CN109877656B - Electrochemical thickening burnishing device - Google Patents

Electrochemical thickening burnishing device Download PDF

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CN109877656B
CN109877656B CN201910221004.5A CN201910221004A CN109877656B CN 109877656 B CN109877656 B CN 109877656B CN 201910221004 A CN201910221004 A CN 201910221004A CN 109877656 B CN109877656 B CN 109877656B
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polishing
thickening
electrochemical
generator
liquid
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CN109877656A (en
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李敏
宋方增
董婷
杨晓莹
刘明辉
黄振荣
唐成
王平
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Hunan University of Science and Technology
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Hunan University of Science and Technology
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Abstract

The electrochemical thickening polishing device comprises a workpiece clamp, a polishing disc, a polishing pad, a polishing liquid pool and a main shaft, wherein the polishing disc is arranged on the main shaft, the polishing pad is arranged on the polishing disc, and the polishing liquid pool is arranged under the polishing disc; the workpiece clamp is arranged above the polishing disc, and the workpiece is clamped on the workpiece clamp; the polishing device also comprises an electrochemical thickening generator, wherein the electrochemical thickening generator is arranged in the workpiece clamp, and a reaction electrode of the electrochemical thickening generator is arranged in the reaction tank; the polishing solution comprises electrochemically thickening particles which can be dissolved in water and generate a thickening phase under the action of an electrochemical thickening generator; when in rough polishing, the electrochemically thickening polishing solution is not started, and the viscosity is small; during fine polishing, the electrochemical thickening generator is started, and the polishing solution is electrochemical thickening polishing solution with high viscosity. The rough polishing reduces the total polishing time, and the finish polishing (electrochemical thickening polishing) can obtain the workpiece with high surface quality and no/low surface damage.

