CN109870096B - In-situ nondestructive measurement device and characterization method for surface roughness of substrate - Google Patents
In-situ nondestructive measurement device and characterization method for surface roughness of substrate Download PDFInfo
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- CN109870096B CN109870096B CN201910262576.8A CN201910262576A CN109870096B CN 109870096 B CN109870096 B CN 109870096B CN 201910262576 A CN201910262576 A CN 201910262576A CN 109870096 B CN109870096 B CN 109870096B
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- 238000005259 measurement Methods 0.000 title claims abstract description 42
- 239000000758 substrate Substances 0.000 title claims abstract description 32
- 238000011065 in-situ storage Methods 0.000 title claims abstract description 21
- 238000012512 characterization method Methods 0.000 title claims abstract description 15
- 230000003746 surface roughness Effects 0.000 title claims abstract description 14
- 239000011159 matrix material Substances 0.000 claims abstract description 21
- 230000002457 bidirectional effect Effects 0.000 claims abstract description 19
- 230000001066 destructive effect Effects 0.000 claims description 3
- 238000000034 method Methods 0.000 abstract description 7
- 239000000463 material Substances 0.000 abstract description 6
- 230000007797 corrosion Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000009897 systematic effect Effects 0.000 description 2
- 238000005299 abrasion Methods 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 238000004220 aggregation Methods 0.000 description 1
- 238000009659 non-destructive testing Methods 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 238000004441 surface measurement Methods 0.000 description 1
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Abstract
The invention discloses an in-situ nondestructive measurement device and a characterization method for the surface roughness of a substrate, wherein the measurement device comprises a standard calibration plate, a rectangular plate with a slideway at the lower side, a sliding module and a reference positioning needle which are arranged at the left end and the right end of the slideway, a sliding module and a measuring needle which are arranged in the middle of the slideway and are adjusted up and down, a bidirectional laser transmitter arranged at the upper part of the reference positioning needle, a three-way laser transmitter arranged at the upper part of the measuring needle, a transverse scale and a longitudinal scale which are arranged on the rectangular plate; the invention also discloses an in-situ nondestructive measurement characterization method for the concave-convex degree of the surface of the matrix, which comprises the steps of measuring the surface of the matrix by a measuring device, calculating and plotting for characterization; the device is portable and easy to operate, and can realize in-situ nondestructive measurement; the method is simple and easy to operate, and can rapidly represent the concave-convex degree of the surface of the equipment material matrix.
Description
Technical Field
The invention relates to the technical field of matrix surface measurement and characterization, in particular to an in-situ nondestructive measurement device and a characterization method for the degree of concave-convex of a matrix surface.
Background
Most equipment materials have abrasion, corrosion and corrosion product aggregation phenomena in the running process, so that defects such as pitting or bulge and the like appear on the surfaces of the materials. At present, the measurement of the micro concave-convex degree of the surface of a matrix is mostly carried out by cutting a matrix material to carry out local sampling, and a large-scale optical microscope is adopted for measurement and characterization; aiming at the concave-convex defects visible to the naked eyes on the surface of the matrix, vernier calipers or scales are used for measurement and characterization.
However, the following disadvantages exist with the above method:
1) The device matrix material is cut and locally sampled, and unrecoverable damage is carried out on the device in the measuring and characterizing process by adopting a large-scale optical microscope, so that the continuous utilization of the device is not facilitated.
2) The adoption of vernier calipers or scales for small protrusions or depressions on large equipment is inconvenient for measurement and characterization, and the method has certain limitations.
Disclosure of Invention
Aiming at the problems existing in the prior art, the invention aims to provide an in-situ nondestructive measurement device for the surface roughness of a substrate, which is portable and easy to operate and can realize in-situ nondestructive measurement. Another object of the invention is to provide a method for characterizing the surface roughness of a substrate, which is simple and easy to operate, and can rapidly characterize the surface roughness of the substrate of a device material.
In order to achieve the above purpose, the present invention is realized by the following technical scheme.
