CN109874242B - Cable protection device and photoetching equipment - Google Patents
Cable protection device and photoetching equipment Download PDFInfo
- Publication number
- CN109874242B CN109874242B CN201711249449.1A CN201711249449A CN109874242B CN 109874242 B CN109874242 B CN 109874242B CN 201711249449 A CN201711249449 A CN 201711249449A CN 109874242 B CN109874242 B CN 109874242B
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- Prior art keywords
- cable
- barrier
- baffle
- rotating shaft
- bolt
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02G—INSTALLATION OF ELECTRIC CABLES OR LINES, OR OF COMBINED OPTICAL AND ELECTRIC CABLES OR LINES
- H02G11/00—Arrangements of electric cables or lines between relatively-movable parts
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- Patch Boards (AREA)
- Laying Of Electric Cables Or Lines Outside (AREA)
Abstract
The invention discloses a cable protection device and photoetching equipment, wherein the cable protection device comprises a baffle plate structure, the baffle plate structure is positioned between a cable and an obstacle and used for isolating the cable from the obstacle, the baffle plate structure is rotatably connected with a pneumatic control box, and when the pneumatic control box is pushed and pulled, the baffle plate structure relatively slides by taking the obstacle as a base point. A corresponding lithographic apparatus comprises the cable protection device. The invention can effectively avoid serious friction between the cable and the barrier, prevent the air control box from being clamped and protect the cable.
Description
Technical Field
The invention belongs to the technical field of electrical protection equipment, and particularly relates to a cable protection device and photoetching equipment.
Background
When large-scale mechatronics equipment needs maintenance debugging, often need to control high-speed motion platform's electric control box whole from the normal position and take out, because a lot of cables are connected in the gas accuse case this moment, the cable is in the in-process of taking out along the gas accuse case unavoidably meeting the blockking of barrier, because the cable is thick more, can lead to the serious friction and the string between cable and the barrier to lead to the phenomenon that can't take out the gas accuse case, serious still can lead to the cable impaired.
Disclosure of Invention
Aiming at the defects in the prior art, the invention provides a cable protection device, aims to solve the technical problems of serious friction and hanging between a cable and an obstacle when a pneumatic control box is drawn out, and correspondingly provides corresponding photoetching equipment.
In order to achieve the purpose, the technical scheme adopted by the invention is as follows:
one end of the cable is connected with the pneumatic control box, and the other end of the cable is connected with the controlled device; the cable protection device comprises a baffle structure, wherein the baffle structure is positioned between a cable and an obstacle and separates the cable from the obstacle, the baffle structure is rotatably connected with the pneumatic control box, and when the pneumatic control box is pushed and pulled, the baffle structure relatively slides by taking the obstacle as a base point.
Further, baffle structure rotates through first hinge structure and connects on pneumatic control box, first hinge structure include first casing and run through the first pivot of first casing, baffle structure fixes through the first connecting plate with first pivot vertically the both ends of first pivot, first casing is fixed on pneumatic control box, first pivot can be at first casing internal rotation, makes baffle structure can use first pivot is the rotation of axes.
Further, baffle structure includes scalable baffle and cable baffle, the one end of scalable baffle is rotated and is installed on the pneumatic control case, the other end and the cable baffle of scalable baffle are connected, and the one end that cable baffle and scalable baffle are connected is rotated and is installed on the supporting body of obstacle or obstacle, and the other end is the free end.
Furthermore, the telescopic baffle comprises N sub-baffles, N is not less than 2, and the adjacent sub-baffles are connected in a sliding manner to adjust the length of the telescopic baffle.
Furthermore, the telescopic baffle comprises a first sub-baffle, a second sub-baffle and a multi-section sliding rail, wherein the outermost side structure and the innermost side structure of the multi-section sliding rail are respectively fixed on the first sub-baffle and the second sub-baffle or are oppositely arranged, so that the first sub-baffle and the second sub-baffle can slide relatively.
Further, the cable baffle is rotatably connected to the obstacle or the supporting body of the obstacle through a second hinge structure, the second hinge structure comprises a second shell and a second rotating shaft penetrating through the second shell, the cable baffle is fixed to two ends of the second rotating shaft through a second connecting plate perpendicular to the second rotating shaft, the second shell is fixed to the obstacle or the second rotating shaft is rotatably connected to the supporting body of the obstacle, and the second rotating shaft can rotate in the second shell, so that the cable baffle can rotate around the second rotating shaft.
Further, the first shell is connected to the pneumatic control box through a first bolt, the second shell is connected to the obstacle through a second bolt, and the first bolt and the second bolt are arranged vertically.
