CN109881256A - Programmable controller Control of diffusion furnace system and operating method - Google Patents
Programmable controller Control of diffusion furnace system and operating method Download PDFInfo
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- CN109881256A CN109881256A CN201711274350.7A CN201711274350A CN109881256A CN 109881256 A CN109881256 A CN 109881256A CN 201711274350 A CN201711274350 A CN 201711274350A CN 109881256 A CN109881256 A CN 109881256A
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
A kind of Control of diffusion furnace system and its operating method, belong to semiconductor manufacturing facility technical field, the main component composition for the various chain controls that control system is required using programmable controller PLC as the control of diffusion furnace temperature, gas Flowrate Control System and the technique of core element；Operating procedure include: process curve setting, manual operation, automatic running, heating and cooling slop control, holding in standby, operation, artificial leapfrog, Intelligent PID Control, history curve check, the detection of Overtemperature detection alarm, communication failure, the alarm of gas circuit flow detection, gas circuit interlock protection, systematic features and pid parameter Self-tuning System.Present system composition is novel, and working principle is clear, control function multiplicity and easy to operate, the temperature of furnace body, gas circuit status display more it is clear clearly, the further satisfaction requirement of semiconductor manufacturing industry diffusion technique.
Description
Technical field
The invention belongs to semiconductor manufacturing facility technical field, it is related to a kind of Control of diffusion furnace system and its operating method,
More particularly to programmable controller Control of diffusion furnace system and operating method.
Background technique
The upgrading of China's diffusion facilities rapidly developed in recent years, and technological progress speed is unprecedented, but was first on the whole
Into with fall behind and deposit, general technical level with international most advanced level compared with there is also some gaps, especially equipment automatization and
In terms of local detail.All kinds of 800 multitubes of diffusion facilities are shared in China's photovoltaic cell EQUIPMENT MARKET GUIDE at present, wherein 85% or so with
Compatible 156mm × 156mm cell piece based on 125mm × 125mm cell piece is handled, has 90% again among these the above are microcomputers and is automatic
Equipment is controlled, is the manual or semi-automatic product of PLC only less than 10%.There is temperature in use in the diffusion furnace of domestic production
Degree control stability is poor, gas circuit quantitatively controls and is not allowed, is unable to the problems such as storage technology program, causes product parameter one
Determine the diverging in degree, is not able to satisfy manufacturing technique requirent.For this purpose, diffusion furnace used in many enterprises is essentially all from state
The equipment of outer import, but these import diffusion furnaces are at high price, increase the production cost of enterprise.
Summary of the invention
The present invention proposes programmable controller Control of diffusion furnace system for deficiency existing for above-mentioned Control of diffusion furnace system
And operating method, the control and detection of temperature and gas circuit quality, further satisfaction half are carried out by adding programmable controller
The requirement of conductor manufacturing industry diffusion technique.
The technical scheme is that programmable controller Control of diffusion furnace system, it is characterised in that: the control system
Using programmable controller PLC as the diffusion furnace temperature control of core element, gas Flowrate Control System and technique requirement
Various chain controls main component constitute；
Siemens PLC CPU216, EM231 and EM232 that the programmable controller PLC selects Germany to produce are as system
Intelligent control core cell is responsible for the process operation control of system, temperature detection, fault detection, overtemperature alarm, temperature controller parameter
Setting, the control of gas circuit mass flowmenter, gas path failure detection, the various interlocked controls that technique requires, Realtime Alerts etc.；
The stability is the temperature control instrument SR23 produced using Japan SHIMADEN, through digital communication interface and control
Core carries out Real Data Exchangs, effectively eliminates the decaying of wire transmission analog signal, itself is a intelligent controls by SR23
Device processed has intelligent PID algorithm, 4~20mA current signal driving power driving plate is exported under the control of PLC, because electric
Stream signal is transmitted without loss, controls so being able to achieve precise and stable temperature to furnace temperature；
The gas Flowrate Control System control carries out hydrogen and big flow oxygen quality flow by the Analog control of PLC
The setting of controller and the real-time detection feedback of gas circuit, realize nitrogen and small flow oxygen quality by the free-port communication of PLC
The setting of flow controller and gas circuit and real-time detection feedback, operator can set uninterrupted and check reality by touch screen
Border flow.
The operating method of programmable controller Control of diffusion furnace system, which is characterized in that operating procedure is as follows:
(1) it is required to make corresponding process curve according to specific technique, curve setting method is 15 step × 20；
(2) it is manually operated；
(3) automatic running；
(4) heating and cooling slop control；
(5) standby；
(6) it is kept in operation；
(7) artificial leapfrog；
(8) Intelligent PID Control；
(9) history curve is checked；
(10) Overtemperature detection alarm；
(11) communication failure detects；
(12) gas circuit flow detection is alarmed；
(13) gas circuit interlock protection；
(14) systematic features；
(15) pid parameter Self-tuning System.
The invention has the benefit that programmable controller Control of diffusion furnace system proposed by the present invention and operating method,
System composition is novel, and working principle is clear, using programmable controller PLC as the diffusion furnace temperature control of core element, gas
The main component for the various chain controls that body flow control system and technique require；Control function is various and easy to operate,
The temperature of furnace body, gas circuit status display be more clear clear, the further satisfaction requirement of semiconductor manufacturing industry diffusion technique.