Description

Electrochemical thickening burnishing device
Technical Field
The utility model belongs to the technical field of ultra-precise machining, and particularly relates to an electrochemical thickening and polishing device.
Background
Ultra-precision machining technology is an important component of modern science and technology and is widely applied in a plurality of fields. For example, the processing aspect of hard and brittle materials difficult to process such as sapphire, monocrystalline silicon and functional ceramics; high precision, low damage, beautiful appearance and other aspects of various complex curved surfaces. By using ultra-precision machining techniques, a workpiece surface with low surface roughness, low/no surface damage or subsurface damage may be obtained.
Polishing is a kind of ultra-precise machining, and refers to an ultra-precise machining process capable of enabling a workpiece to reduce the surface roughness of the workpiece and improve the surface finish of the workpiece under the action of machinery, chemistry or electrochemistry. Electrochemistry is the science of studying the charged interface phenomena formed by two types of conductors and the changes that occur thereon.
Thickening is the operation of separating solid particles suspended in a liquid from the liquid by making them thick as a slurry, also known as precipitation or sedimentation. Factors affecting thickening fall broadly into two categories: chemical factors (chemical composition of the resin, chemical nature of the thickener, additives, impurities, etc.) and physical factors (degree of shear achieved in the mixing of the materials, temperature, time, surface area of the filler and thickener, etc.). Electrochemical thickening refers to that a substance in a solution generates a new substance with a thickening effect through electrochemical reaction, and thick slurry is formed by separating the obtained new substance from the solution, namely thickening (precipitation concentration or sedimentation concentration), so that the electrochemical thickening is realized.
Chinese utility model patent (CN 201810122104.8), patent name: an efficient ultra-precise shear thickening-chemical cooperative polishing device. The patent implementation equipment comprises a polishing tool, a polishing tool clamp, a polishing fixed disc, a dust cover and a polishing liquid circulating device. The utility model utilizes the cooperation of active restriction of the liquid flow boundary and active control of the flow of the polishing liquid, shear thickening and green chemical action to improve the processing efficiency and precision and expand the processable materials and the surface shapes. The polishing agent has the advantages that the processable material is wide, the processed surface is various, the polishing liquid is environment-friendly, the shearing thickening effect is utilized, the polishing is flexible, the material removal certainty is improved, and the surface deterioration layer is less; the disadvantage is that the polishing liquid has never changed during the polishing process, and the re-chemical substances are always present to participate in the reaction, so that a slight chemical corrosion phenomenon occurs in a part of the finally obtained workpiece, and the surface quality of the workpiece is reduced.
Granted chinese utility model patent (CN 201210192915.8), patent name: an ultra-precise curved surface polishing method based on non-Newtonian fluid shear thickening effect. According to the method, abrasive materials are added into non-Newtonian fluid with a shear thickening effect to prepare polishing liquid, in the polishing process, the polishing liquid has a certain relative speed with the surface of a workpiece, and the polishing liquid in a polishing area generates the shear thickening effect due to the shearing action to form a shear thickening flexible grinding tool, so that ultra-precise polishing of a curved surface is realized. However, the polishing efficiency still has room for improvement because the polishing method only relies on a single shear thickening effect to generate micro-cutting formation material removal on the workpiece.
Granted chinese utility model patent (CN 201410436897.2), patent name: an ultra-precise processing device with non-Newtonian fluid shear thickening and electrolysis combined effect. After the power supply is electrified, electrochemical reaction is generated between the anode workpiece and the cathode polishing tool, metal on the surface of the workpiece is electrolyzed and dissolved, and then an oxide film which prevents the electrochemical reaction is formed on the surface of the workpiece. The oxide film on the convex part of the surface of the workpiece is firstly ground off to expose fresh metal, and the electrochemical reaction can be continued on the convex part. The oxide film at the concave part is not removed, chemical reaction is blocked, and the metal is protected. Meanwhile, due to the peak effect of current, the electric field intensity at the bulge is high, the corrosion capability to metal is high, and the abrasive particles have a stronger removing effect on the bulge on the surface of the workpiece under the action of shear thickening, so that the bulge on the surface of the workpiece is rapidly removed and the surface roughness is also rapidly reduced. The patent has the defects that the adaptability to the surface shape of a workable workpiece is poor, the problem of certainty of material removal cannot be solved, the certainty polishing and high surface shape precision of the workpiece material are difficult to realize, the range of the workable material (with conductive performance) is limited, the electrolyte belongs to non-environment-friendly substances, the influence on the environment is large, and the environment-friendly treatment cost is high.
Disclosure of Invention
In order to overcome the defect of lower polishing efficiency of the existing polishing device, the utility model provides an electrochemical thickening polishing device, wherein the rough polishing reduces the total polishing time, and the fine polishing (electrochemical thickening polishing) can obtain a workpiece with high surface quality and no/low surface damage.
The technical scheme adopted for solving the technical problems is as follows:
