement transducer, when carrying out straight-line displacement measurement, there are two types of the modes of connection: the
One is using first coil linear array and the second coil linear array as magnet exciting coil, using second pair of sinusoidal coil linear array as induction
Coil each leads into the orthogonal alternating excitation signal of two-phase in first coil linear array, the second coil linear array, when dynamic ruler and scale edge
When relative motion occurs for measurement direction, the periodically variable induction letter of second pair of sinusoidal coil linear array output amplitude constant phase
Number, phase demodulation processing is carried out to the inductive signal, and straight-line displacement of the dynamic ruler with respect to scale is obtained after converting.Second is by
Two pairs of sinusoidal coil linear arrays are as magnet exciting coil, using first coil linear array and the second coil linear array as induction coil, second
It is passed through alternating excitation signal in double sinusoidal coil linear arrays, when along measurement direction relative motion occurs for dynamic ruler and scale, first
Coil linear array and the second coil linear array export the periodically variable inductive signal of phase-constant amplitude all the way respectively, to two road feel
Induction signal carries out amplitude discrimination processing, and straight-line displacement of the dynamic ruler with respect to scale is obtained after converting.
Detailed description of the invention
Fig. 1 is embodiment 1, the general structure schematic diagram of embodiment 2.
Fig. 2 is the schematic cross-section of Fig. 1.
The structural schematic diagram of scale of the Fig. 3 for embodiment 1, in embodiment 2.
The schematic wiring diagram of sensing unit of the Fig. 4 for embodiment 1, in embodiment 2.
Fig. 5 is embodiment 1, the schematic wiring diagram on the first wiring layer on the scale coil base in embodiment 2.
Fig. 6 is embodiment 1, the schematic wiring diagram on the 4th wiring layer on the scale coil base in embodiment 2.
Fig. 7 is embodiment 1, the schematic wiring diagram on the second wiring layer on the scale coil base in embodiment 2.
Fig. 8 is embodiment 1, the schematic wiring diagram on the third wiring layer on the scale coil base in embodiment 2.
The decomposition diagram of scale installation base body of the Fig. 9 for embodiment 1, in embodiment 2.
The structural schematic diagram of dynamic ruler of the Figure 10 for embodiment 1, in embodiment 2.
Figure 11 is embodiment 3, the general structure schematic diagram of embodiment 4.
Figure 12 is the side schematic view of Figure 11.
The structural schematic diagram of scale of the Figure 13 for embodiment 3, in embodiment 4.
The schematic wiring diagram of scale sensing unit of the Figure 14 for embodiment 3, in embodiment 4.
The structural schematic diagram of dynamic ruler of the Figure 15 for embodiment 3, in embodiment 4.
The schematic wiring diagram of dynamic ruler sensing unit of the Figure 16 for embodiment 3, in embodiment 4.
The structural schematic diagram of dynamic ruler installation base body of the Figure 17 for embodiment 3, in embodiment 4.
Specific embodiment
It elaborates with reference to the accompanying drawing to the present invention.
Define measurement direction be cut lengths direction (i.e. X-direction), perpendicular to determine related scale direction be front-rear direction (i.e.
Y direction), it is up and down direction (i.e. Z-direction) perpendicular to scale installation matrix surface direction.
Embodiment 1: the induction linear displacement transducer with complementary coupling structure as shown in Figures 1 to 10,
Including scale 1, scale installation base body 2 and dynamic ruler 3.Scale 1 includes scale coil base 11 and is printed on scale coil base 11
On sensing unit, the downside tool of scale coil base 11 is there are two through-hole, for peace of the scale 1 in scale installation base body 2
Dress.
As shown in Fig. 4 to Fig. 8, sensing unit is by first coil linear array 121, the second coil linear array 122 and second pair of sine
Shape coil linear array 13 is constituted, and 122, second pairs of first coil linear array 121, the second coil linear array sinusoidal coil linear arrays 13 are all flat
Planar coil is distributed on 4 wiring layers (i.e. the first, second, third, fourth wiring layer) of scale coil base 11.