The in-situ nondestructive measurement device comprises a standard calibration plate r, a rectangular plate, a measuring needle sliding module n, a measuring needle m, a left sliding module a, a right sliding module e, a left reference positioning needle b, a right reference positioning needle f, a left bidirectional laser emitter d, a right bidirectional laser emitter h, a three-way laser emitter k, a transverse scale i and a longitudinal scale j, wherein the rectangular plate is provided with a slideway c at the lower side, the measuring needle sliding module n is positioned in the middle of the slideway c, the measuring needle m is arranged on the measuring needle sliding module n and can be adjusted up and down, the left sliding module a and the right sliding module e are positioned on the slideway c and are positioned at the left end and the right end of the measuring needle sliding module n, the left reference positioning needle b and the right reference positioning needle f are respectively arranged on the left sliding module a and the right sliding module e, the left bidirectional laser emitter d and the right bidirectional laser emitter h are respectively arranged on the left reference positioning needle b and the right reference positioning needle f, the three-way laser emitter k is arranged on the upper part of the measuring needle m, and the transverse scale i and the longitudinal scale j are arranged on the rectangular plate; the sliding modules a and e can slide left and right along the slideway c; the left reference positioning pin b and the right reference positioning pin f can slide up and down along the left sliding module a and the right sliding module e respectively, and the longitudinal scale j and the measuring pin m can synchronously slide left and right along the slideway c along with the measuring pin sliding module n.
The standard calibration plate r is used for determining the systematic errors of the left reference positioning needle b, the right reference positioning needle f and the measuring needle m in longitudinal measurement.
The left sliding module a, the left reference positioning pin b, the right sliding module e and the right reference positioning pin f are respectively provided with a left fixing device g and a right fixing device p.
The left bidirectional laser emitter d, the right bidirectional laser emitter h and the three-way laser emitter k are used for fixing points on the transverse scale i and the longitudinal scale j, so that data can be conveniently read.
The in-situ nondestructive measurement characterization method of the surface roughness of the substrate is carried out by the following steps:
step 1, a left reference positioning needle b, a right reference positioning needle f and a measuring needle m are vertically arranged on a standard calibration plate r at the same time, a left bidirectional laser emitter d and a right bidirectional laser emitter h respectively instruct to adjust a fixing device of the left reference positioning needle b and the right reference positioning needle f and fix the fixing device at the same horizontal position, and the left reference positioning needle b and the right reference positioning needle f respectively correspond to a reading Z of a longitudinal scale d Or Z is h The measuring needle m corresponds to a longitudinal scale reading Z k The system error of the calculation measuring device is as follows: s= |z k -Z d I or s= |z k -Z h |；
Step 2, placing the left reference positioning needle b and the right reference positioning needle f of the positioned measuring device in the step 1 at a position without obvious concave and convex on the surface of the substrate, adjusting the measuring needle sliding module n to measure and characterize a certain point on the surface of the substrate, and also measuring and characterizing multiple points between two points and sections of the left reference positioning needle b and the right reference positioning needle f, and even measuring and characterizing multiple points on a certain surface of the substrate, and marking as Z kn ，n＝1、2、3……；
Step 3, according to formula h=z kn -S or h=z kn -|Z k -Z b I or h=z kn -|Z k -Z h I calculating the concave-convex height H of the surface of the substrate, and when H>0, wherein the measuring point is higher than the base body datum plane, namely the bulge; when h=0, the measurement point is the base reference plane, i.e. the plane point; when H is<0, the measuring point is lower than the base body datum plane, namely a concave point;
step 4, characterizing the concave-convex degree of a certain point on the surface of the substrate according to the concave-convex height H of the surface of the substrate measured and calculated in the step 3;when the multi-point measurement and calculation are carried out between the two point line segments of the left reference positioning needle b and the right reference positioning needle f, the reading of the transverse scale corresponding to the left reference positioning needle b is taken as the origin, namely X d With the reading X of the transverse scale corresponding to the measuring needle m k And X is d The difference value of (a) is X coordinate to measure the longitudinal scale reading Z corresponding to the needle m kn Drawing a two-dimensional curve for the Y coordinate to represent the concave-convex degree of a certain line segment on the surface of the matrix; when one surface is selected for multipoint measurement and calculation, the reading of the transverse scale corresponding to the left reference positioning needle b is taken as the origin, namely X d With the reading X of the transverse scale corresponding to the measuring needle m k And X is d The difference value of (a) is X coordinate, the rectangular plate is translated up and down along the origin as Y coordinate, and the longitudinal scale reading Z corresponding to the needle m is measured kn And drawing a three-dimensional stereo graph by adopting drawing software to represent the concave-convex degree of one surface for the Z coordinate.
