CN109894170A - Micro-fluidic chip and production method for geological process chemolysis research - Google Patents
Micro-fluidic chip and production method for geological process chemolysis research Download PDFInfo
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- CN109894170A CN109894170A CN201910238487.XA CN201910238487A CN109894170A CN 109894170 A CN109894170 A CN 109894170A CN 201910238487 A CN201910238487 A CN 201910238487A CN 109894170 A CN109894170 A CN 109894170A
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Abstract
The invention discloses a kind of micro-fluidic chips and production method for geological process chemolysis research.Include the following steps: to prepare micro-fluidic chip body, upper, middle and lower base channel etch and upper, middle and lower base and micro-fluidic chip body be bonded and encapsulation, finally obtain the micro-fluid chip suitable for geological process chemolysis research purpose.The material of micro-fluidic chip body can easily obtain general matter by sodium chloride crystal, test rock slice etc., upper subtegulum uses the organic glass of silicate glass glass slide or epoxy resin with transparent characteristic, preparing micro-fluid chip usually only needs normal temperature and pressure conditions, and entire Production Time is 2-3 hours.This method have many advantages, such as channel production precision is high, chip package process is simple, preparation time is short, it is flexible in application, convenient for mass production, while microflow control technique is extended to the subjects such as geophysics, energy environment from fields such as biomedicines by this method.
Description
Technical field
The invention belongs to micro-fluidic manufacture technology field, in particular to it is a kind of for geological process chemolysis research it is micro-
Fluidic chip and production method.
Background technique
Often there is multicomponent, heterogeneous fluid in the porous crack rock of Earth and near surface unsaturation ground hole
(such as empty gas and water and nonaqueous phase pollutant etc.).Dynamical motion feature between them and the object occurred between Rock And Soil
Mass transter is to research shale oil (gas) exploitation, CO2The fields such as geological storage and groundwater pollutant migration all have extremely important
Meaning.However be limited to rock and the soil body can not optical perspective characteristic, monitor in ground body opening/crack clearly, in real time
It fluid motion and is never resolved the problem of to surrounding environment influence, to hinder our profound understanding hole/cracks
The movement of multiphase flow and material exchange process in medium.Although there is some means at present, such as CT (digital imaging technology), MRI
(nuclear magnetic resonance technique) etc. is coming into operation, but the price of equipment valuableness and to drawbacks such as human body great damages not
It is widely applied in geophysical research field.Compel so finding and developing new technological means to carry out the demand of correlative study
In the eyebrows and eyelashes.
Microfluidic chip technology (Microfluidics) is referred to involved in the fields such as biology, iatrochemistry analysis
The basic operation units such as sample preparation, reaction, separation, detection it is integrated or to be integrated into one piece of core cell substantially be micron-scale
Chip on, be automatically performed a kind of technology of whole process analysis.It has many advantages, such as: time and cost of labor are low, it is sensitive to detect
Degree is high, accuracy rate and reproducible.At the same time, the hole of Rock And Soil/crack scale is in micro-nano (~μm-~nm) rank,
Carry out associated experimental study from meso-scale, microflow control technique shows unique inherent advantage.It is referred from this, is ground
The micro-fluidic chip that hair is suitable for geophysics field is undoubtedly the optimal case for solving the discipline development bottleneck at present.
The micro-fluidic for being now widely used for the fields such as biology, medicine mostly uses crystalline silicon, glass, quartz and
Various macromolecule polymer materials, condition needed for manufacturing process is more harsh, when being especially bonded to chip, needs more
Kind equipment is assisted, such as crystalline silicon, glass and quartzy class chip bonding need high temperature (~800 DEG C) high pressure, toward contact
Glass surface can be caused Newton's ring etc. occur because of operating technology problem influences the defect of experimental observation, causes chip manufacturing yields
It reduces.Therefore, selection is most important suitable for the microchip material of geophysics field, overcomes above-mentioned existing micro-fluidic chip key
The problems in conjunction technology is also highest priority of the invention.