Furthermore, first casing passes through first bolted connection on the pneumatic control case, the second casing passes through the second bolted connection on the obstacle, first bolt fastening is on the gas pocket case, be equipped with on the first casing with the screw hole of first bolt adaptation, the second bolt fastening is on the second casing, be equipped with on the obstacle with the screw hole of second bolt adaptation.
Furthermore, the first connecting plate and the first rotating shaft and the second connecting plate and the second rotating shaft are connected through bolts.
Furthermore, the cable protection device also comprises a return spring, one end of the return spring is connected to the baffle structure, and the other end of the return spring is connected with the obstacle or the carrier of the obstacle.
Further, cable protection device still includes reset spring, reset spring's one end connect on the baffle structure, the other end is connected on first hinge structure or pneumatic control box, and the tie point is not crossing with first pivot.
Furthermore, the baffle plate structure is integrally formed.
Further, the cable protection device also comprises an auxiliary supporting block, wherein the auxiliary supporting block is arranged on the block or a carrier of the block between the block and the cable, is used for supporting the baffle structure and is used as a base point for the sliding of the baffle structure relative to the block.
A lithographic apparatus employs any of the above cable protectors to protect a cable connecting a motion stage from interference with an adjacent obstruction when a gas cabinet is pushed or pulled.
Compared with the prior art, the invention has the following beneficial effects:
1. the invention effectively separates the cable from the barrier, protects the cable from being intact and improves the maintenance efficiency and the safety.
2. The cable clamp is simple and ingenious in structure and high in reliability, and the problem that a cable is clamped in the process of drawing out the pneumatic control box can be effectively solved.
3. According to the invention, the proper pressing function of the U-shaped cable at a required specific position can be realized by adjusting the distance between the hinge connected with the pneumatic control box and the pneumatic control box, so that the shape of the cable in the movement process is always kept in a highly controllable shape.
Drawings
Fig. 1 is a schematic top view of an application of the cable protection device of the present invention;
FIG. 2 is a schematic view of the direction of movement of the air box and the direction of extension of the first flap of the present invention;
fig. 3 is a schematic structural view of a cable protection device according to embodiment 1 of the present invention;
fig. 4 is a schematic structural view of a first hinge structure according to embodiment 1 of the present invention;
fig. 5 is a schematic view of an application of a cable protection device according to embodiment 2 of the present invention;
fig. 6 is a schematic structural view of a cable protection device according to embodiment 3 of the present invention;
fig. 7 is a partially enlarged view of an installation portion of a cable protection device according to embodiment 3 of the present invention;
fig. 8 is a schematic structural diagram of a first hinge structure according to embodiment 4 of the present invention.
In the drawings: 1-a cable; 2-baffle structure; 21-a retractable baffle structure; 22-cable shield; 4-a first hinge structure; 40-a first housing; 401-a first shaft; 402-a first connection board; 41-a first bolt; 43-a bearing assembly; 431-deep groove bearing; 432-upper snap spring; 433-lower side snap spring; 5-a second hinge structure; 50-a second bolt; 51-a second connecting plate; 6-a pneumatic control box; 7-a barrier; 8-a return spring; 9-an auxiliary supporting block; 10-bearing block assembly.
Detailed Description
The present invention will be described in further detail with reference to specific examples.
A cable protection device, one end of a cable 1 is connected with a gas control box, the other end of the cable is connected with a controlled device, the cable protection device comprises a baffle structure 2, the baffle structure 2 is located between the cable 1 and an obstacle and isolates the cable 1 from the obstacle, the baffle structure 2 is rotatably connected with the gas control box, and when the gas control box is pushed and pulled, the baffle structure 2 can move along with the gas control box and relatively slide by taking the obstacle as a fulcrum. The cable protection device can prevent the cable 1 from colliding or rubbing with an obstacle when the pneumatic control box is drawn and pulled, and can not collide with the cable 1 when the cable 1 moves to influence the work of the cable 1.
Example 1
As shown in fig. 1-4, the cable protection device includes a retractable baffle structure 21 and a cable baffle 22, wherein one end surface of the retractable baffle structure 21 is mounted on the surface of the pneumatic box 6 through a first hinge structure 4 to form a rotatable connection; one end face, opposite to the end face, of the telescopic baffle structure 21 is connected with the cable baffle 22, one end, connected with the telescopic baffle structure 21, of the cable baffle 22 is installed on the obstacle 7 or a bearing body of the obstacle through the second hinge structure 5, and the other end of the cable baffle 22 freely extends in the linear direction to form a free end; the cable guard 22 is preferably of a length to space the cable 1 from the barrier 7 while not interfering with adjacent objects to provide optimal protection of the cable 1.