Compared with the prior art, the invention has the advantages that:
the in-situ nondestructive measurement device for the surface roughness of the substrate is portable and easy to operate, and can realize in-situ nondestructive measurement; the characterization method of the surface concave-convex degree of the matrix is simple and easy to operate, and can rapidly characterize the concave-convex degree of a certain point, a certain line segment or a certain surface of the matrix of the equipment material.
Drawings
The invention will now be described in further detail with reference to the drawings and to specific examples.
FIG. 1 is a schematic diagram of the main structure of an in-situ nondestructive measurement device for the degree of surface roughness of a substrate.
FIG. 2 is a schematic diagram of a standard calibration plate of an in-situ non-destructive measuring device for the degree of surface roughness of a substrate according to the present invention.
Detailed Description
Embodiments of the present invention will be described in detail below with reference to examples, but it will be understood by those skilled in the art that the following examples are only for illustrating the present invention and should not be construed as limiting the scope of the present invention.
Referring to fig. 1 and 2, the invention provides an in-situ nondestructive measurement device for the surface roughness of a substrate, which comprises a split standard calibration plate r, a rectangular plate with a slideway c at the lower side, a measuring needle sliding module n positioned in the middle of the slideway c, a measuring needle m which is arranged on the measuring needle sliding module n and can be adjusted up and down, a left sliding module a and a right sliding module e which are positioned on the slideway c and positioned at the left end and the right end of the measuring needle sliding module n, a left reference positioning needle b and a right reference positioning needle f which are respectively arranged on the left sliding module a and the right sliding module e, a left bidirectional laser emitter d and a right bidirectional laser emitter h which are respectively arranged at the upper parts of the left reference positioning needle b and the right reference positioning needle f, a laser emitter k which is arranged at the upper part of the measuring needle m, a transverse scale i and a longitudinal scale j which are arranged on the rectangular plate; the sliding modules a and e can slide left and right along the slideway c; the left reference positioning pin b and the right reference positioning pin f can slide up and down along the left sliding module a and the right sliding module e respectively, and the longitudinal scale j and the measuring pin m can synchronously slide left and right along the slideway c along with the measuring pin sliding module n.
In the in-situ nondestructive measurement device for the surface roughness of the substrate, the standard calibration plate r is used for determining the systematic errors of the left reference positioning needle b, the right reference positioning needle f and the measurement needle m in the longitudinal measurement, the left reference positioning needle b and the right reference positioning needle f are respectively arranged on the left sliding module a and the right sliding module e and can be adjusted up and down, the left sliding module a and the right sliding module e can be adjusted left and right along the slideway c, the left positioning device g and the right positioning device p can be used for positioning respectively, the positioned left reference positioning needle b and right reference positioning needle f are arranged on the surface of the substrate to be measured, and the measurement needle sliding module n and the measurement needle m are adjusted to perform in-situ nondestructive measurement for the surface roughness of the substrate.
The device for measuring the degree of concave-convex on the surface of the substrate is simple and portable to operate, can perform in-situ nondestructive testing, and is easy to apply in practice.
The invention also provides a characterization method of the surface concave-convex degree of the matrix, which comprises the steps of measuring the surface of the matrix by a measuring device, calculating and plotting to characterize.