Summary of the invention
The object of the present invention is to provide it is a kind of for geological process chemolysis research micro-fluidic chip and production method,
Micro-fluidic chip through the invention can be completed to test, easily controllable and operation with lesser reagent consumption.
To achieve the above object, special provided by the present invention for the micro-fluidic chip of geological process chemolysis research
Sign is: the micro-fluidic chip body containing microchannel including horizontal parallel arrangement, further includes upper base, middle base, lower base
Layer, upper adhesive coating layer, lower adhesive coating layer；It the upper base, upper adhesive coating layer, middle base, lower adhesive coating layer and goes to a grassroots level from top to bottom successively
It is arranged with micro-fluidic chip body horizontal parallel, middle base's level is classified as the upper half and lower half through chip body
Portion, the upper base, upper adhesive coating layer are respectively positioned on above middle base；The lower adhesive coating layer and going to a grassroots level is respectively positioned below middle base；
It is additionally provided with inlet, outpour mouth and is placed in middle base and horizontally disposed drainage channel；The inlet and outpour mouth hang down
It is straight to penetrate through upper base, upper adhesive coating layer and middle base, and be connected to drainage channel.
Preferably, the cylindrical neck and to outpour the diameter of mouth be 0.5mm；The drainage channel width
For 0.3mm, length 8mm；The upper base, middle base and the borate glass being all made of with a thickness of 0.2mm of going to a grassroots level, it is described
Borate glass carries out super-hydrophobicization using silane and handles the generation being made to prevent corner from flowing.
Further, the upper adhesive coating layer and lower adhesive coating layer are all made of ultraviolet photosensitive glue and are made；The chip body
Material is rock slice, having a size of 2mm × 2mm, with a thickness of 0.2mm.
The present invention also provides a kind of production method of micro-fluidic chip for geological process chemolysis research, features
Be: it includes the following steps:
Prepare the micro-fluidic chip body containing microchannel first, then the upper base to glass slide, middle base, go to a grassroots level into
Row of channels etching finally carries out substrate secondary or physical bond and encapsulation using light-sensitive emulsion under semi-cured state to get the micro-fluidic core is arrived
Piece；
The microchannel obtains hydraulically rough surface crack inside rock mass using CT surface sweeping, then passes through laser-engraving technique for figure
It is transferred on specific rock slice, is further connect with the base containing injection hole and drainage channel, last bonding packaging obtains
The micro-fluidic chip.
Advantages of the present invention is as follows: the material of micro-fluidic chip body of the present invention can be by sodium chloride crystal, test rock
Slice etc. easily obtains general matter, and upper subtegulum uses the silicate glass glass slide or epoxy resin with transparent characteristic
Organic glass, preparing micro-fluid chip usually only needs normal temperature and pressure conditions, and entire Production Time is 2-3 hours.The present invention is one
Kind from application in particular to deep geophysical Rock And Soil chemistry geology coupling process studying technological domain technical concept and
The production method of observation model, this method use selected material etch microchip channel, and using the photosensitive glue of semi-solid preparation
Physical bond is carried out with substrate, the geological materials of one side micro-sized channel are suitable for research purpose, on the other hand overcome tradition
Many equipment are needed to assist and directly carry out key and encapsulation in method, the final acquisition production used time is few, at low cost, precision is high, good
Product rate is high and can bear the micro-fluidic chip of larger pressure.This method is high with channel production precision, chip package process is simple,
The advantages that preparation time is short, flexible in application, convenient for mass production, while this method leads microflow control technique from biomedicine etc.
Domain extends to the subjects such as geophysics, energy environment.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of micro-fluidic chip of the invention.
Fig. 2 is the schematic diagram of the rock fracture shape microchannel pattern in micro-fluidic chip example of the invention on mask plate.
Fig. 3 is base's schematic diagram on micro-fluidic chip of the invention.
Fig. 4 is base's schematic diagram in micro-fluidic chip of the invention.
In figure: micro-fluidic chip body 1, upper base 2, middle base 3 go to a grassroots level 4, upper adhesive coating layer 5, lower adhesive coating layer 6, injection
Mouth 7, outpours mouth 8, drainage channel 9.
