CN109870128A - Micro-nano structure pattern real-time monitoring light path system in a kind of inkjet printing - Google Patents
Micro-nano structure pattern real-time monitoring light path system in a kind of inkjet printing Download PDFInfo
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- CN109870128A CN109870128A CN201910207498.1A CN201910207498A CN109870128A CN 109870128 A CN109870128 A CN 109870128A CN 201910207498 A CN201910207498 A CN 201910207498A CN 109870128 A CN109870128 A CN 109870128A
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- 238000007641 inkjet printing Methods 0.000 title claims abstract description 30
- 238000012544 monitoring process Methods 0.000 title claims abstract description 25
- 239000002086 nanomaterial Substances 0.000 title claims abstract description 24
- 230000003287 optical effect Effects 0.000 claims abstract description 23
- 239000000758 substrate Substances 0.000 claims description 16
- 238000007639 printing Methods 0.000 claims description 13
- 239000007921 spray Substances 0.000 claims description 6
- 238000003384 imaging method Methods 0.000 claims description 5
- 241000931526 Acer campestre Species 0.000 claims description 3
- 230000000644 propagated effect Effects 0.000 claims description 3
- 238000011897 real-time detection Methods 0.000 claims description 3
- 238000005516 engineering process Methods 0.000 abstract description 6
- 238000004519 manufacturing process Methods 0.000 abstract description 2
- 230000000149 penetrating effect Effects 0.000 abstract description 2
- 238000000034 method Methods 0.000 description 9
- 239000000463 material Substances 0.000 description 5
- 238000013459 approach Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 238000012876 topography Methods 0.000 description 2
- 238000010009 beating Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000002120 nanofilm Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000004886 process control Methods 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Abstract
The invention belongs to printed electronics fields, it is related to micro-nano structure pattern real-time monitoring light path system in a kind of inkjet printing, the light beam that laser issues adjusts beam energy by attenuator, light beam successively passes through the first convex lens and the second convex lens after penetrating printed sample, light finally converges at CCD camera, CCD camera is connected with external computer, observe the print structure in printed sample in real time by computer, different according to the focal length of selected convex lens, the result that computer is observed is the image of print structure bi-directional scaling；Its optical path simple, intuitive, component facilitate adjustable, and principle is reliable, and it is convenient to operate, it is easy to accomplish, it can be widely applied to various micro-nano structures and electronic manufacturing field based on inkjet printing technology.
Description
Technical field:
The invention belongs to printed electronics fields, are related to a kind of inkjet printing real-time monitoring system, especially a kind of spray
Micro-nano structure pattern real-time monitoring light path system in ink printing.
Background technique:
Inkjet printing technology (InkjetPrinting) is the printed electronics of a kind of " directly writing ", it is in computer
Under accurate control, functional oil film is ejected into all kinds of substrate tables dropwise using the power of gas pressure, electric field force or other forms
Face obtains specific micro-nano structure or film, which has at low cost, environmental-friendly, high-efficient and the advantages such as write direct,
It is widely used in novel electron Material Field in recent years.Inkjet printing is different according to the mode of ink-jet, can be divided into continuous spray
(spray head sprays when being worked according to design requirement for ink printing (realizing that ink continuously sprays using electric field driven) and drop on demand ink jet printing
Ink) two kinds, select different modes to be operated in different electronic device preparations.
In the use process of inkjet printing technology, the quality of ink, the control of voltage, the control of mobile platform and substrate
The many factors such as material can influence printing as a result, thus process control and result monitoring become inkjet printing research and
The Important Problems of application.In existing research approach, take parameter quantitative control method more, such as given ink kind and property,
Then parameter in quantitatively regulating and controlling print procedure characterizes the features such as pattern, the electricity of print result by certain equipment, thus
It realizes the one-to-one correspondence of print structure and parameter, and is thus preferred beneficial for all kinds of conditions of printing.Although these solutions
Be real-time sampling, but can not be analyzed and be observed in real time, need print after print result is analyzed, then with printing
Parameter is compared, and not only reduces printing effect to a certain extent, and be not easy to find the defects of print procedure carry out and
When amendment.