As shown in Fig. 4, Fig. 5, Fig. 6, the distribution period of first coil linear array 121 is W, distribution period number is 4, second
The distribution period of coil linear array 122 is W, distribution period number is 4, start bit of the first coil linear array 121 along measurement direction
It sets and is staggered with the second coil linear array 122 along the initial position of measurement directionFirst coil linear array 121 and the second coil linear array 122
It by 32 straight wires that length is L and connects the connecting lines of these straight wires and forms, wherein 18 straight wires are along measurement direction
It is distributed on the first wiring layer of scale coil base 11,14 straight wires in addition are distributed in scale coil base along measurement direction
On 4th wiring layer of body 11, this 14 straight wires and 14 straight wires of the centre for being distributed in the first wiring layer are symmetrical (i.e. in Y
The projection of axis direction is overlapped), adjacent two straight wires are along the spacing of measurement direction on same wiring layerOn first wiring layer
The 2i+1 articles straight wire connect with the 2i+1 articles straight wire on the 4th wiring layer by connecting line, via hole, the 4th wiring layer
On the 2i+1 articles straight wire connect with the 2i+5 articles straight wire on the first wiring layer by connecting line, via hole, first wiring
The 15th article of straight wire on layer is connect with the 17th article of straight wire on the first wiring layer by connecting line, via hole, and First Line is formed
The not connected end of astragal battle array 121, the 1st article of straight wire on the first wiring layer passes through via hole lead conduct on the 4th wiring layer
The signal input/output terminals one of first coil linear array 121, the not connected end of the 3rd article of straight wire on the first wiring layer
Signal input/output terminals two of the lead as first coil linear array 121 directly on the first wiring layer；On first wiring layer
The 2i+2 articles straight wire connect with the 2i+2 articles straight wire on the 4th wiring layer by connecting line, via hole, the 4th wiring layer
On the 2i+2 articles straight wire connect with the 2i+6 articles straight wire on the first wiring layer by connecting line, via hole, first wiring
The 16th article of straight wire on layer is connect with the 18th article of straight wire on the first wiring layer by connecting line, via hole, and the second line is formed
The not connected end of astragal battle array 122, the 2nd article of straight wire on the first wiring layer passes through via hole lead conduct on the 4th wiring layer
The signal input/output terminals one of second coil linear array 122, the not connected end of the 4th article of straight wire on the first wiring layer
Signal input/output terminals two of the lead as the second coil linear array 122 directly on the first wiring layer；Wherein, i successively takes
0 to 6 all integers.
As shown in Fig. 4, Fig. 7, Fig. 8, second pair of sinusoidal coil linear array 13 is located at first coil linear array 121 and the second coil
In the region that linear array 122 is formed, initial position and first coil linear array of second pair of sinusoidal coil linear array 13 along measurement direction
121 differ along the initial position of measurement directionSecond pair of sinusoidal coil linear array 13 be identical by initial position, amplitude A, week
Phase isNumber of cycles is 7,180 ° of phase mutual deviation of third, the 4th sinusoidal conducting line segment surround, third sine conducting line segmentSegment part,Segment part and the 4th sinusoidal conducting line segment
Segment part is all distributed on the second wiring layer of scale coil base 11, the 4th sinusoidal conducting line segmentSection portion
Point,Segment part and third sine conducting line segmentSegment part is all distributed in
On the third wiring layer of scale coil base 11；In the 4th sinusoidal conducting line segmentAt position, by respectively in scale coil base
Lead connects as the signal input/output of second pair of sinusoidal coil linear array 13 on the second wiring layer and third wiring layer of body 11
Line end, remaining end for being distributed in each segment part on various wirings layer are connected by via hole；Wherein, j successively takes 0 to 6
All integers, 2A < L.
As shown in figure 9, scale installation base body 2 includes pedestal 21 and limited block 22, the length with scale 1 is offered on pedestal 21
The scale slot to match is spent, there are two screw hole, screw hole site and scale coil bases 11 for the scale slot side on pedestal 21
On through-hole correspond, the position of corresponding screw hole is also opened up there are two through-hole on limited block 22, and screw 23 passes through limited block
22 and scale coil base 11 on through-hole, into screw hole and screw, compress scale 1 by pedestal 21 and limited block 22, it is fixed
The sensing unit region of ruler 1 must avoid scale slot part.
As shown in Figure 10, moving ruler 3 is rectangle magnetizer, and the centre of dynamic ruler 3 offers dynamic ruler straight trough mouth 33, moves ruler straight trough mouth
33 size in the Y-axis direction is greater than scale thickness, size in the Z-axis direction is greater than the ruler of sensing unit in the Z-axis direction
Very little, dynamic ruler 3 is symmetrical about dynamic ruler straight trough mouth 33, and dynamic ruler 3 is along the length (size i.e. in the X-axis direction) of measurement directionIt is fixed
Ruler 1 is inserted into dynamic ruler straight trough mouth 33, couples forward and backward two parts of ruler 3 with sensing unit face (referring to Fig. 1).
