CN109879667A - The preparation method of fine and close oxygen loss zinc oxide ceramics body - Google Patents

The preparation method of fine and close oxygen loss zinc oxide ceramics body Download PDF

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CN109879667A
CN109879667A CN201910148911.1A CN201910148911A CN109879667A CN 109879667 A CN109879667 A CN 109879667A CN 201910148911 A CN201910148911 A CN 201910148911A CN 109879667 A CN109879667 A CN 109879667A
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zinc oxide
zinc
preparation
oxygen loss
powder
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CN109879667B (en
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宋伟杰
盛伟
杨晔
兰品军
李佳
黄金华
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Ningbo Institute of Material Technology and Engineering of CAS
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Abstract

The present invention provides the preparation method of fine and close oxygen loss zinc oxide ceramics body, and main includes the preparation of zinc layers coating zinc oxide granulation powder, and zinc layers coating zinc oxide granulation powder prepares ceramic body and is then sintered;Wherein zinc layers coating zinc oxide granulation powder preparation process is, zinc oxide premix is added in the liquid containing dispersing agent, slurry is made, slurry is passed through into air prilling, then zinc fume is delivered to granulation zone and realizes zinc oxide granulation powder surface zinc layers cladding, wherein the formation temperature of zinc fume is 1000~1300 DEG C.Compared with prior art, the present invention realizes the preparation of fine and close oxygen loss zinc oxide ceramics body using simple method, device therefor is simple, it is low in cost, consistency is higher, and the relative density of product has lower resistivity 95% or more, by testing its resistivity < 1 Ω cm, the sputtering demand of DC and MF can satisfy.

Description

The preparation method of fine and close oxygen loss zinc oxide ceramics body
Technical field
The present invention relates to optoelectronic materials technology, in particular to one kind can be able to achieve pair while guaranteeing high-densit The control of zinc oxide ceramics body oxygen loss rate, can be used as the target of magnetron sputtering, meet the use need of downstream light electroplating film industry It asks.
Background technique
Zinc oxide is passing through a fixed number as a kind of environmental-friendly, rich reserves multifunctional wide forbidden band oxide material After the degeneracy doping (such as Al, Ga, In) of amount, the transparent conductive oxide material of high light electrical property can be become (transparent conductive oxide, TCO) has UV Absorption, visible transparent, infrared light reflection and electricity The advantages that characteristic is adjustable is learned, in photoelectricity such as FPD, thin-film solar cells, building energy conservation Low-E glass, intelligent glass Message area is more and more applied, can be used as transparent electrode layer in thin-film solar cells, middle dielectric layer and Back electrode high reflection layer, the function medium layer in energy conservation Low-E glass, the transparent electrode layer of intelligent glass and household appliance glass Infrared reflecting layer etc..The technology of deposited oxide Zinc-based film is varied at present, wherein it is the most mature with magnetron sputtering film forming, it Have many advantages, such as high film consistency, uniformity and it is reproducible and be easy to large area high speed deposition and by industry receiving and wide General use.In magnetron sputtering process, ceramic target plays the role of vital, its performance and sputtering stability and most The photoelectric characteristic of telolemma layer is closely related.Basic demand to high-performance ceramic target is: the crystal grain of high-compactness, fine uniform And the uniformity of ingredient.Recently, the new demand for development of plated film industry can realize stringent control to the Lacking oxygen of target, full The application demand of the novel oxidized zinc function film of foot: (1) for CIGS thin film solar cell for, need to deposit one layer of intrinsic i- ZnO, and traditional intrinsic ZnO ceramic target electric conductivity is very poor, and expensive radio frequency (RF) power supply is needed to be sputtered, and furthermore sputters Rate is also slow, is difficult to meet the production requirement of rapid batch, it is therefore necessary to by adjusting the Lacking oxygen in ZnO crystal, The conductivity of target is promoted, high speed deposition can be realized using direct current (DC) or intermediate frequency (MF);(2) more in low-E plated film etc. Layer deposition field needs ZnO target material to have certain oxygen loss rate, allows deposited film in plated film chamber body absorption one Fixed oxygen molecule, further protects lower metal layer, and metal layer is avoided to be oxidized in coating process.