Summary of the invention:
It is an object of the invention to overcome defect of the existing technology, design provides micro-nano structure in a kind of inkjet printing
Pattern real-time monitoring light path system is using inkjet printing by adjusting the position of different optical components and parameter in optical path
When technology makes all kinds of micro-nano structures, real-time monitoring observes the shape characteristic of print result, is fed back and is controlled to print procedure
System.
To achieve the goals above, in inkjet printing of the present invention micro-nano structure pattern real-time monitoring light path system master
Body structure includes laser, attenuator, the first convex lens, the second convex lens and CCD camera, and the center of each optical element is located at
On straight line, and surface is perpendicular to direction of beam propagation, to ensure that homogenizer is propagated；Printed sample and the first convex lens it
Between distance it is equal with the focal length of the first convex lens, the distance between the second convex lens and CCD camera and the second convex lens
The sum of both focal length is equal, and the distance between the first convex lens and the second convex lens are focal length, it is ensured that gained image is clear figure
Picture；The light beam that laser issues adjusts beam energy by attenuator, and light beam successively passes through the first convex lens after penetrating printed sample
Mirror and the second convex lens, light finally converge at CCD camera, and CCD camera is connected with external computer, real-time by computer
Observe the print structure in printed sample, different according to the focal length of selected convex lens, the result that computer is observed is printing knot
The image of structure bi-directional scaling.
Micro-nano structure pattern real-time monitoring light path system makes with ink-jet print system cooperation in inkjet printing of the present invention
To realize real time monitoring function, the position of printed sample is located at the printing in ink-jet print system in real-time detection light path system
As a result locate, be placed with electrode plate on the accurate control mobile platform in ink-jet print system, place printed substrates on electrode plate, beat
Pull product are printed upon in printed substrates, and precision control mobile platform, electrode plate and printed substrates can penetrate visible light, and
Thus precision control mobile platform can prepare micro-nano knot of different shapes according to the print routine of setting planar accurate movement
Structure.
The laser that laser of the present invention issues is any visible light wavelengths, and the direction of propagation of light beam is perpendicular to printing base
Bottom.
First convex lens and the second convex lens of the present invention are the optical lens of the optical maser wavelength issued suitable for laser
Mirror, position are freely adjusted according to actual needs.
CCD camera of the present invention uses commercially available imaging camera device, can be connected with external computer end with real-time
Show image, resolution ratio is greater than 640 × 480.
The present invention is during inkjet printing makes micro-nano structure, by obtaining with the matched CCD camera of computer end
The image of print structure, and Image Acquisition and video record are carried out, to observe the quality of print structure.
Compared with prior art, the present invention having the advantage that first is that light path system is integrated into ink-jet print system
It goes, under the premise of the system for not changing print procedure is arranged, realizes lossless observation；Second is that light path system has real-time,
The shape characteristic that the real-time observation structure of CCD camera can be passed through in computer end；Third is that it is low to condition depended degree, it is moved in sample
In the case where dynamic, slight shift, surface topography imaging clear in structure can be obtained；Fourth is that obtained image resolution ratio is high, make
When with high-definition camera, image information high-definition can get；Its optical path simple, intuitive, component facilitate adjustable, original
Reason is reliable, and it is convenient to operate, it is easy to accomplish, it can be widely applied to various micro-nano structures and electronic manufacture based on inkjet printing technology
Field.
Detailed description of the invention:
Fig. 1 is that the main structure principle of micro-nano structure pattern real-time monitoring light path system in inkjet printing of the present invention is shown
It is intended to.
Fig. 2 is that micro-nano structure pattern real-time monitoring light path system is matched with ink-jet print system in inkjet printing of the present invention
The principle schematic diagram used is closed, is micro-nano structure pattern real-time monitoring light path system in inkjet printing in dotted line frame.
Fig. 3 be the present embodiments relate to observation image, wherein (a) be printed sample structure ordinary optical microscope
Picture is shot, is (b) the real-time observation image acquired using light path system of the present invention, material used in inkjet printing is in image
Nano-Ag particles ink.