First coil linear array 121 and the second coil linear array 122 are regard as magnet exciting coil, by second pair of sinusoidal coil linear array
13 are used as induction coil, and it is I that amplitude is each led into first coil linear array 121 and the second coil linear array 122mElectric current i121
=ImSin (ω t) and i122=ImCos (ω t), then first coil linear array 121 and the second coil linear array 122 and second pair of sinusoidal
Coil linear array 13 generates coupling by magnetic field.Since dynamic ruler 3 is magnetizer, so the first coil linear array of dynamic 3 present position of ruler
121 and second coil linear array 122 and second pair of sinusoidal coil linear array 13 magnetic field coupling it is relatively strong (compared to other positions).When
When relative motion occurs in the X-axis direction relative to scale 1 for dynamic ruler 3, first coil linear array 121 and the second coil linear array 122 and
Magnetic field coupling generating period variation between second pair of sinusoidal coil linear array 13.
Designing second pair of sinusoidal coil linear array 13 is sinusoidal shape, it is therefore intended that allows second pair of sinusoidal coil linear array 13
The variation of middle magnetic flux changes in sinusoidal rule, as shown in formula (1) and (2):
Wherein, ω indicates power frequency,It indicates under the effect of first coil linear array 121, second pair of sinusoidal
The flux change that coil linear array 13 generates,It indicates under the effect of the second coil linear array 122, second pair of sinusoidal coil
The flux change that linear array 13 generates,Indicate the amplitude of magnetic flux, x indicates tested straight-line displacement, and (i.e. dynamic ruler 3 is relative to scale
1 displacement in the X-axis direction).
Since the magnetic field of first coil linear array 121 and the generation of the second coil linear array 122 is in second pair of sinusoidal coil linear array
It is superimposed in 13, so second pair of sinusoidal coil 13 output amplitude of linear array is constant, phase is sent out according to Faraday's electromagnetic induction law
Raw periodically variable inductive signal, as shown in formula (3):
Formula (3) are subjected to phase demodulation processing, obtain its phaseThen dynamic ruler 3 is obtained relative to scale 1 in X by conversion
Displacement x in axis direction.
Embodiment 2: as shown in Figures 1 to 10, the induction straight line with complementary coupling structure in the present embodiment
The structure of displacement sensor is same as Example 1, the difference is that: it regard second pair of sinusoidal coil linear array 13 as excitation wire
Circle regard first coil linear array 121 and the second coil linear array 122 as induction coil, leads in second pair of sinusoidal coil linear array 13
Entering amplitude is ImElectric current i13=ImSin (ω t), first coil linear array 121 and the second coil linear array 122 export inductive signal.
When in the X-axis direction relative motion occurs for dynamic ruler 3 relative to scale 1, first coil linear array 121 and the second coil linear array 122
Magnetic field coupling generating period variation between second pair of sinusoidal coil linear array 13.
The variation such as formula (4) of magnetic flux and (5) are shown in first coil linear array 121 and the second coil linear array 122:
Wherein,Indicate the amplitude of magnetic flux.
According to Faraday's electromagnetic induction law, the amplitude of 122 output signal of first coil linear array 121 and the second coil linear array
Generating period variation, as shown in formula (6) and (7):
The inductive signal that formula (6) and (7) indicate is subjected to amplitude discrimination processing, obtains the amplitude of two paths of signalsWithThe two amplitudes are divided by, and are negated tangent or arc cotangent to result, are obtained
Value, then obtain dynamic displacement x of the ruler 3 relative to scale 1 in the X-axis direction by conversion.
Embodiment 3: having the induction linear displacement transducer of complementary coupling structure as shown in Figure 11 to Figure 17,
Including scale 1, scale installation base body 2, dynamic ruler installation base body 4 and identical two pieces of dynamic rulers 3.
As shown in figs. 13 and 14, scale 1 includes scale coil base 11 and the scale being printed on scale coil base 11
Sensing unit, there are two through-holes for the downside tool of scale coil base 11, for installation of the scale 1 in scale installation base body 2.It is fixed
Ruler sensing unit is made of first coil linear array 121 and the second coil linear array 122, first coil linear array 121, the second coil linear array
122 be all planar coil, is distributed on 2 wiring layers (i.e. the first, second wiring layer) of scale coil base 11.