The first hinge structure 4 includes a first housing 40 and a first rotating shaft 401 penetrating through the first housing 40, the baffle structure 2 is fixed at both ends of the first rotating shaft 401 through a first connecting plate 402 perpendicular to the first rotating shaft 401, the first housing 40 is fixed on the pneumatic control box, and the first rotating shaft 401 is rotatable in the first housing 40, so that the baffle structure 2 can rotate around the first rotating shaft 401.
The retractable baffle structure 21 comprises at least two baffles, and the adjacent baffles are connected in a sliding manner to adjust the length of the retractable baffle structure 21. Specifically, the retractable baffle structure 21 includes a first baffle, a second baffle and a sectional slide rail, and the rail and the slide block of the sectional slide rail are respectively fixed on the first baffle and the second baffle or are oppositely arranged, so that the first baffle and the second baffle can slide relatively, thereby changing the length of the retractable baffle structure 21.
The cable baffle 22 is rotatably connected to the obstacle or the carrier of the obstacle through a second hinge structure 5, the second hinge structure 5 includes a second housing and a second rotating shaft penetrating through the second housing, the cable baffle 22 is fixed at two ends of the second rotating shaft through a second connecting plate 51 perpendicular to the second rotating shaft, the second housing is fixed to the obstacle or the second rotating shaft is rotatably connected to the carrier of the obstacle, and the second rotating shaft is rotatable in the second housing, so that the cable baffle 22 can rotate around the second rotating shaft.
The first shell 40 is connected to the pneumatic control box through a first bolt 41, the second shell is connected to an obstacle through a second bolt 50, the first bolt 41 is fixed to the pneumatic control box, a threaded hole matched with the first bolt 41 is formed in the first shell 40, the second bolt 50 is fixed to the second shell, and a threaded hole matched with the second bolt 50 is formed in the obstacle. The first connecting plate 402 is connected with the first rotating shaft 401, and the second connecting plate 51 is connected with the second rotating shaft by bolts.
The two ends of the first rotating shaft 401 are connected with the first housing 40 through bearing assemblies 43, and the bearing assemblies 43 comprise a deep groove bearing 431 sleeved on the end of the first rotating shaft 401, and an upper clamp spring 432 and an upper clamp spring 433 for clamping the deep groove bearing 431.
As shown in fig. 2, after the pneumatic control box 6 is drawn out in actual working conditions, the drawn-out cable 1 (U-shaped cable) is tangent to the retractable baffle structure 21 and the cable baffle 22. The arrow shown is the drawing direction of the pneumatic control box 6, and the length of the retractable baffle structure 21 changes from 215mm to 407mm during the drawing process (the drawing distance is from 0 to 300 mm). The linear slide rail used in the embodiment of the present invention has a length of, for example, 200mm and a stroke of, for example, 228mm, and thus can completely meet the requirement.
A lithographic apparatus employs any of the above cable protectors to protect a cable connecting a motion stage from interference with an adjacent obstruction when a gas cabinet is pushed or pulled.
Example 2
Because the cable 1 may be required to be protected under various conditions, under the working condition that the drawing stroke of the box body is small and the cable protection device is installed in a sufficient space, the embodiment provides another design scheme of the cable protection device, the installation schematic diagram of the cable protection device is shown in fig. 5, the baffle plate structure 2 is integrally formed, and one end face of the baffle plate structure 2 is installed on the surface of the pneumatic control box 6 through the first hinge structure 4 to form rotatable connection; one end face of the baffle structure 2 opposite to the end face freely extends along the linear direction to form a free end; the length of the first hinge construction 4 to the free end is greater than the distance between the first hinge construction 4 and the obstacle 7. In addition, a return spring 8 and an auxiliary supporting block 9 are added.
One end of the return spring 8 is connected to the baffle structure 2, and the other end is connected to the stopper 7, as shown in fig. 5.
The auxiliary support block 9 is disposed on the obstacle 7 or the carrier of the obstacle, and is used for contacting the baffle structure 2 when the baffle structure 2 approaches the obstacle 7 to provide support to prevent the baffle structure 2 from falling down.
A lithographic apparatus employs any of the above cable protectors to protect a cable connecting a motion stage from interference with an adjacent obstruction when a gas cabinet is pushed or pulled.