the electrochemical thickening polishing device comprises a workpiece clamp, a polishing disc, a polishing pad, a polishing liquid pool and a main shaft, wherein the polishing disc is arranged on the main shaft, the polishing pad is arranged on the polishing disc, and the polishing liquid pool is arranged under the polishing disc; the workpiece clamp is arranged above the polishing disc, and the workpiece is clamped on the workpiece clamp; the polishing device also comprises an electrochemical thickening generator, wherein the electrochemical thickening generator is arranged in the workpiece clamp, and a reaction electrode of the electrochemical thickening generator is arranged in the reaction tank; the polishing solution comprises electrochemically thickening particles which can be dissolved in water and generate a thickening phase under the action of an electrochemical thickening generator; when in rough polishing, the electrochemically thickening polishing solution is not started, and the viscosity is small; during fine polishing, the electrochemical thickening generator is started, and the polishing solution is electrochemical thickening polishing solution with high viscosity.
Further, the upper portion of work piece holder is the polishing solution entry, be equipped with the reaction tank in the work piece holder, electrochemical thickening generator have many reaction electrodes, all have negative pole and positive pole in every reaction electrode, the lower part export of reaction tank is equipped with miniature water pump.
Preferably, the electrochemical thickening generator comprises an internal independent power source and an external remote control, and the remote control can start/stop the electrochemical thickening generator by wireless.
Preferably, the thickening phase is green resin substance, has thickening effect and does not pollute the environment.
The polishing device further comprises a polishing liquid box and a liquid supply pump, wherein the polishing liquid box, the liquid supply pump, the infusion tube, the workpiece clamp and the polishing liquid pool form a polishing liquid circulation system, the polishing liquid box is arranged at the lower left part of the polishing liquid pool, the infusion tube is connected with the polishing liquid pool and the polishing liquid box, the liquid supply pump is arranged in the polishing liquid box, and the liquid supply pump is connected with the infusion tube.
The polishing solution box is divided into two layers, wherein one layer is used for storing the electrochemically thickened polishing solution, and the other layer is used for storing the electrochemically thickened polishing solution subjected to electrochemical reaction, so that the polishing mode (normal polishing/electrochemical thickened polishing) can be switched.
The polishing solution comprises the following components in parts by weight: 15wt.% to 25wt.% of polishing abrasive particles, 25wt.% to 35wt.% of electrochemically thickened particles, 40wt.% to 50wt.% of water. The electrochemically thickened polishing solution is an original polishing solution which does not undergo electrochemical reaction, has low viscosity and good flow property, and the electrochemically thickened particles exist in the polishing solution in an ionic form.
The technical conception of the utility model: when the surface of the workpiece is polished rapidly, a normal polishing mode, namely a rough polishing stage, can be selected, and the polishing solution in the mode is electrochemically thickened, so that the workpiece is polished rapidly under the action of high shear rate and instantaneous load; when the surface of the workpiece is subjected to mechanical fine polishing, an electrochemical thickening polishing mode, namely a fine polishing stage, can be selected, wherein the polishing solution in the mode is electrochemical thickening polishing solution, and the workpiece is subjected to the actions of small shear rate, instantaneous load and electrochemical thickening polishing solution (electrochemical reaction occurs).
The electrochemical thickening polishing solution is a polishing solution with high viscosity caused by electrochemistry. The electrochemical thickening polishing solution is capable of electrochemically thickening (in a non-thickening state) and is subjected to electrochemical reaction through an electrochemical thickening generator in the workpiece clamp, so that particles with thickening characteristics can be produced by the electrochemical thickening particles, and the particles are combined with an abrasive to form an abrasive thickening group, so that the viscosity of the polishing solution is increased, and a large number of aggregated abrasive thickening groups are like a flexible grinding tool. The generated electrochemical thickening polishing solution is input to the surface of the workpiece, so that the electrochemical thickening polishing of the workpiece is realized.
Compared with the prior art, the utility model has the beneficial effects that:
(1) During rough polishing, a workpiece with better surface quality is quickly obtained under the action of high shear rate, instantaneous load and electrochemical thickening polishing solution (electrochemical reaction does not occur), and the polishing efficiency is improved.
(2) During finish polishing, the workpiece is subjected to flexible polishing on the surface of the workpiece under the action of small shear rate, instantaneous load and electrochemical thickening polishing solution (electrochemical reaction occurs), so that high surface quality, no/low surface damage or subsurface damage is obtained.
(3) The viscosity of the electrochemical thickening polishing solution can be changed by the power of the electrochemical thickening generator, and the surface quality of the finally obtained workpiece is different under different viscosities by changing the concentration of the thickening phase in the polishing solution. By the method, workpieces with different surface qualities can be controllably obtained.
(4) The electrochemical polishing can be selected from normal polishing or electrochemical thickening polishing as required.
Drawings