The method comprises the following specific steps:
step 1, a left reference positioning needle b, a right reference positioning needle f and a measuring needle m are identicalWhen the device is vertically arranged on a standard calibration plate r, a left bidirectional laser emitter d and a right bidirectional laser emitter h respectively instruct and adjust a left reference positioning needle b and a right reference positioning needle f fixing device to be fixed at the same horizontal position, and the left reference positioning needle b and the right reference positioning needle f respectively correspond to the reading of a longitudinal scale Z d Or Z is h The measuring needle m corresponds to a longitudinal scale reading Z k The system error of the calculation measuring device is as follows: s= |z k -Z d I or s= |z k -Z h |；
Step 2, placing the left reference positioning needle b and the right reference positioning needle f of the positioned measuring device in the step 1 at a position without obvious concave and convex on the surface of the substrate, adjusting the measuring needle sliding module n to measure and characterize a certain point on the surface of the substrate, and also measuring and characterizing multiple points between two points and sections of the left reference positioning needle b and the right reference positioning needle f, and even measuring and characterizing multiple points on a certain surface of the substrate, and marking as Z kn ，n＝1、2、3……；
Step 3, according to formula h=z kn -S or h=z kn -|Z k -Z b I or h=z kn -|Z k -Z h I calculating the concave-convex height H of the surface of the substrate, and when H>0, wherein the measuring point is higher than the base body datum plane, namely the bulge; when h=0, the measurement point is the base reference plane, i.e. the plane point; when H is<0, the measuring point is lower than the base body datum plane, namely a concave point;
step 4, characterizing the concave-convex degree of a certain point on the surface of the substrate according to the concave-convex height H of the surface of the substrate measured and calculated in the step 3; when the multi-point measurement and calculation are carried out between the two point line segments of the left reference positioning needle b and the right reference positioning needle f, the reading of the transverse scale corresponding to the left reference positioning needle b is taken as the origin, namely X d With the reading X of the transverse scale corresponding to the measuring needle m k And X is d The difference value of (a) is X coordinate to measure the longitudinal scale reading Z corresponding to the needle m kn Drawing a two-dimensional curve for the Y coordinate to represent the concave-convex degree of a certain line segment on the surface of the matrix; when one surface is selected for multipoint measurement and calculation, the reading of the transverse scale corresponding to the left reference positioning needle b is taken as the origin, namely X d To measure the correspondence of the needle mReading X of transverse scale k And X is d The difference value of (a) is X coordinate, the rectangular plate is translated up and down along the origin as Y coordinate, and the longitudinal scale reading Z corresponding to the needle m is measured kn For the Z coordinate, a three-dimensional chart is drawn by using drawing software such as Excel, oringin to characterize the degree of concavity and convexity of one surface.
The characterization method of the surface concave-convex degree of the matrix is simple and easy to operate, and can rapidly characterize the concave-convex degree of a certain point, a certain line segment or a certain surface of the matrix of the equipment material.
While the invention has been described in detail in this specification with reference to the general description and the specific embodiments thereof, it will be apparent to one skilled in the art that modifications and improvements can be made thereto. Accordingly, such modifications or improvements may be made without departing from the spirit of the invention and are intended to be within the scope of the invention as claimed.
Claims (2)
1. The in-situ nondestructive measurement device for the surface roughness of the substrate is characterized by comprising a standard calibration plate (r) and a rectangular plate, wherein a slide way (c) is arranged at the lower side of the rectangular plate, a measurement needle sliding module (n) positioned in the middle of the slide way (c), a measurement needle (m) which is arranged on the measurement needle sliding module (n) and can be adjusted up and down, a left sliding module (a) and a right sliding module (e) which are positioned on the slide way (c) and positioned at the left end and the right end of the measurement needle sliding module (n), a left reference positioning needle (b) and a right reference positioning needle (f) which are respectively arranged on the left sliding module (a) and the right sliding module (e), a left bidirectional laser emitter (d) and a right bidirectional laser emitter (h) which are respectively arranged on the upper parts of the left reference positioning needle (b) and the right reference positioning needle (f), a three-way laser emitter (k) which is arranged on the upper part of the measurement needle (m), and a transverse scale (i) and a longitudinal scale (j) which are respectively arranged on the rectangular plate; the sliding modules (a, e) can slide left and right along the slideway (c); the left reference positioning needle (b) and the right reference positioning needle (f) can slide up and down along the left sliding module (a) and the right sliding module (e) respectively, and the longitudinal scale (j) and the measuring needle (m) can synchronously slide left and right along the slideway (c) along with the measuring needle sliding module (n);
the standard calibration plate (r) is used for determining the system errors of the left reference positioning needle (b) and the right reference positioning needle (f) and the measuring needle (m) in longitudinal measurement;
the left sliding module (a), the left reference positioning pin (b), the right sliding module (e) and the right reference positioning pin (f) are respectively provided with a left fixing device (g) and a right fixing device (p);
the left bidirectional laser transmitter (d), the right bidirectional laser transmitter (h) and the three-way laser transmitter (k) are used for fixing points on the transverse scale (i) and the longitudinal scale (j) so as to be convenient for reading data.