In order to control zinc oxide ceramic target oxygen loss rate content, pertinent literature gives following technology of preparing hand Section.Wan Dongyun etc. announces a kind of with oxygen in " Chinese Optical Letters " (the 10th phases page 103102 of volume 9 in 2011) The preparation method of the pure ZnO target material of defect, in this approach, first by dry-pressing formed ZnO green body after 1350 DEG C of sintering 4h It takes out, is placed in a small crucible, which is placed in inverted big crucible, and carbon dust is placed between two crucibles, heats up Carbon dust and remnant oxygen react the CO gas to be formed with reproducibility in the process, and the gas and ZnO generation reduction reaction are fallen It sets oxygen in ZnO lattice to lose, forms the zinc oxide ceramic target with Lacking oxygen.Ming-Wei Wu et al. is in " Journal of Alloys and Compounds " (the 650th 514-519 pages of phase in 2015) delivered and a kind of be prepared for using the method for hot isostatic pressing Aluminium-doped zinc oxide (AZO) ceramic target with certain oxygen loss rate, in this approach, AZO green body first air conditions in 1300 DEG C of sintering 3h, so in being placed in hot isostatic apparatus, by argon pressurization, in 1250 DEG C of sintering 3h.In addition there are uses Special atmosphere sintering furnace forms the preparation method with certain oxygen loss rate ceramic target to the reduction treatment of ceramic material.However, The still difficult large-scale production for being applied to large scale AZO target of above-mentioned three kinds of methods, shortcoming are as follows: (1) by crucible with And the limitation of hot isostatic apparatus cavity, it is only used for the laboratory sample processing of small size, may not apply to the big of mass The sintering of sized ceramics target;(2) operating procedure is cumbersome, needs first to sinter into be placed in again in an other equipment after block and carries out Secondary treatment increases the preparation cost of target indirectly;And the surface of first sintering ceramics is relatively compact to second of sintering Middle reducing atmosphere has certain barrier effect, is easy to appear the non-uniform phenomenon of internal and surface oxygen loss and occurs, and then influences target The uniformity of material;(3) equipment cost of hot isostatic pressing and special atmosphere sintering is higher, also will increase the cost of target preparation.
Summary of the invention
In order to solve the above technical problems, the present invention sets about from the processing of crude zinc oxide materials powder, realize zinc layers in zinc oxide The cladding on granulation powder surface, blank forming utilize xZn+ (1-x) ZnO → ZnO in subsequent sintering process1-xDiffusion it is anti- It answers, realizes the preparation of fine and close oxygen loss zinc oxide ceramics body.
The technical solution of the present invention is to provide a kind of preparation methods of fine and close oxygen loss zinc oxide ceramics body, mainly include zinc layers The preparation of coating zinc oxide granulation powder, zinc layers coating zinc oxide granulation powder prepare ceramic body and are then sintered;Wherein zinc layers Coating zinc oxide granulation powder preparation process is that zinc oxide premix is added in the liquid containing dispersing agent, and slurry is made, will starch Then zinc fume is delivered to granulation zone and realizes zinc oxide granulation powder surface zinc layers cladding by material by air prilling, wherein The formation temperature of zinc fume is 1000~1300 DEG C.
Further, zinc oxide premix is mixed by Zinc oxide powder and doping oxide powder, is mixed in mixture Miscellaneous oxidate powder weight/(oxide powder and zinc weight+doping oxide powder quality)=0~10wt%;Work as doping oxide When powder quality score is 0, zinc oxide premix is only made of Zinc oxide powder.
Further, dispersing agent mass fraction is 0.1~3wt% in the liquid containing dispersing agent, and solvent is deionized water; Slurry is made by ball milling, Ball-milling Time is 8~for 24 hours.