Example 3
As shown in fig. 6 and 7, the difference between this embodiment and embodiment 2 is that one end of the return spring 8 is connected to the baffle structure 2, and the other end is connected to the first hinge structure 4 or the pneumatic control box 6, specifically, the return spring is mounted on the first housing 40 of the first hinge structure 4, and the connection point does not intersect with the first rotating shaft 401. When gas pocket accuse case 6 is pushed and pulled, baffle structure 2 rotates around first pivot 401 for contained angle between baffle structure 2 and the obstacle changes, because reset spring 8 connects the one end of first hinge structure 4 or gas accuse case 6 and first pivot 401 have certain distance and non-intersect, the turned angle that makes reset spring 8 is different with baffle structure 2's turned angle, thereby make the contained angle between baffle structure 2 and the reset spring 8 change, and then changed reset spring 8's length. When the pneumatic control box 6 is pulled, the return spring 8 is also stretched, and the return spring 8 provides certain pulling force for the return of the pneumatic control box 6.
Optionally, the return spring 8 is fixed on the first housing 40 through a connecting rod 81, the connecting rod 81 is perpendicular to the first rotating shaft 401 and extends towards the free end, and the plane of the connecting rod 81 is parallel to the surface of the first housing 40, which is in contact with the pneumatic control box 6.
Example 4
For some cases where the hinge structure cannot be secured to the barrier 7 sidewall, the present embodiment proposes a hinge module alternative. In this embodiment, the first hinge structure 4 is directly and vertically connected to the carrier of the obstacle, as shown in fig. 8, and the rest of the structure is the same as that of embodiment 1. One end of the first rotating shaft 401 extends out of the housing by a certain length, and a bearing housing assembly 10 is installed at the extended portion, and the rotation direction of the bearing housing assembly 10 is perpendicular to the rotation direction of the first rotating shaft 401.
The bearing assemblies 43 fitted on the first rotating shaft 401 may have one set or two sets. The bearing assembly 43 may be horizontally disposed and the bearing housing assembly 10 vertically disposed.
A lithographic apparatus employs any of the above cable protectors to protect a cable connecting a motion stage from interference with an adjacent obstruction when a gas cabinet is pushed or pulled.
The above examples of the present invention are merely illustrative of the present invention and are not intended to limit the embodiments of the present invention. Variations and modifications in other variations will occur to those skilled in the art upon reading the foregoing description. Not all embodiments are exhaustive. All obvious changes and modifications of the present invention are within the scope of the present invention.
Claims (13)
1. One end of the cable is connected with the pneumatic control box, and the other end of the cable is connected with the controlled device; the cable protection device is characterized by comprising a baffle structure, wherein the baffle structure is positioned between a cable and an obstacle and used for isolating the cable from the obstacle, the baffle structure is rotatably connected with the pneumatic control box, and when the pneumatic control box is pushed and pulled, the baffle structure slides relative to the obstacle; the baffle structure is connected to the pneumatic control box in a rotating mode through the first hinge structure, the first hinge structure comprises a first shell and a first rotating shaft penetrating through the first shell, the baffle structure is fixed to the two ends of the first rotating shaft through a first connecting plate perpendicular to the first rotating shaft, the first shell is fixed to the pneumatic control box, the first rotating shaft can rotate in the first shell, and therefore the baffle structure can rotate with the first rotating shaft as a shaft.
2. The cable protector of claim 1, wherein the baffle structure includes a retractable baffle rotatably mounted at one end to the pneumatic cabinet and connected at the other end to the cable baffle, the cable baffle rotatably mounted at the other end to the carrier of the barrier or the barrier, the other end being a free end.
3. The cable protection device of claim 2, wherein the retractable barrier comprises N sub-barriers, N being not less than 2, and adjacent sub-barriers are slidably connected to adjust the length of the retractable barrier.
4. The cable protector of claim 3, wherein the retractable barrier includes a first sub-barrier, a second sub-barrier and a multi-section slide rail, and the track and the slider of the multi-section slide rail are respectively fixed on the first sub-barrier and the second sub-barrier or are oppositely arranged, so that the first sub-barrier and the second sub-barrier can slide relatively.
5. The cable protector according to claim 2, wherein the cable guard is rotatably connected to the stopper or the carrier of the stopper by a second hinge structure, the second hinge structure includes a second housing and a second rotating shaft penetrating through the second housing, the cable guard is fixed at two ends of the second rotating shaft by a second connecting plate perpendicular to the second rotating shaft, the second housing is fixed to the stopper or the second rotating shaft is rotatably connected to the carrier of the stopper, and the second rotating shaft is rotatable in the second housing, so that the cable guard can rotate around the second rotating shaft.