Specific embodiment:
The present invention will be further described by way of example and in conjunction with the accompanying drawings.
Embodiment:
Main structure such as Fig. 1 institute of micro-nano structure pattern real-time monitoring light path system in inkjet printing described in the present embodiment
Show, including laser 1, attenuator 2, the first convex lens L1, the second convex lens L2 and CCD camera 3, the center of each optical element
It is located in a straight line, and surface is perpendicular to direction of beam propagation, to ensure that homogenizer is propagated；Printed sample and the first convex lens
The focal length f of the distance between mirror L1 and the first convex lens L11It is equal, the distance between the second convex lens L2 and CCD camera 3 with
The focal length f of second convex lens L22Equal, the distance between the first convex lens L1 and the second convex lens L2 are the sum of the two focal length,
Ensure that gained image is clear image；The light beam that laser 1 issues adjusts beam energy by attenuator 3, and light beam is through printing
Successively pass through the first convex lens L1 and the second convex lens L2 after sample, light finally converges at CCD camera 3, CCD camera 3
It is connected with external computer, the print structure 7 in printed sample is observed in real time by computer, according to the focal length of selected convex lens
Difference, the result that computer is observed are the image of print structure bi-directional scaling.
Micro-nano structure pattern real-time monitoring light path system and ink-jet print system cooperate in inkjet printing described in the present embodiment
Using to realize real time monitoring function, the position of printed sample is located at beating in ink-jet print system in real-time detection light path system
It prints at result 7, is placed with electrode plate 5 on the accurate control mobile platform 4 in ink-jet print system, places printing on electrode plate 5
Substrate 6, printed sample are printed upon in printed substrates 6, and precision control mobile platform 4, electrode plate 5 and printed substrates 6 can penetrate
Visible light, and thus accurate control mobile platform 4 can be prepared not according to the print routine of setting planar accurate movement
The micro-nano structure of similar shape.
It is any visible light wavelengths that the present embodiment, which invents the laser that the laser 1 issues, and the direction of propagation of light beam is vertical
In printed substrates 6.
First convex lens L1 and the second convex lens L2 described in the present embodiment are the optical maser wavelength issued suitable for laser 1
Optical lens, position are freely adjusted according to actual needs.
CCD camera 3 described in the present embodiment uses commercially available imaging camera device, can be connected with external computer end with reality
When show image, resolution ratio is greater than 640 × 480.
The present embodiment couples light path system with ink-jet print system, that is, allows the position of printed sample in Fig. 1 lucky
At the print result of inkjet printing in Fig. 2, thus laser beam can pass through the print structure in printed sample, and pass through
First convex lens L1 and the second convex lens L2 image in the surface CCD, according to optical lens image-forming principle, the structure bit of inkjet printing
In the front focal length of the first convex lens L1, with the first convex lens L1 at a distance of f1, then the second convex lens passes through at the virtual image in print structure institute
L2 just CCD camera surface be imaged, institute at image enlargement ratio be f2/f1, the first convex lens L1, the second convex lens L2
Be all placed in camera on fine-tuning platform, can along the round-trip fine adjustment position of optical element in direction of beam propagation, by
This ensures to get a distinct image.
Accurate control mobile platform in the present embodiment in ink-jet print system can be moved planar, to realize not
The direction of propagation of the printing of similar shape structure, light beam will be perpendicular to the surface of printed substrates 6, so that it is guaranteed that platform is in in-plane moving
When be at the front focal plane position of the first convex lens L1, clearly image is obtained in CCD camera just.
Printed substrates 6 in the present embodiment are generally planar translucent material, if this can also be used using flexible material
System is observed, and in the detection process, according to the sample position of the fluctuating of flexible substrates and observation, adjusts each lens position in real time
It sets, meets above-mentioned position corresponding relationship, also can get clearly surface topography image.