The distribution period of first coil linear array 121 is W, distribution period number is 4, the distribution of the second coil linear array 122
Period is W, distribution period number is 4, initial position and second coil linear array of the first coil linear array 121 along measurement direction
122 are staggered along the initial position of measurement directionFirst coil linear array 121 and the second coil linear array 122 are by 32 that length is L
The connecting line composition of straight wire and the connection straight wire, wherein 18 straight wires are distributed in scale coil base along measurement direction
On first wiring layer of body 11,14 straight wires in addition are distributed in the second wiring layer of scale coil base 11 along measurement direction
On, this 14 straight wires are symmetrical (i.e. in the projection weight of Y direction with 14 straight wires with the centre for being distributed in the first wiring layer
It closes)；Adjacent two straight wires are along the spacing of measurement direction on same wiring layerThe 2i+1 articles on first wiring layer is directly led
Line is connect with the 2i+1 articles straight wire on the second wiring layer by connecting line, via hole, and the 2i+1 articles on the second wiring layer is straight
Conducting wire is connect with the 2i+5 articles straight wire on the first wiring layer by connecting line, via hole, and the 15th on the first wiring layer article is straight
Conducting wire is connect with the 17th article of straight wire on the first wiring layer by connecting line, via hole, formation first coil linear array 121, and first
The not connected end of the 1st article of straight wire on wiring layer by via hole on the second wiring layer lead as first coil linear array
121 signal input/output terminals one, the not connected end of the 3rd article of straight wire on the first wiring layer is directly in the first cloth
Signal input/output terminals two of the lead as first coil linear array 121 on line layer；The 2i+2 articles on first wiring layer is straight
Conducting wire is connect with the 2i+2 articles straight wire on the second wiring layer by connecting line, via hole, the 2i+2 articles on the second wiring layer
Straight wire is connect with the 2i+6 articles straight wire on the first wiring layer by connecting line, via hole, the 16th on the first wiring layer article
Straight wire is connect with the 18th article of straight wire on the first wiring layer by connecting line, via hole, and the second coil linear array 122 is formed, the
The not connected end of the 2nd article of straight wire on one wiring layer by via hole on the second wiring layer lead as the second coil linear array
122 signal input/output terminals one, the not connected end of the 4th article of straight wire on the first wiring layer is directly first
Signal input/output terminals two of the lead as the second coil linear array 122 on wiring layer；Wherein, i successively take 0 to 6 it is all
Integer.
Scale installation base body 2 includes pedestal 21 and limited block 22, offers on pedestal 21 and matches with the length of scale 1
Scale slot, the through-hole one of scale slot side on pedestal 21 there are two screw hole, on screw hole site and scale coil base 11
One is corresponding, the position of corresponding screw hole, is also opened up on limited block 22 there are two through-hole, screw 23 passes through limited block 22 and scale line
Through-hole on cycle basis body 11 into screw hole and screws, and compresses scale 1 by pedestal 21 and limited block 22, and the scale of scale 1 passes
Sense unit area must avoid scale slot part.
As shown in Figure 15, Figure 16, dynamic ruler 3 includes dynamic dynamic ruler ruler coil base 31 and be printed on dynamic ruler coil base 31
Sensing unit, dynamic ruler sensing unit are made of first pair of sinusoidal coil linear array 32, and first pair of sinusoidal coil linear array 32 is flat
Planar coil is distributed on 2 wiring layers (i.e. the first, second wiring layer) of dynamic ruler coil base 31；First pair of sinusoidal coil
Linear array 32 is identical by initial position, amplitude is A (2A < L), period W, number of cycles are 1,180 ° of phase mutual deviation first,
Second sinusoidal conducting line segment surrounds, the first sinusoidal conducting line segmentSegment part,Segment part and the second sine are led
Line segmentSegment part is all distributed on the first wiring layer of dynamic ruler coil base 31, the second sinusoidal conducting line segmentSegment part,Segment part and the first sinusoidal conducting line segmentSegment part is all distributed in dynamic ruler line
On second wiring layer of cycle basis body 31, in the first sinusoidal conducting line segmentAt position, by respectively in the first wiring layer and second
Signal input/output terminals of the lead as first pair of sinusoidal coil linear array 32 on wiring layer, remaining is distributed in different cloth
The end of each segment part on line layer is connected by via hole.