Specific embodiment
The present invention is described in detail by the following examples, but protection scope of the present invention is not limited to down state
It is bright.If being experimentally routine experiment method without specified otherwise；Used reagent and material etc. can pass through business way
Diameter obtains.
Provided by the present invention for the micro-fluidic chip of geological process chemolysis research, including containing for horizontal parallel arrangement
There is the micro-fluidic chip body 1 of microchannel, further include upper base 2, middle base 3 goes to a grassroots level 4, upper adhesive coating layer 5, lower adhesive coating layer 6；
Upper base 2, upper adhesive coating layer 5, middle base 3, lower adhesive coating layer 6 and go to a grassroots level 4 from top to bottom successively with 1 horizontal parallel cloth of chip body
It sets, middle base 3 is horizontal to be classified as the upper half and lower half through chip body 1, and upper base 2, upper adhesive coating layer 5 are respectively positioned on middle base
3 top of layer；It lower adhesive coating layer 6 and goes to a grassroots level and 4 is respectively positioned on middle 3 lower section of base；It is additionally provided with inlet 7, outpour mouth 8 and is placed in middle base
3 interior and horizontally disposed drainage channels 9；Inlet 7 and mouth 8 is outpoured vertically through upper base 2, upper adhesive coating layer 5 and middle base
3, and be connected to drainage channel 9.
Cylindrical neck 7 and the diameter for outpouring mouth 8 are 0.5mm；9 width of drainage channel is 0.3mm, length 8mm；
It upper base 2, middle base 3 and goes to a grassroots level and 4 is all made of borate glass with a thickness of 0.2mm, borate glass is carried out using silane
The generation to prevent corner from flowing is made in super-hydrophobicization processing.
Upper adhesive coating layer 5 and lower adhesive coating layer 6 are all made of ultraviolet photosensitive glue and are made；The material of micro-fluidic chip body 1 is rock
Stone slice, having a size of 2mm × 2mm, with a thickness of 0.2mm.
The production method of micro-fluidic chip for geological process chemolysis research of the invention, it is characterised in that: it
Include the following steps: to prepare the micro-fluidic chip body 1 containing microchannel first, then to upper, middle and lower layer glass slide (upper base 2,
Middle base 3 goes to a grassroots level and 4) carries out channel etch, finally carries out substrate secondary or physical bond and encapsulation using light-sensitive emulsion under semi-cured state,
Obtain micro-fluid chip；
Microchannel obtains hydraulically rough surface crack inside rock mass using CT surface sweeping, then passes through laser-engraving technique for pattern transfer
Onto specific rock slice, further it is connect with the base containing injection hole 7 and drainage channel 9, last bonding packaging obtains micro-
Fluidic chip.
Wherein, microchannel figure obtains:
High progress scanning is carried out to the core containing original micro-crack using CT scanner or by being located in De Kesa
The shared platform (https: //www.digitalrocksportal.org/) of this state university Austin obtains original number
According to being switched to editable CAD image, such as Fig. 2 by computer disposal.
According to initial designs, general and injection hole 7 outpour 8 schematic diagram of hole (Fig. 3), 9 schematic diagram of drainage channel (Fig. 4) drafting
For CAD diagram case, to carry out engraving use in next step.
Micro-channel chip main body 1 and base channel and injection, outlet production:
Limestone core is polished into 2mm × 2mm using rock wafer lapping machine, with a thickness of the thin slice of 1mm, then using high-precision
Digital control instrument further polishes thin slice, and having a size of 2mm × 2mm, with a thickness of the thin slice of 0.2mm, long generous error is ± 0.1 μ
M, measuring its surface roughness using atomic force microscope (AFM) is ± 5 μm.
The rock of the CAD diagram case engraving of above-mentioned acquisition after a polish is sliced by precise laser engraving machine again, measurement
Obtaining its precision is ± 8 μm.