Specific embodiment
Below with reference to embodiment, the invention will be further described:
Programmable controller Control of diffusion furnace system, control system use diffusion of the programmable controller PLC as core element
The main component for the various chain controls that furnace temperature control, gas Flowrate Control System and technique require is constituted；
Intelligence of siemens PLC CPU216, EM231 and the EM232 that programmable controller PLC selects Germany to produce as system
Control core unit, the process operation for being responsible for system control, temperature detection, fault detection, overtemperature alarm, and temperature controller parameter is set
It is fixed, the control of gas circuit mass flowmenter, gas path failure detection, the various interlocked controls that technique requires, Realtime Alerts etc.；
Stability be using the temperature control instrument SR23 of Japan SHIMADEN production, through digital communication interface and control core into
Row Real Data Exchangs effectively eliminate the decaying of wire transmission analog signal, and itself is a intelligent controller, tools by SR23
There is intelligent PID algorithm, 4~20mA current signal driving power driving plate is exported under the control of PLC, because current signal passes
It is defeated not to be lost, it is controlled so being able to achieve precise and stable temperature to furnace temperature；
Gas Flowrate Control System controls the Analog control by PLC, carries out hydrogen and big flow oxygen quality flow control
The setting of device and the real-time detection feedback of gas circuit, realize nitrogen and small flow oxygen quality flow by the free-port communication of PLC
The setting of controller and gas circuit and real-time detection feedback, operator can set uninterrupted and check practical stream by touch screen
Amount.
The operating method of programmable controller Control of diffusion furnace system, operating procedure are as follows:
(1) it is required to make corresponding process curve according to specific technique, curve setting method is 15 step × 20；
(2) it is manually operated；
(3) automatic running；
(4) heating and cooling slop control；
(5) standby；
(6) it is kept in operation；
(7) artificial leapfrog；
(8) Intelligent PID Control；
(9) history curve is checked；
(10) Overtemperature detection alarm；
(11) communication failure detects；
(12) gas circuit flow detection is alarmed；
(13) gas circuit interlock protection；
(14) systematic features；
(15) pid parameter Self-tuning System.
Present system composition is novel, and working principle is clear, the diffusion using programmable controller PLC as core element
The main component for the various chain controls that furnace temperature control, gas Flowrate Control System and technique require；Control function is more
Sample and easy to operate, temperature, the gas circuit status display of furnace body are more clear clear, further satisfaction semiconductor manufacturing industry diffusion
The requirement of technique.
Claims (2)
1. programmable controller Control of diffusion furnace system, it is characterised in that: the control system is made using programmable controller PLC
For the main member for the various chain controls that the control of diffusion furnace temperature, gas Flowrate Control System and the technique of core element require
Component is constituted；
Siemens PLC CPU216, EM231 and EM232 that the programmable controller PLC selects Germany to produce are as system
Intelligent control core cell is responsible for the process operation control of system, temperature detection, fault detection, overtemperature alarm, temperature controller parameter
Setting, the control of gas circuit mass flowmenter, gas path failure detection, the various interlocked controls that technique requires, Realtime Alerts etc.；
The stability is the temperature control instrument SR23 produced using Japan SHIMADEN, through digital communication interface and control
Core carries out Real Data Exchangs, effectively eliminates the decaying of wire transmission analog signal, itself is a intelligent controls by SR23
Device processed has intelligent PID algorithm, 4~20mA current signal driving power driving plate is exported under the control of PLC, because electric
Stream signal is transmitted without loss, controls so being able to achieve precise and stable temperature to furnace temperature；
The gas Flowrate Control System control carries out hydrogen and big flow oxygen quality flow by the Analog control of PLC
The setting of controller and the real-time detection feedback of gas circuit, realize nitrogen and small flow oxygen quality by the free-port communication of PLC
The setting of flow controller and gas circuit and real-time detection feedback, operator can set uninterrupted and check reality by touch screen
Border flow.
2. the operating method of programmable controller Control of diffusion furnace system as described in claim 1, which is characterized in that operation step
It is rapid as follows:
(1) it is required to make corresponding process curve according to specific technique, curve setting method is 15 step × 20；
(2) it is manually operated；
(3) automatic running；
(4) heating and cooling slop control；
(5) standby；
(6) it is kept in operation；
(7) artificial leapfrog；
(8) Intelligent PID Control；
(9) history curve is checked；
(10) Overtemperature detection alarm；
(11) communication failure detects；
(12) gas circuit flow detection is alarmed；
(13) gas circuit interlock protection；
(14) systematic features；
(15) pid parameter Self-tuning System.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711274350.7A CN109881256A (en) | 2017-12-06 | 2017-12-06 | Programmable controller Control of diffusion furnace system and operating method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711274350.7A CN109881256A (en) | 2017-12-06 | 2017-12-06 | Programmable controller Control of diffusion furnace system and operating method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109881256A true CN109881256A (en) | 2019-06-14 |
Family
ID=66923497
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711274350.7A Pending CN109881256A (en) | 2017-12-06 | 2017-12-06 | Programmable controller Control of diffusion furnace system and operating method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109881256A (en) |
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2017
- 2017-12-06 CN CN201711274350.7A patent/CN109881256A/en active Pending
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| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20190614 |
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| WD01 | Invention patent application deemed withdrawn after publication |