As shown in Figure 11, Figure 12, Figure 17, moving ruler installation base body 4 is rectangle magnetizer, is mainly used for fixed dynamic ruler 3, moves ruler
The size of installation base body 4 in the X-axis direction is greater than W and is less than cut lengths, and the centre of dynamic ruler installation base body 4 offers straight trough mouth
41, which is greater than the sum of scale thickness and two pieces of dynamic ruler thickness, ruler in the Z-axis direction
Very little to be greater than the size of scale sensing unit in the Z-axis direction, dynamic ruler installation base body 4 is symmetrical about straight trough mouth 41, moves ruler and installs base
The top of body 4 offers L v notch v 42, and two pieces of dynamic rulers 3 are symmetrically mounted on the two sides of straight trough mouth 41, and first on two pieces of dynamic rulers 3
The signal input/output terminals of double sinusoidal coil linear arrays 32 are exposed except dynamic ruler installation base body 4, two first pair of sines
Shape coil linear array 32 is connected by signal input/output wiring terminated line, and scale 1 is inserted into straight trough mouth 41, makes first pair of sine
Shape coil linear array 32 is coupled with first coil linear array 121 and 122 face of the second coil linear array.
First coil linear array 121 and the second coil linear array 122 are regard as magnet exciting coil, by first pair of sinusoidal coil linear array
32 are used as induction coil, and it is I that amplitude is each led into first coil linear array 121 and the second coil linear array 122mElectric current i121
=ImSin (ω t) and i122=ImCos (ω t), then first coil linear array 121 and the second coil linear array 122 and first pair of sinusoidal
Coil linear array 32 generates coupling by magnetic field.Since the magnetic field that first coil linear array 121 and the second coil linear array 122 generate is being determined
Period profile on ruler 1, so when in the X-axis direction relative motion occurs for dynamic ruler 3 relative to scale 1, first coil linear array 121
And the second magnetic field coupling generating period between coil linear array 122 and first pair of sinusoidal coil linear array 32 changes.
Designing first pair of sinusoidal coil linear array 32 is sinusoidal shape, it is therefore intended that allows first pair of sinusoidal coil linear array 32
The variation of middle magnetic flux changes in sinusoidal rule, as shown in formula (8) and (9):
Wherein, ω indicates power frequency,It indicates under the effect of first coil linear array 121, first pair of sinusoidal
The flux change that coil linear array 32 generates,It indicates under the effect of the second coil linear array 122, first pair of sinusoidal coil
The flux change that linear array 32 generates,Indicate the amplitude of magnetic flux, x indicates tested straight-line displacement, and (i.e. dynamic ruler 3 is relative to scale
1 displacement in the X-axis direction).
Since the magnetic field of first coil linear array 121 and the generation of the second coil linear array 122 is in first pair of sinusoidal coil linear array
It is superimposed in 32, so first pair of sinusoidal coil 32 output amplitude of linear array is constant, phase is sent out according to Faraday's electromagnetic induction law
Raw periodically variable sinusoidal inductive signal, as shown in formula (10):
Formula (10) are subjected to phase demodulation processing, obtain its phaseThen dynamic ruler 3 is obtained relative to scale 1 by conversion
Displacement x in the X-axis direction.
Embodiment 4: the induction straight line with complementary coupling structure as shown in Figure 11 to Figure 17, in the present embodiment
The structure of displacement sensor is same as Example 3, the difference is that: it regard first pair of sinusoidal coil linear array 32 as excitation wire
Circle regard first coil linear array 121 and the second coil linear array 122 as induction coil, i.e. in first pair of sinusoidal coil linear array 32
Being passed through amplitude is ImElectric current i32=ImSin (ω t), first coil linear array 121 and the second coil linear array 122 output induction letter
Number.When in the X-axis direction relative motion occurs for dynamic ruler 3 relative to scale 1, first coil linear array 121 and the second coil linear array
Magnetic field coupling generating period variation between 122 and first pair of sinusoidal coil linear array 32.
The variation such as formula (11) of magnetic flux and (12) are shown in first coil linear array 121 and the second coil linear array 122:
Wherein,Indicate the amplitude of magnetic flux.
According to Faraday's electromagnetic induction law, the amplitude of 122 output signal of first coil linear array 121 and the second coil linear array
Generating period variation, as shown in formula (13) and (14):
The inductive signal that formula (13) and (14) indicate is subjected to amplitude discrimination processing, obtains the amplitude of two paths of signals
WithTwo amplitudes are divided by, and are negated tangent or arc cotangent to result, are obtainedValue, then pass through
Conversion obtains dynamic displacement x of the ruler 3 relative to scale 1 in the X-axis direction.