2. An in-situ non-destructive measurement characterization method based on the in-situ non-destructive measurement device of the degree of concavity and convexity of a substrate surface according to claim 1, characterized by comprising the following steps:
step 1, a left reference positioning needle (b), a right reference positioning needle (f) and a measuring needle (m) are vertically arranged on a standard calibration plate (r) at the same time, a left bidirectional laser emitter (d) and a right bidirectional laser emitter (h) respectively indicate and adjust a left reference positioning needle (b) and a right reference positioning needle (f) fixing device and are fixed at the same horizontal position, and the left reference positioning needle (b) and the right reference positioning needle (f) respectively correspond to a longitudinal scale reading Z d Or Z is h The measuring needle (m) corresponding to a longitudinal scale reading Z k The system error of the calculation measuring device is as follows: s= |z k -Z d I or s= |z k -Z h |；
Step 2, the left reference positioning needle (b) and the right reference positioning needle (f) of the positioned measuring device in the step 1 are placed at the position without obvious concave and convex on the surface of the matrix, the sliding module (n) of the measuring needle is adjusted to measure and characterize a certain point on the surface of the matrix, and the multi-point between two points of the left reference positioning needle (b) and the right reference positioning needle (f) can be measured and characterized, even the multi-point on a certain surface of the matrix is measured and characterized, and the Z is marked as kn ，n＝1、2、3……；
Step 3, according to formula h=z kn -S or h=z kn -|Z k -Z b I or h=z kn -|Z k -Z h I calculating the concave-convex height H of the surface of the substrate, and when H>0, wherein the measuring point is higher than the base body datum plane, namely the bulge; when h=0, represent measurementThe measuring point is a basal body datum plane, namely a plane point; when H is<0, the measuring point is lower than the base body datum plane, namely a concave point;
step 4, characterizing the concave-convex degree of a certain point on the surface of the substrate according to the concave-convex height H of the surface of the substrate measured and calculated in the step 3; when the left reference positioning needle (b) and the right reference positioning needle (f) are measured and calculated at multiple points between two points and segments, the reading of the transverse scale corresponding to the left reference positioning needle (b) is taken as the origin, namely X d With the reading X of the transverse scale corresponding to the measuring needle (m) k And X is d Is X coordinate to measure the longitudinal scale reading Z corresponding to the needle (m) kn Drawing a two-dimensional curve for the Y coordinate to represent the concave-convex degree of a certain line segment on the surface of the matrix; when one surface is selected for multipoint measurement and calculation, the reading of the transverse scale corresponding to the left reference positioning needle (b) is taken as the origin, namely X d With the reading X of the transverse scale corresponding to the measuring needle (m) k And X is d The difference value of (a) is X coordinate, the rectangular plate is translated up and down along the origin is Y coordinate, and the longitudinal scale reading Z corresponding to the needle (m) is measured kn And drawing a three-dimensional stereo graph by adopting drawing software to represent the concave-convex degree of one surface for the Z coordinate.
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| CN111462105B (en) * | 2020-04-08 | 2023-06-30 | 深圳市华星光电半导体显示技术有限公司 | Method for measuring sawtooth degree of edge pixels |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| US8111405B2 (en) * | 2009-08-26 | 2012-02-07 | National Formosa University | Automatic scan and mark apparatus |
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| WO2009158004A1 (en) * | 2008-06-27 | 2009-12-30 | Hexagon Metrology, Inc. | Hysteresis compensation in a coordinate measurement machine |
| CN203798321U (en) * | 2014-04-30 | 2014-08-27 | 国家电网公司 | Wall surface or ground surface flatness measuring device |
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