Further, in zinc oxide premix Zinc oxide powder average grain diameter be 200~500nm, purity be 99.95~ 99.99%;Belong to high-purity zinc oxide powder;Doping oxide is one or both of aluminium oxide, gallium oxide, indium oxide, is put down Equal partial size is 100~400nm, and purity is 99.95~99.99%;
Further, dispersing agent is one or both of polyvinylpyrrolidone, polyvinyl alcohol, carboxymethyl cellulose;
Further, 10~100 μm of the average grain diameter of zinc layers coating zinc oxide granulation powder, 0.5~2 μm of zinc coating thickness;
Further, above-mentioned zinc layers coating zinc oxide granulation powder preparation facilities includes: the slurry that bottom has fluid injector Material container, the carrier gas unit with gas nozzle being distributed in around fluid injector, and gas nozzle at least one, carrier gas unit At least one and zinc fume form pond;Angle [alpha] is between the liquid stream that wherein air-flow that gas nozzle sprays and fluid injector spray 20~90 °, so that liquid particle is crushed atomization to desired partial size;
Further, the aperture of fluid injector hole is 0.5~2mm, and the flow that slurry is flowed out from hole is 0.01 ~5L/min;
Further, carrier gas unit institute's gas carrier be one of argon gas or nitrogen, gas pressure be 0.8~ 30MPa, the temperature for heating carrier gas is 80~120 DEG C, and slurry liquid stream is further crushed atomization, while carrier gas by carrier gas stream With certain temperature can moisture in evaporation section liquid particles, be conducive to subsequent zinc fume in zinc oxide granulation powder particle The attachment on surface.
Further, the relative density of ceramic body made of zinc layers coating zinc oxide granulation powder is 60~75%, is burnt Knot process is to be raised to 1000~1250 DEG C of first step set temperature with the heating rate of 0.5~10 DEG C/min, heat preservation 30~ 90min;Then 1300~1450 DEG C of second step set temperature are raised to 10~100 DEG C/min heating rate, and keep the temperature 120~ 480min, is finally down to room temperature with the rate of temperature fall of 0.5~10 DEG C/min, and sintering atmosphere is one of air, nitrogen, argon gas Or two kinds of mixing.
Further, blank forming method be cold isostatic compaction, pressure be 120~300MPa, the dwell time be 60~ 600s。
The post-processing such as can fine and close oxygen loss zinc oxide ceramics body obtained be cut, be polished according to actual needs, be passed through Black is presented in the product colour of post-processing.
The advantages of the present invention: the system of fine and close oxygen loss zinc oxide ceramics body is realized using simple method Standby, device therefor is simple, low in cost, and consistency is higher, and the relative density of product has lower resistance 95% or more Rate can satisfy the sputtering demand of DC and MF by testing its resistivity < 1 Ω cm.
Detailed description of the invention
Fig. 1 is the preparation facilities schematic diagram of zinc coating zinc oxide granulation powder of the present invention.
In figure, 1- slurry container, 2- slurry, 3- carrier gas, 4- gas nozzle, 5- heating coil, 61- zinc oxide pelletizing Body, 62- zinc layers coating zinc oxide granulation powder, 7- zinc fume, 8- zinc fume form pond
Specific embodiment
The invention will be further described With reference to embodiment.
The present invention provides a kind of preparation method of fine and close oxygen loss zinc oxide ceramics body, mainly includes that zinc layers coating zinc oxide is made The preparation of grain powder, zinc layers coating zinc oxide granulation powder prepare ceramic body and are then sintered.Wherein zinc layers coating zinc oxide is made Grain powder preparation process is that zinc oxide premix is added in the liquid containing dispersing agent, and slurry 2 is made, slurry 2 is passed through injection It is granulated, zinc fume 7 is then delivered to granulation zone and realizes zinc oxide granulation powder surface zinc layers cladding, wherein zinc fume 7 Formation temperature is 1000~1300 DEG C;Preparation facilities such as Fig. 1 institute of zinc layers coating zinc oxide granulation powder of the present invention Show, comprising: bottom has the slurry container 1 of fluid injector, at least one being distributed in around fluid injector with gas nozzle 4 Carrier gas unit, form pond 8 shown in Fig. 1 for two gas nozzles 4 and zinc fume;The wherein air-flow that gas nozzle 4 sprays Angle [alpha] is 20~90 ° between the liquid stream sprayed with fluid injector, so that the liquid particle of slurry 2 is crushed atomization to desired grain Diameter;Carrier gas 3 and zinc fume 7 are thermally formed by heating coil 5.
As a further improvement, the aperture of fluid injector hole is 0.5~2mm, the flow that slurry 2 is flowed out from hole is 0.01~5L/min;
As a further improvement, the carrier gas 3 of carrier gas unit be one of argon gas or nitrogen, gas pressure be 0.8~ 30MPa, the temperature of heating carrier gas 3 are 80~120 DEG C, and slurry liquid stream is further crushed atomization, while carrier gas 3 by carrier gas 3 With certain temperature can moisture in evaporation section liquid particles, be conducive to subsequent zinc fume 7 in zinc oxide granulation powder The attachment on grain surface.
