CN109898944B - Ultrasonic suspension guide rail with high positioning precision - Google Patents

Ultrasonic suspension guide rail with high positioning precision Download PDF

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Publication number
CN109898944B
CN109898944B CN201910036721.0A CN201910036721A CN109898944B CN 109898944 B CN109898944 B CN 109898944B CN 201910036721 A CN201910036721 A CN 201910036721A CN 109898944 B CN109898944 B CN 109898944B
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China
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guide rail
transducer
piezoelectric
rear end
end cover
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CN109898944A (en
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陈通
汪久根
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Zhejiang University ZJU
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Zhejiang University ZJU
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Abstract

The invention discloses an ultrasonic suspension guide rail with higher positioning precision. The transducer support is of an annular structure, the transducer support is sleeved outside the guide rail, and a gap is reserved between the inner peripheral surface of the transducer support and the outer periphery of the guide rail; a plurality of piezoelectric transducers which are arranged at different positions along the direction of the guide rail are arranged on the upper, lower and two sides of the transducer bracket, through holes which are communicated with the gap from the outside are formed in the side wall of the transducer bracket, and the piezoelectric transducers are arranged in the through holes; in the piezoelectric transducer, a rear end cover is fixed in the through hole, the tail end of the amplitude transformer is fixedly connected with the rear end cover through a ceramic piezoelectric sheet, a snowflake-shaped groove is formed in the end face of the front end of the amplitude transformer, and the front end of the amplitude transformer is used as the tail end of the piezoelectric transducer. According to the invention, friction and abrasion are reduced, and the ultrasonic sound intensity is regulated according to the distance between the ultrasonic sound intensity and the bottom of the guide rail, so that the force for enabling the guide rail to move along the circumferential direction is generated.