Microchip bonding packaging:
Ultraviolet photoresist using spin coater is uniformly covered with upper base 2 with 100 μm of thickness and goes to a grassroots level 4, corresponding rotation
Painting revolving speed is 500r/min, 30s.Reuse 30mW/cm2Ultraviolet curing lamp (365nm wavelength) expose 30s, can obtain at this time
The glue of semi-cured state, i.e. glue are securely bonded with base, but still there is certain caking property on its surface.
Have 4 spin coatings of going to a grassroots level are placed in 3 pairs of middle base on that face of semi-solid preparation glue, then by the rock containing channel
Slice be placed in the square groove that middle base 3 cuts in advance, reuse ultra-violet curing etc. exposure 90s, glue be fully cured so that in,
It goes to a grassroots level and is firmly bonded.
Base and upper base that previous step has bonded are firmly bonded by same method, so far by bonding packaging, finally
Complete the production of micro-fluidic chip.
Claims (4)
1. a kind of micro-fluidic chip for geological process chemolysis research, it is characterised in that: including horizontal parallel arrangement
Micro-fluidic chip body (1) containing microchannel further includes upper base (2), and middle base (3) is gone to a grassroots level (4), upper adhesive coating layer
(5), lower adhesive coating layer (6)；The upper base (2), upper adhesive coating layer (5), middle base (3), lower adhesive coating layer (6) and go to a grassroots level (4) from
It is successively arranged with micro-fluidic chip body (1) horizontal parallel under above, the middle base (3) is horizontal will through chip body (1)
It is divided into the upper half and lower half, and the upper base (2), upper adhesive coating layer (5) are respectively positioned on above middle base (3)；The lower snearing
Layer (6) and go to a grassroots level (4) be respectively positioned on middle base (3) lower section；Inlet (7) are additionally provided with, mouth (8) is outpoured and are placed in middle base (3)
Interior and horizontally disposed drainage channel (9)；The inlet (7) and mouth (8) is outpoured vertically through upper base (2), upper snearing
Layer (5) and middle base (3), and be connected to drainage channel (9).
2. the micro-fluidic chip according to claim 1 for geological process chemolysis research, it is characterised in that: described
Inlet (7) diameter and to outpour mouth (8) diameter be 0.5mm；Drainage channel (9) width is 0.3mm, length 8mm；Institute
Shu Shang base (2), middle base (3) and go to a grassroots level (4) be all made of borate glass with a thickness of 0.2mm, the borate glass
Super-hydrophobicization, which is carried out, using silane handles the generation being made to prevent corner from flowing.
3. according to claim 1 with described in 2 be used for geological process chemolysis research micro-fluidic chip, it is characterised in that: institute
It states adhesive coating layer (5) and lower adhesive coating layer (6) is all made of ultraviolet photosensitive glue and is made；The material of the chip body (1) is rock
Slice, having a size of 2mm × 2mm, with a thickness of 0.2mm.
4. a kind of make the method for the micro-fluidic chip of geological process chemolysis research as claimed in claim 1 or 2,
Be characterized in that: it includes the following steps:
Prepare the micro-fluidic chip body (1) containing microchannel first, then the upper base (2) to glass slide, middle base (3), under
Base (4) carries out channel etch, and it is described to get arriving finally to carry out substrate secondary or physical bond and encapsulation using light-sensitive emulsion under semi-cured state
Micro-fluidic chip；
The microchannel obtains hydraulically rough surface crack inside rock mass using CT surface sweeping, then passes through laser-engraving technique for pattern transfer
Onto specific rock slice, further it is connect with the base containing injection hole (7) and drainage channel (9), last bonding packaging obtains
To the micro-fluidic chip.
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| CN201910238487.XA CN109894170B (en) | 2019-03-27 | 2019-03-27 | Micro-fluidic chip for geological process chemical corrosion research and manufacturing method |
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Cited By (2)
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| CN112161907A (en) * | 2020-09-23 | 2021-01-01 | 武汉大学 | Surface wettability variable micro-pore model and manufacturing and using method thereof |
| CN112275334A (en) * | 2020-10-14 | 2021-01-29 | 武汉大学 | 2.5D pore structure microfluid chip and manufacturing and using method thereof |
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