6. The cable protector of claim 5, wherein the first housing is attached to the gas box by a first bolt and the second housing is attached to the barrier by a second bolt, the first bolt being disposed perpendicular to the second bolt.
7. The cable protector according to claim 5 or 6, wherein the first housing is connected to the pneumatic control box by a first bolt, the second housing is connected to the stopper by a second bolt, the first bolt is fixed to the pneumatic control box, the first housing is provided with a threaded hole adapted to the first bolt, the second bolt is fixed to the second housing, and the stopper is provided with a threaded hole adapted to the second bolt.
8. The cable protector of claim 5, wherein the first connecting plate is bolted to the first shaft and the second connecting plate is bolted to the second shaft.
9. The cable protector of claim 2, further comprising a return spring having one end connected to the barrier structure and the other end connected to the barrier or the carrier of the barrier.
10. The cable protector of claim 2, further comprising a return spring having one end connected to the baffle structure and the other end connected to the first hinge structure or the pneumatic box, wherein the connection point does not intersect the first pivot axis.
11. A cable protector according to claim 9 or claim 10 wherein the baffle structure is integrally formed.
12. The cable protector as claimed in claim 11, further comprising an auxiliary support block provided on the barrier or a carrier of the barrier between the barrier and the cable for supporting the baffle structure and serving as a base point for sliding of the baffle structure relative to the barrier.
13. A lithographic apparatus, characterized in that a cable protection device according to any of claims 1-12 is used to protect a cable connected to the motion stage from interfering with an adjacent obstacle when the gas cabinet is pushed or pulled.
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711249449.1A CN109874242B (en) | 2017-12-01 | 2017-12-01 | Cable protection device and photoetching equipment |
| PCT/CN2018/118119 WO2019105406A1 (en) | 2017-12-01 | 2018-11-29 | Cable protection apparatus and lithographic device |
| TW107143043A TW201940038A (en) | 2017-12-01 | 2018-11-30 | Cable protection device and photoetching equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711249449.1A CN109874242B (en) | 2017-12-01 | 2017-12-01 | Cable protection device and photoetching equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109874242A CN109874242A (en) | 2019-06-11 |
| CN109874242B true CN109874242B (en) | 2020-06-16 |
Family
ID=66664331
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711249449.1A Active CN109874242B (en) | 2017-12-01 | 2017-12-01 | Cable protection device and photoetching equipment |
Country Status (3)
| Country | Link |
|---|---|
| CN (1) | CN109874242B (en) |
| TW (1) | TW201940038A (en) |
| WO (1) | WO2019105406A1 (en) |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3060874B2 (en) * | 1995-03-07 | 2000-07-10 | 株式会社豊田自動織機製作所 | Battery cable protection device |
| CN101583256A (en) * | 2008-05-12 | 2009-11-18 | 爱德龙通讯系统（上海）有限公司 | Cable management panel |
| CN101719649B (en) * | 2009-12-21 | 2011-07-13 | 佛山电力设计院有限公司 | Cable telescoping device |
| CN104134955A (en) * | 2014-08-07 | 2014-11-05 | 江苏蒙哥马利电梯有限公司 | Hidden type following-up cable mechanism of elevator car |
| CN204230804U (en) * | 2014-12-02 | 2015-03-25 | 中科英华高技术股份有限公司 | The protector of electric machinery equipment and cable thereof |
| CN106933056B (en) * | 2015-12-31 | 2019-03-12 | 上海微电子装备（集团）股份有限公司 | A kind of cable support mechanism and cable stage |
| CN205772374U (en) * | 2016-05-29 | 2016-12-07 | 江西太平洋电缆集团有限公司 | A kind of cable produces rack |
| CN106099658A (en) * | 2016-08-29 | 2016-11-09 | 四川行之智汇知识产权运营有限公司 | Power distribution cabinet based on cable fixed adjustment structure |
| CN206225976U (en) * | 2016-11-30 | 2017-06-06 | 北京金风科创风电设备有限公司 | Cable protector and wind power generating set |
-
2017
- 2017-12-01 CN CN201711249449.1A patent/CN109874242B/en active Active
-
2018
- 2018-11-29 WO PCT/CN2018/118119 patent/WO2019105406A1/en active Application Filing
- 2018-11-30 TW TW107143043A patent/TW201940038A/en unknown
Also Published As
| Publication number | Publication date |
|---|---|
| WO2019105406A1 (en) | 2019-06-06 |
| CN109874242A (en) | 2019-06-11 |
| TW201940038A (en) | 2019-10-01 |
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