Description

Ultrasonic suspension guide rail with high positioning precision
Technical Field
The invention relates to a mechanical structure guide rail, in particular to an ultrasonic suspension guide rail with high positioning accuracy.
Background
The common guide rail is in direct contact with the bracket, so that the bearing capacity is high. The guide rail has the advantages of simple structure, convenient manufacture, high bearing capacity, good shock resistance, easy abrasion, reduced positioning precision after long-term use and inapplicability to occasions with higher precision requirements. Near-field sound suspension can well reduce contact between the support and the guide rail, and abrasion in the working process of the guide rail is reduced.
Disclosure of Invention
In order to solve the problem of size abrasion in the background technology, the invention aims to provide the ultrasonic suspension guide rail with higher positioning accuracy, and circular through holes which are uniformly distributed are processed on a transducer bracket and are used for positioning and mounting a piezoelectric transducer.
The technical scheme adopted by the invention is as follows:
the invention comprises a piezoelectric transducer, a guide rail and a transducer bracket; the transducer support is of an annular structure, the transducer support is sleeved outside the guide rail, a gap is formed between the inner peripheral surface of the transducer support and the outer periphery of the guide rail, and an extruded air film with the near-field acoustic suspension sound field effect is formed in the gap; a plurality of piezoelectric transducers which are arranged at different positions along the direction of the guide rail are arranged on the upper, lower and two sides of the transducer bracket, through holes which are communicated with the gap from the outside are formed in the side wall of the transducer bracket, and one piezoelectric transducer is arranged in each through hole; the piezoelectric transducer comprises a ceramic piezoelectric plate, a rear end cover and a variable amplitude rod, wherein the rear end cover is fixed in one end of the through hole facing the outer side, the tail end of the variable amplitude rod is fixedly connected with the rear end cover through the ceramic piezoelectric plate, a snowflake-shaped groove is formed in the end face of the front end of the variable amplitude rod, the front end of the variable amplitude rod serves as the tail end of the piezoelectric transducer, and the variable amplitude rod is made of aluminum materials.
The tail end of the rear end cover is provided with an outer flange, the outer flange of the rear end cover is fixed on the end face of the hole facing the outer side through bolts, the tail end of the amplitude transformer is fixedly connected with one end of the ceramic piezoelectric plate, and the other end of the ceramic piezoelectric plate is fixedly connected with the front end of the rear end cover.
The cross section of the guide rail is rectangular, the bottom surface of the guide rail is a non-flat surface, and the three side surfaces except the bottom surface of the guide rail are flat surfaces.
The bottom surface of the guide rail is a fold-line-shaped surface extending along the guide rail.
The section of the transducer bracket is square with chamfer angles at four corners.
The through hole of the transducer bracket is internally provided with a shaft shoulder for fixing the piezoelectric transducer, and the inner surface of the through hole is coated with an insulating material for isolating the through hole of the piezoelectric transducer.
The outer peripheral surface of the rear end cover and the rear surface of the amplitude transformer are coated with insulating materials.
The guide rail structure can form effective near-field sound suspension, and has a sound field with enough strength and a suspension object with a small enough distance from an ultrasonic suspension device. The formed near-field acoustic levitation can well reduce friction between radial guide rails, prolong the service life of the guide rails and improve the limit rotating speed of the guide rails.
Under the near-field acoustic levitation pressure, the convergence gap between the guide rail and the transducer support is reduced, so that the acoustic angular velocity is improved, the near-field acoustic levitation pressure can be effectively enhanced, and the bearing capacity of the acoustic levitation guide rail is improved.
Wherein p is ra -representing the pressure to which the rail is subjected, gamma-specific heat capacity, air taking 1.4; a, a 0 -amplitude; k-wave number; h, the distance between the sound source and the guide rail; ρ 0 -air density; omega-acoustic angular velocity.
The ultrasonic actuation end cover is made of soft wear-resistant materials and is connected with the piezoelectric ring energy device through the simply supported beams, and the soft wear-resistant materials can fully conduct deformation of the piezoelectric sheet to enhance ultrasonic waves. The piezoelectric transducer adjusts output intensity according to the distance between the transducer support and the guide rail, and the positioning accuracy and stability of the guide rail are maintained.
The transducer support matrix is made of aluminum alloy, and the soft material is a Babbitt metal solid lubricating material or a polytetrafluoroethylene solid lubricating material.
The invention has the beneficial effects that:
1. and (5) ultrasonic suspension.
2. Reducing heat generation.
3. The pollution is small.
4. The operation precision is high.
5. The stability is good.
The invention can be used in the occasion with low requirement on the bearing capacity of the guide rail and high requirement on the operation precision. Such as a rail in a microelectromechanical system.
Drawings
FIG. 1 is an overall assembly view of an ultrasonic levitation rail of the present invention.
Fig. 2 is a radial cross-sectional view of the ultrasonic levitation guide of the present invention.
Fig. 3 is an overall assembly view of the piezoelectric transducer.
Fig. 4 is a cross-sectional view of a piezoelectric transducer horn.