In addition, for the non electromagnetic induction formula linear displacement transducer with complementary coupling structure comprising scale, two pieces
Dynamic ruler, scale installation base body and dynamic ruler installation base body, scale installation base body include pedestal and limited block, offer and determine on pedestal
The scale slot that the length of ruler matches, scale are vertically mounted in scale slot and are fixed by limited block, screw limit, move ruler
The centre of installation base body offers straight trough mouth, and the width of the straight trough mouth is greater than the sum of scale thickness and two pieces of dynamic ruler thickness, depth
Greater than the scale sensing unit height on scale, dynamic ruler installation base body is symmetrical about straight trough mouth, and two pieces of dynamic rulers are symmetrically mounted on directly
The two sides of notch, the dynamic ruler sensing unit series connection on two pieces of dynamic rulers, scale are inserted into straight trough mouth, make ruler sensing unit and scale
The coupling of sensing unit face.
Claims (10)
1. a kind of linear displacement transducer with complementary coupling structure, including scale (1), dynamic ruler (3), it is characterised in that: also
Including scale installation base body (2) and dynamic ruler installation base body (4), scale installation base body (2) includes pedestal (21) and limited block (22),
The scale slot to match with the length of scale is offered on pedestal (21), scale (1) is vertically mounted in scale slot and passes through limit
Position block limit is fixed, and the centre of dynamic ruler installation base body (4) offers straight trough mouth (41), and the width of the straight trough mouth is greater than scale thickness
It is greater than the scale sensing unit height on scale with the sum of two pieces of dynamic ruler thickness, depth, moves ruler installation base body (4) about straight trough mouth
Symmetrically, moving ruler (3) has two pieces, and two pieces of dynamic rulers (3) are symmetrically mounted on the two sides of the straight trough mouth, the dynamic ruler on two pieces of dynamic rulers (3)
Sensing unit series connection, scale (1) are inserted into straight trough mouth (41), make the dynamic ruler sensing unit and the scale sensing unit face
Coupling.
2. the linear displacement transducer according to claim 1 with complementary coupling structure, it is characterised in that: the scale
(1) the scale sensing unit for including scale coil base (11) and being printed on scale coil base, scale sensing unit
By distribution period be W, distribution period number isFirst coil linear array (121) and the second coil linear array (122) constitute, first
Coil linear array (121) is staggered with the second coil linear array (122) along the initial position of measurement direction along the initial position of measurement directionThe dynamic ruler (3) includes the dynamic ruler sensing unit for moving ruler coil base (31) and being printed on dynamic ruler coil base, is moved
Ruler sensing unit by distribution period is W, distribution period number isFirst pair of sinusoidal coil linear array (32) constitute；Wherein,
m1, n be even number, n >=4,2≤m1< n.
3. the linear displacement transducer according to claim 2 with complementary coupling structure, it is characterised in that: described first
Coil linear array (121) and the second coil linear array (122) by the 4n straight wire that length is L and the connection straight wire connection
Line composition, wherein 2n+2 straight wire is along the first wiring layer that measurement direction is distributed in scale coil base (11), in addition
2n-2 straight wire along the second wiring layer that measurement direction is distributed in scale coil base (11), and be distributed in the first wiring
2n-2 straight wire of the centre of layer is symmetrical；Adjacent two straight wires are along the spacing of measurement direction on same wiring layerFirst
The 2i+1 articles straight wire on wiring layer is connect with the 2i+1 articles straight wire on the second wiring layer by connecting line, via hole, the
The 2i+1 articles straight wire on two wiring layers is connect with the 2i+5 articles straight wire on the first wiring layer by connecting line, via hole,
The 2n+1 articles straight wire in the 2n-1 articles straight wire and the first wiring layer on first wiring layer is connected by connecting line, via hole
It connects, is formed first coil linear array (121), the not connected end leads of the 1st article, the 3rd article straight wire on the first wiring layer are made
For the signal input/output terminals of first coil linear array (121)；The 2i+2 articles straight wire and the second cloth on first wiring layer
The 2i+2 articles straight wire on line layer is connected by connecting line, via hole, the 2i+2 articles straight wire and first on the second wiring layer
The 2i+6 articles straight wire on wiring layer is connected by connecting line, via hole, the 2n articles straight wire and first on the first wiring layer
The 2n+2 articles straight wire on wiring layer is connected by connecting line, via hole, forms the second coil linear array (122), in the first wiring
The not connected end leads of the 2nd article, the 4th article straight wire on layer connect as the signal input/output of the second coil linear array (122)
Line end；Wherein, i successively takes 0 to n2 all integers.