Embodiment 1
The present invention provides a kind of preparation method of fine and close oxygen loss zinc oxide ceramics body, and step includes:
Step 1: the preparation of zinc layers coating zinc oxide granulation powder
1. weighing a certain amount of high-purity zinc oxide powder to mix with doping oxide powder, doping oxide in mixture Powder quality/(oxide powder and zinc weight+doping oxide powder quality)=5wt%;Wherein high-purity zinc oxide powder is averaged Partial size is 200nm, and purity is 99.95~99.99%, and doping oxide powder is aluminium oxide, average grain diameter 100nm, purity It is 99.95~99.99%;
2. pouring into the deionized water containing 1wt% dispersing agent after powder mixing, slurry 2 is formed by the ball milling of 8h;Its Middle dispersing agent is polyvinylpyrrolidone;
3. slurry 2 is placed in prilling granulator shown in FIG. 1, carrier gas 3 passes through while slurry 2 is sprayed by fluid injector Gas nozzle 4 sprays, and gas disperses liquid particle, and since gas carries certain temperature therefore can be by liquid grain Zinc fume 7 is then formed pond 8 from zinc fume to complete to be granulated to get to zinc oxide granulation powder 61 by the moisture evaporation of son Powder granulation zone is delivered in (temperature is maintained at 1000~1300 DEG C, convenient for the constant formation of zinc fume 7) to realize in oxygen Change 61 surface zinc layers of zinc pelletizing cladding, forms zinc layers coating zinc oxide granulation powder 62;Obtained zinc layers coating zinc oxide is made 10~100 μm of average grain diameter, 0.5~2 μm of zinc coating thickness of grain powder 62;
Step 2: body preparation and its sintering
1. the zinc layers coating zinc oxide granulation powder 62 that step 1 is obtained is placed in mold cold etc. through 120~300MPa Hydrostatic profile, dwell time are 60~600s, form the ceramic body that relative density is 60~75%;
2. ceramic body is placed in atmosphere (the present embodiment sintering atmosphere uses air) sintering furnace, electric furnace is opened from room temperature Begin to be raised to 1000~1250 DEG C of first step set temperature with the heating rate of 0.5~10 DEG C/min, keeps the temperature 30~90min.Then 1300~1450 DEG C of second step set temperature are raised to the warm rate of 10~100 DEG C/min heating, and keeps the temperature 120~480min, most Afterwards, room temperature is down to the rate of temperature fall of 0.5~10 DEG C/min;
3. by sample cutting, being polished into predetermined size, as fine and close oxygen loss zinc oxide ceramics body;After polishing, pottery Aterrimus is presented in porcelain body color.
Embodiment 2
The present invention provides a kind of preparation method of fine and close oxygen loss zinc oxide ceramics body, and step includes:
Step 1: the preparation of zinc layers coating zinc oxide granulation powder
1. weighing a certain amount of high-purity zinc oxide powder to mix with doping oxide powder, doping oxide in mixture Powder quality/(oxide powder and zinc weight+doping oxide powder quality)=10wt%;Wherein high-purity zinc oxide powder is averaged Partial size is 500nm, and purity is 99.95~99.99%, and doping oxide powder is aluminium oxide and gallium oxide, and average grain diameter is 400nm, purity are 99.95~99.99%;
2. pouring into the deionized water containing 2wt% dispersing agent after powder mixing, slurry 2 is formed by the ball milling of 16h;Its Middle dispersing agent is polyvinyl alcohol;
3. slurry 2 is placed in prilling granulator shown in FIG. 1, carrier gas 3 passes through while slurry 2 is sprayed by fluid injector Gas nozzle 4 sprays, and gas disperses liquid particle, and since gas carries certain temperature therefore can be by liquid grain Zinc fume 7 is then formed pond 8 from zinc fume to complete to be granulated to get to zinc oxide granulation powder 61 by the moisture evaporation of son Powder granulation zone is delivered in (temperature is maintained at 1000~1300 DEG C, convenient for the constant formation of zinc fume 7) to realize in oxygen Change 61 surface zinc layers of zinc pelletizing cladding, forms zinc layers coating zinc oxide granulation powder 62;Obtained zinc layers coating zinc oxide is made 10~100 μm of average grain diameter, 0.5~2 μm of zinc coating thickness of grain powder 62;
Step 2: body preparation and its sintering
1. the zinc layers coating zinc oxide granulation powder 62 that step 1 is obtained is placed in mold cold etc. through 120~300MPa Hydrostatic profile, dwell time are 60~600s, form the ceramic body that relative density is 60~75%;
2. ceramic body is placed in atmosphere (the present embodiment sintering atmosphere uses air) sintering furnace, electric furnace is opened from room temperature Begin to be raised to 1000~1250 DEG C of first step set temperature with the heating rate of 0.5~10 DEG C/min, keeps the temperature 30~90min.Then 1300~1450 DEG C of second step set temperature are raised to the warm rate of 10~100 DEG C/min heating, and keeps the temperature 120~480min, most Afterwards, room temperature is down to the rate of temperature fall of 0.5~10 DEG C/min;
3. by sample cutting, being polished into predetermined size, as fine and close oxygen loss zinc oxide ceramics body;After polishing, pottery Aterrimus is presented in porcelain body color.