Image observed by the present embodiment is as shown in figure 3, wherein (a) is that printed sample is seen under ordinary optical microscope
The result observed；(b) for using the present invention real-time monitor as a result, due to use different focal length the first convex lens L1 and
Second convex lens L2, thus the enlargement ratio of two images has certain difference.
The present embodiment can adjust the light intensity of laser by regulated attenuator, to adjust the bright dark of final collection image
Contrast；Resolution ratio of camera head that can also be different according to the size selection of print structure obtains the images of different display sizes.
Since gained image is the higher electronic photo of clarity, the later period can also carry out all kinds of places to the image using other softwares
Reason, preferably to observe and characterize testing result.
The present embodiment selects optical approach to monitor inkjet printing as a result, having following reason: first is that optical path used
Component is few, is easy to adjust and in conjunction with existing ink-jet print system, the adjusting of optical path easy to accomplish and print result it is real-time
Monitoring；Second is that all optical paths are small to the dependency degree of environment, the fluctuating small for movement of the platform in face, print structure all will not
The imaging in CCD camera is influenced, can get clearly image；Third is that light path devices price used is lower, to laser light source,
Optical lens, CCD camera are common optical element without particular/special requirement；Fourth is that light path system can be with computer end phase
Even, additional data export and transmission are not needed, can observe the structure and morphology of sample in print procedure by software in real time,
Truly realize real-time monitoring.
Claims (5)
1. micro-nano structure pattern real-time monitoring light path system in a kind of inkjet printing, it is characterised in that main structure includes laser
Device, attenuator, the first convex lens, the second convex lens and CCD camera, the center of each optical element are located in a straight line, and
Surface is perpendicular to direction of beam propagation, to ensure that homogenizer is propagated；The distance between printed sample and the first convex lens and
The focal length of one convex lens is equal, and the second convex lens and the distance between CCD camera are equal with the focal length of the second convex lens, and first
The distance between convex lens and the second convex lens are the sum of the two focal length, it is ensured that gained image is clear image；Laser issues
Light beam by attenuator adjust beam energy, light beam penetrate printed sample after successively pass through the first convex lens and the second convex lens
Mirror, light finally converge at CCD camera, and CCD camera is connected with external computer, observe printing sample in real time by computer
Print structure on product, different according to the focal length of selected convex lens, the result that computer is observed is print structure bi-directional scaling
Image.
2. micro-nano structure pattern real-time monitoring light path system in inkjet printing according to claim 1, it is characterised in that its with
Ink-jet print system is used cooperatively to realize real time monitoring function, and the position of printed sample is located at spray in real-time detection light path system
At print result in black print system, electrode plate, electrode are placed on the accurate control mobile platform in ink-jet print system
Printed substrates are placed on plate, printed sample is printed upon in printed substrates, and precision control mobile platform, electrode plate and printed substrates are equal
Can be through visible light, and accurate control mobile platform can be according to the print routine of setting planar accurate movement, thus
Prepare micro-nano structure of different shapes.
3. micro-nano structure pattern real-time monitoring light path system in inkjet printing according to claim 2, it is characterised in that described
The laser beam that laser issues is any visible light wavelengths, and the direction of propagation of laser beam is perpendicular to printed substrates.
4. micro-nano structure pattern real-time monitoring light path system in inkjet printing according to claim 2, it is characterised in that described
First convex lens and the second convex lens are the optical lens of the optical maser wavelength issued suitable for laser, and position is according to actual needs
Freely adjust.
5. micro-nano structure pattern real-time monitoring light path system in inkjet printing according to claim 2, it is characterised in that described
CCD camera uses commercially available imaging camera device, can be connected with external computer end with real-time display image, resolution ratio is big
In 640 × 480.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201910207498.1A CN109870128B (en) | 2019-03-19 | 2019-03-19 | Micro-nano structure morphology real-time monitoring optical path system in ink-jet printing |
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| CN201910207498.1A CN109870128B (en) | 2019-03-19 | 2019-03-19 | Micro-nano structure morphology real-time monitoring optical path system in ink-jet printing |
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| CN109870128B CN109870128B (en) | 2022-06-28 |
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