4. the linear displacement transducer according to claim 2 or 3 with complementary coupling structure, it is characterised in that: described
First pair of sinusoidal coil linear array (32) be identical by initial position, amplitude A, period W, number of cycles arePhase mutual deviation
The sinusoidal conducting line segment of the first, second of 180 ° surrounds, the first sinusoidal conducting line segmentSegment part,Segment part and the second sinusoidal conducting line segmentSegment part is all distributed in
On first wiring layer of dynamic ruler coil base, the second sinusoidal conducting line segmentSegment part,Segment part and the first sinusoidal conducting line segmentSegment part is all distributed in
On second wiring layer of dynamic ruler coil base, in the end leads for certain the two neighboring segment part being distributed on various wirings layer
As the signal input/output terminals of first pair of sinusoidal coil linear array (32), remaining is distributed in each on various wirings layer
The end of segment part is connected by via hole；Wherein, j successively take 0 toAll integers.
5. the linear displacement transducer according to claim 4 with complementary coupling structure, it is characterised in that: the dynamic ruler
It is offered at the top of installation base body (4) L v notch v (42), the signal of first pair of sinusoidal coil linear array (32) input/defeated
Terminals are exposed except dynamic ruler installation base body (4) by the L v notch v out.
6. the linear displacement transducer according to any one of claims 1 to 5 with complementary coupling structure, it is characterised in that:
The first coil linear array (121) and the second coil linear array (122) are magnet exciting coil, the first pair of sinusoidal coil line
Battle array (32) is induction coil, each leads into the orthogonal alternation of two-phase in first coil linear array (121), the second coil linear array (122)
Pumping signal, when along measurement direction relative motion occurs for dynamic ruler (2) with scale (1), first pair of sinusoidal coil linear array (32)
The periodically variable inductive signal of output amplitude constant phase carries out phase demodulation processing to the inductive signal, and obtains after converting
Straight-line displacement of the dynamic ruler with respect to scale；
Or first pair of sinusoidal coil linear array (32) is magnet exciting coil, the first coil linear array (121) and the second line
Astragal battle array (122) is induction coil, is passed through alternating excitation signal in first pair of sinusoidal coil linear array (32), when dynamic ruler (2) and
When along measurement direction relative motion occurs for scale (1), first coil linear array (121) exports respectively with the second coil linear array (122)
The periodically variable inductive signal of phase-constant amplitude all the way carries out amplitude discrimination processing to the two-way inductive signal, and after converting
Obtain straight-line displacement of the dynamic ruler with respect to scale.
7. a kind of induction linear displacement transducer with complementary coupling structure, including scale (1) and dynamic ruler (3), fixed
Ruler (1) includes scale coil base (11) and the sensing unit that is printed on scale coil base, and moving ruler (3) is metal magnetic conducting body
Or conductive metal non-magnetizer, it is characterised in that: the sensor further includes scale installation base body (2), and scale installs base
Body (2) includes pedestal (21) and limited block (22), and the scale slot to match with the length of scale, scale are offered on pedestal (21)
(1) it being vertically mounted in scale slot and is limited by limited block and fixed, the centre of dynamic ruler (3) offers dynamic ruler straight trough mouth (33),
The width of dynamic ruler straight trough mouth is greater than scale thickness, depth is greater than sensing unit height, move ruler (3) it is symmetrical about dynamic ruler straight trough mouth and
Length along measurement direction isScale (1) is inserted into dynamic ruler straight trough mouth (33), makes front and back two parts and sensing of ruler (3)
The coupling of unit face；The sensing unit is by first coil linear array (121), the second coil linear array (122) and second pair of sinusoidal
Coil linear array (13) is constituted, and the distribution period of the first, second coil linear array (121,122) is W, distribution period number isFirst
Coil linear array (121) is staggered with the second coil linear array (122) along the initial position of measurement direction along the initial position of measurement directionThe distribution period of second pair of sinusoidal coil linear array (13) isDistribution period number isSecond pair of sinusoidal coil line
In the region that battle array (13) is located at first coil linear array (121) and the second coil linear array (122) is formed, second pair of sinusoidal coil line
Battle array (13) is differed with first coil linear array (121) along the initial position of measurement direction along the initial position of measurement directionWherein,
m2, n be even number, n >=4, m2>=4, k are integer and k >=0.