Embodiment 3
The present invention provides a kind of preparation method of fine and close oxygen loss zinc oxide ceramics body, and step includes:
Step 1: the preparation of zinc layers coating zinc oxide granulation powder
1. weighing a certain amount of high-purity zinc oxide powder, the average grain diameter of high-purity zinc oxide powder is 300nm, and purity is 99.95~99.99%, doping oxide powder be aluminium oxide and indium oxide, average grain diameter 200nm, purity be 99.95~ 99.99%;
2. pouring into the deionized water containing 0.5wt% dispersing agent after powder mixing, slurry 2 is formed by ball milling for 24 hours; Wherein dispersing agent is carboxymethyl cellulose;
3. slurry 2 is placed in prilling granulator shown in FIG. 1, carrier gas 3 passes through while slurry 2 is sprayed by fluid injector Gas nozzle 4 sprays, and gas disperses liquid particle, and since gas carries certain temperature therefore can be by liquid grain Zinc fume 7 is then formed pond 8 from zinc fume to complete to be granulated to get to zinc oxide granulation powder 61 by the moisture evaporation of son Powder granulation zone is delivered in (temperature is maintained at 1000~1300 DEG C, convenient for the constant formation of zinc fume 7) to realize in oxygen Change 61 surface zinc layers of zinc pelletizing cladding, forms zinc layers coating zinc oxide granulation powder 62;Obtained zinc layers coating zinc oxide is made 10~100 μm of average grain diameter, 0.5~2 μm of zinc coating thickness of grain powder 62;
Step 2: body preparation and its sintering
1. the zinc layers coating zinc oxide granulation powder 62 that step 1 is obtained is placed in mold cold etc. through 120~300MPa Hydrostatic profile, dwell time are 60~600s, form the ceramic body that relative density is 60~75%;
2. ceramic body is placed in atmosphere (the present embodiment sintering atmosphere uses air) sintering furnace, electric furnace is opened from room temperature Begin to be raised to 1000~1250 DEG C of first step set temperature with the heating rate of 0.5~10 DEG C/min, keeps the temperature 30~90min.Then 1300~1450 DEG C of second step set temperature are raised to the warm rate of 10~100 DEG C/min heating, and keeps the temperature 120~480min, most Afterwards, room temperature is down to the rate of temperature fall of 0.5~10 DEG C/min;
3. by sample cutting, being polished into predetermined size, as fine and close oxygen loss zinc oxide ceramics body;After polishing, pottery Aterrimus is presented in porcelain body color.
Density is measured using Archimedes method and target is calculated according to the percentage between actual density and theoretical density The relative density of relative density, target is greater than 95%, such as the ceramic target of embodiment 1, the ceramic body is close after measured Degree is 5.553g/cm3, theoretical density 5.58g/cm3, therefore relative density is 99.5%, other embodiments relative density knot Fruit like and be all larger than 95%.The fine and close zinc oxide ceramics body certain for doping content, change in resistance derive from oxygen The formation in vacancy, therefore can use the resistivity of material to characterize the quantity of Lacking oxygen, by testing ceramic target of the invention Material resistivity < 1 Ω cm, and then meet the sputtering demand of DC and MF.
The present embodiments relate to the material arrived, reagent and experimental facilities, are to meet photoelectric material unless otherwise instructed The commercial product in field.