In the figure: 1. the device comprises a transducer bracket, a guide rail, a piezoelectric transducer, a rear end cover, a ceramic piezoelectric sheet, a variable amplitude rod and a ceramic piezoelectric sheet, wherein the transducer bracket, the guide rail, the piezoelectric transducer, the rear end cover, the ceramic piezoelectric sheet and the variable amplitude rod are sequentially arranged in sequence.
Detailed Description
The invention will be further described with reference to the drawings and examples.
In the figure, 1, a transducer bracket, 2, a guide rail, 3, a piezoelectric transducer, 4, a rear end cover, 5, a ceramic piezoelectric plate, 6 and an amplitude transformer.
As shown in fig. 1, the implementation of the invention comprises a piezoelectric transducer 3, a guide rail 2 and a transducer bracket 1; the transducer support 1 is of an annular structure, the cross section of the transducer support 1 is square with chamfer angles at four corners, the transducer support 1 is sleeved outside the guide rail 2, the central axis of the guide rail 3 coincides with the central axis of the piezoelectric transducer support, and a gap is reserved between the inner peripheral surface of the transducer support 1 and the outer periphery of the guide rail 2; four surfaces of the upper surface, the lower surface and the two side surfaces of the transducer bracket 1 are provided with round through holes which are uniformly distributed and have the same size, the through holes are divided into an upper row and a lower row, each row is four, the distance between the adjacent through holes is equal, and a piezoelectric transducer 3 is arranged in each through hole. The piezoelectric transducer 3 generates ultrasonic waves towards the surface of the guide rail 2, and generates acoustic levitation force in a gap between the transducer support 1 and the guide rail 2, so that a near-field acoustic levitation effect is formed.
In specific implementation, as shown in fig. 1, eight piezoelectric transducers 3 are mounted on each of the upper, lower and two sides of the transducer support 1, and the eight piezoelectric transducers 3 are divided into two rows parallel to the guide rail 2, and each row has four piezoelectric transducers 3 uniformly distributed at intervals. The side wall of the transducer bracket 1 is provided with a through hole communicated with the gap from the outside, and a shaft shoulder for fixing the piezoelectric transducer 3 is arranged in the through hole of the transducer bracket 1.
As shown in fig. 3, the piezoelectric transducer 3 comprises a ceramic piezoelectric plate 5, a rear end cover 4 and a variable amplitude rod 6, the rear end cover 4 is fixed in one end of the through hole facing to the outer side, the tail end of the variable amplitude rod 6 is fixedly connected with the rear end cover 4 through the ceramic piezoelectric plate 5, a snowflake-shaped groove is formed in the end face of the front end of the variable amplitude rod 6, the front end of the variable amplitude rod 6 serves as the tail end of the piezoelectric transducer 3, and the variable amplitude rod 6 is made of aluminum materials.
In the implementation, as shown in fig. 4, a snowflake-shaped groove is formed on the front end of the amplitude transformer 7, the rear end of the amplitude transformer is matched with the ceramic piezoelectric sheet, and meanwhile, a circular groove with the same radius as the snowflake-shaped groove is formed on the rear end of the amplitude transformer, so that the front end of the amplitude transformer 7 forms a snowflake-shaped sheet, the amplitude transformer is easier to vibrate, and stronger ultrasonic signals are generated; the diameter of the ceramic piezoelectric sheet 6 is the same as the diameter of the outer ring at the rear end of the amplitude transformer 7, the front surface is connected with the amplitude transformer 7, and the rear surface is connected with the front surface of the rear end cover 5 of the piezoelectric transducer.
The tail end of the rear end cover 4 is provided with an outer flange, the outer flange of the rear end cover 4 is fixed on the end face of the hole facing the outer side through bolts, the tail end of the amplitude transformer 6 is fixedly connected with one end of the ceramic piezoelectric sheet 5, and the other end of the ceramic piezoelectric sheet 5 is fixedly connected with the front end of the rear end cover 4.
As shown in fig. 3, the bottom surface of the guide rail 2 is a non-flat surface, specifically, a fold-line-shaped surface extending along the guide rail 2, that is, the two planes spaced from one plane are arranged in parallel in a manner of being joined along the guide rail 2 by fold lines, and three sides of the guide rail 2 except the bottom surface are flat surfaces. In addition, the piezoelectric transducers 3 arranged at different positions along the direction of the guide rail 2 regulate the acoustic levitation force according to the distance between the transducer support 1 and the guide rail 2, drive the transducer support 1 to relatively suspend and rest or move on the guide rail 2, and ensure that the transducer support 1 relatively suspends and moves on the guide rail 2 and has high positioning precision and stability.
For example, the operation of the piezoelectric transducers 3 in the polygonal surface below the respective parallel planes generates an acoustic levitation force, and since the acoustic levitation force is perpendicular to the plane in the polygonal surface, the transducer holder 1 is pushed to move horizontally relative to the rail 2 not vertically downward but obliquely downward, while maintaining the spacing fit between the transducer holder 1 and the rail 2 for guiding movement by the flat surfaces of three sides other than the bottom surface, the transducer holder 1 is not allowed to swing side to side while moving horizontally relative to the rail 2.
The distance between the guide rail 3 and the piezoelectric transducer bracket 1 is smaller; the length of the bottom edge corresponding to a plane of the zigzag surface in the bottom of the guide rail 2 is the same as the total length of two adjacent piezoelectric transducers in the same row, so that the bottom edge corresponding to each plane is ensured to be corresponding to one piezoelectric transducer.