Fig. 1 is an electrochemical thickening polishing schematic diagram, wherein a workpiece clamp 1, a workpiece 2, an electrochemical thickening generator 3, a reaction cavity 4, a micro water pump 5, polishing liquid 6, a polishing pad 7, a polishing liquid pool 8, a main shaft 9, a polishing liquid box 10, a liquid supply pump 11, a liquid delivery pipe 12, a polishing disk 13 and a clamp internal structure diagram 14.
Fig. 2 is an electrochemical microscopic view of a polishing liquid, wherein a is a polishing liquid when no electrochemical reaction is performed, and B is a polishing liquid when an electrochemical reaction is performed, abrasive 15, electrochemically thickening particles 16, electrochemically thickening particles 17, and abrasive thickening groups 18.
Detailed Description
The utility model is further described below with reference to the accompanying drawings.
Referring to fig. 1 and 2, an electrochemical thickening polishing apparatus comprises a workpiece holder 1, a polishing disk 13, a polishing pad 7, a polishing liquid pool 8, a main shaft 9, a polishing liquid tank 10, an electrochemical thickening generator 3, a remote controller, a reaction tank 4, a liquid supply pump 11 and a micro water pump 5, wherein the polishing disk 13 is arranged on the main shaft 9, the polishing pad 7 is arranged on the polishing disk 13, and the polishing liquid pool 8 is arranged under the polishing disk 13; the workpiece clamp 1 is arranged above the polishing disc 13, and the workpiece 2 is clamped on the workpiece clamp 1; the polishing solution tank 10, the water pump 11, the infusion tube 12, the workpiece clamp 1 and the polishing solution tank 8 form a polishing solution circulation system, the polishing solution tank 10 is arranged at the lower left part of the polishing solution tank 8, the infusion tube 12 is connected with the polishing solution tank 8 and the polishing solution tank 10, the liquid supply pump 11 is arranged in the polishing solution tank 10, and the liquid supply pump 11 is connected with the infusion tube 12; the electrochemical thickening generator 3 is arranged in the workpiece clamp 1, and the reaction electrode is arranged in the reaction tank.
The polishing solution 6 comprises electrochemically thickening particles which are soluble in water and generate a thickening phase under the action of an electrochemical thickening generator; when in rough polishing, the electrochemically thickening polishing solution is not started, and the viscosity is small; during fine polishing, the electrochemical thickening generator is started, and the polishing solution is electrochemical thickening polishing solution with high viscosity.
Further, the upper part of the workpiece clamp 1 is provided with a polishing solution inlet, the workpiece clamp 1 is internally provided with a reaction tank 4, the electrochemical thickening generator is provided with a plurality of reaction electrodes, each reaction electrode is internally provided with a cathode and an anode, the outlet of the lower part of the reaction tank 4 is provided with a micro water pump 5, and the micro water pump 5 is started or closed along with the starting of the electrochemical thickening generator.
Preferably, the electrochemical thickening generator 3 comprises an internal independent power source and an external remote control, which is capable of switching the electrochemical thickening generator on/off wirelessly.
Preferably, the thickening phase is green resin substance, has thickening effect and does not pollute the environment.
The polishing solution tank 10 is divided into two layers, one layer is used for storing the electrochemically thickened polishing solution, and the other layer is used for storing the electrochemically thickened polishing solution subjected to the electrochemical reaction, so that the polishing mode (normal polishing/electrochemical thickening polishing) can be switched.
The polishing solution comprises the following components in parts by weight: 15wt.% to 25wt.% of polishing abrasive particles, 25wt.% to 35wt.% of electrochemically thickened particles, 40wt.% to 50wt.% of water. The electrochemically thickened polishing solution is an original polishing solution which does not undergo electrochemical reaction, has low viscosity and good flow property, and the electrochemically thickened particles exist in the polishing solution in an ionic form.
In this embodiment, the polishing solution may include the following components:
15wt.% of polishing mill, 35wt.% of electrochemically thickened particles, 50wt.% of water;
or is: 20wt.% of polishing abrasive particles, 32wt.% of electrochemically thickening particles, 48wt.% of water;
or still further: polishing mill 25wt.%, electrochemically thickened particles 25wt.%, water 50wt.%;
or alternatively: 25wt.% of polishing abrasive particles, 35wt.% of electrochemically thickening particles, and 40wt.% of water.
As shown in FIG. 2, the polishing method is used for polishing planar workpieces (such as high-speed rail bearings, bearing steel, hard alloy, metal ceramic, optical glass, hard and brittle materials difficult to process and the like), and the polishing process comprises the following steps:
1) Selecting a workpiece clamp 1;
2) Clamping a workpiece 2 on a workpiece clamp 1;
3) Providing a polishing liquid 5 having an electrochemical thickening property (non-thickening state), and placing the polishing liquid 6 in a polishing liquid tank 10, as shown in fig. 2-a, which is a microscopic view of the polishing liquid 5 having an electrochemical thickening property;
4) Starting a main shaft 9 and a liquid supply pump 11 to form a polishing liquid circulation system, and inputting the polishing liquid 6 onto a polishing disk 13 through a clamp, so that the polishing liquid 6 moves relatively on the polishing disk 13;
5) Polishing (rough polishing) the workpiece 2 under a polishing liquid 6 (electrochemically thickened) for a period of time;
6) Starting an electrochemical thickening generator 3 in the workpiece clamp 1, and changing the polishing solution 6 input into the reaction tank 4 to form an electrochemical thickening polishing solution 6, wherein 2-b is a microscopic image of the electrochemical thickening polishing solution 6; at the same time, the thickening polishing liquid 6 is input to the polishing disk 13 through the miniature water pump 5, so that electrochemical thickening polishing (fine polishing) of the workpiece is realized.