8. the induction linear displacement transducer according to claim 7 with complementary coupling structure, feature exist
In: the first coil linear array (121) and the second coil linear array (122) are as described in the 4n straight wire and connection that length is L
The connecting line of straight wire forms, and wherein 2n+2 straight wire is distributed in the first wiring of scale coil base (11) along measurement direction
On layer, 2n-2 articles of straight wire in addition along the 4th wiring layer that measurement direction is distributed in scale coil base (11), and with point
2n-2 straight wire for being distributed in the centre of the first wiring layer is symmetrical；Adjacent two straight wires are along measurement direction on same wiring layer
Spacing isThe 2i+1 articles straight wire on first wiring layer and the 2i+1 articles straight wire on the 4th wiring layer by connecting line,
Via hole connects, and the 2i+1 articles straight wire on the 4th wiring layer passes through with the 2i+5 articles straight wire on the first wiring layer to be connect
Line, via hole connect, and the 2n+1 articles straight wire in the 2n-1 articles straight wire and the first wiring layer on the first wiring layer passes through company
Wiring, via hole connection, form first coil linear array (121), and the 1st article, the 3rd article straight wire on the first wiring layer is not connected with
Signal input/output terminals of the end leads as first coil linear array (121)；The 2i+2 articles on first wiring layer is directly led
Line is connect with the 2i+2 articles straight wire on the 4th wiring layer by connecting line, via hole, and the 2i+2 articles on the 4th wiring layer is straight
Conducting wire is connect with the 2i+6 articles straight wire on the first wiring layer by connecting line, via hole, and the 2n articles on the first wiring layer is straight
Conducting wire is connect with the 2n+2 articles straight wire on the first wiring layer by connecting line, via hole, and the second coil linear array (122) is formed,
Signal of the not connected end leads of the 2nd article, the 4th article straight wire on the first wiring layer as the second coil linear array (122)
Input/output terminals；Wherein, i successively takes 0 to n2 all integers.
9. the induction linear displacement transducer according to claim 8 with complementary coupling structure, feature exist
In: second pair of sinusoidal coil linear array (13), amplitude A identical by initial position, period areNumber of cycles is
The third that 180 ° of phase mutual deviation, the 4th sinusoidal conducting line segment surround, third sine conducting line segmentSegment part,Segment part and the 4th sinusoidal conducting line segmentSegment part is all distributed in fixed
On second wiring layer of ruler coil base, the 4th sinusoidal conducting line segmentSegment part,Area
Between part and third sine conducting line segmentSegment part is all distributed in the third cloth of scale coil base
On line layer, certain the two neighboring segment part being distributed on various wirings layer end leads as second pair of sinusoidal coil
The signal input/output terminals of linear array (13), remaining end for being distributed in each segment part on various wirings layer passed through
Hole connection；Wherein, j successively take 0 toAll integers.
10. according to any induction linear displacement transducer with complementary coupling structure of claim 7 to 9,
It is characterized by:
The first coil linear array (121) and the second coil linear array (122) are magnet exciting coil, the second pair of sinusoidal coil line
Battle array (13) is induction coil, each leads into the orthogonal alternation of two-phase in first coil linear array (121), the second coil linear array (122)
Pumping signal, when along measurement direction relative motion occurs for dynamic ruler (2) with scale (1), second pair of sinusoidal coil linear array (13)
The periodically variable inductive signal of output amplitude constant phase carries out phase demodulation processing to the inductive signal, and obtains after converting
Straight-line displacement of the dynamic ruler with respect to scale；
Or second pair of sinusoidal coil linear array (13) is magnet exciting coil, the first coil linear array (121) and the second line
Astragal battle array (122) is induction coil, is passed through alternating excitation signal in second pair of sinusoidal coil linear array (13), when dynamic ruler (2) and
When along measurement direction relative motion occurs for scale (1), first coil linear array (121) exports respectively with the second coil linear array (122)
The periodically variable inductive signal of phase-constant amplitude all the way carries out amplitude discrimination processing to the two-way inductive signal, and after converting
Obtain straight-line displacement of the dynamic ruler with respect to scale.
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| CN113008120A (en) * | 2019-12-19 | 2021-06-22 | 重庆理工大学 | Capacitive linear displacement sensor and movable ruler thereof |
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Application publication date: 20190625 Assignee: Chongqing Han's Shizha Technology Co.,Ltd. Assignor: Chongqing University of Technology Contract record no.: X2022500000007 Denomination of invention: Linear displacement sensor with complementary coupling structure Granted publication date: 20210514 License type: Exclusive License Record date: 20220926 |