A layer of soft damping wear-resistant material is covered on the guide rail 2 and the upper surface of the inner surface of the piezoelectric transducer bracket 1; the inner surface of the through hole of the transducer bracket 1 is coated with soft damping insulating material for isolating the through hole of the piezoelectric transducer 3, and the outer peripheral surface of the rear end cover 4 and the rear surface of the amplitude transformer 6 are also coated with insulating materials.
The base body of the piezoelectric transducer bracket is made of light materials such as aluminum alloy, the wear-resistant materials of the inner surface of the piezoelectric transducer bracket and the outer surface of the guide rail are diamond-like carbon, and the soft damping wear-resistant materials are polytetrafluoroethylene solid lubrication materials.
The working principle process of the invention is as follows:
the ceramic piezoelectric sheet generates cosine wave under the control of alternating current, the cosine wave is transmitted to the amplitude transformer through the connecting beam, so that the amplitude transformer is forced to vibrate, and because the amplitude transformer is softer in material, has smaller elastic modulus and better strength, snowflake-shaped flake grooves are formed in the surface of the amplitude transformer, and the vibration is more easily transmitted along the radial direction; the piezoelectric transducer generates a near-field suspension effect between the transducer support and the guide rail, and simultaneously ultrasonic waves squeeze air to generate dynamic pressure films, so that supporting force is increased.
The guide rail is divided into two working conditions of a static state and a moving state.
Under the static working condition, the piezoelectric transducer fixed on the upper surface of the piezoelectric transducer support works, ultrasonic waves with the same frequency and amplitude are output, and levitation force is generated on the piezoelectric transducer support, meanwhile, the piezoelectric transducers fixed on the two sides of the piezoelectric transducer support work, and ultrasonic waves with the same frequency and amplitude are output, so that the piezoelectric transducer support receives levitation force with the same size on the two sides, and the piezoelectric transducer support is ensured to be stable in the direction perpendicular to the guide rail.
Under a moving working condition, as shown in fig. 2, numbering a, b, c, d from left to right on the lower surface of the piezoelectric transducer support, when the guide rail moves rightwards, the piezoelectric transducers b and c work, ultrasonic waves with the same frequency and amplitude are output, as the guide rail surfaces corresponding to the piezoelectric transducers b and c are inclined surfaces, the piezoelectric transducer support can receive reverse acting force perpendicular to the guide rail surfaces, the acting force can generate a driving force F1 rightwards along the horizontal direction, a force F2 downwards along the vertical direction and a torque T for anticlockwise rotating the piezoelectric transducer support along the mass center, the piezoelectric transducer support can move rightwards along the horizontal direction under the action of the driving force F1, at the moment, the working modes of the piezoelectric transducers on two sides of the piezoelectric transducer support are the same as those of the guide rail when the piezoelectric transducers are at rest, the distance between the piezoelectric transducer support on the upper surface and the guide rail can be reduced under the action of F2 and the torque T, and the distance born by the suspended matters in the ultrasonic waves is related to the distance between the suspended matters and the suspended matters, the distance between the suspended matters is larger, and the ultrasonic buoyancy generated to be larger when the distance is reduced, and the ultrasonic torque is reduced, so that the piezoelectric transducers can not offset in the vertical direction; the leftward movement is the same as the rightward movement principle.
The transducer support is separated from the guide rail in an acoustic suspension mode, so that the size abrasion in the working process of the guide rail is reduced, and the transmission precision and stability of the guide rail are improved. Meanwhile, due to the characteristic that the suspension force of the suspended matters is related to the distance from the sound source, when the guide rail is subjected to force for deviating the guide rail from the normal working state position, as mentioned above, the distance between the piezoelectric transducer and the guide rail is changed, and the piezoelectric transducer support can be subjected to ultrasonic suspension force which is automatically generated by the guide rail and enables the piezoelectric transducer to return to the normal working state position. Therefore, the guide rail has better positioning precision and stability.
According to the structure, a squeeze air film and a near-field sound suspension sound field are formed between the transducer support and the guide rail, so that the transducer support is suspended, and friction and abrasion are reduced; the piezoelectric transducer at the bottom of the transducer bracket can adjust the ultrasonic sound intensity according to the distance between the piezoelectric transducer and the isosceles triangle groove at the bottom of the guide rail, so that the force for enabling the guide rail to move along the circumferential direction is generated. The transducer horn uses a soft material.
The foregoing detailed description is provided to illustrate the present invention and not to limit the invention, and any modifications and changes made to the present invention within the spirit of the present invention and the scope of the appended claims fall within the scope of the present invention.