The above is merely a preferred embodiment of the present invention, it is noted that for those skilled in the art For, under the premise of not departing from core of the invention technology, improvements and modifications can also be made, these improvements and modifications are also answered Belong to scope of patent protection of the invention.With any change in the comparable meaning and scope of claims of the present invention, all It is considered as being included within the scope of the claims.

Claims (11)

1. the preparation method of fine and close oxygen loss zinc oxide ceramics body, which is characterized in that mainly include zinc layers coating zinc oxide pelletizing The preparation of body, zinc layers coating zinc oxide granulation powder prepare ceramic body and are then sintered;Wherein zinc layers coating zinc oxide pelletizing Production procedure is that zinc oxide premix is added in the liquid containing dispersing agent, and slurry is made, and slurry is passed through air prilling, Then zinc fume is delivered to granulation zone and realizes zinc oxide granulation powder surface zinc layers cladding, wherein the formation temperature of zinc fume It is 1000~1300 DEG C.
2. the preparation method of densification oxygen loss zinc oxide ceramics body as described in claim 1, which is characterized in that the zinc oxide is pre- Mixing is mixed by Zinc oxide powder and doping oxide powder, doping oxide powder quality/(oxide powder and zinc in mixture Weight+doping oxide powder quality)=0~10wt%.
3. the preparation method of densification oxygen loss zinc oxide ceramics body as described in claim 1, which is characterized in that described to contain dispersion Dispersing agent mass fraction is 0.1~3wt% in the liquid of agent, and solvent is deionized water;Slurry, Ball-milling Time is made by ball milling For 8~for 24 hours.
4. the preparation method of densification oxygen loss zinc oxide ceramics body as claimed in claim 2, which is characterized in that the zinc oxide is pre- The average grain diameter of Zinc oxide powder is 200~500nm in mixing, and purity is 99.95~99.99%;Doping oxide is oxidation One or both of aluminium, gallium oxide, indium oxide, average grain diameter are 100~400nm, and purity is 99.95~99.99%.
5. the preparation method of densification oxygen loss zinc oxide ceramics body as described in claim 1, which is characterized in that the dispersing agent is One or both of polyvinylpyrrolidone, polyvinyl alcohol, carboxymethyl cellulose.
6. the preparation method of densification oxygen loss zinc oxide ceramics body as described in claim 1, which is characterized in that the zinc layers cladding The average grain diameter of zinc oxide granulation powder is 10~100 μm, 0.5~2 μm of zinc coating thickness.
7. the preparation method of densification oxygen loss zinc oxide ceramics body as described in claim 1, which is characterized in that the zinc layers cladding Zinc oxide granulation powder preparation facilities includes: that bottom has the slurry container of fluid injector, is distributed in around the fluid injector The carrier gas unit with gas nozzle, and the gas nozzle at least one, carrier gas unit at least one and zinc fume shape Cheng Chi;Angle [alpha] is 20~90 ° between the liquid stream that wherein air-flow that the gas nozzle sprays and fluid injector spray.
8. the preparation method of densification oxygen loss zinc oxide ceramics body as claimed in claim 7, which is characterized in that the fluid injector The aperture of hole is 0.5~2mm, and the flow that the slurry is flowed out from hole is 0.01~5L/min.
9. the preparation method of densification oxygen loss zinc oxide ceramics body as claimed in claim 7, which is characterized in that the carrier gas unit Institute's gas carrier is one of argon gas or nitrogen, and gas pressure is 0.8~30MPa, and the temperature for heating carrier gas is 80~120 ℃。
10. the preparation method of densification oxygen loss zinc oxide ceramics body as described in claim 1, which is characterized in that the ceramic blank The relative density of body is 60~75%, and sintering process is to be raised to first step set temperature with the heating rate of 0.5~10 DEG C/min 1000~1250 DEG C, keep the temperature 30~90min;Then second step set temperature 1300 is raised to 10~100 DEG C/min heating rate ~1450 DEG C, and 120~480min is kept the temperature, room temperature is finally down to the rate of temperature fall of 0.5~10 DEG C/min, sintering atmosphere is sky One of gas, nitrogen, argon gas or two kinds of mixing.
11. the preparation method of densification oxygen loss zinc oxide ceramics body as described in claim 1, which is characterized in that the ceramic blank Body formed method is cold isostatic compaction, and pressure is 120~300MPa, and the dwell time is 60~600s.
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