CN109870107A - 一种用于多种纳米位移传感器间相互标定的装置 - Google Patents
一种用于多种纳米位移传感器间相互标定的装置 Download PDFInfo
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- CN109870107A CN109870107A CN201910245327.8A CN201910245327A CN109870107A CN 109870107 A CN109870107 A CN 109870107A CN 201910245327 A CN201910245327 A CN 201910245327A CN 109870107 A CN109870107 A CN 109870107A
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Cited By (1)
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CN112959050A (zh) * | 2021-04-01 | 2021-06-15 | 山东大学 | 一种单极板电容传感器的装配装置和装配方法 |
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US20080112709A1 (en) * | 2006-11-09 | 2008-05-15 | Newport Corporation | Automated dispersion compensation over a broad wavelength range for coherent optical pulses |
US20090257063A1 (en) * | 2008-06-12 | 2009-10-15 | Polychromix Corporation | Adjustable two dimensional lamellar grating |
CN101986185A (zh) * | 2009-07-28 | 2011-03-16 | 佳能株式会社 | 光学断层成像装置 |
US20110188850A1 (en) * | 2010-02-01 | 2011-08-04 | Opnext Japan, Inc. | Interferometer, demodulator, and optical communication module |
CN102122214B (zh) * | 2009-11-16 | 2015-05-20 | 美国博通公司 | 操作游戏控制器来识别用户的方法、游戏控制器和控制台 |
CN105157574A (zh) * | 2015-04-30 | 2015-12-16 | 长春理工大学 | 一种激光跟踪仪测长精度标定方法与装置 |
CN107367250A (zh) * | 2016-05-12 | 2017-11-21 | 哈尔滨工业大学 | 宏微结合的电感位移传感器校准方法与装置 |
CN107514986A (zh) * | 2017-10-11 | 2017-12-26 | 重庆建设工业(集团)有限责任公司 | 一种基于气浮平台的位移传感器校准装置 |
CN107830808A (zh) * | 2017-12-01 | 2018-03-23 | 中国计量大学 | 一种高低温环境光栅位移传感器的校准方法及装置 |
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- 2019-03-28 CN CN201910245327.8A patent/CN109870107B/zh active Active
Patent Citations (9)
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US20080112709A1 (en) * | 2006-11-09 | 2008-05-15 | Newport Corporation | Automated dispersion compensation over a broad wavelength range for coherent optical pulses |
US20090257063A1 (en) * | 2008-06-12 | 2009-10-15 | Polychromix Corporation | Adjustable two dimensional lamellar grating |
CN101986185A (zh) * | 2009-07-28 | 2011-03-16 | 佳能株式会社 | 光学断层成像装置 |
CN102122214B (zh) * | 2009-11-16 | 2015-05-20 | 美国博通公司 | 操作游戏控制器来识别用户的方法、游戏控制器和控制台 |
US20110188850A1 (en) * | 2010-02-01 | 2011-08-04 | Opnext Japan, Inc. | Interferometer, demodulator, and optical communication module |
CN105157574A (zh) * | 2015-04-30 | 2015-12-16 | 长春理工大学 | 一种激光跟踪仪测长精度标定方法与装置 |
CN107367250A (zh) * | 2016-05-12 | 2017-11-21 | 哈尔滨工业大学 | 宏微结合的电感位移传感器校准方法与装置 |
CN107514986A (zh) * | 2017-10-11 | 2017-12-26 | 重庆建设工业(集团)有限责任公司 | 一种基于气浮平台的位移传感器校准装置 |
CN107830808A (zh) * | 2017-12-01 | 2018-03-23 | 中国计量大学 | 一种高低温环境光栅位移传感器的校准方法及装置 |
Non-Patent Citations (1)
Title |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112959050A (zh) * | 2021-04-01 | 2021-06-15 | 山东大学 | 一种单极板电容传感器的装配装置和装配方法 |
CN112959050B (zh) * | 2021-04-01 | 2022-03-08 | 山东大学 | 一种单极板电容传感器的装配装置和装配方法 |
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Denomination of invention: A device for mutual calibration of various nano displacement sensors Effective date of registration: 20220613 Granted publication date: 20210101 Pledgee: Rizhao Gaosheng Financing Guarantee Co.,Ltd. Pledgor: Rizhao AMI Precision Control Technology Co.,Ltd. Registration number: Y2022980007667 |
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Address after: 276800 Room 101, floor 1, building 15, new generation information technology industrial park, high tech Zone, Rizhao City, Shandong Province Patentee after: Ami Precision Control Technology (Shandong) Co.,Ltd. Address before: 276800 Room 101, floor 1, building 15, new generation information technology industrial park, high tech Zone, Rizhao City, Shandong Province Patentee before: Rizhao AMI Precision Control Technology Co.,Ltd. |
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Date of cancellation: 20230809 Granted publication date: 20210101 Pledgee: Rizhao Gaosheng Financing Guarantee Co.,Ltd. Pledgor: Rizhao AMI Precision Control Technology Co.,Ltd. Registration number: Y2022980007667 |