Claims (3)

1. The electrochemical thickening polishing device comprises a workpiece clamp, a polishing disc, a polishing pad, a polishing liquid pool and a main shaft, wherein the polishing disc is arranged on the main shaft, the polishing pad is arranged on the polishing disc, and the polishing liquid pool is arranged under the polishing disc; the workpiece clamp is arranged above the polishing disc, and the workpiece is clamped on the workpiece clamp; the method is characterized in that: the polishing device also comprises an electrochemical thickening generator, wherein the electrochemical thickening generator is arranged in the workpiece clamp, and a reaction electrode of the electrochemical thickening generator is arranged in the reaction tank; the polishing solution comprises electrochemically thickening particles which can be dissolved in water and generate a thickening phase under the action of an electrochemical thickening generator; when in rough polishing, the electrochemically thickening polishing solution is not started, and the viscosity is small; during fine polishing, an electrochemical thickening generator is started, and the polishing solution is electrochemical thickening polishing solution with high viscosity;
the upper part of the workpiece clamp is provided with a polishing solution inlet, the workpiece clamp is internally provided with a reaction tank, the electrochemical thickening generator is provided with a plurality of reaction electrodes, each reaction electrode is internally provided with a cathode and an anode, and the outlet of the lower part of the reaction tank is provided with a miniature water pump;
the electrochemical thickening generator comprises an internal independent power supply and an external remote controller, and the remote controller can start/stop the electrochemical thickening generator by wireless;
the polishing device further comprises a polishing liquid box and a liquid supply pump, wherein the polishing liquid box, the liquid supply pump, the liquid conveying pipe, the workpiece clamp and the polishing liquid pool form a polishing liquid circulation system, the polishing liquid box is arranged at the lower left part of the polishing liquid pool, the liquid conveying pipe is connected with the polishing liquid pool and the polishing liquid box, the liquid supply pump is arranged in the polishing liquid box, and the liquid supply pump is connected with the liquid conveying pipe;
the polishing solution box is divided into two layers, one layer is used for storing the electrochemically thickened polishing solution, and the other layer is used for storing the electrochemically thickened polishing solution subjected to electrochemical reaction.
2. An electrochemical thickening and polishing apparatus according to claim 1, wherein: the thickening phase is green resin substance.
3. An electrochemical thickening and polishing apparatus according to claim 1, wherein: the polishing solution comprises the following components in parts by weight: 15wt.% to 25wt.% of polishing abrasive particles, 25wt.% to 35wt.% of electrochemically thickened particles, 40wt.% to 50wt.% of water.
CN201910221004.5A 2019-03-22 2019-03-22 Electrochemical thickening burnishing device Active CN109877656B (en)

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CN110757257B (en) * 2019-11-08 2024-05-07 浙江工业大学 Three-electrode system controllable electrochemical auxiliary force rheological ultra-precise polishing device

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000290638A (en) * 1999-04-13 2000-10-17 Hitachi Ltd Method for polishing
JP2012251099A (en) * 2011-06-06 2012-12-20 Ishihara Chem Co Ltd Buffing method, buffing composition, and aqueous emulsified buffing composition for repairing coated automobile surface
CN104191340A (en) * 2014-08-29 2014-12-10 浙江工业大学 Ultra-precision machining device based on non-Newtonian fluid shear thickening and electrolysis composition effect
EP3192844A1 (en) * 2016-01-12 2017-07-19 Eoswiss Engineering Sarl Method and device for chemical mechanical polishing
CN108098536A (en) * 2018-01-31 2018-06-01 湖南科技大学 A kind of efficient ultraprecise shear thickening-chemical cooperated burnishing device
CN108747777A (en) * 2018-06-12 2018-11-06 山东大学 A kind of internal-circulation type non-newtonian fluid polishing system and method

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000290638A (en) * 1999-04-13 2000-10-17 Hitachi Ltd Method for polishing
JP2012251099A (en) * 2011-06-06 2012-12-20 Ishihara Chem Co Ltd Buffing method, buffing composition, and aqueous emulsified buffing composition for repairing coated automobile surface
CN104191340A (en) * 2014-08-29 2014-12-10 浙江工业大学 Ultra-precision machining device based on non-Newtonian fluid shear thickening and electrolysis composition effect
EP3192844A1 (en) * 2016-01-12 2017-07-19 Eoswiss Engineering Sarl Method and device for chemical mechanical polishing
CN108098536A (en) * 2018-01-31 2018-06-01 湖南科技大学 A kind of efficient ultraprecise shear thickening-chemical cooperated burnishing device
CN108747777A (en) * 2018-06-12 2018-11-06 山东大学 A kind of internal-circulation type non-newtonian fluid polishing system and method

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