Claims (6)

1. An ultrasonic levitation guide rail, which is characterized in that: comprises a piezoelectric transducer (3), a guide rail (2) and a transducer bracket (1); the transducer support (1) is of an annular structure, the transducer support (1) is sleeved outside the guide rail (2), and a gap is reserved between the inner peripheral surface of the transducer support (1) and the outer periphery of the guide rail (2); a plurality of piezoelectric transducers (3) which are arranged at different positions along the direction of the guide rail (2) are arranged on the upper, lower and two sides of the transducer bracket (1), through holes which are communicated with a gap from the outside are formed in the side wall of the transducer bracket (1), and one piezoelectric transducer (3) is arranged in each through hole; the piezoelectric transducer (3) comprises a ceramic piezoelectric sheet (5), a rear end cover (4) and a variable amplitude rod (6), wherein the rear end cover (4) is fixed in one end of the through hole facing to the outer side, the tail end of the variable amplitude rod (6) is fixedly connected with the rear end cover (4) through the ceramic piezoelectric sheet (5), a snowflake-shaped groove is formed in the end face of the front end of the variable amplitude rod (6), the front end of the variable amplitude rod (6) serves as the tail end of the piezoelectric transducer (3), and the variable amplitude rod (6) is made of an aluminum material;
the bottom surface of the guide rail (2) is a non-flat surface, and three side surfaces except the bottom surface of the guide rail (2) are flat surfaces.
2. An ultrasonic levitation guide as defined in claim 1, wherein: the tail end of the rear end cover (4) is provided with an outer flange, the outer flange of the rear end cover (4) is fixed on the end face of the hole facing the outer side of the through hole through bolts, the tail end of the amplitude transformer (6) is fixedly connected with one end of the ceramic piezoelectric plate (5), and the other end of the ceramic piezoelectric plate (5) is fixedly connected with the front end of the rear end cover (4).
3. An ultrasonic levitation guide as defined in claim 1, wherein: the bottom surface of the guide rail (2) is a fold-line-shaped surface extending along the guide rail (2).
4. An ultrasonic levitation guide as defined in claim 1, wherein: the section of the transducer bracket (1) is square with chamfer angles at four corners.
5. An ultrasonic levitation guide as defined in claim 1, wherein: the through hole of the transducer bracket (1) is internally provided with a shaft shoulder for fixing the piezoelectric transducer (3), and the inner surface of the through hole is coated with an insulating material for isolating the through hole of the piezoelectric transducer (3).
6. An ultrasonic levitation guide as defined in claim 1, wherein: the outer peripheral surface of the rear end cover (4) and the rear surface of the amplitude transformer (6) are coated with insulating materials.
CN201910036721.0A 2019-01-15 2019-01-15 Ultrasonic suspension guide rail with high positioning precision Active CN109898944B (en)

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CN109898944B true CN109898944B (en) 2023-07-25

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Publication number Priority date Publication date Assignee Title
CN112509542A (en) * 2020-11-20 2021-03-16 山东省科学院海洋仪器仪表研究所 Underwater acoustic transducer

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US3946829A (en) * 1973-09-17 1976-03-30 Nippon Tokushu Togyo Kabushiki Kaisha Ultrasonic device
DE3602830A1 (en) * 1986-01-30 1987-08-06 Siemens Ag Current rail arrangement for a track-bound vehicle provided with a current collector
JPH01218306A (en) * 1988-02-25 1989-08-31 Railway Technical Res Inst Coil connection method for magnetic levitation mechanism
DE102012101469A1 (en) * 2012-02-23 2013-08-29 BAM Bundesanstalt für Materialforschung und -prüfung Apparatus for generating defined atmosphere in specimen chamber of acoustic levitator within mixing chamber, has gas outlet opening, which is arranged such that atmospheric gas discharging from gas outlet opening flows in specific direction
CN107269697A (en) * 2017-07-07 2017-10-20 哈尔滨工业大学 It is a kind of to bear the ultrasound suspending bearing of radial and axial load simultaneously
CN108380910A (en) * 2018-04-19 2018-08-10 唐德祥 Air suspension formula ultrasound high-speed motorized spindles
CN209704292U (en) * 2019-01-15 2019-11-29 浙江大学 A kind of ultrasound suspending guide rail that positioning accuracy is high

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20050113236A (en) * 2003-03-17 2005-12-01 가부시기가이샤 아이 에이 아이 Ultrasonic float-up device

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3946829A (en) * 1973-09-17 1976-03-30 Nippon Tokushu Togyo Kabushiki Kaisha Ultrasonic device
DE3602830A1 (en) * 1986-01-30 1987-08-06 Siemens Ag Current rail arrangement for a track-bound vehicle provided with a current collector
JPH01218306A (en) * 1988-02-25 1989-08-31 Railway Technical Res Inst Coil connection method for magnetic levitation mechanism
DE102012101469A1 (en) * 2012-02-23 2013-08-29 BAM Bundesanstalt für Materialforschung und -prüfung Apparatus for generating defined atmosphere in specimen chamber of acoustic levitator within mixing chamber, has gas outlet opening, which is arranged such that atmospheric gas discharging from gas outlet opening flows in specific direction
CN107269697A (en) * 2017-07-07 2017-10-20 哈尔滨工业大学 It is a kind of to bear the ultrasound suspending bearing of radial and axial load simultaneously
CN108380910A (en) * 2018-04-19 2018-08-10 唐德祥 Air suspension formula ultrasound high-speed motorized spindles
CN209704292U (en) * 2019-01-15 2019-11-29 浙江大学 A kind of ultrasound suspending guide rail that positioning accuracy is high

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